Pressure sensor and pressure sensor design method

Abstract

The present invention provides a pressure sensor and a pressure sensor design method. The pressure sensor comprises a stacked first electrode layer, a pressure sensing layer, and a second electrode layer. The pressure sensing layer includes a plurality of first sensing elements and a plurality of second sensing elements. The first sensing elements and the second sensing elements are interlaced and arranged, enabling the pressure sensor to sense external pressure through bending deformation of the first sensing elements and / or the second sensing elements. The pressure sensor and pressure sensor design method provided by the present invention utilize structural bending of the first and second sensing elements to obtain structural deformation of the first and second sensing elements. This utilizes bending deformation instead of compression deformation to achieve higher sensitivity in sensor detection, thereby addressing the issue of low sensor sensitivity.

Description

Technical Field

[0001] The present invention relates to the field of sensor technology, and in particular to a pressure sensor and a pressure sensor design method. Background Art

[0002] With the advancement of the information age, sensor applications are placing increasingly stringent demands on performance and parameters such as the range, accuracy, and stability of the measured information. Conventional sensors are no longer able to meet the demands for measuring gas, pressure, and humidity in specialized environments and under specific signals. Pressure sensors are widely used in smart clothing, smart sports, and robotic "skin." Materials such as polyvinylidene fluoride, silicone rubber, and polyimide are widely used in pressure sensors. Unlike force sensors using metal strain gauges, these sensors offer superior flexibility, conductivity, and piezoresistive properties.

[0003] In related technologies, the structures between capacitive sensor electrodes are typically designed as cylindrical, conical, truncated cone, or spherical micro-nanostructures to improve sensor sensitivity. However, this design relies on the material's compressive deformation to measure strain. Improving sensor sensitivity by increasing the material's compressive deformation is limited by the material's inherent compressive strength and elastic modulus. Alternatively, the micro-nanostructure can be made sufficiently precise so that it deforms relatively easily during compression. However, such precise micro-nanostructures require very high manufacturing processes, making commercial production difficult.

[0004] With regard to the problem of low sensor sensitivity in related technologies, no effective solution has been proposed so far. Summary of the Invention

[0005] In response to the problem of low sensor sensitivity in the related art, the present invention provides a pressure sensor and a design method thereof to at least solve the above problem.

[0006] According to one aspect of the present invention, there is provided a pressure sensor, comprising a first electrode layer, a pressure sensing layer and a second electrode layer which are stacked together; the pressure sensing layer comprises a plurality of first sensing elements and a plurality of second sensing elements, the plurality of first sensing elements being spaced apart from each other and connected to the first electrode layer, and the plurality of second sensing elements being spaced apart from each other and connected to the second electrode layer; the first sensing elements and the second sensing elements being interlaced with each other, and the pressure sensor being able to sense external pressure through bending deformation of the first sensing elements and / or the second sensing elements.

[0007] In one embodiment, the first sensing element is obliquely intersecting with the first electrode layer, and the second sensing element is perpendicular to the second electrode layer.

[0008] In one embodiment, at least one first sensing element among the plurality of first sensing elements abuts against the body of the second sensing element at an end relatively far away from the first electrode layer;

[0009] At least one of the plurality of second sensing elements abuts against the body of the first sensing element at an end relatively far away from the second electrode layer.

[0010] In one embodiment, the number of the first sensing elements is less than the number of the second sensing elements, and each of the second sensing elements can abut against a body portion of one of the first sensing elements.

[0011] In one embodiment, the pressure sensor further includes two wires, and the two wires are connected to the first electrode layer and the second electrode layer respectively.

[0012] In one embodiment, the pressure sensor is a capacitive pressure sensor: the first sensing element and the second sensing element are both insulating elements; or,

[0013] The pressure sensor is a resistive pressure sensor: the first sensing element and the second sensing element are both resistive elements.

[0014] In one embodiment, the length of the second electrode layer is greater than the length of the first electrode layer; or

[0015] The length of the first electrode layer is greater than the length of the second electrode layer.

[0016] In one embodiment, the spacing distances between adjacent second sensing elements are equal; and the length difference between the second electrode layer and the first electrode layer is greater than the spacing distance between adjacent second sensing elements.

