A multi-purpose composite bias power supply for plasma coating

Abstract

The present invention belongs to the fields of automatic control technology and power electronics technology, and specifically relates to a multi-purpose composite plasma coating bias power supply. The power supply can output DC negative bias, unipolar pulse negative bias, DC superimposed unipolar pulse negative bias mode, asymmetric bipolar pulse bias mode or DC superimposed bipolar pulse bias with different output waveform characteristics as required. In addition, the pulse voltage amplitude, frequency and duty cycle of the negative bias can be adjusted, the DC voltage amplitude of the DC superimposed pulse negative bias can be adjusted, the negative bias can be set to work in two modes: high voltage and low current mode or low voltage and high current mode, and the positive pulse voltage amplitude and duty cycle can be adjusted.

Description

Technical Field

[0001] The invention belongs to the field of automatic control technology and power electronics technology, and in particular relates to a multi-purpose composite plasma coating bias power supply. Background Art

[0002] Bias power supplies are widely used in plasma coating processes and have a vital impact on the characteristics of thin films. Different coating processes require bias power supplies with different output waveform characteristics and different voltage levels. From the perspective of output waveform characteristics, there are mainly DC negative bias power supplies, unipolar pulse negative bias power supplies, DC superimposed unipolar pulse negative bias power supplies, and asymmetric bipolar pulse bias power supplies. The common bias power supply has a single output waveform characteristic and can only have one or two of these output waveform characteristics, which brings inconvenience to the study of coating processes. Different bias power supplies need to be replaced for different processes. Therefore, a bias power supply that can work in a DC negative bias mode, a unipolar pulse negative bias mode, a DC superimposed unipolar pulse negative bias mode, an asymmetric bipolar pulse bias mode or a DC superimposed bipolar pulse bias mode is very necessary. At the same time, the power supply can set the five output waveform characteristic working modes of the bias power supply through a human-computer interaction interface, set the pulse voltage amplitude, frequency and duty cycle of the negative bias, set the DC voltage amplitude of the negative bias, set the negative bias to work in a high voltage and low current or low voltage and high current mode, and set the positive pulse voltage amplitude and duty cycle. Summary of the invention

[0003] The purpose of the present invention is to provide a multi-purpose composite plasma coating bias power supply for the above-mentioned defects in the prior art, which can output DC negative bias, unipolar pulse negative bias, DC superimposed unipolar pulse negative bias mode, asymmetric bipolar pulse bias mode or DC superimposed bipolar pulse bias with different output waveform characteristics. In addition, the pulse voltage amplitude, frequency and duty cycle of the negative bias can be adjusted, the DC voltage amplitude of the DC superimposed pulse negative bias can be adjusted, the negative bias can be set to work in two modes: high voltage and low current mode or low voltage and high current mode, and the positive pulse voltage amplitude and duty cycle can be adjusted.

[0004] The technical solution of the present invention is as follows:

[0005] A multi-purpose composite plasma coating bias power supply, comprising: an AC three-phase power supply, a three-phase power frequency rectification and filtering circuit module, a first DC-DC1 / DC2 direct current power supply module, a second DC-DC3 direct current power supply module, a third DC-DC4 direct current power supply module, a first half-bridge circuit module, a second half-bridge circuit module, a single-phase H-bridge circuit module, a bridge arm series-parallel conversion circuit module, an arc suppression circuit module, a multi-channel drive isolation circuit module, and a contactor control circuit module;

[0006] The AC three-phase power supply output end is connected to the input end of the three-phase power frequency rectification and filtering circuit module, and the output end of the three-phase power frequency rectification and filtering circuit module is respectively connected to the input ends of the first DC-DC1 / DC2 direct current power supply module, the second DC-DC3 direct current power supply module, and the third DC-DC4 direct current power supply module;

