Flexible ultrasonic transducer array, focused transducer

Abstract

The present invention provides a flexible ultrasonic transducer array and a focusing transducer, which belong to the field of ultrasonic technology. The flexible ultrasonic transducer array of the present invention includes a flexible substrate having a plurality of through holes arranged at intervals; a plurality of vibrators, which are respectively fixed in the through holes and used for directional emission of ultrasonic waves, and the direction of each vibrator emitting ultrasonic waves is toward the same side of the flexible substrate; wherein the flexible substrate has an upper surface and a lower surface arranged oppositely, each of the vibrators has a first end and a second end arranged oppositely, and the direction from the first end to the second end is the same as the direction from the upper surface to the lower surface; the first end of each of the vibrators protrudes from the upper surface, and the second end of each of the vibrators protrudes from the lower surface.

Description

Technical Field

[0001] The invention belongs to the field of ultrasonic technology, and in particular relates to a flexible ultrasonic transducer array and a focusing transducer. Background Art

[0002] With the increasing application of ultrasonic technology, there are more and more requirements for ultrasonic transducer arrays. For example, in medical applications, many occasions require that the emitting surface of the ultrasonic transducer array must be adapted to the shape of the human body surface, which requires that the ultrasonic transducer array must be able to change its shape and sound field parameters conveniently and quickly. Based on this, technicians in this field or related fields have tried to use phased array transducers to adjust their sound field parameters. However, they have failed due to the complexity of the phased array transducer system, high cost, difficulty in manufacturing, and serious imbalance in cost performance. In other words, in the prior art, the shape of the ultrasonic transducer array cannot be changed at will, and only multiple different ultrasonic transducer arrays can be used for different needs. Summary of the invention

[0003] The present invention aims to solve at least one of the technical problems existing in the prior art and provide a shape-variable flexible ultrasonic transducer array and a focusing transducer.

[0004] The technical solution adopted to solve the technical problem of the present invention is a flexible ultrasonic transducer array, comprising:

[0005] A flexible substrate having a plurality of through holes arranged at intervals;

[0006] A plurality of vibration elements are respectively fixed in the through holes and used for directional emission of ultrasonic waves, and the direction in which each vibration element emits ultrasonic waves is toward the same side of the flexible substrate; wherein,

[0007] The flexible substrate has an upper surface and a lower surface arranged opposite to each other, each of the vibrators has a first end and a second end arranged opposite to each other, and the direction from the first end to the second end is the same as the direction from the upper surface to the lower surface; the first end of each of the vibrators protrudes from the upper surface, and the second end of each of the vibrators protrudes from the lower surface.

[0008] Preferably, a plurality of the through holes are arranged in an array.

[0009] Preferably, a plurality of first electrode lines are arranged on the upper surface, a first electrode is arranged at the first end of each of the vibration elements, and the first electrode is electrically connected to the first electrode line;

[0010] The lower surface is provided with a plurality of second electrode lines, the second end of each of the vibration elements is provided with a second electrode, and the second electrode is electrically connected to the second electrode line;

[0011] The first electrode and the second electrode are used to load a driving signal to drive the vibrator to emit ultrasonic waves.

[0012] Preferably, the first electrode is further provided in the area between the first end of each of the vibration elements and the upper surface;

[0013] The second electrode is also arranged in the area between the second end of each vibration element and the lower surface.

[0014] Preferably, the upper surface is further provided with a first lead wire; a plurality of the first electrode wires are connected to the first lead wire in parallel;

[0015] The lower surface is also provided with a second lead wire; a plurality of the second electrode wires are connected to the second lead wire in parallel.

[0016] Preferably, the upper surface is further provided with a plurality of first lead wires, and each of the first electrode wires is connected to one of the first lead wires;

[0017] The lower surface is also provided with a plurality of second lead-out wires, and each of the second electrode wires is connected to one of the second lead-out wires.

