Opto-mechanical adjustment mechanism using lamellas for motion isolation

Abstract

The present application provides a kind of adjusting mechanism for motion isolation using sheet, including base part as position reference and adjusting part for carrying optical components, position adjustable.The sheet material is easy to produce bending deformation in thickness direction, and can withstand larger moment in width and length direction, and is not easy to deform.The present application uses this mechanical property, uses the deformation of sheet thickness direction to adapt to the adjustment direction of optical components, and at the same time uses the width and length direction not easy to deform to isolate the motion of non-adjustment direction.The opposite ends of sheet are fixed with base part and adjusting part respectively, the bending deformation of sheet thickness direction adapts to the motion of adjusting part adjustment direction, and the width direction limits the side shift and deflection of adjusting part.According to the structure of base part and adjusting part and the different relative motion, the adjusting mechanism of the present application has three different structures: adjusting mechanism of arc swing platform structure, adjusting mechanism of horizontal movement structure and adjusting mechanism of rotary table structure.

Description

Technical Field

[0001] This invention belongs to the field of optical technology and relates to adjustment mechanisms for the position of optical components in optomechanical systems. In particular, it relates to an adjustment mechanism that utilizes a thin sheet to eliminate motion errors in non-adjustment directions. Background Technology

[0002] In optomechanical systems, the positions of optical components need to be adjusted, and this adjustment typically requires high precision. Due to assembly errors between components in the optomechanical system, unwanted movements may occur in non-adjustment directions during adjustment. For example, the adjustment of an arc pendulum stage requires oscillation between two components, but due to assembly errors in the rotating shaft, misalignment and twisting may occur between the two components. In many cases, these errors in non-adjustment directions are not negligible and must be eliminated. Currently, methods to eliminate such errors are nothing more than improving assembly precision or adding other high-precision structures. Both of these methods have high technical requirements and incur high economic costs. To address the shortcomings of existing technologies, this invention proposes a simple, low-cost adjustment mechanism that utilizes a thin sheet to achieve motion isolation. Summary of the Invention

[0003] Mechanically, sheet materials are prone to bending deformation in the thickness direction, while they can withstand larger moments and are less prone to deformation in the width and length directions. This invention utilizes this mechanical property, using the deformation of the sheet in the thickness direction to adapt to the adjustment direction of the optical component, while simultaneously using the resistance to deformation in the width and length directions to isolate movement in directions other than adjustment. Therefore, the sheet material used in this invention is required to be not too soft, possess a certain degree of rigidity, bendable but not easily brittle, and limited by the scale of material deformation. This adjustment mechanism is particularly suitable for small-amplitude adjustments. The specific technical details are as follows:

[0004] The adjustment mechanism described in this invention includes a base portion serving as a position reference and an adjustment portion for supporting optical components and whose position is adjustable. Of course, the division between these two portions is only relative, and therefore the descriptions of these two portions in this invention are completely interchangeable. The opposite ends of the thin sheet are fixed to the base portion and the adjustment portion, respectively. The bending deformation of the thin sheet in the thickness direction adapts to the movement in the adjustment direction of the adjustment portion, while the width direction restricts the lateral displacement and deflection of the adjustment portion.

[0005] Depending on the structure and relative movement of the base and adjustment part, the adjustment mechanism of the present invention can have different structures. Specifically, there are the following three structures:

[0006] Adjustment mechanism of the arc swing table structure

[0007] The existing arc swing table includes a base part and an adjusting part, which are connected by a side shaft to form an arc swing table structure. By means of an adjusting member, the adjusting part makes an arc swing movement relative to the base part to adjust the included angle between the two. Due to the tolerances of the shaft connection, such as the axial and radial assembly clearances, horizontal movement and swing will occur between the base part and the adjusting part. In the present invention, the opposite ends of the thin sheet are respectively fixed to the base part and the adjusting part in a direction parallel to the swing shaft, and any mechanical fixing method can be adopted. The thin sheet can be installed at one end close to the swing shaft, or at one end far from the swing shaft, or one thin sheet can be installed at each end; during adjustment, the distance between the distal base part and the adjusting part will change, so the thin sheet at this end needs to be pre-bent to adapt to this change in distance. The bending deformation in the thickness direction of the thin sheet can adapt to the arc swing movement of the adjusting mechanism; at the same time, since it is not easy to deform in the width direction of the thin sheet (i.e., parallel to the swing shaft of the arc swing table), the horizontal movement and swing of the adjusting part relative to the fixed part are restricted and isolated.