[0007] The first isolated DC voltage DC1 output end of the first DC-DC1 / DC2 DC power supply module is connected to the first half-bridge circuit module, and the second isolated DC voltage DC2 output end of the first DC-DC1 / DC2 DC power supply module is connected to the input end of the second half-bridge circuit module;

[0008] The output end of the second DC-DC3 direct current power supply module is connected to the first input end of the single-phase H-bridge circuit module;

[0009] The output end of the third DC-DC4 direct current power supply module is connected to the second input end of the single-phase H-bridge circuit module;

[0010] One input end of the bridge arm series-parallel conversion circuit module is connected to the output end of the first half-bridge circuit module, the other input end of the bridge arm series-parallel conversion circuit module is connected to the output end of the second half-bridge circuit module, and the third input end of the bridge arm series-parallel conversion circuit module is connected to the output end of the single-phase H-bridge circuit module, so as to realize the series or parallel connection of the first half-bridge circuit module, the second half-bridge circuit module and the single-phase H-bridge circuit module, so as to achieve the ability of the power supply to output high voltage and small current when connected in series or low voltage and large current when connected in parallel, so as to meet the needs of the coating process;

[0011] The output end of the bridge arm series-parallel conversion circuit module is connected to the input end of the arc suppression circuit module, and the output end of the arc suppression circuit module is connected to the load through the current sensor;

[0012] One output end of the multi-channel drive isolation circuit module is connected to the control input end of the first half-bridge circuit module, one output end of the multi-channel drive isolation circuit module is connected to the control input end of the second half-bridge circuit module, and one output end of the multi-channel drive isolation circuit module is connected to the control input end of the single-phase H-bridge circuit module to control the switching frequency and switching duty cycle of the internal switching tubes of the first half-bridge circuit module, the second half-bridge circuit module and the single-phase H-bridge circuit module, and finally control the power supply to output 5 waveforms.

[0013] The bias power supply also includes a current detection circuit module, an RS485 bus, an MCU and CPLD system control circuit module and a human-computer interaction interface.

[0014] The control output terminal of the current sensor is connected to the input terminal of the current detection circuit module;

[0015] The output end of the current detection circuit module is connected to an input end of the MCU and CPLD system control circuit module;

[0016] The control output end of the human-machine interaction interface is connected to an input end of the MCU and CPLD system control circuit module.

[0017] The human-machine interaction interface transmits the DC negative bias mode, the unipolar pulse negative bias mode, the DC superimposed unipolar pulse negative bias mode, the asymmetric bipolar pulse bias mode or the DC superimposed bipolar pulse bias mode information, as well as the pulse voltage amplitude, frequency, duty cycle of the negative bias and the DC voltage amplitude of the negative bias, and the positive pulse voltage amplitude and duty cycle information to the MCU and CPLD system control circuit modules.

[0018] An output end of the MCU and CPLD system control circuit module is connected to an input end of the multi-channel drive isolation circuit module, and an output end of the MCU and CPLD system control circuit module is connected to an input end of the contactor control circuit module.

[0019] An output end of the RS485 bus is connected to a control input end of the first DC-DC1 / DC2 direct current power supply module, an output end of the RS485 bus is connected to a control input end of the second DC-DC3 direct current power supply module, an output end of the RS485 bus is connected to a control input end of the third DC-DC4 direct current power supply module, and an input end of the RS485 bus is connected to an output end of the MCU and CPLD system control circuit module.

[0020] The MCU and CPLD system control circuit module transmits the pulse voltage amplitude of the negative bias, the DC voltage amplitude of the negative bias and the positive pulse voltage amplitude information to the first DC-DC1 / DC2 direct current power supply module, the second DC-DC3 direct current power supply module and the third DC-DC4 direct current power supply module through the RS485 bus respectively, so as to control the power supply output voltage amplitude.

