Air guide gasket and method for manufacturing the same

Abstract

The present invention provides an air-conducting gasket and a manufacturing method thereof, belonging to the technical field of equipment specially used for manufacturing sensors, wherein the air-conducting gasket is an annular structure, comprising: a gasket body, which is an annular structure, and has two upper and lower joint surfaces; an air-conducting groove, which is arranged on at least one of the joint surfaces of the gasket body, and the air-conducting groove connects the inner and outer sides of the gasket body; when the air-conducting gasket of the present invention is in use, the inner and outer sides of the gasket body are connected through the air-conducting groove, and the air in the inner circle of the gasket body can be discharged quickly and efficiently when vacuuming without changing the original thickness of the gasket body, thereby avoiding gas being trapped inside the annular gasket, and improving the exhaust efficiency and exhaust effect of the sensor during ultra-high vacuum exhaust.

Description

Technical Field

[0001] The invention relates to the technical field of equipment dedicated to manufacturing sensors, and in particular to an air guide gasket and a manufacturing method thereof. Background Art

[0002] The differential pressure sensor is composed of multiple components such as the upper electrode, insulator and lower electrode. When the electrode is subjected to pressure, the stressed electrode will deform to a certain extent, so the distance between the upper and lower electrodes will change to a certain extent, thereby changing the detection signal.

[0003] During the preparation of differential pressure sensors, in order to adjust the distance between the two electrodes of the differential pressure, one or more hard material distance-adjusting washers of different thicknesses are usually replaced to limit the test range of the extremely small differential pressure detection signal.

[0004] However, due to the extremely high requirements for processing accuracy and flatness of the internal accessories of the differential pressure sensor, using existing adjustable spacers to adjust the spacing can easily hinder the gas flow between the two electrodes, affect the exhaust efficiency of the sensor, and even trap the gas in a tiny space, directly affecting the life of the sensor. Summary of the invention

[0005] Therefore, the object of the present invention is to provide an air guide gasket to solve the problem of long exhaust sealing time and large amount of residual gas after sealing of the differential pressure sensor in the prior art.

[0006] In order to solve the above technical problems, the present invention provides an air guide gasket, comprising:

[0007] The gasket body is an annular structure having two joint surfaces, an upper surface and a lower surface;

[0008] An air guide groove is provided on at least one of the joint surfaces of the gasket body, and the air guide groove is connected to the inner and outer sides of the gasket body.

[0009] As a preferred solution, the air guide grooves are provided on both the upper and lower joint surfaces of the gasket body.

[0010] As a preferred solution, the air guide groove is in a sinusoidal shape.

[0011] As a preferred solution, the air guide grooves have two mutually intersecting grooves on the bonding surface.

[0012] As a preferred solution, it also includes:

[0013] An air guiding gap is arranged on the end surface of the supporting step of the gasket body surrounded by the air guiding groove, and both ends of the air guiding gap are respectively connected to the air guiding groove.

[0014] As a preferred solution, there are two air guiding slots on the end surface of the supporting step, and the two air guiding slots are connected in a cross form.

[0015] As a preferred solution, the width of the air guiding gap is 0.1-1 mm.

[0016] As a preferred solution, the thickness of the gasket body is 0.05-0.35 mm.

[0017] As a preferred solution, the depth of the air guide groove is 0.01-0.1 mm.

[0018] The manufacturing method of the air guide gasket provided by the present invention comprises the following steps:

[0019] Select the gasket body according to the thickness requirement;

[0020] An air guide groove is provided on the joint surface of the gasket body by using a laser, electron beam, chemical corrosion or electrochemical corrosion method to connect the inner and outer sides of the gasket body;

[0021] An air-guiding gap is provided on the joint surface of the gasket body and on the end surface of the supporting step surrounded by the gas-guiding groove, and at least one air-guiding gap is provided by laser, electron beam, chemical corrosion or electrochemical corrosion, so that the two ends of the air-guiding gap are connected with the inner and outer sides of the gas-guiding groove and / or the gasket body.

[0022] The technical solution of the present invention has the following advantages:

[0023] 1. The air-guiding gasket provided by the present invention, when in use, connects the inner and outer sides of the gasket body through the air-guiding groove, so that the air in the inner circle of the gasket body can be discharged quickly and efficiently when vacuuming without changing the original thickness of the gasket body, thereby avoiding gas being trapped inside the annular gasket, and improving the exhaust efficiency and exhaust effect of the sensor during ultra-high vacuum exhaust.

