Optical modulation device, operation method thereof, and apparatus including the optical modulation device

Abstract

Provided are an optical modulation device, an operation method of the optical modulation device, and an apparatus including the optical modulation device. The optical modulation device may include: a reflector region; a nano-antenna region; and an active region located between the reflector region and the nano-antenna region, wherein a plurality of first electrodes and a plurality of second electrodes for changing the physical properties of the active region may cross each other to form a cross-point array structure. The plurality of first electrodes may be included in the reflector region, or may be provided separately from the reflector region. The plurality of second electrodes may be included in the nano-antenna region, or may be provided separately from the nano-antenna region.

Description

[0001] CROSS-REFERENCE TO RELATED APPLICATIONS

[0002] This application claims the priority of Korean Patent Application No. 10-2018-0136042 filed in the Korean Intellectual Property Office on November 7, 2018, the disclosure of which is incorporated herein by reference in its entirety. Technical Field

[0003] The present disclosure relates to an optical modulation device and an operation method thereof, and an apparatus including the optical modulation device. Background Art

[0004] Optical devices for changing the transmission / reflection characteristics, phase, amplitude, polarization state, intensity, path, etc. of light are used in various optical devices. Optical modulators with various structures have been proposed to control these characteristics of light in a desired manner in optical systems.

[0005] For example, in order to steer the laser to the desired position, the laser emitting part can be mechanically rotated, or an optical phased array (OPA) method can be used to utilize the interference of the laser beam. However, when the laser is mechanically steered, a motor or a microelectromechanical system (MEMS) structure must be used. In this case, the volume of the device increases and the cost increases. Moreover, the motor may generate noise and the MEMS structure may vibrate, so the utilization of the motor and MEMS structure is limited. When the OPA method is used, a driving device is required for each pixel or waveguide for electrical or thermal driving purposes, so the circuit and equipment are complicated, the size increases, and the process cost increases.

[0006] Recently, attempts have been made to apply nanostructures that utilize surface plasmon resonance excited by incident light incident on an optical device. Summary of the invention

[0007] Example embodiments address at least the above problems and / or disadvantages and other disadvantages not described above. Also, example embodiments are not required to overcome the above disadvantages, and may not address any of the above problems.

[0008] One or more example embodiments provide an optical modulation device for non-mechanically modulating light, which may simplify the configuration of a driving circuit unit, may reduce a pixel size, and may increase a field of view (FOV).

[0009] Furthermore, one or more example embodiments provide a method of operating an optical modulation device.

[0010] Furthermore, one or more example embodiments provide an optical apparatus including an optical modulation device.

[0011] Additional aspects will be set forth in part in the description which follows and, in part, will be apparent from the description, or may be learned by practice of the presented embodiments.

[0012] According to one aspect of an example embodiment, an optical modulation device is provided, comprising: a reflector region; a nano-antenna region facing the reflector region; an active region located between the reflector region and the nano-antenna region and having physical properties that change according to electrical conditions; and a plurality of first electrodes and a plurality of second electrodes configured to change the physical properties of the active region located between the plurality of first electrodes and the plurality of second electrodes, the plurality of first electrodes being arranged to cross the plurality of second electrodes to form a cross-point array structure, wherein the plurality of first electrodes may be included in the reflector region or be arranged separately from the reflector region, and the plurality of second electrodes may be included in the nano-antenna region or be arranged separately from the nano-antenna region.

[0013] The reflector region may include a plurality of reflector members having a linear shape as the plurality of first electrodes.

[0014] The nano-antenna region may include a plurality of nano-antennas having a linear shape as the plurality of second electrodes.

[0015] The reflector region may include a plurality of reflector components extending in a first direction as the plurality of first electrodes, the nanoantenna region may include a plurality of nanoantennas extending in a second direction intersecting the first direction as the plurality of second electrodes, and a plurality of intersections between the plurality of reflector components and the plurality of nanoantennas may correspond to a plurality of pixel regions.

[0016] The plurality of first electrodes may be disposed separately from the reflective mirror region, and the plurality of first electrodes may be located between the reflective mirror region and the active region.

[0017] The plurality of second electrodes may be disposed separately from the nano-antenna region, and the plurality of second electrodes may be located between the nano-antenna region and the active region.

[0018] The optical modulation device may also include: a first insulating layer located between the reflector region and the active region or between the multiple first electrodes and the active region; and a second insulating layer located between the nanoantenna region and the active region or between the multiple second electrodes and the active region.

[0019] The optical modulation device may further include: a plurality of first driving units respectively connected to the plurality of first electrodes and configured to apply voltages to the plurality of first electrodes; and a plurality of second driving units respectively connected to the plurality of second electrodes and configured to apply voltages to the plurality of second electrodes.

[0020] The active region may further include a plurality of active layer members having a linear shape extending in the same direction as a direction in which the plurality of first electrodes or the plurality of second electrodes extend.

[0021] The active region may further include an electro-optic material having a dielectric constant that varies according to an electrical signal applied to the active region.

[0022] The active region may also include at least one of a transparent conductive oxide (TCO) and a transition metal nitride (TMN).

[0023] The optical modulation device may be configured to cause phase modulation of light reflected by the nanoantenna region.

[0024] According to an aspect of another example embodiment, there is provided an optical apparatus including the optical modulation device and configured to steer a light beam by using the optical modulation device.

[0025] The optical device may further include at least one of a light detection and ranging (LiDAR) device, a three-dimensional (3D) image acquisition device, a 3D sensor, and a depth sensor.

[0026] According to an aspect of another example embodiment, an optical modulation device is provided, comprising: a reflector region; a nanoantenna region facing the reflector region; an active region located between the reflector region and the nanoantenna region and having physical properties that vary according to electrical conditions; and a plurality of electrodes configured to change the physical properties of the active region, wherein the active region may include a plurality of active layer components arranged to intersect the plurality of electrodes.

[0027] The plurality of active layer members may have a linear shape extending in a first direction, and the plurality of electrodes may have a linear shape extending in a second direction intersecting the first direction.

[0028] The plurality of electrodes may further include a plurality of first electrodes and a plurality of second electrodes crossing each other.

[0029] The optical modulation device may further include: a first insulating layer located between the reflector region and the active region; and a second insulating layer located between the nano-antenna region and the active region.

[0030] The multiple electrodes may also include multiple first electrodes and multiple second electrodes that cross each other, and the optical modulation device may also include: a first insulating layer located between the multiple first electrodes and the active area; and a second insulating layer located between the multiple second electrodes and the active area.

[0031] According to an aspect of another example embodiment, a method for operating an optical modulation device is provided, the optical modulation device comprising: a reflector region; a nanoantenna region; an active region located between the reflector region and the nanoantenna region; a plurality of first electrodes and a plurality of second electrodes, configured to change the physical properties of the active region located between the plurality of first electrodes and the plurality of second electrodes, wherein the plurality of first electrodes are arranged to cross the plurality of second electrodes to form a cross-point array structure, and a plurality of pixel regions of the active region correspond to intersections between the plurality of first electrodes and the plurality of second electrodes, the method comprising: recording phase information on at least one pixel region selected from the plurality of pixel regions by using the plurality of first electrodes and the plurality of second electrodes; and modulating light incident on the optical modulation device and reflected by the nanoantenna region.

[0032] Recording phase information may include: recording first phase information on a first pixel area at an intersection between the first sub-electrode among the multiple first electrodes and the first sub-electrode among the multiple second electrodes by applying a first voltage to a first sub-electrode among the multiple first electrodes and applying a second voltage to a first sub-electrode among the multiple second electrodes, wherein the first voltage and the second voltage may have the same polarity.

[0033] Recording the first phase information may further include applying a third voltage to a second sub-electrode among the plurality of first electrodes, wherein a polarity of the third voltage may be opposite to a polarity of the second voltage.