[0021] The beneficial effects of the present invention are:

[0022] A multi-purpose composite plasma coating bias power supply of the present invention can work in a DC negative bias mode, a unipolar pulse negative bias mode, a DC superimposed unipolar pulse negative bias mode, an asymmetric bipolar pulse bias mode or a DC superimposed bipolar pulse bias mode. The pulse voltage amplitude, frequency and duty cycle of the negative bias are set through a human-computer interaction interface, the DC voltage amplitude of the negative bias is set, the negative bias is set to work in a high-voltage low-current or low-voltage high-current mode, and the positive pulse voltage amplitude and duty cycle are set. The bias power supply has powerful functions, realizes multi-purpose use of one machine, can meet the needs of most bias coating processes at this stage, and provides convenience for coating process research and production. The positive pulse bias can effectively neutralize the positive charge accumulated on the surface of the workpiece, and prevent arc discharge caused by charge accumulation on the surface of the workpiece. The switch tube inside the first half-bridge circuit module, the second half-bridge circuit module and the single-phase H-bridge circuit module directly controls the waveform output by the power supply to the load, and the switch tube can quickly turn off the arc, suppress the arc energy, and improve the coating quality. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] Figure 1 It is a block diagram of the hardware system structure of the present invention.

[0024] Figure 2 It is a schematic diagram of the bridge arm series-parallel conversion circuit module of the present invention.

[0025] Figure 3 It is a schematic diagram of the arc suppression circuit module of the present invention.

[0026] In the figure: 101, AC three-phase power supply; 102, three-phase power frequency rectification and filtering circuit module; 103, first DC-DC1 / DC2 direct current power supply module; 104, second DC-DC3 direct current power supply module; 105, third DC-DC4 direct current power supply module; 106, multi-channel drive isolation circuit module; 107, MCU and CPLD system control circuit module; 108, human-computer interaction interface; 109, third DC-DC4 direct current power supply module; 110, second half-bridge circuit module; 111, single-phase H-bridge circuit module; 112, contactor control circuit module; 113, arc suppression circuit module; 114, bridge arm series-parallel conversion circuit module; 115, current sensor; 116, current detection circuit module; 117, load; 118, RS485 bus. DETAILED DESCRIPTION

[0027] The present invention is further described in detail below with reference to the accompanying drawings and specific embodiments.

[0028] The embodiment of the present invention provides a multi-purpose composite plasma coating bias power supply, including: an AC three-phase power supply 101, a three-phase power frequency rectification and filtering circuit module 102, a first DC-DC1 / DC2 direct current power supply module 103, a second DC-DC3 direct current power supply module 104, a third DC-DC4 direct current power supply module 105, a first half-bridge circuit module 109, a second half-bridge circuit module 110, a single-phase H-bridge circuit module 111, a bridge arm series-parallel conversion circuit module 114, an arc suppression circuit module 113, a multi-channel drive isolation circuit module 106, a contactor control circuit module 112, a current detection circuit module 116, an RS485 bus 118, an MCU and CPLD system control circuit module 107 and a human-computer interaction interface 108.

[0029] The output end of the AC three-phase power supply 101 is connected to the input end of the three-phase power frequency rectification and filtering circuit module 102, and the output end of the three-phase power frequency rectification and filtering circuit module 102 is respectively connected to the input ends of the first DC-DC1 / DC2 direct current power supply module 103, the second DC-DC3 direct current power supply module 104, and the third DC-DC4 direct current power supply module 105.

[0030] The first isolated DC voltage DC1 output end of the first DC-DC1 / DC2 DC power supply module 103 is connected to the first half-bridge circuit module 109 , and the second isolated DC voltage DC2 output end of the first DC-DC1 / DC2 DC power supply module 103 is connected to the input end of the second half-bridge circuit module 110 .

[0031] The output end of the second DC-DC 3D power supply module 104 is connected to the first input end of the single-phase H-bridge circuit module 111 .

[0032] The output end of the third DC-DC 4-phase direct current power supply module 105 is connected to the second input end of the single-phase H-bridge circuit module 111 .