[0017] According to another aspect of the present invention, a pressure sensor design method is provided. The pressure sensor design method is applied to a pressure sensor; the pressure sensor includes a first electrode layer and a second electrode layer stacked together; the pressure sensor design method includes:

[0018] installing a plurality of first sensing elements on the first electrode layer and installing a plurality of second sensing elements on the second electrode layer;

[0019] The first sensing element and the second sensing element are interlaced and connected, so that the pressure sensor can sense external pressure through the bending deformation of the first sensing element and / or the second sensing element.

[0020] In one embodiment, the step of interlacing the first sensing element and the second sensing element comprises:

[0021] At least one of the plurality of first sensing elements is brought into contact with the body of the second sensing element at an end relatively far from the first electrode layer, and at least one of the plurality of second sensing elements is brought into contact with the body of the first sensing element at an end relatively far from the second electrode layer.

[0022] In one embodiment, the step of installing multiple first sensing elements on the first electrode layer and installing multiple second sensing elements on the second electrode layer includes: installing multiple first sensing elements on the first electrode layer that are inclined and intersecting with the first electrode layer, and installing multiple second sensing elements on the second electrode layer that are orthogonal to the second electrode layer.

[0023] In one embodiment, the step of installing a plurality of first sensing elements on the first electrode layer and obliquely intersecting the first electrode layer, and installing a plurality of second sensing elements on the second electrode layer and orthogonal to the second electrode layer comprises:

[0024] installing a plurality of first sensing elements on the first electrode layer;

[0025] A plurality of second sensing elements, the number of which is greater than the number of the first sensing elements, is mounted on the second electrode layer.

[0026] In one embodiment, the step of installing a first sensing element on the first electrode layer and installing a second sensing element on the second electrode layer includes:

[0027] A plurality of first sensing elements distributed at intervals of one to one are mounted on the first electrode layer, and a plurality of second sensing elements distributed at intervals of one to one are mounted on the second electrode layer; and

[0028] The step of interlacing the first sensing element and the second sensing element comprises:

[0029] The plurality of first sensing elements and the plurality of second sensing elements are alternately plugged in sequence.

[0030] The pressure sensor and its design method comprise a stacked first electrode layer, a pressure sensing layer, and a second electrode layer. The pressure sensing layer includes a plurality of first sensing elements and a plurality of second sensing elements. The first sensing elements are spaced apart and connected to the first electrode layer, while the second sensing elements are spaced apart and connected to the second electrode layer. The first and second sensing elements are arranged in an interlaced manner. The pressure sensor provided by the present invention utilizes structural bending of the first and second sensing elements to achieve structural deformation of the first and second sensing elements. This bending deformation replaces compression deformation to achieve higher sensor sensitivity, thereby resolving the issue of low sensor sensitivity. BRIEF DESCRIPTION OF THE DRAWINGS

[0031] Figure 1 2 is a schematic structural diagram of a pressure sensor in a first embodiment of the present invention;

[0032] Figure 2 The process of the pressure sensor design method in the embodiment of the present invention is as follows Figure 1 ;

[0033] Figure 3 The process of the pressure sensor design method in the embodiment of the present invention is as follows Figure 2 ;

[0034] Figure 4 The process of the pressure sensor design method in the embodiment of the present invention is as follows Figure 3 ;

[0035] Figure 5 The process of the pressure sensor design method in the embodiment of the present invention is as follows Figure 4 ;

[0036] Figure 6 The process of the pressure sensor design method in the embodiment of the present invention is as follows Figure 5 .

[0037] Description of main component symbols

[0038] First electrode layer 10 Pressure sensing layer 20 First sensor 21 Second sensor 22 Second electrode layer 30 wire 40

[0039] The following specific embodiments will further illustrate the present invention in conjunction with the above-mentioned drawings. DETAILED DESCRIPTION

[0040] The following will clearly and completely describe the technical solutions in the embodiments of the present invention in conjunction with the accompanying drawings. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of the present invention.

[0041] It should be noted that when a component is referred to as being "mounted on" another component, it may be mounted directly on the other component or there may be a central component. When a component is considered to be "set on" another component, it may be directly set on the other component or there may be a central component. When a component is considered to be "fixed to" another component, it may be directly fixed to the other component or there may be a central component.

[0042] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by those skilled in the art to which this invention pertains. The terms used herein in the specification of the present invention are for the purpose of describing specific embodiments only and are not intended to limit the present invention. The term "or / and" as used herein includes any and all combinations of one or more of the associated listed items.

