A three-dimensional active vibration reduction control method and system

Abstract

The present application discloses a three-dimensional active vibration reduction control method and system, the method comprising: performing feedback operation on a three-dimensional vibration signal in a vertical direction and two horizontal directions output by a three-dimensional active vibration reduction device, and outputting a three-dimensional voltage signal; converting the voltage signal into a current signal, and the current signal is used for vibration reduction of the three-dimensional active vibration reduction device. The present application can calculate the vibration on the measured platform, obtain a feedback signal, and drive the three-dimensional active vibration reduction device based on the feedback signal to offset the residual vibration, so as to improve the vibration isolation effect, thereby improving the measurement accuracy of precision instruments. Compared with the existing passive vibration isolation, its vibration isolation capability is greatly enhanced, so that it can meet very stringent vibration isolation requirements.

Description

Technical Field

[0001] The present application relates to the field of vibration reduction technology, and in particular to a three-dimensional active vibration reduction control method and system. Background Art

[0002] For high-precision equipment, vibration will have a significant impact on it, especially for those precision equipment that are sensitive to weak ground vibration. Since all instruments will directly or indirectly contact the ground, they can only be decoupled from ground vibration through vibration isolation equipment.

[0003] At present, passive vibration reduction devices are mainly used to reduce the impact of vibration on instruments. Although the passive vibration reduction device has a relatively simple structure and relatively stable mechanical properties, the lowest eigenfrequency it can reach is limited. Since it can only isolate or suppress vibrations above its eigenfrequency, it will strengthen the vibration at its eigenfrequency, which greatly limits its vibration isolation ability.

[0004] Therefore, how to effectively reduce the impact of vibration on measuring instruments is an urgent problem to be solved. Summary of the invention

[0005] In view of this, the present application provides a three-dimensional active vibration reduction control method, which can calculate the vibration on the measured platform to obtain a feedback signal, and drive the three-dimensional active vibration reduction device based on the feedback signal to offset the residual vibration, so as to improve the vibration isolation effect, thereby improving the measurement accuracy of precision instruments. Compared with the existing passive vibration isolation, its vibration isolation capability is greatly enhanced, thereby being able to meet very stringent vibration isolation requirements.

[0006] The present application provides a three-dimensional active vibration reduction control method, which is applied to a three-dimensional active vibration reduction device, and the method comprises:

[0007] Performing feedback operation on the vibration signals in three dimensions, namely, one vertical direction and two horizontal directions, outputted by the three-dimensional active vibration reduction device, and outputting voltage signals in three dimensions;

[0008] The voltage signal is converted into a current signal, and the current signal is used for vibration reduction by the three-dimensional active vibration reduction device.

[0009] Preferably, the method further comprises:

[0010] Set feedback parameters.

[0011] Preferably, the performing feedback operation on the vibration signals in three dimensions in one vertical direction and two horizontal directions output by the three-dimensional active vibration reduction device to output voltage signals in three dimensions comprises:

[0012] Performing low-noise voltage amplification on the received vibration signals in three dimensions, namely, one vertical direction and two horizontal directions;

[0013] Convert the signal after low-noise voltage amplification into a digital signal;

[0014] Based on the set feedback parameters, feedback operation is performed on the digital signal to obtain three output signals;

[0015] The three output signals are converted into three voltage signals for output.

[0016] Preferably, the method further comprises:

[0017] Monitor and / or record vibration signatures.

[0018] A three-dimensional active vibration reduction control system is applied to a three-dimensional active vibration reduction device, and the system comprises:

[0019] A feedback control system, used for performing feedback operation on vibration signals in three dimensions, namely, one vertical direction and two horizontal directions, outputted by the three-dimensional active vibration reduction device, and outputting voltage signals in three dimensions;

[0020] The voltage-controlled current source module is used to convert the voltage signal into a current signal, and the current signal is used for vibration reduction by the three-dimensional active vibration reduction device.

[0021] Preferably, the system further comprises:

[0022] Human-computer interaction module, used to set feedback parameters.

[0023] Preferably, the feedback control system comprises:

[0024] A low-noise voltage amplification module, used for respectively performing low-noise voltage amplification on vibration signals in three dimensions, namely, one vertical direction and two horizontal directions, output by the three-dimensional active vibration reduction device;

[0025] An analog-to-digital conversion module, used for converting the signal after low-noise voltage amplification into a digital signal;

[0026] A feedback operation module, used for performing feedback operation on the digital signal based on the set feedback parameters to obtain three output signals;

[0027] The digital-to-analog conversion module is used to convert the three output signals into three voltage signal outputs.