[0033] The specific circuit connection diagram of the first half-bridge circuit module 109, the second half-bridge circuit module 110, the single-phase H-bridge circuit module 111 and the bridge arm series-parallel conversion circuit module 114 is as follows: Figure 2 shown.

[0034] The first half-bridge circuit module 109 is composed of two switch tubes (MOSFET) Q1 and Q2 connected in series. DC1+ and V DC1- It is the DC bus voltage input terminal of the first half-bridge circuit module.

[0035] The second half-bridge circuit module 110 is composed of two switch tubes (MOSFET) Q3 and Q4 connected in series. DC2+ and V DC2-It is the DC bus voltage input terminal of the second half-bridge circuit module.

[0036] The single-phase H-bridge circuit module 111 is composed of four switch tubes (MOSFET) Q5, Q6, Q7 and Q8. Q5 is connected in series with Q6, Q7 is connected in series with Q8, the drain of the switch tube Q7 on the left bridge arm is not connected to the drain of the switch tube Q5 on the right bridge arm, the source of the switch tube Q8 on the left bridge arm is connected to the source of the switch tube Q6 on the right bridge arm, V DC3+ and V DC3- It is the first input terminal of the DC bus voltage of the single-phase H-bridge circuit module, V DC4+ and V DC4- It is the second input terminal of the DC bus voltage of the single-phase H-bridge circuit module.

[0037] The bridge arm series-parallel conversion circuit module 114 is composed of a contactor KM1, a contactor KM2, a contactor KM3, a current sharing transformer TR5 and a current sharing transformer TR6.

[0038] The contactor KM1 and the contactor KM2 each have four isolating contacts, and the contactor KM3 has three isolating contacts.

[0039] Pin 1 of KM1 and pin 1 of KM2 are connected to the source of the switch tube Q1 of the first half-bridge circuit module.

[0040] Pins 3 and 5 of KM1 and pin 7 of KM2 are connected to the source of the switch tube Q2 of the first half-bridge circuit module.

[0041] Pin 4 of KM1 and pin 2 of KM2 are connected to the source of the switch tube Q4 of the second half-bridge circuit module.

[0042] Pin 3 of KM2 and pin 1 of KM3 are connected to the source of the switch tube Q3 of the second half-bridge circuit module.

[0043] The 6th pin of KM1 is connected to the source of the switch tube Q6 of the single-phase H-bridge circuit module.

[0044] The 5th pin of KM2 and the 3rd pin of KM3 are connected to the source of the switch tube Q5 of the single-phase H-bridge circuit module.

[0045] The 4th pin of KM2 and the 8th pin of KM1 are connected to the source of the switch tube Q7 of the single-phase H-bridge circuit module.

[0046] The pin 7 of KM1 and the pin 8 of KM2 are connected to serve as the negative output end of the bridge arm series-parallel conversion circuit module.

[0047] Pin 1 of TR5 is connected to pin 2 of KM1, pin 4 of TR5 is connected to pin 2 of KM3, and pins 2 and 3 of TR5 are connected to pin 1 of TR6.

[0048] Pin 4 of TR6 is connected to pin 4 of KM3, and pins 2 and 3 of TR6 are connected to pin 5 of KM3.

[0049] The 6th pin of KM2 and the 6th pin of KM3 are connected as the positive output end of the bridge arm series-parallel conversion circuit module.

[0050] The current balancing transformer TR5 and the current balancing transformer TR6 have a primary side and a secondary side respectively. Pins 1 and 3 of the primary side of the current balancing transformer TR5, the number of turns and pins 2 and 4 of the secondary side, and pins 1 and 2 are the same-named ends, and the ratio of the primary and secondary turns is 1:1. Pins 1 and 3 of the primary side of the current balancing transformer TR6, the number of turns and pins 2 and 4 of the secondary side, and pins 1 and 2 are the same-named ends, and the ratio of the primary and secondary turns is 1:2.

