A real-time wavelength detection device using laser interference principle and its use method

By using the laser interference principle and the coordination of the triangular wave mirror with multiple mirrors in the laser wavelength measurement device, the displacement amount of the reading head or triangular wave mirror is converted into the multi-fold optical path difference change of the laser beam, the problems of high complexity and insufficient accuracy of the laser wavelength measurement device in the prior art are solved, and high-precision and low-cost laser beam wavelength measurement are achieved.

CN111121983BActive Publication Date: 2025-05-02HENAN ANSHI PRECISION MASCH TECH CO LTD
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Patent Information

Application Number
CN202010094546.3
Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
Filing Date
2020-02-16
Publication Date
2025-05-02
Estimated Expiration
2040-02-16

AI Technical Summary

Technical Problem

The existing laser wavelength measurement devices are complex, insufficient measurement accuracy, and high cost, making it difficult to meet the needs of the field of optical precision measurement.

Method used

A real-time wavelength detection device is designed using the principle of laser interference. Through the coordination of the triangular wave mirror and multiple mirrors, the displacement of the reading head or triangular wave mirror is converted into a multiple-radial change of the laser beam, thereby achieving high-precision measurement of the wavelength of the laser beam.

Benefits of technology

The complexity of the laser wavelength measurement device is simplified, the accuracy of laser beam wavelength measurement is improved, the cost is reduced, and the impact of gravity on the measurement results is avoided.

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Abstract

The present invention relates to the field of laser wavelength measurement technology, and proposes a real-time wavelength detection device using the laser interference principle and a method for using the same, comprising a reading head and a triangular wave reflector, wherein the reading head comprises a laser, a spectroscope, a reflector, a focusing lens, a photodetector, and a processor. The present invention only uses countable optical devices to complete the measurement of the wavelength of a laser beam to be measured, and converts the horizontal displacement or vertical displacement of the triangular wave reflector or the reading head into a change in the multiple optical path difference of the laser beam. While ensuring the measurement accuracy of the laser beam wavelength, the complexity of the laser wavelength measurement device is also simplified.
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Description

Technical Field

[0001] The present invention relates to the technical field of laser wavelength measurement, and in particular to a real-time wavelength detection device adopting the laser interference principle and a use method thereof. Background Art

[0002] Accurate measurement of laser wavelength is crucial to the field of optical precision measurement. Taking laser interferometer as an example, its measurement accuracy is directly related to the accuracy of laser wavelength. How to improve the measurement accuracy of laser wavelength and reduce the complexity and cost of laser wavelength measurement equipment has become an important research topic in related fields. Summary of the invention

[0003] The present invention provides a real-time wavelength detection device based on the laser interference principle and a use method thereof to simplify the complexity of a laser wavelength measurement device and improve the accuracy of measuring the wavelength of a laser beam.

[0004] In order to achieve the above-mentioned object of the invention, the embodiment of the present invention provides the following technical solutions:

[0005] A real-time wavelength detection device using the laser interference principle comprises a reading head and a triangular wave reflector for receiving a laser beam transmitted by a beam splitter and a laser beam reflected by a reflector, and reflecting the laser beam reflected by the reflector to a focusing lens;

[0006] The reading head comprises:

[0007] A laser for emitting a laser beam;

[0008] A beam splitter, used for transmitting the laser beam emitted by the laser to the triangular wave reflector and reflecting it to the focusing lens;

[0009] A reflector, used for receiving the laser beam reflected by the triangular wave reflector and reflecting the laser beam reflected by the triangular wave reflector back to the triangular wave reflector;

[0010] A condenser lens is used to receive the laser beam reflected by the beam splitter and the triangular wave reflector, and transmit the received laser beam to the photodetector;

[0011] A photodetector, used for receiving the laser beam transmitted by the focusing lens;

[0012] A processor is used to detect the interference phenomenon generated on the photodetector and record the relative movement displacement between the reading head and the triangular wave reflector.

[0013] This solution uses only countable optical devices to complete the measurement of the wavelength of the laser beam to be measured. While ensuring the measurement accuracy of the laser beam wavelength, it also simplifies the complexity of the laser wavelength measurement device.

