Photoluminescence detection device and detection method
By designing a photoluminescence detection device for multi-wavelength light source group and multi-camera imaging group, the problem that the prior art cannot detect all wavelengths and multiple samples of all materials in solar cell samples at the same time is solved, and efficient and automated detection capabilities are achieved, which is suitable for large-scale production needs.
Patent Information
- Application Number
- CN202010185325.7
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- Filing Date
- 2020-03-17
- Publication Date
- 2025-04-01
- Estimated Expiration
- 2040-03-17
AI Technical Summary
The existing photoluminescence detection devices cannot detect all wavelengths of all materials in solar cell samples at one time, and cannot detect multiple samples quickly at the same time, resulting in insufficiency of detection and inability to meet the needs of large-scale production.
A photoluminescence detection device is designed, including a platform, a light source group and an imaging group. The light source group is equipped with multiple light sources of different wavelengths, the imaging group is equipped with multiple cameras and filters, and multiple sample slots are set on the platform to automatically detect and replace samples through transmissions.
It realizes the detection of all wavelengths of all materials in a single sample and the imaging data of multiple samples simultaneously during the one-time irradiation imaging process, which improves detection efficiency and automation, and is suitable for industrial production applications.
Smart Images

Figure CN111341687B_ABST
Abstract
Description
Technical Field
[0001] The present invention relates to the technical field of photovoltaic detection equipment, and in particular to a photoluminescence detection device and a detection method. Background Art
[0002] With the rapid development of the photovoltaic industry, solar cells, as the most efficient products at present, are also accelerating the expansion of industrial production scale. In the production and preparation process of solar cells, further improving production efficiency, increasing the yield of battery products and reducing preparation costs have become the goals of the entire photovoltaic industry. However, a series of problems will arise in the production process of solar cells. For example, common gallium arsenide test samples will have material abnormalities, hidden cracks, surface contamination, excessive corrosion and poor electrodes. The above defects seriously limit the photoelectric conversion efficiency, yield and service life of solar cells. However, the problems of solar cell products currently cannot be quickly identified by the naked eye.
[0003] Solar cells are generally made of multiple single-junction structural layers stacked together, each of which is grown with different materials and has its own independent luminescence wavelength, such as the gallium arsenide sample to be tested. By imaging the photoluminescence of different materials, it is possible to specifically detect a certain structural layer in a multi-junction cell.
[0004] Photoluminescence detection technology is a new type of fast and non-destructive detection method, which is widely used in the detection of silicon wafers of solar cells and the production and preparation of solar cells. Photoluminescence detection technology has the following advantages: fast detection speed, which can realize full online detection; non-contact test detection, which can reduce the risk of mechanical damage and surface contamination; wide application range, the detection objects can cover from substrate materials to final products; many types of defects can be detected, including hidden cracks, fragments, material defects, impurity contamination, etc.
[0005] However, the existing photoluminescence detection device for solar cells can only detect one material in the solar cell in a targeted manner, that is, it can only detect a single wavelength at a time, and cannot quickly detect all wavelengths of all materials in the solar cell at the same time. Moreover, the existing photoluminescence detection device can only detect a single solar cell sample in one detection process, and the detection efficiency is low, which cannot meet the needs of large-scale production. Summary of the invention
[0006] 1. Technical issues to be resolved
[0007] In order to solve the technical problem that the existing photoluminescence detection device applicable to solar cells cannot detect all wavelengths of all materials in a single sample at one time and cannot detect multiple samples at one time, the present invention discloses a photoluminescence detection device and a detection method.
[0008] (II) Technical solution
[0009] One aspect of the present invention discloses a photoluminescence detection device for detecting a solar cell to be tested, comprising: a platform, a light source group and an imaging group. The solar cell to be tested is arranged on the platform; the light source group is arranged on a light source plane above the platform; and the imaging group is arranged above the light source plane.
[0010] According to an embodiment of the present invention, the imaging group is arranged on the center line of the platform, and the center line of the platform coincides with the center line of the light source plane.
[0011] According to an embodiment of the present invention, the photoluminescence detection device further includes: a transmission device, which is disposed below the platform and electrically connected to the platform.
[0012] According to an embodiment of the present invention, the platform further comprises: a plurality of sample slots, which are evenly distributed on the upper surface of the platform with the center of the platform as the center of the circle, and the sample slots are concavely arranged on the upper surface of the platform.
