Sample holders for charged particle microscopy

Abstract

The present disclosure describes a sample holder for a charged particle microscope, comprising: a holder having a groove for releasably receiving a sample carrier with a sample therein; and at least one fixing element connectable to the holder body for fixing the sample carrier in the groove of the holder body. As described in the present invention, the fixing element comprises a clamping member movably connected to the holder body, wherein the clamping member can be in a closed position and an open position, wherein in the open position, the sample carrier can be placed in the groove, and in the closed position, the sample carrier can be locked in the groove. Thereby, the sample carrier can be more reliably mounted on the sample holder.

Description

Technical Field

[0001] The present invention relates to a sample holder for a charged particle microscope (such as a transmission electron microscope), the sample holder comprising: a holder body having a groove for releasably receiving a sample carrier carrying a sample therein; and at least one fixing element that can be connected to the holder body for fixing the sample carrier in the groove of the holder body. Background Art

[0002] In a transmission electron microscope (TEM), a parallel high-energy electron beam with an energy of, for example, 300 keV is emitted at the sample. As a result of the interaction between the electrons and the sample, the electrons in the beam will, for example, be deflected, release energy or be absorbed, and this will generate information about the sample. The information can be made visible by arranging the electron beam in the right way to impinge on, for example, a fluorescent screen and / or a CCD camera.

[0003] The sample can also be illuminated by a focused beam, which moves over the sample. In this operating mode of the TEM, position-dependent information in the form of so-called scanning transmission electron microscopy mode (STEM mode), secondary particles, such as secondary electrons and X-rays, is generated.

[0004] TEM samples need to be very thin, for example less than 100 nm, preferably less than 50 nm. Currently, sample thicknesses as small as about 15 nm can be used. In order to provide a small sample thickness, the sample is thinned before being studied in the TEM. As known to those skilled in the art, the sample is ion-milled to a desired thickness using a focused ion beam, and then the sample is transferred to the TEM. As known to those skilled in the art, thinning and transfer can include in-situ or ectopic sampling techniques.

[0005] For better handling and transport of such fragile items, the samples are usually mounted on so-called grids, for example before and after thinning. In situ sampling techniques can use so-called half-moon grids, where a bulk material is attached to the protruding elements of the grid and then thinned to the desired thickness using, for example, a focused ion beam (FIB). Once the sample has the desired thickness, the half-moon grid (including the sample) is transferred to the TEM, where the sample can then be studied. Ex situ sampling techniques can use a grid in the form of a thin circular foil, for example with a diameter of 2 to 5 mm and a thickness of 10 μm to 40 μm. The central part of such a foil is implemented as a gauze, whereby electrons can move through the sample and through the holes in the gauze without being absorbed by the material of the foil. In this technique, a sample is excavated from the material of interest, for example using a FIB. Once the desired thickness is reached, the sample is removed from the material and placed on the foil. The grid is then transferred to the TEM for further study.

[0006] In order to be able to manipulate the position of the sample relative to the beam, the grid is mounted to the outer end of the so-called TEM rod. The TEM rod is connected to a stage manipulator to impose the desired positional movement on the sample.

[0007] According to the known method, the grid carrying the sample is placed in the groove of the TEM rod, and then the grid is fixed to the TEM rod using a ring. Fixing a very fragile grid, which is only about ten micrometers thick, to the TEM rod is a relatively risky and complicated process. Placing the ring requires a lot of expertise and takes time. In this process, there is always the risk of the sample being damaged. Summary of the invention

[0008] The object is to improve this known method. In particular, the object is to improve the speed and / or reliability of this known method and to reduce the risk of the sample being damaged.

[0009] To this end, a sample holder for a charged particle microscope is provided. The sample holder may be a so-called TEM rod, comprising a holder body with a groove, such as an opening provided on an elongated rod. The groove is arranged to releasably accommodate a sample carrier, such as a grid, carrying a sample therein. The sample holder comprises at least one fixing element connected or at least connectable to the holder body for fixing the sample carrier in the groove of the holder body.