[0018] Preferably, a first pad is provided at a position where each of the vibrators intersects with the upper surface, and the first pad is used to connect the first electrode and the first electrode line, and to weld and fix the vibrator in the through hole;

[0019] A second pad is provided at a position where each of the vibrators intersects with the lower surface. The second pad is used to connect the second electrode and the second electrode line, and is used to weld and fix the vibrator in the through hole.

[0020] Preferably, the flexible substrate is formed by a composite of a metal material and an insulating material.

[0021] Preferably, the insulating material includes polyester ether.

[0022] Preferably, the flexible substrate is a flexible circuit board.

[0023] Preferably, the thickness of the flexible substrate is 0.05-2 mm.

[0024] Preferably, the vibrator is a piezoelectric vibrator.

[0025] The technical solution adopted to solve the technical problem of the present invention is a focusing transducer, including the above-mentioned flexible ultrasonic transducer array.

[0026] Preferably, the method further comprises: a rigid substrate, the flexible ultrasonic transducer array is fixed on the substrate, and each vibrator in the flexible ultrasonic transducer array emits ultrasonic waves toward a side away from the substrate.

[0027] Preferably, the substrate is a point-focusing spherical substrate or a line-focusing arc-surface substrate.

[0028] The present invention has the following beneficial effects:

[0029] Since the flexible ultrasonic transducer array in the present invention includes a flexible substrate with easy-to-deform and bendable characteristics, and a plurality of vibrators embedded in the flexible substrate, and the first end and the second end of the vibrator are respectively protruding from the upper surface and the lower surface thereof, the flexible ultrasonic transducer array provided by the present invention will also have the characteristics of easy-to-deform and bendable. In this way, when the flexible ultrasonic transducer array in the present invention is applied to the field of medical treatment, the shape of the flexible ultrasonic transducer array can change according to the shape of the human body surface, that is, for human body surfaces of different shapes, the same flexible ultrasonic transducer array can be used to perform ultrasonic imaging or ultrasonic treatment on them. BRIEF DESCRIPTION OF THE DRAWINGS

[0030] Figure 1 is a schematic diagram of a flexible ultrasonic transducer array according to embodiment 1 of the present invention;

[0031] Figure 2 is a schematic diagram of another flexible ultrasonic transducer array according to embodiment 1 of the present invention;

[0032] Figure 3 is a partial cross-sectional view of a flexible ultrasonic transducer array according to Embodiment 1 of the present invention;

[0033] Figure 4 is a schematic diagram of a focusing transducer according to embodiment 2 of the present invention;

[0034] Figure 5 is a schematic diagram of another focusing transducer according to embodiment 2 of the present invention;

[0035] The figures are marked as follows: 1. flexible substrate; 2. vibrator; 3. first electrode line; 4. first solder pad; 5. second lead wire; 6. first lead wire; 7. focus; 8. point-focusing spherical substrate; 9. focal line; 10. line-focusing spherical substrate; 11. second electrode; 12. input end of driving signal; 13. first solder joint; 14. second solder joint; 15. third solder joint; 16. fourth solder joint. DETAILED DESCRIPTION

[0036] In order to enable those skilled in the art to better understand the technical solution of the present invention, the present invention is further described in detail below in conjunction with the accompanying drawings and specific implementation methods.

[0037] Unless otherwise defined, the technical terms or scientific terms used in the present invention shall have the usual meanings understood by persons with ordinary skills in the field to which the present invention belongs. The words "first", "second" and similar words used in the present invention do not indicate any order, quantity or importance, but are only used to distinguish different components. Words such as "include" or "comprise" mean that the elements or objects appearing before the word include the elements or objects listed after the word and their equivalents, without excluding other elements or objects. "Up", "down" and the like are only used to indicate relative positional relationships. When the absolute position of the described object changes, the relative positional relationship may also change accordingly.

