Semiconductor device and semiconductor package including the same

Abstract

The present disclosure provides a semiconductor device and a semiconductor package including the same. The semiconductor device includes a first buffer dielectric layer on a first dielectric layer; a second dielectric layer and a second buffer dielectric layer arranged in sequence on the first buffer dielectric layer, the second buffer dielectric layer being in contact with the first buffer dielectric layer; and a pad interconnect structure passing through the first buffer dielectric layer and the second buffer dielectric layer, wherein the pad interconnect structure includes copper and tin.

Description

[0001] CROSS-REFERENCE TO RELATED APPLICATIONS

[0002] Korean Patent Application No. 10-2018-0113157, titled “Semiconductor device and semiconductor package including the same,” filed on September 20, 2018 in the Korean Intellectual Property Office, is incorporated herein by reference in its entirety. Technical Field

[0003] Embodiments relate to a semiconductor device and a semiconductor package including the same. Background Art

[0004] Semiconductor devices are widely used in the electronics industry because of their small size, multifunctionality, and / or low manufacturing cost. Semiconductor devices may include memory devices for storing data, logic devices for processing data, and hybrid devices for operating various functions simultaneously.

[0005] With the advanced development of the electronic industry, semiconductor devices have high integration. With the advanced development of the electronic industry, semiconductor devices also have high speed. In order to meet the requirements of high integration and / or high speed of semiconductor devices, various studies have been conducted. Summary of the invention

[0006] An embodiment can be implemented by providing a semiconductor device, which includes: a first buffer dielectric layer on a first dielectric layer; a second dielectric layer and a second buffer dielectric layer arranged in sequence on the first buffer dielectric layer, the second buffer dielectric layer contacting the first buffer dielectric layer; and a pad interconnect structure that passes through the first buffer dielectric layer and the second buffer dielectric layer, wherein the pad interconnect structure includes copper and tin.

[0007] An embodiment can be implemented by providing a semiconductor device, which includes: a first dielectric layer; a second dielectric layer on the first dielectric layer; and a pad connector between the first dielectric layer and the second dielectric layer, wherein the pad connector includes a central portion and an outer portion surrounding the central portion, and wherein the granularity of the pad connector increases in a direction from the outer portion toward the central portion.

[0008] An embodiment can be implemented by providing a semiconductor package, which includes: a package substrate; a first semiconductor chip on the package substrate, the first semiconductor chip including a first semiconductor layer and a first buffer dielectric layer stacked on a first surface of the first semiconductor layer; a second semiconductor chip on the first semiconductor chip, the second semiconductor chip including a second semiconductor layer and a second buffer dielectric layer stacked on a first surface of the second semiconductor layer, the second buffer dielectric layer contacting the first buffer dielectric layer; and a first pad interconnect structure, which passes through the first buffer dielectric layer and the second buffer dielectric layer, wherein the first pad interconnect structure includes copper and tin. BRIEF DESCRIPTION OF THE DRAWINGS

[0009] Features will become apparent to those skilled in the art by describing in detail exemplary embodiments with reference to the accompanying drawings, in which:

[0010] Figure 1 shows a cross-sectional view of a semiconductor device according to some example embodiments;

[0011] Figure 2 Shows the display Figure 1 An enlarged view of the pad connector;

[0012] Figure 3 Shows the display Figure 2 an enlarged view of part A;

[0013] Figure 4 shows a cross-sectional view showing a semiconductor device according to some example embodiments;

[0014] Figure 5 Shows the display Figure 4 An enlarged view of the pad connector;

[0015] Figure 6 shows a cross-sectional view showing a semiconductor package according to some example embodiments;

[0016] Figure 7 Shows the display Figure 6 an enlarged view of part B;

[0017] Figure 8 Shows the display Figure 6 an enlarged view of part C;

[0018] 9A to 9E cross-sectional views showing various stages in a method of manufacturing a semiconductor device according to some example embodiments;

[0019] FIG. 10A to FIG. 10C Cross-sectional views illustrating stages in a method of manufacturing a semiconductor package according to some example embodiments. DETAILED DESCRIPTION

[0020] Figure 1 A cross-sectional view of a semiconductor device according to some example embodiments is illustrated. Figure 2 Shows the display Figure 1 A magnified view of the connector pads. Figure 3 Shows the display Figure 2 An enlarged view of part A of FIG.

[0021] Reference Figure 1 , the first pad 120 may be in the first trench T1 in the first dielectric layer 110. The first pad 120 may include a first metal pad 121 and a first metal barrier layer 123. The first metal pad 121 may be in the first trench T1, and in the first trench T1, the first metal barrier layer 123 may be between the first metal pad 121 and the first dielectric layer 110. The first metal pad 121 may have a first surface 121a and a second surface 121b facing each other (e.g., opposite to each other). The first surface 121a of the first metal pad 121 may be exposed in the first dielectric layer 110, and the second surface 121b and the sidewall of the first metal pad 121 may be in the first dielectric layer 110 (e.g., may face the first dielectric layer 110). The first surface 121a of the first metal pad 121 may be coplanar with one surface 110a of the first dielectric layer 110. The first metal barrier layer 123 may surround the sidewall and the second surface 121b of the first metal pad 121. The first metal barrier layer 123 may expose the first surface 121a of the first metal pad 121 and one surface 110a of the first dielectric layer 110. For example, the first dielectric layer 110 may include a PETOS layer or a silicon oxide layer. For example, the first metal pad 121 may include copper (Cu), aluminum (Al), nickel (Ni), or tungsten (W). For example, the first metal barrier layer 123 may include titanium or tantalum.

[0022] The second dielectric layer 130 may be on the first dielectric layer 110. The second pad 140 may be in the second trench T2 in the second dielectric layer 130. The second pad 140 may include a second metal pad 141 and a second metal barrier layer 145. The second metal pad 141 may be in the second trench T2, and in the second trench T2, the second metal barrier layer 145 may be between the second metal pad 141 and the second dielectric layer 130. The second metal pad 141 may have a first surface 141a and a second surface 141b facing each other. The first surface 141a of the second metal pad 141 may be exposed in the second dielectric layer 130, and the second surface 141b and the sidewall of the second metal pad 141 may be in the second dielectric layer 130 or may face the second dielectric layer 130. The first surface 141a of the second metal pad 141 may be coplanar with one surface 130a of the second dielectric layer 130. The second metal barrier layer 145 may surround the sidewalls and the second surface 141b of the second metal pad 141. The second metal barrier layer 145 may expose the first surface 141a of the second metal pad 141 and one surface 130a of the second dielectric layer 130. For example, the second dielectric layer 130 may include a PETOS layer or a silicon oxide layer. For example, the second metal pad 141 may include copper (Cu), aluminum (Al), nickel (Ni), or tungsten (W). For example, the second metal barrier layer 145 may include titanium or tantalum.

[0023] The first buffer dielectric layer 150, the third dielectric layer 160, and the second buffer dielectric layer 170 may be sequentially arranged on one surface 110a of the first dielectric layer 110. The first buffer dielectric layer 150 may cover the first surface 121a (e.g., a portion of) of the first metal pad 121, wherein the first surface 121a is exposed through the first dielectric layer 110. For example, the first buffer dielectric layer 150 may include a silicon nitride layer or a silicon carbonitride layer. The third dielectric layer 160 may be on the first buffer dielectric layer 150. The third dielectric layer 160 may cover one surface of the first buffer dielectric layer 150. For example, the third dielectric layer 160 may include a PETOS layer or a silicon oxide layer. The second buffer dielectric layer 170 may be on the third dielectric layer 160. For example, the second buffer dielectric layer 170 may include a silicon nitride layer or a silicon carbonitride layer.

[0024] The third buffer dielectric layer 180, the fourth dielectric layer 190, and the fourth buffer dielectric layer 200 may be (for example, in Figure 1The third buffer dielectric layer 180 may cover the first surface 141a of the second metal pad 141 (e.g., a portion of the first surface 141a), wherein the first surface 141a is exposed through the second dielectric layer 130. For example, the third buffer dielectric layer 180 may include a silicon nitride layer or a silicon carbonitride layer. The fourth dielectric layer 190 may be on the third buffer dielectric layer 180. The fourth dielectric layer 190 may cover a surface of the third buffer dielectric layer 180. For example, the fourth dielectric layer 190 may include a PETOS layer or a silicon oxide layer. The fourth buffer dielectric layer 200 may be on the fourth dielectric layer 190. The fourth buffer dielectric layer 200 and the second buffer dielectric layer 170 may contact each other. For example, the fourth buffer dielectric layer 200 may include a silicon nitride layer or a silicon carbonitride layer.

