Spectroscopic device, laser generating device, and scribing apparatus

Abstract

The application discloses a light splitting device, a laser generating device and a scribing equipment. The light splitting device comprises a light splitting plate, a plurality of light transmission holes are arranged on the light splitting plate; a light shielding plate, the light shielding plate has a first position and a second position, when the light shielding plate is located at the first position, all the light transmission holes are opened, when the light shielding plate is located at the second position, one or more light transmission holes are shielded, the light shielding plate can move from the first position to the second position along a first direction; the plurality of light transmission holes comprise a first light transmission hole and a second light transmission hole, the light splitting plate has a first state, a line between the first light transmission hole and the second light transmission hole is inclined relative to the first direction; the light shielding plate comprises a first edge, the first edge first shields the light transmission hole in the process that the light shielding plate moves from the first position to the second position, the first edge is inclined relative to the first direction, and the inclined direction of the first edge relative to the first direction is opposite to the inclined direction of the line between the first light transmission hole and the second light transmission hole of the light splitting plate in the first state relative to the first direction.

Description

Technical Field

[0001] This invention relates to the field of mechanical equipment technology, and in particular to a beam splitting device, a laser generating device, and a scribing device. Background Technology

[0002] In the process of photovoltaic chip manufacturing, a scribing process is used to remove part of the film layer. Common scribing processes are divided into mechanical scribing and laser scribing.

[0003] Laser scribing involves irradiating the surface of a workpiece with a laser beam, causing localized melting and vaporization of the irradiated area to remove the film layer. The main component of a laser scribing device is the laser generator, which includes a beam splitter. A single laser beam passes through multiple light-transmitting holes on the beam splitter and is divided into multiple laser beams at predetermined intervals for scribing. When the number of lines to be scribed is less than the number of light-transmitting holes, a light-shielding plate 20' is used to block part of the light-transmitting holes, reducing the laser beam used for scribing.

[0004] like Figure 1 and Figure 2 As shown in the figure, the structure and working state of the light shield 20' in a laser scribing device in the prior art are illustrated.

[0005] Figure 2 The light-shielding plate 20' is driven by the driving unit 50' and moves left and right along the direction of the paper in the figure to block or open the first light-transmitting hole 111'. However, due to the poor moving accuracy and small error range, it occasionally fails to move in place and cannot completely block the first light-transmitting hole 111'.

[0006] Figure 1 The light-shielding plate 20' in the middle did not operate in place and only blocked part of the first light-transmitting hole 111', so the B beam of light was still transmitted. Compared with the A beam of light that is normally transmitted from the second light-transmitting hole 112', the B beam of light is thinner, but it still scratched a line on the target film layer, resulting in a defective product. Summary of the Invention

[0007] To address the aforementioned technical problems, according to one aspect of the present invention, a beam-splitting device is provided, comprising a beam-splitting plate having a plurality of light-transmitting holes; the beam-splitting device further comprising a light-shielding plate having a first position and a second position, wherein when the light-shielding plate is in the first position, the light-shielding plate opens all the light-transmitting holes, and when the light-shielding plate is in the second position, the light-shielding plate blocks one or more light-transmitting holes, and the light-shielding plate is movable from the first position to the second position along a first direction; the plurality of light-transmitting holes include a first light-transmitting hole and a second light-transmitting hole, the beam-splitting plate has a first state, in which the line connecting the first light-transmitting hole and the second light-transmitting hole is inclined relative to the first direction; the light-shielding plate includes a first edge, which first blocks the light-transmitting holes during the movement of the light-shielding plate from the first position to the second position, the first edge is inclined relative to the first direction, and the inclination direction of the first edge relative to the first direction is opposite to the inclination direction of the line connecting the first light-transmitting hole and the second light-transmitting hole of the beam-splitting plate in the first state relative to the first direction.