[0028] Preferably, the human-computer interaction module is also used for:

[0029] Monitor and / or record vibration signatures.

[0030] Preferably, the three-dimensional active vibration reduction device comprises: a vibration reduction platform table, a vibration measurement module, a vertical voice coil motor, a horizontal voice coil motor, a main vibration reduction spring, a horizontal vibration reduction spring and a vibration reduction platform base; wherein:

[0031] The vibration reduction platform table top is connected to the vibration reduction platform base through the main vibration reduction spring and the horizontal vibration reduction spring;

[0032] The vibration measurement module is fixed on the vibration reduction platform surface, and the vibration measurement module is used to measure and output vibration signals in three dimensions: a vertical direction and two horizontal directions;

[0033] One end of the main damping spring is connected to the damping platform surface, and the other end is connected to the damping platform base;

[0034] One end of the vertical voice coil motor is connected to the vibration reduction platform table, and the other end is connected to the vibration reduction platform base, and is perpendicular to the vibration reduction platform table. The vertical voice coil motor is used to generate a force opposite to the vertical movement direction of the vibration reduction platform table according to the current signal;

[0035] One end of the horizontal voice coil motor is connected to the vibration reduction platform surface, and the other end is connected to the vibration reduction platform base, and is parallel to the vibration reduction platform surface. The vertical voice coil motor is used to generate a force opposite to the horizontal movement direction of the vibration reduction platform surface according to the current signal.

[0036] Preferably, there are two vertical voice coil motors and two horizontal voice coil motors.

[0037] In summary, the present application discloses a three-dimensional active vibration reduction control method. When three-dimensional active vibration reduction is required, firstly, the vibration signals of three dimensions in one vertical direction and two horizontal directions output by the three-dimensional active vibration reduction device are feedback operated to output three-dimensional feedback voltage signals, and then the output three-dimensional voltage signals are respectively converted into three current signals, and the three-dimensional active vibration reduction device is controlled to perform vibration reduction operation through the three current signals. The present application can calculate the vibration on the measured platform to obtain a feedback signal, and drive the three-dimensional active vibration reduction device based on the feedback signal to offset the residual vibration, so as to improve the vibration isolation effect, thereby improving the measurement accuracy of precision instruments. Compared with the existing passive vibration isolation, its vibration isolation capability is greatly enhanced, so that it can meet very stringent vibration isolation requirements. BRIEF DESCRIPTION OF THE DRAWINGS

[0038] In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0039] Figure 1 A flow chart of a three-dimensional active vibration reduction control method disclosed in this application;

[0040] Figure 2 A schematic diagram of the structure of a three-dimensional active vibration reduction control system disclosed in this application;

[0041] Figure 3 A schematic diagram of the structure of a feedback control algorithm of a three-dimensional active vibration reduction control system disclosed in this application;

[0042] Figure 4 A schematic diagram of the horizontal mechanical principle of a three-dimensional active vibration reduction control system disclosed in this application;

[0043] Figure 5 A schematic diagram of the vertical mechanical principle of a three-dimensional active vibration reduction control system disclosed in this application;

[0044] Figure 6 This is a comparison diagram of the vertical vibration reduction effect of a three-dimensional active vibration reduction control system disclosed in this application. DETAILED DESCRIPTION

[0045] The following will be combined with the drawings in the embodiments of the present application to clearly and completely describe the technical solutions in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, not all of the embodiments. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of this application.

[0046] like Figure 1 FIG. 1 is a flow chart of a three-dimensional active vibration reduction control method disclosed in the present application, wherein the method comprises the following steps:

[0047] S101, performing feedback operation on vibration signals in three dimensions, one vertical direction and two horizontal directions, outputted by the three-dimensional active vibration reduction device, and outputting voltage signals in three dimensions;

[0048] S102, converting the voltage signal into a current signal, and using the current signal for vibration reduction by the three-dimensional active vibration reduction device.