[0043] It should be noted that the terms "first," "second," and "third" as used in the embodiments of the present invention are merely used to distinguish similar objects and do not represent a specific ordering of the objects. Where permitted, the terms "first," "second," and "third" may be interchanged to represent a specific order or precedence. It is understood that the terms "first," "second," and "third" may be interchanged to represent objects where appropriate, so that the embodiments of the present invention described herein can be implemented in an order other than that illustrated or described herein.

[0044] Figure 1 This is a schematic structural diagram of a pressure sensor in the first embodiment of the present invention. The present invention provides a pressure sensor that can be applied to fields such as smart clothing, smart sports, and robot "skin."

[0045] The pressure sensor includes a first electrode layer 10, a pressure sensing layer 20 and a second electrode layer 30 arranged in a stacked manner; the pressure sensing layer 20 includes a plurality of first sensing elements 21 and a plurality of second sensing elements 22, the plurality of first sensing elements 21 are spaced apart and connected to the first electrode layer 10, and the plurality of second sensing elements 22 are spaced apart and connected to the second electrode layer 30; the first sensing elements 21 and the second sensing elements 22 are interlaced and inserted, so that the pressure sensor can sense external pressure through bending deformation of the first sensing elements 21 and / or the second sensing elements 22.

[0046] The first sensor 21 and the second sensor 22 may be in the shape of a long plate, a rectangular parallelepiped, a long cylinder, an ellipsoid or the like.

[0047] It should be further explained that the staggered plug-in arrangement means that the extension directions of the first sensing element 21 and the second sensing element 22 are different, and the first sensing element 21 and the second sensing element 22 are cross-connected; the multiple first sensing elements 21 can be evenly spaced, and the multiple second sensing elements 22 can be evenly spaced, so that the pressure sensor has a better pressure sensing layer 20 structure, thereby improving the performance of the pressure sensor.

[0048] The pressure sensor comprises a stacked first electrode layer 10, a pressure sensing layer 20, and a second electrode layer 30. The pressure sensing layer 20 includes a plurality of first sensing elements 21 and a plurality of second sensing elements 22. The first sensing elements 21 are spaced apart and connected to the first electrode layer 10, while the second sensing elements 22 are spaced apart and connected to the second electrode layer 30. The first sensing elements 21 and the second sensing elements 22 are interleaved and interlocked, enabling the pressure sensor to sense external pressure through bending deformation of the first sensing elements 21 and / or the second sensing elements 22. When a force is applied to the pressure sensor, the first sensing elements 21 and the second sensing elements 22 move relative to each other left and right. The pressure sensor utilizes the structural bending of the first and second sensing elements 21, 22 to detect their structural deformation. This utilizes bending deformation instead of compression deformation to achieve higher sensitivity, thereby addressing the issue of low sensor sensitivity.

[0049] Furthermore, the first sensing element 21 is inclined to the first electrode layer 10, and the second sensing element 22 is orthogonal to the second electrode layer 30, wherein the first sensing element 21 is inclined to intersect the first electrode layer 10, the first sensing element 21 is not subjected to force, and the shapes of the first sensing element 21 and the second sensing element 22 can be long plates, or can be rectangular parallelepipeds, long cylinders, ellipsoids, and the like.

[0050] In one embodiment, at least one first sensing element 21 among the plurality of first sensing elements 21 abuts against the body of the second sensing element 22 at an end relatively far from the first electrode layer 10 ;

[0051] At least one second sensor element 22 among the plurality of second sensor elements 22 abuts against the body of the first sensor element 21 at the end relatively far away from the second electrode layer 30, wherein the shapes of the first sensor element 21 and the second sensor element 22 can be long plates, or rectangular parallelepipeds, long cylinders, ellipsoids, etc.

[0052] Through the above-mentioned pressure sensor, at least one first sensing element 21 among the multiple first sensing elements 21 abuts against the body of the second sensing element 22 at the end relatively far away from the first electrode layer 10, and at least one second sensing element 22 among the multiple second sensing elements 22 abuts against the body of the first sensing element 21 at the end relatively far away from the second electrode layer 30, thereby achieving a tighter structural connection of the pressure sensing layer 20, thereby making the pressure sensor have more stable sensing performance.

[0053] In one embodiment, the number of the first sensor elements 21 is less than the number of the second sensor elements 22, and each of the second sensor elements 22 can correspond to a body portion of the first sensor element 21, wherein the shapes of the first sensor element 21 and the second sensor element 22 can be long plates, or rectangular parallelepipeds, long cylinders, ellipsoids, etc.

