Probe Card Driving Device and Laser Trimming Machine

Abstract

This application relates to the technical field of resistor production, and particularly to a probe card driving device and a laser trimming machine. The probe card driving device includes a probe card holder, a first driving device, and a protection mechanism; the driving end of the first driving device is connected to the probe card holder to drive the probe card holder to descend to the second position, so that the probe card on the probe card holder presses on the resistor chip to measure the resistance value of the resistor; after the measurement is completed, the probe card holder is driven to rise back to the first position. One end of the protection mechanism is formed with a liftable driving end. When the driving end of the protection mechanism rises, it can push the probe card holder to rise accordingly, so that the probe card holder returns to the first position; when the first driving device can operate normally, the driving end of the protection mechanism descends to a low position to not interfere with the operation of the probe card holder; when the first driving device cannot operate normally, the protection mechanism pushes the probe card holder to rise back to the first position and provides an upward supporting force to the probe card holder, thereby preventing the probe card holder from falling and damaging the probes.

Description

Technical Field

[0001] The present invention relates to the technical field of resistor production, and more particularly to a probe card driving device and a laser trimming machine. Background Art

[0002] In the resistor production industry, the probe card driving device is an important module of the laser trimming machine. When using the laser trimming machine to adjust the resistance value of a resistor, it is necessary to use the driving device to drive the probe card to lift and lower, so that the probe card presses on the resistor substrate and applies a certain pressure to the resistor. However, when the driving device fails, the probe card may drop and cause the probe to be damaged, resulting in significant economic losses. Summary of the Invention

[0003] The purpose of the present invention is to provide a probe card driving device and a laser trimming machine to protect the probe card to a certain extent and prevent the probe card from being damaged.

[0004] The present invention provides a probe card driving device, including a probe card holder, a first driving device, and a protection mechanism. The probe card holder is used to fix the probe card. The driving end of the first driving device is connected to the probe card holder and is used to drive the probe card holder to reciprocate between a first position and a second position. When the first driving device stops driving, the protection mechanism can drive the probe card holder to move towards the first position.

[0005] Further, it also includes a frame and a connecting plate. The first driving device is located inside the frame, and the driving end of the first driving device is connected to the probe card holder through the connecting plate. The protection mechanism includes a top plate and a second driving device. The second driving device is fixedly installed inside the frame, and the driving end of the second driving device is connected to the top plate. When the first driving device stops driving, the second driving device can drive the top plate to move, so that the top plate abuts against the connecting plate and pushes the connecting plate and the probe card holder towards the first position.

[0006] Further, the protection mechanism further includes an elastic member. One end of the elastic member is a fixed end, and the other end of the elastic member is connected to the top plate. When the top plate moves in a direction away from the first position, the elastic member is compressed.

[0007] Further, it also includes a guide post. One end of the guide post is connected to the top plate, and the other end of the guide post can be inserted into a guide hole opened on the frame. The elastic member is sleeved on the guide post.

[0008] Further, it further includes a first limit baffle and a second limit baffle provided on the frame; when the probe card holder moves to the first position, the probe card holder can abut against the first limit baffle; when the probe card holder moves to the second position, the probe card holder can abut against the second limit baffle.

[0009] Further, it further includes a grating ruler, the grating ruler is installed on the frame, the grating ruler is used to measure the moving distance of the probe card holder, and the grating ruler is electrically connected to the first driving device.

[0010] Further, the number of the elastic members is two, and the two elastic members are symmetrically distributed on both sides of the second driving device.

[0011] Further, the second driving device is a cylinder, and the elastic member is a spring.

[0012] Further, the first driving device is an audio motor.

[0013] The present invention also provides a laser resistor trimming machine, including the probe card driving device described in any one of the above.

