Spectrum detection device and spectrum detection method

Abstract

The present application is applicable to the field of spectrum detection technology, and provides a spectrum detection device and a spectrum detection method, wherein the spectrum detection device comprises: a laser light source, a beam splitter module, a terahertz module, a Raman module, a sample chamber and an industrial computer; the laser light emitted by the laser light source is divided into pump light, detection light and Raman laser pulse; while the Raman module is used to focus the Raman laser pulse on the sample to be tested in the sample chamber to obtain the sample Raman signal of the sample to be tested, the terahertz module is used to receive the pump light and the detection light, and a terahertz beam is generated, and the terahertz beam is used to irradiate the sample to be tested in the sample chamber to obtain the sample terahertz signal of the sample to be tested; then, the sample terahertz signal and the sample Raman signal are processed to obtain the multi-mode information of the sample to be tested, thereby solving the problem that the terahertz spectrum and the Raman spectrum cannot be obtained at the same position of the same sample.

Description

Technical Field

[0001] The present application belongs to the field of spectrum detection technology, and in particular, relates to a spectrum detection device and a spectrum detection method. Background Art

[0002] Terahertz spectroscopy mainly detects the absorption characteristics of target molecular vibrations, while Raman spectroscopy detects the scattering characteristics of molecular vibrations. Although the two have significant differences in the selection of target molecular tests and their instruments and equipment, they can both be used to characterize molecular chemical bonds. Therefore, terahertz spectroscopy and Raman spectroscopy are highly complementary.

[0003] At present, both terahertz spectrometers and Raman spectrometers on the market are independent detection systems. During detection, the samples to be tested need to be placed in different systems for detection operations, which increases the operation steps and processes and is prone to sample damage. In addition, since the samples need to be switched during the test process, it is easy to cause the problem of not being able to obtain terahertz spectra and Raman spectra at the same position of the same sample.

[0004] Application Contents

[0005] In view of this, the embodiments of the present application provide a spectrum detection device and a spectrum detection method, which can solve the problem that it is impossible to obtain terahertz spectrum and low-frequency Raman spectrum at the same position of the same sample.

[0006] A first aspect of an embodiment of the present application provides a spectrum detection device, including: a laser light source, a beam splitter module, a terahertz module, a Raman module, a sample chamber, and an industrial computer;

[0007] The laser light emitted by the laser light source is divided into pump light, detection light and Raman laser pulse by the beam splitter module;

[0008] The terahertz module is used to receive the pump light and the detection light and generate a terahertz beam; the terahertz beam irradiates the sample to be tested in the sample chamber to obtain a sample terahertz signal of the sample to be tested;

[0009] The Raman module is used to receive the Raman laser pulse and focus the Raman laser pulse onto the sample to be tested in the sample chamber to obtain a sample Raman signal of the sample to be tested;

[0010] The industrial computer is connected to the terahertz module and the Raman module, and is used for receiving the sample terahertz signal and the sample Raman signal, and processing the sample terahertz signal and the sample Raman signal to obtain the multi-mode information of the sample to be tested.

[0011] A second aspect of the embodiments of the present application provides a spectrum detection method, including:

[0012] Splitting the laser light emitted by the laser light source into pump light, probe light and Raman laser pulses;

[0013] The pump light and the detection light are received by a terahertz module, and a terahertz beam is generated; the terahertz beam is used to irradiate the sample to be tested in the sample chamber, and a sample terahertz signal of the sample to be tested is obtained;

[0014] Using a Raman module to receive the Raman laser pulse, and focusing the Raman laser pulse onto the sample to be tested in the sample chamber, to obtain a sample Raman signal of the sample to be tested;

[0015] The sample terahertz signal and the sample Raman signal are received, and the sample terahertz signal and the sample Raman signal are processed to obtain multi-mode information of the sample to be tested.

[0016] In the embodiment of the present application, the laser light emitted by the laser light source is divided into pump light, detection light and Raman laser pulses; while the Raman module is used to focus the Raman laser pulses onto the sample to be tested in the sample chamber to obtain the sample Raman signal of the sample to be tested, the terahertz module is used to receive the pump light and the detection light and generate a terahertz light beam, and the terahertz light beam is used to irradiate the sample to be tested in the sample chamber to obtain the sample terahertz signal of the sample to be tested; then, the sample terahertz signal and the sample Raman signal of the same sample to be tested in the sample chamber are simultaneously obtained, and then the sample terahertz signal and the sample Raman signal are processed to obtain the multi-mode information of the sample to be tested, thereby solving the problem that the terahertz spectrum and the Raman spectrum cannot be obtained for the same position of the same sample. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] In order to more clearly illustrate the technical solutions in the embodiments of the present application, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative labor.

