A miniature piezoelectric gas compressor driven by a hybrid cavity

Abstract

The present invention belongs to the technical field of micro gas compressors, and particularly relates to a micro piezoelectric gas compressor driven by a hybrid cavity. The whole is composed of a sleeve, an upper cover, an upper plate, a lower plate, a lower cover, a first driving block, a second driving block, a third driving block, a sealing ring, and a cooling sleeve. A first driving block is installed between the lower end face of the upper cover and the upper end face of the upper plate, a second driving block is installed between the lower end face of the upper plate and the upper end face of the lower plate, and a third driving block is installed between the lower end face of the lower plate and the upper end face of the lower cover. The first driving block includes three first piezoelectric vibrators, the second driving block includes two second piezoelectric vibrators, and the third driving block includes one third piezoelectric vibrator. Features and advantages: Gas accumulation and pressurization are achieved by the decreasing number of internal cavities in each driving block. It can simultaneously achieve large flow rate and large pressure during operation, and the overall structure composed of piezoelectric vibrators, check valves, and cover plates is simple and has low cost.

Description

Technical Field

[0001] The present invention belongs to the technical field of micro gas compressors, and particularly relates to a micro piezoelectric gas compressor driven by a hybrid cavity. Background Art

[0002] Due to the advantages of small size, compact structure, and high control precision of micro compressors, they have been widely used in fields such as electronic cooling, chemical synthesis, gas transportation, and aerospace. Chinese Patent CN105321404A proposes an electromagnetic compressor, which mainly includes a fixed housing, an intake pipe, an outlet pipe, a cylinder, a piston, a transmission frame, an armature core, and an electromagnetic coil. This electromagnetic compressor is easy to control and has a large electromagnetic force. Chinese Patent CN207048923U proposes a single-driven micro circular compressor for natural gas, which adopts a vertical structure for the compressor structure design and is driven by a motor. It has a small floor area and is convenient for maintenance and handling. However, the micro gas compressor driven by a motor has a complex structure, a large volume, high power consumption, and electromagnetic interference, and is not suitable for system integration and miniaturization. People have successively proposed pneumatic and electrostatic-driven gas compressors. Among them, the pneumatic type requires a separate gas source for driving and cannot be used for portable or independent instrument equipment. The electrostatic-driven type is difficult to output high-pressure gas because the diaphragm driving force is small and high voltage is required for driving.

[0003] The micro piezoelectric gas compressor has a simple structure, low power consumption, high energy density, no electromagnetic interference, and is easy to control, which is an effective method for constructing a micro gas compressor. However, most of the existing micro piezoelectric gas compressors are of single cavity structure, resulting in insufficient pressure boosting ability of the compressor, and can only reach the pressure level for pumping fluids. Moreover, due to the compressibility of gases and the limitation of the driving ability of a single piezoelectric oscillator itself, its energy density is not high, thus restricting the practical application of micro piezoelectric gas compressors. Summary of the Invention