[0025] The interconnect structure ICS may be between the first dielectric layer 110 and the second dielectric layer 130. For example, the interconnect structure ICS may be between the first pad 120 in the first dielectric layer 110 and the second pad 140 in the second dielectric layer 130. The interconnect structure ICS may pass through the first buffer dielectric layer 150, the third dielectric layer 160, the second buffer dielectric layer 170, the third buffer dielectric layer 180, the fourth dielectric layer 190, and the fourth buffer dielectric layer 200. The interconnect structure ICS may contact the first surface 121a of the first metal pad 121 and the first surface 141a of the second metal pad 141. The first pad 120 and the second pad 140 may be electrically connected to each other through the interconnect structure ICS. For example, the interconnect structure ICS (a cross section) may have a regular hexagon or a rectangle.

[0026] The interconnect structure ICS may include a pad connector 210 and a connection metal barrier layer 220. The connection metal barrier layer 220 may surround the pad connector 210. The connection metal barrier layer 220 may contact the first metal pad 121 and the second metal pad 141. For example, the connection metal barrier layer 220 may include titanium or tantalum. The connection metal barrier layer 220 may serve as a diffusion blocking layer. Figure 1 and Figure 2 , the pad connector 210 may include a first section P1 and a second section P2. The first section P1 may pass through the third dielectric layer 160 and the second buffer dielectric layer 170, and the second section P2 may pass through the fourth dielectric layer 190 and the fourth buffer dielectric layer 200. For example, the first section P1 and the second section P2 may be linearly symmetrical with respect to the symmetry line L. For example, the pad connector 210 may include copper (Cu) and / or tin (Sn). For example, the pad connector 210 may have a lattice structure in which FCC (face-centered cubic) and a four-directional structure are mixed with each other. In an implementation, the pad connector 210 may have a lattice structure in which FCC (face-centered cubic) and a diamond cubic structure are mixed with each other.

[0027] The pad connector 210 may include a central portion CP, a first middle portion IP1 surrounding the central portion CP, a second middle portion IP2 surrounding the first middle portion IP1, and an outer OP surrounding the second middle portion IP2. The outer OP may be surrounded by a connection metal barrier layer 220. In an implementation, the amount of copper (e.g., copper content) in the pad connector 210 may increase as it goes from the outer OP to (or approaching, or toward) the central portion CP, or may increase in a direction from the outer OP to (or approaching, or toward) the central portion CP, and the amount of tin (e.g., tin content) in the pad connector 210 may decrease as it goes from the outer OP to (or approaching, or toward) the central portion CP, or may decrease in a direction from the outer OP to (or approaching, or toward) the central portion CP. For example, the outer OP of the pad connector 210 may include copper, and the central portion CP of the pad connector 210 may include tin. In an implementation, the copper content in the central portion CP may be greater than the tin content in the central portion CP. The copper content in the first middle portion IP1 may be greater than the tin content in the first middle portion IP1 but less than the copper content in the central portion CP, and the tin content in the first middle portion IP1 may be greater than the tin content in the central portion CP. 3 Sn. The tin content in the second intermediate portion IP2 may be greater than the copper content in the second intermediate portion IP2, and the copper content in the second intermediate portion IP2 may be less than the copper content in the first intermediate portion IP1, and the tin content in the second intermediate portion IP2 may be greater than the tin content in the first intermediate portion IP1. For example, the second intermediate portion IP2 may be or include Cu 6 Sn 5 The tin content in the outer portion OP may be greater than the copper content in the outer portion OP, and the copper content in the outer portion OP may be less than the copper content in the second middle portion IP2, and the tin content in the outer portion OP may be greater than the tin content in the second middle portion IP2.

[0028] In implementation, Figure 3As shown, the granularity of the pad connector 210 may increase as the central portion CP is approached from the outer OP, or may increase in the direction of approaching the central portion CP from the outer OP. For example, the granularity GS1 of the central portion CP may be greater than the granularity GS2 of the first intermediate portion IP1 (GS1>GS2), and the granularity GS2 of the first intermediate portion IP1 may be greater than the granularity GS3 of the second intermediate portion IP2 (GS2>GS3). The granularity GS3 of the second intermediate portion IP2 may be greater than the granularity GS4 of the outer OP (GS3>GS4). For example, the granularity GS4 of the outer OP may be smaller than all other granularities GS1, GS2, and GS3 of the central portion CP, the first intermediate portion IP1, and the second intermediate portion IP2. The granularity GS1 of the central portion CP may be greater than all other granularities GS2, GS3, and GS4 of the first intermediate portion IP1, the second intermediate portion IP2, and the outer OP.

[0029] Figure 4 A cross-sectional view showing a semiconductor device according to some example embodiments is shown. Figure 5 Shows the display Figure 4 For simplicity of description, components substantially the same as those of the above-described semiconductor device are assigned the same reference numerals, and repeated detailed explanation thereof may be omitted.

[0030] Reference Figure 4 and Figure 5 , the first section P1 and the second section P2 of the pad connector 210 may be displaced in opposite directions relative to each other. For example, the first section P1 may be displaced in a first direction X, and the second section P2 may be displaced in a second direction Y (opposite to the first direction X). For example, a center point C1 of the first section P1 may be displaced a certain distance from a center point CO of the pad connector 210 in the first direction X, and a center point C2 of the second section P2 may be displaced a certain distance from a center point CO of the pad connector 210 in the second direction Y, and the center points C1 and C2 are located on a symmetry line L of the pad connector 210. The center point CO of the pad connector 210 may be located at a center point between the center point C1 of the first section P1 and the center point C2 of the second section P2. For example, before the first section P1 and the second section P2 of the pad connector 210 come into contact, the first section P1 of the pad connector 210 may be arranged offset relative to the second section P2 of the pad connector 210.

[0031] The first connection metal barrier layer 220a may surround a surface S1 and sidewalls of the first section P1. One end of the first connection metal barrier layer 220a may have a surface ES1 coplanar with a surface of the second buffer dielectric layer 170, and the other end thereof may also have another surface ES2 coplanar with a surface of the second buffer dielectric layer 170, wherein one surface ES1 may contact the second section P2, and the other surface ES2 may contact the fourth buffer dielectric layer 200. The second connection metal barrier layer 220b may surround a surface S2 and sidewalls of the second section P2. One end of the second connection metal barrier layer 220b may have a surface ES3 coplanar with a surface of the fourth buffer dielectric layer 200, and the other end thereof may also have another surface ES4 coplanar with a surface of the fourth buffer dielectric layer 200, wherein one surface ES3 may contact the second buffer dielectric layer 170, and the other surface ES4 may contact the first section P1.

[0032] Figure 6 A cross-sectional view showing a semiconductor package according to some example embodiments is illustrated. Figure 7 Shows the display Figure 6 An enlarged view of part B. Figure 8 Shows the display Figure 6 An enlarged view of portion C of FIG.

[0033] Reference Figure 6 , the first semiconductor chip 600 may be on the package substrate 500. The package substrate 500 may include a first bonding pad 510 and a bump 520. The first bonding pad 510 may be on the top surface of the package substrate 500. For example, the first bonding pad 510 may include a conductive material. The bump 520 may be on the bottom surface of the package substrate 500, wherein the bottom surface faces the top surface of the package substrate 500. The bump 520 may be electrically connected to the first bonding pad 510. For example, the bump 520 may include a solder ball or a column.

[0034] The first semiconductor chip 600 may be attached to the top surface of the package substrate 500 by an adhesive layer 601. The adhesive layer 601 may be between the first semiconductor chip 600 and the package substrate 500. For example, the adhesive layer 601 may include a dielectric polymer. For example, the first semiconductor chip 600 may be a memory chip such as a DRAM, SRAM, MRAM, or flash memory. The first semiconductor chip 600 may include a first semiconductor layer 611 and a first connection line structure 620. The first semiconductor layer 611 may include a semiconductor material. The first semiconductor layer 611 may be provided with some parts of a transistor (e.g., a gate electrode) and / or a passive device on its first surface 611a.