[0034] Recording the first phase information may further include applying a fourth voltage to a second sub-electrode among the plurality of second electrodes, wherein a polarity of the fourth voltage may be opposite to a polarity of the first voltage.

[0035] The method may further include maintaining a state of at least one pixel region that is not selected from among the plurality of pixel regions while recording phase information on the at least one pixel region selected from among the plurality of pixel regions.

[0036] The active region may include a plurality of active layer members, wherein recording the phase information may further include applying a reference voltage to at least one active layer member selected from the plurality of active layer members while at least one active layer member not selected from the plurality of active layer members is electrically floating.

[0037] The method may further include removing phase information recorded on the at least one pixel region selected from the plurality of pixel regions by using the plurality of first electrodes and the plurality of second electrodes. BRIEF DESCRIPTION OF THE DRAWINGS

[0038] These and / or other aspects will become clear and more easily understood from the following description of the embodiments in conjunction with the accompanying drawings, in which:

[0039] Figure 1A is a cross-sectional view of an optical modulation device according to an example embodiment;

[0040] Figure 1B It shows Figure 1A A plan view of the planar structure of the main components of the optical modulation device;

[0041] Figure 2A is a cross-sectional view of an optical modulation device according to another example embodiment;

[0042] Figure 2B It shows Figure 2A A plan view of the planar structure of the main components of the optical modulation device;

[0043] Figure 3 is a cross-sectional view of an optical modulation device according to a comparative example;

[0044] Figure 4 is a cross-sectional view of an optical modulation device according to another comparative example;

[0045] Figure 5 is a graph showing a relationship between a voltage applied to an electrode of an optical modulation device and a change in charge concentration of an active layer region according to example embodiments;

[0046] Figure 6 is a graph showing a relationship between a bias voltage applied to a first electrode and a second electrode of an optical modulation device and a charge concentration of an active layer region according to example embodiments;

[0047] Figure 7 It is shown that in the removal Figure 6 A graph of the charge concentration in the active layer region after the bias voltage is applied in FIG.

[0048] Figure 8is a diagram showing a change in state over time after a write operation is performed on a pixel region of an optical modulation device according to example embodiments;

[0049] Fig. 9 is a plan view showing a plan structure of main elements of an optical modulation device according to another example embodiment;

[0050] Fig.10 is a cross-sectional view of an optical modulation device according to another example embodiment;

[0051] Figures 11 to 13 is a plan view for describing a method of operating an optical modulation device according to an example embodiment;

[0052] Fig.14 is a plan view showing a configuration of an optical modulation device according to another example embodiment;

[0053] Fig.15 is a perspective view showing various structures / shapes of a unit area of ​​a nano-antenna applicable to an optical modulation device according to example embodiments;

[0054] Fig.16 is a conceptual diagram for describing a light beam steering device including an optical modulation device according to example embodiments;

[0055] Fig.17 is a conceptual diagram for describing a light beam steering device including an optical modulation device according to another example embodiment;

[0056] Fig.18 is a block diagram for describing an entire system of an optical apparatus including a beam steering device using an optical modulation device according to an example embodiment; and

[0057] Fig.19 and Fig. 20 is a conceptual diagram illustrating a case in which a light detection and ranging (LiDAR) apparatus including an optical modulation device is applied to a vehicle according to an example embodiment. DETAILED DESCRIPTION

[0058] Various example embodiments will now be described more fully with reference to the accompanying drawings, in which example embodiments are shown.

[0059] It should be understood that when an element is referred to as being "connected" or "coupled" to another element, the element may be directly connected or coupled to the other element, or there may be intervening elements. In contrast, when an element is referred to as being "directly connected" or "directly coupled" to another element, there are no intervening elements. As used herein, the term "and / or" includes any and all combinations of one or more of the items listed in the association.

[0060] It will be understood that although the terms "first", "second", etc. may be used herein to describe various elements, components, regions, layers and / or parts, these elements, components, regions, layers and / or parts should not be limited by these terms. These terms are only used to distinguish one element, component, region, layer or part from another element, component, region, layer or part. Therefore, without departing from the teachings of the exemplary embodiments, the first element, component, region, layer or part mentioned below may also be referred to as the second element, component, region, layer or part.

[0061] For ease of description, spatially relative terms such as "below," "beneath," "below," "above," "upper," etc. may be used herein to describe the relationship of one element or feature relative to another element or feature as illustrated in the drawings. It will be understood that the spatially relative terms are intended to encompass different orientations of the device in use or operation in addition to the orientation illustrated in the drawings. For example, if the device in the drawings is turned over, elements described as "below" or "beneath" other elements or features would then be oriented "above" the other elements or features. Thus, the exemplary term "below" can encompass both orientations of above and below. The device may be otherwise oriented (rotated 90 degrees or at other orientations) and the spatially relative descriptors used herein interpreted accordingly.

[0062] The terms used herein are only for the purpose of describing specific embodiments and are not intended to limit the exemplary embodiments. As used herein, the singular forms "a", "an", and "the" are intended to also include the plural forms, unless the context clearly indicates otherwise. It will also be understood that the terms "include" and / or "comprise" when used in this specification indicate the presence of the described features, wholes, steps, operations, elements, and / or components, but do not exclude the presence or addition of one or more other features, wholes, steps, operations, elements, components, and / or combinations thereof.

[0063] Example embodiments are described herein with reference to cross-sectional views, which are schematic diagrams of idealized embodiments (and intermediate structures) of example embodiments. Therefore, variations in the illustrated shapes, for example due to manufacturing techniques and / or tolerances, are expected. Thus, example embodiments should not be interpreted as being limited to the specific region shapes shown here, but should include shape deviations, for example due to manufacturing. For example, an implanted region shown as a rectangle will typically have rounded or curved features and / or a gradient of implant concentration at its edges, rather than a binary change from an implanted region to an unimplanted region. Similarly, a buried region formed by implantation may result in some implantation in the region between the buried region and the surface through which the implantation is performed. Therefore, the regions illustrated in the drawings are schematic in nature, and their shapes are not intended to illustrate the actual shape of the region of the device, nor are they intended to limit the scope of the example embodiments.

[0064] Unless otherwise defined, all terms (including technical and scientific terms) used herein have the same meaning as commonly understood by one of ordinary skill in the art to which the example embodiments belong. It should also be understood that terms such as those defined in commonly used dictionaries should be interpreted as having a meaning consistent with that in the context of the relevant technology and should not be interpreted as an ideal or overly formal meaning unless explicitly defined as such herein.

[0065] As used herein, the term "and / or" includes any and all combinations of one or more of the associated listed items. Expressions such as "at least one of..." when following a list of elements modify the entire list of elements, rather than modifying the individual elements in the list. For example, the expression "at least one of a, b, and c" should be understood to include only a, only b, only c, both a and b, both a and c, both b and c, all of a, b, and c, or any variation of the above examples.

[0066] Hereinafter, an optical modulation device, a method for operating an optical modulation device, and an apparatus including an optical modulation device according to an embodiment will be described with reference to the accompanying drawings. For clarity and convenience of explanation, the width and thickness of the layers or regions shown in the accompanying drawings may be exaggerated. In the detailed description, the same reference numerals represent the same elements.

[0067] Figure 1A is a cross-sectional view of an optical modulation device according to example embodiments. Figure 1B It shows Figure 1A A plan view of the planar structure of the main elements of the optical modulation device.

[0068] refer to Figure 1A and Figure 1B , the optical modulation device may include a reflector region 100 and a nano-antenna region 300 facing the reflector region 100. The reflector region 100 may include a plurality of reflector members M10 having a linear shape and extending in a first direction (e.g., an X-axis direction). The nano-antenna region 300 may include a plurality of nano-antennas N10 having a linear shape and extending in a second direction (e.g., a Y-axis direction) intersecting the first direction. An active region (hereinafter referred to as an "active layer") 200 may be provided between the reflector region 100 and the nano-antenna region 300, and its physical properties vary according to electrical conditions. Moreover, a first insulating layer 150 may be provided between the reflector region 100 and the active layer 200, and a second insulating layer 250 may be provided between the active layer 200 and the nano-antenna region 300.