[0014] Compared with the prior art, the beneficial effects of the present invention are:

[0015] The probe card driving device provided by the present invention includes a probe card holder, a first driving device, and a protection mechanism; the probe card for measuring the resistance value is fixedly arranged on the probe card holder, the driving end of the first driving device is connected to the probe card holder, and under the driving of the first driving device, the probe card holder can reciprocate between a first position and a second position along the driving direction of the first driving device; when adjusting the resistance value of the resistor chip by a laser trimming machine, the resistor chip is horizontally placed on the jig of the laser trimming machine, the probe card holder and the probe card located on the probe card holder are located above the resistor chip, and the first driving device can drive the probe card holder and the probe card to move up and down in the vertical direction; when the first driving device drives the probe card holder to move to the second position, the probe on the probe card can press on the resistor chip with a certain pressure, so that the resistance value of the resistor can be measured in real time during the laser trimming process of the resistor chip; when a trimming is completed, the first driving device drives the probe card holder to drive the probe card to rise to the first position, so that the probe on the probe card is away from the resistor chip. At this time, the first driving device can provide an upward supporting force to the probe card holder, so that the probe card holder stays stably at the first position. One end of the protection mechanism is formed with a liftable driving end. When the driving end of the protection mechanism rises, it can push the probe card holder to rise accordingly, so that the probe card holder and the probe card return to the first position away from the resistor chip below; in specific use, first, the driving end of the protection mechanism is lowered to a low position, so that the protection mechanism does not interfere with the movement of the probe card holder between the first position and the second position under the driving of the first driving device; when the first driving device cannot work properly, the protection mechanism can operate normally to push the probe card holder to rise back to the first position and provide an upward supporting force to the probe card holder, so that the probe card holder stays stably at the first position, thereby preventing the probe card holder from falling and damaging the probe.

[0016] The present invention also provides a laser trimming machine, including the probe card driving device described above, so the laser trimming machine also has the beneficial effects of the probe card driving device. Description of the Drawings

[0017] In order to more clearly illustrate the specific embodiments of the present invention or the technical solutions in the prior art, the following will briefly introduce the drawings required for use in the description of the specific embodiments or the prior art. Obviously, the following drawings are some embodiments of the present invention. For those of ordinary skill in the art, other drawings can be obtained based on these drawings without creative efforts.

[0018] Figure 1 It is a schematic structural diagram of the probe card driving device provided by an embodiment of the present invention;

[0019] Figure 2 It is a schematic structural diagram of the probe card driving device provided by an embodiment of the present invention with the frame removed;

[0020] Figure 3Schematic diagram of the second driving device of the probe card driving device provided by the embodiment of the present invention;

[0021] Figure 4 It is Figure 3 The cross-sectional view of the A-A section in the figure.

[0022] Reference numerals:

[0023] 1 - probe card holder, 2 - first driving device, 3 - protection mechanism, 31 - second driving device, 32 - elastic member, 33 - top plate, 34 - guiding column, 35 - guiding hole, 4 - frame, 5 - connecting plate, 6 - first limiting baffle, 7 - second limiting baffle, 8 - grating scale. Detailed implementation manners

[0024] Next, the technical solutions of the present invention will be clearly and completely described in conjunction with the accompanying drawings. Obviously, the described embodiments are some, but not all, of the embodiments of the present invention.

[0025] Generally, the components of the embodiments of the present invention described and shown in the accompanying drawings here can be arranged and designed in various different configurations. Therefore, the following detailed description of the embodiments of the present invention provided in the accompanying drawings is not intended to limit the scope of the claimed invention, but merely represents the selected embodiments of the present invention.

[0026] All other embodiments obtained by those of ordinary skill in the art based on the embodiments of the present invention without making creative efforts fall within the scope of protection of the present invention.

[0027] In the description of the present invention, it should be noted that the orientation or positional relationship indicated by the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. is based on the orientation or positional relationship shown in the accompanying drawings, and is only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation of the present invention. In addition, the terms "first", "second", "third" are only used for descriptive purposes and cannot be understood as indicating or implying relative importance.

[0028] In the description of the present invention, it should be noted that unless otherwise clearly specified and limited, the terms "installed", "connected", "connected" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be directly connected, or indirectly connected through an intermediate medium, and it can be the communication inside two elements. For those of ordinary skill in the art, the specific meanings of the above terms in the present invention can be understood according to specific situations.

[0029] The following will refer to Figures 1 to 4 describe the probe card driving device and the laser trimming machine described in some embodiments of the present application.

