High-power tolerance temperature compensation type surface acoustic wave filter structure and preparation method

A filter structure, surface acoustic wave technology, applied in the direction of electrical components, impedance networks, etc., can solve the problems of insufficient heat dissipation of the TCSAW filter chip, metal film protrusions or holes, complex alloy film process, etc., to improve power tolerance Performance, strong power capacity, better effect of square coefficient

CN111277241APending Publication Date: 2020-06-12SHOULDER ELECTRONICS CO LTD
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Patent Information

Authority / Receiving Office
CN · China
Current Assignee / Owner
Publication Date
2020-06-12

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Abstract

The invention discloses a high-power tolerance temperature compensation type surface acoustic wave filter structure and a preparation method, and relates to the technical field of information electronic materials. The structure comprises a piezoelectric substrate, a composite electrode layer, a temperature compensation layer and a heat conduction layer in sequence from bottom to top; wherein the composite electrode layer sequentially comprises a first electrode priming layer, a first electrode main body layer, a second electrode priming layer, a second electrode main body layer and an electrode antioxidant layer from bottom to top; the composite electrode layer provided by the invention has relatively good stress migration resistance and low resistance; the power tolerance performance of the TCSAW filter is improved; therefore, the TCSAW filter has the advantages of small insertion loss, better rectangular coefficient and higher quality factor. The composite electrode layer is subjected to annealing treatment, crystal defects in the electrode can be effectively reduced, the conductivity of the composite electrode layer is improved, and the manufacturing method disclosed by the invention is easy to implement and popularize on a large scale, and has important practical significance for improving the power tolerance of the TCSAW filter.
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Description

technical field

[0001] The invention relates to the technical field of information electronic materials, in particular to a structure and a preparation method of a temperature-compensated surface acoustic wave filter with high power tolerance. Background technique

[0002] Surface Acoustic Wave (SAW) filters have the advantages of small size, low cost, excellent passband selectivity, and good consistency. They play the role of signal transmission and reception in mobile communication systems and are widely used in mobile communication in the device. With the continuous evolution of 4G to 5G networks and people's urgent demand for high data transmission rates, SAW filter technology is developing in several directions such as high frequency, high power tolerance, high temperature stability, and small size. At the same time, SAW filters are also facing new challenges.

[0003] Commonly used piezoelectric substrate materials such as LiTaO 3 or LiNbO 3 The temperature stabili...

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Embodiment Construction

[0037] The specific embodiments of the present invention will be further described below in conjunction with the accompanying drawings.

[0038] combine Figure 1-Figure 4 As shown, the application discloses a high power tolerance temperature-compensated surface acoustic wave filter structure, such as figure 1 As shown, the structure includes a piezoelectric substrate 1 , a composite electrode layer 9 , a temperature compensation layer 7 and a heat conduction layer 8 from bottom to top.

[0039] The composite electrode layer 9 is arranged on the piezoelectric substrate 1, and the material of the piezoelectric substrate 1 is LiTaO 3 or LiNbO 3 , the tangential direction of the piezoelectric substrate 1 is arbitrary, including but not limited to 128°YX-LiNbO 3 , 5°YX-LiNbO 3 and 42°YX-LiTaO 3 .

[0040]The composite electrode layer 9 includes the first electrode underlying layer 2 , the first electrode main layer 3 , the second electrode underlying layer 4 and the second e...