[0069] "Multiple first electrodes" and "multiple second electrodes" for changing the physical properties of the active layer 200 may be provided. In the present embodiment, the multiple mirror members M10 may be used as multiple first electrodes, and the multiple nano-antennas N10 may be used as multiple second electrodes. The multiple first electrodes (i.e., multiple mirror members M10) and the multiple second electrodes (i.e., multiple nano-antennas N10) may cross each other with the active layer 200 therebetween to form a cross-point array structure. The multiple intersections between the multiple mirror members M10 and the multiple nano-antennas N10 may correspond to multiple pixel areas. The multiple pixel areas may be arranged two-dimensionally.

[0070] The plurality of reflector members M10 may be back reflector electrodes located below the active layer 200. That is, the reflector member M10 may reflect light and may be used as an electrode. The reflector member M10 may be optically coupled to the nano-antenna N10, and may reflect light by optical interaction between the nano-antenna N10 and the reflector member M10. Each reflector member M10 may be formed by a predetermined conductor such as a metal. For example, the reflector member M10 may include at least one metal selected from the group consisting of copper (Cu), aluminum (Al), nickel (Ni), iron (Fe), cobalt (Co), zinc (Zn), titanium (Ti), ruthenium (Ru), rhodium (Rh), palladium (Pd), platinum (Pt), silver (Ag), osmium (Os), iridium (Ir), gold (Au) and molybdenum (Mo), or may include an alloy containing at least one of the above metals. Alternatively, the reflector member M10 may include a thin film in which metal nanoparticles Au or Ag are dispersed, a carbon nanostructure such as graphene or carbon nanotubes (CNTs), a conductive polymer such as poly(3,4-ethylenedioxythiophene) (PEDOT), polypyrrole (PPy) or poly(3-hexylthiophene) (P3HT), or a conductive oxide.

[0071] The nanoantenna N10 may be an antenna having a nanostructure and configured to capture energy by converting light of a specific wavelength (or frequency) having a predetermined wavelength (or frequency) into localized surface plasmon resonance light. The light incident on the nanoantenna N10 may include both visible electromagnetic waves and invisible electromagnetic waves. The nanoantenna N10 may have a conductive layer pattern (e.g., a metal layer pattern), and the conductive layer pattern may contact a non-conductive layer (e.g., a dielectric layer). Plasmon resonance may occur at an interface between a conductive layer pattern and a non-conductive layer (e.g., a dielectric layer). In this case, the non-conductive layer (e.g., a dielectric layer) may be the second insulating layer 250, or a layer different from the second insulating layer 250. For convenience, the following content will be described assuming that the conductive layer pattern is the nanoantenna N10. The interface where surface plasmon resonance occurs, such as the interface between the conductive layer pattern and the non-conductive layer (e.g., a dielectric layer), may be referred to as a "meta-surface" or "meta-structure".

[0072] The nano-antenna N10 may be formed of a conductive material and may have a sub-wavelength size. The term "sub-wavelength size" refers to a size that is smaller than the operating wavelength or resonant wavelength of the nano-antenna N10. At least one shape dimension of the thickness and width of the nano-antenna N10 and the interval between adjacent nano-antennas N10 may be a sub-wavelength size. The resonant wavelength may vary depending on the shape or size of the nano-antenna N10.

[0073] The conductive material used to form the nano-antenna N10 may be a metal material having high conductivity and capable of causing surface plasmon excitation. For example, the nano-antenna N10 may be formed of at least one metal selected from the group consisting of Cu, Al, Ni, Fe, Co, Zn, Ti, Ru, Rh, Pd, Pt, Ag, Os, Ir, Au, and Mo, or an alloy containing at least one of the above metals. Alternatively, the nano-antenna N10 may include a thin film in which metal nanoparticles such as Au or Ag are dispersed, a carbon nanostructure such as graphene or CNT, a conductive polymer such as PEDOT, PPy, or P3HT, or a conductive oxide.

[0074] The active layer 200 may be a layer whose physical properties vary according to electrical conditions. The dielectric constant or refractive index of the active layer 200 may vary according to electrical conditions of the active layer 200 and the area around the active layer 200. The change in the dielectric constant or refractive index of the active layer 200 may be attributed to the change in charge concentration (charge density) of one or more regions in the active layer 200. In other words, the dielectric constant or refractive index of the active layer 200 may vary according to the change in charge concentration of one or more regions in the active layer 200. The active layer 200 may be referred to as a refractive index change layer. The dielectric constant or refractive index of the active layer 200 may vary according to an electric field or voltage applied to the active layer 200. The active layer 200 may include a transparent conductive oxide (TCO) such as indium tin oxide (ITO), indium zinc oxide (IZO), aluminum zinc oxide (AZO), gallium zinc oxide (GZO), aluminum gallium zinc oxide (AGZO), or gallium indium zinc oxide (GIZO). Alternatively, the active layer 200 may include a transition metal nitride (TMN), such as TiN, ZrN, HfN, or TaN. In addition, the active layer 200 may include an electro-optical (EO) material whose effective dielectric constant changes when an electrical signal is applied to the active layer 200. The EO material may include, for example, LiNbO 3 、LiTaO 3 , potassium tantalate niobate (KTN) or lead zirconate titanate (PZT) or various polymers having EO properties. The active layer 200 may be a conductor or a semiconductor.

[0075] Each of the first insulating layer 150 and the second insulating layer 250 may include an insulating material (e.g., a dielectric material). Each of the first insulating layer 150 and the second insulating layer 250 may have a resistance of about 1 MΩ or more. At least one of the first insulating layer 150 and the second insulating layer 250 may include at least one of an insulating silicon compound and an insulating metal compound. Examples of the insulating silicon compound may include silicon oxide (SiOx), silicon nitride (SixNy), and silicon oxynitride (SiON), and examples of the insulating metal compound may include aluminum oxide (AlOx). 2 O 3 ), hafnium oxide (HfO), zirconium oxide (ZrO) and hafnium silicon oxide (HfSiO). The specific materials of the first insulating layer 150 and the second insulating layer 250 are only examples, and the present embodiment is not limited thereto. The first insulating layer 150 and the second insulating layer 250 may be formed of the same material or different materials.

[0076] The active layer 200 may be electrically isolated or insulated from the plurality of reflector members M10 by the first insulating layer 150, and the active layer 200 may be electrically isolated or insulated from the plurality of nano-antennas N10 by the second insulating layer 250. The physical properties (e.g., refractive index) of the active layer 200 may vary according to the voltage applied between the plurality of reflector members M10 and the active layer 200 and / or the voltage applied between the plurality of nano-antennas N10 and the active layer 200. When the predetermined incident light L I When reflected by the nano-antenna N10, the reflected light L R The characteristics (e.g., direction) of the active layer 200 may vary according to the physical properties of the active layer 200. When the physical properties of the active layer 200 are changed by using the voltage applied to the plurality of reflector members M10 and the voltage applied to the plurality of nano-antennas N10, the optical modulation characteristics may be improved and the noise may be reduced, etc. The reflector member M10, the first insulating layer 150, and the active layer 200 may constitute a metal oxide semiconductor (MOS) structure, etc. Moreover, the nano-antenna N10, the second insulating layer 250, and the active layer 200 may constitute a MOS structure, etc.

