Electron beam focusing position deviation test device

Abstract

The present invention relates to an electron beam focus offset test device, comprising an electron beam extraction system, a focusing system, a bellows assembly and a scanning system, wherein the electron beam extraction system is connected to the focusing system through a support tube, the focusing system is connected to the bellows assembly through a four-way assembly, and the scanning system is located at the bottom of the bellows assembly; a measuring device is also provided; an optical cable assembly is arranged between the flange of the four-way assembly and the flange of the bellows assembly, the measuring device is grounded and electrically connected to the optical cable assembly, and the optical cable assembly comprises a flange welding assembly. The present invention can perform online real-time detection of the electron beam spot position, and can correct it when an offset occurs, forming a feedback mechanism to avoid the electron beam offset from hitting a vacuum pipe, and can avoid causing serious damage to the equipment and the X-rays generated after the electron beam offset hits the outer wall of the vacuum pipe.

Description

Technical Field

[0001] The invention relates to the field of electron accelerators, and in particular to an electron beam focus position deviation testing device. Background Art

[0002] Due to the characteristics of low energy and high beam power of low energy electron beam equipment, the electron beam is affected by many factors such as space magnetic field, space electric field, space charge effect, etc. during the generation, acceleration and transmission process. Its trajectory is easily deviated, resulting in equipment damage, fluctuations in irradiation uniformity, changes in lateral irradiation width and many other influences.

[0003] In order to prevent electron beam deviation, low-energy electron beam equipment currently generally adopts methods such as adding external magnetic shielding devices and improving the acceleration tube lead-out structure. However, the deviation caused by sudden situations (vacuum mutation, acceleration tube interlayer discharge, high-voltage power supply input ripple, focusing power supply and magnet failure, etc.) cannot be effectively avoided. Summary of the invention

[0004] The purpose of the present invention is to provide an electron beam focus offset testing device, which can perform online real-time detection of the electron beam spot position, and can correct it when an offset occurs, forming a feedback mechanism to prevent the electron beam from offsetting and hitting the vacuum pipe, thereby ensuring the uniformity and lateral width of the product irradiation, and avoiding serious damage to the equipment and X-rays generated by the electron beam offset hitting the outer wall of the vacuum pipe.

[0005] In order to achieve the above object, the present invention provides the following technical solutions:

[0006] An electron beam focus offset test device comprises an electron beam extraction system, a focusing system, a bellows assembly and a scanning system, wherein the electron beam extraction system is connected to the focusing system via a support tube, the focusing system is connected to the bellows assembly via a four-way assembly, and the scanning system is located at the bottom end of the bellows assembly; a measuring device is also included; an optical cable assembly is arranged between the flange of the four-way assembly and the flange of the bellows assembly, the measuring device is grounded and electrically connected to the optical cable assembly, and the optical cable assembly comprises a flange welding assembly.

[0007] Furthermore, the optical cable assembly also includes an alloy gasket and an insulating sheet; the upper end face of the flange welding assembly is connected to the flange of the four-way assembly through the alloy gasket and the insulating sheet in sequence, and the lower end face of the flange welding assembly is connected to the flange of the corrugated tube assembly through the alloy gasket and the insulating sheet in sequence.

[0008] Furthermore, the flange welding assembly includes a flange body, a cover ring and a water pipe joint; an annular water groove is coaxially arranged on the flange body, a partition is arranged in the annular water groove, and the cover ring is closed on the annular water groove and cooperates with the partition.

[0009] Furthermore, the water pipe joint is located on the side of the flange body, and there are two water pipe joints, which are respectively connected to the side walls of the annular water tank on both sides of the partition.

[0010] Furthermore, a through hole is coaxially arranged in the middle of the flange body; the center holes of the alloy gasket and the insulating sheet are coaxially arranged, and the apertures of both holes are larger than the aperture of the through hole in the middle of the flange body.

[0011] Furthermore, the material of the flange welding assembly is T2 copper, the material of the alloy gasket is Kovar alloy, and the material of the insulating sheet is 95 porcelain; the measuring device is specifically a current detector.

