Ultra-precision three-degree-of-freedom planar motion platform driven by piezoelectricity and its excitation method

Abstract

The invention provides a piezoelectrically driven ultraprecise three-degree-of-freedom planar motion platform and an excitation method thereof. By adoption of the piezoelectrically driven ultraprecisethree-degree-of-freedom planar motion platform provided by the invention, the technical problems that the most planar three-degree-of-freedom motion platforms are complex in structures, insufficientin precision and single in excitation method are solved. The platform comprises a motion platform (1), a plurality of driving units (2) and a base (3), wherein the driving unit (2) is a main driving element, and in-plane three-degree-of-freedom motion of the motion platform (1) is driven by controlling the motion direction and the timing sequence of the plurality of driving units (2). Based on theexcitation method provided by the invention, the motion platform (1) can achieve large-stroke ultraprecise motion. The motion platform provided by the invention has a simple and compact structure, the excitation method is flexible and diverse, and the motion platform can be conveniently applied to a plurality of technical fields of requiring precise positioning and posture adjustment.

Description

technical field

[0001] The invention relates to the technical field of piezoelectric drive, and relates to a piezoelectric-driven ultra-precision three-degree-of-freedom planar motion platform and an excitation method thereof. Background technique

[0002] In the field of ultra-precision drive technology, piezoelectric drive is a drive method that uses the inverse piezoelectric effect of piezoelectric materials to achieve actuation output. The inverse piezoelectric effect of piezoelectric materials has the characteristics of high precision and fast response. Therefore, the piezoelectric drive device has the advantages of high resolution, no electromagnetic interference, fast response speed and various structures. It is a precision drive that has received extensive attention and research. Way.

[0003] At present, most of the relatively mature precision piezoelectric drive devices can only realize single-degree-of-freedom or two-degree-of-freedom drive. To achieve more degre...

Examples

specific Embodiment 1

[0098] The following is attached with the manual figure 1 , figure 2 This embodiment will be described in further detail. This embodiment provides a figure 1 or figure 2 The ultra-precision three-degree-of-freedom planar motion platform shown. The motion platform includes a motion platform 1, two or four driving units 2 and a base 3; the driving unit 2 includes a driving foot 2-1, a bidirectional stacked bending piezoelectric driver 2-2, an insulating block 2- 3 and a stacked linear piezoelectric driver 2-4; the motion platform 1 is used to load precision manipulation objects, and output linear motion along the X-axis and Y-axis direction and rotational motion around the Z-axis direction; the drive unit The components of 2 are fixedly connected, the driving unit 2 and the base 3 are fixedly connected, and each driving unit 2 is distributed along the inner circumference of the plane; the base 3 remains fixed, and the motion platform 1 Under the action, three-degree-of-fr...

specific Embodiment 2

[0103] Specific embodiment two: below in conjunction with description figure 1 , image 3 , Figure 4 , Figure 5 This embodiment will be described in further detail. This embodiment provides a figure 1The excitation method of the ultra-precision three-degree-of-freedom planar motion platform is shown, which can realize the three-degree-of-freedom ultra-precision motion in the large-stroke plane of the motion platform 1, including linear motion along the X-axis or Y-axis direction and around the Z-axis Rotational motion in the direction of rotation can achieve nanoscale resolution by adjusting the amplitude and application time of the excitation voltage signal. In this embodiment, the number of drive units 2 is two, but increasing the number is also applicable to this embodiment, and increasing the number will increase the load capacity of the motion platform 1 under the condition of applying the same excitation voltage signal.

[0104] The excitation method for realizing...

specific Embodiment 3

[0123] Specific embodiment three: below in conjunction with description figure 1 , Figure 6 , Figure 7 , Figure 8 This embodiment will be further described in detail. This embodiment provides a figure 1 The excitation method of the ultra-precision three-degree-of-freedom planar motion platform is shown, which can realize the three-degree-of-freedom ultra-precision motion in the large-stroke plane of the motion platform 1, including linear motion along the X-axis or Y-axis direction and around the Z-axis Rotational motion in the direction of rotation can achieve nanoscale resolution by adjusting the amplitude and application time of the excitation voltage signal. In this embodiment, the number of drive units 2 is two, but increasing the number is also applicable to this embodiment, and increasing the number will increase the load capacity of the motion platform 1 under the condition of applying the same excitation voltage signal.

[0124] The excitation method for reali...

technical field

[0001] The invention relates to the technical field of piezoelectric drive, and relates to a piezoelectric-driven ultra-precision three-degree-of-freedom planar motion platform and an excitation method thereof. Background technique

[0002] In the field of ultra-precision drive technology, piezoelectric drive is a drive method that uses the inverse piezoelectric effect of piezoelectric materials to achieve actuation output. The inverse piezoelectric effect of piezoelectric materials has the characteristics of high precision and fast response. Therefore, the piezoelectric drive device has the advantages of high resolution, no electromagnetic interference, fast response speed and various structures. It is a precision drive that has received extensive attention and research. Way.

[0003] At present, most of the relatively mature precision piezoelectric drive devices can only realize single-degree-of-freedom or two-degree-of-freedom drive. To achieve more degre...

Examples

specific Embodiment 1

[0098] The following is attached with the manual figure 1 , figure 2 This embodiment will be described in further detail. This embodiment provides a figure 1 or figure 2 The ultra-precision three-degree-of-freedom planar motion platform shown. The motion platform includes a motion platform 1, two or four driving units 2 and a base 3; the driving unit 2 includes a driving foot 2-1, a bidirectional stacked bending piezoelectric driver 2-2, an insulating block 2- 3 and a stacked linear piezoelectric driver 2-4; the motion platform 1 is used to load precision manipulation objects, and output linear motion along the X-axis and Y-axis direction and rotational motion around the Z-axis direction; the drive unit The components of 2 are fixedly connected, the driving unit 2 and the base 3 are fixedly connected, and each driving unit 2 is distributed along the inner circumference of the plane; the base 3 remains fixed, and the motion platform 1 Under the action, three-degree-of-fr...

specific Embodiment 2

[0103] Specific embodiment two: below in conjunction with description figure 1 , image 3 , Figure 4 , Figure 5 This embodiment will be described in further detail. This embodiment provides a figure 1The excitation method of the ultra-precision three-degree-of-freedom planar motion platform is shown, which can realize the three-degree-of-freedom ultra-precision motion in the large-stroke plane of the motion platform 1, including linear motion along the X-axis or Y-axis direction and around the Z-axis Rotational motion in the direction of rotation can achieve nanoscale resolution by adjusting the amplitude and application time of the excitation voltage signal. In this embodiment, the number of drive units 2 is two, but increasing the number is also applicable to this embodiment, and increasing the number will increase the load capacity of the motion platform 1 under the condition of applying the same excitation voltage signal.

[0104] The excitation method for realizing...

specific Embodiment 3

[0123] Specific embodiment three: below in conjunction with description figure 1 , Figure 6 , Figure 7 , Figure 8 This embodiment will be further described in detail. This embodiment provides a figure 1 The excitation method of the ultra-precision three-degree-of-freedom planar motion platform is shown, which can realize the three-degree-of-freedom ultra-precision motion in the large-stroke plane of the motion platform 1, including linear motion along the X-axis or Y-axis direction and around the Z-axis Rotational motion in the direction of rotation can achieve nanoscale resolution by adjusting the amplitude and application time of the excitation voltage signal. In this embodiment, the number of drive units 2 is two, but increasing the number is also applicable to this embodiment, and increasing the number will increase the load capacity of the motion platform 1 under the condition of applying the same excitation voltage signal.

[0124] The excitation method for reali...

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