[0077] By using a plurality of reflector members M10 as a first electrode and a plurality of nano-antennas N10 as a second electrode intersecting the first electrode, a plurality of regions of the active layer 200 corresponding to a plurality of pixel regions defined at the intersection between the plurality of reflector members M10 and the plurality of nano-antennas N10 can be independently controlled. The phase modulation of light generated by the plurality of pixel regions can be controlled. By appropriately controlling the phase modulation of light generated by the plurality of pixel regions, the direction of a light beam emitted from each pixel region in the plurality of pixel regions can be controlled. For example, when the phase modulation of light generated by a plurality of pixel regions arranged along a first direction is controlled to sequentially decrease by π / 2 in the first direction, the direction of light reflected by the plurality of pixel regions can be controlled (steered) to a specific direction, which can be referred to as beam steering of an optical phased array method. The steering direction of light can be adjusted in various ways by adjusting the phase shift rule of the phased array.

[0078] In addition, if Figure 1B As shown, a plurality of first drive units C10 respectively connected to a plurality of first electrodes (i.e., a plurality of reflector members M10) and configured to apply voltage may also be provided. Moreover, a plurality of second drive units C20 respectively connected to a plurality of second electrodes (i.e., a plurality of nano-antennas N10) and configured to apply voltage may also be provided. The plurality of reflector members M10 and the plurality of nano-antennas N10 may be driven by using the plurality of first drive units C10 and the plurality of second drive units C20.

[0079] For example, a pixel region located at an intersection between a reflector member in a first row among the plurality of reflector members M10 and a nano-antenna in a first column among the plurality of nano-antennas N10 is controlled by a first drive unit C10 connected to the reflector member in the first row and a second drive unit C20 connected to the nano-antenna in the first column. Figure 1B As shown, when there are twenty-five (25) pixel regions at the intersections between five (5) reflector components M10 and five (5) nanoantennas N10, these twenty-five (25) pixel regions can be individually controlled by using a smaller number of drive units C10 and C20 (e.g., five (5) first drive units C10 and five (5) second drive units C20) than the number of pixel regions (e.g., twenty-five (25) pixel regions).

[0080] Although not in Figure 1B , but the active layer 200 may be a plate-type active layer covering a plurality of pixel regions. Alternatively, the active layer 200 may have a structure patterned into a predetermined shape.

[0081] Figure 2A is a cross-sectional view of an optical modulation device according to another example embodiment. Figure 2B It shows Figure 2A A plan view of the planar structure of the main elements of the optical modulation device.

[0082] Reference Figure 2A and Figure 2B , the optical modulation device may include a reflector region 110 and a nano-antenna region 310 facing the reflector region 110, the reflector region 110 including a plurality of reflector components M11, and the nano-antenna region 310 including a plurality of nano-antennas N11. An active region (hereinafter referred to as an "active layer") 210 may be provided between the reflector region 110 and the nano-antenna region 310. The active layer 210 may have a structure patterned into a predetermined shape. For example, the active layer 210 may include a plurality of active layer components A11 having a linear shape. The plurality of active layer components A11 may be spaced apart from each other and may extend parallel to each other in a predetermined direction. The active layer 210 may be patterned into a linear pattern shape including a plurality of active layer components A11. The plurality of active layer components A11 may extend in the same direction as the direction in which the plurality of reflector components M11 (i.e., the plurality of first electrodes) or the plurality of nano-antennas N11 (i.e., the plurality of second electrodes) extend. In Figure 2A and Figure 2B , the plurality of active layer members A11 extend in the same direction as the direction in which the plurality of nano-antennas N11 (ie, the plurality of second electrodes) extend.

[0083] exist Figure 2A, reference numeral 160 denotes a first insulating layer, and reference numeral 260 denotes a second insulating layer. Figure 1B The plurality of first drive units C10 and the plurality of second drive units C20 shown in the figure may be connected to Figure 2A The optical modulation device may further include a plurality of third driving units respectively connected to the plurality of active layer members A11.

[0084] Figure 3 is a cross-sectional view of an optical modulation device according to a comparative example.

[0085] Reference Figure 3 According to the comparative example, the optical modulation device includes: a mirror array 10, which includes a plurality of mirror elements M1; and a nano-antenna array 30 facing the mirror array 10, which includes a plurality of nano-antennas N1. The plurality of mirror elements M1 are arranged to correspond to a plurality of pixel regions in a one-to-one correspondence, and the plurality of nano-antennas N1 are arranged to correspond to a plurality of pixel regions in a one-to-one correspondence. A driving device unit 5 is provided, which includes a plurality of pixel drivers D1 respectively connected to the plurality of mirror elements M1. The plurality of pixel drivers D1 are arranged to correspond to a plurality of pixel regions in a one-to-one correspondence. Each of the plurality of pixel drivers D1 may include a transistor and a capacitor. Although not described in detail in the drawings, the optical modulation device according to the comparative example includes: a mirror array 10, which includes a plurality of mirror elements M1; and a nano-antenna array 30 facing the mirror array 10. Figure 3 , but a plurality of pixel drivers D1 may also be connected to a plurality of nano-antennas N1. Reference numeral 15 denotes a first insulating layer, reference numeral 20 denotes an active layer, and reference numeral 25 denotes a second insulating layer.

[0086] By using multiple pixel drivers D1 to independently apply different voltages to multiple reflector elements M1 and independently apply different voltages to multiple nanoantennas N1, multiple regions of the active layer 20 corresponding to multiple pixel regions can be controlled differently, and as a result, a beam steering characteristic caused by a phase distribution can be achieved. However, in this comparative example, since different voltages must be applied to the pixels, the drive circuit and device structure are complex. Moreover, in order to steer the beam two-dimensionally, a driver (i.e., D1) is required for each pixel, resulting in an increase in pixel size and a decrease in field of view (FOV).

[0087] Figure 4 is a cross-sectional view of an optical modulation device according to another comparative example.

[0088] Reference Figure 4In this comparative example, a first driving device unit 5' including a plurality of first drivers D1' respectively connected to a plurality of mirror elements M1 is provided, and a second driving device unit 35 including a plurality of second drivers D2 respectively connected to a plurality of nano-antennas N1 is provided. Different voltages can be applied to the plurality of mirror elements M1 using the plurality of first drivers D1', and different voltages can be applied to the plurality of nano-antennas N1 using the plurality of second drivers D2. In this comparative example, since each pixel requires a driver (i.e., D1' or D2), the driving circuit and device structure are complicated, the pixel size increases, and the FOV decreases.

[0089] according to Figure 3 and Figure 4 In the comparative example, a plurality of drivers corresponding to a plurality of pixel regions must be arranged two-dimensionally. However, according to the embodiment of the present disclosure, not every pixel requires a driver, and only a first driving unit C10 and a second driving unit C20 (see FIG. 1 ) connected to a plurality of reflector members (first electrodes) M10 and a plurality of nano-antennas (second electrodes) N10, respectively, need to be provided. Figure 1B ). The first driving unit C10 and the second driving unit C20 are located at the ends of the electrode lines (i.e., the reflector member M10 and the nano-antenna N10). Therefore, according to an embodiment, the configuration of the optical modulation device can be simplified, the pixel size can be greatly reduced, and the FOV corresponding to the steering angle can be increased. Moreover, since the filling factor is increased due to the simple structure, the conversion efficiency can be improved and the beam loss can be reduced. The term "filling factor" used herein may refer to the ratio of an effective pixel area to a predetermined unit area. Due to the simple structure, the filling factor can be increased and the conversion efficiency can be improved. Moreover, due to the simple crosspoint structure, a 2D device can be easily implemented.

[0090] Figure 5 is a graph illustrating a relationship between a voltage applied to an electrode of an optical modulation device and a change in charge concentration of an active layer region according to example embodiments. Figure 5 shows that when voltage is applied to Figure 1A and Figure 1B When one of the multiple mirror members (first electrodes) M10 and one of the multiple nanoantennas (second electrodes) N10 in the structure, the charge concentration change amount of the region of the active layer 200 corresponding to the intersection between the mirror member M10 and the nanoantenna N10.