[0004] In view of the deficiencies of existing micro piezoelectric gas compressors, the present invention proposes a micro piezoelectric gas compressor driven by a hybrid cavity (hereinafter simply referred to as the micro piezoelectric gas compressor), and adopts the following technical solutions: It is integrally composed of a sleeve, an upper cover, an upper plate, a lower plate, a lower cover, a first driving block, a second driving block, a third driving block, a sealing ring, and a cooling sleeve; The upper cover, the upper plate, the lower plate, and the lower cover are connected in sequence from top to bottom; A first driving block is installed between the upper cover and the upper plate; The first driving block includes three gas compression units, and the three gas compression units are evenly distributed between the upper cover and the upper plate. Each gas compression unit is composed of a first piezoelectric vibrator, a first one-way valve, an upper cavity, and a sealing ring; Upper cavities are provided on the upper plate in the directions of the three groups of first piezoelectric vibrators. The three groups of first piezoelectric vibrators can drive to realize the volume change of their corresponding three groups of upper cavities, thereby realizing the gas drive in the cavity; A second driving block is installed between the upper plate and the lower plate; The second driving block includes two gas compression units, and the two gas compression units are evenly distributed between the upper plate and the lower plate. Each gas compression unit is composed of a second piezoelectric vibrator, a middle cavity, a second one-way valve, and a sealing ring; Middle cavities are provided on the lower plate in the directions of the two groups of second piezoelectric vibrators. The deformation of the two groups of second piezoelectric vibrators can realize the volume change of their corresponding two groups of middle cavities, thereby realizing the gas drive in the cavity; A third driving block is installed between the lower plate and the lower cover; The third driving block includes one gas compression unit, and the gas compression unit is composed of a third piezoelectric vibrator, a lower cavity, a third one-way valve, and a sealing ring; A lower cavity is provided on the lower cover in the direction of the third piezoelectric vibrator. The deformation of the third piezoelectric vibrator can realize the volume change of its corresponding lower cavity, thereby realizing the gas drive in the cavity; It should be noted that the gas compression units included in the first driving block, the second driving block, and the third driving block have exactly the same structure; The upper cover is provided with a gas inlet, and a first air flow channel is provided inside the upper cover and the upper plate; One end of the first air flow channel is connected to the gas inlet, and the other end is connected to the three groups of upper cavities; A first one-way valve is provided between the first air flow channel and each of the three groups of upper cavities, and the first one-way valve realizes the one-way flow of gas from the gas inlet to the upper cavity; A second air flow channel is provided inside the upper plate and the lower plate; One end of the second air flow channel is connected to the three groups of upper cavities, and the other end is connected to the two groups of middle cavities; A second one-way valve is provided between the second channel and each of the two groups of middle cavities, and the second one-way valve realizes the one-way flow of gas from the upper cavity to the middle cavity; A third air flow channel is provided inside the lower plate and the lower cover; One end of the third air flow channel is connected to the two groups of middle cavities, and the other end is connected to the lower cavity; A third one-way valve is provided between the third channel and the lower cavity, and the third one-way valve realizes the one-way flow of gas from the middle cavity to the lower cavity; A gas outlet is provided inside the lower cover; An outlet valve is provided between the gas outlet and the lower cavity, and the outlet valve realizes the one-way flow of gas from the lower cavity to the gas outlet; The first piezoelectric vibrator, the second piezoelectric vibrator, and the third piezoelectric vibrator are all concentrically bonded by a metal substrate and a piezoelectric ceramic sheet;A sealing ring is installed on one side of the first piezoelectric vibrator, the second piezoelectric vibrator, and the third piezoelectric vibrator facing the cavity to ensure the tightness of the corresponding cavity. The number of the first piezoelectric vibrator, the second piezoelectric vibrator, and the third piezoelectric vibrator decreases in turn, and the number of the corresponding upper cavity, middle cavity, and lower cavity also decreases in turn, that is, the number of gas compression units decreases along the gas flow direction, and the step-by-step cumulative compression of the compressor can be realized. It should be noted here that the so-called hybrid cavity drive means that the number of the first piezoelectric vibrator, the second piezoelectric vibrator, and the third piezoelectric vibrator is arranged in a stepped manner from top to bottom to form a series cavity with the number of the upper cavity, middle cavity, and lower cavity decreasing step by step. At the same time, each independent gas compression unit included in the first drive block, the second drive block, and the third drive block respectively forms a parallel cavity. To effectively dissipate heat when the micro piezoelectric gas compressor works, a cooling sleeve is arranged outside the micro piezoelectric gas compressor. The cooling sleeve is sleeved on the periphery of the connection body of the upper cover, the upper plate, the lower plate, and the lower cover and is in full contact with the surface of the periphery of the connection body of the upper cover, the upper plate, the lower plate, and the lower cover, and a heat-conducting adhesive is applied to the contact surface. It should be noted that the connection body of the upper cover, the upper plate, the lower plate, and the lower cover is the whole formed after the four are connected. A cooling pipe is arranged on the outer surface of the cooling sleeve. The cooling pipe is a spiral cooling pipe. It should be noted that the spiral cooling pipe is arranged to enable the coolant to stay in the cooling sleeve for a longer time and enhance the heat dissipation effect. A sleeve is connected to the periphery of the cooling sleeve, and a coolant inlet and a coolant outlet are arranged on the sleeve. When the micro piezoelectric gas compressor works, the coolant flows in from the coolant inlet, passes through the cooling pipe and flows out from the coolant outlet to take away heat, achieving the heat dissipation effect.