[0035] The first connection line structure 620 may be on the first surface 611a of the first semiconductor layer 611. Figure 6 and Figure 7 , the first connection line structure 620 may include a first buffer dielectric layer 621, a first interlayer dielectric layer 622, a second buffer dielectric layer 623, a second interlayer dielectric layer 624, a third buffer dielectric layer 625, and a first pad 626. The first buffer dielectric layer 621 may be on the first surface 611a of the first semiconductor layer 611. For example, the first buffer dielectric layer 621 may include a silicon nitride layer or a silicon carbonitride layer. The first interlayer dielectric layer 622 may be on the top surface of the first buffer dielectric layer 621. For example, the first interlayer dielectric layer 622 may include a PETOS layer or a silicon oxide layer. The second buffer dielectric layer 623 may be on the top surface of the first interlayer dielectric layer 622. For example, the second buffer dielectric layer 623 may include a silicon nitride layer or a silicon carbonitride layer. The second interlayer dielectric layer 624 may be on the top surface of the second buffer dielectric layer 623. For example, the second interlayer dielectric layer 624 may include a PETOS layer or a silicon oxide layer. The third buffer dielectric layer 625 may be on a top surface of the second interlayer dielectric layer 624. For example, the third buffer dielectric layer 625 may include a silicon nitride layer or a silicon carbonitride layer.

[0036] The first pad 626 may be in the first buffer dielectric layer 621 and the first interlayer dielectric layer 622. For example, each of the first pads 626 may be in the first trench TH1 passing through the first buffer dielectric layer 621 and the first interlayer dielectric layer 622. The first pad 626 may include a first metal pad 627 and a first metal barrier layer 629. The first metal barrier layer 629 may be on the bottom surface and sidewall of the first trench TH1. The first metal barrier layer 629 may contact the first surface 611a of the first semiconductor layer 611. The first metal pad 627 may be in the first trench TH1. The first metal pad 627 may have a first surface 627a coplanar with the top surface of the first interlayer dielectric layer 622. The first metal barrier layer 629 may surround the sidewall and the second surface of the first metal pad 627, the second surface facing the first surface 627a. For example, the first metal barrier layer 629 may include titanium (Ti) or tantalum (Ta). For example, the first metal pad 627 may include copper (Cu), aluminum (Al), nickel (Ni), or tungsten (W).

[0037] The second semiconductor chip 710 may be on the first connection line structure 620. The second semiconductor chip 710 may include a second semiconductor layer 711, a second connection line structure 715, and a third connection line structure 810. The second semiconductor chip 710 may be a logic chip. The second connection line structure 715 may be between the second semiconductor layer 711 and the first connection line structure 620. For example, the second semiconductor layer 711 may include a semiconductor material. The second connection line structure 715 may be on the first surface 711a of the second semiconductor layer 711. The second connection line structure 715 may include a second pad 721, a third pad 722, a fourth pad 723, a fourth interlayer dielectric layer 724, a third buffer dielectric layer 726, a fifth interlayer dielectric layer 727, a fourth buffer dielectric layer 728, a sixth interlayer dielectric layer 729, a fifth buffer dielectric layer 730, a seventh interlayer dielectric layer 731, a sixth buffer dielectric layer 732, a first via 733, and a second via 734. The second semiconductor layer 711 may have a fourth interlayer dielectric layer 724, a third buffer dielectric layer 726, a fifth interlayer dielectric layer 727, a fourth buffer dielectric layer 728, a sixth interlayer dielectric layer 729, a fifth buffer dielectric layer 730, a seventh interlayer dielectric layer 731, and a sixth buffer dielectric layer 732 disposed in order on the first surface 711a thereof. The sixth buffer dielectric layer 732 may contact the third buffer dielectric layer 625. For example, the third buffer dielectric layer 726, the fourth buffer dielectric layer 728, the fifth buffer dielectric layer 730, and the sixth buffer dielectric layer 732 may include a silicon nitride layer or a silicon carbonitride layer. For example, the fourth interlayer dielectric layer 724, the fifth interlayer dielectric layer 727, the sixth interlayer dielectric layer 729, and the seventh interlayer dielectric layer 731 may include a silicon oxide layer or a PETEOS layer.

[0038] The second pad 721 may be on the first surface 711a of the second semiconductor layer 711. The second pad 721 may be covered by the fourth interlayer dielectric layer 724. For example, the second pad 721 may include copper (Cu), aluminum (Al), nickel (Ni), tungsten (W), titanium (Ti) or tantalum (Ta). The first via 733 may be in the fourth interlayer dielectric layer 724. The first via 733 may contact the second pad 721. For example, the first via 733 may include copper (Cu), aluminum (Al), nickel (Ni), tungsten (W), titanium (Ti) or tantalum (Ta). The third pad 722 may be in the fifth interlayer dielectric layer 727. The third pad 722 may contact the first via 733. For example, the third pad 722 may include copper (Cu), aluminum (Al), nickel (Ni), tungsten (W), titanium (Ti) or tantalum (Ta). The second via 734 may be in the fifth interlayer dielectric layer 727. The second via 734 may contact the third pad 722. For example, the second via 734 may include copper (Cu), aluminum (Al), nickel (Ni), tungsten (W), titanium (Ti), or tantalum (Ta).

[0039] The fourth pad 723 may be in the fourth buffer dielectric layer 728 and the sixth interlayer dielectric layer 729. For example, each of the fourth pads 723 may be in the second trench TH2 passing through the fourth buffer dielectric layer 728 and the sixth interlayer dielectric layer 729. The fourth pad 723 may include a second metal barrier layer 723a and a second metal pad 723b. The second metal barrier layer 723a may be on the bottom surface of the second trench TH2 (upward or as shown in FIG. Figure 7 The second metal barrier layer 723a may contact the second via 734. The second metal pad 723b may cover the top surface or inner surface of the second metal barrier layer 723a and may be located in the second trench TH2. The second metal pad 723b may have a first surface 723c coplanar with a surface of the sixth interlayer dielectric layer 729. The second metal barrier layer 723a may surround the sidewalls and the second surface of the second metal pad 723b, wherein the second surface faces the first surface 723c. For example, the second metal barrier layer 723a may include titanium (Ti) or tantalum (Ta). For example, the second metal pad 723b may include copper (Cu), aluminum (Al), nickel (Ni) or tungsten (W).

[0040] The first interconnect structure ICS1 may be in the first connection line structure 620 and the second connection line structure 715. For example, each of the first interconnect structures ICS1 may be between the first pad 626 and the fourth pad 723. The first interconnect structure ICS1 may contact the first surface 627a of the first metal pad 627 and the first surface 723c of the second metal pad 723b. The first interconnect structure ICS1 may pass through the fifth buffer dielectric layer 730, the seventh interlayer dielectric layer 731, the sixth buffer dielectric layer 732, the second buffer dielectric layer 623, the second interlayer dielectric layer 624, and the third buffer dielectric layer 625. The first interconnect structure ICS1 may include a first pad connector 740 and a first connection metal barrier layer 750. The first connection metal barrier layer 750 may surround the first pad connector 740. The first pad connector 740 may correspond to Figure 1 and Figure 2 The pad connector 210 shown, and the first connection metal barrier layer 750 may correspond to Figure 1 and Figure 2 The connection metal barrier layer 220 is shown. For example, the first pad connector 740 may include copper (Cu) and tin (Sn). For example, the first connection metal barrier layer 750 may include titanium or tantalum.

[0041] The mold layer 650 may be on the package substrate 500. The mold layer 650 may cover the sidewalls of the first semiconductor layer 611, the sidewalls of the adhesive layer 601, and the sidewalls of the first connection line structure 620. The mold layer 650 may contact one surface of the second connection line structure 715. For example, the mold layer 650 may contact the sixth buffer dielectric layer 732 of the second connection line structure 715. The mold layer 650 may include a dielectric polymer such as an epoxy molding compound.

[0042] Refer to Figure 6 , Figure 7 and Figure 8 , the third connection line structure 810 may be on the second surface 711b of the second semiconductor layer 711. The second surface 711b of the second semiconductor layer 711 may face the first surface 711a of the second semiconductor layer 711. The integrated device may be on the second surface 711b of the second semiconductor layer 711. For example, the gate electrode of the transistor may be on the second surface 711b of the second semiconductor layer 711. The gate electrode of the transistor may be covered by the third connection line structure 810.