[0008] According to another aspect of the present invention, a laser generating apparatus is also provided, comprising a light source and a beam splitter, wherein the beam splitter is the beam splitter described above, and the light emitted by the light source is emitted through a light-transmitting hole on the beam splitter plate of the beam splitter.

[0009] According to another aspect of the present invention, a scribing apparatus is also provided, comprising a laser generating device, wherein the laser generating device includes the aforementioned beam splitting device, or the laser generating device is the aforementioned laser generating device.

[0010] The first edge of the light-shielding plate of the beam splitting device of the present invention is inclined and its inclination direction is opposite to that of the line connecting the first light-transmitting hole and the second light-transmitting hole. Therefore, the distance that the first edge moves from the first light-transmitting hole to the second light-transmitting hole along the first direction is greater than the shortest distance of the projection of the first light-transmitting hole and the second light-transmitting hole in the first direction. As a result, the permissible error range of the light-shielding plate is increased, the influence of the movement accuracy error of the light-shielding plate on the light-shielding effect of the light-shielding plate is reduced, and the reliability of the beam splitting device is improved.

[0011] Other features and advantages of the invention will be set forth in the following description, and will be apparent in part from the description, or may be learned by practicing the invention. The objects and other advantages of the invention may be realized and obtained by means of the structures particularly pointed out in the description and the drawings. Attached Figure Description

[0012] The accompanying drawings are provided to further understand the technical solutions of the present invention and constitute a part of the specification. They are used together with the embodiments of this application to explain the technical solutions of the present invention and do not constitute a limitation on the technical solutions of the present invention.

[0013] Figure 1 A schematic diagram illustrating the scribing process performed by a scribing device in the prior art when the light shield has not moved to its proper position.

[0014] Figure 2 for Figure 1 A schematic diagram showing the structural relationship between the light-shielding plate and the light-transmitting hole of the scribing device;

[0015] Figure 3 A schematic diagram of the laser generator of the scribing apparatus of the present invention performing scribing;

[0016] Figure 4 This is a schematic diagram showing the structural relationship between the light-shielding plate and the light-transmitting hole of the beam-splitting device of the present invention;

[0017] Figure 5 This is a schematic diagram showing the operating state of the light-shielding plate of the beam-splitting device of the present invention;

[0018] Figure 6 This is a schematic diagram of the structure of the light-shielding plate of the beam-splitting device of the present invention.

[0019] illustrate: Figure 2 , Figure 4 and Figure 6 The triangles in the diagram are auxiliary lines drawn for ease of calculation; they are not solid structures, nor are they components of a beam splitter, laser generator, or scribing device. Detailed Implementation

[0020] To make the objectives, technical solutions, and advantages of the embodiments of the present invention clearer, the technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of the present invention. All other embodiments obtained by those skilled in the art based on the described embodiments of the present invention without creative effort are within the scope of protection of the present invention.

[0021] The terms “first,” “second,” and similar terms used in this invention do not indicate any order, quantity, or importance, but are merely used to distinguish different components.

[0022] In the description of this invention, it should be understood that the terms "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this invention.

[0023] In this invention, unless otherwise explicitly specified and limited, "above" or "below" the second feature can mean that the first feature is in direct contact with the second feature, or that the first feature is in indirect contact with the second feature through an intermediate medium. Furthermore, "above," "over," and "on top" of the second feature can mean that the first feature is directly above or diagonally above the second feature, or simply that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature can mean that the first feature is directly below or diagonally below the second feature, or simply that the first feature is at a lower horizontal level than the second feature.

[0024] In this document, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such a process, method, article, or apparatus. Unless otherwise specified, an element defined by the phrase "comprising..." does not exclude the presence of additional identical elements in the process, method, article, or apparatus that includes that element.

[0025] In the description of this invention, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "linking" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this invention based on the specific circumstances.