[0014] In order to improve the measurement of laser wavelength, the beam splitter is tilted above the triangular wave reflector and has an angle of 30 degrees with the horizontal direction; the reflector and the beam splitter are parallel to each other.

[0015] In order to increase the variation of the optical path difference of the laser beam, the reflector includes a plurality of reflectors, each of which is used to receive the laser beam reflected by the triangular wave reflector and reflect the received laser beam to the triangular wave reflector again.

[0016] Furthermore, in order to illustrate the specific structure of the present invention in more detail, the triangular wave reflector includes N reflective structures with the same structure, each of which includes a first reflective surface and a second reflective surface, the first reflective surface or the second reflective surface is parallel to the reflector, and there is an angle of 120 degrees between the first reflective surface and the second reflective surface.

[0017] In order to achieve a better focusing effect of the laser beam, the focusing lens is a convex lens and is arranged parallel to the horizontal direction.

[0018] Preferably, the focusing lens is a lens without spherical aberration.

[0019] Preferably, the displacement is achieved by a guideless piezoelectric ceramic drive.

[0020] Furthermore, in order to better realize the present invention, the triangular wave reflector and the reading head are both arranged in the shell, and the triangular wave reflector and the shell are fixedly arranged relative to the shell, and the reading head is movably arranged relative to the shell; or the triangular wave reflector and the shell are movably arranged relative to the shell, and the reading head is fixedly arranged relative to the shell.

[0021] A method for using a real-time wavelength detection device using the laser interference principle comprises the following steps:

[0022] Step S1: The triangular wave reflector is fixedly disposed in the housing, and the reading head is slidably disposed in the housing;

[0023] Step S2: Turn on the laser source, use the processor to detect the interference phenomenon generated on the photodetector, and move the reading head in the horizontal direction so that the interference phenomenon generated on the photodetector is constructive interference / destructive interference;

[0024] Step S3: Move the reading head again in the horizontal direction until the Mth constructive interference / destructive interference is generated on the photodetector, and use the processor to record the displacement X of the reading head movement this time;

[0025] Step S4: Calculate the change in the optical path difference of the laser beam based on the displacement X of the reading head, thereby calculating the wavelength of the laser beam.

[0026] The step S1 specifically includes the following steps:

[0027] A laser source is arranged in a shell so that the angle between the laser beam emitted by the laser source and the horizontal direction is 150 degrees; a beam splitter and a reflector are arranged in parallel in the shell so that the angle between the beam splitter and the reflector and the horizontal direction is 30 degrees; a condensing lens is arranged on a side of the reflector away from the triangular wave reflector so that the condensing lens can receive the laser beam reflected by the triangular wave reflector and the beam splitter; a photoelectric detector is arranged at the focus of the condensing lens so that the photoelectric detector can receive the two laser beams transmitted by the condensing lens and generate interference phenomenon.

[0028] As another embodiment, a method for using a real-time wavelength detection device using the laser interference principle comprises the following steps:

[0029] Step S1: or slidingly setting the triangular wave reflector in the housing, and fixing the reading head in the housing;

[0030] Step S2: Turn on the laser source, use the processor to detect the interference phenomenon generated on the photodetector, and move the triangular wave reflector in the horizontal direction so that the interference phenomenon generated on the photodetector is constructive interference / destructive interference;

[0031] Step S3: Move the triangular wave reflector in the horizontal direction again until the Mth constructive interference / destructive interference is generated on the photodetector, and use the processor to record the displacement X of the triangular wave reflector this time;

[0032] Step S4: Calculate the change in the optical path difference of the laser beam according to the displacement X of the triangular wave reflector, thereby calculating the wavelength of the laser beam.

[0033] As another embodiment, a method for using a real-time wavelength detection device using the laser interference principle comprises the following steps:

[0034] Step S1: Slidingly disposing the triangular wave reflector or the reading head in the housing, and fixing the reading head or the triangular wave reflector in the housing;

[0035] Step S2: Turn on the laser source, use the processor to detect the interference phenomenon generated on the photodetector, and move the triangular wave reflector or the reading head in the vertical direction so that the interference phenomenon generated on the photodetector is constructive interference / destructive interference;

[0036] Step S3: Move the triangular wave reflector or the reading head in the vertical direction again until the Mth constructive interference / destructive interference is generated on the photodetector, and use the processor to record the displacement X of the triangular wave reflector this time;

[0037] Step S4: Calculate the change in the optical path difference of the laser beam based on the displacement X of the triangular wave reflector or the reading head, thereby calculating the wavelength of the laser beam.