[0010] According to the present disclosure, the fixing element comprises a clamping member movably connected to the holder body. The clamping member can be in a closed position and an open position. In the open position, the clamping member is positioned so that the sample carrier can be placed in the groove. In the closed position, the clamping member is arranged to directly or indirectly lock the sample carrier in the groove.

[0011] A movable clamping member connected to the holder body allows an improved attachment of a sample carrier carrying the sample to the sample holder. Attachment can take place in a fast and reliable manner by moving the clamping member to the open position, placing the sample carrier in the recess and simply moving the clamping member to the closed position again. Since the clamping member is connected to the holder body, it is relatively easy to move the clamping member between the open position and the closed position, and the movement of the clamping member provides a reliable way of fixing the sample carrier in the sample holder. Thus, a method for reliably, securely and quickly mounting a sample carrier in a sample holder is obtained, by which the objects described herein are achieved.

[0012] Furthermore, the use of a movable clamping member provides the possibility of implementing the holder body in a very compact manner. A compact structure is beneficial because it allows, for example, tilting of the sample. Further, a compact structure facilitates, for example, determining large opening angles for EDX analysis.

[0013] Advantageous embodiments will be explained below.

[0014] In one embodiment, the clamping member is selected to be in an open position or a closed position by pivoting. Pivoting the clamping member allows a compact structure and easy handling of the clamping member. It is conceivable that the grid is placed on a horizontal surface of the holder body and the clamping member movable in the closed position holds the grid in place. This provides a compact structure that prevents so-called shadowing during research using TEM.

[0015] In one embodiment, the clamping member comprises a spring element. The spring element can provide a desired clamping force to the clamping member so that the sample carrier is securely held in place. In a further embodiment, the spring element is arranged to push the clamping member to reach the closed position. In this way, the clamping member is pushed towards the closed position, holding the sample carrier in place by default. Thus, the reliability of the installation is increased.

[0016] It is conceivable that the clamping member may be actuated by an actuator member.The actuation member may be actuated, for example, automatically or by a user of the electron microscope.

[0017] In one embodiment, the actuator member is arranged to push at least the clamping member to reach the open position. In combination with a spring element pushing against the clamping member to reach the closed position, this provides a method of quickly, reliably and easily mounting a sample carrier to a sample holder.

[0018] In one embodiment, the clamping member arrangement may directly bring the sample carrier into the closed position. In this way, a compact and simple structure with few components is obtained.

[0019] In one embodiment, the sample holder comprises at least one further fixing element for fixing the sample carrier in the recess of the holder body. By using a further fixing element, a more secure mounting is possible. Note that the fixing element and the further fixing element may be different with respect to each other. For example, the fixing element may be a pivotable clamping member, while the further fixing element may for example be a spring element. However, in one embodiment, the fixing element and the further fixing element are substantially similar to each other.

[0020] In particular, the further fixing element is embodied as a clamping member according to one or more embodiments described herein.

[0021] In one embodiment, the further fixing element and the clamping member are arranged substantially on opposite sides of the recess. This allows the fixing of the sample carrier in the recess to be determined from opposite sides of the sample carrier, resulting in a more reliable and secure mounting in the recess.

[0022] According to one aspect, there is provided a charged particle microscope for examining a sample, comprising:

[0023] - an optical column comprising a charged particle source and an illuminator for directing a beam of charged particles emitted by said charged particle source onto a sample;

[0024] - a sample holder according to the present disclosure as described above, used to hold a sample carrier carrying the sample therein, and placed downstream of the illuminator;

[0025] - detector means for detecting emission from a sample in response to the incidence of charged particles emitted by said charged particle source; and

[0026] - A control unit for performing the operation of the charged particle microscope.

[0027] The advantages of such a charged particle microscope have already been explained above with respect to the sample holder.