[0012] The beneficial effects of the present invention are: an electron beam focus offset testing device, through the coordinated use of an optical cable assembly and a measuring device, can detect whether the electron beam spot in a vacuum pipe is offset. If the electron beam spot is offset, the electron beam rays will hit the optical cable assembly. At this time, the measuring device will detect it and can correct it when the offset occurs, forming a feedback mechanism to prevent the rays from hitting the vacuum pipe, thereby ensuring the uniformity and lateral width of the product irradiation, and avoiding serious damage to the equipment and X-rays generated by the electron beam offset and hitting the outer wall of the vacuum pipe. BRIEF DESCRIPTION OF THE DRAWINGS

[0013] Figure 1 The present invention is a schematic structural diagram of an electron beam focus offset testing device.

[0014] Figure 2 The present invention is a schematic structural diagram of a flange welding assembly of an electron beam focus offset testing device.

[0015] Figure 3 for Figure 3 Schematic diagram of a bottom end view of the structure shown.

[0016] Figure 4 for Figure 3 Schematic diagram of the structure after removing the cover ring.

[0017] In the figure: 1. Electron beam extraction system; 2. Focusing system; 3. Optical cable assembly; 31. Flange welding assembly; 311. Flange body; 312. Through hole; 313. Annular water tank; 314. Cover ring; 315. Partition; 316. Water pipe joint; 32. Alloy gasket; 33. Insulating sheet; 4. Bellows assembly; 5. Scanning system; 6. Measuring device; 7. Support pipe; 8. Cross-way assembly. DETAILED DESCRIPTION

[0018] In order to make the purpose, technical solution and advantages of the present invention more clearly understood, the present invention is further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present invention and are not used to limit the present invention.

[0019] refer to Figures 1 to 4 , an electron beam focus offset test device, comprising an electron beam extraction system 1, a focusing system 2, a bellows assembly 4 and a scanning system 5, wherein the electron beam extraction system 1 is connected to the focusing system 2 through a support tube 7, the electron beam extraction system 1 is used to generate an electron beam and can adjust the emission of the electron beam, the focusing system 2 is connected to the bellows assembly 4 through a four-way assembly 8, and the scanning system 5 is located at the bottom end of the bellows assembly 4; it also includes a measuring device 6; an optical cable assembly 3 is arranged between the flange of the four-way assembly 8 and the flange of the bellows assembly 4, the measuring device 6 is grounded and electrically connected to the optical cable assembly 3, the optical cable assembly 3 includes a flange welding assembly 31, and the optical cable assembly 3 is used to protect and prevent the deviated electron beam from hitting the bellows assembly 4.

[0020] The optical cable assembly 3 also includes an alloy gasket 32 ​​and an insulating sheet 33; the upper end face of the flange welding assembly 31 is connected to the flange of the four-way assembly 8 through the alloy gasket 32 ​​and the insulating sheet 33 in turn, and the lower end face of the flange welding assembly 31 is connected to the flange of the bellows assembly 4 through the alloy gasket 32 ​​and the insulating sheet 33 in turn; the insulating sheet 33 is used for insulation.

[0021] The flange welding assembly 31 includes a flange body 311, a cover ring 314 and a water pipe joint 316; an annular water groove 313 is coaxially arranged on the flange body 311, a partition 315 is arranged in the annular water groove 313, and the cover ring 314 is closed on the annular water groove 313 and cooperates with the partition 315; the partition 315 acts as a partition to ensure the unidirectional flow of cooling water.

[0022] The water pipe joint 316 is located on the side of the flange body 311. There are two water pipe joints 316, which are respectively connected to the side walls of the annular water groove 313 on both sides of the partition 315; the two water pipe joints 316, one is used as a water inlet pipe, and the other is used as a water outlet pipe, which are used to pass cooling water into the annular water groove 313 of the flange body 311, so as to cool the flange body 311 by water to prevent the overall temperature of the optical cable assembly 3 from being too high.

[0023] A through hole 312 is coaxially arranged in the middle of the flange body 311 ; the center holes of the alloy gasket 32 ​​and the insulating sheet 33 are coaxially arranged, and the apertures of both holes are larger than the aperture of the through hole 312 in the middle of the flange body 311 .