[0038] Compared with the prior art, the present invention has the following beneficial effects:

[0039] Through the reflection of the laser beam by the triangular wave reflector and several reflectors, the displacement of the triangular wave reflector or the reading head is converted into a multiple optical path difference change of the laser beam, which greatly improves the accuracy of the laser beam wavelength measurement;

[0040] By increasing the number of reflectors, the change in the optical path difference of the laser beam can be further increased, so that the high-precision measurement of the wavelength of the laser beam can be better achieved. At the same time, the size of the reflector can be reduced to avoid the problem that a large-sized reflector is difficult to process and difficult to ensure accuracy. In addition, setting up multiple reflectors can reduce the overall size of the probe, making it easier to ensure the accuracy of wavelength measurement.

[0041] When measuring laser wavelength in the vertical direction, the influence of gravity on the measurement results can be avoided, further ensuring the accuracy of wavelength measurement. BRIEF DESCRIPTION OF THE DRAWINGS

[0042] In order to more clearly illustrate the technical solution of an embodiment of the present invention, a brief introduction will be given below to the drawings required for use in one of the embodiments. It should be understood that the following drawings only show certain embodiments of the present invention and therefore should not be regarded as limiting the scope. For ordinary technicians in this field, other related drawings can be obtained based on these drawings without paying creative work.

[0043] Figure 1 A schematic diagram of the structure of a device provided in Example 1 of the present invention;

[0044] Figure 2 This is a schematic diagram of the device provided in Example 1 of the present invention when working in the horizontal direction;

[0045] Figure 3 A partial enlarged schematic diagram of the device provided in Example 1 of the present invention when it is working;

[0046] Figure 4 This is a schematic diagram of the device provided in Example 1 of the present invention when working in a vertical direction;

[0047] Figure 5 A schematic diagram of calculating the optical path difference of a laser beam when the device provided in Example 2 of the present invention works in the horizontal direction;

[0048] Figure 6 For the present invention Figure 5 A partial enlarged schematic diagram of .

[0049] Main component symbols

[0050] Reading head 1, laser source 100; spectrometer 200; first reflector 310; second reflector 320; focusing lens 400, photodetector 500, triangular wave reflector 600; first reflective surface 610; second reflective surface 620. DETAILED DESCRIPTION

[0051] The technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all the embodiments. The components of the embodiments of the present invention generally described and shown in the drawings here can be arranged and designed in various different configurations. Therefore, the following detailed description of the embodiments of the present invention provided in the drawings is not intended to limit the scope of the claimed invention, but merely represents the selected embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without making creative work belong to the scope of protection of the present invention.

[0052] It should be noted that similar reference numerals and letters represent similar items in the following drawings, so once an item is defined in one drawing, it does not need to be further defined and explained in the subsequent drawings. At the same time, in the description of the present invention, the terms "first", "second", etc. are only used to distinguish the description, and cannot be understood as indicating or implying relative importance, or implying any such actual relationship or order between these entities or operations.

[0053] Embodiment 1:

[0054] The present invention is achieved through the following technical solutions: Figure 1 As shown, a real-time wavelength detection device using the principle of laser interference includes a triangular wave reflector and a reading head, wherein the reading head includes a laser, a spectroscope, a reflector, a focusing lens, a photodetector, and a processor, wherein:

[0055] The laser is used to emit a laser beam to the spectroscope. The wavelength of the laser beam is unknown, that is, this solution needs to measure the wavelength of the laser beam.

[0056] The beam splitter is tilted above the triangular wave reflector and has an angle of 30 degrees with the horizontal direction. It is used to receive the laser beam sent by the laser, transmit the laser beam to the triangular wave reflector, and reflect it to the focusing lens. For the convenience of distinction in the following text, the laser beam transmitted by the beam splitter to the triangular wave reflector is defined as the transmitted laser beam, and the laser beam reflected by the beam splitter to the focusing lens is defined as the reflected laser beam.