[0028] In one embodiment, the charged particle microscope comprises an actuator member for actuating the clamping member. In particular, the actuator member is arranged to push the clamping member to reach the open position. In one embodiment, the clamping member is arranged to be pushed against to reach the closed position. In this way, the actuator member can be used to push the clamping member to reach the open position, and to move the actuator member away from the clamping member to ensure that the clamping member moves to the closed position. This allows the sample carrier to be easily and reliably placed in the sample holder.

[0029] According to one aspect, there is provided a method for placing a sample carrier in a sample holder as described herein, wherein the method comprises the following steps:

[0030] - moving the clamping member to the open position;

[0031] - placing the sample carrier in the recess of the sample holder;

[0032] - moving the clamping member into the closed position.

[0033] In one embodiment, the sample carrier is placed in the recess of the sample holder using a tool. The tool may be, for example, a tweezer-like tool. The method comprises the step of releasing and / or removing the tool from the sample carrier. According to an embodiment, the step of moving the clamping member to the closed position is performed before the step of releasing and / or removing the tool from the sample carrier. In this way, a so-called active takeover is achieved, thereby ensuring a safe mounting of the sample carrier on the sample holder.

[0034] As already discussed above, it is conceivable that the actuator member is used to move the clamping member to the open position. In particular, the relative movement between the actuator member and the sample holder is used to move the clamping member to the open position. For example, the translation of the actuator can be used to push the clamping member to the open position. BRIEF DESCRIPTION OF THE DRAWINGS

[0035] The invention will now be explained with reference to the accompanying drawings, which show several embodiments of the sample holder as described herein. In the drawings:

[0036] Figure 1 - Schematic overview of a charged particle microscope;

[0037] Figure 2a to Figure 2b - a schematic overview of an embodiment of a sample holder as disclosed herein;

[0038] Figure 3a to Figure 3b - a side view of an actuator for manipulating the clamping member of the sample holder;

[0039] Figure 4a to Figure 4b - a schematic overview of a further embodiment of a sample holder as disclosed herein;

[0040] Figure 5a to Figure 5b - a schematic overview of a further embodiment of a sample holder as disclosed herein;

[0041] Figure 6 - A schematic overview of a further embodiment of a sample holder as disclosed herein. DETAILED DESCRIPTION

[0042] Figure 1 (not drawn to scale) is a highly schematic depiction of an embodiment of a charged particle microscope M in which a sample holder as disclosed herein may be used. More specifically, Figure 1 An embodiment of a transmission microscope M is shown, which in this case is a TEM / STEM (but in the context of the present invention it could also effectively be, for example, a SEM or an ion-based microscope). Figure 1, within a vacuum housing 2, an electron source 4 generates an electron beam B, which propagates along an electron optical axis B' and passes through an electron light illuminator 6 for directing / focusing the electrons onto a selected portion of a sample S (the sample may, for example, be (locally) thinned / planarized). A deflector 8 is also depicted, which may be used, inter alia, to achieve a scanning movement of the beam B.

[0043] The sample S is held on a sample carrier C (not shown) mounted to a sample holder H, and this sample holder H can be positioned with multiple degrees of freedom by means of a positioning device A, which moves a stage A' in which the holder H is (removably) fixed; for example, the sample holder H may include fingers that can be moved (especially) in the XY plane (see the described Cartesian coordinate system; usually parallel to the Z movement and tilted about X / Y (so-called alpha tilt / beta tilt, respectively). Such movement allows different parts of the sample S to be illuminated / imaged / inspected by the electron beam B traveling along the axis B' (in the Z direction) (and / or allows scanning movements to be performed instead of beam scanning). If necessary, a cooling device (not shown, but known to the person skilled in the art) can be brought into close thermal contact with the sample holder H to keep the sample holder (and the sample S thereon) at, for example, cryogenic temperatures.