[0049] Specifically, the method is performed by a three-dimensional active vibration reduction control system. Figure 2As shown, the three-dimensional active vibration reduction control system disclosed in the present application is suitable for isolating the influence of ground vibration on high-precision instruments, including: a vibration reduction platform table 1, which is an important seismic isolation element in the three-dimensional active vibration reduction system;

[0050] A vibration measurement module 2, used to measure vibration in three dimensions, one vertical direction and two horizontal directions;

[0051] A feedback control system 3, used for feedback operation of an input voltage signal to obtain an output feedback voltage signal;

[0052] Human-computer interaction module 4, used for monitoring and recording vibration signals and setting feedback parameters;

[0053] The voltage-controlled current source module 5 is used to convert the voltage signal into a current signal to drive the voice coil motor;

[0054] A vertical voice coil motor 6, used to generate a force opposite to the vertical movement direction of the vibration reduction platform table 1;

[0055] A horizontal voice coil motor 7, used to generate a force opposite to the horizontal movement direction of the vibration reduction platform table 1;

[0056] Main damping spring 8, used for passive damping in the vertical direction;

[0057] Horizontal vibration damping spring 9, used for passive vibration damping in two orthogonal horizontal directions;

[0058] The passive vibration reduction platform base 10 is used to fix the vertical voice coil motor 6 and the horizontal voice coil motor 7 .

[0059] The vibration reduction platform table top 1 is connected to the passive vibration reduction platform base 10 through the main vibration reduction spring 8 and the horizontal vibration reduction spring 9, realizing passive vibration reduction in three dimensions, namely, one vertical and two horizontal dimensions, and completing the preliminary vibration reduction of the vibration reduction platform table top 1.

[0060] The vibration measurement module 2 is rigidly fixed on the vibration reduction platform table 1. The vibration measurement module 2 measures and outputs vibrations in three orthogonal directions, namely, one vertical and two horizontal directions. The signals in these three dimensions enter the feedback control system 3. The feedback control system 3 uses the three-dimensional input signals to perform feedback operations to obtain three-dimensional feedback signals. The human-computer interaction module 4 sets the feedback parameters in the feedback operation module in the feedback control system 3, and monitors and stores the current vibration signal in real time. The feedback control system 3 outputs three-dimensional voltage signals, which are converted into current signals corresponding to the three dimensions by the voltage-controlled current source module 5 to drive the vertical voice coil motor 6 and the horizontal voice coil motor 7 to generate three-dimensional forces to offset the residual vibration.

[0061] The feedback control system 3 comprises a low-noise voltage amplification module, an analog-to-digital conversion module, a feedback operation module and a digital-to-analog conversion module. After the three-dimensional signals enter the feedback control system 3, the low-noise voltage amplification module first performs low-noise voltage amplification on the signals in the three directions, and then converts them into digital signals through the analog-to-digital conversion module and sends them to the feedback operation module. The feedback operation module uses the feedback control algorithm to perform feedback operation on the input signals in the three directions to obtain three output signals. The three output digital signals are converted into three voltage signals for output through the digital-to-analog conversion module.

[0062] like Figure 3 As shown, it is the structural diagram of the feedback control algorithm. The feedback control algorithm has three input signals, input 1, input 2, and input 3, which are marked as u1, u2, and u3 respectively, and their frequency domain representations are U1, U2, and U3 respectively, and three output signals, output 1, output 2, and output 3, which are marked as v1, v2, and v3 respectively, and their frequency domain representations are V1, V2, and V3 respectively. Input 1 and output 1 correspond to the input signal and feedback output signal in the vertical direction respectively. Input 2 and output 2 correspond to the input signal and feedback output signal in the horizontal direction respectively. Input 3 and output 3 correspond to the input signal and feedback output signal in the horizontal direction orthogonal to input 2 respectively. The high-pass filters 1-5 in the figure are marked as H1, H2, H3, H4, and H5 respectively, the low-pass filters 1-2 are marked as L1 and L2 respectively, the coupling coefficients 1-3 are marked as α1, α2, and α3 respectively, and the feedback gains 1-4 are marked as A1, A2, A3, and A4 respectively. The vertical component of ground vibration that affects high-precision instruments is the main component. Vertical vibration is the main target of active vibration reduction, which requires that the feedback signal of output 1 has a stronger suppression effect on vibration. The feedback control algorithm uses the addition of two feedback signals to achieve a stronger feedback suppression effect. The feedback signal of output 2 and the feedback signal of output 3 each contain only one feedback signal.