[0054] Through the above-mentioned pressure sensor, the number of the first sensing elements 21 is less than the number of the second sensing elements 22, so that each of the second sensing elements 22 can correspondingly abut against the body of one of the first sensing elements 21, thereby achieving a tighter structural connection of the pressure sensing layer 20, thereby making the pressure sensor have more stable sensing performance.

[0055] Furthermore, the pressure sensor also includes two wires 40, which are respectively connected to the first electrode layer 10 and the second electrode layer 30, wherein the material of the two wires 40 includes one of gold, silver and copper, and the wires 40 can also be prepared by printing a paste of conductive silver glue. The shape of the two wires 40 includes one of linear and sheet.

[0056] In one embodiment, the pressure sensor is a capacitive pressure sensor: the first sensing element 21 and the second sensing element 22 are both insulating elements.

[0057] The insulating part can be made by pouring a liquid material into a mold and solidifying it. The liquid material includes at least one of the following: polyurethane (PU), polydimethylsiloxane (PDMS), polyethylene terephthalate (PET) and polyvinylidene fluoride (PVDF).

[0058] It should be further explained that the pressure sensing layer 20 includes a plurality of first insulating members 21 and a plurality of second insulating members 22, wherein the plurality of first insulating members 21 are spaced apart from each other and are all connected to the first electrode layer 10, and the plurality of second insulating members 22 are spaced apart from each other and are all connected to the second electrode layer 30; the first insulating members 21 and the second insulating members 22 are interlaced and inserted, and the pressure sensor (100) is able to sense external pressure through the bending deformation of the first insulating member 21) and / or the second insulating member (22), wherein the shape of the first insulating member 21 and the second insulating member 22 can be a long plate, or a rectangular parallelepiped, a long cylinder, an ellipsoid, or the like.

[0059] The pressure sensor is a capacitive pressure sensor. The first sensing element 21 and the second sensing element 22 are both insulating elements. The first insulating element 21 and the second insulating element 22 are interlaced and arranged, and the pressure sensor (100) can sense external pressure through the bending deformation of the first insulating element (21) and / or the second insulating element (22). Under the action of pressure, the structures of the first insulating element 21 and the second insulating element 22 will move relative to each other, and the distance between the first electrode layer 10 and the second electrode layer 30 will change, so that the capacitance of the capacitor will change. The pressure applied to the pressure sensor can be monitored by the output electrical signal, thereby realizing the function of the pressure sensor. The pressure sensor utilizes the bending of the structure of the first insulating element 21 and the second insulating element 22 to obtain the structural deformation of the first insulating element 21 and the second insulating element 22. The bending deformation is used instead of the compression deformation to improve the sensor detection with higher sensitivity, thereby solving the problem of low sensor sensitivity.

[0060] In one embodiment, the length of the second electrode layer 30 is greater than the length of the first electrode layer 10; or, the length of the first electrode layer 10 is greater than the length of the second electrode layer 30. It should be noted that during the use of the pressure sensor, the insulating member will undergo relative left and right movement. The length of the second electrode layer 30 is greater than the length of the first electrode layer 10, and the length of the first electrode layer 10 is greater than the length of the second electrode layer 30, both of which can ensure that the relative area of ​​the capacitor remains unchanged.

[0061] Through the above-mentioned pressure sensor, the pressure sensor is a capacitive pressure sensor. During the use of the capacitive pressure sensor, the insulating part will undergo relative left and right movement. The length of the second electrode layer 30 is set to be greater than the length of the first electrode layer 10, or the length of the first electrode layer 10 is set to be greater than the length of the second electrode layer 30. Both can ensure that the relative area of ​​the capacitor remains unchanged. The capacitance change of the capacitor is detected only by the change in the distance between the second electrode layer 30 and the first electrode layer 10, thereby realizing the function of the pressure sensor and improving the measurement accuracy of the pressure sensor.

[0062] In one embodiment, the spacing distances between adjacent second insulating members 22 are equal; the length difference between the second electrode layer 30 and the first electrode layer 10 is at least greater than the spacing distance between adjacent second insulating members 22. It should be noted that during the use of the pressure sensor, the insulating member will undergo relative left and right movement, and the length difference between the second electrode layer 30 and the first electrode layer 10 is greater than the spacing distance between adjacent second insulating members 22 to ensure that the relative area of ​​the capacitor remains unchanged.