[0043] The third connection line structure 810 may include eighth to eleventh interlayer dielectric layers 821, 823, 825, and 827, seventh to tenth buffer dielectric layers 822, 824, 826, and 828, a first through-hole via 829, a third via 831, and fifth and sixth pads 830 and 840. The second semiconductor layer 711 may sequentially provide an eighth interlayer dielectric layer 821, a seventh buffer dielectric layer 822, a ninth interlayer dielectric layer 823, an eighth buffer dielectric layer 824, a tenth interlayer dielectric layer 825, a ninth buffer dielectric layer 826, an eleventh interlayer dielectric layer 827, and a tenth buffer dielectric layer 828 on its second surface 711b. For example, the eighth to eleventh interlayer dielectric layers 821, 823, 825, and 827 may include a silicon oxide layer or a PETOS layer. For example, the seventh to tenth buffer dielectric layers 822 , 824 , 826 , and 828 may include a silicon nitride layer or a silicon carbonitride layer.

[0044] The first through-hole 829 may pass through the eighth interlayer dielectric layer 821 and the second semiconductor layer 711. The first through-hole 829 may connect the fifth pad 830 and the second pad 721 to each other. For example, the first through-hole 829 may include a conductive material. The fifth pad 830 may be in the ninth interlayer dielectric layer 823. The fifth pad 830 may pass through the seventh buffer dielectric layer 822 and connect the first through-hole 829. For example, the fifth pad 830 may include copper (Cu), aluminum (Al), nickel (Ni), tungsten (W), titanium (Ti), or tantalum (Ta). The third via 831 may be in the ninth interlayer dielectric layer 823. The third via 831 may contact the fifth pad 830. For example, the third via 831 may include copper (Cu), aluminum (Al), nickel (Ni), tungsten (W), titanium (Ti), or tantalum (Ta).

[0045] The sixth pad 840 may be in the eighth buffer dielectric layer 824 and the tenth interlayer dielectric layer 825. For example, each of the sixth pads 840 may be in the third trench TH3 passing through the eighth buffer dielectric layer 824 and the tenth interlayer dielectric layer 825. The sixth pad 840 may include a third metal pad 843 and a third metal barrier layer 845. The third metal barrier layer 845 may be on the bottom surface and sidewall of the third trench TH3. The third metal barrier layer 845 may contact the third via 831. The third metal pad 843 may cover the top surface of the third metal barrier layer 845 and may be located in the third trench TH3. The third metal pad 843 may have a first surface 843a coplanar with one surface of the tenth interlayer dielectric layer 825. The third metal barrier layer 845 may surround the sidewall and the second surface of the third metal pad 843, wherein the second surface faces the first surface 843a. For example, the third metal barrier layer 845 may include titanium (Ti) or tantalum (Ta). For example, the third metal pad 843 may include copper (Cu), aluminum (Al), nickel (Ni), or tungsten (W).

[0046] The third semiconductor chip 900 may be on the second semiconductor chip 710. The third semiconductor chip 900 may include a fourth connection line structure 910 and a third semiconductor layer 930. For example, the third semiconductor chip 900 may be an image sensor chip. The fourth connection line structure 910 may be between the third semiconductor layer 930 and the third connection line structure 810. The fourth connection line structure 910 may be on a first surface 930a of the third semiconductor layer 930. The fourth connection line structure 910 may include twelfth to fifteenth interlayer dielectric layers 911, 913, 915 and 917, eleventh to fourteenth buffer dielectric layers 912, 914, 916 and 918, a fourth via 920, and a seventh pad 919 and an eighth pad 938. The third semiconductor layer 930 may have a twelfth interlayer dielectric layer 911, an eleventh buffer dielectric layer 912, a thirteenth interlayer dielectric layer 913, a twelfth buffer dielectric layer 914, a fourteenth interlayer dielectric layer 915, a thirteenth buffer dielectric layer 916, a fifteenth interlayer dielectric layer 917, and a fourteenth buffer dielectric layer 918 disposed in order on its first surface 930a. The fourteenth buffer dielectric layer 918 and the tenth buffer dielectric layer 828 may be in contact with each other. For example, the twelfth to fifteenth interlayer dielectric layers 911, 913, 915, and 917 may include a silicon oxide layer or a PETOS layer. For example, the eleventh to fourteenth buffer dielectric layers 912, 914, 916, and 918 may include a silicon nitride layer or a silicon carbonitride layer.

[0047] The seventh pad 919 may be in the thirteenth interlayer dielectric layer 913. The seventh pad 919 may pass through the eleventh buffer dielectric layer 912 and be connected to the fourth via 920. For example, the seventh pad 919 may include copper (Cu), aluminum (Al), nickel (Ni), tungsten (W), titanium (Ti) or tantalum (Ta). The fourth via 920 may be arranged in the thirteenth interlayer dielectric layer 913. For example, the fourth via 920 may include copper (Cu), aluminum (Al), nickel (Ni), tungsten (W), titanium (Ti) or tantalum (Ta). The eighth pad 938 may be in the twelfth buffer dielectric layer 914 and the fourteenth interlayer dielectric layer 915. For example, each of the eighth pads 938 may be in the fourth trench TH4 passing through the twelfth buffer dielectric layer 914 and the fourteenth interlayer dielectric layer 915. The eighth pad 938 may include a fourth metal pad 933 and a fourth metal barrier layer 935. The fourth metal barrier layer 935 may be formed on the bottom surface (eg, upward or downward) of the fourth trench TH4. Figure 8The fourth metal barrier layer 935 may contact the fourth via 920. The fourth metal pad 933 may cover the top surface of the fourth metal barrier layer 935 and may be located in the fourth trench TH4. The fourth metal pad 933 may have a first surface 933a coplanar with a surface of the fourteenth interlayer dielectric layer 915. The fourth metal barrier layer 935 may surround the sidewalls and the second surface of the fourth metal pad 933, wherein the second surface faces the first surface 933a. The fourth metal barrier layer 935 may include titanium (Ti) or tantalum (Ta). For example, the fourth metal pad 933 may include copper (Cu), aluminum (Al), nickel (Ni) or tungsten (W).

[0048] The second interconnect structure ICS2 may be in the third connection line structure 810 and the fourth connection line structure 910. For example, each of the second interconnect structures ICS2 may be between the sixth pad 840 and the eighth pad 938. The second interconnect structure ICS2 may contact the first surface 843a of the third metal pad 843 and the first surface 933a of the fourth metal pad 933. The second interconnect structure ICS2 may pass through the thirteenth buffer dielectric layer 916, the fifteenth interlayer dielectric layer 917, the fourteenth buffer dielectric layer 918, the tenth buffer dielectric layer 828, the eleventh interlayer dielectric layer 827, and the ninth buffer dielectric layer 826. The second interconnect structure ICS2 may include a second pad connector 940 and a second connection metal barrier layer 950. The second connection metal barrier layer 950 may surround the second pad connector 940. The second pad connector 940 may correspond to Figure 1 and Figure 2 The pad connector 210 shown in FIG. 1 may correspond to the second connection metal barrier layer 950. Figure 1 and Figure 2 The connection metal barrier layer 220 is shown. For example, the second pad connector 940 may include copper (Cu) and tin (Sn). For example, the second connection metal barrier layer 950 may include titanium or tantalum.

[0049] A plurality of portions of a transistor may be provided on the first surface 930a of the third semiconductor layer 930. For example, a gate electrode of the transistor may be on the first surface 930a of the third semiconductor layer 930. The photoelectric conversion device PD may be in the third semiconductor layer 930. The photoelectric conversion device PD may have a conductivity type different from that of the third semiconductor layer 930. The third semiconductor layer 930 may include a semiconductor material. The second through-hole 941 may be in the third semiconductor layer 930. The second through-hole 941 may pass through the third semiconductor layer 930 and may be connected to the seventh pad 919. For example, the second through-hole 941 may include a conductive material. The color filter CF may be on the second surface 930b of the third semiconductor layer 930, the second surface 930b facing the first surface 930a. The color filter CF may correspond to the photoelectric conversion device PD. The microlens MR may be on the color filter CF. The microlens MR may correspond to the color filter CF. The second bonding pad 942 may be on the second surface 930b of the third semiconductor layer 930. The second bonding pads 942 may be spaced apart at a certain interval around the third semiconductor layer 930. The bonding wires 943 may be between the first bonding pads 510 and the second bonding pads 942. The bonding wires 943 may electrically connect the third semiconductor chip 900 and the package substrate 500 to each other.

