The application discloses an ultrasonic transduction substrate, a preparation method and an ultrasonic transduction device, relates to the technical field of
ultrasonic technology, and can improve the elasticity of a vibrating diaphragm of the ultrasonic transduction device, inhibit the risk of
diaphragm rupture, improve the reliability of the ultrasonic transduction device, and prolong the service life of the ultrasonic transduction device. The ultrasonic transduction substrate comprises a substrate, a first
electrode arranged on one side of the substrate, a first insulating layer arranged on the side, away from the substrate, of the first
electrode, a second insulating layer arranged on the side, away from the substrate, of the first insulating layer, a cavity being formed between the side, close to the substrate, of the second insulating layer and the side, away from the substrate, of the first insulating layer, and a second
electrode arranged on the side, away from the substrate, of the second insulating layer. The second insulating layer is used for realizing ultrasonic energy conversion through vibration deformation. The side, away from the substrate, of the second insulating layer has a recessed part and / or a protruding part, and / or the side, close to the substrate, of the second insulating layer has a recessed part and / or a protruding part.