[0063] The horizontal schematic diagram of the theoretical principle of this application is as follows: Figure 4 As shown, the mechanical equation in the horizontal direction is as follows:

[0064]

[0065] The total mass of the vibration reduction platform table 1 and the vibration measurement module 2 is m, and the stiffness of the horizontal vibration reduction spring 9 is k x , the damping coefficient is c x , the horizontal displacement of the vibration reduction platform surface 1 is x, and the horizontal displacement of the passive vibration reduction platform base 10 is x g Since the passive vibration reduction platform base 10 is placed directly on the ground, its displacement represents the vibration of the ground. The force applied by the horizontal voice coil motor 7 to the vibration reduction platform surface 1 is F x When Fx and When F is proportional, it is equivalent to changing the damping of the mechanical system. x and When the integral term is proportional to , it is equivalent to changing the eigenfrequency of the mechanical system.

[0066] The feedback control algorithm of the horizontal direction of the feedback control system is that the horizontal signal passes through a high-pass filter and then multiplies it by the gain coefficient. This high-pass filter is used to filter out the false signal in the low-frequency band of the output signal of the vibration measurement module 2. The cutoff frequency can be adjusted according to the specific vibration measurement module. The horizontal feedback control algorithm is:

[0067] V2=A3H4U2

[0068] V3=A4H5U3

[0069] The vertical theoretical principle diagram of this application is as follows: Figure 5 As shown, the mechanical equation in the vertical direction is as follows:

[0070]

[0071] The total mass of the vibration reduction platform table 1 and the vibration measurement module 2 is m, and the stiffness of the main vibration reduction spring 8 in the vertical direction is k z , the damping coefficient is c z , the vertical displacement of the vibration reduction platform table 1 is z, and the vertical displacement of the passive vibration reduction platform base 10 is z g Since the passive vibration reduction platform base 10 is placed directly on the ground, its displacement represents the vibration of the ground. The force applied by the voice coil motor to the vibration reduction platform surface 1 is F z The feedback control algorithm is based on the measured To control the force F z To achieve the purpose of feedback control, when F z and When proportional, it is equivalent to changing the damping coefficient c of the system z , when F z and When the integral of is proportional to the system's intrinsic frequency, z for as well as More complex control can be achieved by combining higher-order derivatives or integrals.

[0072] The feedback control algorithm of the feedback control system in the vertical direction consists of the following two feedback signals:

[0073] The first feedback signal is obtained by multiplying one vertical signal and two orthogonal horizontal signals by their respective coefficients, adding them together, passing through a high-pass filter, and then multiplying them by the gain coefficient, which is A2H3 (α1U1+α2U2+α3U3). It is particularly important to note that when the horizontal signal is not coupled to the vertical direction and high-gain feedback control is performed on the vertical direction alone, it is found that low-frequency oscillations will occur in the horizontal and vertical directions and will excite each other, resulting in feedback collapse. This shows that the vibration coupling in the horizontal and vertical directions of the passive platform mechanics will lead to mutual influence in the three directions. In order to solve this problem, in addition to the signal A2H3α1U1 that directly filters out the low-frequency false components of the vertical signal and feeds it back, the feedback control algorithm also adds a horizontal component A2H3 (α2U2+α3U3). This item has two main functions. First, it feeds back to the vertical direction immediately after the horizontal low-frequency oscillation, suppresses the low-frequency oscillation signal in the vertical direction, and thus cuts off the mutual excitation of the low-frequency oscillations in the horizontal and vertical directions, thereby ensuring the stability of the feedback system. Second, it uses the linear combination of the measured three-dimensional signals to obtain the vibration corresponding to the direction of the feedback force, thereby achieving a better vibration suppression effect.

[0074] The second feedback signal is obtained by passing a vertical signal through two high-pass filters and two low-pass filters respectively, and then multiplying it by the gain coefficient, that is, A1L2L1H2H1U1. This signal uses two high-pass filters and two low-pass filters to form a band-pass filter to further suppress the vibration of a specific frequency band, thereby achieving a better vibration reduction effect;

[0075] The final vertical feedback signal is the sum of the two signals, that is:

[0076] V1=A2H3(α1U1+α2U2+α3U3)+A1L2L1H2H1U1

[0077] The present invention is further described below with a specific embodiment. It should be noted that the numerical value appearing in this embodiment does not limit the scope of the present invention, and any specific value should be interpreted as being merely exemplary, rather than as a limitation. Therefore, other examples of exemplary embodiments may have different values.