[0013] According to an embodiment of the present invention, the sample slot includes: a fixture and at least one vacuum adsorption hole, the fixture is arranged at the edge of the sample slot; and the at least one vacuum adsorption hole is evenly distributed on the bottom surface of the sample slot.
[0014] According to an embodiment of the present invention, the light source group comprises at least: a plurality of light sources, and the plurality of light sources are evenly distributed on the light source plane in a ring with the center of the light source plane as the center.
[0015] According to an embodiment of the present invention, the wavelengths of the multiple detection lights emitted by the multiple light sources are all different, and the multiple light sources include at least one white light source.
[0016] According to an embodiment of the present invention, the imaging group includes: a plurality of cameras, which are close to each other and arranged along the center line of the platform above the light source plane where the light source group is located.
[0017] According to an embodiment of the present invention, the imaging group further includes: a plurality of filters, each of the plurality of filters corresponds one-to-one to each of the plurality of cameras and is arranged on a lens of the corresponding camera.
[0018] According to an embodiment of the present invention, the photoluminescence detection device further comprises: a feeding part and a discharging part, wherein the feeding part is arranged on one side of the platform; and the discharging part is arranged on the other side of the platform relative to the feeding part.
[0019] According to an embodiment of the present invention, the photoluminescence detection device further includes: a controller, which is electrically connected to the platform, the light source group, and the imaging group respectively.
[0020] Another aspect of the present invention discloses a detection method using the above-mentioned photoluminescence detection device, which is used for detecting solar cells, including: a light source group emits detection light to multiple samples on a platform, and the multiple samples are irradiated by the detection light to generate output light; and an imaging group detects the output light for imaging; wherein the sample is a solar cell.
[0021] According to an embodiment of the present invention, before the imaging group detects the emergent light for imaging, it also includes: a feeding unit sets a sample in each of a plurality of sample slots of the platform; the feeding unit sends a detection instruction to the imaging group according to the acquired setting status of each of the plurality of sample slots; the imaging group detects the emergent light for imaging according to the received detection instruction.
[0022] According to an embodiment of the present invention, after the imaging group detects the emitted light for imaging, it also includes: a discharge unit removes the sample from each of the multiple sample slots of the platform; the discharge unit sends a feeding instruction to the feeding unit according to the obtained removal status of each of the multiple sample slots; and the feeding unit sets the sample to each of the multiple sample slots of the platform according to the feeding instruction.
[0023] According to an embodiment of the present invention, before the imaging group detects the emitted light for imaging, it also includes: the controller obtains the number n of multiple samples to be detected and the number m of multiple sample slots on the platform; and the imaging group obtains the number of imaging times x according to the received number n of multiple samples to be detected and the number m of multiple sample slots; wherein x=n / m, x is a positive integer.
[0024] (III) Beneficial effects
[0025] The present invention discloses a photoluminescence detection device and a detection method. The photoluminescence detection device realizes light excitation of multiple solar cell samples by configuring a light source group with multiple light sources; at the same time, by configuring multiple filters of different bands and corresponding multiple cameras to form an imaging group, it realizes taking pictures of multiple solar cell samples. Moreover, a platform with multiple sample slots is adopted, and multiple solar cell samples to be measured are selected by the transmission of the platform. Through the photoluminescence detection device, it is possible to simultaneously detect all wavelengths of all materials in a single sample and simultaneously detect imaging data of multiple samples in a one-time irradiation imaging process, further increasing the number of samples detected each time, and combining the design of the automatic feeding part and the discharging part, enhancing the detection capability (such as batch detection capability, etc.) and automation of the device, greatly improving the efficiency of sample detection. Finally, by adopting an LED light source as the excitation light source of the detection light of the light source group, replacing the traditional laser light source, the cost of the light source is reduced, which is conducive to the application and popularization of the photoluminescence detection device in the industrial production process. BRIEF DESCRIPTION OF THE DRAWINGS
[0026] Figure 1is a schematic diagram of the composition of a photoluminescence detection device according to an embodiment of the present invention;
[0027] Figure 2 is a schematic diagram of the imaging detection space composition of a photoluminescence detection device according to an embodiment of the present invention;
[0028] Figure 3 is a schematic diagram of a sample slot of a platform of a photoluminescence detection device according to an embodiment of the present invention;
[0029] Figure 4A is a schematic diagram of a top view of an imaging detection device according to an embodiment of the present invention;
[0030] Figure 4B is a schematic diagram of another top view angle of imaging detection of a photoluminescence detection device according to an embodiment of the present invention;
[0031] Figure 4C is another schematic diagram of a top view angle of imaging detection of a photoluminescence detection device according to an embodiment of the present invention;
[0032] Figure 5 4 is a flow chart of a detection method of a photoluminescence detection device according to an embodiment of the present invention. DETAILED DESCRIPTION
[0033] In order to make the objectives, technical solutions and advantages of the present invention more clearly understood, the present invention is further described in detail below in conjunction with specific embodiments and with reference to the accompanying drawings.