[0018] Figure 1 is a first structural schematic diagram of a spectrum detection device provided in an embodiment of the present application;

[0019] Figure 2 is a first structural schematic diagram of a terahertz module provided in an embodiment of the present application;

[0020] Figure 3 is a second structural schematic diagram of the terahertz module provided in an embodiment of the present application;

[0021] Figure 4is a third structural schematic diagram of the terahertz module provided in an embodiment of the present application;

[0022] Figure 5 is a first structural schematic diagram of a Raman module provided in an embodiment of the present application;

[0023] Figure 6 is a second structural schematic diagram of a Raman module provided in an embodiment of the present application;

[0024] Figure 7 is a second structural schematic diagram of the spectrum detection device provided in an embodiment of the present application;

[0025] Figure 8 is a third structural schematic diagram of a Raman module provided in an embodiment of the present application;

[0026] Fig. 9 is a third structural schematic diagram of the spectrum detection device provided in an embodiment of the present application;

[0027] Fig.10 It is a schematic diagram of the implementation process of the spectral detection method provided in the embodiment of the present application. DETAILED DESCRIPTION

[0028] In the following description, specific details such as specific system structures and technologies are provided for the purpose of illustration rather than limitation, so as to provide a thorough understanding of the embodiments of the present application. However, it should be clear to those skilled in the art that the present application can also be implemented in other embodiments without these specific details. In other cases, detailed descriptions of well-known systems, devices, circuits, and spectral detection methods are omitted to prevent unnecessary details from obstructing the description of the present application.

[0029] Terahertz (THz) waves refer to electromagnetic radiation with a frequency of 0.1-10THz, and its band (0.03-3mm) is between microwaves and infrared. Compared with other bands, terahertz waves have many excellent characteristics, such as: ultra-high sensitivity to water molecules, low photon energy, no harmful biological radiation, and strong radiation coherence. It can detect tiny structural differences and analyze components of the samples to be tested, and has very broad application prospects. Terahertz time-domain spectroscopy and imaging technology belongs to synchronous coherent detection, which is insensitive to thermal background noise, has a high signal-to-noise ratio and sensitivity, and can analyze and identify subtle changes in the material composition and structure of the samples to be tested. In the images obtained using this technology, each pixel not only has the geometric information of the sample to be tested, but also contains complete information such as the intensity, phase and time of the sample to be tested's response to the terahertz pulse, which can realize the analysis of necessary information such as the physical and chemical structure and composition of the sample to be tested.

[0030] Raman spectroscopy is a light scattering technology. When the high-intensity incident light from a laser light source is scattered by molecules, there is a very small portion of the scattered light whose wavelength is different from the incident light. The change in the wavelength of this portion of scattered light is determined by the chemical structure of the sample to be tested. A Raman spectrum is usually composed of a certain number of Raman peaks. Each peak corresponds to a specific molecular bond vibration, which includes both a single chemical bond, such as CC, C=C, NO, CH, etc., and the vibration of a group composed of several chemical bonds, such as the breathing vibration of the benzene ring, the vibration of the long chain of the polymer, and the lattice vibration, etc. Therefore, the Raman spectrum is also called a molecular fingerprint. As a spectral analysis technology, Raman spectroscopy detection technology has the advantages of short test time, high sensitivity, quick operation and simple sample pretreatment, and is widely used in material composition analysis and structure detection.

[0031] Terahertz spectroscopy mainly detects the absorption characteristics of target molecular vibrations, while Raman spectroscopy detects the scattering characteristics of molecular vibrations. Although the two have significant differences in the selection of target molecular tests and their instruments and equipment, they can both be used to characterize molecular chemical bonds. Therefore, terahertz spectroscopy and low-frequency Raman spectroscopy are highly complementary.

[0032] At present, both the terahertz spectrometers and low-frequency Raman spectrometers on the market are independent detection systems. During detection, the samples to be tested need to be placed in different systems for detection operations, which increases the operation steps and processes and is prone to sample damage. In addition, due to the switching of samples during the test, it is impossible to obtain terahertz spectra and Raman spectra at the same position of the same sample, which to a certain extent limits the practical application and promotion of spectral detection systems.