[0051] When the contactor KM1 is disconnected, the contactor KM3 is disconnected, and the contactor KM2 is closed, the first half-bridge circuit module, the second half-bridge circuit module, and the right bridge arm of the single-phase H-bridge circuit module are connected in series to output high voltage and low current.

[0052] When the contactor KM1 is closed, the contactor KM3 is closed, and the contactor KM2 is disconnected, the first half-bridge circuit module, the second half-bridge circuit module, and the right bridge arm of the single-phase H-bridge circuit module are connected in parallel to output low voltage and high current.

[0053] like Figure 3 As shown, the arc suppression circuit module 113 is composed of two inductors and four fast recovery diodes. The four fast recovery diodes are respectively connected in parallel with the resistor and the capacitor. One end of L1 is connected to the anode of D1, the other end of L1 is connected to the cathode of D2, the cathode of D1 is connected to the anode of D2, one end of L2 is connected to the cathode of D3, the other end of L2 is connected to the anode of D4, the anode of D3 is connected to the cathode of D4, the cathode of D2 is connected to the cathode of D3, the anode of D1 is the input end of the arc suppression circuit module 113, and the anode of D4 is the output end of the arc suppression circuit module 113.

[0054] One input end of the bridge arm series-parallel conversion circuit module 114 is connected to the output end of the first half-bridge circuit module 109, the other input end of the bridge arm series-parallel conversion circuit module 114 is connected to the output end of the second half-bridge circuit module 110, and the third input end of the bridge arm series-parallel conversion circuit module 114 is connected to the output end of the single-phase H-bridge circuit module 111, so as to realize the series or parallel connection of the first half-bridge circuit module 109, the second half-bridge circuit module 110 and the single-phase H-bridge circuit module 111, so as to achieve the ability of the power supply to output high voltage and small current when connected in series or low voltage and large current when connected in parallel, thereby meeting the needs of the coating process.

[0055] The output end of the bridge arm series-parallel conversion circuit module 114 is connected to the input end of the arc suppression circuit module 113 , and the output end of the arc suppression circuit module 113 is connected to the load 117 through the current sensor 115 .

[0056] The control output terminal of the current sensor 115 is connected to the input terminal of the current detection circuit module 116 .

[0057] The output end of the current detection circuit module 116 is connected to an input end of the MCU and CPLD system control circuit module 107 .

[0058] The control output end of the human-machine interaction interface 108 is connected to an input end of the MCU and CPLD system control circuit module 107. The human-machine interaction interface 108 transmits the DC negative bias mode, the unipolar pulse negative bias mode, the DC superimposed unipolar pulse negative bias mode, the asymmetric bipolar pulse bias mode or the DC superimposed bipolar pulse bias mode information, as well as the pulse voltage amplitude (0-1800V), frequency (20kHz-100kHz), duty cycle (10-80% or 100%) of the negative bias and the DC voltage amplitude (0-600V) of the negative bias, as well as the positive pulse voltage amplitude (0-100V) and duty cycle (10-80% or 0%) information to the MCU and CPLD system control circuit module 107.

[0059] An output end of the MCU and CPLD system control circuit module 107 is connected to an input end of the multi-channel drive isolation circuit module 106 , and an output end of the MCU and CPLD system control circuit module 107 is connected to an input end of the contactor control circuit module 112 .

[0060] One output end of the multi-channel drive isolation circuit module 106 is connected to the control input end of the first half-bridge circuit module 109, one output end of the multi-channel drive isolation circuit module 106 is connected to the control input end of the second half-bridge circuit module 110, and one output end of the multi-channel drive isolation circuit module 106 is connected to the control input end of the single-phase H-bridge circuit module 111 to control the switching frequency and switching duty cycle of the internal switching tubes of the first half-bridge circuit module 109, the second half-bridge circuit module 110 and the single-phase H-bridge circuit module 111, and finally control the power supply to output 5 waveforms.