[0034] In the following embodiments, the photoluminescence detection device of the present invention can be used to detect samples to be tested, such as gallium arsenide triple-junction solar cells.
[0035] One aspect of the present invention discloses a photoluminescence detection device 100, such as Figure 1-4C As shown, the detection of solar cells includes: a platform 110, a light source group 200 and an imaging group 300,
[0036] Solar cells can be arranged on the surface of the platform 110 as test samples. The platform 110 can also provide an irradiation imaging area for a photoluminescence detection device. The irradiation imaging area is an area of the platform 110 that can be irradiated by the detection light emitted by the light source of the light source group 200. At the same time, the solar cells in the area can also be photographed and imaged by the imaging group 300 when they are excited by the detection light. For details, please refer to the following about Figure 4A-4C Description.
[0037] The light source group 200 is disposed on a light source plane 201 above the platform 110. The light source group 200 is used to emit detection light, so that when the detection light is irradiated to the solar cell, the solar cell generates excitation light (i.e., output light), so that it is captured and imaged by the imaging group 300 described below. The light source group 200 is disposed on a light source plane 201 above the platform 110 so that the irradiated imaging area of the platform 110 is completely covered by the detection light emitted by the light source group, so as to ensure detection efficiency.
[0038] The imaging group 300 is arranged above the light source plane 201. The imaging group 300 is used to capture the outgoing light generated by the above-mentioned solar cell excited by the detection light, and to perform imaging according to the outgoing light, and to process and feed back the imaging data. The imaging group 300 is arranged above the light source plane 201 to ensure that the imaging group 300 can capture all the outgoing light excited by each layer in the solar cell.
[0039] According to an embodiment of the present invention, Figure 1-Figure 3 As shown, the imaging group 300 is arranged on the center line of the platform 110, and the center line of the platform 110 coincides with the center line of the light source plane 201. When the entire surface of the platform is used as the irradiation imaging area, the center line of the platform 110, the center line of the irradiation imaging area, the center line of the imaging group 300, and the center line of the light source plane 201 where the light source group 200 is located are all OO', where O is the center of the irradiation imaging area on the platform, so that the detection light of the light source group 200 can better irradiate the irradiation imaging area on the platform 110, and the imaging group 300 can capture more comprehensive emitted light.
[0040] According to an embodiment of the present invention, Figure 1-Figure 3 As shown, the photoluminescence detection device 100 also includes: a transmission device 120, which is arranged below the platform 110 and is electrically connected to the platform 110. An imaging irradiation area is arranged on the platform 110, and a solar sample is placed in the imaging irradiation area on the surface of the platform 110 for detection. At this time, in order to ensure that the samples to be detected outside the imaging irradiation area can be replaced in time with the detected samples within the imaging irradiation area, the platform 110 needs to be rotated, stepped, etc. The rotation of the platform 110 is based on the center line OO' of the imaging irradiation area as the axis, and rotates in the plane where the platform 110 is located and is perpendicular to the axis. The transmission device 120 can realize the rotation control of the platform by being electrically connected to the platform 110, so as to realize the rotation of the platform 110, and the installation and removal of the sample from the platform 110, etc.
[0041] When the irradiated imaging area is a part of the surface of the platform, the platform 110 can be driven by rotating or stepping, and the software method can accurately control the driving of the platform 110, and the samples to be tested are sequentially driven to the irradiated imaging area to complete the photoluminescence detection imaging. The detection results of each sample are automatically imported into the database, thereby realizing streamlined operation.