[0030] The present application provides a probe card driving device, as Figures 1 to 4 shown, which includes a probe card holder 1, a first driving device 2 and a protection mechanism 3; the probe card holder 1 is used to fix the probe card, the driving end of the first driving device 2 is connected to the probe card holder 1, and is used to drive the probe card holder 1 to reciprocate between a first position and a second position; when the first driving device 2 stops driving, the protection mechanism 3 can drive the probe card holder 1 to move towards the first position.

[0031] The probe card driving device provided by the present application includes a probe card holder 1, a first driving device 2 and a protection mechanism 3; a probe card for measuring the resistance value is fixedly arranged on the probe card holder 1, the driving end of the first driving device 2 is connected to the probe card holder 1, and under the drive of the first driving device 2, the probe card holder 1 can reciprocate between a first position and a second position along the driving direction of the first driving device 2; when the resistance value of the resistor chip is adjusted by a laser trimming machine, the resistor chip is horizontally placed on the fixture of the laser trimming machine, the probe card holder 1 and the probe card located on the probe card holder 1 are located above the resistor chip, and the first driving device 2 can drive the probe card holder 1 and the probe card to lift and lower in the vertical direction; when the first driving device 2 drives the probe card holder 1 to move to the second position, the probe on the probe card can press on the resistor chip with a certain pressure, so that the resistance value of the resistor can be measured in real time during the laser trimming process of the resistor chip; when a trimming is completed, the first driving device 2 drives the probe card holder 1 to drive the probe card to rise to the first position, so that the probe on the probe card is away from the resistor chip to facilitate the replacement of the resistor chip. At this time, the first driving device 2 can provide an upward supporting force to the probe card holder 1 to make the probe card holder 1 stay stably at the first position.

[0032] One end of the protection mechanism 3 is formed with a liftable driving end. When the first driving device 2 stops driving, the driving end of the protection mechanism 3 can rise and push the probe card holder 1 to rise accordingly, so that the probe card holder 1 and the probe card return to the first position away from the resistance sheet below. In specific use, first, the driving end of the protection mechanism 3 is lowered to a low position so that the protection mechanism 3 does not interfere with the movement of the probe card holder 1 between the first position and the second position driven by the first driving device 2; however, during the operation process, the first driving device 2 may malfunction. At this time, the first driving device 2 cannot provide the driving force and supporting force for the reciprocating movement of the probe card holder 1, and the probe card holder 1 will fall downward under the action of gravity, causing the probe on the probe card to collide with the device below, resulting in the probe being bruised, bent and deformed and completely scrapped, causing serious economic losses; therefore, the present application provides a protection mechanism 3. When the first driving device 2 cannot work properly, the protection mechanism 3 can operate normally to push the probe card holder 1 to rise back to the first position and provide an upward supporting force for the probe card holder 1, so that the probe card holder 1 stays stably at the first position, thereby preventing the probe card holder 1 from falling and damaging the probe.

[0033] In an embodiment of the present application, preferably, as Figure 2 and Figure 3 shown, the probe card driving device further includes a frame 4 and a connecting plate 5; the first driving device 2 is located inside the frame 4, and the driving end of the first driving device 2 is connected to the probe card holder 1 through the connecting plate 5; the protection mechanism 3 includes a top plate 33 and a second driving device 31; the second driving device 31 is fixedly installed inside the frame 4, and the driving end of the second driving device 31 is connected to the top plate 33; when the first driving device 2 stops driving, the second driving device 31 can drive the top plate 33 to move so that the top plate 33 abuts against the connecting plate 5 and pushes the connecting plate 5 and the probe card holder 1 to move towards the first position.

[0034] In this embodiment, the probe card driving device further includes a frame 4 and a connecting plate 5; the first driving device 2 is fixedly installed inside the frame 4, and the probe card holder 1 is suspended outside the frame 4 and connected to the driving end of the first driving device 2 through the connecting plate 5; the first driving device 2 can drive the connecting plate 5 to lift, thereby driving the probe card holder 1 to lift. The protection mechanism 3 includes a second driving device 31 and a top plate 33; the second driving device 31 is fixedly installed inside the frame 4, and the driving end of the second driving device 31 is connected to the top plate 33 to drive the top plate 33 to lift; the top plate 33 is located below the connecting plate 5 and is arranged parallel to the connecting plate 5, so that during the rising process of the top plate 33, the top plate 33 can abut against the lower part of the connecting plate 5, provide an upward driving force for the connecting plate 5 and the probe card holder 1, and make the probe card holder 1 move upward; at the same time, the second driving device 31 and the top plate 33 can also provide a stable upward supporting force for the connecting plate 5.