[0050] A support 980 supporting a lens 982 may be provided on the package substrate 500. The support 980 may include engineering plastic. The lens 982 may be on the support 980, facing the third semiconductor chip 900. The lens 982 may include a transparent material such as glass to allow light to pass therethrough.

[0051] 9A to 9E Cross-sectional views illustrating stages in a method of manufacturing a semiconductor device according to some example embodiments.

[0052] Reference Fig.9A , the first pad 120 may be formed in the first dielectric layer 110. The formation of the first pad 120 may include: forming a first trench T1 in the first dielectric layer 10; forming a first barrier layer to cover the top surface of the first dielectric layer 110 and to cover the bottom surface and sidewalls of the first trench T; forming a first metal layer to cover the first barrier layer and fill the first trench T; and performing a planarization process to grind the first metal layer and the first barrier layer to expose the top surface of the first dielectric layer 110. The first pad 120 may include a first metal barrier layer 123 and a first metal pad 121. The first metal barrier layer 123 may conformally cover the bottom surface and sidewalls (e.g., inner surface) of the first trench T1. The first metal pad 121 may completely fill the first trench T1 (e.g., the remaining portion of the first trench T1).

[0053] The first buffer dielectric layer 150, the third dielectric layer 160, and the second buffer dielectric layer 170 may be sequentially formed on the first dielectric layer 110. The first buffer dielectric layer 150 may cover the top surface of the first dielectric layer 110 and the top surface of the first pad 120. The third dielectric layer 160 may cover the top surface of the first buffer dielectric layer 150, and the second buffer dielectric layer 170 may cover the top surface of the third dielectric layer 160.

[0054] Reference Fig. 9B , the third trench T3 may be formed in the first buffer dielectric layer 150, the third dielectric layer 160, and the second buffer dielectric layer 170. The third trench T3 may be formed by patterning the second buffer dielectric layer 170, the third dielectric layer 160, and the first buffer dielectric layer 150 to expose the top surface of the first pad 120. The width of the third trench T3 may be smaller than the width of the first trench T1.

[0055] The second barrier layer 301, the second metal layer 303, and the third metal layer 305 may be formed in the third trench T3. The second barrier layer 301 may conformally cover the top surface of the second buffer dielectric layer 170, and also conformally cover the bottom surface and sidewalls of the third trench T3. The second metal layer 303 may conformally cover the top surface of the second barrier layer 301. The third metal layer 305 may cover the second metal layer 303, and may fill the third trench T3. An electroplating process may be performed to form the second metal layer 303 and the third metal layer 305. For example, the second barrier layer 301 may include titanium or tantalum. For example, the second metal layer 303 may include tin (Sn). For example, the third metal layer 305 may include copper (Cu), aluminum (Al), nickel (Ni), or tungsten (W).

[0056] Reference Fig. 9C , the third metal layer 305 may be etched to form a first bonding metal pad 311. The first bonding metal pad 311 may be formed by a planarization process performed on the third metal layer 305, in which the third metal layer 305 is etched to expose the top surface of the second metal layer 303. The second metal layer 303 may be used as an etch stop layer. The planarization process may include a chemical mechanical polishing process or a wet etching process. When a wet etching process is performed as the planarization process, hydrofluoric acid (HF) may be used.

[0057] The second metal layer 303 may be ground to form a second bonding metal pad 312. The second bonding metal pad 312 may be formed by grinding the second metal layer 303 to expose the top surface of the second barrier layer 301. When the abrasive is used to grind the second metal layer 303, the abrasive may have an etching selectivity relative to the first bonding metal pad 311. The edge top surface of the first bonding metal pad 311 adjacent to the second bonding metal pad 312 may be etched, and its center top surface away from the second bonding metal pad 312 may not be etched. Therefore, the first bonding metal pad 311 may have a convex curved surface. For example, a chemical mechanical polishing process may be performed to grind the second metal layer 303.

[0058] The second barrier layer 301 may be ground to form a first connection barrier layer 313. The first connection barrier layer 313 may be formed by grinding the second barrier layer 301 to expose the top surface of the second buffer dielectric layer 170. When the abrasive is used to grind the second barrier layer 301, the abrasive may have an etching selectivity with respect to the first bonding metal pad 311 and the second bonding metal pad 312. For example, a chemical mechanical polishing process may be performed to grind the second barrier layer 301. The first connection barrier layer 313 may contact the top surface of the first metal pad 121. The formation of the first connection barrier layer 313 may obtain the first pad structure 1000.

[0059] Reference Fig.9D , the same process as discussed above may be performed to form the second pad structure 2000. The second trench T2 may be formed in the second dielectric layer 130, and the second metal barrier layer 145 and the second metal pad 141 may be formed in the second trench T2. The second metal barrier layer 145 may conformally cover the bottom surface and the sidewalls of the second trench T2. The second metal pad 141 may cover the second metal barrier layer 145 and may fill the second trench T2. The third buffer dielectric layer 180, the fourth dielectric layer 190, and the fourth buffer dielectric layer 200 may be sequentially formed on the top surface of the second dielectric layer 130. The fourth trench T4 may be formed by patterning the fourth buffer dielectric layer 200, the fourth dielectric layer 190, and the third buffer dielectric layer 180. The fourth trench T4 may expose the top surface of the second metal pad 141. The fourth trench T4 may be formed to have a width less than the width of the second trench T2.

[0060] The first connection barrier layer 316, the fourth bonding metal pad 315 and the third bonding metal pad 314 may be formed in the fourth trench T4 in sequence. The first connection barrier layer 316 may conformally cover the bottom surface and sidewalls of the fourth trench T4. The first connection barrier layer 316 may contact the top surface of the second metal pad 141. The first connection barrier layer 316 may expose the top surface of the fourth buffer dielectric layer 200. For example, the first connection barrier layer 316 may include titanium or tantalum. The fourth bonding metal pad 315 may conformally cover the top surface of the first connection barrier layer 316. The fourth bonding metal pad 315 may expose the top surface of the fourth buffer dielectric layer 200. For example, the fourth bonding metal pad 315 may include tin (Sn). The third bonding metal pad 314 may cover the top surface of the fourth bonding metal pad 315 and may fill the fourth trench T4. The third bonding metal pad 314 may expose the top surface of the fourth buffer dielectric layer 200. The third bonding metal pad 314 may have a convex curved top surface. For example, the third bonding metal pad 314 may include copper (Cu), aluminum (Al), nickel (Ni), or tungsten (W).

[0061] Reference Fig.9E , the second pad structure 2000 may be stacked on the first pad structure 1000. For example, the first connection barrier layer 316 and the third bonding metal pad 314 and the fourth bonding metal pad 315 of the second pad structure 2000 may be on the first connection barrier layer 313 and the first bonding metal pad 311 and the second bonding metal pad 312 of the first pad structure 1000. The first connection barrier layer 313 and the first connection barrier layer 316 may be arranged symmetrically to each other, and the second bonding metal pad 312 and the fourth bonding metal pad 315 may be arranged symmetrically to each other. The first bonding metal pad 311 and the third bonding metal pad 314 may be arranged symmetrically to each other. Because each of the first bonding metal pad 311 and the third bonding metal pad 314 has a convex curved top surface, when the first bonding metal pad 311 and the third bonding metal pad 314 contact each other, a gap G may be generated between the second buffer dielectric layer 170 and the fourth buffer dielectric layer 200. Therefore, the second buffer dielectric layer 170 and the fourth buffer dielectric layer 200 may be spaced apart from each other.