[0024] The material of the flange welding assembly 31 is T2 copper, the material of the alloy gasket 32 ​​is Kovar alloy, and the material of the insulating sheet 33 is 95 porcelain; the measuring device 6 is specifically a current detector, which is used to accurately detect the current change on the flange welding assembly 31 of the optical cable assembly 3, so as to determine whether there is an electron beam deviation phenomenon.

[0025] The working principle of the present invention is as follows: the electron beam is generated by the electron beam extraction system 1, emitted downward through the support tube 7, and when it reaches the focusing system 2, the electron beam converges into a spot and continues downward along the four-way component 8; if the electron beam is offset, it will not pass through the through hole 312 on the flange trace component 31 of the optical cable component 3, and can only hit the flange body 311. Since the flange body 311 is made of T2 copper, a current signal is generated, and this current signal is detected by the measuring device 6. Then the measuring device 6 outputs a signal to the control system of the accelerator, and the control system controls the electron beam extraction system 1 to make adjustments, thereby correcting the emission direction of the electron beam and realizing feedback correction; the corrected electron beam can pass through the through hole 312 in the center of the flange welding component 31.

[0026] like Figure 1 As shown, the electron beam that can pass through the through hole 312 will not hit the bellows assembly 4, and therefore will not penetrate the bellows assembly 4, thereby achieving the protection purpose.

[0027] In the present invention, unless otherwise clearly specified and limited, the terms "connected", "connected", "fixed" and the like should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0028] The above embodiments are used to further illustrate the present invention, but the present invention is not limited to these specific embodiments. Any modification, equivalent substitution and improvement made within the spirit and principle of the present invention should be understood to be within the protection scope of the present invention.

Claims

1. An electron beam focus offset test device, comprising an electron beam extraction system (1), a focusing system (2), a bellows assembly (4) and a scanning system (5), wherein the electron beam extraction system (1) is connected to the focusing system (2) via a support tube (7), the focusing system (2) is connected to the bellows assembly (4) via a four-way assembly (8), and the scanning system (5) is located at the bottom end of the bellows assembly (4); characterized in that: The apparatus also comprises a measuring device (6); an optical cable assembly (3) is arranged between the flange of the four-way assembly (8) and the flange of the bellows assembly (4); the measuring device (6) is grounded and electrically connected to the optical cable assembly (3); the optical cable assembly (3) comprises a flange welding assembly (31); the optical cable assembly (3) further comprises an alloy gasket (32) and an insulating sheet (33); the upper end surface of the flange welding assembly (31) is connected to the flange of the four-way assembly (8) through the alloy gasket (32) and the insulating sheet (33) in sequence, and the lower end surface of the flange welding assembly (31) is connected to the flange of the bellows assembly (4) through the alloy gasket (32) and the insulating sheet (33) in sequence; the flange welding assembly (31) comprises a flange body (311), a cover ring (314) and a water pipe joint (316); an annular water groove (313) is coaxially arranged on the flange body (311); the ... A partition (315) is arranged in the groove (313); the cover ring (314) is sealed on the annular water groove (313) and cooperates with the partition (315); a through hole (312) is coaxially arranged in the middle of the flange body (311); the center holes of the alloy gasket (32) and the insulating sheet (33) are coaxially arranged, and the apertures are larger than the aperture of the through hole (312) in the middle of the flange body (311); the material of the flange welding assembly (31) is T2 copper; if the electron beam is offset, it will not pass through the through hole (312) on the flange welding assembly (31) of the optical cable assembly (3), but can only hit the flange body (311). Since the flange body (311) is made of T2 copper, a current signal is generated, and the current signal is detected by the measuring device (6). Then, the measuring device (6) outputs a signal to the control system of the accelerator, and the control system controls the electron beam extraction system (1) to make adjustments.

2. The electron beam focus offset test device according to claim 1, characterized in that: The water pipe joints (316) are located on the side of the flange body (311). There are two water pipe joints (316) and they are respectively connected to the side walls of the annular water groove (313) on both sides of the partition plate (315).

3. The electron beam focus offset test device according to claim 2, characterized in that: The alloy gasket (32) is made of Kovar alloy, and the insulating sheet (33) is made of 95 porcelain; the measuring device (6) is specifically a current detector.

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