Automatic Grinding Equipment for Large-Size Electrodes

Abstract

The present invention discloses an automatic grinding equipment for large-sized electrodes, including a grinding processing table, an X-axis cross beam, a Y-axis cross beam and a Z-axis grinding mechanism. The X-axis cross beam is arranged on the left and right sides of the grinding processing table. The Y-axis cross beam is slidably connected to the X-axis cross beam, and the Z-axis grinding mechanism is slidably connected to the Y-axis cross beam. A water baffle is provided on the grinding processing table, and the water baffle is connected to the frame of the grinding processing table. The frame includes a front frame and a rear frame, and the front frame and the rear frame are connected together by a balance block. The balance block includes a main balance block and a sub-balance block. The main balance block is welded to the front frame, and the sub-balance block is welded to the rear frame. The main balance block and the sub-balance block are connected together by a parallel bolt. A horizontal adjustment hole for adjusting parallelism is also provided on the main balance block. A horizontal adjustment bolt is arranged in the horizontal adjustment hole, which can play a role in adjusting parallelism and can also better absorb the vibration energy of the two frames during the later working process, making the overall structure more stable.

Description

Technical Field

[0001] The present invention belongs to the technical field of electrode grinding, and particularly relates to an automatic grinding equipment for large-sized electrodes. Background Art

[0002] For CVD equipment and Dry Etch equipment, the grinding and polishing of the internal core electrode components have always been difficult points in the liquid crystal panel display industry. The surface roughness, specularity, and flatness of the core parts have a great impact on the deposition range, uniformity, service life, etc. of the Glass vapor deposition. Among them, there is a relatively special product (Susceptor, see Figure 7). This product has a Shaft on its back, resulting in an overall height of 1.2 - 1.8 meters, which requires relatively high requirements for the grinding fixed table, and it is very inconvenient during manual operation.

[0003] In order to improve the added value of our company's products, seek new benefit growth points, and solve practical problems, relying on panel manufacturers, technical personnel were organized to conduct relevant analysis experiments in groups. Based on obtaining a large number of technical parameters, the most optimized relevant data scheme was selected to draw a conclusion and definition. It is necessary to specially customize an automatic grinding equipment for large-sized electrodes that can grind the core components of CVD Chamber and Dry Etch Chamber equipment during the production process of this core component. In order to save development costs, it is required that the automatic grinding equipment for large-sized electrodes in this project needs to meet the standards of different processes of two core equipment components to perform grinding, and be applicable to the grinding and manufacturing of all core products of large-sized high-generation lines, so as to meet technical requirements such as increasing production efficiency, improving quality, and reducing costs. Summary of the Invention

[0004] Aiming at the deficiencies in the prior art, the purpose of the present invention is to provide an automatic grinding equipment for large-sized electrodes.

[0005] To achieve the above purpose, the technical solution of the present invention is: an automatic grinding equipment for large-sized electrodes, characterized in that it includes a grinding processing table, an X-axis cross beam, a Y-axis cross beam, and a Z-axis grinding mechanism. The X-axis cross beam is arranged on the left and right sides of the grinding processing table. The Y-axis cross beam spans the grinding processing table and is slidably connected to the X-axis cross beam. The Z-axis grinding mechanism is slidably connected to the Y-axis cross beam.

[0006] Further, on two sides of the grinding processing table adjacent to the X-axis cross beam, there are water baffle plates. On the side where the water baffle plates are connected to the grinding processing table, there are buckles. The buckles are provided with mounting holes. The water baffle plates are connected to the frame of the grinding processing table through fasteners in cooperation with the mounting holes on the buckles.

[0007] Further, the grinding table includes a frame and a workbench surface. The workbench surface is installed at the upper end of the frame, and the lower end of the frame is fixedly connected to the ground. The frame and the workbench surface are integrally formed by welding and precision machining, and an overflow groove is provided around the workbench surface.

[0008] Further, horizontal pads and a center pad are provided on the workbench surface. The center pad is located at the center of the workbench surface, the horizontal pads cover the workbench surface, through holes are provided on the horizontal pads, a center hole is provided on the center pad, and an overflow groove is provided around the center hole.

