Integrated temperature relative humidity sensor

A relative humidity and sensor technology, applied in the field of sensors, can solve the problems of adsorption and resolution length, and achieve the effect of easy implementation and simple structure

CN105783993BInactive Publication Date: 2018-01-30上海霸通电子有限公司
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
Publication Date
2018-01-30
Estimated Expiration
Not applicable · inactive patent

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Abstract

The invention discloses a temperature and relative humidity integrated sensor, which belongs to the technical field of sensors, and comprises a semiconductor detection unit, a secondary conversion unit, a signal processing unit and a display, wherein the semiconductor detection unit is provided with two semiconductor strain gauges Repsilon1 and Repsilon2 arranged on a diaphragm with a radius to be r0; each semiconductor strain gauge is compressed and then changed to output a resistance response; the output end of the semiconductor detection unit is connected with the secondary conversion unit; the secondary conversion unit receives an output signal of the semiconductor detection unit; the secondary conversion unit converts the resistance response to a pulse width signal; the output end of the secondary conversion unit is connected with the signal processing unit; the signal processing unit decouples and analyzes the output signal of the secondary conversion unit; and the display is connected with the signal processing unit for displaying the temperature, the relative humidity and the atmospheric pressure of a mounting point. The problem of long time delay during water vapor adsorption and analysis processes by the traditional humidity sensor can be solved, the response is quick, and the elastic element system has a simple structure.
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Description

technical field

[0001] The invention belongs to the technical field of sensors and relates to an integrated sensor, in particular to an integrated temperature and relative humidity sensor for simultaneously measuring the temperature, relative humidity and atmospheric pressure of an installation environment. Background technique

[0002] A sensor is a detection device that can feel the measured information, and can convert the detected information into electrical signals or other required forms of information output according to certain rules, so as to meet the needs of information transmission, processing, storage, display, recording and control requirements. It is the first link to realize automatic detection and automatic control.

[0003] Micro-integrated multi-sensor is one of the important directions of sensor technology research and development. Temperature, humidity and atmospheric pressure are important physical quantities in environmental and atmospheric monitorin...

Examples

Embodiment Construction

[0020] Referring to the accompanying drawings, through the description of the embodiments, the specific embodiments of the present invention include the shape, structure, mutual position and connection relationship of each part, the function and working principle of each part, and the manufacturing process of the various components involved. And the method of operation and use, etc., are described in further detail to help those skilled in the art have a more complete, accurate and in-depth understanding of the inventive concepts and technical solutions of the present invention.

[0021] The present invention provides an integrated temperature and relative humidity sensor, using the analytical method to separate the corresponding conversion response from a variety of factor excitations, designing a dry air sealed cavity composed of an elastic diaphragm and a cup row support, and in the outer surface of the diaphragm Semiconductor strain gauges are respectively arranged at the c...