[0042] According to an embodiment of the present invention, Figure 3 As shown, in order to meet the needs of large-scale production, the platform 110 also includes: a plurality of sample slots, the plurality of sample slots are evenly distributed on the upper surface of the platform 110 with the center of the platform 110 as the center of the circle, and the sample slots are concavely arranged on the upper surface of the platform 110. Specifically, when the entire surface of the platform is used as the irradiation imaging area, the plurality of sample slots are evenly distributed on the irradiation imaging area with the center O of the irradiation imaging area as the center of the circle. The plurality of sample slots can be 4, such as Figure 3-4C As shown, the first sample slot 111, the second sample slot 112, the third sample slot 113 and the fourth sample slot 114, the sample slots are used to set samples, that is, the solar cells to be tested. Each sample slot can be provided with at least one sample, and the shape of the sample slot can match the shape of the sample. The platform 110 has multiple sample slots, and multiple samples can be loaded at the same time. The number of sample slots can be determined according to actual needs. Using the platform 110 with multiple sample slots, one or more solar cell samples to be tested are sent to the irradiation imaging area for detection and imaging through the transmission or rotation of the platform 110. Therefore, the photoluminescence detection device can realize the simultaneous detection of all wavelengths of all materials in a single sample in a one-time irradiation imaging process, and the simultaneous detection of imaging data of multiple samples.
[0043] According to an embodiment of the present invention, the sample slot includes: a clamp and at least one vacuum adsorption hole, the clamp is arranged at the edge of the sample slot; and is used to fix the sample to be tested. For example, the clamp can be a spring sheet with one end fixed to the edge of the sample slot, and the spring sheet rotates with the fixed end as the axis, and the sample in the sample slot is fixed or released through the main body of the spring sheet. Therefore, there can be multiple clamps. In addition, the clamp can also realize the clamping of samples, for example, clamping the sample to be tested into the sample slot, and clamping the tested sample out of the sample slot.
[0044] At least one vacuum adsorption hole is evenly distributed on the bottom surface of the sample slot, that is, when there is only one vacuum adsorption hole, it is distributed at the center of the bottom surface of the sample slot; when there are multiple vacuum adsorption holes, they are evenly distributed on the bottom surface of the sample slot. The vacuum adsorption hole can be set on the bottom surface of the sample slot and penetrated through the platform 110. The vacuum adsorption hole is connected to the vacuum pump outside the platform 110. After the sample enters the sample slot, the vacuum adsorption hole can be evacuated by the vacuum pump to fix the sample in the sample slot to meet the need of fixing the sample to be tested. Therefore, with the help of the above-mentioned clamp and at least one vacuum adsorption hole, the sample slot can meet the fixing requirements of both hard film samples and soft film samples.
[0045] According to an embodiment of the present invention, the light source group 200 includes at least: a plurality of light sources, and the plurality of light sources are evenly distributed on the light source plane 201 in a ring with the center of the light source plane as the center. Figure 2 shown.
[0046] In order to achieve light excitation of the solar cell, since the materials of each layer in the sample to be tested are different, multiple LED light sources of different wavelengths are used as excitation light sources to form a light source group 200. The light source group 200 can be composed of multiple high-brightness, high-concentration LED light sources with different wavelengths, which are evenly fixed in a ring shape on the light source plane 201 above the sample to be tested, that is, the light emission direction of each individual LED light source can be at an angle θ with the center line OO' of the irradiated imaging area, so that the surface of the sample to be tested obtains uniform illumination. Each LED light source can also be composed of a collection of multiple sub-LED lights of the same wavelength. Therefore, the effect of LED light source replacing laser light source is achieved.
[0047] According to one embodiment of the present invention, Figure 2 As shown, the light source group 200 provided for the irradiation imaging area of the platform 110 includes a first light source 210, a second light source 220, a third light source 230 and a fourth light source 240, which are uniformly distributed on the light source plane 201 in a ring shape with a certain inclination angle θ, taking the center line OO' of the irradiation imaging area as a reference standard, so that the surface of the sample to be tested obtains uniform illumination. It should be understood by those skilled in the art that the number of light sources in the light source group 200 is not limited to 4 groups, and can be added or reduced according to actual needs. Among them, the first light source 210 emits a first detection light corresponding to the first layer of the solar cell; the second light source 220 emits a second detection light corresponding to the second layer of the solar cell; the third light source 230 emits a third detection light corresponding to the third layer of the solar cell; and the fourth light source 240 emits a fourth detection light corresponding to the surface of the solar cell.