[0008] Furthermore, the fixing positions of the thin sheet can be on the upper and lower surfaces outside the arc swing table, or on the opposite upper and lower surfaces inside, or on the end faces parallel to the swing shaft, or one end is fixed to the outer plane or end face of the base part and the other end is fixed to the end face or outer plane of the adjusting part. There can be an adjusting member at one end far from the swing shaft, so the thin sheet and the adjusting member need to avoid each other.

[0009] As a preferred solution, there can be an actual mechanical shaft connection to fix the base part and the adjusting part at the position of the swing shaft; or there can be no mechanical shaft, and the thin sheet adopts a reed to simultaneously perform the function of the swing shaft. When adopting this solution, if there is another thin sheet at the distal end, the distal thin sheet is preferably made of a flexible material to reduce the force applied to the adjusting part in the vertical direction.

[0010] Furthermore, the inner surface of the bending part of the reed contacts an arc surface, which can be provided by a round rod or integrated with the base part. The arc surface provides limit support for the reed, further improving the stability of the adjusting mechanism.

[0011] Still further, a mounting bracket is fixedly installed at the end of the base part, and 1 to 2 spring ejector pins are installed on the mounting bracket to abut against the end face of the adjusting part, applying a horizontal thrust to further overcome the horizontal yaw of the adjusting part.

[0012] Another preferred solution is that the base part, the adjusting part and the reed are of an integral structure, that is, the three parts are integrally in a "C" shape, and a transverse thin sheet is processed at the upper and lower connection parts as the reed. The part serving as the reed can elastically deform along with the swing of the adjusting part, and at the same time can also restrict the movement in other directions.

[0013] Another type, known as a miniature two-dimensional angle adjustment frame, is an arc-shaped swing stage, commonly used as a lens holder or filter holder. It features ball bearing support at one corner between the base and the adjustment section. Adjustment components are located in two mutually perpendicular directions passing through the ball bearings, allowing for arc-shaped adjustment of the adjustment section around the ball bearings in both perpendicular directions. In other words, this structure has two mutually perpendicular swing axes. Thin plates can be installed parallel to each of the two swing axes in this arc-shaped swing stage. To accommodate changes in distance between the base and adjustment section during swing in the other direction, the thin plates need to be pre-bent. During swing in one direction, the thin plate perpendicular to that direction will undergo slight torsional deformation. However, since the adjustment of this product is inherently micro-adjustment, the torsional deformation in the other direction is negligible. Similar to the one-dimensional pendulum stage described above, in each swing direction, the thin plate can be installed at one end close to the swing axis, or at the other end away from the swing axis, or at each end. The positions where the two ends of the thin plate are fixed to the pendulum stage can be on the upper and lower surfaces of the outer side of the pendulum stage, on the opposite upper and lower surfaces of the inner side, on the end face parallel to the swing axis, or one end can be fixed to the outer plane or end face of the base, and the other end fixed to the end face or outer plane of the adjustment part. An adjustment element can be located at the end away from the swing axis; therefore, the thin plate and the adjustment element must avoid each other.

[0014] Adjustment mechanism of horizontal moving structure

[0015] In existing horizontally moving adjustment mechanisms, there is a horizontal guide structure between the base and the adjustment part, allowing them to move horizontally in a straight line. However, due to tolerances between the connecting parts, offset or sway will occur during the movement, resulting in lateral displacement or sway between the adjustment position and the initial position, in addition to linear horizontal displacement.

[0016] The adjustment mechanism of the horizontal moving structure of the present invention involves bending a thin sheet in a direction perpendicular to the translation of the adjustment part, and then fixing both ends to the fixing part and the adjustment part, respectively. When the adjustment part moves horizontally relative to the fixing part, the bent portion of the thin sheet will change accordingly to adapt to the horizontal displacement, but at the same time, the lateral displacement is restricted.

[0017] Furthermore, the fixed position of the thin sheet can be on the upper and lower surfaces of the outer side of the fixing part and the adjusting part, or on the end face.

[0018] Furthermore, a thin plate can be fixed at each end of the moving direction of the fixing part and the adjusting part, so that the lateral displacement at both ends is restricted.

[0019] Adjustment mechanism of turntable structure

[0020] In existing rotary adjustment structures, the base and the adjustment mechanism are connected by a vertical shaft, with one fixed to the shaft and the other rotating around it. Due to tolerances in the shaft connection, wobbling occurs during rotation.

[0021] The adjustment mechanism of the turntable structure of the present invention includes a set of radially distributed thin plates perpendicular to the rotation surface. These plates are springs, with their inner ends directly or indirectly fixed to a fixing or adjusting part, and their outer ends also directly or indirectly fixed to the adjusting or fixing part. The fixed springs have a pre-bent degree. Thus, when the turntable rotates, the springs undergo synchronous elastic deformation, while the springs are less prone to deformation in the vertical direction, controlling the turntable to prevent wobbling.