[0009] Further, the frame is a front-back centered split structure. The frame includes a front frame and a rear frame, and the front frame and the rear frame are connected together by balance blocks.

[0010] Further, the balance blocks include a main balance block and a sub-balance block. The main balance block is welded to the front frame, the sub-balance block is welded to the rear frame, the main balance block and the sub-balance block are connected together by parallel bolts, and a horizontal adjustment hole for adjusting parallelism is also provided on the main balance block, and a horizontal adjustment bolt is provided in the horizontal adjustment hole.

[0011] Further, a guide rail and a connecting plate are provided on the X-axis cross beam. The guide rail Ⅰ is arranged on the upper end surface of the X-axis cross beam, the connecting plate is slidably connected to the guide rail, and the lower end of the X-axis cross beam is connected to the grinding table through an I-beam.

[0012] Further, the end of the Y-axis cross beam is connected to the connecting plate of the X-axis cross beam. The Y-axis cross beam includes a rack fixed beam, a guide rail fixed beam, a rack, a guide rail Ⅱ, a motor mounting seat, and a motor for driving the Y-axis cross beam to move along the X-axis cross beam. The motor is installed on the motor mounting seat, the rack is installed on the rack fixed beam, the rack is connected to the output shaft of the motor, the guide rail Ⅱ is installed on the guide rail fixed beam, and the Z-axis grinding structure is slidably connected to the guide rail Ⅱ.

[0013] Further, the Z-axis grinding mechanism includes a Z-axis module for controlling the movement of the grinding structure in the Z-axis direction, a grinding head, a slide plate connecting plate, a motor for driving the grinding head to work, and a motor mounting seat. The slide plate connecting plate is connected to the guide rail Ⅱ of the Y-axis cross beam. A gear meshing with the rack on the Y-axis cross beam is provided on the slide plate connecting plate. The Z-axis module is slidably connected to the slide plate connecting plate through a guide rail. The lower end of the Z-axis module is connected to the motor mounting seat. The motor is installed on the motor mounting seat, the output shaft of the motor is connected to the grinding head mounting seat, and the grinding head is installed on the grinding head mounting seat.

[0014] Further, a linkage mechanism is provided between the motor mounting seat and the grinding head mounting seat. The linkage mechanism includes an X linkage plate, a Y linkage plate, a linkage shaft, and an eccentric block. One side of the eccentric block is connected to the output shaft of the motor, and the other side of the eccentric block is connected to the linkage shaft. The X linkage plate and the Y linkage plate are arranged vertically. A central guide post is provided on the Y linkage plate. The linkage shaft passes through the central through holes of the fixed plate and the X linkage plate and is connected to the central guide post. The grinding head mounting seat is connected to the bottom end of the Y linkage plate.

[0015] The advantages of adopting the technical solution of the present invention are as follows:

[0016] 1. The present invention can meet the grinding and polishing of all large electrode sizes, meet the grinding and polishing of products with different process requirements, simulate the matching degree of on-site manual grinding technology, improve efficiency through automation on the basis of original manual grinding, improve the product qualification rate, reduce human operation errors, reduce the production and operation costs of the company, and meet the grinding of large-generation line Susceptor products.

[0017] 2. Considering from a practical perspective that the parallel connection of two large frames requires high precision and high stability without jitter during the later mechanical operation process, a balance block is designed to achieve the adjustment of the levelness and parallel connection. The balance block includes a main balance block and a sub-balance block. The main balance block and the sub-balance block are connected together by parallel bolts. The main balance block is also provided with a horizontal adjustment hole for adjusting the parallelism. A horizontal adjustment bolt is provided in the horizontal adjustment hole, which can play a role in adjusting the parallelism and can also better absorb the vibration of the two frames during the later working process, making the overall structure more stable. The sub-balance block has only one through hole for the bolt of the main balance block to pass through and then be connected in parallel.