[0057] The reflector is tilted above the triangular wave reflector and parallel to the beam splitter, and is used for receiving the laser beam reflected by the triangular wave reflector and reflecting the received laser beam to the triangular wave reflector again.

[0058] The focusing lens is arranged on the side of the reflector away from the triangular wave reflector and is arranged parallel to the horizontal direction. It is used to receive the reflected laser beam reflected by the beam splitter and the transmitted laser beam reflected by the triangular wave reflector, and transmit the received reflected laser beam and transmitted laser beam to the photodetector.

[0059] The photoelectric detector is arranged at the focus of the condensing lens and is used for receiving the reflected laser beam and the transmitted laser beam transmitted by the condensing lens.

[0060] A processor detects the interference phenomenon generated on the photodetector and records the displacement of the reading head or triangular wave mirror and calculates the wavelength of the laser beam.

[0061] The present invention moves a reading head or a triangular wave reflector in a horizontal direction, converts the horizontal displacement of the reading head or the triangular wave reflector into a change in a multiple optical path difference of a laser beam, so as to change the interference phenomenon on a photoelectric detector, uses a photoelectric detector to detect the interference phenomenon generated on the photoelectric detector in real time, and records the displacement of the reading head or the triangular wave reflector. When the inclination angles of the laser beam, the beam splitter, and the reflector are known, the change in the optical path difference between the transmitted laser beam and the reflected laser beam can be calculated based on the displacement recorded by the processor, thereby calculating the wavelength of the laser beam, thereby greatly improving the accuracy of measuring the wavelength of the laser beam.

[0062] Furthermore, in order to better calculate the change in the optical path difference between the transmitted laser beam and the reflected laser beam, multiple parallel reflectors are set, such as Figure 1 As shown, this embodiment is provided with two reflectors, namely, a first reflector and a second reflector. The first reflector is used to receive the transmitted laser beam which is transmitted from the beam splitter to the triangular wave reflector and then reflected by the triangular wave reflector, and reflect the received transmitted laser beam to the triangular wave reflector again; the second reflector is used to receive the laser beam which is reflected from the first reflector to the triangular wave reflector and then reflected by the triangular wave reflector, and reflect the received laser beam to the triangular wave reflector again. When the reading head or the triangular wave reflector is moved, the optical path change of the transmitted laser beam at each reflector is very small, so a plurality of reflectors are provided to multiply the optical path change of the transmitted laser beam, so as to calculate the wavelength of the laser beam later, and further improve the accuracy of the laser beam wavelength measurement.

[0063] In this embodiment, the reading head is arranged to move, while the triangular wave reflector is fixed. Figure 2 As shown in the figure, the solid line is the position of the reading head before it moves, and the dotted line is the position of the reading head after it moves. Figure 2As can be seen in the figure, after the reading head moves in the direction indicated by the arrow, the optical path of the reflected laser beam does not change, but the optical path of the transmitted laser beam changes. Then the change in the optical path difference between the reflected laser beam and the transmitted laser beam is the change in the optical path difference of the transmitted laser beam. According to the principle of laser interference, the change in the optical path difference is equal to an integer multiple of the wavelength. Then, the processor of this embodiment detects the number M of constructive interferences spaced on the photodetector and the recorded displacement of the reading head to calculate the wavelength of the laser beam.

[0064] To more clearly illustrate the change in the optical path difference between the transmitted laser beam and the reflected laser beam, as shown in Figure 3 Shown Figure 2 From the partially enlarged schematic diagram, it can be seen that the angle of the beam splitter in the horizontal direction is 30 degrees, and the reflected laser beam reflected from the beam splitter to the focusing lens is perpendicular to the horizontal direction, which means that the angle of the laser beam emitted by the laser with the horizontal direction is 150 degrees.