[0035] Specifically, when the first driving device 2 can operate normally, first, the second driving device 31 drives the top plate 33 to descend to the low position, so that during the process of the connecting plate 5 and the probe card holder 1 moving from the first position to the second position under the action of the first driving device 2, the second driving device 31 and the top plate 33 will not interfere with the movement of the connecting plate 5; when the first driving device 2 fails, the second driving device 31 starts to work, the second driving device 31 drives the top plate 33 to rise, the top plate 33 will abut against the lower side of the connecting plate 5, and push the connecting plate 5 and the probe card holder 1 to move upward accordingly, so that the probe card holder 1 returns to the first position; then the second driving device 31 and the top plate 33 continue to provide an upward supporting force to the connecting plate 5 to make the probe card holder 1 stay stably at the first position, thereby preventing the probe card holder 1 from falling when the first driving device 2 cannot work properly and causing a probe collision accident.

[0036] In an embodiment of the present application, preferably, as Figures 2 to 4 shown, the protection mechanism 3 further includes an elastic member 32; one end of the elastic member 32 is a fixed end, and the other end of the elastic member 32 is connected to the top plate 33; when the top plate 33 moves towards the second position, the elastic member 32 is compressed.

[0037] In this embodiment, the protection mechanism 3 further includes an elastic member 32, the elastic member 32 is fixedly arranged between the frame 4 and the top plate 33, one end of the elastic member 32 is fixedly connected to the frame 4, and the other end of the elastic member 32 is connected to the top plate 33; when the second driving device 31 drives the top plate 33 to move from the high position to the low position, the elastic member 32 will be compressed, and the elastic force of the elastic member 32 will provide an upward driving force to the top plate 33; thus when both the first driving device 2 and the second driving device 31 cannot work properly, relying on the elastic force of the elastic member 32 can still provide an upward driving force to the connecting plate 5 and the probe card holder 1, so that the probe card holder 1 returns to the safe first position.

[0038] In an embodiment of the present application, preferably, as Figure 3 and Figure 4 shown, the probe card driving device includes a guide post 34; one end of the guide post 34 is connected to the top plate 33, and the other end of the guide post 34 can be inserted into a guide hole 35 opened on the frame 4; the elastic member 32 is sleeved on the guide post 34.

[0039] In this embodiment, the probe card driving device further includes a guide post 34. The guide post 34 is arranged vertically between the top plate 33 and the base of the frame 4. A guide hole 35 is formed in the base of the frame 4. The lower end of the guide post 34 is inserted into the guide hole 35, and the upper end of the guide post 34 is fixedly connected to the top plate 33. When the top plate 33 moves up and down, it can drive the guide post 34 to move up and down accordingly, but the bottom end of the guide post 34 is always located in the guide hole 35, so as to ensure that the guide post 34 is always in the vertical direction. The elastic member 32 is sleeved outside the guide post 34 so that the elastic member 32 does not deflect, thereby ensuring that the acting force of the elastic member 32 on the top plate 33 is always in the vertical direction.

[0040] In an embodiment of the present application, preferably, as Figure 1 shown, the probe card driving device further includes a first limit baffle 6 and a second limit baffle 7 arranged on the frame 4. When the probe card holder 1 moves to the first position, the probe card holder 1 can abut against the first limit baffle 6. When the probe card holder 1 moves to the second position, the probe card holder 1 can abut against the second limit baffle 7.