[0038] Embodiment 1:

[0039] like Figure 1 As shown, this embodiment provides a flexible ultrasonic transducer array, comprising: a flexible substrate 1, a plurality of vibration elements 2; wherein the flexible substrate 1 has a plurality of through holes arranged at intervals; the plurality of vibration elements are respectively fixed in the through holes for directional emission of ultrasonic waves, and the direction in which each vibration element 2 emits ultrasonic waves is toward the same side of the flexible substrate 1. wherein the flexible substrate has upper surfaces (i.e. Figure 1 plane A shown in the figure), the lower surface ( Figure 1 ), each oscillator has a first end (i.e. Figure 1 plane B shown in the figure), the second end ( Figure 1 (not shown in the figure), the direction from the first end to the second end is the same as the direction from the upper surface to the lower surface; the first end of each vibration element protrudes from the upper surface, and the second end of each vibration element protrudes from the lower surface.

[0040] That is to say, in this embodiment, one through hole is correspondingly provided with one vibrator 2, and the vibrator 2 is embedded in the flexible substrate 1 by being fixed in the through hole of the flexible substrate, and the first end and the second end of the vibrator are both protruding from the upper and lower surfaces of the flexible substrate 1. It can be seen from this that the position and number of the vibrators 2 on the flexible substrate 1 are determined by the position and number of the through holes; for example, if the flexible substrate 1 has twenty through holes arranged at intervals, then the flexible substrate 1 will also be provided with twenty vibrators 2 distributed at intervals.

[0041] Of course, those skilled in the art should understand that the number of through holes on the flexible substrate 1 in this embodiment can also be greater than the number of vibration elements 2, that is, vibration elements 2 are only set in some of the through holes; wherein, vibration elements 2 are only set in some of the through holes in the flexible substrate 1 (for example, vibration elements 2 are detachable), which can be set according to actual conditions. For example: when the area of ​​the patient's body part to be treated is small, vibration elements 2 only need to be set in the through holes in the central area of ​​the flexible substrate 1, and vibration elements 2 are not set in the through holes in the peripheral area. At this time, the vibration elements 2 in the central area of ​​the flexible substrate 1 can be used to treat the patient's part to be treated, thereby avoiding energy waste.

[0042] Since the flexible ultrasonic transducer array in this embodiment includes: a flexible substrate 1 that is easily deformable and bendable, and a plurality of vibrators embedded in the flexible substrate 1, wherein the first end and the second end of the vibrator are respectively protruding from the upper surface and the lower surface of the flexible substrate, that is, the first end of the vibrator is not in contact with the upper surface of the flexible substrate, that is, the first end thereof will not be bound by the flexible substrate. Similarly, the second end of the vibrator is not in contact with the lower surface of the flexible substrate, that is, the second end thereof will not be bound by the flexible substrate. This structural setting makes the first end and the second end of the vibrator both in a free state. In this way, when the flexible substrate is bent toward its upper surface, at this time, the distance between the first ends of any two adjacent vibrators will decrease, and the distance between the second ends of any two adjacent vibrators will increase. At this time, the surface formed by the first ends of the plurality of vibrators is a curved surface. The curved surface can be set according to the shape of the human body surface when the flexible ultrasonic transducer array in this embodiment is applied to the field of medical treatment. That is, for human body surfaces of different shapes, the same flexible ultrasonic transducer array can be used to perform ultrasonic imaging or ultrasonic treatment on them. Furthermore, when the shape of the flexible ultrasonic transducer array changes according to the shape of the human body surface, it can fit the human body surface, thereby improving the therapeutic effect of the flexible ultrasonic transducer array in this embodiment. It should be noted that the above-mentioned flexible ultrasonic transducer array fits the human body surface specifically means that the first ends of the multiple vibrators 2 fit the human body surface, and at this time, the first ends of the multiple vibrators 2 embedded in the flexible substrate 1 are used to transmit ultrasonic waves to the human body surface to treat the human body.