[0044] The electron beam B will interact with the sample S so that various types of "stimulated" radiation will be emitted from the sample S, including (for example) secondary electrons, backscattered electrons, X-rays and optical radiation (cathodoluminescence). If desired, one or more of these radiation types can be detected with the aid of a detector device 22, which can be, for example, a combined scintillator / photomultiplier tube or an EDX (energy dispersive X-ray spectroscopy) module; in this case, images can be constructed using essentially the same principles as for the SEM. Alternatively or additionally, however, electrons that pass through (through) the sample S, exit / emit from the sample and continue to propagate along the axis B' (generally, but usually with some deflection / scattering) can be studied. This transmitted electron flux enters an imaging system (projection lens) 24, which will typically include various electrostatic / magnetic lenses, deflectors, correctors (such as an stigmator), etc. In normal (non-scanning) TEM mode, this imaging system 24 can focus the transmitted electron flux onto a phosphor screen 26, which can be retracted / withdrawn (as schematically shown by arrow 26') if necessary to move it away from the axis B'. An image (or diffraction pattern) of (a portion of) the sample S will be formed by the imaging system 24 on the phosphor screen 26, and this can be observed through a viewing port 28 located on a suitable part of the wall of the housing 2. The retraction mechanism of the phosphor screen 26 can be, for example, mechanical and / or electrical in nature and is not depicted here.

[0045] As an alternative to observing the image on the phosphor screen 26, one can instead take advantage of the fact that the depth of focus of the electron flux leaving the imaging system 24 is typically large (e.g., about 1 meter). Thus, various other types of analysis equipment can be used downstream of the phosphor screen 26, such as:

[0046] - TEM camera 30. At camera 30, the electron flux may form a static image (or diffraction pattern) which may be processed by controller / processor 20 and displayed, for example, on a display device (not depicted) such as a flat panel display. When not needed, camera 30 may be retracted / withdrawn (as schematically indicated by arrow 30') to move it away from axis B'.

[0047] - STEM camera 32. The output of camera 32 can be recorded as a function of the (X,Y) scanning position of beam B on sample S, and an image can be constructed, which is a "map" of the output of camera 32 as a function of X,Y. In contrast to the pixel matrix typically present in camera 30, camera 32 may include a single pixel of, for example, 20 mm in diameter. Moreover, the acquisition rate of camera 32 (e.g., 10 pixels per second) may be increased by 100%. 6 points) is usually faster than a camera 30 (e.g. 10 per second 2 Again, when not needed, the camera 32 can be retracted / withdrawn (as schematically shown by arrow 32') to move it away from the axis B' (although such retraction is not necessary in the case of, for example, a donut-shaped annular dark field camera 32; in such a camera, the central hole would allow flux to pass when the camera is not in use).

[0048] As an alternative to imaging using cameras 30 or 32 , it is also possible to call upon a spectroscopic device 34 , which can be, for example, an EELS module.

[0049] It should be noted that the order / position of items 30, 32 and 34 is not critical and many possible variations are envisioned. For example, spectroscopic device 34 may also be integrated into imaging system 24.

[0050] In the illustrated embodiment, the microscope M further comprises a retractable X-ray computed tomography (CT) module, generally indicated by the reference numeral 40. In computed tomography (also known as tomographic imaging), a source and a (diametrically opposed) detector are used to observe a sample along different lines of sight in order to obtain a penetrating view of the sample from a variety of viewing angles.

[0051] Note that a controller (computer processor) 20 is connected to the various illustrated components via control lines (buses) 20'. This controller 20 may provide a variety of functions, such as synchronizing actions, providing set points, processing signals, performing calculations, and displaying messages / information on a display device (not depicted). Needless to say, the (schematically depicted) controller 20 may be (partially) located inside or outside the housing 2 and may have an integral or composite structure as desired.