[0041] In this embodiment, the probe card driving device further includes a first limit baffle 6 and a second limit baffle 7 arranged on the frame 4. The first limit baffle 6 is located at the upper end of the frame 4. When the probe card holder 1 moves to the first position, the upper end of the probe card holder 1 can abut against the first limit baffle 6. The second limit baffle 7 is located at the lower end of the frame 4. When the probe card holder 1 moves to the second position, the lower end of the probe card holder 1 can abut against the second limit baffle 7. Thus, the probe card holder 1 is rigidly limited by the first limit baffle 6 and the second limit baffle 7 arranged on the frame 4, further ensuring the smooth movement of the probe card holder 1 and the probe card between the first position and the second position, and ensuring that the probe card holder 1 will not drop to a position below the second position and cause an accident of probe damage.

[0042] In an embodiment of the present application, preferably, as Figure 1 shown, the probe card driving device further includes a grating scale 8. The grating scale 8 is installed on the frame 4. The grating scale 8 is used to measure the movement distance of the probe card holder 1, and the grating scale 8 is electrically connected to the first driving device 2.

[0043] In this embodiment, the probe card driving device further includes a grating scale 8. The grating scale 8 is fixedly installed on the frame 4. The movement distance of the probe card holder 1 moving up and down can be measured in real time through the grating scale 8, so as to obtain the position of the probe card holder 1 in real time. For example, when detecting the resistance value of the probe card through the probe, it can be measured through the grating scale 8 whether the probe card holder 1 runs to the second position under the drive of the first driving device 2. After the detection is completed, whether the probe card holder 1 returns to the first position above under the drive of the first driving device 2.

[0044] The grating scale 8 is electrically connected to the first driving device 2. During the process of the first driving device 2 driving the probe card holder 1 to operate, the position of the probe card holder 1 is measured in real time by the grating scale 8, and the measured data is fed back to the control system of the first driving device 2 to achieve the control of the first driving device 2, so that the probe card holder 1 can be driven by the first driving device 2 to run to the specified position; in the specific operation process, during the process of the first driving device 2 driving the probe card holder 1 to descend to the second position, the grating scale 8 can measure the descending distance of the probe card holder 1 in real time, so as to measure whether the probe card holder 1 runs to the second position, and feed back the position information of the probe card holder 1 to the control system of the first driving device 2. When the probe card holder 1 reaches the second position, the control system controls the first driving device 2 to stop, so that the probe card holder 1 stays stably at the second position to measure the resistance value of the resistor chip; during the process of raising the probe card holder 1 to the first position, the real-time position of the probe card holder 1 is also measured by the grating scale 8 to judge whether the probe card holder 1 returns to the first position under the drive of the first driving device 2.

[0045] In an embodiment of the present application, preferably, as Figure 4 shown, the number of the elastic members 32 is two, and the two elastic members 32 are symmetrically distributed on both sides of the second driving device 31.

[0046] In this embodiment, the number of the elastic members 32 is two, and the two elastic members 32 are symmetrically distributed on both sides of the second driving device 31; specifically, the driving end of the second driving device 31 is connected to the middle of the top plate 33, and the two elastic members 32 are symmetrically distributed on both sides of the first driving device 2 and are connected to the two ends of the top plate 33 in the length direction, so that the elastic force of the elastic members 32 acts on the top plate 33 evenly, making the lifting movement of the top plate 33 smoother.

[0047] In an embodiment of the present application, preferably, as Figure 1 shown, the first driving device 2 is an audio motor.

[0048] In this embodiment, the first driving device 2 adopts an audio motor with high reliability. When compared with a motor with the same output power, the audio motor has a smaller volume and weight; at the same time, the audio motor can achieve stepless speed regulation without relying on any equipment, thus further reducing the weight and the required occupied space.

[0049] When the audio motor is normally powered on, the driving end of the audio motor can drive the connecting plate 5 and the probe card holder 1 to reciprocate between the first position and the second position; when a power failure occurs, the driving end of the audio motor will reset, and its driving end will drop below the second position, so that it can no longer provide a supporting force for the probe card holder 1, and the probe card holder 1 will fall and a probe collision accident will occur; the present application is provided with a protection mechanism 3, and in the case of a power failure, the protection mechanism 3 can provide an upward driving force for the connecting plate 5, so that the probe card holder 1 rises to the first position and stays stably at the first position, thereby avoiding the occurrence of a probe collision accident.