[0033] Based on this, the embodiments of the present application provide a spectral detection device and a spectral detection method, which can achieve the acquisition of terahertz spectrum and low-frequency Raman spectrum of the same sample at the same position.

[0034] In order to illustrate the technical solution of the present application, a specific embodiment is provided below for illustration.

[0035] like Figure 1 As shown, it is a schematic diagram of a spectral detection device provided in an embodiment of the present application. The spectral detection device may include: a laser light source 10, a beam splitter module 20, a terahertz module 30, a Raman module 40, a sample chamber 50 and an industrial computer 60.

[0036] Specifically, the laser emitted by the above-mentioned laser light source 10 is divided into pump light, detection light and Raman laser pulse by the beam splitter module 20; the terahertz module 30 is used to receive the pump light and the detection light, and generate a terahertz beam; the terahertz beam irradiates the sample to be tested in the sample chamber 50 to obtain a sample terahertz signal of the sample to be tested; the Raman module 40 is used to receive the Raman laser pulse, and focus the Raman laser pulse to the sample to be tested in the sample chamber 50 to obtain a sample Raman signal of the sample to be tested; the industrial computer 60 is connected to the terahertz module 30 and the Raman module 40, and is used to receive the sample terahertz signal and the sample Raman signal, and process the sample terahertz signal and the sample Raman signal to obtain multi-mode information of the sample to be tested.

[0037] The laser light source 10 may include a femtosecond pulse laser for emitting laser pulses. In practical applications, the parameters or type of the laser light source 10 may be adjusted or replaced according to the requirements for detection accuracy and imaging resolution.

[0038] In some embodiments of the present application, the above-mentioned beam splitter module may specifically include a first beam splitter and a second beam splitter, which can split the laser into pump light, detection light and Raman laser pulses in a certain ratio, and the power ratio of the pump light, detection light and Raman laser pulse light can be 1:1:1, or other ratios set according to actual application scenarios.

[0039] Specifically, the first beam splitter and the second beam splitter split the laser light emitted by the laser light source into pump light, detection light and Raman laser pulses, which may include: after the first beam splitter splits the laser light emitted by the laser light source into terahertz laser pulses and Raman laser pulses, the second beam splitter splits the terahertz laser pulses into pump light and detection light; or, after the first beam splitter splits the laser light emitted by the laser light source into detection light and laser light to be split, the second beam splitter splits the laser light to be split into pump light and Raman laser pulses; or, after the first beam splitter splits the laser light emitted by the laser light source into pump light and laser light to be split, the second beam splitter splits the laser light to be split into detection light and Raman laser pulses.

[0040] After the beam splitter module splits the laser light emitted by the laser light source 10 into pump light, detection light and Raman laser pulse, the terahertz module 30 can receive the pump light and the detection light and generate a sample terahertz signal of the sample to be tested. Figure 2 As shown, in some embodiments of the present application, the terahertz module 30 may include: a terahertz radiation antenna 301 and a terahertz detection antenna 302 .

[0041] Specifically, after the terahertz module 30 receives the above-mentioned pump light and detection light, the detection light can be emitted into the terahertz detection antenna 302; the pump light can be emitted into the terahertz radiation antenna 301 and generate a terahertz light beam; after the terahertz light beam is emitted into the sample chamber 50 and irradiates the sample to be tested in the sample chamber 50 to obtain the sample light, the sample light is emitted into the terahertz detection antenna 302, the terahertz detection antenna 302 receives the detection light and the sample light, and generates a sample terahertz signal of the sample to be tested.

[0042] The sample light may be a reflected sample light obtained by reflecting the terahertz light beam through the sample to be measured, or a transmitted sample light obtained by transmitting the terahertz light beam through the sample to be measured.

[0043] Generally, when the thickness of the sample to be tested is greater than or equal to the thickness threshold, or when transmission detection cannot be achieved due to the morphology of the sample to be tested (such as testing the back skin of a living mouse), the reflected sample light obtained by reflecting the terahertz light beam from the sample to be tested can often be used, and the detection light and the reflected sample light can be received by the terahertz detection antenna to generate a sample terahertz reflection signal of the sample to be tested; for example, when obtaining a sample terahertz signal of an in vivo animal sample, the reflected sample light obtained by reflecting the terahertz light beam on the animal can be used, and the detection light and the reflected sample light can be received by the terahertz detection antenna to generate a sample terahertz reflection signal of the in vivo animal sample.