[0063] Through the above-mentioned pressure sensor, the pressure sensor is a capacitive pressure sensor. During the use of the capacitive pressure sensor, the insulating part will undergo relative left and right movement. The length difference between the second electrode layer 30 and the first electrode layer 10 is set to be greater than the spacing distance between the adjacent second insulating parts 22 to ensure that the relative area of ​​the capacitor remains unchanged. The capacitance change of the capacitor is detected only by the change in the distance between the second electrode layer 30 and the first electrode layer 10, thereby realizing the function of the pressure sensor and improving the measurement accuracy of the pressure sensor.

[0064] In this embodiment, the pressure sensor is a capacitive pressure sensor, and the first sensing element 21 and the second sensing element 22 are both insulating elements.

[0065] It can be understood that the pressure sensor can also be a resistive pressure sensor, and the first sensing element 21 and the second sensing element 22 are both resistive elements.

[0066] Among them, the pressure sensor is a resistive pressure sensor, and the electrode layer of the resistive pressure sensor can be prepared into a patterned electrode layer. The method for preparing the patterned electrode layer includes one of the following: laser cutting, physical cutting, screen printing, photolithography and 3D printing technology. Among them, the resistor is made by pouring a conductive paste into a mold and curing it. The conductive paste is a mixture of a polymer material and a conductive material. The polymer material includes at least one of PU, PDMS, PET and PVDF, and the conductive material includes one of metal conductive particles, graphene and carbon nanotubes.

[0067] It should be further explained that the pressure sensing layer 20 includes a plurality of first resistors 21 and a plurality of second resistors 22, wherein the plurality of first resistors 21 are spaced apart and connected to the first electrode layer 10, and the plurality of second resistors 22 are spaced apart and connected to the second electrode layer 30; the first resistors 21 and the second resistors 22 are interlaced and arranged, and the pressure sensor (100) can sense external pressure through the bending deformation of the first resistors 21 and / or the second resistors 22. The shapes of the first resistors 21 and the second resistors 22 can be long plates, or can be rectangular parallelepiped, long cylinders, ellipsoids, and the like.

[0068] The pressure sensor is a resistive pressure sensor. The first sensing element 21 and the second sensing element 22 are both resistors. The first resistor 21 and the second resistor 22 are interlaced and arranged, and the pressure sensor (100) can sense external pressure through the bending deformation of the first resistor 21 and / or the second resistor 22. Under the action of pressure, the structures of the first sensing element 21 and the second sensing element 22 will move relative to each other, and the contact area of ​​the first resistor 21 and the second resistor 22 will change, thereby changing the resistance value of the pressure sensing layer 20. The pressure applied to the pressure sensor can be monitored by the output electrical signal, thereby realizing the function of the pressure sensor. The pressure sensor utilizes the bending of the structure of the first resistor 21 and the second resistor 22 to obtain the structural deformation of the first resistor 21 and the second resistor 22. The bending deformation is used instead of the compression deformation to improve the sensor detection with higher sensitivity, thereby solving the problem of low sensor sensitivity.

[0069] Furthermore, the material of the first electrode layer 10 includes one of the following: a metal film, a metal-plated polymer material, and a conductive silver paste film; and / or

[0070] The material of the second electrode layer 30 includes one of the following: a metal film, a metal-plated polymer material, and a conductive silver paste film.

[0071] Among them, the metal-plated polymer material can be applied on the surface of the polymer by metal sputtering or metal evaporation. The metal includes one of gold, silver and copper. The conductive silver glue film can be used to prepare a thin film electrode by scraping the conductive silver glue.

[0072] The pressure sensor provided by the present invention includes a first electrode layer 10, a pressure sensing layer 20 and a second electrode layer 30 that are stacked. The pressure sensing layer 20 includes a plurality of first sensing elements 21 and a plurality of second sensing elements 22. The plurality of first sensing elements 21 are spaced apart and connected to the first electrode layer 10, and the plurality of second sensing elements 22 are spaced apart and connected to the second electrode layer 30. The first sensing elements 21 and the second sensing elements 22 are interlaced and inserted, so that the pressure sensor can sense external pressure through bending deformation of the first sensing elements 21 and / or the second sensing elements 22. When the pressure sensor is subjected to force, the first sensing element 21 and the second sensing element 22 move relative to each other left and right. The pressure sensor also includes two wires 40, which are respectively connected to the first electrode layer 10 and the second electrode layer 30. The pressure applied to the pressure sensor can be monitored through the output electrical signal, thereby realizing the pressure sensing monitoring function of the pressure sensor. The pressure sensor utilizes the structural bending of the first sensing element 21 and the second sensing element 22 to obtain structural deformation of the first sensing element 21 and the second sensing element 22, and improves sensor detection with higher sensitivity by replacing compression deformation with bending deformation, thereby solving the problem of low sensor sensitivity.