[0091] Reference Figure 5, when a positive voltage (e.g., +4V) is applied to each of the reflector member (first electrode) and the nanoantenna (second electrode), the charge concentration of the active layer region corresponding to the intersection between the reflector member and the nanoantenna increases. When a negative voltage (e.g., -4V) is applied to each of the reflector member (first electrode) and the nanoantenna (second electrode), the charge concentration of the active layer region corresponding to the intersection between the reflector member and the nanoantenna decreases. When a voltage with the same polarity is simultaneously applied to the reflector member (first electrode) and the nanoantenna (second electrode), the charge concentration of the active layer region (pixel region) increases or decreases according to the polarity of the voltage.

[0092] When voltages with opposite polarities are applied simultaneously to the mirror member (first electrode) and the nanoantenna (second electrode), the charge concentration change in the active layer area (pixel area) corresponding to the intersection between the mirror member and the nanoantenna is greatly reduced or the charge concentration remains basically unchanged.

[0093] The phase change characteristics of the incident light (e.g., a laser beam) applied from the outside can vary according to the charge concentration (carrier concentration) of the active layer region (pixel region). Therefore, by controlling the charge concentration of the active layer region, the phase change of the light in the pixel region corresponding to the active layer region can be controlled. In this regard, the charge concentration or charge distribution of the active layer region can be referred to as "phase information". When the charge concentration of the active layer region (pixel region) is changed by applying a voltage to the upper and lower electrodes (i.e., the reflector member and the nanoantenna) of the active layer region (pixel region), even if the applied voltage is removed, the changed charge concentration can also be maintained due to the upper and lower insulating layers. In other words, even if the voltage (bias voltage) applied to record the phase information is removed, the phase information recorded on the active layer region (pixel region) can be maintained, which can be referred to as a storage characteristic or an optical storage characteristic.

[0094] Figure 6 is a graph illustrating a relationship between a bias voltage applied to first and second electrodes of an optical modulation device and a charge concentration of an active layer region according to example embodiments.

[0095] Figure 7 It is shown that in the removal Figure 6 Plot of the charge concentration in the active layer region after applying a bias voltage.

[0096] refer to Figure 6 and Figure 7, the charge concentration (i.e., phase information) of the active layer region can be changed in various ways according to the bias voltage applied to the first electrode and the second electrode, and the changed charge concentration (i.e., phase information) can be maintained even if the applied bias voltage is removed. Therefore, it is not necessary to continuously apply a voltage to maintain the phase information (phase distribution), and it is not necessary to provide a circuit such as a transistor or a capacitor for each pixel.

[0097] Figure 8 is a diagram illustrating a change in state over time after a write operation is performed on a pixel region of an optical modulation device according to example embodiments.

[0098] refer to Figure 8 When data is written to a pixel area in an initial state under a predetermined voltage condition, the written data can be maintained even after a period of time. The resonant wavelength (optical characteristic) in the initial state can be changed according to the applied voltage condition, and the changed resonant wavelength (optical characteristic) can be maintained even if the applied voltage is removed.

[0099] Despite Figure 2A and Figure 2B In the embodiment, the plurality of active layer members A11 intersect with the plurality of reflector members M11 (i.e., the plurality of first electrodes), but according to another exemplary embodiment, the plurality of active layer members A11 may intersect with the plurality of nano-antennas N11 (i.e., the plurality of second electrodes) instead of intersecting with the plurality of reflector members M11 (i.e., the plurality of first electrodes), as shown in Fig. 9 shown.

[0100] Fig. 9 is a plan view showing a plan structure of main elements of an optical modulation device according to another example embodiment.

[0101] Reference Fig. 9 , the optical modulation device may include a reflector region 120 and a nano-antenna region 320 facing the reflector region 120, the reflector region 120 including a plurality of reflector components M12, and the nano-antenna region 320 including a plurality of nano-antennas N12. An active region (hereinafter referred to as an "active layer") 220 may be provided between the reflector region 120 and the nano-antenna region 320. The active layer 220 may include a plurality of active layer components A12 having a linear shape. The plurality of active layer components A12 may be arranged to intersect with the plurality of nano-antennas N12 (i.e., a plurality of second electrodes). The plurality of active layer components A12 may extend in the same direction as the direction in which the plurality of reflector components M12 (i.e., a plurality of first electrodes) extend. However, Fig. 9The extending directions of the reflector member M12, the nano-antenna N12, and the active layer member A12 shown in FIG. 1 are merely examples and may be changed. If necessary, the active layer member A12 may intersect both the reflector member M12 and the nano-antenna N12.

[0102] Despite Figures 1A to 2B In the embodiment, a plurality of reflector members M10 and M11 are used as a plurality of first electrodes and a plurality of nano-antennas N10 and N11 are used as a plurality of second electrodes, but according to another embodiment, a plurality of first electrode lines separately provided from the plurality of reflector members M10 and M11 may be used, and / or a plurality of second electrode lines separately provided from the plurality of nano-antennas N10 and N11 may be used, such as Fig.10 shown.

[0103] Fig.10 is a cross-sectional view of an optical modulation device according to another example embodiment.

[0104] Reference Fig.10 , the optical modulation device may include a reflector region 105 and a nano-antenna region 305 facing the reflector region 105, the reflector region 105 including a plurality of reflector members M15, and the nano-antenna region 305 including a plurality of nano-antennas N15. Fig.10 , one reflector member M15 is shown, but a plurality of reflector members M15 may be spaced apart from each other in the Y-axis direction. An active region (hereinafter referred to as an “active layer”) 205 may be provided between the reflector region 105 and the nano-antenna region 305. A first insulating layer 155 may be provided between the reflector region 105 and the active layer 205, and a second insulating layer 255 may be provided between the active layer 205 and the nano-antenna region 305.

[0105] In this embodiment, the first electrode array 125 including a plurality of first electrodes E15 may be disposed between the reflective mirror region 105 and the first insulating layer 155. Fig.10 One first electrode E15 is shown in FIG. 2 , but a plurality of first electrodes E15 may be spaced apart from each other in the Y-axis direction. Also, a second electrode array 275 including a plurality of second electrodes E25 may be disposed between the second insulating layer 255 and the nano-antenna region 305 .

[0106] The plurality of mirror members M15 and the plurality of first electrodes E15 may have Figure 1B The planar structure of the plurality of reflector members M10 is the same as or similar to that of the plurality of first electrodes E15. The plurality of first electrodes E15 may be stacked on the plurality of reflector members M15 to form a pattern shape. The plurality of nano-antennas N15 and the plurality of second electrodes E25 may have the same or similar planar structure as that of the plurality of reflector members M10. Figure 1BThe planar structure of the plurality of nano-antennas N10 is the same or similar to the planar structure. The plurality of nano-antennas N15 may be stacked on the plurality of second electrodes E25 to form a pattern shape. The plurality of first electrodes E15 and the plurality of second electrodes E25 may be transparent electrodes, and in this case, the light loss of the optical modulation device may be reduced. However, if necessary, the plurality of first electrodes E15 and the plurality of second electrodes E25 may not be transparent electrodes.

[0107] Alternatively, one of the plurality of first electrodes E15 and the plurality of second electrodes E25 may not be used. For example, the plurality of first electrodes E15 may not be used, and the plurality of reflector members M10 may be used as the first electrodes. The plurality of second electrodes E25 may not be used, and the plurality of nano-antennas N15 may be used as the second electrodes. Fig.10 The active layer 205 may be patterned to include Fig.10 A plurality of active layer members having a linear shape, which is similar to Figure 2B The active layer 210 is formed by a plurality of electrodes.