[0043] Among them, in this embodiment, preferably, the vibrator 2 can be a piezoelectric vibrator 2; of course, the vibrator 2 is not limited to the aforementioned piezoelectric vibrator 2, and no limitation is made here.

[0044] Preferably, the flexible substrate 1 has a plurality of through holes arranged in an array. At this time, it can be understood that a plurality of vibrators 2 are also arranged in an array on the substrate. This arrangement enables the vibrators 2 to be regularly arranged on the substrate, thereby greatly simplifying the subsequent wiring process on the flexible substrate 1.

[0045] Among them, this embodiment is preferred, wherein a plurality of first electrode lines 3 are provided on the upper surface of the flexible substrate 1, a first electrode is provided at the first end of each vibrator 2, and the first electrode is electrically connected to the first electrode line 3; a plurality of second electrode lines are provided on the lower surface of the flexible substrate 1, a second electrode 11 is provided at the second end of each vibrator 2, and the second electrode 11 is electrically connected to the second electrode line; the first electrode and the second electrode 11 are used to load a driving signal to drive the vibrator 2 to emit ultrasonic waves.

[0046] Further preferably, a first electrode is also provided in the area between the first end and the upper surface of each vibrator 2; and a second electrode 11 is also provided in the area between the second end and the lower surface of each vibrator 2. Specifically, when the metal electrode material is coated on the first end of each vibrator 2 to form the first electrode, the metal electrode material can also be further coated on the upper surface of the flexible substrate 1 along the first side of the vibrator 2. At this time, the metal electrode material on the first side is electrically connected to the first electrode line 3 through the first welding point 13 and the second welding point 14; wherein the first side of the vibrator 2 refers to: the area between the first end of the vibrator 2 and the upper surface of the flexible substrate 1. It can be seen from this that this structural setting can eliminate the need to form a wire connecting the first electrode and the first electrode line 3 on the first side of the vibrator 2, thereby simplifying the preparation process of the flexible ultrasonic transducer array in this embodiment and reducing costs. Similarly, when the second electrode 11 is formed at the second end of each vibrator 2 and the second side surface of the vibrator 2, the preparation process of the flexible ultrasonic transducer array in this embodiment can also be simplified and the cost can be reduced; wherein the second side surface of the vibrator 2 refers to: the area between the second end of the vibrator 2 and the lower surface of the flexible substrate 1.

[0047] More preferably, Figure 1 As shown, the upper surface of the flexible substrate 1 is also provided with a first lead wire 6, and a plurality of first electrode wires 3 are connected to the first lead wire 6 in parallel; the lower surface of the flexible substrate 1 is also provided with a second lead wire 5, and a plurality of second electrode wires are connected to the second lead wire 5 in parallel. It can be seen from this that, for the first electrode located at the first end of each vibrator 2, the driving signal transmitted thereto is achieved by transmitting a first lead wire 6 to a plurality of first electrode wires 3 connected in parallel, and this structural setting greatly simplifies the wiring process on the upper surface of the flexible substrate 1. Similarly, for the second electrode 11 located at the second end of each vibrator 2, the driving signal transmitted thereto is also achieved by transmitting a second lead wire 5 to a plurality of first electrode wires 3 connected in parallel, and this structural setting also greatly simplifies the wiring process on the lower surface of the flexible substrate 1.