[0062] Can Fig.9EThe first pad structure 1000 and the second pad structure 2000 stacked on top of each other in the embodiment of the present invention are subjected to an annealing process. The annealing process may allow the first connection barrier layer 313 and the first connection barrier layer 316 to be combined with each other to form a connection metal barrier layer 220. The annealing process may allow the first bonding metal pad 311, the second bonding metal pad 312, the third bonding metal pad 314, and the fourth bonding metal pad 315 to be combined with each other to form a pad connector 210. The annealing process may be performed at about 250° C. to about 350° C. The connection metal barrier layer 220 may surround the pad connector 210. The pad connector 210 may be an intermetallic compound (IMC) formed when the first bonding metal pad to the fourth bonding metal pad 311, 312, 314, and 315 are bonded to each other. When the first bonding metal pad 311 and the third bonding metal pad 314 include copper, the copper may have a face-centered cubic (FCC) lattice structure. When the second bonding metal pad 312 and the fourth bonding metal pad 315 include tin, the tin may have a four-directional lattice structure or a diamond cubic lattice structure. The annealing process may introduce copper atoms into the tin lattice structure, and also introduce tin atoms into the copper lattice structure, so that the copper and tin lattice structures may be stably rearranged. Therefore, the volume of the pad connector 210 in which copper and tin are combined with each other may be smaller than the sum of the volumes of the first bonding metal pad 311, the second bonding metal pad 312, the third bonding metal pad 314, and the fourth bonding metal pad 315 that have not undergone the annealing process. The reduction in the volume of the pad connector 210 may eliminate the gap G between the second buffer dielectric layer 170 and the fourth buffer dielectric layer 200, and as a result, the second buffer dielectric layer 170 and the fourth buffer dielectric layer 200 may contact each other, as shown in FIG. Figure 1 and Figure 2 shown.

[0063] In implementations, the annealing process may result in a reduction in volume of the pad connector 210 including the copper-tin compound and may eliminate the gap G between the second buffer dielectric layer 170 and the fourth buffer dielectric layer 200 to increase adhesion therebetween, which may result in improved yield of semiconductor devices.

[0064] In addition, if Fig.9E As shown, the second bonding metal pad 312 (or the fourth bonding metal pad 315) including tin may be between the first bonding metal pad 311 (or the third bonding metal pad 314) including copper and the first connection barrier layer 313 (or the first connection barrier layer 316) including titanium or tantalum, and galvanic corrosion between the pad connector 210 and the connection metal barrier layer 220 may be avoided.

[0065] FIG. 10A to FIG. 10C Cross-sectional views illustrating stages in a method of manufacturing a semiconductor package according to some example embodiments.

[0066] Reference Fig. 10A , a second semiconductor chip 710 and a third semiconductor chip 900 may be prepared. The second semiconductor chip 710 may include a second semiconductor layer 711 and a third connection line structure 810. The third connection line structure 810 may be on a second surface 711b of the second semiconductor layer 711, wherein the second surface 711b faces the first surface 711a of the second semiconductor layer 711. The third connection line structure 810 may include eighth to eleventh interlayer dielectric layers 821, 823, 825 and 827, seventh to tenth buffer dielectric layers 822, 824, 826 and 828, a first through-hole 829, a third through-hole 831, a fifth pad 830 and a sixth pad 840, a first connection barrier layer 2, a first bonding metal pad 4 and a second bonding metal pad 6. The eighth interlayer dielectric layer 821 may be arranged on the second surface 711b of the second semiconductor layer 711. The first through-hole 829 may pass through a portion of the eighth interlayer dielectric layer 821 and the second semiconductor layer 711. The seventh buffer dielectric layer 822 and the ninth interlayer dielectric layer 823 may be sequentially formed on the eighth interlayer dielectric layer 821. The fifth pad 830 and the third via 831 may be formed in the seventh buffer dielectric layer 822 and the ninth interlayer dielectric layer 823. The fifth pad 830 may contact the first through via 829, and the third via 831 may contact the fifth pad 830.

[0067] The eighth buffer dielectric layer 824 and the tenth interlayer dielectric layer 825 may be sequentially formed on the ninth interlayer dielectric layer 823. The sixth pad 840 may be formed to pass through the eighth buffer dielectric layer 824 and the tenth interlayer dielectric layer 825. The sixth pad 840 may be formed to contact the third via 831. The ninth buffer dielectric layer 826, the eleventh interlayer dielectric layer 827, and the tenth buffer dielectric layer 828 may be sequentially formed on the tenth interlayer dielectric layer 825. The first trench T1 may be formed by patterning the ninth buffer dielectric layer 826, the eleventh interlayer dielectric layer 827, and the tenth buffer dielectric layer 828. The first trench T1 may expose the sixth pad 840. The first connection barrier layer 2, the first bonding metal pad 4, and the second bonding metal pad 6 may be formed in the first trench T1. The first connection barrier layer 2, the first bonding metal pad 4, and the second bonding metal pad 6 may be formed by sequentially forming a first metal layer, a second metal layer, and a third metal layer in the first trench T1 and then performing a planarization process. The planarization process may allow the second bonding metal pad 6 to have a convex curved top surface. For example, the first connection barrier layer 2 may include titanium (Ti) or tantalum (Ta). For example, the first bonding metal pad 4 may include tin (Sn). For example, the second bonding metal pad 6 may include copper (Cu), aluminum (Al), nickel (Ni), or tungsten (W).

[0068] The third semiconductor chip 900 may include a third semiconductor layer 930 and a fourth connection line structure 910. The photoelectric conversion device PD may be in the third semiconductor layer 930. The photoelectric conversion device PD may be formed by an ion implantation process, wherein the third semiconductor layer 930 is doped with impurities. A color filter CF may be formed on a second surface 930b of the third semiconductor layer 930, and a microlens MR may be formed on the color filter CF. A second bonding pad 942 may be formed on the second surface 930b of the third semiconductor layer 930. A carrier adhesive layer 960 may be formed on the second surface 930b of the third semiconductor layer 930. The carrier adhesive layer 960 may cover the color filter CF and the microlens MR. A carrier substrate 970 may be attached to the carrier adhesive layer 960.

[0069] The fourth connection line structure 910 may be formed on the first surface 930a of the third semiconductor layer 930. The fourth connection line structure 910 may include twelfth to fifteenth interlayer dielectric layers 911, 913, 915 and 917, eleventh to fourteenth buffer dielectric layers 912, 914, 916 and 918, a fourth via 920, a seventh pad 919 and an eighth pad 938, a second connection barrier layer 12, a third bonding metal pad 14 and a fourth bonding metal pad 16. The twelfth interlayer dielectric layer 911 may be formed on the first surface 930a of the third semiconductor layer 930. The second through-via 941 may be formed in the third semiconductor layer 930 and the twelfth interlayer dielectric layer 911. The second through-via 941 may contact the second bonding pad 942. The eleventh buffer dielectric layer 912 and the thirteenth interlayer dielectric layer 913 may be formed on the twelfth interlayer dielectric layer 911. The seventh pad 919 may be formed in the eleventh buffer dielectric layer 912 and the thirteenth interlayer dielectric layer 913. The seventh pad 919 may contact the second through via 941. The fourth via 920 may be formed in the thirteenth interlayer dielectric layer 913. The fourth via 920 may contact the seventh pad 919.

[0070] The twelfth buffer dielectric layer 914 and the fourteenth interlayer dielectric layer 915 may be formed on the thirteenth interlayer dielectric layer 913. The eighth pad 938 may pass through the twelfth buffer dielectric layer 914 and the fourteenth interlayer dielectric layer 915. The eighth pad 938 may contact the fourth via 920. The thirteenth buffer dielectric layer 916, the fifteenth interlayer dielectric layer 917, and the fourteenth buffer dielectric layer 918 may be formed on the fourteenth interlayer dielectric layer 915. The second trench T2 may be formed by patterning the thirteenth buffer dielectric layer 916, the fifteenth interlayer dielectric layer 917, and the fourteenth buffer dielectric layer 918. The second trench T2 may expose the eighth pad 938. The second connection barrier layer 12, the third bonding metal pad 14, and the fourth bonding metal pad 16 may be formed in the second trench T2. The second connection barrier layer 12, the third bonding metal pad 14 and the fourth bonding metal pad 16 may be formed by sequentially forming a fourth metal layer, a fifth metal layer and a sixth metal layer in the second trench T2 and then performing a planarization process. The planarization process may allow the fourth bonding metal pad 16 to have a convex curved top surface. For example, the second connection barrier layer 12 may include titanium (Ti) or tantalum (Ta). For example, the third bonding metal pad 14 may include tin (Sn). For example, the fourth bonding metal pad 16 may include copper (Cu), aluminum (Al), nickel (Ni) or tungsten (W).