[0052] Those skilled in the art will appreciate that it is not necessary to maintain the interior of the enclosure 2 under a strict vacuum; for example, in a so-called "environmental TEM / STEM", a background atmosphere of a given gas is deliberately introduced / maintained within the enclosure 2. Those skilled in the art will also appreciate that, in practice, it may be advantageous to limit the volume of the enclosure 2 so that, where possible, it takes the form of a small tube (e.g., of the order of 1 cm in diameter) substantially hugging the axis B' (through which the electron beam used passes), but widening to accommodate structures such as the source 4, the sample holder H, the phosphor screen 26, the camera 30, the camera 32, the spectroscopic device 34, and the like.

[0053] Figure 2a and Figure 2b An embodiment of a sample holder H according to the present disclosure is shown, which can be used in a charged particle microscope (such as Figure 1 but is equally applicable to SEM or FIB devices.

[0054] The sample holder H comprises a holder body 51 which can be connected to a Figure 1 The carrier A' of the positioning device A shown. At the outer end 52 of the holder body 51, a groove 54 is provided. The holder H comprises a bracket 10 arranged in the groove and connected to the holder body 51. The bracket 10 can pivot around the pivot axis T (so-called beta tilt). With the bracket, the groove is arranged to releasably accommodate a sample carrier C carrying a sample S (not drawn to scale). In the example shown, the sample carrier C can be connected to the bracket T. The sample carrier C shown is a half-moon shaped grid, but it is noted that other grid shapes and grid types are also possible, and the present invention is not limited to the use of half-moon shaped grids. Other shapes may also include annular, ring-shaped or substantially closed contour grids. A mechanical support profile (not shown here), such as an annular profile, may also be provided. In this case, the sample carrier C can be placed within the mechanical support profile and mounted to the sample holder H in this way.

[0055] like Figure 2a and Figure 2bAs shown, the sample holder H comprises a first fixing element 56 connected to the holder body H for fixing the sample carrier C in the recess 54 of the holder body H directly or indirectly, for example, using a mechanical support profile. The fixing element 56 comprises a clamping member 56 movably connected to the holder body, wherein the clamping member can be in an open position (e.g. Figure 2a as shown) and the closed position (as Figure 2b In the open position, the clamping member 56 is moved away from the recess 54 so that the sample carrier C can be placed in the recess 54. In the closed position, the clamping member 56 locks the sample carrier C in the recess 54.

[0056] In the embodiment shown, the clamping member 56 is a pivotable rotation spring that can be selected to be in an open position or a closed position by pivoting. By providing a spring element, the clamping member 56 can be urged to a position such as Figure 2b The closed position is shown, thereby holding the sample carrier C tightly in place when the sample carrier C is placed in the recess.

[0057] like Figure 2a and Figure 2b As shown, the sample holder H further comprises a further fixing element 57. The further fixing element 57 is arranged for fixing the sample carrier C in the recess 54 of the holder body H. In the embodiment shown, the further fixing element 57 is connected to the holder body H for fixing the sample carrier C in the recess 54 of the holder body directly or indirectly, for example, using a mechanical support profile. The further fixing element 57 comprises a further clamping member 57 movably connected to the holder body H, wherein the further clamping member can be in an open position (e.g. Figure 2a shown) and closed position ( Figure 2b In the open position, the clamping member 57 is moved away from the recess 54 so that the sample carrier C can be placed in the recess 54. In the closed position, the clamping member 57 locks the sample carrier C in the recess 54.

[0058] Therefore, in this embodiment, the further fixing element 57 is embodied similarly to the fixing element 56, but is arranged on the opposite side of the groove for fixing the sample carrier C from the opposite side of the groove. The further fixing element 57 is also a pivotable rotation spring, which can be selected to be in an open position and a closed position by pivoting. By providing a spring element, the clamping member 57 can be urged to move toward the opposite side of the groove. Figure 2bThe closed position shown is shown, thereby tightly holding the sample carrier C in place when the sample carrier C is placed in the recess. By arranging the two clamping members 56, 57 in this way, the sample carrier C is held in the desired position in a reliable manner. In addition, the use of two clamping members 56, 57 in the form of two pivotable rotation springs allows the structure of the sample holder H to be very compact, thereby facilitating the provision of the desired sample carrier tilt and also providing a large opening angle, which is beneficial, for example, for EDX analysis.