[0061] An output end of the RS485 bus 118 is connected to a control input end of the first DC-DC1 / DC2 direct current power supply module 103, an output end of the RS485 bus 118 is connected to a control input end of the second DC-DC3 direct current power supply module 104, an output end of the RS485 bus 118 is connected to a control input end of the third DC-DC4 direct current power supply module 105, and an input end of the RS485 bus 118 is connected to an output end of the MCU and CPLD system control circuit module 107. The MCU and CPLD system control circuit module 107 transmits the information of the pulse voltage amplitude (0 to 1800V) of the negative bias, the DC voltage amplitude (0 to 600V) of the negative bias and the positive pulse voltage amplitude (0 to 100V) to the first DC-DC1 / DC2 direct current power supply module 103, the second DC-DC3 direct current power supply module 104 and the third DC-DC4 direct current power supply module 105 through the RS485 bus 118, respectively, so as to realize the control of the power output voltage amplitude.

[0062] The present invention uses specific embodiments to illustrate the principles and implementation methods of the present invention. The description of the above embodiments is only used to help understand the method of the present invention and its core idea. At the same time, for those skilled in the art, according to the idea of ​​the present invention, there will be changes in the specific implementation methods and application scope. In summary, the content of this specification should not be understood as a limitation on the present invention.

Claims

1. A multi-purpose composite plasma coating bias power supply, comprising: AC three-phase power supply (101), a three-phase industrial frequency rectification and filtering circuit module (102), a first DC-DC1 / DC2 direct current power supply module (103), a second DC-DC3 direct current power supply module (104), a third DC-DC4 direct current power supply module (105), a first half-bridge circuit module (109), a second half-bridge circuit module (110), a single-phase H-bridge circuit module (111), a bridge arm series-parallel conversion circuit module (114), an arc suppression circuit module (113), a multi-channel drive isolation circuit module (106), and a contactor control circuit module (112); The invention is characterized in that: the output end of the AC three-phase power supply (101) is connected to the input end of the three-phase power frequency rectification and filtering circuit module (102), and the output end of the three-phase power frequency rectification and filtering circuit module (102) is respectively connected to the input end of the first DC-DC1 / DC2 direct current power supply module (103), the input end of the second DC-DC3 direct current power supply module (104), and the input end of the third DC-DC4 direct current power supply module (105); The first isolated DC voltage DC1 output end of the first DC-DC1 / DC2 DC power supply module (103) is connected to the input end of the first half-bridge circuit module (109), and the second isolated DC voltage DC2 output end of the first DC-DC1 / DC2 DC power supply module (103) is connected to the input end of the second half-bridge circuit module (110); The output end of the second DC-DC3 direct current power supply module (104) is connected to the first input end of the single-phase H-bridge circuit module (111); The output end of the third DC-DC4 direct current power supply module (105) is connected to the second input end of the single-phase H-bridge circuit module (111); The first input end of the bridge arm series-parallel conversion circuit module (114) is connected to the output end of the first half-bridge circuit module (109), the second input end of the bridge arm series-parallel conversion circuit module (114) is connected to the output end of the second half-bridge circuit module (110), and the third input end of the bridge arm series-parallel conversion circuit module (114) is connected to the output end of the single-phase H-bridge circuit module (111), so as to realize the first half-bridge circuit module (109), the second half-bridge circuit module (110) and the single-phase H-bridge circuit module (111) being connected in series or in parallel, so as to achieve the ability of the bias power supply to output high voltage and low current when connected in series or to output low voltage and high current when connected in parallel, thereby meeting the requirements of the coating process; The output end of the bridge arm series-parallel conversion circuit module (114) is connected to the input end of the arc suppression circuit module (113), and the output end of the arc suppression circuit module (113) is connected to the load (117) through the current sensor (115); The first output end of the multi-channel drive isolation circuit module (106) is connected to the control input end of the first half-bridge circuit