[0026] According to one aspect of the present invention, a beam splitting device is provided, such as... Figures 3 to 6As shown, the beam splitter includes a beam splitter 10 with a plurality of light-transmitting holes 11. The beam splitter also includes a light-shielding plate 20, which has a first position and a second position. When the light-shielding plate 20 is in the first position, it opens all the light-transmitting holes 11. When the light-shielding plate 20 is in the second position, it blocks one or more light-transmitting holes 11. The light-shielding plate 20 can move along a first direction from the first position to the second position. The plurality of light-transmitting holes 11 include a first light-transmitting hole 111 and a second light-transmitting hole 112. The beam splitter 10 has... There is a first state in which the line connecting the first light-transmitting hole 111 and the second light-transmitting hole 112 of the beam splitter 10 is inclined relative to a first direction; the light-shielding plate 20 includes a first edge 21, which first blocks the light-transmitting hole 11 during the movement of the light-shielding plate 20 from the first position to the second position. The first edge 21 is inclined relative to the first direction, and the inclination direction of the first edge 21 relative to the first direction is opposite to the inclination direction of the line connecting the first light-transmitting hole 111 and the second light-transmitting hole 112 of the beam splitter 10 in the first state relative to the first direction.

[0027] The first edge 21 of the light-shielding plate 20 of the beam splitting device of the present invention is inclined and its inclination direction is opposite to that of the line connecting the first light-transmitting hole 111 and the second light-transmitting hole 112. Therefore, the distance X2 from the first light-transmitting hole 111 to the second light-transmitting hole 112 along the first direction is greater than the shortest distance X1 of the projection of the first light-transmitting hole 111 and the second light-transmitting hole 112 in the first direction. As a result, the permissible error range of the light-shielding plate 20 is increased, the influence of the movement accuracy error of the light-shielding plate 20 on the light-shielding effect of the light-shielding plate 20 is reduced, and the reliability of the beam splitting device is improved.

[0028] Combination Figure 2 , Figure 4 and Figure 6 The center distance between the first light-transmitting hole 111 and the second light-transmitting hole 112 is a, and the line connecting the first light-transmitting hole 111 and the second light-transmitting hole 112 is inclined at an angle of α° relative to the first direction. Therefore, the center distance between the projections of the first light-transmitting hole 111 and the second light-transmitting hole 112 in the first direction is b.

[0029] like Figure 2 As shown, the existing light-shielding plate 20' is rectangular with its edges perpendicular to the first direction. Therefore, the actual permissible error range for the light-shielding plate 20' operating between the first light-transmitting hole 111' and the second light-transmitting hole 112' is X1, where X1 = b - 2r, and r is the radius of the light-transmitting hole. Figure 4 The first edge 21 of the light-shielding plate 20 is inclined relative to the first direction, and the actual permissible error of the light-shielding plate 20' operating between the first light-transmitting hole 111' and the second light-transmitting hole 112' is X2.

[0030] Theoretically, the angle between the first edge 21 of the light-shielding plate 20 and the line connecting the first light-transmitting hole 111 and the second light-transmitting hole 112 of the beam-splitting plate 10 in the first state is greater than 0° and less than 180°.

[0031] Provided that the line connecting the first light-transmitting hole 111 and the second light-transmitting hole 112 is inclined relative to the first direction, and the inclination direction of the first edge 21 relative to the first direction is opposite to that of the first direction, the smaller the angle between the first edge 21 and the first direction, the smaller the permissible error range; conversely, the larger the angle, the larger the permissible error range.

[0032] Therefore, preferably, the angle between the first edge 21 of the light-shielding plate 20 and the line connecting the first light-transmitting hole 111 and the second light-transmitting hole 112 of the beam-splitting plate 10 in the first state is less than 180° and not less than 45°, that is, greater than or equal to 45° and less than 180°.

[0033] When the angle between the line connecting the first light-transmitting hole 111 and the second light-transmitting hole 112 and the first direction remains unchanged, the larger the angle between the first edge 21 and the line connecting the first light-transmitting hole 111 and the second light-transmitting hole 112, the smaller the angle between the first edge 21 and the first direction. Although the volume of the light-shielding plate 20 remains unchanged, the space occupied by the light-shielding plate 20 in the mechanism will be larger.