[0005] Due to the limitation of the material properties (brittleness) of the piezoelectric ceramic itself, the diameter of a single piezoelectric vibrator cannot be too large (large deformation) to avoid the rupture of the piezoelectric wafer. Therefore, the volume change of the inlet cavity will be limited (that is, the output flow is limited). The micro piezoelectric gas compressor obtains a large volume change of the inlet cavity through the expansion of the parallel number of gas compression units, breaks through the limitation that the diameter of a single wafer-type piezoelectric vibrator cannot be too large, and can achieve a large flow output. At the same time, the micro piezoelectric gas compressor performs the first-stage compression, the second-stage compression, and the third-stage gas cumulative compression on the gas in the upper cavity, the middle cavity, and the lower cavity respectively. During the high-frequency vibration drive process of the piezoelectric vibrator, there will be a certain amount of gas reverse leakage in the one-way valve. By inhaling a large volume of gas from the previous-stage cavity to sufficiently supply the cumulative compression of the next-stage cavity (the gas supplied more by the previous-stage cavity can make up for the gas reverse leakage of the one-way valve), the gas compression amount of each stage cavity can be effectively accumulated, a large pressure can be obtained, and the micro piezoelectric gas compressor has a large energy density.

[0006] The ideal working process of this embodiment can be divided into an initial state, a first working state, and a second working state.

[0007] Initial state: No alternating voltage is applied, and all piezoelectric vibrators remain undeformed.

[0008] First working state: Apply voltages opposite to the polarization direction of the piezoelectric ceramic sheet to the three first piezoelectric vibrators in the first driving block and the third piezoelectric vibrator in the third driving block, and apply voltages in the same direction as the polarization direction of the piezoelectric ceramic sheet to the two second piezoelectric vibrators in the second driving block; the three first piezoelectric vibrators in the first driving block and the third piezoelectric vibrator in the third driving block vibrate upward, the two second piezoelectric vibrators in the second driving block vibrate downward, the volumes of all upper cavities increase and the pressures inside decrease, the volumes of all middle cavities decrease and the pressures inside increase, the volume of the lower cavity increases and the pressure decreases, prompting all first check valves and third check valves to open, and the gas sequentially enters the upper cavity through the gas inlet and the first gas flow channel; the gas in the middle cavity is pressed into the lower cavity.

[0009] Second working state: Apply voltages in the same direction as the polarization direction of the piezoelectric ceramic sheet to the three first piezoelectric vibrators in the first driving block and the third piezoelectric vibrator in the third driving block, and apply voltages opposite to the polarization direction of the piezoelectric ceramic sheet to the two second piezoelectric vibrators in the second driving block; the three first piezoelectric vibrators in the first driving block and the third piezoelectric vibrator in the third driving block vibrate downward, the two second piezoelectric vibrators in the second driving block vibrate upward, the volumes of all upper cavities decrease and the pressures inside increase, the volumes of all middle cavities increase and the pressures inside decrease, the volume of the lower cavity decreases and the pressure increases, prompting all second check valves and outlet valves to open, and the gas in the upper cavity is pressed into the middle cavity; the high-pressure gas in the lower cavity is discharged through the gas outlet.

[0010] The micro piezoelectric gas compressor performs first-stage compression, second-stage compression, and third-stage gas cumulative compression on the gas in the upper cavity, middle cavity, and lower cavity respectively. By supplying a large volume of gas from the previous-stage cavity to sufficiently supply the effective pressurization of the next-stage cavity and make up for the reverse leakage of the check valve, excellent gas pressurization effect can be obtained through multi-stage cumulative compression; under the continuous drive of the alternating voltage, the first and second working states change repeatedly, and continuous large-flow / high-pressure gas can be output.