[0048] Of course, the plurality of first electrode lines 3 located on the upper surface of the flexible substrate 1 and / or the plurality of second electrode lines located on the lower surface of the flexible substrate 1 may also be connected in a manner other than in parallel. Figure 2As shown, the upper surface of the flexible substrate 1 is provided with a plurality of first lead-out wires, and each first electrode line is connected to a first lead-out wire; the lower surface of the flexible substrate 1 is provided with a plurality of second lead-out wires, and each second electrode line is connected to a second lead-out wire. It can be seen from this that the plurality of first electrode lines 3 located on the upper surface of the flexible substrate 1 and the plurality of second electrode lines located on the lower surface of the flexible substrate 1 are all lead-out in full lines, specifically, one end of each first electrode line 3 is directly connected to the first electrode located at the first end of each oscillator 2, and the other end is directly connected to the input end 12 of the driving signal; one end of each second electrode line is directly connected to the second electrode located at the second end of each oscillator 2, and the other end is directly connected to the input end 12 of the driving signal. At this time, for the first electrode located at the first end of each vibration element 2, the driving signal transmitted thereto is transmitted to the first electrode line 3 electrically connected thereto through a corresponding first lead line 6; similarly, for the second electrode 11 located at the second end of each vibration element 2, the driving signal transmitted thereto is also transmitted to the second electrode line electrically connected thereto through a corresponding second lead line 5.

[0049] Further preferably, each vibrator 2 is provided with a first pad 4 at the intersection of the upper surface, the first pad 4 is used to connect the first electrode and the first electrode line 3, and is used to weld and fix the vibrator 2 in the through hole; each vibrator 2 is provided with a second pad at the intersection of the lower surface, the second pad is used to connect the second electrode 11 and the second electrode line, and is used to weld and fix the vibrator 2 in the through hole. It can be seen that the first pad 4 is provided on the upper surface of the flexible substrate 1, which can not only connect the first electrode and the first electrode line 3, but also connect the corresponding vibrator 2 and the through hole by welding, so as to ensure that the vibrator 2 is always firmly fixed in the through hole when the flexible substrate 1 is bent and pulled, thereby enhancing the stability and availability of the flexible ultrasonic transducer array of this embodiment. Correspondingly, the role of the second pad provided on the lower surface of the flexible substrate 1 is the same as that of the first pad 4, which will not be repeated here.

[0050] Among them, Figure 3 As shown, the structural setting of a certain oscillator 2 on the flexible substrate 1 is specifically described below.

[0051] Specifically, a first pad 4 is provided at the position where the vibrator 2 intersects with the upper surface; wherein the first pad 4 has a first solder point 13 and a second solder point 14 which are arranged opposite to each other, that is, when the first pad 4 is Figure 3When the circular ring is formed, the first solder joint 13 and the second solder joint 14 are located on the same diameter. At this time, the first solder joint 13 and the second solder joint 14 can not only electrically connect the first electrode located at the first end of the vibrator 2 to the first electrode line 3 on the upper surface of the flexible substrate 1, but also can weld and fix the vibrator 2 in the through hole. Similarly, a second solder pad is provided at the intersection of the vibrator 2 and the lower surface; wherein the second solder pad has a third solder joint 15 and a fourth solder joint 16 arranged opposite to each other, that is, when the second solder pad is Figure 3 When the circular ring is shown, the third welding point 15 and the fourth welding point 16 are located on the same diameter. At this time, the third welding point 15 and the fourth welding point 16 can not only electrically connect the second electrode 11 located at the second end of the vibrator 2 with the second electrode line on the upper surface of the flexible substrate 1, but also can weld and fix the vibrator 2 in the through hole.

[0052] It should be noted that, in this embodiment, the orthographic projections of the first soldering point 13 of the first soldering pad 4 and the third soldering point 15 of the second soldering pad corresponding to the same vibrator 2 on the flexible substrate 1 at least partially overlap, and the orthographic projections of the second soldering point 14 and the fourth soldering point 16 on the flexible substrate 1 at least partially overlap. This structural setting allows each soldering point to be evenly stressed, and it is possible to firmly solder the vibrator 2 in the corresponding through hole.

[0053] Of course, the number of solder joints provided on the first solder pad 4 and the second solder pad corresponding to each vibrator 2 is not limited to the two mentioned above, and may also be three, four, etc., which will not be described one by one here.