[0048] According to the embodiments of the present disclosure, the gallium arsenide triple junction solar cell is a stacked solar cell structure, which includes, from bottom to top: back electrode, bottom cell, lower tunnel junction, middle cell, upper tunnel junction, and top cell. Due to the different materials of each structural layer and the influence of various properties such as transparency, the structural layers that different wavelengths of detection light can penetrate are also different. For example, a first detection light of a first wavelength sent by a first light source passes through the surface of a top cell and is incident on the top cell, and then the first output light is returned from the top cell to reflect the material properties of the top cell, that is, the first layer is the top cell layer; when a second detection light of a second wavelength sent by a second light source passes through the top cell and the upper tunnel junction and is incident on the middle cell, and then the second output light is returned from the middle cell to reflect the material properties of the middle cell, that is, the second layer is the middle cell layer; when a third detection light of a third wavelength sent by the light source passes through the top cell, the upper tunnel junction, the middle cell, and the lower tunnel junction and is incident on the bottom cell, and then the third output light is returned from the bottom cell to reflect the material properties of the bottom cell, that is, the third layer is the lower cell layer; when a fourth detection light of a fourth wavelength sent by the light source is irradiated on the surface of the top cell, then the fourth output light is returned from the surface of the top cell to reflect the surface morphology and luminous intensity of the top cell and other properties, and the surface of the top cell is the surface of the solar cell.
[0049] According to an embodiment of the present invention, the wavelengths of the multiple detection lights emitted by the multiple light sources are all different, and the multiple light sources include at least one white light source.
[0050] According to the above embodiment, the absorption wavelength of the top battery in the sample to be tested is short, and the corresponding first light source 210 is a short-wave LED light source. From the top battery to the bottom battery, the absorption wavelength increases successively, and the wavelength of the corresponding excitation LED light source also becomes longer successively. The wavelength of the LED light source used to excite the lower battery needs to exceed the absorption limit wavelength of the upper battery material to avoid being absorbed by the upper battery before reaching the lower battery. In other words, when the wavelength of the first detection light of the first light source 210 is λ1, when the wavelength of the second detection light of the second light source 220 is λ2, and when the wavelength of the third detection light of the third light source 230 is λ3, then λ1<λ2<λ3. In addition, in the actual production and analysis process, it is often necessary to compare and analyze the photoluminescence photos with the real objects, such as comparing the relationship between the surface morphology of the sample and the distribution of the luminous intensity, so the fourth detection light of the fourth light source 240 is white light, and the fourth light source 240 is a light source composed of white light LED lamps.
[0051] Therefore, the photoluminescence detection device realizes light excitation of multiple solar cell samples by configuring a light source group having multiple light sources. The photoluminescence detection device can realize simultaneous detection of all wavelengths of all materials in a single sample and simultaneous detection of imaging data of multiple samples in a one-time irradiation imaging process.
[0052] According to an embodiment of the present invention, the imaging group 300 includes: a plurality of cameras, a first camera 310, a second camera 320, a third camera 330 and a fourth camera 340, and the plurality of cameras are close to each other and arranged above the light source plane 201 where the light source group 200 is located along the center line of the platform 110. Specifically, the imaging group 300 is arranged above the light source group 200 along the center line OO' of the irradiation imaging area on the platform 110, so as to ensure that the plurality of samples on the irradiation imaging area can be photographed and imaged at one time by the plurality of cameras at the same time, without causing omission of samples or poor imaging data.
[0053] According to an embodiment of the present invention, in order to realize photoluminescence imaging of different structural layers in the sample to be tested, the imaging group 300 also includes: multiple filters, each of the multiple filters corresponds to each camera in the multiple cameras one by one, and is set on the lens of the corresponding camera. Each camera has a lens, and a filter is set at a certain distance in front of the lens of the camera body. The setting method of the filter can specifically refer to the setting method of the ordinary UV mirror and the camera lens. On the premise of protecting the camera lens, each filter can also be used to eliminate the interference of other non-photoluminescence signals in the environment and improve the accuracy of detection. The present invention adopts a combination of multiple cameras and filters. Different camera and filter combinations correspond to different structural layers in the sample to be tested, and a bandpass filter of the corresponding wavelength and a camera that can take pictures and images of the light in this band are selected according to the material of the structural layer. The camera shooting parameters can be set according to the luminescence intensity of the structural layer to obtain the best detection effect.
[0054] Therefore, by configuring multiple filters of different wavelength bands and corresponding multiple cameras to form an imaging group, multiple solar cell samples can be photographed. The photoluminescence detection device can detect all wavelengths of all materials in a single sample and simultaneously detect imaging data of multiple samples in a one-time irradiation imaging process.