[0059] Figure 3a and Figure 3b Shows Figure 2a and Figure 2b The sample holder H in the embodiment of FIG. 5 is in the closed position and the open position of the fixing elements 56 and 57, respectively. Figure 3a and Figure 3b As shown, the actuator member 80 is used to open and close the corresponding fixing elements 56, 57. The actuator member 80 includes an actuator body, which extends outwardly and upwardly into two actuator protrusions 81, 82. The actuator protrusions 81, 82 are arranged to push the spring elements 56, 57 to reach the open position (such as Figure 3b This can be accomplished by relative movement between the actuator member 80 and the sample holder H. In one embodiment, the sample holder H is held stationary while the actuator member 80 moves upward. Figure 3b ), the sample carrier C can be placed in the groove 54, and then the actuator member 80 can be moved downward again to snap the fixing elements 56, 57 into place. In this way, the carrier is tightly mounted on the sample holder H.

[0060] A tool is usually used to position the sample carrier C in place. In prior art sample holders, this involves positioning the sample carrier C in the recess and then releasing the tool from the sample carrier C. This may result in an unwanted repositioning of the sample carrier C, such as a lifting movement relative to the sample holder H. By using the sample holder H disclosed herein (e.g., Figure 2a and Figure 2b 54 ), so-called active take-over is possible. This means that before the tool is released from the sample carrier C, the sample carrier C is positioned in the recess and actively taken over by the fixing elements 56, 57. In other words, the sample carrier C can be positioned in the recess 54 using a tool (not shown) and, while the tool is still in contact with the sample carrier C, the sample carrier C can be fixedly mounted to the sample holder H using the fixing elements 56, 57.

[0061] Figure 4a and Figure 4bAnother embodiment of the sample holder H disclosed herein is shown. The sample holder H shown here is Figure 2a and Figure 2b The sample holder H shown in is very similar to the sample holder H shown in , but the main difference lies in the embodiment of the fixing elements 156, 157, 158. Therefore, the sample holder H comprises a holder body having a groove 54 for releasably receiving a sample carrier C with a sample therein. The sample holder H comprises a total of three fixing elements 156, 157, 158, which are connected to the holder body 51 and are arranged to fix the sample carrier C in the groove 54 of the holder body 51. The fixing elements are embodied as pivotable clamping members 156, 157, 158, each of which is movably connected to the holder body 51. In Figure 4a In the embodiment of the present invention, the clamping members 156, 157, 158 are moved to a closed position in which the sample carrier C is locked in the recess 54. Figure 4b In the embodiment of the present invention, the clamping members 156 , 157 , 158 are moved to an open position, wherein the clamping members are pivoted in an upward direction so that a sample carrier C can be placed in said recess 54 .

[0062] A C-clip 161 is provided, which interconnects the clamping members 156, 157, 158 to each other. The C-clip extends through holes provided on these clamping members 156, 157, 158, and in this way the C-clip can be embodied to provide a means for pushing the clamping members 156, 157, 158 into position. Figure 4a By moving the clamping members 156, 157, 158 toward the open position, for example, Figure 3a and Figure 3b The actuator member shown pushes or pulls the clamping members 156, 157, 158, which can overcome the thrust provided by the C-clamp and bring the clamping members 156, 157, 158 to the open position to load the sample carrier C onto the sample holder H.