[0073] In one embodiment, Figure 2 The process of the pressure sensor design method in the embodiment of the present invention is as follows Figure 1 ,like Figure 2 As shown, a pressure sensor design method is provided, comprising the following steps:

[0074] According to another aspect of the present invention, a pressure sensor design method is provided. The pressure sensor design method is applied to a pressure sensor; the pressure sensor includes a first electrode layer and a second electrode layer stacked together; the pressure sensor design method includes the following steps:

[0075] Step S110 , installing a plurality of first sensing elements on the first electrode layer and installing a plurality of second sensing elements on the second electrode layer.

[0076] In step S120 , the first sensing element and the second sensing element are alternately plugged in, and the pressure sensor is enabled to sense external pressure through bending deformation of the first sensing element and / or the second sensing element.

[0077] The first sensor and the second sensor may be in the shape of a long plate, a rectangular parallelepiped, a long cylinder, an ellipsoid or the like.

[0078] It should be further explained that the staggered plug-in setting means that the extension directions of the first sensing element and the second sensing element are different, and the first sensing element and the second sensing element are cross-connected; the multiple first sensing elements can be evenly spaced, and the multiple second sensing elements can be evenly spaced, so that the pressure sensor has a better pressure sensing layer structure, thereby improving the performance of the pressure sensor.

[0079] The above-mentioned pressure sensor design method installs multiple first sensing elements on the first electrode layer and multiple second sensing elements on the second electrode layer. The first and second sensing elements are interlaced and inserted, enabling the pressure sensor to sense external pressure through bending deformation of the first and / or second sensing elements. By utilizing the structural bending of the first and second sensing elements to obtain structural deformation, bending deformation replaces compression deformation to achieve higher sensor sensitivity, thus resolving the issue of low sensor sensitivity.

[0080] In one embodiment, Figure 3 The process of the pressure sensor design method in the embodiment of the present invention is as follows Figure 2 ,like Figure 3 As shown, the pressure sensor design method further includes step S220. Step S220 is performed after step S110:

[0081] In step S220, at least one of the plurality of first sensing elements is brought into contact with the body of the second sensing element at the end relatively far away from the first electrode layer, and at least one of the plurality of second sensing elements is brought into contact with the body of the first sensing element at the end relatively far away from the second electrode layer, so that the pressure sensor can sense external pressure through the bending deformation of the first sensing element and / or the second sensing element.

[0082] The first sensor and the second sensor may be in the shape of a long plate, a rectangular parallelepiped, a long cylinder, an ellipsoid or the like.

[0083] It should be further explained that the staggered plug-in setting means that the extension directions of the first sensing element and the second sensing element are different, and the first sensing element and the second sensing element are cross-connected; the multiple first sensing elements can be evenly spaced, and the multiple second sensing elements can be evenly spaced, so that the pressure sensor has a better pressure sensing layer structure, thereby improving the performance of the pressure sensor.

[0084] The above-mentioned pressure sensor design method is to connect at least one first sensor element among the multiple first sensor elements to the body of the second sensor element at the end relatively far away from the first electrode layer, and at least one second sensor element among the multiple second sensor elements to the body of the first sensor element at the end relatively far away from the second electrode layer, and enable the pressure sensor to sense external pressure through the bending deformation of the first sensor element and / or the second sensor element, thereby achieving a tighter structural connection of the pressure sensing layer, thereby making the pressure sensor have more stable sensing performance.

[0085] Furthermore, Figure 4 The process of the pressure sensor design method in the embodiment of the present invention is as follows Figure 3 ,like Figure 4 As shown, the pressure sensor design method further includes step S310. Step S310 is before step S120:

[0086] Step S310 , installing a plurality of first sensing elements on the first electrode layer and obliquely intersecting the first electrode layer, and installing a plurality of second sensing elements on the second electrode layer and perpendicular to the second electrode layer.

[0087] The first sensor and the second sensor may be in the shape of a long plate, a rectangular parallelepiped, a long cylinder, an ellipsoid or the like.