[0022] As a preferred embodiment, the turntable is situated below a cavity, with a rotating shaft fixed to the chassis and housed within the cavity. A set of radially distributed springs perpendicular to the rotation plane has its proximal end fixed to the rotating shaft and its distal end fixed to the side wall of the cavity. The chassis and turntable are interchangeable. When the turntable rotates, the springs deform, but the springs do not restrict the rotation of the turntable. Furthermore, the vertically positioned springs are less prone to deformation in the vertical direction, thus limiting the turntable's wobbling.

[0023] Further, the above scheme includes a frustum on the chassis, with the rotating shaft at the center of the upper part of the frustum; the turntable's cavity is cylindrical, coaxial with the frustum, and larger than the diameter of the frustum; bearings are installed between the frustum and the sidewall of the cavity, with the inner ring of the bearing fixed to the sidewall of the frustum and the outer ring fixed to the sidewall of the cavity. At the upper part of the cavity, a set of radially distributed springs perpendicular to the plane of rotation are fixed at their proximal ends to the rotating shaft and their distal ends to the sidewall of the cavity. The chassis and the turntable are interchangeable. In the previous scheme, if the springs deform unevenly during turntable rotation, the turntable will experience horizontal displacement. This scheme adds bearings between the chassis and the turntable, thus limiting the horizontal displacement of the turntable.

[0024] As a preferred embodiment, the reed structure is made into a reed spoke wheel, which consists of a set of radially distributed reeds perpendicular to the plane of rotation. The proximal ends of the reeds are fixed to the inner ring of the spoke wheel, and the distal ends are fixed to the outer ring of the spoke wheel. The inner ring of the spoke wheel is fixed to the turntable via an inner flange, and the outer ring of the spoke wheel is fixed to the chassis via an outer flange. A through-hole is located in the center of the chassis, facilitating the fixing of the inner flange to the turntable. Attached Figure Description

[0025] Figures 1 to 12 Here is a schematic diagram of the adjustment mechanism of the arc-shaped swing table structure:

[0026] Figure 1 This is a three-dimensional schematic diagram of Embodiment I-1 of the present invention;

[0027] Figure 2 This is an embodiment of the present invention. -2 3D diagram;

[0028] Figure 3 This is an embodiment of the present invention. -3 3D diagram;

[0029] Figure 4 This is an embodiment of the present invention. -4 3D diagram;

[0030] Figure 5 This is an embodiment of the present invention. -5 3D diagram;

[0031] Figure 6 This is an embodiment of the present invention. -6 3D diagram;

[0032] Figure 7 This is an embodiment of the present invention. -7 3D diagram;

[0033] Figure 8 This is an embodiment of the present invention. -8 3D diagram;

[0034] Figure 9 This is an embodiment of the present invention. -9 side view diagram;

[0035] Figure 10 This is an embodiment of the present invention. -10 side view diagram;

[0036] Figure 11 This is an embodiment of the present invention. -11 side view diagram.

[0037] Figure 12 This is an embodiment of the present invention. A three-dimensional diagram of -12.

[0038] In the figure: 11. Base, 12. Adjustment part, 13. Swing shaft, 13'. Ball, 14. and 14'. Sheet, 141. Spring, 15. Adjustment piece, 16. Tension spring, 17. Round bar, 18. Mounting bracket, 19. Spring pin.

[0039] Figures 13 to 15 This is a schematic diagram of the adjustment mechanism for the horizontally moving structure:

[0040] Figure 13 This is an embodiment of the present invention. A three-dimensional diagram of -1;

[0041] Figure 14 This is an embodiment of the present invention. -2 3D diagram;

[0042] Figure 15 This is an embodiment of the present invention. -3 3D diagram.

[0043] In the figure: 21. Base, 22. Adjustment part, 23. Adjustment component, 24. Distal sheet, 25. Proximal sheet.

[0044] Figures 16 to 20 This is a schematic diagram of the adjustment mechanism of the turntable structure:

[0045] Figure 16 This is a cross-sectional perspective view of Embodiment III-1 of the present invention;

[0046] Figure 17 This is an embodiment of the present invention. -2 is a three-dimensional cross-section diagram;

[0047] Figure 18 yes Figure 17 A 3D diagram viewed from below;

[0048] Figure 19 This is an embodiment of the present invention. -3 is a cross-sectional three-dimensional diagram;

[0049] Figure 20 yes Figure 19 A schematic diagram of the plane viewed from below.