[0063] Figure 5a and Figure 5b 1 shows an embodiment of a sample holder H in which two fixing elements 256, 257 are provided, which are connected to the holder body 51 for fixing the sample carrier in the recess of the holder body 51. The fixing elements shown here comprise two clamping members 256, 257 in the form of elongated flexible beams. Due to the flexible nature of the beams 256, 257, they are in a closed position (e.g. Figure 3a ) and the open position (as Figure 3bThe flexible beams 256 and 257 are movably connected to the holder body 51 between the end blocks 261 and 262. The flexible beams 256 and 257 are disposed in the end blocks 261 and 262. By the relative movement between the end blocks 261 and 262, the flexible beams 256 and 257 can be loaded until the flexible beams 256 and 257 are buckled and move away from the groove 54 toward the open position to provide a space for loading the sample carrier C into the groove.

[0064] Figure 6 Another embodiment of a sample holder H is shown in which a single fixing element 356 is used, wherein the fixing element 356 is embodied as a pivotable clamping member 356 that can be in an open position (eg, Figure 6 The clamping member 356 is shown in an open position and a closed position in which the sample carrier C is enclosed by the clamping member 356. The clamping member 356 is C-shaped and has outer ends 371, 372 that are movable toward each other. In this way, they can be brought behind locking elements 361, 362 provided on the holder body 51 to lock the clamping member 356 in the closed position. The opening and closing can be performed by an actuator member, for example in the form of a tweezer-like tool.

[0065] Several embodiments of the sample holder H have been described above. The desired protection is afforded by the appended claims.

Claims

1. A sample holder for a charged particle microscope, comprising: a holder body having a recess for releasably receiving a sample carrier having a sample loaded therein; at least one fixing element connectable to the holder body for fixing the sample carrier in the recess of the holder body; It is characterized in that the fixing element comprises a clamping member movably connected to the holder body, wherein the clamping member is movable between a closed position and an open position, and comprises a rotating spring element, which is arranged to push the clamping member toward the closed position, wherein in the open position the sample carrier can be placed in the groove, and in the closed position the sample carrier can be locked in the groove. 2 . The sample holder according to claim 1 , wherein the clamping member can be selected to be in the open position or the closed position by pivoting.

3. The sample holder of claim 1, wherein the at least one fixing element comprises a further fixing element comprising a further clamping member comprising a further rotation spring element.

4. A sample holder according to claim 3, wherein the further rotation spring element is arranged to urge the clamping member into the closed position.

5. The sample holder of claim 1, wherein the clamping member is actuatable by an actuator member.

6. A sample holder according to claim 5, wherein the actuator member is arranged to push at least the clamping member to reach the open position, wherein pushing the clamping member includes the actuator member biasing the clamping member in a rotational direction opposite to the urging provided by the rotational spring element.

7. The sample holder of claim 1, wherein the clamping member is arranged to directly place the sample carrier in the closed position.

8. The sample holder according to any one of claims 1 to 7, comprising at least one further fixing element for fixing the sample carrier in the recess of the holder body.

9. The sample holder according to claim 8, wherein the further fixing element is embodied as the clamping member.

10. The sample holder of claim 8, wherein the further fixing element and the clamping member are disposed on opposite sides of the recess.

11. A charged particle microscope for examining a sample, comprising: an optical column comprising a charged particle source and an illuminator for directing a charged particle beam emitted by the charged particle source onto a sample; The sample holder according to any one of claims 1 to 10, which is used to hold a sample carrier carrying the sample and is placed downstream of the illuminator; detector means for detecting emission from a sample in response to incident charged particles emitted from said charged particle source; as well as A control unit is provided for performing the operation of the charged particle microscope.

12. The charged particle microscope according to claim 11, further comprising an actuator member for actuating the clamping member.

13. A method of placing a sample carrier in a sample holder according to any one of claims 1 to 10, the method comprising the steps of: moving the clamping member to the open position; placing the sample carrier in the recess of the sample holder; The clamping member is moved to the closed position.

14. A method according to claim 13, wherein an actuator member is used for moving the clamping member to the open position.

15. The method of claim 14, wherein relative movement between the actuator member and the sample holder is employed.

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