[0088] It should be further explained that the staggered plug-in setting means that the extension directions of the first sensing element and the second sensing element are different, and the first sensing element and the second sensing element are cross-connected; the multiple first sensing elements can be evenly spaced, and the multiple second sensing elements can be evenly spaced, so that the pressure sensor has a better pressure sensing layer structure, thereby improving the performance of the pressure sensor.

[0089] In one embodiment, Figure 5 The process of the pressure sensor design method in the embodiment of the present invention is as follows Figure 4 ,like Figure 5 As shown, the pressure sensor design method also includes the following steps:

[0090] Step S410: installing a plurality of first sensing elements on the first electrode layer.

[0091] Step S420 , mounting a plurality of second sensing elements on the second electrode layer, the number of which is greater than the number of the first sensing elements, wherein the first sensing elements and the second sensing elements may be in the shape of long plates, or in the shape of rectangular parallelepipeds, long cylinders, or ellipsoids.

[0092] It should be further explained that the staggered plug-in setting means that the extension directions of the first sensing element and the second sensing element are different, and the first sensing element and the second sensing element are cross-connected; the multiple first sensing elements can be evenly spaced, and the multiple second sensing elements can be evenly spaced, so that the pressure sensor has a better pressure sensing layer structure, thereby improving the performance of the pressure sensor.

[0093] The above-mentioned pressure sensor design method installs multiple first sensing elements on the first electrode layer, and installs multiple second sensing elements whose number is greater than the first sensing elements on the second electrode layer, so that each of the second sensing elements can correspondingly abut against the body of one of the first sensing elements, thereby achieving a tighter structural connection of the pressure sensing layer, thereby making the pressure sensor have more stable sensing performance.

[0094] In one embodiment, Figure 6 The process of the pressure sensor design method in the embodiment of the present invention is as follows Figure 5 ,like Figure 6 As shown, the pressure sensor design method also includes the following steps:

[0095] In step S510 , a plurality of first sensing elements distributed at intervals of one to one are installed on the first electrode layer, and a plurality of second sensing elements distributed at intervals of one to one are installed on the second electrode layer.

[0096] Step S520, the step of alternately plugging the first sensor element and the second sensor element includes: alternately plugging a plurality of the first sensor elements and a plurality of the second sensor elements in sequence.

[0097] The first sensor and the second sensor may be in the shape of a long plate, a rectangular parallelepiped, a long cylinder, an ellipsoid or the like.

[0098] It should be further explained that the staggered plug-in setting means that the extension directions of the first sensing element and the second sensing element are different, and the first sensing element and the second sensing element are cross-connected; the multiple first sensing elements can be evenly spaced, and the multiple second sensing elements can be evenly spaced, so that the pressure sensor has a better pressure sensing layer structure, thereby improving the performance of the pressure sensor.

[0099] The above-mentioned pressure sensor design method installs multiple first sensing elements distributed at intervals on the first electrode layer, and installs multiple second sensing elements distributed at intervals on the second electrode layer; and the step of staggered plugging of the first sensing elements and the second sensing elements includes: staggered plugging of the multiple first sensing elements and the multiple second sensing elements in sequence, so that each of the second sensing elements can correspondingly abut against the body of one of the first sensing elements, thereby achieving a tighter structural connection of the pressure sensing layer, thereby making the pressure sensor have more stable sensing performance.

[0100] The pressure sensor design method provided by the present invention mounts multiple first sensing elements on a first electrode layer and multiple second sensing elements on a second electrode layer. The first and second sensing elements are interlaced and inserted, enabling the pressure sensor to sense external pressure through bending deformation of the first and / or second sensing elements. This method utilizes the structural bending of the first and second sensing elements to detect their structural deformation, replacing compression deformation with bending deformation to achieve higher sensor sensitivity, thus resolving the issue of low sensor sensitivity.

[0101] The technical features of the above embodiments can be combined arbitrarily. To make the description concise, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0102] The above embodiments merely illustrate several implementation methods of the present application. While the descriptions are relatively specific and detailed, they should not be construed as limiting the scope of the patent application. It should be noted that a person of ordinary skill in the art may make various modifications and improvements without departing from the spirit of the present application, all of which fall within the scope of protection of the present application. Therefore, the scope of protection of the present patent application shall be determined by the appended claims.