[0050] In the diagram: 31. Chassis, 311. Chassis frustum, 312. Chassis through hole, 32. Turntable, 321. Turntable inner cavity, 33. Shaft, 34. Spring, 341. Proximal end of spring, 342. Distal end of spring, 35. Bearing, 351. Inner ring of bearing, 352. Outer ring of bearing, 36. Spoke wheel, 361. Inner ring of spoke wheel, 362. Outer ring of spoke wheel, 363. Inner flange, 364. Outer flange. Detailed Implementation

[0051] Adjustment mechanism of the arc swing table structure

[0052] Example I-1

[0053] like Figure 1 As shown. The adjustment mechanism of the arc swing table structure in this embodiment includes a base part 11 and an adjustment part 12 connected thereto by a swing shaft 13. There is an adjustment member 15 and a tension spring 16 between the free ends of the base part 11 and the adjustment part. The adjustment member 15 adjusts their relative swing, and the tension spring 16 maintains the stress in the closing direction. One end of the swing shaft 13 is on the outside of the arc swing table, and the thin plate 14 is parallel to the swing shaft 13. Its two ends are fixedly connected to the end face of the base part 11 and the upper surface of the adjustment part 12, respectively.

[0054] When the adjusting part 12 swings around the swing shaft 13, the curvature of the thin plate 14 changes accordingly, without affecting or restricting its swing. At the same time, the thin plate 14 is not easily deformed in its width direction, thus limiting the horizontal misalignment and torsion of the adjusting part 12 relative to the base part 11 due to the assembly tolerance of the swing shaft 13. This achieves motion isolation in non-adjusting directions.

[0055] Example I-2

[0056] like Figure 2 This embodiment adds a thin plate 14' at the distal end parallel to the shaft 13, based on Embodiment I-1, which further improves the adjustment accuracy. A single thin plate 14 may become distorted and cannot completely eliminate the horizontal sway error of the adjustment part 11; by adding a thin plate 14' to cooperate with the thin plate 14, the horizontal sway error of the adjustment part 11 is constrained at both ends, thus making the horizontal sway error negligible. During adjustment, the distance between the distal base part 11 and the adjustment part 12 will change, so the thin plate 14' at that end needs to be pre-bent to accommodate this change in distance.

[0057] Figure 2 The thin sheet 14' is fixed to the end faces of the base portion 11 and the adjusting portion 12. In fact, its fixing position can also be the inner or outer surface of the base portion 11 and the adjusting portion 12, as shown in this figure. Figure 3 The fixed position of the thin plate 14. When it is fixed on the side surface, it must avoid mutual avoidance with the adjusting member 15 and the tension spring 16.

[0058] In the following embodiments I-3 and I-4, a thin sheet 14' may also be added at the distal end parallel to axis 13, as in this embodiment. This will not be described again below.

[0059] Example I-3

[0060] like Figure 3 As shown. The only difference between this embodiment and Embodiment I-1 is that in this embodiment, the thin sheet 14 is placed inside the arc swing stage and is fixedly connected to the inner surfaces of the base part 11 and the adjustment part 12, parallel to the swing axis. Everything else is the same as in Embodiment I-1.

[0061] Example I-4

[0062] like Figure 4 As shown. The only difference between this embodiment and Embodiment I-1 is that in this embodiment, the thin sheet 14 is placed on the axial end face of the arc swing stage and is fixedly connected to the end faces of the base part 11 and the adjustment part 12, parallel to the swing axis 13. Everything else is the same as Embodiment I-1.

[0063] Examples I-5 to Examples I-8

[0064] like Figures 5 to 8As shown, it is a schematic diagram of Embodiments I-5 to I-8 of the present invention. Corresponding to Embodiments I-1 to I-4 respectively, the difference is that the swing shaft 13 is removed, and the near-axis end thin sheet adopts a reed 141. The rigidity of the reed is used to replace the swing shaft to support the adjustment part. That is, the reed supports the adjustment part and will not bounce up and down under normal loads; when the adjustment part adjusts the swing angle, the bending degree of the reed 141 also changes accordingly, which will not affect or limit its swing. At the same time, the reed 141 is not easily deformed in its width direction, so the horizontal misalignment and torsion of the adjustment part 12 relative to the base part 11 can be restricted. The movement isolation in the non-adjustment direction is achieved.

[0065] As Figure 6 shown in Embodiment I-6, just as Figure 2 shown in Embodiment I-2. A thin sheet 14' is added to the distal end of the reed 141 parallel to the replacement shaft 13. The thin sheet 14' preferably uses a flexible material to reduce the force applied to the adjustment part in the vertical direction.