[0018] 3. After installing the Z-axis module mechanism with the slide connection plate as the reference, the motor mounting seat is positioned. The lower end of the motor mounting seat is a fixed plate, and the lower end of the fixed plate has an X linkage plate and a Y linkage plate. During the operation of the motor, the eccentric block will drive the linkage shaft, and the linkage shaft will drive the two linkage plates through the central guide post to simulate the X and Y direction linkage actions, reasonably simulating the on-site personnel grinding operation state. The fixed seat of the grinding head mechanism is designed to be adjustable in level and can be quickly disassembled and replaced with different specifications of grinding heads to meet the needs of various products. During the grinding process, it is considered that when the mechanical Z-axis descends through the module mechanism, the parallel and perpendicular contact with the product is ensured through the cooperation of the guide post and the guide sleeve. After applying its own weight to the surface of the product, a good grinding effect can be obtained, and at the same time, the force loss of the Z-axis module is effectively protected. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] The present invention will be further described in detail below in conjunction with the drawings and specific embodiments:

[0020] Figure 1 It is a schematic structural diagram of the grinding processing table of the present invention

[0021] Figure 2 Schematic diagram of the balance weight structure of the present invention;

[0022] Figure 3 Schematic diagram of the Y-axis crossbeam structure of the present invention;

[0023] Figure 4 Side view schematic diagram of the Y-axis crossbeam of the present invention;

[0024] Figure 5 Schematic diagram of the Z-axis grinding mechanism structure of the present invention;

[0025] Figure 6 Schematic diagram of the linkage mechanism structure of the present invention;

[0026] Figure 7 Product drawing of the Susceptor for large generation lines.

[0027] The markings in the above figures are respectively: 1, grinding table; 2, X-axis crossbeam; 3, Y-axis crossbeam; 31, rack fixed beam; 32, guide rail fixed beam; 33, motor mounting base; 4, Z-axis grinding mechanism. Detailed implementation manners

[0028] In the present invention, it should be understood that the terms "length", "width", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial direction", "plane direction", "circumferential direction", etc. indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings. It is only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be construed as a limitation to the present invention.

[0029] The present invention aims to solve the following technical problems: 1. Meet the grinding and polishing of all large electrode sizes; 2. Meet the grinding and polishing of products with different process requirements; 3. Simulate the matching degree of on-site manual grinding process; 4. Improve efficiency by automating on the basis of the original manual grinding; 5. Improve the product qualification rate and reduce human operation errors; 6. Reduce the company's production and operation costs; 7. Meet the grinding of the Susceptor products for large generation lines.

[0030] As Figures 1 to 6 shown, the present invention provides an automatic grinding equipment for large-sized electrodes, which is characterized in that it includes a grinding table 1, an X-axis crossbeam 2, a Y-axis crossbeam 3 and a Z-axis grinding mechanism 4. The X-axis crossbeam 2 is arranged on the left and right sides of the grinding table 1, the Y-axis crossbeam 3 spans the grinding table 1 and is slidably connected to the X-axis crossbeam 2, and the Z-axis grinding mechanism 4 is slidably connected to the Y-axis crossbeam 3.

[0031] On two sides of the grinding table 1 adjacent to the X-axis crossbeam 2, there are water baffle plates 11. On one side of the water baffle plate 11 connected to the grinding table 1, there are buckles 111. There are mounting holes on the buckles 111. The water baffle plate 11 is connected to the frame 12 of the grinding table 1 through fasteners cooperating with the mounting holes on the buckles 111. The water baffle plate 11 is a split and spliced structure. The water baffle plate is designed with SUS304 stainless steel. Because the process of processing the five-span baffle plate is complex and the cost is high in the production process, the water baffle plate is designed as a split type in the design process. There are 5 pieces in the front and back of the water baffle plate, a total of 10 pieces.

[0032] The grinding table 1 includes a frame 12 and a workbench surface 13. The workbench surface 13 is installed at the upper end of the frame 12. The lower end of the frame 12 is fixedly connected to the ground. The frame 12 and the workbench surface 13 are integrally formed by welding and precision machining to ensure the flatness of the horizontal plane. There is an overflow groove around the workbench surface 13 for easy drainage.

[0033] There are horizontal pads 131 and a center pad 132 on the workbench surface 13. The center pad 132 is located at the center of the workbench surface 13. The horizontal pads 131 cover the workbench surface 13. There are through holes on the horizontal pads 131. There is a center hole on the center pad 132. There is an overflow groove around the center hole. Preferably, the horizontal pads 131 are made of PA6 black as a whole. The middle feature is designed as a through hole to avoid the Shaft of the Susceptor, which is convenient for processing Susceptors of various large-generation lines. There is a through hole on the center pad 132 for the Susceptor to give way. There is an overflow groove designed around the center hole to facilitate drainage during the grinding process and also serve as a reference for the positioning benchmark.

