Continuous wafer loading device for silicon wafer inserter

Abstract

The present application discloses a continuous wafer loading device for a silicon wafer inserting machine, comprising a conveyor belt and a wafer loading mechanism connected to the conveyor belt, characterized in that: a pair of support plates are symmetrically arranged above the conveyor belt, each of the support plates is provided with a horizontal moving device with the same conveying direction as the conveyor belt, a plug plate is arranged between the pair of support plates, the plug plate is arranged vertically to the conveyor belt, and the two ends of the plug plate are detachably connected to two horizontal moving devices. In the wafer loading device, the silicon wafers are supported and spaced by the plug plate, replacing the original flower basket, thereby avoiding the replacement of the flower basket, and only the position of the plug plate needs to be repeatedly adjusted and then connected to the horizontal moving device, so as to achieve continuous wafer loading and improve the wafer loading efficiency.

Description

Technical Field

[0001] The present application relates to the field of silicon wafers, and in particular to a continuous wafer loading device of a silicon wafer inserter. Background Art

[0002] In the prior art, a silicon wafer loading device includes a conveyor belt and a loading mechanism. The silicon wafer is transmitted via a flower basket on the conveyor belt and loaded via the loading mechanism. During the entire loading process, the flower basket needs to be replaced continuously, and continuous loading cannot be achieved. Summary of the invention

[0003] The purpose of the present invention is to provide a continuous wafer loading device for a silicon wafer inserter to overcome the deficiencies in the prior art.

[0004] To achieve the above object, the present invention provides the following technical solutions:

[0005] The embodiment of the present application discloses a continuous wafer loading device of a silicon wafer inserter, comprising a conveyor belt and a wafer loading mechanism connected to the conveyor belt, characterized in that: a pair of support plates are symmetrically arranged above the conveyor belt, each of the support plates is provided with a horizontal moving device having the same conveying direction as the conveyor belt, an insert plate is arranged between the pair of support plates, the insert plate is vertically arranged to the conveyor belt, and both ends of the insert plate are detachably connected to two horizontal moving devices.

[0006] Preferably, in the above-mentioned continuous wafer loading device of a silicon wafer inserter, the horizontal moving device includes a pair of transmission wheels, a double-sided toothed conveyor belt is wound between the pair of transmission wheels, clamping blocks are protrudingly provided at both ends of the insert plate, and the clamping blocks are clamped with grooves between adjacent teeth on the double-sided toothed conveyor belt, a bearing seat is protrudingly provided on the support plate, and the transmission wheel is connected to the bearing seat through an axis.

[0007] Preferably, in the above-mentioned continuous wafer loading device of a silicon wafer inserter, a stopper is vertically provided downwardly at one end of the clamping block away from the inserting plate.

[0008] Preferably, in the above-mentioned continuous wafer loading device of a silicon wafer inserter, the clamping block and the stop block are integrally formed.

[0009] Preferably, in the above-mentioned continuous wafer loading device of a silicon wafer inserter, the inserting plate and the clamping block are integrally formed.

[0010] Preferably, in the above-mentioned continuous wafer loading device of a silicon wafer inserter, the bottom surface of the baffle extends to the upper end surface of the conveyor belt.

[0011] Compared with the prior art, the advantages of the present invention are:

[0012] In the loading device, silicon wafers of different specifications and customer requirements are supported and spaced by plug-ins. During the conveying process of the conveyor belt, the front and rear silicon wafers will push the plug-ins connected to the horizontal moving device to move with the conveyor belt, replacing the original flower basket, thus avoiding the constant replacement of the flower basket. It is only necessary to repeatedly adjust the position of the plug-ins and then plug them into the horizontal moving device to achieve continuous loading and improve loading efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0013] In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments recorded in the present application. For ordinary technicians in this field, it is easy to obtain other drawings based on these drawings without creative work.

[0014] Figure 1 Shown is a schematic structural diagram of a continuous wafer loading device of a silicon wafer inserter in a specific embodiment of the present invention. DETAILED DESCRIPTION

[0015] The following will describe the technical solutions in the embodiments of the present invention in detail in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0016] Ginseng Figure 1 As shown, the continuous wafer loading device of the silicon wafer inserter in this embodiment includes a conveyor belt 1 and a wafer loading mechanism 2 connected to the conveyor belt 1, a pair of support plates 3 are symmetrically arranged above the conveyor belt 1, each support plate 3 is provided with a horizontal moving device 4 with the same conveying direction as the conveyor belt 1, an insert plate 5 is arranged between the pair of support plates 3, the insert plate 5 is vertically arranged to the conveyor belt 1, and both ends of the insert plate 5 are detachably connected to the two horizontal moving devices 4.