[0066] Embodiment I-9

[0067] As Figure 9 shown. In this embodiment, the reeds 141 are respectively fixed to the end face of the base part 11 and the lower surface of the adjustment part 12. The inner surface of the bent part of the reed contacts an arc surface, which can be provided by a round rod 17 or integrated with the base part. If a round rod is used, round rods with different diameters can be used to adjust the tightness. The arc surface provides a limit support for the reed 141, further improving the stability of the adjustment mechanism. Other parts of this embodiment are the same as those of other embodiments, and the thin sheet 14' can also be added.

[0068] Embodiment I-10

[0069] As Figure 10 . On the basis of the previous embodiment, in this embodiment, a mounting frame 18 is fixedly installed at the end of the base part 11, and one or two spring ejector pins 19 are installed on the mounting frame 18 to press against the end face of the adjustment part, applying a horizontal thrust to further overcome the horizontal yaw of the adjustment part.

[0070] Embodiment I-11

[0071] As Figure 11 shown. In this embodiment, the base part 11, the adjustment part 12 and the reed 141 are of an integral structure, that is, the three parts are integrally in a "C" shape, and a transverse thin sheet is processed at the upper and lower connection parts as the reed 141. The part serving as the reed 141 can elastically deform with the swing of the adjustment part 12, and at the same time can restrict the movement in other directions.

[0072] Embodiment I-12

[0073] As Figure 12A type of arc-shaped swing stage, known as a miniature two-dimensional angle adjustment frame, is commonly used as a lens holder or filter holder. It features a ball bearing 13' supporting a corner between the base 11 and the adjustment section 12. Two sets of adjusting components 15 and tension springs 16 are located in two mutually perpendicular directions passing through the ball bearing 13', allowing for arc-shaped swing adjustment of the adjustment section 12 around the ball bearing 13' in two mutually perpendicular directions. Alternatively, this structure can be described as having two mutually perpendicular swing axes. A thin plate 14 is provided parallel to each of the two swing axes. To accommodate changes in the distance between the base 11 and the adjustment section 12 caused by swinging in the other direction, the thin plate 14 needs to be pre-bent. In this structure, when swinging in one direction, the thin plate 14 in the direction perpendicular to it will undergo a slight torsional deformation. However, since the adjustment of this product itself is a micro-adjustment, the torsional deformation in the other direction is negligible.

[0074] Similar to the one-dimensional oscillating arc stage described above, in each oscillation direction, the thin plate 14 can be installed at one end close to the oscillation axis, or at one end away from the oscillation axis, or at each end. The positions where the two ends of the thin plate are fixed to the arc stage can be on the upper and lower surfaces of the outer side of the arc stage, on the opposite upper and lower surfaces of the inner side, or on the end face parallel to the oscillation axis. Alternatively, one end can be fixed to the outer plane or end face of the base, and the other end can be fixed to the end face or outer plane of the adjustment part. An adjustment element can be located at the end away from the oscillation axis; therefore, the thin plate and the adjustment element must avoid each other.

[0075] Example of an adjustment mechanism for a horizontally moving structure

[0076] Example -1

[0077] like Figure 13 The adjustment mechanism of the horizontal moving structure includes a base 21 and an adjustment part 22. An adjustment member 23 at one end pushes and pulls the adjustment part 22 to move horizontally on the base 21 in the direction of the double arrows in the figure. The middle of the distal sheet 24 is pre-bent, and both ends are perpendicular to the direction of movement at the distal end of the adjustment member 23, and are fixed to the lower surface of the base 21 and the upper surface (i.e., the outer upper and lower surfaces) of the adjustment part 22, respectively. When the adjustment part 22 moves horizontally relative to the fixed part 11, the bent portion of the sheet 24 will change accordingly to adapt to the horizontal displacement, but at the same time, the lateral sway is limited.

[0078] Example -2

[0079] like Figure 14 The difference between this embodiment and the previous embodiment is that the pre-bent sheet 24 in the middle is fixed at both ends to the end faces of the base portion 21 and the adjustment portion 22, respectively. The other parts are the same as the previous embodiment.

[0080] Example -3

[0081] like Figure 15 In addition to the distal thin plate 24, this embodiment also has a proximal thin plate 25 fixed to one end of the adjusting member. In this way, the distal thin plate restricts the lateral swing of the distal end, while the proximal thin plate 25 further restricts the lateral deflection of one end of the adjusting member. Figure 15 The method of fixing the thin sheet is shown in the example. The fixing method is as follows: -1, that is, fixed on the upper and lower outer surfaces. Of course, the embodiment can also be used. -2 is fixed in the way that it is fixed on the upper and lower end faces.