[0044] Specifically, Figure 3 A schematic structural diagram of a terahertz module 30 for acquiring a terahertz reflection signal of a sample is shown.

[0045] like Figure 3 As shown, the detection light is incident on the terahertz detection antenna 302 through the first optical reflector group 303; the pump light is incident on the terahertz radiation antenna 301 through the first optical reflector group 303, and a terahertz beam is generated; the terahertz beam is incident on the sample chamber 50 through the optical parabolic mirror 304, and irradiates the sample to be tested in the sample chamber 50 to obtain reflected sample light; the reflected sample light is incident on the terahertz detection antenna 302 through the optical parabolic mirror 304; the terahertz detection antenna 302 receives the detection light and the reflected sample light, and generates a sample terahertz reflection signal of the sample to be tested.

[0046] In practical applications, when the sample morphology allows and the thickness of the sample to be tested is less than a thickness threshold, a terahertz light beam can often be used to transmit the sample to be tested to obtain transmitted sample light, and a terahertz detection antenna receives the detection light and the transmitted sample light to generate a sample terahertz transmission signal of the sample to be tested; for example, when it is necessary to accurately detect the components of a thin sample to be tested, a terahertz light beam can be used to transmit the sample to be tested to obtain transmitted sample light, and a terahertz detection antenna receives the detection light and the transmitted sample light to generate a sample terahertz transmission signal of the sample to be tested.

[0047] Specifically, Figure 4 A schematic structural diagram of a terahertz module 30 for acquiring a terahertz transmission signal of a sample is shown.

[0048] like Figure 4 As shown, the detection light is incident on the terahertz detection antenna 302 through the first optical transmission and reflection group 303; the pump light is incident on the terahertz radiation antenna 301 through the first optical reflector group 303, and a terahertz beam is generated; the terahertz beam is incident on the sample chamber 50 through the optical parabolic mirror 304, and irradiates the sample to be tested in the sample chamber 50 to obtain the transmitted sample light; the transmitted sample light is incident on the terahertz detection antenna 302 through the optical parabolic mirror 304; the terahertz detection antenna 302 receives the detection light and the transmitted sample light, and generates a sample terahertz transmission signal of the sample to be tested.

[0049] In some embodiments of the present application, Figure 3 and Figure 4 As shown, the first optical transmissive-reflective group 303 may constitute an optical delay line 3031 for adjusting the relative delay time between the pump light and the detection light so that the detection light and the sample light reach the terahertz detection antenna at the same time.

[0050] In some embodiments of the present application, the terahertz module may further include: a phase-locked amplifier connected to the bias voltage module, the terahertz detection antenna and the industrial computer respectively; for example, Figure 3 and Figure 4 The bias voltage module 305 in Figure 3 and Figure 4 The phase-locked amplifier 306 in FIG.

[0051] Among them, the above-mentioned phase-locked amplifier can also generate a specific modulation frequency to drive the bias voltage module to be in a rated working state and improve the control response speed of the bias voltage module; the above-mentioned bias voltage module is connected to the terahertz radiating antenna and can provide electric field drive for the terahertz radiating antenna according to the modulation frequency output by the phase-locked amplifier.

[0052] In addition, the above-mentioned phase-locked amplifier can also be used to collect and amplify the sample terahertz signal, and send the amplified sample terahertz signal to the industrial computer.

[0053] In some embodiments of the present application, the connections between the above-mentioned components (such as: the connection between the bias voltage module, the terahertz detection antenna, the industrial computer and the phase-locked amplifier) ​​can be connected through cables; connecting the components through cables reduces the transmission cost of terahertz information, and facilitates the transmission and compatibility of terahertz information, so that the industrial computer can obtain the morphological detail information of the sample to be tested based on the sample terahertz signal output by the cable, thereby avoiding large detection errors in the morphological detail information of the sample to be tested.

[0054] In some embodiments of the present application, the terahertz module may further include: a first optical attenuator; for example, Figure 3 and Figure 4 The first optical attenuator 307 in.

[0055] The first optical attenuator is connected to the industrial computer and is used to adjust the power of the pump light and the detection light to avoid damage to the optical components due to excessive power of the pump light and the detection light.