[0071] Reference Fig. 10B , the second semiconductor chip 710 and the third semiconductor chip 900 may be combined with each other. For example, the combination of the second semiconductor chip 710 and the third semiconductor chip 900 may include arranging the first connection barrier layer 2, the first bonding metal pad 4 and the second bonding metal pad 6 of the second semiconductor chip 710 on the second connection barrier layer 12, the third bonding metal pad 14 and the fourth bonding metal pad 16 of the third semiconductor chip 900, and performing an annealing process to combine the first connection barrier layer 2 and the second connection barrier layer 12 and the first to fourth bonding metal pads 4, 6, 14 and 16 with each other to form a second interconnect structure ICS2. The annealing process may be performed at about 250° C. to about 350° C. The second interconnect structure ICS2 may include a second pad connector 940 and a second connection metal barrier layer 950. The tenth buffer dielectric layer 828 and the fourteenth buffer dielectric layer 918 may contact each other.

[0072] Reference Fig. 10C , a grinding process may be performed on the first surface 711a of the second semiconductor layer 711. The grinding process may continue until the first through-hole 829 is exposed. Therefore, the thickness of the second semiconductor layer 711 may be reduced.

[0073] The second connection line structure 715 may be formed on the first surface 711a of the second semiconductor layer 711. The second semiconductor chip 710 may further include the second connection line structure 715. The second connection line structure 715 may include second to fourth pads 721, 722 and 723, a fourth interlayer dielectric layer 724, a third buffer dielectric layer 726, a fifth interlayer dielectric layer 727, a fourth buffer dielectric layer 728, a sixth interlayer dielectric layer 729, a fifth buffer dielectric layer 730, a seventh interlayer dielectric layer 731, a sixth buffer dielectric layer 732, a first via 733, a second via 734, a third connection barrier layer 22, a fifth bonding metal pad 24 and a sixth bonding metal pad 26. The second pad 721 may be formed on the first surface 711a of the second semiconductor layer 711. The second pad 721 may contact the first through-via 829. The fourth interlayer dielectric layer 724 may be formed on the first surface 711a of the second semiconductor layer 711. The fourth interlayer dielectric layer 724 may cover the second pad 721. The first via 733 may be formed in the fourth interlayer dielectric layer 724. The first via 733 may contact the second pad 721. The third buffer dielectric layer 726 and the fifth interlayer dielectric layer 727 may be sequentially formed on the fourth interlayer dielectric layer 724. The third pad 722 may be formed in the third buffer dielectric layer 726 and the fifth interlayer dielectric layer 727, and the second via 734 may be formed in the fifth interlayer dielectric layer 727 and contact the third pad 722. The fourth buffer dielectric layer 728 and the sixth interlayer dielectric layer 729 may be sequentially formed on the fifth interlayer dielectric layer 727. The fourth pad 723 may be formed to pass through the fourth buffer dielectric layer 728 and the sixth interlayer dielectric layer 729. The fourth pad 723 may contact the second via 734.

[0074] The fifth buffer dielectric layer 730, the seventh interlayer dielectric layer 731, and the sixth buffer dielectric layer 732 may be formed in sequence on the sixth interlayer dielectric layer 729. The third trench T3 may be formed by patterning the fifth buffer dielectric layer 730, the seventh interlayer dielectric layer 731, and the sixth buffer dielectric layer 732. The third trench T3 may expose the fourth pad 723. The third connection barrier layer 22, the fifth bonding metal pad 24, and the sixth bonding metal pad 26 may be formed in the third trench T3. The third connection barrier layer 22, the fifth bonding metal pad 24, and the sixth bonding metal pad 26 may be formed by sequentially forming the seventh metal layer, the eighth metal layer, and the ninth metal layer in the third trench T3 and then performing a planarization process. The planarization process may allow the sixth bonding metal pad 26 to have a convex curved top surface. For example, the third connection barrier layer 22 may include titanium (Ti) or tantalum (Ta). For example, the fifth bonding metal pad 24 may include tin (Sn). For example, the sixth bonding metal pad 26 may include copper (Cu), aluminum (Al), nickel (Ni), or tungsten (W).

[0075] A first semiconductor chip 600 may be prepared. The first semiconductor chip 600 may include a first semiconductor layer 611 and a first connection line structure 620. The first connection line structure 620 may be formed on a first surface 611a of the first semiconductor layer 611. The first connection line structure 620 may include a first buffer dielectric layer 621, a first interlayer dielectric layer 622, a second buffer dielectric layer 623, a second interlayer dielectric layer 624, a third buffer dielectric layer 625, a first pad 626, a fourth connection barrier layer 32, a seventh bonding metal pad 34, and an eighth bonding metal pad 36. The first buffer dielectric layer 621 and the first interlayer dielectric layer 622 may be sequentially formed on the first surface 611a of the first semiconductor layer 611. The first pad 626 may pass through the first buffer dielectric layer 621 and the first interlayer dielectric layer 622. The first pad 626 may contact the first surface 611a of the first semiconductor layer 611. A second buffer dielectric layer 623, a second interlayer dielectric layer 624, and a third buffer dielectric layer 625 may be sequentially formed on the first interlayer dielectric layer 622. A fourth trench T4 may be formed by patterning the second buffer dielectric layer 623, the second interlayer dielectric layer 624, and the third buffer dielectric layer 625. The fourth trench T4 may expose the first pad 626. A fourth connection barrier layer 32, a seventh bonding metal pad 34, and an eighth bonding metal pad 36 may be formed in the fourth trench T4. The fourth connection barrier layer 32, the seventh bonding metal pad 34, and the eighth bonding metal pad 36 may be formed by sequentially forming a tenth metal layer, an eleventh metal layer, and a twelfth metal layer in the fourth trench T4 and then performing a planarization process. The planarization process may allow the eighth bonding metal pad 36 to have a convex curved top surface. For example, the fourth connection barrier layer 32 may include titanium (Ti) or tantalum (Ta). For example, the seventh bonding metal pad 34 may include tin (Sn). For example, the eighth bonding metal pad 36 may include copper (Cu), aluminum (Al), nickel (Ni), or tungsten (W).

[0076] Return to reference Figure 6, the second semiconductor chip 710 and the first semiconductor chip 600 may be combined with each other. For example, the combination of the second semiconductor chip 710 and the first semiconductor chip 600 may include: arranging the third connection barrier layer 22, the fifth bonding metal pad 24 and the sixth bonding metal pad 26 of the second semiconductor chip 710 on the fourth connection barrier layer 32, the seventh bonding metal pad 34 and the eighth bonding metal pad 36 of the first semiconductor chip 600; and performing an annealing process to combine the third connection barrier layer 22 and the fourth connection barrier layer 32 and the fifth to eighth bonding metal pads 24, 26, 34 and 36 with each other to form a first interconnect structure ICS1. The annealing process may be performed at about 250° C. to about 350° C. The first interconnect structure ICS1 may include a first pad connector 740 and a first connection metal barrier layer 750. The third buffer dielectric layer 625 and the sixth buffer dielectric layer 732 may contact each other.

[0077] A chip structure in which a first semiconductor chip 600, a second semiconductor chip 710, and a third semiconductor chip 900 are bonded to each other may be provided on a package substrate 500. An adhesive layer 601 may be provided on a second surface of the first semiconductor chip 600, the second surface facing the first surface 611a, and the adhesive layer 601 may be used to mount the chip structure on the package substrate 500. A molding layer 650 may be formed on the package substrate 500. The molding layer 650 may cover the sidewall of the first semiconductor chip 600. The package substrate 500 may include a first bonding pad 510 formed on a top surface thereof and a bump 520 formed on an opposite bottom surface thereof. The carrier adhesive layer 960 and the carrier substrate 970 may be removed to expose the microlens MR and the second bonding pad 942. A bonding wire 943 may be formed between the first bonding pad 510 and the second bonding pad 942. A bracket 980 may be provided on the package substrate 500. The bracket 980 may support the lens 982.

[0078] By way of summary and review, insufficient volume of pad connectors can result in voids in the pads. However, increasing the volume of pad connectors can result in gaps between dielectric layers.