[0011] The features and advantages of the present invention are as follows: 1. By expanding the parallel number of gas compression units, a large volume change amount of the inlet cavity is obtained, breaking through the limitation that the diameter of a single piezoelectric vibrator cannot be too large, and large-flow output can be achieved; 2. The cavities of the previous-stage driving block inhale a large amount of gas to sufficiently supply the compression of the cavities of the next-stage driving block, make up for the reverse leakage of the check valve, can effectively accumulate the gas compression amounts of each stage of cavities, have a large energy density and a high energy conversion efficiency, and can achieve high-pressure gas output; 3. The whole is composed of piezoelectric vibrators, check valves, and cover plates, with a simple structure and easy integration. Description of the Drawings

[0012] Figure 1 is the structural sectional view of the initial state in a preferred embodiment of the present invention;

[0013] Figure 2 is the structural sectional view of the first working state in a preferred embodiment of the present invention;

[0014] Figure 3 is the structural sectional view of the second working state in a preferred embodiment of the present invention;

[0015] Figure 4 is the layout diagram of the spiral cooling channels in a preferred embodiment of the present invention.

[0016] Wherein: 1 - sleeve; 11 - coolant inlet; 12 - coolant outlet; 2 - upper cover; 20 - first air flow channel; 21 - gas inlet; 3 - upper plate; 30 - second air flow channel; 31 - upper cavity; 4 - lower plate; 40 - third air flow channel; 41 - middle cavity; 5 - lower cover; 51 - lower cavity; 52 - gas outlet; 61 - first piezoelectric vibrator; 62 - second piezoelectric vibrator; 63 - third piezoelectric vibrator; 6a - piezoelectric ceramic sheet; 6b - metal substrate; 71 - first one-way valve; 72 - second one-way valve; 73 - third one-way valve; 74 - outlet valve; 8 - sealing ring; 9 - cooling sleeve; 91 - cooling channel; 92 - thermal conductive adhesive; I - first drive block; II - second drive block; III - third drive block. Detailed implementation manners

[0017] The technical solutions of the present invention will be clearly and completely described below with reference to the accompanying drawings. It should be noted that the orientation or positional relationships indicated by the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. are based on the orientation or positional relationships shown in the drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus cannot be construed as a limitation to the present invention. In addition, the terms "first", "second", "third" are only used for descriptive purposes and cannot be construed as indicating or implying relative importance.

[0018] In the description of the present invention, it should be noted that unless otherwise clearly defined and limited, the terms "installed", "connected", "connected" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be directly connected or indirectly connected through an intermediate medium, and it can be the communication inside two elements. For those of ordinary skill in the art, the specific meanings of the above terms in the present invention can be understood according to specific situations.

[0019] The following will describe in detail the specific embodiments of the present invention with reference to the accompanying drawings. It should be understood that the specific embodiments described herein are only for the purpose of illustration and explanation of the present invention, and are not intended to limit the present invention.