[0056] Correspondingly, after the beam splitter module splits the laser light emitted by the laser light source 10 into pump light, detection light and Raman laser pulses, the Raman module 40 can receive the Raman laser pulses and generate a sample Raman signal of the sample to be tested. Figure 5 As shown, in some embodiments of the present application, the Raman module 40 may include: a filter module 401 , an optical microscope objective lens 402 , a grating 403 and a detector 404 .

[0057] Specifically, after the Raman module 40 receives the Raman laser pulse, the Raman laser pulse is line-width cleaned by the filter module 401 and then focused to the sample chamber 50 by the optical microscope objective 402, and irradiates the sample to be tested in the sample chamber 50 to obtain sample Raman light; the optical microscope objective 402 collects the sample Raman light, and the sample Raman light is filtered out by the filter module 401 to remove the Raman laser pulse mixed in the sample Raman light and then emitted into the grating 403 to obtain the sample Raman light after spectral separation; the detector 404 collects the sample Raman light after spectral separation to obtain the sample Raman signal.

[0058] In some embodiments of the present application, the above-mentioned Raman laser pulses can be low-frequency Raman laser pulses; compared with the sample Raman signals obtained by ordinary Raman laser pulses, the sample Raman signals obtained by low-frequency Raman laser pulses have higher signal intensity, richer fingerprint characteristics and structural characteristics that can reflect the crystal, and are more feasible in molecular crystal research, drug properties and toxicological detection research.

[0059] It should be noted that, in the embodiments of the present application, the Raman module 40 may be precisely coupled with the terahertz module 30 .

[0060] Figure 6 Shown with Figure 3 The structure diagram of the Raman module 40 precisely coupled to the terahertz module 30 is shown.

[0061] like Figure 6 As shown, after the Raman module 40 receives the Raman laser pulse, the Raman laser pulse is line-width cleaned by the filter module 401 and reflected by the second optical reflector group 405, and then focused to the sample chamber 50 by the optical microscope objective 402, and irradiates the sample to be tested in the sample chamber 50 to obtain sample Raman light; the optical microscope objective 402 collects the sample Raman light, and makes the sample Raman light pass through the second optical reflector group 405 and the filter module 401 to filter out the Raman laser pulse mixed in the sample Raman light, and then enter the grating 403 to obtain the sample Raman light after spectral separation; the detector 404 collects the sample Raman light after spectral separation to obtain the sample Raman signal.

[0062] In practical applications, the intensity of the sample Raman signal is often smaller than the intensity of the Raman laser pulse. If the bandwidth range of the Raman laser pulse is large, it may cover the bandwidth of the Raman signal, resulting in the detector being unable to detect the sample Raman signal. Therefore, in some embodiments of the present application, the above-mentioned filter module 401 can perform line width cleaning on the Raman laser pulse to remove the spectral noise of the Raman laser pulse to ensure that a better laser beam can be obtained; and the above-mentioned filter module 401 can filter out the Raman laser pulses mixed in the sample Raman signal, thereby measuring the Stokes and anti-Stokes Raman spectra.

[0063] Specifically, Figure 6 As shown, the above-mentioned filter module 401 may specifically include: a first filter 4011 , a second filter 4012 and a third filter 4013 .

[0064] Among them, the first filter 4011 is used to clean the line width of the Raman laser pulse, and vertically inject the Raman laser pulse after line width cleaning into the optical microscope objective lens; the first filter can use a volume Bragg bandpass filter (Bragg Bandpass Filter, BPF), which has a very high reflectivity for laser pulses of the central wavelength, reaching more than 90%, and its bandwidth can be as low as 5cm-1, which can effectively remove laser noise to 5cm-1, and the suppression ratio reaches -70dB.

[0065] The third filter 4013 is used to filter out the Raman laser pulses mixed in the sample Raman light for the second time, and inject the sample Raman light after the Raman laser pulses are filtered out for the second time into the grating. The third filter can be a body Bragg notch filter (Bragg Notch Filter, BNF), which is a reflective body Bragg grating engraved in a photosensitive silicate glass body, which can reflect light with a bandwidth as narrow as 5cm-1, but other wavelengths are not affected when passing through, and the overall transmittance is almost 95%; and the filter can withstand higher power and withstand temperatures up to 400°C, and has high environmental stability. In addition, due to the particularity of BNF, in actual applications, it needs to be within a certain angle range with the optical axis, which can be set according to actual applications.