[0034] Because the size of the grinding machine is relatively special, 5.3 meters long in the X direction and 5 meters wide in the Y direction, there is no such large machine tool on the market that can be integrally processed. From a practical perspective, the design considers a split design in the middle to form two front and rear frames for design. The frame and the workbench surface 13 are integrally formed by welding and precision machining to ensure the flatness of the horizontal plane. The frame 12 is a split structure with front and rear alignment. The frame 12 includes a front frame 121 and a rear frame 122. The front frame 121 and the rear frame 122 are connected together by a balance block 14.

[0035] From a practical perspective, when two large frames are connected in parallel, high precision is required and high stability is needed during the later mechanical operation without jitter. A balance block is designed to achieve the adjustment of the level and parallel connection. The balance block 14 includes a main balance block 141 and a sub-balance block 142. The main balance block 141 is welded to the front frame 121, and the sub-balance block 142 is welded to the rear frame 122. The main balance block 141 and the sub-balance block 142 are connected together by a parallel bolt 143. The main balance block 141 is also provided with a horizontal adjustment hole for adjusting the parallelism. A horizontal adjustment bolt 144 is provided in the horizontal adjustment hole, which can not only adjust the parallelism but also better absorb the vibration of the two frames during the later work process, making the overall structure more stable. The characteristic of the sub-balance block is that there is only one through hole for the bolt of the main balance block to pass through and then be connected in parallel.

[0036] The X-axis crossbeam 2 is provided with a guide rail 21 and a connecting plate 22. The guide rail Ⅰ 21 is arranged on the upper end surface of the X-axis crossbeam 2. The connecting plate 22 is slidably connected to the guide rail 21. The lower end of the X-axis crossbeam 2 is connected to the grinding table 1 through an I-beam. The lower part of the I-beam has screws and pin holes for positioning to ensure the straightness and parallelism of both sides.

[0037] The Y-axis crossbeam 3 is designed as a gantry crossbeam. The end of the Y-axis crossbeam 3 is connected to the connecting plate 22 of the X-axis crossbeam 2. The Y-axis crossbeam 3 includes a rack fixed beam 31, a guide rail fixed beam 32, a rack, a guide rail Ⅱ 34, a motor mounting seat 33, and a motor 35 for driving the Y-axis crossbeam 3 to move along the X-axis crossbeam 2. The motor 35 is installed on the motor mounting seat 33. The rack is installed on the rack fixed beam 31. The rack is connected to the output shaft of the motor 35. The guide rail Ⅱ 34 is installed on the guide rail fixed beam 32. The Z-axis grinding structure 4 is slidably connected to the guide rail Ⅱ 34.

[0038] Preferably, adjustment holes are designed at the installation connection parts at both ends of the Y-axis crossbeam 3 to reduce machining errors. The left side shown in the figure is designed as a motor mounting seat. The double guide rail fixed beams are designed on the side. A gear position reference is designed at the place where the guide rail is installed on the fixed beam and the crossbeam strength is increased. The rack mounting fixed beam is designed on the upper end surface.

[0039] The Z-axis grinding mechanism 4 includes a Z-axis module 41 for controlling the movement of the grinding structure in the Z-axis direction, a grinding head 42, a slide table connecting plate 43, a motor 44 for driving the grinding head 42 to work, and a motor mounting seat 45. The slide table connecting plate 43 is connected to the guide rail Ⅱ 34 of the Y-axis crossbeam 3. The slide table connecting plate 43 is provided with a gear meshing with the rack on the Y-axis crossbeam 3. The Z-axis module 41 is slidably connected to the slide table connecting plate 43 through a guide rail. The lower end of the Z-axis module 41 is connected to the motor mounting seat 45. The motor 44 is installed on the motor mounting seat 45. The output shaft of the motor 44 is connected to the grinding head mounting seat 46. The grinding head 42 is installed on the grinding head mounting seat 46.