[0020] Please refer to Figure 1 , Figure 2 , Figure 3 , Figure 4, the present invention provides a micro piezoelectric gas compressor driven by a hybrid cavity. It is integrally composed of a sleeve 1, an upper cover 2, an upper plate 3, a lower plate 4, a lower cover 5, a first driving block I, a second driving block II, a third driving block III, a sealing ring 8, and a cooling sleeve 9. The upper cover 2, the upper plate 3, the lower plate 4, and the lower cover 5 are connected in sequence from top to bottom. A first driving block I is installed between the upper cover 2 and the upper plate 3. The first driving block I includes three gas compression units, and the three gas compression units are evenly distributed between the upper cover 2 and the upper plate 3. Each gas compression unit is composed of a first piezoelectric vibrator 61, a first one-way valve 71, an upper cavity 31, and a sealing ring 8. The upper plate 3 is provided with upper cavities 31 in the direction of the three groups of first piezoelectric vibrators 61. The deformation of the three groups of first piezoelectric vibrators 61 can realize the volume change of their corresponding three groups of upper cavities 31, so as to realize the gas drive in the cavity. A second driving block II is installed between the upper plate 3 and the lower plate 4. The second driving block II includes two gas compression units, and the two gas compression units are evenly distributed between the upper plate 3 and the lower plate 4. Each gas compression unit is composed of a second piezoelectric vibrator 62, a middle cavity 41, a second one-way valve 72, and a sealing ring 8. The lower plate 4 is provided with middle cavities 41 in the direction of the two groups of second piezoelectric vibrators 62. The deformation of the two groups of second piezoelectric vibrators 62 can realize the volume change of their corresponding two groups of middle cavities 41, so as to realize the gas drive in the cavity. A third driving block III is installed between the lower plate 4 and the lower cover 5. The third driving block III includes one gas compression unit, and the gas compression unit is composed of a third piezoelectric vibrator 63, a lower cavity 51, a third one-way valve 73, and a sealing ring 8. The lower cover 5 is provided with a lower cavity 51 in the direction of the third piezoelectric vibrator 63. The deformation of the third piezoelectric vibrator 63 can realize the volume change of its corresponding lower cavity 51, so as to realize the gas drive in the cavity. It should be noted that the gas compression unit structures included in the first driving block I, the second driving block II, and the third driving block III are completely the same. The upper cover 2 is provided with a gas inlet 21, and a first air flow channel 20 is provided inside the upper cover 2 and the upper plate 3. One end of the first air flow channel 20 is connected to the gas inlet 21, and the other end is connected to the three groups of upper cavities 31. A first one-way valve 71 is provided between the first air flow channel 20 and the three groups of upper cavities 31, and the first one-way valve 71 realizes the one-way flow of gas from the gas inlet 21 to the upper cavity 31. A second air flow channel 30 is provided inside the upper plate 3 and the lower plate 4. One end of the second air flow channel 30 is connected to the three groups of upper cavities 31, and the other end is connected to the two groups of middle cavities 41. A second one-way valve 72 is provided between the second channel 30 and the two groups of middle cavities 41, and the second one-way valve 72 realizes the one-way flow of gas from the upper cavity 31 to the middle cavity 41. A third air flow channel 40 is provided inside the lower plate 4 and the lower cover 5. One end of the third air flow channel 40 is connected to the two groups of middle cavities 41, and the other end is connected to the lower cavity 51.A third one-way valve 73 is provided between the third channel 40 and the lower cavity 51, and the third one-way valve 73 enables unidirectional gas flow from the middle cavity 41 to the lower cavity 51; a gas outlet 52 is formed inside the lower cover 5; an outlet valve 74 is provided between the gas outlet 52 and the lower cavity 51, and the outlet valve 74 enables unidirectional gas flow from the lower cavity 51 to the gas outlet 52; the first piezoelectric vibrator 61, the second piezoelectric vibrator 62, and the third piezoelectric vibrator 63 are all concentrically bonded by a metal substrate 6b and a piezoelectric ceramic sheet 6a; sealing rings 8 are installed on the sides of the first piezoelectric vibrator 61, the second piezoelectric vibrator 62, and the third piezoelectric vibrator 63 facing the cavity to ensure the sealing of the corresponding cavity; the numbers of the first piezoelectric vibrator 61, the second piezoelectric vibrator 62, and the third piezoelectric vibrator 63 decrease in sequence, and the numbers of the corresponding upper cavity 31, middle cavity 41, and lower cavity 51 also decrease in sequence accordingly, that is, the number of gas compression units decreases in sequence along the gas flow direction, and step-by-step cumulative compression of the compressor can be achieved; it should be noted here that the so-called hybrid cavity drive means that the numbers of the first piezoelectric vibrator 61, the second piezoelectric vibrator 62, and the third piezoelectric vibrator 63 are arranged in a stepped manner from top to bottom, forming a series cavity with the numbers of the upper cavity 31, middle cavity 41, and lower cavity 51 decreasing step by step. At the same time, each independent gas compression unit included in the first drive block I, the second drive block II, and the third drive block III respectively forms a parallel cavity; to enable effective heat dissipation when the micro piezoelectric gas compressor works, a cooling jacket 9 is provided on the outside of the micro piezoelectric gas compressor. The cooling jacket 9 is sleeved on the periphery of the connection body of the upper cover 2, the upper plate 3, the lower plate 4, and the lower cover 5 and is in full contact with the surface of the periphery of the connection body of the upper cover 2, the upper plate 3, the lower plate 4, and the lower cover 5, and a thermal conductive adhesive 92 is applied to the contact surface; it should be noted that the connection body of the upper cover 2, the upper plate 3, the lower plate 4, and the lower cover 5 is the whole formed after the four are connected; a cooling pipe 91 is provided on the outer surface of the cooling jacket 9; the cooling pipe 91 is a spiral cooling pipe; it should be noted that the spiral cooling pipe 91 is provided to enable the coolant to stay in the cooling jacket for a longer time and enhance the heat dissipation effect; a sleeve 1 is connected to the periphery of the cooling jacket 9, and a coolant inlet 11 and a coolant outlet 12 are provided on the sleeve 1; when the micro piezoelectric gas compressor works, the coolant flows in from the coolant inlet 11, passes through the cooling pipe 91, and flows out from the coolant outlet 12 to take away heat, achieving the heat dissipation effect.;