[0066] The second filter 4012 is used to filter out the Raman laser pulses mixed in the sample Raman light collected by the optical microscope objective, and emit the sample Raman light after filtering out the Raman laser pulses into the third filter; the second filter can be a filter formed by combining BPF and BNF.

[0067] In some embodiments of the present application, the Raman module 40 may further include a second optical attenuator 406. The second optical attenuator is connected to the industrial computer and is used to adjust the power of the Raman laser pulse to obtain a laser pulse of appropriate power to avoid damage to optical components caused by excessive laser pulse power.

[0068] Figure 7 Shows Figure 3 The terahertz module 30 shown is Figure 6 The structure diagram of the spectrum detection device after the Raman module 40 is tightly coupled is shown.

[0069] like Figure 7As shown, in the embodiment of the present application, the laser light emitted by the laser light source is divided into pump light, detection light and Raman laser pulse; while the Raman module is used to focus the Raman laser pulse to the sample to be tested in the sample chamber to obtain the sample Raman signal of the sample to be tested, the terahertz module is used to receive the pump light and the detection light and generate a terahertz light beam, and the terahertz light beam is used to irradiate the sample to be tested in the sample chamber to obtain the sample terahertz reflection signal of the sample to be tested; then the sample terahertz reflection signal and the sample Raman signal of the same sample to be tested in the sample chamber are simultaneously obtained, and then the sample terahertz reflection signal and the sample Raman signal are processed to obtain the multi-mode information of the sample to be tested, thereby solving the problem that the terahertz spectrum and the Raman spectrum of the same sample at the same position cannot be obtained.

[0070] Accordingly, Figure 8 Shown with Figure 4 The structure diagram of the Raman module 40 precisely coupled to the terahertz module 30 is shown in FIG. Figure 7 The description of this application will not be repeated here.

[0071] like Figure 8 As shown, in some embodiments of the present application, the above-mentioned filtering module may include: a first filter 4011 and a third filter 4013; wherein the above-mentioned first filter is used to clean the line width of the Raman laser pulse, and obliquely inject the Raman laser pulse after line width cleaning into the optical microscope objective; the third filter is used to filter out the Raman laser pulse mixed in the sample Raman light collected by the optical microscope objective, and inject the sample Raman light after filtering out the Raman laser pulse into the grating.

[0072] Fig. 9 Shows Figure 4 The terahertz module 30 shown is Figure 8 The structure diagram of the spectrum detection device after the Raman module 40 is tightly coupled is shown.

[0073] like Fig. 9As shown, in the embodiment of the present application, the laser light emitted by the laser light source is divided into pump light, detection light and Raman laser pulse; while the Raman module is used to focus the Raman laser pulse to the sample to be tested in the sample chamber to obtain the sample Raman signal of the sample to be tested, the terahertz module is used to receive the pump light and the detection light and generate a terahertz light beam, and the terahertz light beam is used to irradiate the sample to be tested in the sample chamber to obtain the sample terahertz transmission signal of the sample to be tested; then the sample terahertz transmission signal and the sample Raman signal of the same sample to be tested in the sample chamber are simultaneously obtained, and then the sample terahertz transmission signal and the sample Raman signal are processed to obtain the multi-mode information of the sample to be tested, thereby solving the problem that the terahertz spectrum and the Raman spectrum of the same sample at the same position cannot be obtained.

[0074] It can be understood by those skilled in the art that Figure 3 The terahertz module shown can also be used with Figure 8 The Raman module shown is coupled to Figure 4 The terahertz module shown can also be used with Figure 6 The Raman module coupling shown is not described in detail here.

[0075] In some embodiments of the present application, the sample chamber may have a three-dimensional movement function. The spectral detection device may select the most suitable test area by controlling the three-dimensional movement of the sample chamber, and may obtain sample terahertz signals and sample Raman signals at different positions of the same sample.

[0076] Fig.10 A schematic diagram of the implementation flow of the spectrum detection method provided in an embodiment of the present application is shown. The spectrum detection method can be applied to the spectrum detection devices of the above-mentioned various embodiments, steps 1001 to 1004.

[0077] Step 1001, splitting the laser light emitted by the laser light source into pump light, probe light and Raman laser pulses.

[0078] Step 1002, using a terahertz module to receive the applied pump light and the detection light and generate a terahertz beam; applying the terahertz beam to irradiate the sample to be tested in the sample chamber to obtain a sample terahertz signal of the applied sample to be tested.