[0055] According to an embodiment of the present invention, for a triple-junction solar cell, the first light source 210 of the light source group 200 is a blue light source, which is composed of a plurality of blue LED lamps with a wavelength of 460nm, and the corresponding first filter is a bandpass filter that passes light with a wavelength of 630nm-670nm, and the corresponding first camera 310 is a red light camera, and this configuration is used for the detection and imaging of the top battery in the sample. In addition, the first light source 220 of the light source group 200 is a red light source, which is composed of a plurality of red LED lamps with a wavelength of 660nm, and the corresponding second filter is a bandpass filter that passes light with a wavelength of 850nm-890nm, and the corresponding second camera 320 is an infrared camera, and this configuration is used for the detection and imaging of the middle battery. Among them, for the second light source 220 selected for the above-mentioned middle battery, it is required that the corresponding second detection light cannot excite the top battery, but can pass through the top battery to directly excite the middle battery to form photoluminescence. Secondly, the third light source 230 of the light source group 200 is an infrared light source, which is composed of several infrared lamps with a wavelength of 940nm. The corresponding third filter is a bandpass filter that passes light with a wavelength greater than 900nm. The corresponding third camera 330 is an infrared camera. This configuration is used for the detection and imaging of the bottom battery. Among them, for the third light source 230 selected for the bottom battery, it is required that the corresponding third detection light cannot excite the top battery and the middle battery, but can pass through the top battery and the middle battery to directly excite the bottom battery to form photoluminescence. Finally, for the surface morphology of the triple-junction solar cell, the fourth light source 240 of the light source group 200 is a white light source, which is composed of several white light LED lamps. The corresponding fourth camera 340 can be used without a filter for the detection and imaging of the surface morphology and defects of the battery. Among them, the angle between the fourth detection light of the fourth light source 240 and the surface of the platform 110 where the irradiation imaging area is located should be as small as possible to reduce the interference reflected light entering the fuselage to affect the detection results.
[0056] According to an embodiment of the present invention, Figure 1 As shown, the photoluminescence detection device 100 also includes: a feed part 130 and a discharge part 140. The feed part 130 is arranged on one side of the platform 110, and is used to continuously load new samples to be tested onto the platform 110, enhance detection automation, meet the needs of continuous production, and improve detection efficiency. The discharge part 140 is arranged on the other side of the platform 110 relative to the feed part 130, and is used to continuously remove the tested samples from the platform 110, enhance detection automation, meet the needs of continuous production, and improve detection efficiency. Specifically, an automatic feeding device can be arranged on the feed part 130, which is used to take the samples to be tested from the assembly line and place them in the corresponding sample slots of the platform 110. The automatic feeding device can specifically be a manipulator, etc. Similarly, the discharge part 140 can be provided with an automatic discharge device, which is used to take the tested samples from the sample slots of the platform 110 and place them back on the assembly line.
[0057] According to an embodiment of the present invention, the photoluminescence detection device 100 further includes: a controller 400, which is electrically connected to the platform 110, the light source group 200, and the imaging group 300. The controller 400 can be used to set the detection parameters of the entire photoluminescence detection device 100, and to control the platform 110, the light source group 200, and the imaging group 300 to realize the above-mentioned photo-imaging detection, analyze and store the imaging detection data, and present it to the user using its own graphical user interface.
[0058] According to an embodiment of the present invention, Figure 4A-4C As shown, the irradiation imaging area of the present invention is further described as follows: Figure 4A As shown, the irradiated imaging area can be the entire platform 110. At this time, the center line of the platform 110, the center line of the irradiated imaging area, the center line of the imaging group 300, and the center line of the light source plane 201 where the light source group 200 is located are all OO', and O is the center of the irradiated imaging area on the platform. Figure 4B As shown, the irradiation imaging area may be a partial area on the platform 110. When the platform 110 transfers the second sample slot 112 of the sample to be detected to the corresponding irradiation imaging position by rotating or stepping, the irradiation imaging area is the surface portion of the platform 110 corresponding to the second sample slot 112. Figure 4C As shown, the sample slots can be arranged as sample slot groups, each sample slot group having a plurality of sample slots, and the plurality of sample slot groups are evenly distributed on the surface of the platform 110, such as the first sample slot group 101, the second sample slot group 102, the third sample slot group 103, and the fourth sample slot group 104, etc., wherein the second sample slot group 102 can include: the first sample slot 111, the second sample slot 112, the third sample slot 113, and the fourth sample slot 114. When the platform 110 transfers the second sample slot group 102 of the plurality of samples to be detected to the corresponding irradiation imaging position by rotating or stepping, the irradiation imaging area is the surface portion of the platform 110 corresponding to the second sample slot 102, so it is also possible to simultaneously detect a plurality of samples at one time.