[0065] The triangular wave reflector includes several reflective structures, each of which includes a first reflective surface and a second reflective surface. As shown in the figure, the angle between the second reflective surface and the horizontal direction is 30 degrees, the angle between the first reflective surface and the horizontal direction is 150 degrees, and the angle between the first reflective surface and the second reflective surface is an obtuse angle of 120 degrees. The second reflective surface is parallel to the beam splitter and the reflector, and the first reflective surface is parallel to the transmitted laser beam transmitted from the beam splitter.

[0066] By marking the angle Figure 3 It can be seen that the optical path difference between the transmitted laser beam (dashed line) after the reading head is moved and the transmitted laser beam (solid line) before the movement is changed. According to the angle relationship between the beam splitter, the reflector, and the triangular wave reflector, the optical path difference change after the movement of the transmitted laser beam can be calculated. This embodiment does not limit the height of the beam splitter, the reflector, and the triangular wave reflector. The optical path difference change corresponding to each reflection of the transmitted laser can be calculated according to a simple trigonometric relationship.

[0067] The focusing lens is a convex lens. When two parallel light beams are incident on the convex lens vertically, the two light beams will pass through the focus of the convex lens after passing through the convex lens. Therefore, a convex lens with a focusing effect is used, and a photodetector is set at the focus of the focusing lens so that the two laser beams passing through the focusing lens can be incident on the photodetector.

[0068] The triangular wave reflector and the reading head are both arranged in the housing, and the triangular wave reflector is fixed relative to the housing, and the reading head is movable relative to the housing; or the triangular wave reflector and the housing are movable relative to the housing, and the reading head is fixed relative to the housing. During the measurement work, either the triangular wave reflector or the reading head can be fixed relative to the housing, and the other can be movable relative to the housing, and the measurement of the wavelength of the laser beam can be completed. As shown in the figure, the triangular wave reflector is fixed relative to the housing, and the reading head is movable relative to the housing.

[0069] Based on the above laser interferometer, the present invention also proposes a method for using a real-time wavelength detection device using the laser interference principle, comprising the following steps:

[0070] Step S1: The triangular wave reflector is fixedly disposed in the housing, and the reading head is slidably disposed in the housing.

[0071] When setting up the readhead, the following steps are also included:

[0072] A laser source is arranged in a shell so that the angle between the laser beam emitted by the laser source and the horizontal direction is 150 degrees; a beam splitter and a reflector are arranged in parallel in the shell so that the angle between the beam splitter and the reflector and the horizontal direction is 30 degrees; a condensing lens is arranged on a side of the reflector away from the triangular wave reflector so that the condensing lens can receive the laser beam reflected by the triangular wave reflector and the beam splitter; a photoelectric detector is arranged at the focus of the condensing lens so that the photoelectric detector can receive the two laser beams transmitted by the condensing lens and generate interference phenomenon.

[0073] Step S2: Turn on the laser source, use the processor to detect the interference phenomenon generated on the photodetector, and move the reading head in the horizontal direction so that the interference phenomenon generated on the photodetector is constructive interference / destructive interference.

[0074] It should be noted that when detecting the interference phenomenon generated on the photodetector, for the convenience of detection, only the constructive interference or destructive interference generated may be detected.

[0075] Step S3: Move the reading head in the horizontal direction again until the Mth constructive interference / destructive interference is generated on the photodetector, and use the processor to record the displacement X of this reading head movement.

[0076] Step S4: Calculate the change in the optical path difference of the laser beam based on the displacement X of the reading head, thereby calculating the wavelength of the laser beam.

[0077] As another embodiment, a method for using a real-time wavelength detection device using the laser interference principle comprises the following steps:

[0078] Step S1: or slide the triangular wave reflector in the housing, and fix the reading head in the housing.

[0079] When setting up the readhead, the following steps are also included:

[0080] A laser source is arranged in a shell so that the angle between the laser beam emitted by the laser source and the horizontal direction is 150 degrees; a beam splitter and a reflector are arranged in parallel in the shell so that the angle between the beam splitter and the reflector and the horizontal direction is 30 degrees; a condensing lens is arranged on a side of the reflector away from the triangular wave reflector so that the condensing lens can receive the laser beam reflected by the triangular wave reflector and the beam splitter; a photoelectric detector is arranged at the focus of the condensing lens so that the photoelectric detector can receive the two laser beams transmitted by the condensing lens and generate interference phenomenon.