[0082] Adjustment mechanism of turntable structure

[0083] Example -1

[0084] like Figure 16 To clearly illustrate the internal structure, portions of both the chassis 31 and the turntable 32 in the figure have been cut away. The adjustment mechanism of the turntable structure in this embodiment includes a chassis 31 and a turntable 32. Below the turntable 32 is a cavity 321. A rotating shaft 33 is fixed to the chassis 31 and housed within the cavity 321. A set of radially distributed springs 34 perpendicular to the rotation plane have their proximal ends 341 fixed to the rotating shaft 33 and their distal ends fixed to the sidewall of the cavity 321. The chassis and turntable in this embodiment are interchangeable.

[0085] When the turntable 32 is rotated, it causes the spring 34 to deform. The spring 34 does not restrict the rotation of the turntable 32. At the same time, the vertically set spring is not easily deformed in the vertical direction, so it can limit the shaking of the turntable.

[0086] The reed in this embodiment can also be adopted in the following embodiment. -3 The spring spoke wheel 36 (but without the flange) has an inner ring 361 fixed to the shaft 33 and an outer ring 362 fixed to the side wall of the cavity 321.

[0087] Example -2

[0088] like Figure 17 and Figure 18Based on the previous embodiment, this embodiment features a frustum 311 on the chassis 31, with a rotating shaft 33 at the center of the upper part of the frustum 311. The cavity 321 of the turntable 32 is cylindrical, coaxial with the frustum 311, and larger than the diameter of the frustum. A bearing 35 is installed between the frustum 311 and the sidewall of the cavity 321. The inner ring 351 of the bearing 35 is fixed to the sidewall of the frustum 311, and the outer ring 352 is fixed to the sidewall of the cavity 321. Similar to the previous embodiment, a set of radially distributed springs 34 perpendicular to the rotation plane are located on the upper part of the cavity 321. The proximal end 341 of these springs is fixed to the rotating shaft 33, and the distal end is fixed to the sidewall of the cavity 321. The chassis and turntable in this embodiment are interchangeable.

[0089] In the previous embodiment, if the springs deform unevenly when the turntable rotates, the turntable 32 will experience horizontal displacement. Compared to the previous embodiment, this embodiment adds a bearing 35 between the chassis 31 and the turntable 32, thus limiting the horizontal displacement of the turntable 32.

[0090] The reed in this embodiment can also be adopted in the following embodiment. -3 The spring spoke wheel 36 (but without the flange) has an inner ring 361 fixed to the shaft 33 and an outer ring 362 fixed to the side wall of the cavity 321.

[0091] Example -3

[0092] like Figure 19 and Figure 20 To clearly show the structure, a portion of the turntable 32 in the figure has been cut away. This embodiment includes a base 31 and a turntable 32; a spring spoke wheel 36, which is configured as a group of radially distributed springs 34 perpendicular to the rotation plane, with its proximal end 341 fixed to the inner ring 361 of the spoke wheel and its distal end fixed to the outer ring 362 of the spoke wheel. The inner ring 361 of the spoke wheel is fixed to the turntable 32 through an inner flange 363, and the outer ring 362 of the spoke wheel is fixed to the base 31 through an outer flange 364. The base 31 has a base through hole 312 in the middle, which facilitates the fixing operation of the inner flange 363 and the turntable 32. The spring spoke wheel 36 can be integrally formed from an elastic material, or it can be further integrally formed with the inner and outer flanges.

[0093] Same as the embodiment -1. When the turntable 32 is rotated, the spring 34 is deformed. The spring 34 does not restrict the rotation of the turntable 32. At the same time, the vertically set spring is not easily deformed in the vertical direction, so it can limit the shaking of the turntable.

[0094] In this embodiment, the flange on the spring spoke wheel 36 is not necessary. The chassis 31 and turntable 32 employ the same design as in the embodiment. -1 or Example In the -2 structure, the inner ring 361 of the spoke wheel is fixed to the rotating shaft 33, and the outer ring 362 of the spoke wheel is fixed to the side wall of the cavity 321.