[0108] The method for operating an optical modulation device according to an embodiment may include: recording phase information on at least one pixel region selected from a plurality of pixel regions by using a plurality of first electrodes and a plurality of second electrodes; and modulating light incident on the optical modulation device. In addition, the method for operating an optical modulation device may further include removing the phase information recorded on at least one pixel region selected from a plurality of pixel regions by using a plurality of first electrodes and a plurality of second electrodes.

[0109] Now refer to Figures 11 to 13 The operation of the optical modulation device according to example embodiments will be described. Fig.11 and Fig.12 shows a method of recording phase information, Fig.13 A method of removing phase information is shown.

[0110] Fig.11 is a plan view for describing a method of operating an optical modulation device according to example embodiments.

[0111] Reference Fig.11 , a plurality of first electrodes WL1 to WLn may be provided, a plurality of second electrodes BL1 to BLn crossing the plurality of first electrodes WL1 to WLn may be provided, and a plurality of active layer members AL1 to ALn may be provided between the plurality of first electrodes WL1 to WLn and the plurality of second electrodes BL1 to BLn. The plurality of first electrodes WL1 to WLn, the plurality of second electrodes BL1 to BLn, and the plurality of active layer members AL1 to ALn may correspond to Figure 2BThe plurality of first electrodes WL1 to WLn may be word lines, and the plurality of second electrodes BL1 to BLn may be bit lines, or vice versa. The intersections between the plurality of first electrodes WL1 to WLn and the plurality of second electrodes BL1 to BLn may correspond to the plurality of pixel regions P11, P21, P31, P12, P13, P22, ... and Pnn.

[0112] A method of recording first phase information on a first pixel region P11 among a plurality of pixel regions P11 , P21 , P31 , P12 , P13 , P22 . . . , and Pnn is as follows.

[0113] In this example embodiment, the plurality of first electrodes WL1 to WLn may also be referred to as 1-1 electrodes, 1-2 electrodes, 1-3 electrodes ... and 1-n electrodes, and the plurality of second electrodes BL1 to BLn may also be referred to as 2-1 electrodes, 2-2 electrodes, 2-3 electrodes ... and 2-n electrodes. By applying a first voltage to the 1-1 electrode WL1 among the plurality of first electrodes WL1 to WLn and applying a second voltage to the 2-1 electrode BL1 among the plurality of second electrodes BL1 to BLn, the first phase information may be recorded on the first pixel region P11. The first voltage and the second voltage may have the same polarity. For example, the first voltage may be +1V, and the second voltage may be +1V. The amplitude of the first voltage and the amplitude of the second voltage are only examples and may be changed. A reference voltage (e.g., a ground voltage GND (0V)) may be applied to the first active layer member AL1 among the plurality of active layer members AL1 to ALn.

[0114] A voltage having a polarity opposite to that of the second voltage applied to the 2-1st electrode BL1 may be applied to the remaining first electrodes WL2 to WLn except the 1-1st electrode WL1. For example, a voltage of -1V may be applied to the remaining first electrodes WL2 to WLn. Therefore, the state of the pixel area between the 2-1st electrode BL1 and the remaining first electrodes WL2 to WLn may not be substantially changed.

[0115] The remaining active layer members AL2 to ALn except the first active layer member AL1 may be electrically floating. Therefore, the states of the pixel regions corresponding to the remaining active layer members AL2 to ALn may not be substantially changed.

[0116] If necessary, a voltage having a polarity opposite to that of the first voltage applied to the 1-1th electrode WL1 may be applied to the remaining second electrodes BL2 to BLn except the 2-1th electrode BL1. For example, a voltage of -1V may be applied to the remaining second electrodes BL2 to BLn. The state of the pixel area between the 1-1th electrode WL1 and the remaining second electrodes BL2 to BLn may not be substantially changed.

[0117] refer to Fig.11 The method described is a method used when the upper capacitance and the lower capacitance of a predetermined pixel area are the same. In this case, the voltages applied to the upper and lower parts in order to maintain the state of the pixel area may have opposite polarities (i.e., +1V and -1V) and the same amplitude (same absolute value). However, when the upper capacitance and the lower capacitance are different from each other, the amplitudes (absolute values) of the voltages applied to the upper and lower parts in order to maintain the state of the pixel area may be different from each other. That is, the amplitude (absolute value) of the applied voltage may change according to the upper capacitance and the lower capacitance of the pixel area. The above description also applies to Fig.12 and Fig.13 Description.

[0118] Will refer to Fig.12 A method of recording second phase information on a second pixel region P21 among a plurality of pixel regions P11 , P21 , P31 , P12 , P13 , P22 . . . , and Pnn is described.

[0119] By applying a third voltage to the 1st-2nd electrode WL2 among the plurality of first electrodes WL1 to WLn and applying a fourth voltage to the 2nd-1st electrode BL1 among the plurality of second electrodes BL1 to BLn, the second phase information may be recorded on the second pixel region P21. The third voltage and the fourth voltage may have the same polarity. For example, the third voltage may be +2V, and the fourth voltage may be +2V. The amplitude of the third voltage and the amplitude of the fourth voltage are only examples and may be changed. The second phase information recorded on the second pixel region P21 may be the same as the phase information recorded on the Fig.11 The first phase information on the first pixel region P11 is different. A reference voltage (eg, a ground voltage GND (0V)) may be applied to a first active layer member AL1 among the plurality of active layer members AL1 to ALn.

[0120] A voltage having a polarity opposite to that of the fourth voltage applied to the 2-1st electrode BL1 may be applied to the remaining first electrodes WL1 and WL3 to WLn except the 1-2nd electrode WL2. For example, a voltage of -2V may be applied to the remaining first electrodes WL1 and WL3 to WLn. Therefore, the state of the pixel area between the 2-1st electrode BL1 and the remaining first electrodes WL1 and WL3 to WLn may not be substantially changed.

[0121] The remaining active layer members AL2 to ALn except the first active layer member AL1 may be electrically floating. Therefore, the states of the pixel regions corresponding to the remaining active layer members AL2 to ALn may not be substantially changed.

[0122] If necessary, a voltage having a polarity opposite to that of the third voltage applied to the 1-2 electrode WL2 may be applied to the remaining second electrodes BL2 to BLn except the 2-1 electrode BL1. For example, a voltage of -2V may be applied to the remaining second electrodes BL2 to BLn. The state of the pixel area between the 1-2 electrode WL2 and the remaining second electrodes BL2 to BLn may not be substantially changed.

[0123] You can use reference Fig.11 and Fig.12 The described method records phase information on all pixel regions P11, P21, P31, P12, P13, P22, ... and Pnn. By using a plurality of first electrodes WL1 to WLn and a plurality of second electrodes BL1 to BLn arranged to form a cross-point array structure, it is possible to easily record phase distribution on a plurality of pixel regions arranged two-dimensionally. In addition, although reference Fig.11 A method of recording the first phase information on the first pixel region P11 is described, and reference is made to Fig.12 A method of recording the second phase information on the second pixel region P21 is described, but if necessary, phase information may be recorded on two or more pixel regions at the same time.

[0124] Now refer to Fig.13 A method of removing first phase information recorded on a first pixel region P11 among a plurality of pixel regions P11 , P21 , P31 , P12 , P13 , P22 . . . , and Pnn is described.

[0125] In order to remove the first phase information recorded on the first pixel region P11, the polarity and the first phase information may be applied to the first pixel region P11 to record the first phase information (see Fig.11 ) is applied to the first pixel region P11. For example, by applying the fifth voltage to the 1-1st electrode WL1 among the plurality of first electrodes WL1 to WLn and applying the sixth voltage to the 2-1st electrode BL1 among the plurality of second electrodes BL1 to BLn, the first phase information may be removed (deleted) from the first pixel region P11. The fifth voltage may be of the same polarity as the first pixel region P11. Fig.11 The sixth voltage may be a voltage having a polarity opposite to the first voltage and having the same magnitude as the first voltage, and the sixth voltage may be a voltage having a polarity opposite to the first voltage and having the same magnitude as the first voltage. Fig.11The fifth voltage may be a voltage having a polarity opposite to that of the second voltage and having the same magnitude as that of the second voltage. In the present embodiment, the fifth voltage may be -1 V, and the sixth voltage may also be -1 V. A reference voltage (e.g., a ground voltage GND (0 V)) may be applied to a first active layer member AL1 of the plurality of active layer members AL1 to ALn, and the remaining active layer members AL2 to ALn may be electrically floating.