[0081] Step S2: Turn on the laser source, use the processor to detect the interference phenomenon generated on the photodetector, and move the triangular wave reflector in the horizontal direction so that the interference phenomenon generated on the photodetector is constructive interference / destructive interference.

[0082] Step S3: Move the triangular wave reflector in the horizontal direction again until the Mth constructive interference / destructive interference is generated on the photodetector, and use the processor to record the displacement X of the triangular wave reflector this time.

[0083] Step S4: Calculate the change in the optical path difference of the laser beam according to the displacement X of the triangular wave reflector, thereby calculating the wavelength of the laser beam.

[0084] As another embodiment, a method for using a real-time wavelength detection device using the laser interference principle comprises the following steps:

[0085] Step S1: Slidingly disposing the triangular wave reflector or the reading head in the housing, and fixing the reading head or the triangular wave reflector in the housing;

[0086] Step S2: Turn on the laser source, use the processor to detect the interference phenomenon generated on the photodetector, and move the triangular wave reflector or the reading head in the vertical direction so that the interference phenomenon generated on the photodetector is constructive interference / destructive interference;

[0087] Step S3: Move the triangular wave reflector or the reading head in the vertical direction again until the Mth constructive interference / destructive interference is generated on the photodetector, and use the processor to record the displacement X of the triangular wave reflector this time;

[0088] Step S4: Calculate the change in the optical path difference of the laser beam based on the displacement X of the triangular wave reflector or the reading head, thereby calculating the wavelength of the laser beam.

[0089] Embodiment 2:

[0090] This embodiment calculates the change in the optical path difference of the transmitted laser beam after the reading head is moved in the horizontal direction, such as Figure 5 As shown in the figure, the processor records the displacement of the reading head in the horizontal direction as X. Assuming that the point where the transmitted laser beam lands on the second reflecting surface moves a height of h in the vertical direction, Figure 5 It can be seen from the figure that the change in the optical path difference of the transmitted laser beam is h+L. Figure 5 Local zoom in Figure 6 As shown, it can be calculated Therefore, the change in the optical path difference of the transmitted laser beam is The overall optical path difference change of the transmitted laser can be calculated based on the number of laser reflections. After calculating the optical path difference change of the transmitted laser beam, the wavelength of the laser beam can be calculated.

[0091] The above is only a specific embodiment of the present invention, but the protection scope of the present invention is not limited thereto. Any person skilled in the art can easily think of changes or substitutions within the technical scope disclosed by the present invention, which should be included in the protection scope of the present invention. Therefore, the protection scope of the present invention should be based on the protection scope of the claims.

Claims

1. A real-time wavelength detection device using the principle of laser interference, comprising a reading head, characterized in that: Also included is a triangular wave reflector for receiving the laser beam transmitted by the beam splitter and the laser beam reflected by the reflector, and reflecting the laser beam reflected by the reflector to the condenser lens; The reading head comprises: A laser for emitting a laser beam; A beam splitter, used for transmitting the laser beam emitted by the laser to the triangular wave reflector and reflecting it to the focusing lens; A reflector, used for receiving the laser beam reflected by the triangular wave reflector and reflecting the laser beam reflected by the triangular wave reflector back to the triangular wave reflector; A condenser lens is used to receive the laser beam reflected by the beam splitter and the triangular wave reflector, and transmit the received laser beam to the photodetector; A photodetector, used for receiving the laser beam transmitted by the focusing lens; A processor is used to detect the interference phenomenon generated on the photodetector and record the relative movement displacement between the reading head and the triangular wave reflector.

2. The real-time wavelength detection device using the laser interference principle according to claim 1, characterized in that: The beam splitter is tilted above the triangular wave reflector and has an angle of 30 degrees with the horizontal direction; the reflector and the beam splitter are parallel to each other.

3. The real-time wavelength detection device using the laser interference principle according to claim 2, characterized in that: The reflectors include a plurality of reflectors, each of which is used to receive the laser beam reflected by the triangular wave reflector and reflect the received laser beam back to the triangular wave reflector.