[0079] Step 1003: using a Raman module to receive the requested Raman laser pulse, and focusing the requested Raman laser pulse onto the sample to be tested in the sample chamber, to obtain a sample Raman signal of the requested sample to be tested.

[0080] Step 1004: receiving the terahertz signal of the applied sample and the Raman signal of the applied sample, and processing the terahertz signal of the applied sample and the Raman signal of the applied sample to obtain multi-mode information of the applied sample to be tested.

[0081] Optionally, the spectral detection device may include a memory, a processor, and a computer program stored in the memory and executable on the processor, and when the processor executes the computer program, it implements: receiving the sample terahertz signal and the sample Raman signal, and processing the sample terahertz signal and the sample Raman signal to obtain multi-mode information of the sample to be tested.

[0082] The processor may be a central processing unit CPU, or other general-purpose processors, digital signal processors DSP, application-specific integrated circuits ASIC, field programmable gate arrays FPGA or other programmable logic devices, discrete gate or transistor logic devices, discrete hardware components, etc.

[0083] The memory may include a read-only memory and a random access memory, and provides instructions and data to the processor.

[0084] In the embodiment of the present application, the laser light emitted by the laser light source is divided into pump light, detection light and Raman laser pulse; while the Raman module is used to focus the Raman laser pulse onto the sample to be tested in the sample chamber to obtain the sample Raman signal of the sample to be tested, the terahertz module is used to receive the pump light and the detection light and generate a terahertz light beam, and the terahertz light beam is used to irradiate the sample to be tested in the sample chamber to obtain the sample terahertz signal of the sample to be tested; then, the sample terahertz signal and the sample Raman signal of the same sample to be tested in the sample chamber are simultaneously obtained, and then the sample terahertz signal and the sample Raman signal are processed to obtain the multi-mode information of the sample to be tested, thereby solving the problem that the terahertz spectrum and the Raman spectrum of the same sample at the same position cannot be obtained.

[0085] It should be noted that, for the convenience and simplicity of description, the specific process of the spectral detection method in the embodiment of the present application can refer to the various implementation methods of the aforementioned device, and will not be repeated here.

[0086] In the embodiments provided in the present application, it should be understood that the disclosed devices can also be implemented in other ways. For example, the terahertz spectrometer described above is only schematic; for another example, the division of each component is only a functional division, and there may be other division methods in actual implementation, such as multiple components can be combined or integrated into another system, or some features can be ignored.

[0087] The above embodiments are only used to illustrate the technical solutions of the present application, rather than to limit them. Although the present application has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the aforementioned embodiments, or make equivalent replacements for some of the technical features therein. These modifications or replacements do not deviate the essence of the corresponding technical solutions from the spirit and scope of the technical solutions of the embodiments of the present application, and should all be included in the protection scope of the present application.

Claims

1. A spectrum detection device, It is characterized in that include: Laser light source, beam splitter module, terahertz module, Raman module, sample chamber and industrial computer; The laser light emitted by the laser light source is divided into pump light, detection light and Raman laser pulse by the beam splitter module; The terahertz module is used to receive the pump light and the detection light and generate a terahertz beam; the terahertz beam irradiates the sample to be tested in the sample chamber to obtain a sample terahertz signal of the sample to be tested; The Raman module is used to receive the Raman laser pulse and focus the Raman laser pulse onto the sample to be tested in the sample chamber to obtain a sample Raman signal of the sample to be tested; The industrial computer is connected to the terahertz module and the Raman module, and is used to receive the sample terahertz signal and the sample Raman signal, and process the sample terahertz signal and the sample Raman signal to obtain the multi-mode information of the sample to be tested; The sample chamber has a three-dimensional movement function, and the spectrum detection device controls the sample chamber to move three-dimensionally, and obtains the sample terahertz signal and the sample Raman signal at different positions of the same sample respectively; The terahertz module includes: a terahertz radiation antenna and a terahertz detection antenna; The detection light is incident on the terahertz detection antenna; The pump light is incident on the terahertz radiation antenna to generate the terahertz light beam; the terahertz light beam is incident on the sample chamber to irradiate the sample to be tested in the sample chamber to obtain sample light; the sample light is incident on the terahertz detection antenna; the terahertz detection antenna receives the detection light and the sample light, and generates a sample terahertz signal of the sample to be tested; The Raman module includes: a filter module, an optical microscope objective lens, a grating and a detector; The Raman laser pulse is cleaned by the filter module and then focused to the sample chamber by the optical microscope objective lens, and irradiates the sample to be tested in the sample chamber to obtain sample Raman light; The optical microscope objective collects the sample Raman light, and the sample Raman light is filtered by the filter module to remove the Raman laser pulse mixed in the sample Raman light, and then is emitted into the grating to obtain the split sample Raman light; The detector collects the split sample Raman light to obtain the sample Raman signal.