[0024] 2. The air-guiding gasket provided by the present invention has an air-guiding gap arranged on the end of the supporting step, which can discharge the air at the end of the supporting step. When multiple gaskets are stacked for use, the gas will not be trapped in the tiny space at the end of the supporting step, thereby ensuring the exhaust effect of the sensor and improving the quality of the sensor.

[0025] 3. The manufacturing method of the air-conducting gasket provided by the present invention, after selecting the thickness of the gasket body, then making the air-conducting groove, not only does not change the thickness of the gasket body, but also the setting method is simple, which can ensure that the thickness of the annular gasket at the position of the supporting step remains unchanged, thereby ensuring the original application range of the gasket; then, by setting an air-conducting gap on the supporting end face of the supporting step, the gas at the supporting end face of the supporting step can be further discharged, so as to facilitate the vacuuming of the sensor when the air-conducting gaskets are stacked and used. BRIEF DESCRIPTION OF THE DRAWINGS

[0026] In order to more clearly illustrate the specific implementation methods of the present invention or the technical solutions in the prior art, the drawings required for use in the specific implementation methods or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are some implementation methods of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0027] Figure 1 It is a schematic diagram of the three-dimensional structure of the air guide gasket provided in an embodiment of the present invention.

[0028] Figure 2 for Figure 1 Magnified view of area A.

[0029] Figure 3 This is a front view of a partial structure of the air guide gasket.

[0030] Figure 4 for Figure 3 Top view of the .

[0031] Figure 5 A schematic diagram of the three-dimensional structure of multiple sets of air guide gaskets stacked in use.

[0032] Figure 6 for Figure 5 Magnified view of area B.

[0033] Description of reference numerals:

[0034] 1. Gasket body; 2. Air guide groove; 3. Support step; 4. Air guide gap. DETAILED DESCRIPTION

[0035] The technical solution of the present invention will be described clearly and completely below in conjunction with the accompanying drawings. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0036] In the description of the present invention, it should be noted that the terms "center", "up", "down", "left", "right", "vertical", "horizontal", "inside", "outside", etc. indicate directions or positional relationships based on the directions or positional relationships shown in the accompanying drawings. They are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific direction, be constructed and operated in a specific direction. Therefore, they cannot be understood as limitations on the present invention.

[0037] In the description of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0038] In addition, the technical features involved in the different embodiments of the present invention described below can be combined with each other as long as they do not conflict with each other.

[0039] Example 1

[0040] This embodiment provides a specific implementation of an air guide gasket, such as Figure 1 , Figure 2 As shown, the gasket body 1 of the present embodiment is a conventional annular structure gasket, and air guide grooves 2 are provided on the upper and lower joint surfaces of the gasket body 1 by laser. The air guide grooves 2 have two intersecting sinusoidal curve shapes, and the air guide grooves 2 are used to connect the inner and outer sides of the gasket body 1, so that the air inside the gasket body 1 can be promptly extracted when vacuuming.

[0041] Two air guiding gaps 4 are also provided on the end face of the supporting step 3 surrounded by the air guiding groove 2. The air guiding gaps 4 are cross-arranged, wherein one air guiding gap 4 connects the inner and outer sides of the gasket body 1, and the other air guiding gap 4 connects the air guiding grooves 2 on both sides of the supporting step 3; through the air guiding gaps 4, the air at the end face of the supporting step 3 can be promptly drawn out during vacuuming.

[0042] In order to achieve precise adjustment of the distance between the two electrodes of the sensor, the gasket body 1 of this embodiment is made of a hard material, specifically ceramic, glass, alloy, metal, bakelite, etc.

[0043] like Figure 3 , Figure 4 As shown, regarding the thickness h1 of the gasket body 1, the selectable range is 0.05 to 0.35 mm;

[0044] Regarding the depth h2 of the air guide groove 2, the available range is 0.01-0.1 mm.

[0045] Regarding the width d of the air guiding gap 4, the available range is 0.1 to 1 mm.

[0046] The above specific values ​​can be selected and used according to actual needs. For example, in this embodiment, the thickness h1 of the gasket body 1 is 0.35 mm, the depth h2 of the air guide groove 2 is 0.04 mm, and the width d of the air guide groove 2 is 1 mm.