[0021] Due to the limitation of the material properties (brittleness) of the piezoelectric ceramic itself, the diameter of a single piezoelectric oscillator cannot be too large (large deformation) to avoid the rupture of the piezoelectric wafer. Therefore, the volume change of the oral cavity will be limited (i.e., the output flow is limited). The micro piezoelectric gas compressor obtains a large volume change of the oral cavity through the parallel connection quantity expansion of the gas compression unit, breaks through the limitation that the diameter of a single wafer-type piezoelectric oscillator cannot be too large, and can achieve a large flow output. At the same time, the micro piezoelectric gas compressor performs the first-stage compression, the second-stage compression, and the third-stage gas cumulative compression on the gas in the upper cavity 31, the middle cavity 41, and the lower cavity 51 respectively. During the high-frequency vibration driving process of the piezoelectric oscillator, there will be a certain amount of gas reverse leakage in the one-way valve. By inhaling a large volume of gas from the previous-stage cavity to sufficiently supply the cumulative compression of the next-stage cavity (the gas supplied more into the previous-stage cavity can make up for the gas reverse leakage of the one-way valve), the gas compression amount of each stage cavity can be effectively accumulated, and a large pressure can be obtained, making the micro piezoelectric gas compressor have a large energy density.

[0022] The ideal working process of this embodiment can be divided into an initial state, a first working state, and a second working state.

[0023] Initial state: No alternating voltage is applied, and all piezoelectric oscillators do not deform.

[0024] First working state: A voltage opposite to the polarization direction of the piezoelectric ceramic sheet is applied to the three first piezoelectric oscillators 61 in the first driving block I and the third piezoelectric oscillator 63 in the third driving block III, and a voltage in the same direction as the polarization direction of the piezoelectric ceramic sheet is applied to the two second piezoelectric oscillators 62 in the second driving block II; the three first piezoelectric oscillators 61 in the first driving block I and the third piezoelectric oscillator 63 in the third driving block III all vibrate upward, the two second piezoelectric oscillators 62 in the second driving block II all vibrate downward, the volumes of all the upper cavities 31 increase and the pressures inside the cavities decrease, the volumes of all the middle cavities 41 decrease and the pressures inside the cavities increase, the volume of the lower cavity 51 increases and the pressure decreases, which prompts all the first one-way valves 71 and the third one-way valves 73 to open, and the gas sequentially enters the upper cavity 31 through the gas inlet 21 and the first air flow channel 20; the gas in the middle cavity 41 is pressed into the lower cavity 51.

[0025] Second working state: Apply voltages with the same direction as the polarization direction of the piezoelectric ceramic sheets to the three first piezoelectric vibrators 61 in the first driving block I and the third piezoelectric vibrator 63 in the third driving block III, and apply voltages with the direction opposite to the polarization direction of the piezoelectric ceramic sheets to the two second piezoelectric vibrators 62 in the second driving block II; the three first piezoelectric vibrators 61 in the first driving block I and the third piezoelectric vibrator 63 in the third driving block III vibrate downward, the two second piezoelectric vibrators 62 in the second driving block II vibrate upward, the volumes of all the upper chambers 31 decrease and the pressures inside increase, the volumes of all the middle chambers 41 increase and the pressures inside decrease, the volume of the lower chamber 51 decreases and the pressure increases, which prompts all the second one-way valves 72 and the outlet valve 74 to open, and the gas in the upper chamber 31 is pressed into the middle chamber 41; the lower chamber 51 discharges the high-pressure gas through the gas outlet 52.