Claims

1. A photomechanical adjustment mechanism for motion isolation using a thin sheet, comprising a base portion serving as a position reference and an adjustment portion for supporting optical components and being position-adjustable, the thin sheet having its opposite ends fixed to the base portion and the adjustment portion respectively, the thin sheet's bending deformation in the thickness direction adapting to the movement of the adjustment portion in the adjustment direction, and the lateral displacement and deflection of the adjustment portion being limited in the width direction; characterized in that: The said adjusting mechanism is an adjusting mechanism with an arc swing table structure, including a base part (11) and an adjusting part (12) connected to it by a swing shaft (13). There is an adjusting member (15) between the free ends of the base part (11) and the adjusting part (12) to adjust their relative swing; there are thin plates (14, 14') at one or both ends of the swing shaft (13) parallel to the arc swing table; the thin plates (14, 14') are parallel to the swing shaft (13), and their two ends are respectively fixedly connected to the base part (11) and the adjusting part (12).

2. The optomechanical adjustment mechanism for motion isolation using a thin sheet according to claim 1, characterized in that: The fixed connection parts of the said thin plates (14, 14') and the base part (11) are on the end face or bottom face or inner surface of the base part (11), and the fixed connection parts of the thin plates (14, 14') and the adjusting part (12) are on the end face or upper surface or inner surface of the adjusting part (12).

3. The optomechanical adjustment mechanism for motion isolation using a thin sheet according to claim 2, characterized in that: The said thin plate (14) is placed inside the arc swing table and is fixedly connected to the inner surfaces of the base part (11) and the adjusting part (12) respectively parallel to the swing shaft.

4. A photomechanical adjustment mechanism for motion isolation using a thin sheet, comprising a base portion serving as a position reference and an adjustment portion for supporting optical components and being position-adjustable, the thin sheet having its opposite ends fixed to the base portion and the adjustment portion respectively, the thin sheet's bending deformation in the thickness direction adapting to the movement in the adjustment direction of the adjustment portion, and the lateral displacement and deflection of the adjustment portion being limited in the width direction; characterized in that: The said adjusting mechanism is an adjusting mechanism with an arc swing table structure, including a base part (11) and an adjusting part (12). The said thin plate is a reed (141). The two ends of the reed (141) are respectively fixed to the base part (11) and the adjusting part (12). The fixed positions can be on the outer surface or inner surface or end face of the base part (11) and the adjusting part (12) respectively. There is an adjusting member (15) between the free ends of the base part (11) and the adjusting part (12) to adjust their relative swing.

5. The optomechanical adjustment mechanism for motion isolation using a thin sheet according to claim 4, characterized in that: The said reed (141) is respectively fixed to the end face of the base part (11) and the lower surface of the adjusting part (12). The inner surface of the bending part of the reed (141) contacts an arc surface; this arc surface is provided by a round bar (17) or is integral with the base part.

6. The optomechanical adjustment mechanism for motion isolation using a thin sheet according to claim 5, characterized in that: Parallel to the distal end of the said reed (141), there is a thin plate (14') fixedly connected to the base part (11) and the adjusting part (12).

7. The optomechanical adjustment mechanism for motion isolation using a thin sheet according to claim 5, characterized in that: The said base part (11) is fixedly installed with a mounting bracket (18) at its end. One or two spring ejector pins (19) are installed on the mounting bracket (18) and are pressed against the end face of the adjusting part (12) to apply a horizontal thrust.

8. The optomechanical adjustment mechanism for motion isolation using a thin sheet according to claim 4, characterized in that: The said base part (11), adjusting part (12) and reed (141) are of an integral structure, that is, the three parts are integrally in a "C" shape, and a horizontal thin plate is processed at the upper and lower connection parts as the reed (141).

9. A photomechanical adjustment mechanism for motion isolation using a thin sheet, comprising a base portion serving as a position reference and an adjustment portion for supporting optical components and being position-adjustable, the thin sheet having its opposite ends fixed to the base portion and the adjustment portion respectively, the thin sheet's bending deformation in the thickness direction adapting to the movement in the adjustment direction of the adjustment portion, and the lateral displacement and deflection of the adjustment portion being limited in the width direction; characterized in that: The said adjusting mechanism is a two-dimensional angle-adjusting arc swing table, including a base part (11) and an adjusting part (12). There is a ball (13') supporting at one corner between the base part (11) and the adjusting part (12). There is a set of adjusting members (15) in each of the two mutually perpendicular directions passing through the ball (13'). The adjusting part (12) can be adjusted in an arc swing around the ball (13') in the two mutually perpendicular swing axis directions; pre-bent thin plates (14) are respectively fixed parallel to the two swing axes; the thin plates (14) are installed at one end close to the swing axis, or at one end far from the swing axis, or one thin plate (14) is installed at each end.