[0047] like Figure 5 , Figure 6 As shown, when in use, the gasket bodies 1 can be stacked in sequence as needed, and when stacked, two gasket bodies 1 are supported by the support steps 3. In this way, when the sensor is exhausted, the gas between two adjacent gasket bodies 1 will also be smoothly exhausted, and the gas will not be trapped in the gasket body 1, thereby ensuring the quality of the sensor.

[0048] In addition, as an alternative embodiment, the gasket body 1 may be provided with the air guide groove 2 on only one side of the joint surface, and the other side may be used to cooperate with the joint surface of other gasket bodies 1 provided with the air guide groove 2 .

[0049] As an alternative embodiment, the air guide gap 4 provided on the end surface of the support step 3 of the gasket body 1 may be omitted, and the gas flow inside and outside the gasket body 1 may be achieved only through the air guide groove 2 .

[0050] Example 2

[0051] This embodiment provides a specific implementation of a method for manufacturing an air guide gasket, comprising the following steps:

[0052] The first step is to select the thickness of the gasket body 1 to be processed, and select a suitable gasket thickness according to the distance between the two electrodes of the sensor that needs to be adjusted. The specific selectable range is 0.05 to 0.35 mm; the thickness of the gasket is selected in order to adjust the detection signal change of the differential pressure sensor through a micron-level ultra-thin gasket.

[0053] The second step is to set the air guide groove 2. On the joint surface of the gasket body 1, the air guide groove 2 is set by using laser, electron beam, chemical corrosion or electrochemical corrosion to connect the inner and outer sides of the gasket body 1.

[0054] The third step is to set an air-guiding gap 4. On the joint surface of the gasket body 1 and on the end face of the supporting step 3 surrounded by the air-guiding groove 2, two cross-shaped air-guiding gaps 4 are set by laser, electron beam, chemical corrosion or electrochemical corrosion, so that the two ends of the air-guiding gap 4 are connected to the inner and outer sides of the air-guiding groove 2 and the gasket body 1.

[0055] In addition, as an alternative real-time method, the third step: the step of setting the air guide gap 4 can be omitted, and air circulation inside and outside the gasket body 1 can be achieved only through the air guide groove 2.

[0056] Obviously, the above embodiments are merely examples for the purpose of clear explanation, and are not intended to limit the implementation methods. For those skilled in the art, other different forms of changes or modifications can be made based on the above description. It is not necessary and impossible to list all the implementation methods here. The obvious changes or modifications derived therefrom are still within the scope of protection of the invention.

Claims

1. An air guide gasket, characterized in that: For sensors including: The gasket body (1) is an annular structure having two joint surfaces, an upper surface and a lower surface; An air guide groove (2) is arranged on at least one of the joint surfaces of the gasket body (1), and the air guide groove (2) is connected to the inner and outer sides of the gasket body (1); An air guide gap (4) is arranged on the end surface of the support step (3) of the gasket body (1) and is surrounded by the air guide groove (2), and both ends of the air guide gap (4) are respectively connected to the air guide groove (2); When in use, the gasket bodies (1) are stacked in sequence, and when stacking, two gasket bodies (1) are supported by the support steps (3); when the sensor is evacuated and exhausted, the gas between two adjacent gasket bodies (1) is discharged through the gas guide groove (2) and the gas guide gap (4).

2. The air guide gasket according to claim 1, characterized in that: The gas guide grooves (2) are provided on both the upper and lower joint surfaces of the gasket body (1).

3. The air guide gasket according to claim 1, characterized in that: The air guide groove (2) is in the shape of a sine curve.

4. The air guide gasket according to claim 3, characterized in that: The air guide grooves (2) have two mutually intersecting grooves on the joint surface.

5. The air guide gasket according to claim 1, characterized in that: The air guiding slits (4) are provided with two on the end surface of the supporting step (3), and the two air guiding slits (4) are connected in a cross-shaped manner.

6. The air guide gasket according to claim 4, characterized in that: The width of the air guiding gap (4) is 0.1-1 mm.

7. The air guide gasket according to claim 1, characterized in that: The thickness of the gasket body (1) is 0.05-0.35 mm.

8. The air guide gasket according to claim 7, characterized in that: The depth of the air guide groove (2) is 0.01-0.1 mm.

9. A method for manufacturing an air guide gasket according to any one of claims 1 to 8, characterized in that: The following steps are involved: Select the gasket body (1) according to the thickness requirement; An air guide groove (2) is provided on the joint surface of the gasket body (1) by using a laser, electron beam, chemical corrosion or electrochemical corrosion method to connect the inner and outer sides of the gasket body (1).

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