4. The real-time wavelength detection device using the laser interference principle according to claim 1, characterized in that: The triangular wave reflector includes N reflective structures with the same structure, each of which includes a first reflective surface and a second reflective surface. The first reflective surface or the second reflective surface is parallel to the reflector, and there is an angle of 120 degrees between the first reflective surface and the second reflective surface.

5. A real-time wavelength detection device using the laser interference principle according to any one of claims 1 to 4, characterized in that: The condenser lens is a convex lens and is arranged parallel to the horizontal direction.

6. The real-time wavelength detection device using the laser interference principle according to claim 5, characterized in that: The triangular wave reflector and the reading head are both arranged in the shell, and the triangular wave reflector is fixedly arranged relative to the shell, and the reading head is movably arranged relative to the shell; or the triangular wave reflector and the shell are movably arranged relative to the shell, and the reading head is fixedly arranged relative to the shell.

7. A method for using a real-time wavelength detection device using the laser interference principle according to any one of claims 1 to 6, characterized in that: The following steps are involved: Step S1: The triangular wave reflector is fixedly disposed in the housing, and the reading head is slidably disposed in the housing; Step S2: Turn on the laser source, use the processor to detect the interference phenomenon generated on the photodetector, and move the reading head in the horizontal direction so that the interference phenomenon generated on the photodetector is constructive interference / destructive interference; Step S3: Move the reading head again in the horizontal direction until the Mth constructive interference / destructive interference is generated on the photodetector, and use the processor to record the displacement X of the reading head movement this time; Step S4: Calculate the change in the optical path difference of the laser beam based on the displacement X of the reading head, thereby calculating the wavelength of the laser beam.

8. The method for using the real-time wavelength detection device using the laser interference principle according to claim 7, characterized in that: The step S1 specifically includes the following steps: A laser source is arranged in a shell so that the angle between the laser beam emitted by the laser source and the horizontal direction is 150 degrees; a beam splitter and a reflector are arranged in parallel in the shell so that the angle between the beam splitter and the reflector and the horizontal direction is 30 degrees; a condensing lens is arranged on a side of the reflector away from the triangular wave reflector so that the condensing lens can receive the laser beam reflected by the triangular wave reflector and the beam splitter; a photoelectric detector is arranged at the focus of the condensing lens so that the photoelectric detector can receive the two laser beams transmitted by the condensing lens and generate interference phenomenon.

9. A method for using a real-time wavelength detection device using the laser interference principle according to any one of claims 1 to 6, characterized in that: The following steps are involved: Step S1: or slidingly setting the triangular wave reflector in the housing, and fixing the reading head in the housing; Step S2: Turn on the laser source, use the processor to detect the interference phenomenon generated on the photodetector, and move the triangular wave reflector in the horizontal direction so that the interference phenomenon generated on the photodetector is constructive interference / destructive interference; Step S3: Move the triangular wave reflector in the horizontal direction again until the Mth constructive interference / destructive interference is generated on the photodetector, and use the processor to record the displacement X of the triangular wave reflector this time; Step S4: Calculate the change in the optical path difference of the laser beam according to the displacement X of the triangular wave reflector, thereby calculating the wavelength of the laser beam.

10. A method for using a real-time wavelength detection device using the laser interference principle according to any one of claims 1 to 6, characterized in that: The following steps are involved: Step S1: Slidingly disposing the triangular wave reflector or the reading head in the housing, and fixing the reading head or the triangular wave reflector in the housing; Step S2: Turn on the laser source, use the processor to detect the interference phenomenon generated on the photodetector, and move the triangular wave reflector or the reading head in the vertical direction so that the interference phenomenon generated on the photodetector is constructive interference / destructive interference; Step S3: Move the triangular wave reflector or the reading head in the vertical direction again until the Mth constructive interference / destructive interference is generated on the photodetector, and use the processor to record the displacement X of the triangular wave reflector this time; Step S4: Calculate the change in the optical path difference of the laser beam based on the displacement X of the triangular wave reflector or the reading head, thereby calculating the wavelength of the laser beam.

Citation Information

Patent Citations

  • Real-time wavelength detection device adopting laser interference principle

    CN211317545U