module (109), the second output end of the multi-channel drive isolation circuit module (106) is connected to the control input end of the second half-bridge circuit module (110), and the third output end of the multi-channel drive isolation circuit module (106) is connected to the control input end of the single-phase H-bridge circuit module (111), so as to control the switching frequency and switching duty cycle of the internal switch tubes of the first half-bridge circuit module (109), the second half-bridge circuit module (110) and the single-phase H-bridge circuit module (111), and finally control the bias power supply to output five waveforms; The bridge arm series-parallel conversion circuit module (114) is composed of a contactor KM1, a contactor KM2, a contactor KM3, a current sharing transformer TR5 and a current sharing transformer TR6; The contactor KM1 and the contactor KM2 each have four isolation contacts, and the contactor KM3 has three isolation contacts; Pin 1 of the contactor KM1 and pin 1 of the contactor KM2 are both connected to the source of the switch tube Q1 of the first half-bridge circuit module (109); Pin 3 of the contactor KM1, pin 5 of the contactor KM2 and pin 7 of the contactor KM2 are connected to the source of the switch tube Q2 of the first half-bridge circuit module (109); Pin 4 of the contactor KM1 and pin 2 of the contactor KM2 are connected to the source of the switch tube Q4 of the second half-bridge circuit module (110); Pin 3 of the contactor KM2 and pin 1 of the contactor KM3 are connected to the source of the switch tube Q3 of the second half-bridge circuit module (110); Pin 6 of the contactor KM1 is connected to the source of the switch tube Q6 of the single-phase H-bridge circuit module (111); Pin 5 of the contactor KM2 and pin 3 of the contactor KM3 are connected to the source of the switch tube Q5 of the single-phase H-bridge circuit module (111); The 4th pin of the contactor KM2 and the 8th pin of the contactor KM1 are connected to the source electrode of the switch tube Q7 of the single-phase H-bridge circuit module (111); Pin 7 of the contactor KM1 and pin 8 of the contactor KM2 are connected to serve as the negative output end of the bridge arm series-parallel conversion circuit module (114); Pin 1 of the current sharing transformer TR5 is connected to pin 2 of the contactor KM1, pin 4 of the current sharing transformer TR5 is connected to pin 2 of the contactor KM3, and pin 2 of the current sharing transformer TR5 and pin 3 of the current sharing transformer TR5 are connected to pin 1 of the current sharing transformer TR6; Pin 4 of the current-sharing transformer TR6 is connected to pin 4 of the contactor KM3, and pin 2 of the current-sharing transformer TR6 and pin 3 of the current-sharing transformer TR6 are connected to pin 5 of the contactor KM3; The 6th pin of the contactor KM2 and the 6th pin of the contactor KM3 are connected to serve as the positive output end of the bridge arm series-parallel conversion circuit module (114); When the contactor KM1 and the contactor KM3 are in the disconnected state, the contactor KM2 is closed, so that the first half-bridge circuit module, the second half-bridge circuit module and the right bridge arm of the single-phase H-bridge circuit module operate in a series mode; When the contactor KM1 and the contactor KM3 are in a closed state, the contactor KM2 is disconnected, so that the first half-bridge circuit module, the second half-bridge circuit module and the right bridge arm of the single-phase H-bridge circuit module operate in a parallel mode; The arc suppression circuit module (113) is composed of two inductors and four fast recovery diodes. The four fast recovery diodes are respectively connected in parallel with a resistor and a capacitor. One end of the inductor L1 is connected to the anode of the fast recovery diode D1, the other end of the inductor L1 is connected to the cathode of the fast recovery diode D2, the cathode of the fast recovery diode D1 is connected to the anode of the fast recovery diode D2, one end of the inductor L2 is connected to the cathode of the fast recovery diode D3, the other end of the inductor L2 is connected to the anode of the fast recovery diode D4, the anode of the fast recovery diode D3 is connected to the cathode of the fast recovery diode D4, the cathode of the fast recovery diode D2 is connected to the cathode of the fast recovery diode D3, the anode of the fast recovery diode D1 is the input end of the arc suppression circuit module (113), and the anode of the fast recovery diode D4 is the output end of the arc suppression circuit module (113); The first output end of the MCU and CPLD system control circuit module (107) is connected to the input end of the multi-channel drive isolation circuit module (106), and the second output end of the MCU and CPLD system control circuit module (107) is connected to the input end of the contactor control circuit module (112).