[0059] Another aspect of the present invention discloses a detection method using the above-mentioned photoluminescence detection device for detecting solar cells, such as Figure 5 As shown, including:
[0060] S510: The light source group emits detection light to the multiple samples on the platform, and the multiple samples are irradiated by the detection light to generate output light. The light source group can emit detection light, and the detection light is used to irradiate the multiple samples on the platform to achieve one-time irradiation of the multiple samples and multiple materials in multiple structural layers of each of the multiple samples.
[0061] S520: The imaging group detects the emitted light for imaging, wherein the sample is a solar cell, and the sample generates emitted light when irradiated by the detection light. The imaging group can capture the emitted light generated by the material in the structural layer of the sample when the detection light is irradiated, and realizes one-time photographic detection and imaging of multiple materials in multiple structural layers of each sample in the multiple samples.
[0062] According to an embodiment of the present invention, before the imaging group detects the emitted light for imaging, it also includes: the feeding part sets a sample in each of the multiple sample slots of the platform. The feeding part is provided with an automatic feeding device (such as a manipulator) that can take the sample to be tested from the assembly line and place it in the corresponding sample slot of the platform, so as to realize the continuous loading of new samples to be tested, enhance the detection automation, meet the needs of continuous production, and improve the detection efficiency.
[0063] The feeding unit sends a detection instruction to the imaging group according to the setting status of each sample slot in the obtained multiple sample slots; corresponding to the above setting of the sample in the sample slot, after the sample is executed by the setting instruction, it is necessary to confirm whether there is a sample in the sample slot, so as to reflect the setting status of the sample slot. When the setting status is that there is a sample in the sample slot, the detection instruction can correspond to 1, and the detection instruction 1 can be configured to control the operation of the platform, imaging group and light source group; similarly, when the setting status is that there is no sample in the sample slot, the detection instruction can correspond to 0, and the detection instruction 0 can be configured to control the shutdown or stop of the platform, imaging group and light source group. Specifically, pressure sensors or infrared sensors can be set in multiple sample slots, and the detection of the setting status can also be directly realized by detecting the adsorption force of the vacuum pump or the fixing force of the clamp. Make the overall automatic performance higher.
[0064] The imaging group detects the emitted light for imaging according to the received detection instruction. According to the above detection instruction, the imaging group can control multiple cameras of the imaging group to take one-time photos of multiple samples at the same time to obtain detection data.
[0065] According to an embodiment of the present invention, after the imaging group detects the emitted light for imaging, it also includes: a discharging unit removes the sample from each of the multiple sample slots of the platform. The discharging unit can be provided with an automatic discharging device for taking the measured sample from the sample slot of the platform and placing it back on the assembly line, so as to realize the continuous removal of the measured sample, enhance the detection automation, meet the needs of continuous production, and improve the detection efficiency.
[0066] The discharging unit sends a feeding instruction to the feeding unit according to the removal status of each sample slot in the obtained multiple sample slots. Corresponding to the above-mentioned setting state, when removing a sample in a sample slot, after the sample executes the removal instruction, it is necessary to confirm whether there is a sample in the sample slot, so as to reflect the removal status of the sample slot. When the removal status is that there is a sample in the sample slot, the detection instruction can correspond to 2, and the detection instruction 2 can be configured to control the automatic discharging device so that the automatic discharging device removes the sample in the sample slot again; similarly, when the removal status is that there is no sample in the sample slot, the detection instruction can correspond to 0, and the detection instruction 0 can be configured to control the feeding unit to feed, and the detection instruction 0 is the feeding instruction corresponding to the feeding unit. Specifically, pressure sensors or infrared sensors can be set in multiple sample slots, and the detection of the setting status can also be directly realized by detecting the adsorption force of the vacuum pump or the fixing force of the clamp. Make the overall automatic performance higher.
[0067] The feeding unit sets samples in each of the multiple sample slots of the platform according to the feeding instructions. When the detection instruction corresponding to the removal state is 0, the detection instruction 0 needs to be used as the feeding instruction, and the feeding unit controls the placement of new samples to be tested in the empty sample slots through the automatic feeding device.