[0026] The micro piezoelectric gas compressor performs first-stage compression, second-stage compression, and third-stage gas cumulative compression on the gas in the upper chamber 31, the middle chamber 41, and the lower chamber 51 respectively. By supplying a large volume of gas into the previous-stage chamber to sufficiently supply the next-stage chamber for effective pressurization and make up for the reverse leakage of the one-way valve, excellent gas pressurization effect can be obtained through multi-stage cumulative compression; under the continuous drive of the alternating voltage, the three working states change repeatedly, and continuous large-flow / high-pressure gas can be output.

[0027] The above embodiments are for understanding the present invention and are not used for limitation. Without violating the principle of the present invention, those skilled in the art can make various changes and deformations according to the present invention, but these corresponding changes and deformations should all fall within the scope of the claims of the present invention.

Claims

1. A micro piezoelectric gas compressor driven by a hybrid cavity, characterized in that: It is composed of a sleeve, an upper cover, an upper plate, a lower plate, a lower cover, a first driving block, a second driving block, a third driving block, a sealing ring, and a cooling sleeve; the upper cover, the upper plate, the lower plate, and the lower cover are connected in sequence from top to bottom; a first driving block is installed between the upper cover and the upper plate; the first driving block includes three gas compression units, and the three gas compression units are evenly distributed between the upper cover and the upper plate. Each gas compression unit is composed of a first piezoelectric vibrator, a first one-way valve, an upper cavity, and a sealing ring; upper cavities are provided on the upper plate in the directions towards the three groups of first piezoelectric vibrators; a second driving block is installed between the upper plate and the lower plate; the second driving block includes two gas compression units, and the two gas compression units are evenly distributed between the upper plate and the lower plate. Each gas compression unit is composed of a second piezoelectric vibrator, a middle cavity, a second one-way valve, and a sealing ring; middle cavities are provided on the lower plate in the directions towards the two groups of second piezoelectric vibrators; a third driving block is installed between the lower plate and the lower cover; the third driving block includes one gas compression unit, and the gas compression unit is composed of a third piezoelectric vibrator, a lower cavity, a third one-way valve, and a sealing ring; a lower cavity is provided on the lower cover in the direction towards the third piezoelectric vibrator; a gas inlet is provided on the upper cover, and a first air flow channel is provided inside the upper cover and the upper plate; one end of the first air flow channel is connected to the gas inlet, and the other end is connected to the three upper cavities; a first one-way valve is provided between the first air flow channel and each of the three upper cavities; a second air flow channel is provided inside the upper plate and the lower plate; one end of the second air flow channel is connected to the three upper cavities, and the other end is connected to the two middle cavities; a second one-way valve is provided between the second air flow channel and each of the two middle cavities; a third air flow channel is provided inside the lower plate and the lower cover; one end of the third air flow channel is connected to the two middle cavities, and the other end is connected to the lower cavity; a third one-way valve is provided between the third air flow channel and the lower cavity; a gas outlet is provided inside the lower cover; an outlet valve is provided between the gas outlet and the lower cavity; the first piezoelectric vibrator, the second piezoelectric vibrator, and the third piezoelectric vibrator are all concentrically bonded by a metal substrate and a piezoelectric ceramic sheet; sealing rings are installed on the sides of the first piezoelectric vibrator, the second piezoelectric vibrator, and the third piezoelectric vibrator facing the cavities; the numbers of the first piezoelectric vibrator, the second piezoelectric vibrator, and the third piezoelectric vibrator decrease in sequence, and the numbers of the corresponding upper cavity, middle cavity, and lower cavity also decrease in sequence, that is, the number of gas compression units decreases in sequence along the gas flow direction; the cooling sleeve is sleeved on the periphery of the connection body of the upper cover, the upper plate, the lower plate, and the lower cover; the cooling sleeve is provided with cooling pipes.

2. The hybrid-chamber-driven micro piezoelectric gas compressor according to claim 1, wherein: The cooling sleeve is in full contact with the outer surface of the connection body of the upper cover, the upper plate, the lower plate, and the lower cover, and a heat-conducting adhesive is applied to the contact surface.

3. The hybrid cavity-driven micro piezoelectric gas compressor according to claim 1, wherein: A sleeve is connected to the periphery of the cooling sleeve, and a coolant inlet and a coolant outlet are provided on the sleeve.

4. The hybrid-chamber-driven micro piezoelectric gas compressor according to claim 1, characterized in that: The cooling pipes are spiral cooling pipes.

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