[0078] In a specific embodiment, the present application uses the following parameters to implement feedback control. The following table shows the specific parameters used by the filter in the horizontal direction of this embodiment:

[0079] filter Gain Cut-off frequency (Hz) <![CDATA[H4]]> 10 0.1 <![CDATA[H5]]> 10 0.1

[0080] Horizontal feedback coefficients A3=0.03, A4=0.03.

[0081] The following table shows the specific parameters used by the filter in the vertical direction of this embodiment:

[0082] filter Gain Cut-off frequency (Hz) <![CDATA[H1]]> 10 0.5 <![CDATA[H2]]> 10 0.5 <![CDATA[H3]]> 10 0.001 <![CDATA[L1]]> 10 6 <![CDATA[L2]]> 10 6

[0083] Feedback coefficient A1=0.09, A2=11, coupling coefficient α1=1, α2=0.01, α3=0.01.

[0084] After operating the three-dimensional active vibration reduction system using the above parameter values, its ability to isolate environmental vibrations was compared.

[0085] like Figure 6 As shown, it is a comparison diagram of the vibration reduction effect of the three-dimensional active shock absorption control system in the vertical direction. A power spectrum density comparison diagram is made using the vibration signals measured on the ground, on the passive platform without running the feedback control system, and on the passive platform with running the feedback control system. The horizontal axis is the frequency of the ground vibration, and the vertical axis represents the intensity of the vibration at the corresponding frequency. It can be seen from the figure that the present application has a very good isolation effect on ground vibration, especially for ground vibration of 0.1 to 10 Hz, which is suppressed by about 3 to 4 orders of magnitude.

[0086] In this specification, each embodiment is described in a progressive manner, and each embodiment focuses on the differences from other embodiments. The same or similar parts between the embodiments can be referred to each other. For the device disclosed in the embodiment, since it corresponds to the method disclosed in the embodiment, the description is relatively simple, and the relevant parts can be referred to the method part.

[0087] Professionals may further appreciate that the units and algorithm steps of each example described in conjunction with the embodiments disclosed herein can be implemented in electronic hardware, computer software, or a combination of the two. In order to clearly illustrate the interchangeability of hardware and software, the composition and steps of each example have been generally described in the above description according to function. Whether these functions are performed in hardware or software depends on the specific application and design constraints of the technical solution. Professionals and technicians may use different methods to implement the described functions for each specific application, but such implementation should not be considered to be beyond the scope of this application.

[0088] The steps of the method or algorithm described in conjunction with the embodiments disclosed herein may be implemented directly using hardware, a software module executed by a processor, or a combination of the two. The software module may be placed in a random access memory (RAM), a memory, a read-only memory (ROM), an electrically programmable ROM, an electrically erasable programmable ROM, a register, a hard disk, a removable disk, a CD-ROM, or any other form of storage medium known in the art.

[0089] The above description of the disclosed embodiments enables those skilled in the art to implement or use the present application. Various modifications to these embodiments will be apparent to those skilled in the art, and the general principles defined herein may be implemented in other embodiments without departing from the spirit or scope of the present application. Therefore, the present application will not be limited to the embodiments shown herein.

[0090] Rather, it is to be accorded the widest scope consistent with the principles and novel features disclosed herein.

Claims

1. A three-dimensional active vibration reduction control method, characterized in that: Applied to a three-dimensional active vibration reduction device, the method comprises: Feedback operation is performed on the three-dimensional vibration signals of one vertical direction and two horizontal directions output by the three-dimensional active vibration reduction device to output a three-dimensional voltage signal; the two horizontal directions are orthogonal directions; the three-dimensional voltage signals include a vertical voltage signal and two horizontal voltage signals; wherein, after the horizontal vibration signal passes through the corresponding high-pass filter, it is multiplied by the corresponding gain coefficient to obtain a horizontal voltage signal; the vertical vibration signal and the two horizontal vibration signals are multiplied by their respective coupling coefficients and added, and then passed through the same high-pass filter and multiplied by the gain coefficient corresponding to the high-pass filter to obtain a first feedback signal; the vertical vibration signal passes through two high-pass filters and two low-pass filters, and is multiplied by the corresponding gain coefficient to obtain a second feedback signal; the vertical voltage signal is the sum of the first feedback signal and the second feedback signal; The voltage signal is converted into a current signal, and the current signal is used for vibration reduction by the three-dimensional active vibration reduction device.