[0017] Furthermore, the bottom surface of the baffle 5 extends to the upper end surface of the conveyor belt 1 .

[0018] In this technical solution, the conveyor belt and the loading mechanism are both existing technologies used in the field of silicon wafer loading. The loading device supports and spaces silicon wafers of different specifications and customer requirements through plug-ins. During the conveying process of the conveyor belt, the front and rear silicon wafers will push the plug-ins connected to the horizontal moving device to move with the conveyor belt, replacing the original flower basket, thereby avoiding the constant replacement of the flower basket. It is only necessary to repeatedly adjust the position of the plug-in plate and then plug it into the horizontal moving device to achieve continuous loading and improve loading efficiency.

[0019] In one embodiment, the horizontal moving device 4 includes a pair of transmission wheels 401, a double-sided toothed conveyor belt 402 is wound between the pair of transmission wheels 401, clamping blocks 501 are protruding from both ends of the plug plate 5, and the clamping blocks 501 are clamped with grooves between adjacent teeth on the double-sided toothed conveyor belt 402, a bearing seat 301 is protruding from the support plate 3, and the transmission wheel 401 is connected to the bearing seat 301 through an axis 403.

[0020] Furthermore, a stopper 502 is vertically provided downwardly at one end of the clamping block 501 away from the plugboard 5 .

[0021] Furthermore, the clamping block 501 and the stop block 502 are integrally formed.

[0022] Furthermore, the plug board 5 and the clamping block 501 are integrally formed.

[0023] In this technical solution, the clamping block makes it easier for workers to remove and connect the plug board, and the baffle plate is used to prevent the plug board from moving between the two horizontal moving devices and from detaching from the double-sided tooth conveyor belt, which is more stable and efficient.

[0024] In other embodiments, horizontal movement may also be achieved through the cooperation of the slide rail and the slide block.

[0025] It should be noted that, in this article, relational terms such as first and second, etc. are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Moreover, the terms "include", "comprise" or any other variants thereof are intended to cover non-exclusive inclusion, so that a process, method, article or device including a series of elements includes not only those elements, but also other elements not explicitly listed, or also includes elements inherent to such process, method, article or device. In the absence of further restrictions, the elements defined by the sentence "comprise a ..." do not exclude the existence of other identical elements in the process, method, article or device including the elements.

[0026] The above is only a specific implementation method of the present application. It should be pointed out that for ordinary technicians in this technical field, several improvements and modifications can be made without departing from the principles of the present application. These improvements and modifications should also be regarded as the scope of protection of the present application.

Claims

1. A continuous wafer loading device for a silicon wafer inserter, comprising a conveyor belt and a wafer loading mechanism connected to the conveyor belt, characterized in that: A pair of support plates are symmetrically arranged above the conveyor belt, each of the support plates is provided with a horizontal moving device with the same conveying direction as the conveyor belt, a plug plate is arranged between the pair of support plates, the plug plate is arranged perpendicular to the conveyor belt, and both ends of the plug plate are detachably connected to the two horizontal moving devices, and the horizontal moving device includes a pair of transmission wheels, a double-sided toothed conveyor belt is wound around the pair of transmission wheels, clamping blocks are convexly provided at both ends of the plug plate, and the clamping blocks are clamped with grooves between adjacent teeth on the double-sided toothed conveyor belt, a bearing seat is convexly provided on the support plate, and the transmission wheel is connected to the bearing seat through a shaft, and the bottom surface of the plug plate extends to the upper end surface of the conveyor belt, and the silicon wafers are supported and spaced by the plug plate. During the conveying process of the conveyor belt, the front and rear silicon wafers will push the plug plate connected to the horizontal moving device to follow the conveyor belt to move.

2. The continuous wafer loading device of a silicon wafer inserter according to claim 1, characterized in that: A stopper is vertically arranged downwards at one end of the clamping block away from the plug board.

3. The continuous wafer loading device of a silicon wafer inserter according to claim 1, characterized in that: The clamping block and the stop block are integrally formed.

4. The continuous wafer loading device of a silicon wafer inserter according to claim 1, characterized in that: The plug board and the clamping block are integrally formed.

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