2. The spectrum detection device according to claim 1, It is characterized in that The beam splitter module includes a first beam splitter and a second beam splitter; The first beam splitter is used to split the laser light emitted by the laser light source into a terahertz laser pulse and a Raman laser pulse; the second beam splitter is used to split the terahertz laser pulse into a pump light and a detection light; or, The first beam splitter is used to split the laser light emitted by the laser light source into a detection light and a laser light to be split; the second beam splitter is used to split the laser light to be split into a pump light and a Raman laser pulse; or, The first beam splitter is used to split the laser light emitted by the laser light source into pump light and the laser light to be split; the second beam splitter is used to split the laser light to be split into detection light and Raman laser pulses.

3. The spectrum detection device according to claim 1, It is characterized in that The sample light is reflected sample light obtained by reflecting the terahertz light beam through the sample to be measured.

4. The spectrum detection device according to claim 1, It is characterized in that The sample light is transmitted sample light obtained by transmitting the terahertz light beam through the sample to be measured.

5. The spectrum detection device according to claim 1, It is characterized in that The terahertz module further includes: a phase-locked amplifier connected to the bias voltage module, the terahertz detection antenna and the industrial computer respectively; The bias voltage module is connected to the terahertz radiating antenna and is used to provide electric field drive for the terahertz radiating antenna according to the modulation frequency output by the lock-in amplifier; The lock-in amplifier is used to collect and amplify the sample terahertz signal, and send the amplified sample terahertz signal to the industrial computer.

6. The spectrum detection device according to claim 1, It is characterized in that The terahertz module further includes: a first optical attenuator; The first optical attenuator is connected to the industrial computer and is used to adjust the power of the pump light and the detection light.

7. The spectrum detection device according to claim 1, It is characterized in that The filter module includes: a first filter, a second filter and a third filter; The first filter is used to clean the line width of the Raman laser pulse and vertically inject the Raman laser pulse after line width cleaning into the optical microscope objective lens; The second filter is used to filter out the Raman laser pulses mixed in the sample Raman light collected by the optical microscope objective lens, and to emit the sample Raman light after the Raman laser pulses are filtered out into the third filter; The third filter is used for secondary filtering out the Raman laser pulses mixed in the sample Raman light, and injecting the sample Raman light after the secondary filtering out the Raman laser pulses into the grating.

8. The spectrum detection device according to claim 1, It is characterized in that The filter module includes: a first filter and a third filter; The first filter is used to clean the line width of the Raman laser pulse, and to tilt the Raman laser pulse after the line width cleaning into the optical microscope objective lens; The third filter is used to filter out the Raman laser pulses mixed in the sample Raman light collected by the optical microscope objective lens, and to inject the sample Raman light after the Raman laser pulses are filtered out into the grating.

9. The spectrum detection device according to claim 1, It is characterized in that The Raman module further includes: a second optical attenuator; The second optical attenuator is connected to the industrial computer and is used to adjust the power of the Raman laser pulse.

10. A spectrum detection method, applied to the spectrum detection device according to any one of claims 1 to 9, It is characterized in that The spectrum detection method comprises: Splitting the laser light emitted by the laser light source into pump light, probe light and Raman laser pulses; The pump light and the detection light are received by a terahertz module, and a terahertz beam is generated; the terahertz beam is used to irradiate the sample to be tested in the sample chamber, and a sample terahertz signal of the sample to be tested is obtained; Using a Raman module to receive the Raman laser pulse, and focusing the Raman laser pulse onto the sample to be tested in the sample chamber, to obtain a sample Raman signal of the sample to be tested; Receiving the sample terahertz signal and the sample Raman signal, and processing the sample terahertz signal and the sample Raman signal to obtain multimode information of the sample to be tested; The sample chamber has a three-dimensional movement function, and the spectrum detection device controls the sample chamber to move three-dimensionally, and obtains the sample terahertz signal and the sample Raman signal at different positions of the same sample respectively.

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