2. The method according to claim 1, characterized in that Also includes: Set feedback parameters.

3. The method according to claim 2, characterized in that Feedback operation is performed on the vibration signals of three dimensions in one vertical direction and two horizontal directions output by the three-dimensional active vibration reduction device, and the output voltage signals of three dimensions include: Performing low-noise voltage amplification on the vibration signals in three dimensions, namely, one vertical direction and two horizontal directions, output by the three-dimensional active vibration reduction device; Convert the signal after low-noise voltage amplification into a digital signal; Based on the set feedback parameters, feedback operation is performed on the digital signal to obtain three output signals; The three output signals are converted into three voltage signals for output.

4. The method according to claim 3, characterized in that Also includes: Monitor and / or record vibration signatures.

5. A three-dimensional active vibration reduction control system, characterized in that: Applied to a three-dimensional active vibration reduction device, the system comprises: A feedback control system, used for performing feedback operation on the three-dimensional vibration signals of one vertical direction and two horizontal directions output by the three-dimensional active vibration reduction device, and outputting three-dimensional voltage signals; the two horizontal directions are orthogonal directions; the three-dimensional voltage signals include a vertical voltage signal and two horizontal voltage signals; wherein, after the horizontal vibration signal passes through the corresponding high-pass filter, it is multiplied by the corresponding gain coefficient to obtain a horizontal voltage signal; the vertical vibration signal and the two horizontal vibration signals are respectively multiplied by their respective coupling coefficients and added, and then passed through the same high-pass filter and multiplied by the gain coefficient corresponding to the high-pass filter to obtain a first feedback signal; the vertical vibration signal passes through two high-pass filters and two low-pass filters, and is multiplied by the corresponding gain coefficient to obtain a second feedback signal; the vertical voltage signal is the sum of the first feedback signal and the second feedback signal; The voltage-controlled current source module is used to convert the voltage signal into a current signal, and the current signal is used for vibration reduction by the three-dimensional active vibration reduction device.

6. The system according to claim 5, characterized in that Also includes: Human-computer interaction module, used to set feedback parameters.

7. The system according to claim 6, characterized in that The feedback control system comprises: A low-noise voltage amplification module, used for respectively performing low-noise voltage amplification on vibration signals in three dimensions, namely, one vertical direction and two horizontal directions, output by the three-dimensional active vibration reduction device; An analog-to-digital conversion module, used for converting the signal after low-noise voltage amplification into a digital signal; A feedback operation module, used for performing feedback operation on the digital signal based on the set feedback parameters to obtain three output signals; The digital-to-analog conversion module is used to convert the three output signals into three voltage signal outputs.

8. The system according to claim 7, characterized in that The human-computer interaction module is also used for: Monitor and / or record vibration signatures.

9. The system according to claim 8, characterized in that The three-dimensional active vibration reduction device comprises: a vibration reduction platform table, a vibration measurement module, a vertical voice coil motor, a horizontal voice coil motor, a main vibration reduction spring, a horizontal vibration reduction spring and a vibration reduction platform base; wherein: The vibration reduction platform table top is connected to the vibration reduction platform base through the main vibration reduction spring and the horizontal vibration reduction spring; The vibration measurement module is fixed on the vibration reduction platform surface, and the vibration measurement module is used to measure and output vibration signals in three dimensions: a vertical direction and two horizontal directions; One end of the main damping spring is connected to the damping platform surface, and the other end is connected to the damping platform base; One end of the vertical voice coil motor is connected to the vibration reduction platform table, and the other end is connected to the vibration reduction platform base, and is perpendicular to the vibration reduction platform table. The vertical voice coil motor is used to generate a force opposite to the vertical movement direction of the vibration reduction platform table according to the current signal; The horizontal voice coil motor is connected to the vibration reduction platform surface at one end and to the vibration reduction platform base at the other end, and is parallel to the vibration reduction platform surface. The vertical voice coil motor is used to generate a force opposite to the horizontal movement direction of the vibration reduction platform surface according to the current signal.

10. The system according to claim 9, characterized in that The number of the vertical voice coil motors is two, and the number of the horizontal voice coil motors is two.

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