[0126] A voltage having a polarity opposite to that of the sixth voltage applied to the 2-1st electrode BL1 may be applied to the remaining first electrodes WL2 to WLn except the 1-1st electrode WL1, and a voltage having a polarity opposite to that of the fifth voltage applied to the 1-1st electrode WL1 may be applied to the remaining second electrodes BL2 to BLn except the 2-1st electrode BL1. For example, a voltage of +1V may be applied to the remaining first electrodes WL2 to WLn, and a voltage of +1V may be applied to the remaining second electrodes BL2 to BLn.

[0127] Fig.14 is a plan view showing a configuration of an optical modulation device according to another example embodiment.

[0128] Reference Fig.14 , a plurality of first electrodes WL10 may be arranged, a plurality of second electrodes BL10 crossing the plurality of first electrodes WL10 may be arranged, and a plurality of active layer members AL10 may be provided between the plurality of first electrodes WL10 and the plurality of second electrodes BL10. A first circuit unit CP10 connected to the plurality of first electrodes WL10 may also be provided, a second circuit unit CP20 connected to the plurality of second electrodes BL10 may also be provided, and a third circuit unit CP30 connected to the plurality of active layer members AL10 may also be provided. The first circuit unit CP10 may include a plurality of first driving units respectively connected to the plurality of first electrodes WL10, and the second circuit unit CP20 may include a plurality of second driving units respectively connected to the plurality of second electrodes BL10. The third circuit unit CP30 may include a plurality of unit circuits respectively connected to the plurality of active layer members AL10.

[0129] Fig.15 2 is a perspective view illustrating various structures / shapes of a unit area of ​​a nano-antenna applicable to an optical modulation device according to example embodiments. The unit area of ​​the nano-antenna may correspond to a pixel area.

[0130] Reference Fig.15, the unit area of ​​the nanoantenna can have various structures / shapes, such as a circular disk type (A), an elliptical disk type (B), a cross type (C), and an asterisk type (D). The cross type (C) can have a shape in which two nanorods intersect each other perpendicularly, and the asterisk type (D) can have an asterisk (*) shape in which three nanorods intersect each other. The unit area of ​​the nanoantenna can have any of various other variant structures, such as a cone, a triangular pyramid, a sphere, a hemisphere, a rice grain type, a rod type, and a fishbone type. Moreover, the nanoantenna can have a multilayer structure in which multiple layers are stacked, or can have a core-shell structure including a core portion and at least one shell portion. In addition, nanoantennas having two or more different structures / shapes can constitute a unit and can be arranged periodically.

[0131] The resonant wavelength, resonant wavelength width, resonant polarization characteristics, resonant angle, and reflection / absorption / transmission characteristics can be changed according to the structure / type and arrangement of the nanoantenna. Therefore, an optical modulation device with desired characteristics can be manufactured by controlling the structure / type and arrangement of the nanoantenna.

[0132] The device for steering a light beam into a predetermined direction may be realized by using the optical modulation device according to any embodiment of the present disclosure.

[0133] Fig.16 is a conceptual diagram for describing a beam steering device 1000A including an optical modulation device according to example embodiments.

[0134] refer to Fig.16 , the light beam may be steered to a one-dimensional (1D) direction by using the light beam steering device 1000A. That is, the light beam may be steered toward a predetermined object OBJ in a first direction DD1. The light beam steering device 1000A may include an optical modulation device according to any example embodiment of the present disclosure.

[0135] Fig.17 is a conceptual diagram for describing a beam steering device 1000B including an optical modulation device according to another example embodiment.

[0136] refer to Fig.17 , the light beam can be steered into a two-dimensional (2D) direction by using a light beam steering device 1000B. That is, the light beam can be steered toward a predetermined object OBJ in a first direction DD1 and a second direction DD2 perpendicular to the first direction DD1. The light beam steering device 1000B may include an optical modulation device according to any example embodiment of the present disclosure. Fig.16 and Fig.17 The beam steering devices 1000A and 1000B can be non-mechanical beam scanning devices.

[0137] Fig.18is a block diagram for describing an entire system of an optical apparatus A1 including a beam steering apparatus 1000 using an optical modulation apparatus according to example embodiments.

[0138] refer to Fig.18 , the optical device A1 may include a beam steering device 1000. The beam steering device 1000 may include Figures 1A to 2B and Figures 5 to 15 . The optical device A1 may include a light source unit in the light beam steering device 1000, or may include a light source unit separated from the light beam steering device 1000. The optical device A1 may include a detector 2000 for detecting light that is deflected by the light beam steering device 1000 and reflected by the object. The detector 2000 may include a plurality of light detection elements and may also include other optical components. Moreover, the optical device A1 may also include a circuit unit 3000 connected to at least one of the light beam steering device 1000 and the detector 2000. The circuit unit 3000 may further include a processor configured to obtain and calculate, and may also include a driver and a controller. Moreover, the circuit unit 3000 may also include a power supply unit and a memory.

[0139] Despite Fig.18 The optical device A1 includes a beam steering device 1000 and a detector 2000, but the beam steering device 1000 and the detector 2000 may be separately provided in a plurality of devices instead of being provided in one device. Moreover, the circuit unit 3000 may be connected to the beam steering device 1000 or the detector 2000 by wireless communication instead of by a cable. In addition, the optical device A1 may be changed in various ways. Fig.18 Configuration.

[0140] The beam steering device according to the above-mentioned embodiment can be applied to various optical devices. For example, the beam steering device can be applied to a light detection and ranging (LiDAR) device. The LiDAR device can be a device using a phase shift method or a time of flight (TOF) method. The LiDAR device can be applied to autonomous vehicles, flying objects such as drones, mobile devices, small vehicles (e.g., bicycles, motorcycles, strollers or boards), robots, human / animal auxiliary equipment (e.g., canes, helmets, accessories, clothing, watches or bags), Internet of Things (IoT) devices / systems and safety devices / systems.

[0141] Fig.19 and Fig. 20 is a conceptual diagram showing a case where a LiDAR apparatus 71 including an optical modulation device is applied to a vehicle 70 according to an embodiment. Fig.19 is a side view, Fig. 20 It is a top view.

[0142] refer to Fig.19 , the LiDAR device 71 may be applied to the vehicle 70, and information about the object 80 may be acquired by using the LiDAR device 71. The vehicle 70 may be a vehicle having an autonomous driving function. The object 80 (e.g., a solid object or a person) located in the traveling direction of the vehicle 70 may be detected by using the LiDAR device 71. In addition, the distance to the object 80 may be measured by using information such as the time difference between the transmitted signal and the detected signal. Moreover, as Fig. 20 As shown, information about a close object 81 and a distant object 82 located within the scanning range can be obtained.

[0143] The optical modulation device according to various exemplary embodiments of the present disclosure can be applied to various optical devices and LiDAR devices. For example, since three-dimensional (3D) information of objects and spaces can be obtained by scanning using the optical modulation device according to various embodiments, the optical modulation device can be applied to a 3D image acquisition device or a 3D camera. In addition, the optical modulation device can be applied to a holographic display device and a structured light generating device. In addition, the optical modulation device can be applied to various optical components / devices, such as various beam scanning devices, hologram generating devices, optical coupling devices, zoom lenses, 3D sensors, and depth sensors. In addition, the optical modulation device can be applied to sensors and optical module radars for autonomous driving. In addition, the optical modulation device can be applied to various fields using "meta-surfaces" or "meta-structures". In addition, the optical modulation device according to the embodiment of the present disclosure and the optical device including the optical modulation device can be applied to various optical and electronic devices for various purposes.