[0040] The Z-axis grinding mechanism 4 further includes a fixing plate 47, which is located below the motor mounting base 45. A guide post 471 is provided on the fixing plate 47, and a guide sleeve 451 is provided on the motor mounting base 45. The guide post 471 is inserted into the guide sleeve 451. A linkage mechanism is further provided between the motor mounting base 45 and the grinding head mounting base 46. The linkage mechanism includes an X-linkage plate 51, a Y-linkage plate 52, a linkage shaft 53, and an eccentric block 10. One side of the eccentric block 10 is connected to the output shaft of the motor 44, and the other side of the eccentric block 10 is connected to the linkage shaft 53. The X-linkage plate 51 and the Y-linkage plate 52 are arranged vertically. A central guide post is provided on the Y-linkage plate 52. The linkage shaft 53 passes through the central through holes of the fixing plate 47 and the X-linkage plate 51 and is connected to the central guide post. The grinding head mounting base 46 is connected to the bottom end of the Y-linkage plate 52. An X-direction slide rail is provided on the bottom end face of the fixing plate 47 where it is connected to the X-linkage plate 51. The X-linkage plate 51 is slidably connected to the fixing plate 47. A Y-direction slide rail is provided on the bottom end face of the X-linkage plate 51. The Y-linkage plate 52 is slidably connected to the X-linkage plate 51.

[0041] The specific connection method is as follows: After installing the Z-axis module mechanism with the slide table connection plate as the reference, position the motor mounting base. The lower end of the motor mounting base is the fixing plate. There are an X-linkage plate and a Y-linkage plate at the lower end of the fixing plate 47. During the operation of the motor 44, it will drive the linkage shaft. The linkage shaft drives the two linkage plates through the central guide post to simulate the X and Y direction linkage actions, reasonably simulating the grinding operation state of on-site personnel. The Z-axis mechanism is the core design mechanism of the grinding machine, and its optimal use section for the rotation radius axis is 30 - 40 mm. The fixing seat of its grinding head mechanism is designed to be horizontally adjustable and can be quickly disassembled and replaced with different specifications of grinding heads to meet the requirements of various products. During the grinding process, it is considered that when the pre-pressure mechanical Z-axis descends through the module mechanism, it contacts the product in parallel and vertically through the cooperation of the guide post 471 and the guide sleeve 451. After applying its own weight to the product surface, good grinding effects can be obtained, and at the same time, the force loss of the Z-axis module is effectively protected.

[0042] The grinding head can be replaced with sandpapers of different meshes and is completely universal for the process requirements of any product, and the disassembly is convenient and fast.

[0043] After the successful development of the present invention, the annual labor cost is reduced by 600,000 yuan, the production efficiency is increased by 50%, the annual average gain in income is 5 million yuan, the product qualification rate and service life are increased, and the rework defect rate is reduced. The total annual income is not less than 5.6 million yuan, greatly increasing the production capacity required by our company.

[0044] The above has described the present invention by way of example in conjunction with the accompanying drawings. Obviously, the specific implementation of the present invention is not limited by the above methods. As long as various non-substantive improvements are made by adopting the technical solutions of the present invention, or the concept and technical solutions of the present invention are directly applied to other occasions without improvement, they are all within the protection scope of the present invention.

Claims

1. An automatic grinding equipment for large-sized electrodes, characterized in that: It includes a grinding table (1), an X-axis cross beam (2), a Y-axis cross beam (3) and a Z-axis grinding mechanism (4). The X-axis cross beam (2) is arranged on the left and right sides of the grinding table (1). The Y-axis cross beam (3) spans across the grinding table (1) and is slidably connected to the X-axis cross beam (2). The Z-axis grinding mechanism (4) is slidably connected to the Y-axis cross beam (3). The Z-axis grinding mechanism (4) includes a Z-axis module (41) for controlling the movement of the grinding structure in the Z-axis direction, a grinding head (42), a slide table connecting plate (43), a motor (44) for driving the grinding head (42) to work, and a motor mounting seat (45). The slide table connecting plate (43) is connected to the guide rail II (34) of the Y-axis cross beam (3). A gear meshing with the rack on the Y-axis cross beam (3) is provided on the slide table connecting plate (43). The Z-axis module (41) is slidably connected to the slide table connecting plate (43) through a guide rail. The lower end of the Z-axis module (41) is connected to the motor mounting seat (45). The motor (44) is mounted on the motor mounting seat (45). The output shaft of the motor (44) is connected to the grinding head mounting seat (46). The grinding head (42) is mounted on the grinding head mounting seat (46). A linkage mechanism is further provided between the motor mounting seat (45) and the grinding head mounting seat (46). The linkage mechanism includes an X linkage plate (51), a Y linkage plate (52), a linkage shaft (53) and an eccentric block (10). One side of the eccentric block (10) is connected to the output shaft of the motor (44), and the other side of the eccentric block (10) is connected to the linkage shaft (53). The X linkage plate (51) and the Y linkage plate (52) are arranged vertically. A central guide post is provided on the Y linkage plate (52). The linkage shaft (53) passes through the fixing plate (47) and the central through hole of the X linkage plate (51) and is connected to the central guide post. The grinding head mounting seat (46) is connected to the bottom end of the Y linkage plate (52).