[0054] Among them, in this embodiment, preferably, the flexible substrate 1 is composed of a metal material and an insulating material. It should be noted that when making the flexible substrate 1, the metal material can be first made into a metal sheet, and then an insulating material is arranged on the metal sheet. At this time, the two are pressed together using high voltage to form a circuit board with multiple first electrode lines 3 or second electrode lines. For example: the flexible substrate 1 in this embodiment can be a flexible circuit board, of course, it is not limited to a flexible circuit board, and is not limited here.

[0055] The insulating material may be polyester ether. Of course, the insulating material is not limited to polyester ether, and may be other materials, which are not limited here either.

[0056] To ensure that the flexible substrate 1 provided in this embodiment has good bending performance, preferably, the thickness of the flexible substrate 1 is 0.05-2 mm.

[0057] It should be noted that the thickness of the flexible substrate is not limited to 0.05-2 mm, and can be specifically set according to the height of the vibrator, as long as it can ensure that the first end and the second end of the vibrator protrude from the upper surface and the lower surface of the flexible substrate.

[0058] In summary, since the flexible ultrasonic transducer array in the present embodiment includes a flexible substrate with easily deformable and bendable properties, and the first ends and the second ends of the plurality of vibrators embedded in the flexible substrate respectively protrude from the upper surface and the lower surface thereof, when the flexible ultrasonic transducer array in the present embodiment is used for ultrasonic imaging or ultrasonic treatment of a certain part of a human body, there is no need to press the flexible ultrasonic transducer array tightly against the surface of the body part, and the effect of obtaining good contact with the body part can be achieved, thereby improving the therapeutic effect of the flexible ultrasonic transducer array in the present embodiment.

[0059] Embodiment 2:

[0060] This embodiment provides a focusing transducer, which includes the flexible ultrasonic transducer array in Embodiment 1.

[0061] In this embodiment, preferably, the focusing transducer comprises: a rigid substrate, the flexible ultrasonic transducer array is fixed on the substrate, and each vibrator 2 in the flexible ultrasonic transducer array emits ultrasonic waves toward a side away from the substrate.

[0062] Specifically, as a first preferred method of this embodiment, Figure 4 As shown, the substrate in this embodiment can be a point focusing spherical substrate 8, the flexible ultrasonic transducer array is fixed on the point focusing spherical substrate 8, and each vibrator 2 in the flexible ultrasonic transducer array emits ultrasonic waves toward the side away from the point focusing spherical substrate 8 and converges on Figure 4 There are 7 focal points in the picture.

[0063] Among them, as the second preferred method of this embodiment, Figure 5 As shown, the substrate in this embodiment can be a line-focusing curved substrate 10, and the flexible ultrasonic transducer array is fixed on the line-focusing curved substrate 10. Each vibrator 2 in the flexible ultrasonic transducer array emits ultrasonic waves toward the side facing away from the line-focusing curved substrate 10, and converges at Figure 5 The focal line is 9.

[0064] In summary, the focused transducer provided in this embodiment is mainly composed of the flexible ultrasonic transducer array in Example 1 and a rigid substrate. Specifically, by attaching the flexible ultrasonic transducer array to a substrate of a specific shape, the flexible ultrasonic transducer array can be changed into a shape corresponding to the substrate, so that when the focused transducer in this embodiment is used to perform ultrasonic treatment on a certain part of the human body, it has a better therapeutic effect.

[0065] It is to be understood that the above embodiments are merely exemplary embodiments used to illustrate the principles of the present invention, but the present invention is not limited thereto. For those of ordinary skill in the art, various modifications and improvements can be made without departing from the spirit and essence of the present invention, and these modifications and improvements are also considered to be within the scope of protection of the present invention.