[0068] According to an embodiment of the present invention, before the imaging group detects the emitted light for imaging, it also includes: the controller obtains the number n of multiple samples to be detected and the number m of multiple sample slots on the platform; and the imaging group obtains the number of imaging times x according to the received number n of multiple samples to be detected and the number m of multiple sample slots; wherein x=n / m, and x is a positive integer. Since the camera is a high-loss product, it is necessary to consider the maintenance cost of the camera. The imaging group can prevent the camera from erroneously triggering photo detection by accurately calculating x, thereby extending the life of the camera and reducing maintenance costs. Wherein, when x′=n / m is a non-integer, for example, x′=41.1, then x is equal to the integer value x" of x′ plus 1, x=x"+1, that is, x"=41, x=41+1=42. Therefore, it can be ensured that each sample can be detected.
[0069] The specific embodiments described above further illustrate the objectives, technical solutions and beneficial effects of the present invention in detail. It should be understood that the above description is only a specific embodiment of the present invention and is not intended to limit the present invention. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present invention should be included in the protection scope of the present invention.
Claims
1. A photoluminescence detection device for detecting solar cells, characterized in that: include: A platform, on which the solar cell to be tested is arranged; A light source group, wherein the light source group is arranged on a light source plane above the platform; an imaging group, the imaging group being arranged above the light source plane, Wherein, the light source group at least includes: A plurality of light sources, wherein the plurality of light sources are evenly distributed on the light source plane in a ring with the center of the light source plane as the center, the wavelengths of the plurality of detection lights emitted by the plurality of light sources are all different, and the plurality of light sources include at least one white light source; The platform is provided with an irradiation imaging area, and the platform further comprises: A plurality of sample slots are evenly distributed on the irradiated imaging area with the center of the irradiated imaging area as the center of the circle, and the sample slots are concavely arranged on the upper surface of the platform.
2. The photoluminescence detection device according to claim 1, characterized in that: The imaging group is arranged on the center line of the platform, and the center line of the platform coincides with the center line of the light source plane.
3. The photoluminescence detection device according to claim 1, characterized in that: The photoluminescence detection device also includes: A transmission device is arranged below the platform and is electrically connected to the platform.
4. The photoluminescence detection device according to claim 3, characterized in that: The sample tank comprises: A clamp, wherein the clamp is arranged at the edge of the sample slot; At least one vacuum adsorption hole is evenly distributed on the bottom surface of the sample slot.
5. The photoluminescence detection device according to claim 1, characterized in that: The imaging group includes: A plurality of cameras are arranged close to each other and along the center line of the platform above the light source plane where the light source group is located.
6. The photoluminescence detection device according to claim 5, characterized in that: The imaging group also includes: A plurality of filters, each of the plurality of filters corresponds to each of the plurality of cameras one by one and is arranged on a lens of the corresponding camera.
7. The photoluminescence detection device according to claim 1, characterized in that: The photoluminescence detection device also includes: A feeding part, the feeding part is arranged on one side of the platform; A discharging portion is arranged at the other side of the platform relative to the feeding portion.
8. The photoluminescence detection device according to claim 1, characterized in that: The photoluminescence detection device also includes: A controller is electrically connected to the platform, the light source group and the imaging group respectively.
9. A detection method using the photoluminescence detection device according to any one of claims 1 to 8, for detecting solar cells, characterized in that: include: The light source group emits detection light to the multiple samples on the platform, and the multiple samples are irradiated by the detection light to generate output light; as well as The imaging group detects the emitted light to perform imaging; Wherein, the sample is a solar cell.
10. The detection method according to claim 9, characterized in that: Before the imaging group detects the emitted light for imaging, the method further includes: The feeding part sets a sample into each of the plurality of sample slots of the platform; The feeding unit sends a detection instruction to the imaging group according to the acquired setting status of each sample slot in the plurality of sample slots; The imaging group detects the emitted light to perform imaging according to the received detection instruction.
11. The detection method according to claim 10, characterized in that: After the imaging group detects the emitted light to perform imaging, the method further includes: The discharging unit removes the sample from each sample slot of the plurality of sample slots of the platform; The discharging unit sends a feeding instruction to the feeding unit according to the obtained removal status of each sample slot in the plurality of sample slots; The feeding section sets a sample into each of the plurality of sample wells of the platform according to the feeding instruction.
12. The detection method according to claim 9, characterized in that: Before the imaging group detects the emitted light for imaging, the method further includes: The controller obtains the number n of the plurality of samples to be detected and the number m of the plurality of sample slots of the platform; and The imaging group obtains the imaging times x according to the number n of the received samples to be detected and the number m of the received sample slots; wherein x=n / m, and x is a positive integer.
Citation Information
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