2. The automatic grinding equipment for large-sized electrodes according to claim 1, characterized in that: On two sides of the grinding table (1) adjacent to the X-axis cross beam (2), there are water baffle plates (11). On one side of the water baffle plate (11) connected to the grinding table (1), there is a buckle (111). An installation hole is provided on the buckle (111). The water baffle plate (11) is connected to the frame (12) of the grinding table (1) through a fastener cooperating with the installation hole on the buckle (111).

3. The automatic grinding equipment for large-sized electrodes according to claim 2, characterized in that: The grinding table (1) includes a frame (12) and a workbench surface (13). The workbench surface (13) is installed at the upper end of the frame (12). The lower end of the frame (12) is fixedly connected to the ground. The frame (12) and the workbench surface (13) are integrally formed by welding and precision machining. An overflow groove is provided around the workbench surface (13).

4. The automatic grinding equipment for large-sized electrodes according to claim 3, characterized in that: On the workbench surface (13), there are horizontal pads (131) and a central pad (132). The central pad (132) is located at the center of the workbench surface (13). The horizontal pads (131) cover the workbench surface (13). Through holes are provided on the horizontal pads (131). A central hole is provided on the central pad (132). An overflow groove is provided around the central hole.

5. The automatic grinding equipment for large-sized electrodes according to claim 3 or 4, characterized in that: The frame (12) is a front-back centered split structure. The frame (12) includes a front frame (121) and a rear frame (122). The front frame (121) and the rear frame (122) are connected together by a balance weight (14).

6. The automatic grinding equipment for large-sized electrodes according to claim 5, characterized in that: The balance weight (14) includes a main balance weight (141) and a secondary balance weight (142). The main balance weight (141) is welded to the front frame (121), and the secondary balance weight (142) is welded to the rear frame (122). The main balance weight (141) and the secondary balance weight (142) are connected together by a parallel bolt (143). A horizontal adjustment hole for adjusting the parallelism is provided on the main balance weight (141), and a horizontal adjustment bolt (144) is provided in the horizontal adjustment hole.

7. The automatic grinding equipment for large-sized electrodes according to any one of claims 1 to 4, characterized in that: A guide rail (21) and a connecting plate (22) are provided on the X-axis cross beam (2). The guide rail Ⅰ (21) is arranged on the upper end surface of the X-axis cross beam (2). The connecting plate (22) is slidably connected to the guide rail (21). The lower end of the X-axis cross beam (2) is connected to the grinding table (1) by an I-beam.

8. The automatic grinding equipment for large-sized electrodes according to claim 7, characterized in that: The end of the Y-axis cross beam (3) is connected to the connecting plate (22) of the X-axis cross beam (2). The Y-axis cross beam (3) includes a rack fixed beam (31), a guide rail fixed beam (32), a rack, a guide rail Ⅱ (34), a motor mounting seat (33), and a motor (35) for driving the Y-axis cross beam (3) to move along the X-axis cross beam (2). The motor (35) is mounted on the motor mounting seat (33). The rack is mounted on the rack fixed beam (31). The rack is connected to the output shaft of the motor (35). The guide rail Ⅱ (34) is mounted on the guide rail fixed beam (32). The Z-axis grinding structure (4) is slidably connected to the guide rail Ⅱ (34).

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