[0034] Therefore, preferably, the angle between the first edge 21 of the light-shielding plate 20 and the line connecting the first light-transmitting hole 111 and the second light-transmitting hole 112 of the beam-splitting plate 10 in the first state is greater than 45° and not greater than 120°, that is, greater than 45° and less than or equal to 120°.

[0035] More preferably, the angle between the first edge 21 of the light-shielding plate 20 and the line connecting the first light-transmitting hole 111 and the second light-transmitting hole 112 of the beam splitter 10 in the first state is 90°.

[0036] like Figure 4 As shown, the line connecting the first light-transmitting hole 111 and the second light-transmitting hole 112 is tilted at an angle of α° relative to the first direction, and the line connecting the first light-transmitting hole 111 and the second light-transmitting hole 112 is tilted at an angle of β° relative to the first direction, and the sum of the two is 90°. Figure 4 The two auxiliary triangles in the equation are similar right triangles. According to the principle of similar triangles, X2 / y = a / b, where y = a - 2r. Since the hypotenuse of a right triangle is greater than its legs, a > b. Therefore, X2 > y = (a - 2r) > (b - 2r) = X1, which means X2 is greater than X1.

[0037] In this embodiment, the light-shielding plate 20 is a parallelogram. One long side of the light-shielding plate 20 is the first edge 21, while one short side is connected to the driving unit 50, which drives the light-shielding plate 20 to move in a first direction. In other embodiments not shown in the figures, the light-shielding plate 20 can have various shapes, as long as the first edge 21 is relatively inclined and can block the light-transmitting hole 11.

[0038] Preferably, the beam splitter 10 has a second state. The distance between the projections of the first light-transmitting hole 111 and the second light-transmitting hole 112 in the first direction of the beam splitter 10 in the second state is greater than the distance between the projections of the first light-transmitting hole 111 and the second light-transmitting hole 112 in the first direction of the beam splitter 10 in the first state. The beam splitter 10 rotates along an axis perpendicular to the plate surface to move to the first state or the second state.

[0039] The beam splitting device includes a rotation drive unit connected to the beam splitting plate 10 to drive the beam splitting plate 10 to rotate, thereby adjusting the angle between the line connecting the first light-transmitting hole 111 and the second light-transmitting hole 112 and the first direction.

[0040] like Figure 3 As shown, the distance projected by the light-transmitting aperture 11 in the first direction is the spacing of the scribed lines. Figure 5 and Figure 6 As shown, the spacing of the scribed lines can be controlled by adjusting the distance projected by the light-transmitting hole 11 in the first direction by rotating the beam splitter 10.

[0041] Preferably, during the process of the beam splitter 10 moving from the first state to the second state, the distance between the projections of the first light-transmitting hole 111 and the second light-transmitting hole 112 in the first direction is the largest when the beam splitter 10 is in the second state, and the distance between the projections of the first light-transmitting hole 111 and the second light-transmitting hole 112 in the first direction is the smallest when the beam splitter 10 is in the first state. The angle of rotation of the beam splitter 10 from the first state to the second state is greater than 0° and less than 90°.

[0042] In practical applications, the distance between the projections of the first light-transmitting aperture 111 and the second light-transmitting aperture 112 in the first direction cannot be less than the sum of their radii, i.e., b < 2r. If the maximum rotation angle is θ, then a * cosθ must be satisfied. <b。

[0043] Preferably, the rotation center of the beam splitter 10 is the center of the circumcircle of the plurality of light-transmitting holes 11.

[0044] If the multiple light-transmitting holes 11 are arranged in a straight line, the rotation center of the beam splitter 10 is the midpoint of the line connecting the multiple light-transmitting holes 11.

[0045] In such Figure 5In the embodiment shown, the beam splitter 10 is circular, and a plurality of light-transmitting holes 11 are arranged symmetrically with the center of the beam splitter 10 as the center, and the beam splitter 10 rotates with the center as the rotation center.