Claims

1. A flexible ultrasonic transducer array, characterized in that: include: A flexible substrate having a plurality of through holes arranged at intervals; A plurality of vibration elements are respectively fixed in the through holes and used for directional emission of ultrasonic waves, and the direction in which each vibration element emits ultrasonic waves is toward the same side of the flexible substrate; wherein, The flexible substrate has an upper surface and a lower surface arranged oppositely, each of the vibration elements has a first end and a second end arranged oppositely, and the direction from the first end to the second end is the same as the direction from the upper surface to the lower surface; the first end of each vibration element protrudes from the upper surface, and the second end of each vibration element protrudes from the lower surface; The upper surface is provided with a plurality of first electrode lines, the first end of each of the vibration elements is provided with a first electrode, and the first electrode is electrically connected to the first electrode line; The lower surface is provided with a plurality of second electrode lines, the second end of each of the vibration elements is provided with a second electrode, and the second electrode is electrically connected to the second electrode line; The first electrode and the second electrode are used to load a driving signal to drive the vibrator to emit ultrasonic waves; The first electrode is also provided in the area between the first end of each vibration element and the upper surface; the second electrode is also provided in the area between the second end of each vibration element and the lower surface; When the metal electrode material is coated on the first end of each of the vibrators to form the first electrode, the metal electrode material may be further coated along the first side of the vibrator to the upper surface of the flexible substrate, so that the metal electrode material on the first side is electrically connected to the first electrode line through the first welding point and the second welding point; wherein the first side of the vibrator refers to: the area between the first end of the vibrator and the upper surface of the flexible substrate; When the metal electrode material is coated on the second end of each of the vibrators to form the second electrode, the metal electrode material can be further coated along the second side surface of the vibrator to the lower surface of the flexible substrate, so that the metal electrode material on the second side is electrically connected to the second electrode line through the third welding point and the fourth welding point; wherein the second side surface of the vibrator refers to: the area between the second end of the vibrator and the lower surface of the flexible substrate.

2. The flexible ultrasonic transducer array according to claim 1, characterized in that: A plurality of the through holes are arranged in an array.

3. The flexible ultrasonic transducer array according to claim 1, characterized in that: The upper surface is also provided with a first lead wire; a plurality of the first electrode wires are connected to the first lead wire in parallel; The lower surface is also provided with a second lead wire; a plurality of the second electrode wires are connected to the second lead wire in parallel.

4. The flexible ultrasonic transducer array according to claim 1, characterized in that: The upper surface is also provided with a plurality of first lead wires, and each of the first electrode wires is connected to one of the first lead wires; The lower surface is also provided with a plurality of second lead-out wires, and each of the second electrode wires is connected to one of the second lead-out wires.

5. The flexible ultrasonic transducer array according to claim 1, characterized in that: A first pad is provided at a position where each of the vibrators intersects with the upper surface, and the first pad is used to connect the first electrode and the first electrode line, and to weld and fix the vibrator in the through hole; A second pad is provided at a position where each of the vibrators intersects with the lower surface. The second pad is used to connect the second electrode and the second electrode line, and is used to weld and fix the vibrator in the through hole.

6. The flexible ultrasonic transducer array according to claim 1, characterized in that: The flexible substrate is formed by combining metal material and insulating material.

7. The flexible ultrasonic transducer array according to claim 6, characterized in that: The insulating material includes polyester ether.

8. The flexible ultrasonic transducer array according to claim 1, characterized in that: The flexible substrate is a flexible circuit board.

9. The flexible ultrasonic transducer array according to claim 1, characterized in that: The thickness of the flexible substrate is 0.05-2 mm.

10. The flexible ultrasonic transducer array according to claim 1, characterized in that: The vibrator is a piezoelectric vibrator.

11. A focusing transducer, characterized in that: The flexible ultrasonic transducer array comprises any one of claims 1 to 10.

12. The focused transducer according to claim 11, characterized in that Also includes: A rigid substrate is provided on which the flexible ultrasonic transducer array is fixed, and each vibrator in the flexible ultrasonic transducer array emits ultrasonic waves toward a side away from the substrate.

13. The focused transducer according to claim 12, characterized in that: The substrate is a point-focusing spherical substrate or a line-focusing arc-surface substrate.

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