[0050] In an embodiment of the present application, preferably, the second driving device 31 is a cylinder, and the elastic member 32 is a spring.

[0051] In this embodiment, the second driving device 31 is a cylinder, and the elastic member 32 is a spring; in the case of a power failure, the first driving device 2 will not be able to work normally, and the driving end of the first driving device 2 will reset below the second position; at this time, the second driving device 31 relying on gas as a power source can still work normally, and the driving end of the second driving device 31 drives the top plate 33 and the connecting plate 5 to rise, so that the probe card holder 1 returns to the first position, thereby preventing the probe card holder 1 from falling.

[0052] When a power failure and a gas cut-off occur simultaneously, the driving end of the second driving device 31 has no air source, and the acting force on the top plate 33 will disappear. At this time, the elastic force of the spring in the compressed state will play a role, and under the action of the elastic force of the spring, the top plate 33 and the connecting plate 5 rise, and the driving ends of the first driving device 2 and the second driving device 31 also move upward under the action of an external force; thereby, the probe card holder 1 is pushed upward to the first position by the elastic force of the spring, preventing the probe card holder 1 from falling.

[0053] The present application also provides a laser trimming machine, including the probe card driving device of any of the above embodiments.

[0054] In this embodiment, the laser trimming machine includes a probe card driving device, so the laser trimming machine has all the beneficial effects of the probe card driving device, which will not be elaborated here one by one.

[0055] Finally, it should be noted that: the above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit it; although the present invention has been described in detail with reference to the foregoing embodiments, those of ordinary skill in the art should understand that: it is still possible to modify the technical solutions recorded in the foregoing embodiments, or perform equivalent replacements on some or all of the technical features; and these modifications or replacements do not make the essence of the corresponding technical solutions deviate from the scope of the technical solutions of the embodiments of the present invention.

Claims

1. A probe card driving device, characterized in that, It includes a frame, a connecting plate, a probe card holder, a first driving device and a protection mechanism; The first driving device is located inside the frame, and the driving end of the first driving device is connected to the probe card holder through the connecting plate; the protection mechanism includes a top plate and a second driving device; the second driving device is fixedly installed inside the frame, and the driving end of the second driving device is connected to the top plate; The probe card holder is used to fix the probe card, and the driving end of the first driving device is connected to the probe card holder to drive the probe card holder to reciprocate between a first position and a second position; the protection mechanism further includes an elastic member; one end of the elastic member is a fixed end, and the other end of the elastic member is connected to the top plate; when the top plate moves in a direction away from the first position, the elastic member is compressed; When the first driving device operates normally, the second driving device drives the top plate to descend to a low position, and the top plate compresses the elastic member; When the first driving device stops driving, the second driving device can drive the top plate to move so that the top plate abuts against the connecting plate and pushes the connecting plate and the probe card holder towards the first position; When both the first driving device and the second driving device stop driving, the elastic member drives the top plate and the connecting plate to rise, so that the probe card holder is pushed to the first position.

2. The probe card driving device according to claim 1, characterized in that, It further includes a guide post; One end of the guide post is connected to the top plate, and the other end of the guide post can be inserted into a guide hole opened on the frame; The elastic member is sleeved on the guide post.

3. The probe card driving device according to claim 1, characterized in that, It further includes a first limit baffle and a second limit baffle provided on the frame; When the probe card holder moves to the first position, the probe card holder can abut against the first limit baffle; When the probe card holder moves to the second position, the probe card holder can abut against the second limit baffle.

4. The probe card driving device according to claim 1, characterized in that, It further includes a grating ruler, the grating ruler is installed on the frame, the grating ruler is used to measure the movement distance of the probe card holder, and the grating ruler is electrically connected to the first driving device.

5. The probe card driving device according to claim 1, characterized in that, The number of the elastic members is two, and the two elastic members are symmetrically distributed on both sides of the second driving device.

6. The probe card driving device according to claim 1, characterized in that, The second driving device is a cylinder, and the elastic member is a spring.

7. The probe card driving device according to claim 1, characterized in that, The first driving device is an audio motor.

8. A laser trimming machine, characterized in that, It includes the probe card driving device according to any one of claims 1-7.

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