[0046] Preferably, the beam splitter 10 has a second state, and the line connecting the first light-transmitting hole 111 and the second light-transmitting hole 112 of the beam splitter 10 in the second state is parallel to the first direction.

[0047] refer to Figure 5 In the illustrated embodiment, the beam splitter 10 has a total of 4 light-transmitting holes 11. The solid lines represent the distribution of the light-transmitting holes 11 when the beam splitter 10 is in the second state. It can be seen that the distance of the projection of the light-transmitting holes 11 in the first direction is the largest at this time, which is a. After being scribed in this state, the distance between the scribing lines is also the largest, which is a-2r. The dashed lines represent the distribution of the light-transmitting holes 11 when the beam splitter 10 is in the first state. It can be seen that the distance of the projection of the light-transmitting holes 11 in the first direction is the smallest at this time, which is b. After being scribed in this state, the distance between the scribing lines is also the smallest, which is b-2r.

[0048] Preferably, the beam splitting device further includes a rotating part connected to the light-shielding plate 20, used to rotate the light-shielding plate 20 to change the angle between the first edge 21 and the first direction.

[0049] In some embodiments not shown in the accompanying drawings, the light-shielding plate 20 is also connected to a rotating part. The rotating part can be disposed between the light-shielding plate 20 and the driving part 50 for rotating the light-shielding plate 20 to change the tilt angle of the first edge 21, thereby cooperating with the rotation of the beam splitter 10. If the rotation angle of the beam splitter 10 is small, that is, the angle between the line connecting the first light-transmitting hole 111 and the second light-transmitting hole 112 and the first direction is large, the light-shielding plate 20 can be driven by the rotating part to make the angle between the first edge 21 and the first direction larger, thereby controlling the value of the permissible error range X2 of the movement of the light-shielding plate 20 within a reasonable range and avoiding X2 being too large and affecting the processing efficiency.

[0050] In a specific embodiment of the beam splitting device of the present invention, the spacing of the light-transmitting holes 11 on the beam splitter 10 is 10 mm, and the diameter of the light-transmitting holes is 1 mm. If the beam splitter 10 splits the laser into beams with a spacing of 6 mm, then X1 is 4 mm and X2 is 13.3 mm. It can be seen that the error range of the operation of the light-shielding plate 20 is increased. If we calculate based on the light-shielding plate 20 moving and shifting by 1 mm every 300 times, the existing beam splitting device needs to be calibrated once every 1200 operations, while the beam splitting device of the present invention only needs to be calibrated once every 3990 operations. Therefore, the frequency of downtime calibration is reduced, labor costs are saved, and production efficiency is improved.

[0051] According to another aspect of the present invention, a laser generating apparatus is also provided, such as... Figure 3As shown, the laser generating device includes a light source 30 and a beam splitter. The beam splitter is the beam splitter described above. The light emitted by the light source 30 is emitted through the light-transmitting hole 11 on the beam splitter plate 10 of the beam splitter.

[0052] In this embodiment, the light source 30 is a laser light source. The laser emitted by the light source 30 is reflected by the reflector 40 and irradiated onto the beam splitter. The beam splitter then splits the laser into multiple beams to be laser-etched on the workpiece 100.

[0053] According to another aspect of the present invention, a scribing apparatus is also provided, comprising a laser generating device, wherein the laser generating device includes the aforementioned beam splitting device, or the laser generating device is the aforementioned laser generating device.

[0054] The scribing equipment includes a stage for supporting the workpiece and a positioning fixture for positioning and fixing the workpiece. After the workpiece enters the scribing equipment, it is fixed on the stage by the positioning fixture. Then, a laser generator emits a laser to remove the film layer on the workpiece, forming scribing lines, i.e., the scribing operation.

[0055] The scribing equipment of this invention can be applied to the production of photovoltaic panels, for example, to scribing the coating layer on a glass substrate. It can also be used in other fields, including but not limited to chip manufacturing or precision machining.