2. A multi-purpose composite plasma coating bias power supply as claimed in claim 1, characterized in that: The current balancing transformer TR5 and the current balancing transformer TR6 have a primary side and a secondary side respectively, pin 1 and pin 3 of the current balancing transformer TR5 are respectively the two ends of the primary side of the current balancing transformer TR5, pin 2 and pin 4 of the current balancing transformer TR5 are respectively the two ends of the secondary side of the current balancing transformer TR5, pin 1 and pin 2 of the current balancing transformer TR5 are the same-name ends, and the ratio of the number of turns of the primary and secondary sides of the current balancing transformer TR5 is 1:1, pin 1 and pin 3 of the current balancing transformer TR6 are respectively the two ends of the primary side of the current balancing transformer TR6, pin 2 and pin 4 of the current balancing transformer TR6 are respectively the two ends of the secondary side of the current balancing transformer TR6, pin 1 and pin 2 of the current balancing transformer TR6 are the same-name ends, and the ratio of the number of turns of the primary and secondary sides of the current balancing transformer TR6 is 1:

2.

3. A multi-purpose composite plasma coating bias power supply as claimed in claim 1, characterized in that: The bias power supply further comprises a current detection circuit module (116), an RS485 bus (118), an MCU and CPLD system control circuit module (107) and a human-machine interaction interface (108).

4. A multi-purpose composite plasma coating bias power supply as claimed in claim 3, characterized in that: The control output end of the current sensor (115) is connected to the input end of the current detection circuit module (116); The output end of the current detection circuit module (116) is connected to the first input end of the MCU and CPLD system control circuit module (107); The control output end of the human-machine interaction interface (108) is connected to the second input end of the MCU and CPLD system control circuit module (107).

5. A multi-purpose composite plasma coating bias power supply as claimed in claim 3, characterized in that: The human-machine interaction interface (108) transmits the DC negative bias mode, the unipolar pulse negative bias mode, the DC superimposed unipolar pulse negative bias mode, the asymmetric bipolar pulse bias mode or the DC superimposed bipolar pulse bias mode information, as well as the pulse voltage amplitude, frequency, duty cycle of the negative bias and the DC voltage amplitude of the negative bias, and the positive pulse voltage amplitude and duty cycle information to the MCU and CPLD system control circuit module (107).

6. A multi-purpose composite plasma coating bias power supply as claimed in claim 3, characterized in that: The first output end of the RS485 bus (118) is connected to the control input end of the first DC-DC1 / DC2 direct current power supply module (103), the second output end of the RS485 bus (118) is connected to the control input end of the second DC-DC3 direct current power supply module (104), the third output end of the RS485 bus (118) is connected to the control input end of the third DC-DC4 direct current power supply module (105), and the input end of the RS485 bus (118) is connected to the third output end of the MCU and CPLD system control circuit module (107).

7. A multi-purpose composite plasma coating bias power supply as claimed in claim 6, characterized in that: The MCU and CPLD system control circuit module (107) transmits information on the pulse voltage amplitude of the negative bias voltage, the DC voltage amplitude of the negative bias voltage and the positive pulse voltage amplitude to the first DC-DC1 / DC2 DC power supply module (103), the second DC-DC3 DC power supply module (104) and the third DC-DC4 DC power supply module (105) respectively through the RS485 bus (118), so as to control the output voltage amplitude of the bias power supply.

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