[0144] Although many embodiments have been described in detail, the embodiments should not be construed as limiting the scope of the present disclosure, but rather as examples. The present teachings can be readily applied to other types of devices. In addition, the description of the exemplary embodiments is merely illustrative and not intended to limit the scope of the claims, and a variety of alternatives, modifications, and variations will be apparent to those skilled in the art. For example, a person of ordinary skill in the art will appreciate that the referenced embodiments may be modified in various ways. Figures 1A to 2B and Figures 9 to 20 The optical modulation device and the operation method thereof described in any one of the embodiments are provided herein. In addition, the application of the optical modulation device according to the embodiment is not limited thereto and can be modified in various ways. Therefore, the scope of the present disclosure is not limited by the embodiment but by the technical spirit and scope of the appended claims.

Claims

1. An optical modulation device, comprising: Reflector area; a nano-antenna region facing the reflector region; an active region located between the reflector region and the nanoantenna region and having physical properties that vary according to electrical conditions; as well as A plurality of first electrodes and a plurality of second electrodes are configured to change the physical properties of the active area located between the plurality of first electrodes and the plurality of second electrodes, the plurality of first electrodes are arranged to cross the plurality of second electrodes to form a cross-point array structure, and the intersections between the plurality of first electrodes and the plurality of second electrodes correspond to a plurality of pixel areas of the active area, wherein the plurality of first electrodes are included in the reflector region or are disposed separately from the reflector region, and the plurality of second electrodes are included in the nano-antenna region or are disposed separately from the nano-antenna region, and The phase information is recorded on at least one pixel area selected from the plurality of pixel areas by using the plurality of first electrodes and the plurality of second electrodes.

2. The optical modulation device according to claim 1, wherein: The reflector region includes a plurality of reflector members having a linear shape as the plurality of first electrodes.

3. The optical modulation device according to claim 1, wherein: The nano-antenna region includes a plurality of nano-antennas having a linear shape as the plurality of second electrodes.

4. The optical modulation device according to claim 1, wherein: The reflector region includes a plurality of reflector members extending in a first direction as the plurality of first electrodes, wherein the nano-antenna region includes a plurality of nano-antennas extending in a second direction intersecting with the first direction as the plurality of second electrodes, and Wherein, the plurality of intersections between the plurality of reflector components and the plurality of nano-antennas correspond to the plurality of pixel regions.

5. The optical modulation device according to claim 1, wherein: The plurality of first electrodes are disposed separately from the reflector region, and Wherein, the plurality of first electrodes are located between the reflector region and the active region.

6. The optical modulation device according to claim 1, wherein: The plurality of second electrodes are disposed separately from the nano-antenna region, and Wherein, the plurality of second electrodes are located between the nano-antenna region and the active region.

7. The optical modulation device according to claim 1, further comprising: A first insulating layer, located between the reflector region and the active region or between the plurality of first electrodes and the active region; as well as A second insulating layer is located between the nano-antenna region and the active region or between the plurality of second electrodes and the active region.

8. The optical modulation device according to claim 1, further comprising: a plurality of first driving units, respectively connected to the plurality of first electrodes and configured to apply voltages to the plurality of first electrodes; as well as The plurality of second driving units are respectively connected to the plurality of second electrodes and configured to apply voltages to the plurality of second electrodes.

9. The optical modulation device according to claim 1, wherein: The active region includes a plurality of active layer members having a linear shape, the plurality of active layer members extending in the same direction as a direction in which the plurality of first electrodes or the plurality of second electrodes extend.

10. The optical modulation device according to claim 1, wherein: The active region includes an electro-optic material having a dielectric constant that varies according to an electrical signal applied to the active region.

11. The optical modulation device according to claim 1, wherein: The active region includes at least one of a transparent conductive oxide TCO and a transition metal nitride TMN.

12. The optical modulation device according to claim 1, wherein: The optical modulation device is configured to cause phase modulation of light reflected by the nanoantenna region.

13. An optical apparatus comprising the optical modulation device according to claim 1 and configured to steer a light beam by using the optical modulation device.

14. The optical device according to claim 13, wherein: The optical device includes at least one of a light detection and ranging LiDAR device, a three-dimensional 3D image acquisition device, a 3D sensor and a depth sensor.

15. An optical modulation device, comprising: a reflector region including a plurality of reflector members, each of the plurality of reflector members extending linearly in a first direction; a nano-antenna region facing the reflector region, comprising a plurality of nano-antennas, each of the plurality of nano-antennas extending linearly in a second direction perpendicular to the first direction to form a plurality of intersections corresponding to a plurality of pixel regions between the plurality of reflector members and the plurality of nano-antennas; as well as an active region located between the reflector region and the nano-antenna region and having a physical property that changes according to an electrical condition, the active region including a plurality of active layer members, each of the plurality of active layer members having a linear shape extending in the first direction or the second direction, wherein an electrical signal is applied to the plurality of reflector members and the plurality of nano-antennas to change a physical property of the active region between the plurality of reflector members and the plurality of nano-antennas, and Wherein, phase information is recorded on at least one pixel area selected from the plurality of pixel areas by using the plurality of reflector members and the plurality of nano-antennas.

16. The optical modulation device according to claim 15, further comprising: A first insulating layer, located between the reflector region and the active region; as well as A second insulating layer is located between the nano-antenna region and the active region.

17. A method of operating an optical modulation device, the optical modulation device comprising: Reflector area; Nanoantenna region; an active region between the reflector region and the nanoantenna region; A plurality of first electrodes and a plurality of second electrodes are configured to change a physical property of the active area located between the plurality of first electrodes and the plurality of second electrodes, wherein the plurality of first electrodes are arranged to cross with the plurality of second electrodes to form a cross-point array structure, and a plurality of pixel areas of the active area correspond to intersections between the plurality of first electrodes and the plurality of second electrodes, the method comprising: recording phase information on at least one pixel region selected from the plurality of pixel regions by using the plurality of first electrodes and the plurality of second electrodes; as well as Light incident on the optical modulation device and reflected by the nano-antenna region is modulated.

18. The method according to claim 17, wherein: Recording phase information includes: recording first phase information on a first pixel area at an intersection between the first sub-electrode among the plurality of first electrodes and the first sub-electrode among the plurality of second electrodes by applying a first voltage to a first sub-electrode among the plurality of first electrodes and applying a second voltage to a first sub-electrode among the plurality of second electrodes, The first voltage and the second voltage have the same polarity.

19. The method according to claim 18, wherein: Recording the first phase information further includes: applying a third voltage to the second sub-electrode in the plurality of first electrodes, The polarity of the third voltage is opposite to the polarity of the second voltage.

20. The method according to claim 18, wherein: Recording the first phase information further includes: applying a fourth voltage to the second sub-electrode in the plurality of second electrodes, The polarity of the fourth voltage is opposite to the polarity of the first voltage.

21. The method of claim 17, further comprising: While recording phase information on the at least one pixel region selected from the plurality of pixel regions, a state of at least one pixel region not selected from the plurality of pixel regions is maintained.

22. The method according to claim 17, wherein: The active region includes a plurality of active layer components, Wherein, recording the phase information further comprises: applying a reference voltage to at least one active layer member selected from the plurality of active layer members, while at least one active layer member not selected from the plurality of active layer members is electrically floating.

23. The method of claim 17, further comprising: Phase information recorded on the at least one pixel region selected from the plurality of pixel regions is removed by using the plurality of first electrodes and the plurality of second electrodes.

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