[0079] According to some example embodiments, the annealing process may result in a reduction in volume of the pad connector including the copper-tin compound, and the volume reduction may eliminate gaps between buffer dielectric layers. Therefore, the buffer dielectric layers may have increased adhesion, thereby improving the yield of semiconductor devices.

[0080] In addition, a bonding metal pad including tin can be formed between a bonding metal pad including copper and a connecting barrier layer including titanium or tantalum, and galvanic corrosion between the connecting metal barrier layer and a pad connector formed by a combination of a bonding metal pad including copper and a bonding metal pad including tin can be avoided.

[0081] One or more embodiments may provide a semiconductor device with improved reliability.

[0082] One or more embodiments may provide a semiconductor package with improved reliability.

[0083] Example embodiments have been disclosed herein, and although specific terms are employed, they are used and interpreted in a general and descriptive sense only and not for purposes of limitation. In some cases, as one of ordinary skill in the art should be aware, unless otherwise indicated, with the filing of this application, features, characteristics, and / or elements described in conjunction with specific embodiments may be used alone or in conjunction with features, characteristics, and / or elements described in conjunction with other embodiments. Therefore, it should be understood by those skilled in the art that various changes in form and detail may be made without departing from the spirit and scope of the invention as set forth in the claims.

Claims

1. A semiconductor device comprising: a first buffer dielectric layer located on the first dielectric layer; a second buffer dielectric layer and a second buffer dielectric layer sequentially arranged on the first buffer dielectric layer, the second buffer dielectric layer being in contact with the first buffer dielectric layer; as well as a pad interconnect structure passing through the first buffer dielectric layer and the second buffer dielectric layer, Wherein, the pad interconnect structure comprises copper and tin, The pad interconnection structure comprises: Central part; a first intermediate portion surrounding the central portion; a second middle portion surrounding the first middle portion; and surrounding the exterior of the second intermediate portion, The particle size of the outer portion is smaller than the particle size of the second middle portion, The particle size of the second middle portion is smaller than the particle size of the first middle portion, and The first middle portion has a smaller particle size than the central portion.

2. The semiconductor device according to claim 1, wherein: The pad interconnect structure includes a pad connector and a connection metal barrier layer surrounding the pad connector, the pad connector includes the central portion, the first middle portion, the second middle portion and the outer portion, and The pad connector includes copper and tin.

3. The semiconductor device according to claim 2, wherein: The amount of tin contained in the pad interconnect structure decreases in a direction from the outside of the pad connector toward the center portion of the pad connector, and An amount of copper included in the pad interconnect structure increases in a direction from the outer portion toward the central portion.

4. The semiconductor device according to claim 1, wherein: The pad interconnect structure includes a pad connector and a connection metal barrier layer surrounding the pad connector, the pad connector includes the central portion, the first middle portion, the second middle portion and the outer portion, and The connection metal barrier layer surrounds the exterior of the pad connector.

5. The semiconductor device according to claim 4, wherein: The first intermediate portion comprises Cu3Sn, and The second intermediate portion includes Cu6Sn5.

6. The semiconductor device according to claim 4, wherein: The amount of copper contained in the central portion is greater than the amount of copper contained in the outer portion, and An amount of tin included in the central portion is smaller than an amount of tin included in the outer portion.

7. The semiconductor device according to claim 1, further comprising: a first pad located in a first trench in the first dielectric layer; as well as a second pad located in a second trench in the second dielectric layer, Wherein, the first pad and the second pad are in contact with the pad interconnection structure.

8. The semiconductor device according to claim 7, wherein: The first pad comprises: A first metal pad located in the first trench; and a first metal barrier layer located in the first trench and between the first metal pad and the first dielectric layer, and The second pad comprises: A second metal pad located in the second trench; and A second metal barrier layer is located in the second trench and between the second metal pad and the second dielectric layer.

9. The semiconductor device according to claim 1, wherein: The pad interconnect structure includes a pad connector and a connection metal barrier layer surrounding the pad connector, the pad connector includes the central portion, the first middle portion, the second middle portion and the outer portion, The semiconductor device further comprises: a third dielectric layer located between the first dielectric layer and the first buffer dielectric layer; and a fourth dielectric layer, which is located between the second dielectric layer and the second buffer dielectric layer, The pad connector comprises: a first section passing through the third dielectric layer and the first buffer dielectric layer; and a second section passing through the fourth dielectric layer and the second buffer dielectric layer, and The first section and the second section are linearly symmetrical to each other.

10. The semiconductor device according to claim 1, wherein: The pad interconnect structure includes a pad connector and a connection metal barrier layer surrounding the pad connector, the pad connector includes the central portion, the first middle portion, the second middle portion and the outer portion, The semiconductor device further comprises: a third dielectric layer located between the first dielectric layer and the first buffer dielectric layer; and a fourth dielectric layer, which is located between the second dielectric layer and the second buffer dielectric layer, The pad connector comprises: a first section passing through the third dielectric layer and the first buffer dielectric layer; and a second section passing through the fourth dielectric layer and the second buffer dielectric layer, and The first section and the second section are offset from each other in opposite directions with respect to a plane dividing the first section and the second section.

11. The semiconductor device according to claim 1, wherein The first dielectric layer and the second dielectric layer each include a silicon oxide layer or a PETOS layer, and The first buffer dielectric layer and the second buffer dielectric layer each include a silicon oxide layer or a silicon carbonitride layer.

12. A semiconductor device comprising: a first dielectric layer; a second dielectric layer, located on the first dielectric layer; as well as a pad connector located between the first dielectric layer and the second dielectric layer, in: The pad connector includes a central portion and an outer portion surrounding the central portion, The granularity of the pad connector increases in a direction from the outer portion toward the central portion, The pad connector comprises: a first intermediate portion surrounding the central portion; and a second middle portion surrounding said first middle portion, said outer portion surrounds said second intermediate portion, The particle size of the outer portion is smaller than the particle size of the second middle portion, The particle size of the second middle portion is smaller than the particle size of the first middle portion, and The first middle portion has a smaller particle size than the central portion.

13. The semiconductor device according to claim 12, wherein: The pad connector includes tin and copper, The amount of copper contained in the pad connector increases in a direction from the outer portion toward the central portion, and An amount of tin contained in the pad connector decreases in a direction from the outer portion toward the central portion.

14. The semiconductor device according to claim 12, wherein: The first intermediate portion comprises Cu3Sn, and The second intermediate portion includes Cu6Sn5.

15. The semiconductor device according to claim 12, further comprising a connection metal barrier layer surrounding the pad connector, in, The connection metal barrier layer includes tantalum.

16. The semiconductor device according to claim 12, further comprising: a first pad located in the first dielectric layer; as well as a second pad located in the second dielectric layer, Wherein, the first pad comprises: a first metal pad located in the first dielectric layer and having a first surface in contact with the pad connector; and a first metal barrier layer covering a second surface and sidewalls of the first metal pad, the second surface of the first metal pad facing the first surface of the first metal pad, and Wherein, the second pad comprises: a second metal pad located in the second dielectric layer and having a first surface in contact with the pad connector; and A second metal barrier layer covers a second surface and sidewalls of the second metal pad, wherein the second surface of the second metal pad faces the first surface of the second metal pad.

17. A semiconductor package, comprising: Package substrate; A first semiconductor chip is located on the package substrate, wherein the first semiconductor chip comprises a first semiconductor layer and a first buffer dielectric layer stacked on a first surface of the first semiconductor layer; a second semiconductor chip located on the first semiconductor chip, the second semiconductor chip comprising a second semiconductor layer and a second buffer dielectric layer stacked on a first surface of the second semiconductor layer, the second buffer dielectric layer being in contact with the first buffer dielectric layer; as well as a first pad interconnect structure passing through the first buffer dielectric layer and the second buffer dielectric layer, in: The first pad interconnect structure includes copper and tin, The first pad interconnect structure comprises: Central part; a first intermediate portion surrounding the central portion; a second middle portion surrounding the first middle portion; and surrounding the exterior of the second intermediate portion, The particle size of the outer portion is smaller than the particle size of the second middle portion, The particle size of the second middle portion is smaller than the particle size of the first middle portion, and The first middle portion has a smaller particle size than the central portion.

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