10. A photomechanical adjustment mechanism for motion isolation using a thin sheet, comprising a base portion serving as a position reference and an adjustment portion for supporting optical components and being position-adjustable, the thin sheet having its opposite ends fixed to the base portion and the adjustment portion respectively, the thin sheet's bending deformation in the thickness direction adapting to the movement in the adjustment direction of the adjustment portion, and the lateral displacement and deflection of the adjustment portion being limited in the width direction; characterized in that: The adjustment mechanism is a horizontally moving adjustment mechanism, including a base (21) and an adjustment part (22). The adjustment part (23) at one end pushes and pulls the adjustment part (22) to move horizontally on the base (21). The middle part of the distal thin plate (24) is pre-bent, and both ends are perpendicular to the moving direction at the distal end of the adjustment part (23) and are fixed to the lower surface or end face of the base (21) and the upper surface or end face of the adjustment part (22) respectively.

11. The optomechanical adjustment mechanism for motion isolation using a thin sheet according to claim 10, characterized in that: A proximal sheet (25) is also fixed to the base portion (21) and the adjustment portion (22) at one end of the adjustment member (23).

12. A photomechanical adjustment mechanism for motion isolation using a thin sheet, comprising a base portion serving as a position reference and an adjustment portion for supporting optical components and being position-adjustable, the thin sheet having its opposite ends fixed to the base portion and the adjustment portion respectively, the thin sheet's bending deformation in the thickness direction adapting to the movement in the adjustment direction of the adjustment portion, and the lateral displacement and deflection of the adjustment portion being limited in the width direction; characterized in that: The adjustment mechanism is a turntable structure adjustment mechanism, including a chassis (31) and a turntable (32). Below the turntable (32) is a cavity (321). A rotating shaft (33) is fixed on the chassis (31) and accommodated in the cavity (321). A set of radially distributed springs (34) perpendicular to the rotating surface are used. Their proximal ends (341) are directly or indirectly fixed to the rotating shaft (33), and their distal ends are directly or indirectly fixed to the side wall of the cavity (321). The chassis (31) and the turntable (32) can be interchanged.

13. The optomechanical adjustment mechanism for motion isolation using a thin sheet according to claim 12, characterized in that: The chassis (31) has a frustum (311) on it, and the shaft (33) is at the center of the upper part of the frustum (311). The cavity (321) of the turntable (32) is cylindrical and coaxial with the frustum (311) and larger than the diameter of the frustum. A bearing (35) is installed between the frustum (311) and the side wall of the cavity (321). The inner ring (351) of the bearing (35) is fixed to the side wall of the frustum (311), and the outer ring (352) is fixed to the side wall of the cavity (321). In the upper part of the cavity (321), a set of radially distributed springs (34) perpendicular to the rotating surface are fixed directly or indirectly to the shaft (33) at their proximal end (341) and directly or indirectly to the side wall of the cavity (321) at their distal end.

14. A photomechanical adjustment mechanism for motion isolation using a thin sheet according to claim 12 or 13, characterized in that: The set of reeds mentioned is a reed spoke wheel (36) structure, which consists of a set of radially distributed reeds (34) perpendicular to the rotation plane. The proximal end (341) is fixed to the inner ring (361) of the spoke wheel, and the distal end is fixed to the outer ring (362) of the spoke wheel. The reed spoke wheel (36) is connected to the chassis (31) and the turntable (32) as follows: the inner ring (361) of the spoke wheel is fixed to the rotating shaft (33), and the outer ring (362) of the spoke wheel is fixed to the side wall of the cavity (321).

15. A photomechanical adjustment mechanism for motion isolation using a thin sheet, comprising a base portion serving as a position reference and an adjustment portion for supporting optical components and being position-adjustable, the thin sheet having its opposite ends fixed to the base portion and the adjustment portion respectively, the thin sheet's bending deformation in the thickness direction adapting to the movement in the adjustment direction of the adjustment portion, and the lateral displacement and deflection of the adjustment portion being limited in the width direction; characterized in that: The adjustment mechanism is a turntable structure adjustment mechanism, including a chassis (31) and a turntable (32); the spring spoke wheel (36) is composed of a set of radially distributed springs (34) perpendicular to the rotation surface, the proximal end (341) of which is fixed to the inner ring (361) of the spoke wheel, and the distal end of which is fixed to the outer ring (362) of the spoke wheel; the inner ring (361) of the spoke wheel is fixed to the turntable (32) through the inner flange (363), and the outer ring (362) of the spoke wheel is fixed to the chassis (31) through the outer flange (364).

16. The optomechanical adjustment mechanism for motion isolation using a thin sheet according to claim 15, characterized in that: The middle part of the chassis (31) is the chassis through hole (312).

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