[0056] While the embodiments disclosed in this invention are as described above, the content is merely for the purpose of facilitating understanding of the invention and is not intended to limit the invention. Any person skilled in the art to which this invention pertains may make any modifications and changes to the form and details of the implementation without departing from the spirit and scope disclosed herein; however, the scope of patent protection of this invention shall still be determined by the scope defined in the appended claims.

Claims

1. A light splitting device comprising a light splitting plate (10) having a plurality of light transmitting holes (11) formed therein; characterized in that, The light splitting device further comprises a light shielding plate (20), the light shielding plate (20) has a first position and a second position, when the light shielding plate (20) is in the first position, the light shielding plate (20) opens all the light transmission holes (11), when the light shielding plate (20) is in the second position, the light shielding plate (20) shields one or more of the light transmission holes (11), the light shielding plate (20) can move from the first position to the second position along a first direction; The plurality of light transmission holes (11) comprises a first light transmission hole (111) and a second light transmission hole (112), the light splitting plate (10) has a first state, in the first state, a line between the first light transmission hole (111) and the second light transmission hole (112) is inclined relative to the first direction; The light shielding plate (20) comprises a first edge (21), the first edge (21) first shields the light transmission hole (11) in the process that the light shielding plate (20) moves from the first position to the second position, the first edge (21) is inclined relative to the first direction, an inclination direction of the first edge (21) relative to the first direction is opposite to an inclination direction of the line between the first light transmission hole (111) and the second light transmission hole (112) of the light splitting plate (10) in the first state relative to the first direction; An included angle between the first edge (21) of the light shielding plate (20) and the line between the first light transmission hole (111) and the second light transmission hole (112) of the light splitting plate (10) in the first state is less than 180° and not less than 45°; The included angle between the first edge (21) of the light shielding plate (20) and the line between the first light transmission hole (111) and the second light transmission hole (112) of the light splitting plate (10) in the first state is 90°; The light splitting plate (10) has a second state, a distance between projections of the first light transmission hole (111) and the second light transmission hole (112) of the light splitting plate (10) in the second state in the first direction is greater than a distance between projections of the first light transmission hole (111) and the second light transmission hole (112) of the light splitting plate (10) in the first state in the first direction, the light splitting plate (10) rotates along an axis perpendicular to the plate to move to the first state or the second state.

2. The light splitting device of claim 1, wherein In the process that the light splitting plate (10) moves from the first state to the second state, the distance between the projections of the first light transmission hole (111) and the second light transmission hole (112) of the light splitting plate (10) in the second state in the first direction is maximum, the distance between the projections of the first light transmission hole (111) and the second light transmission hole (112) of the light splitting plate (10) in the first state in the first direction is minimum, an angle rotated by the light splitting plate (10) from the first state to the second state is greater than 0° and less than 90°.

3. The light splitting device of claim 1, wherein A center of rotation of the light splitting plate (10) is a center of a circumscribed circle of the plurality of light transmission holes (11).

4. The light splitting device of claim 1, wherein The light splitting plate (10) has a second state, and a line between the first light transmission hole (111) and the second light transmission hole (112) of the light splitting plate (10) in the second state is parallel to the first direction.

5. The light splitting device according to any one of claims 1 to 4, wherein The light splitting device further comprises a rotating part connected with the light shielding plate (20) and used for rotating the light shielding plate (20) to change an included angle between the first edge (21) and the first direction.

6. A laser generating device, comprising a light source (30) and a beam splitting device, characterized in that, The light splitting device is the light splitting device according to any one of claims 1 to 5, and the light emitted by the light source (30) is emitted via the light transmission hole (11) on the light splitting plate (10) of the light splitting device.

7. A scribing apparatus comprising a laser generating device, characterized in that The laser generating device comprises the light splitting device according to any one of claims 1 to 5, or the laser generating device is the laser generating device according to claim 6.

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