Claims

1. A pressure sensor (100), comprising a first electrode layer (10), a pressure sensing layer (20), and a second electrode layer (30) stacked in layers; characterized in that: The pressure sensing layer (20) includes a plurality of first sensing elements (21) and a plurality of second sensing elements (22), wherein the plurality of first sensing elements (21) are spaced apart and connected to the first electrode layer (10), and the plurality of second sensing elements (22) are spaced apart and connected to the second electrode layer (30); the first sensing elements (21) and the second sensing elements (22) are interlaced and arranged, and the pressure sensor (100) is capable of sensing external pressure through bending deformation of the first sensing elements (21) and / or the second sensing elements (22).

2. The pressure sensor (100) according to claim 1, characterized in that The first sensing element (21) is inclined to the first electrode layer (10), and the second sensing element (22) is orthogonal to the second electrode layer (30).

3. The pressure sensor (100) according to claim 2, characterized in that At least one first sensing element (21) among the plurality of first sensing elements (21) abuts against the body of the second sensing element (22) at an end relatively far from the first electrode layer (10); At least one second sensing element (22) among the plurality of second sensing elements (22) abuts against the body of the first sensing element (21) at an end relatively far away from the second electrode layer (30).

4. The pressure sensor (100) according to claim 3, characterized in that The number of the first sensing elements (21) is less than the number of the second sensing elements (22), and each of the second sensing elements (22) can correspondingly abut against a body portion of one of the first sensing elements (21).

5. The pressure sensor (100) according to claim 1, characterized in that The pressure sensor (100) further comprises two wires (40), wherein the two wires (40) are respectively connected to the first electrode layer (10) and the second electrode layer (30).

6. The pressure sensor (100) according to claim 1, characterized in that The pressure sensor (100) is a capacitive pressure sensor: the first sensing element (21) and the second sensing element (22) are both insulating elements; or, The pressure sensor (100) is a resistive pressure sensor: the first sensing element (21) and the second sensing element (22) are both resistive elements.

7. The pressure sensor (100) according to claim 1, characterized in that The length of the second electrode layer (30) is greater than the length of the first electrode layer (10); or, The length of the first electrode layer (10) is greater than the length of the second electrode layer (30).

8. The pressure sensor (100) according to claim 1, characterized in that The spacing distances between adjacent second sensing elements (22) are equal; and the length difference between the second electrode layer (30) and the first electrode layer (10) is greater than the spacing distance between adjacent second sensing elements (22).

9. A pressure sensor design method, wherein the pressure sensor design method is applied to a pressure sensor; the pressure sensor comprises a first electrode layer and a second electrode layer stacked together; characterized in that: The pressure sensor design method comprises: installing a plurality of first sensing elements on the first electrode layer and installing a plurality of second sensing elements on the second electrode layer; The first sensing element and the second sensing element are interlaced and connected, so that the pressure sensor can sense external pressure through the bending deformation of the first sensing element and / or the second sensing element.

10. The pressure sensor design method according to claim 9, wherein: The step of interlacing the first sensing element and the second sensing element comprises: At least one of the plurality of first sensing elements is brought into contact with the body of the second sensing element at an end relatively far from the first electrode layer, and at least one of the plurality of second sensing elements is brought into contact with the body of the first sensing element at an end relatively far from the second electrode layer.

11. The pressure sensor design method according to claim 9, wherein: The steps of installing multiple first sensing elements on the first electrode layer and installing multiple second sensing elements on the second electrode layer include: installing multiple first sensing elements on the first electrode layer that are inclined and intersecting with the first electrode layer, and installing multiple second sensing elements on the second electrode layer that are orthogonal to the second electrode layer.

12. The pressure sensor design method according to claim 11, wherein: The step of installing a plurality of first sensing elements on the first electrode layer and obliquely intersecting the first electrode layer, and installing a plurality of second sensing elements on the second electrode layer and orthogonal to the second electrode layer comprises: installing a plurality of first sensing elements on the first electrode layer; A plurality of second sensing elements, the number of which is greater than the number of the first sensing elements, is mounted on the second electrode layer.

13. The pressure sensor design method according to claim 9, wherein: The step of installing a first sensing element on the first electrode layer and installing a second sensing element on the second electrode layer comprises: A plurality of first sensing elements distributed at intervals of one to one are mounted on the first electrode layer, and a plurality of second sensing elements distributed at intervals of one to one are mounted on the second electrode layer; and The step of interlacing the first sensing element and the second sensing element includes interlacing the plurality of the first sensing elements and the plurality of the second sensing elements in sequence.

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