Micromechanical components for capacitive sensor devices or switching devices

Abstract

The invention relates to a micromechanical component for a capacitive sensor device or a switch device, comprising a substrate surface (10a), a diaphragm (12) stretched on the substrate surface (10a), the diaphragm having a warpable unsupported area, a connected lever element (16a to 16d) and electrodes (18a, 18b, 44) connected to the lever element, wherein the lever element (16a to 16d) can be put into a rotational movement when the unsupported area is warped, whereby the connected electrodes (18a, 18b, 44) can be put into an adjustment movement oriented respectively obliquely to the substrate surface (10a), wherein the lever element (16a to 16d) is connected to the unsupported area via a first torsion spring (20a to 20d), to the substrate surface (10a) via a second torsion spring (22a to 22d), and to the electrodes (18a, 18b) via a third torsion spring (24a to 24d). The invention further relates to a capacitive sensor device or switching device and to a production method for a micromechanical component.

Description

Technical Field

[0001] The present invention relates to a micromechanical component for a capacitive sensor device or a switching device. The present invention also relates to a capacitive sensor device or a switching device. In addition, the present invention relates to a method for producing a micromechanical component for a capacitive sensor device or a switching device. Background Art

[0002] A capacitive pressure sensor is described in US2014 / 0060169A1, which has a diaphragm directly or indirectly tensioned on the substrate surface of the substrate. The unsupported area of ​​the diaphragm covers an opening formed by the substrate, wherein the unsupported area warps when there is a pressure imbalance on its two diaphragm surfaces. The capacitive pressure sensor also includes a rocker structure connected to the unsupported area of ​​the diaphragm, the rocker structure having two electrodes constructed on the rocker structure and two counter electrodes fixed on the substrate surface. The rocker structure is maintained by means of at least one rocker spring extending along its rotation axis so that the warping on the unsupported area causes the connected rocker structure to swing around its rotation axis, so that the electrode constructed on the rocker structure is adjusted relative to its counter electrode. In this way, the pressure imbalance on the diaphragm surface of the unsupported area should be determined according to the change in the voltage applied between the electrode and the counter electrode. Summary of the invention

[0003] The invention provides a micromechanical component for a capacitive sensor device or a switching device, a capacitive sensor device or a switching device, and a method for producing a micromechanical component for a capacitive sensor device or a switching device.

[0004] The present invention realizes a capacitive sensor device or a switch device, in which a conventional rocker structure can be omitted in a micromechanical component of the capacitive sensor device or the switch device. Thus, when using the present invention, the disadvantages of at least one rocker spring extending along the rotation axis of the conventional rocker structure are also avoided. In order to enable the conventional rocker structure to react to the warping of the unsupported area of ​​the diaphragm of the corresponding capacitive pressure sensor with the desired swinging motion, at least one rocker spring of the rocker structure must be constructed with a small bending stiffness. However, when a voltage is applied between the electrodes, the small bending stiffness of the at least one rocker spring only produces a small resistance to resist the attraction of at least one electrode constructed on the rocker structure to at least one of its assigned counter electrodes. Since the bending stiffness of the at least one rocker spring is small, a large distance is required between at least one electrode constructed on the rocker structure and at least one of its assigned counter electrodes. Therefore, the use of the conventional rocker structure makes it difficult to miniaturize the capacitive pressure sensor equipped with the conventional rocker structure according to the prior art.

[0005] In contrast, the present invention proposes a capacitive sensor device or switch device in which the micromechanical component of at least one adjustable electrode can be arranged relatively easily close to at least one of its assigned counter electrodes. Thus, the present invention facilitates the miniaturization of the capacitive sensor device or switch device. Since the miniaturization of the capacitive sensor device or switch device can lead to material savings, the present invention also helps to reduce the manufacturing costs of the capacitive sensor device or switch device. In addition, it is clearly pointed out that even in the capacitive sensor device miniaturized by means of the present invention, there will be no / hardly any false signals caused by the undesired attraction of at least one adjustable electrode to at least one of its assigned counter electrodes.

[0006] In an advantageous embodiment, the micromechanical component has at least one first electrode and at least one second electrode as at least one electrode, wherein, when the at least one unsupported region is warped, the at least one first electrode can be put into its corresponding adjustment movement with a first movement component oriented perpendicularly to the substrate surface, and the at least one second electrode can be put into its corresponding adjustment movement with a second movement component oriented perpendicularly to the substrate surface and oriented oppositely to the first movement component. The oppositely oriented movement components of the at least one first electrode and the at least one second electrode of the embodiments of the micromechanical component described here facilitate the evaluation of the force exerted on the at least one unsupported region or of at least one physical variable corresponding to the force or of the surrounding conditions.

[0007] For example, at least one lever element is respectively associated with at least one first electrode, which is respectively connected to the corresponding first electrode at least via its third torsion spring, and the first torsion spring of the at least one lever element is closer to its second torsion spring than to the third torsion spring of the at least one lever element, wherein at least one second electrode is respectively associated with at least one lever element, which is respectively connected to the corresponding second electrode at least via its third torsion spring, and the first torsion spring of the at least one lever element is closer to its third torsion spring than to the second torsion spring of the at least one lever element. As explained in more detail below, the embodiment of the micromechanical component described in this paragraph automatically causes advantageous oppositely directed movement components of the at least one first electrode and the at least one second electrode when the at least one unsupported region of the at least one diaphragm is warped.

[0008] Preferably, the first torsion spring of at least one lever element is oriented parallel to the second torsion spring of the same lever element. It is also preferred that the first torsion spring of at least one lever element is oriented parallel to the third torsion spring of the same lever element. This configuration of the torsion springs of each lever element ensures that the warping of the at least one unsupported region is reliably converted into the desired adjustment movement of the at least one electrode.

[0009] In another advantageous embodiment of the micromechanical component, at least one electrode of the micromechanical component is respectively assigned at least one first lever element pair consisting of lever elements, which are respectively connected to the corresponding electrode at least via their third torsion springs, and whose third torsion springs are oriented parallel to one another. This "symmetrical connection" of at least one electrode at least via its first lever element pair makes it possible to convert a warping of at least one unsupported region into an adjustment movement of at least one electrode oriented (almost) perpendicular to the substrate surface.

[0010] As an advantageous development, at least one electrode of the micromechanical component can additionally be assigned a second pair of lever elements consisting of lever elements, which are each connected to the corresponding electrode at least via their third torsion springs and whose third torsion springs are oriented parallel to one another. This strengthens the orientation of the corresponding adjustment movement of the at least one electrode (almost) perpendicular to the substrate surface by suppressing undesired "interfering movements".

[0011] For example, the third torsion spring of the first lever element pair of at least one electrode can be oriented parallel to the third torsion spring of the second lever element pair of the same electrode. The third torsion spring of the first lever element pair of at least one electrode can also be oriented perpendicular to the third torsion spring of the second lever element pair of the same electrode. In both cases, the "symmetrical connection" of at least one electrode by means of its two lever element pairs ensures that "interfering movements" are reliably inhibited.

[0012] In another advantageous embodiment of the micromechanical component, at least one diaphragm hermetically seals a housing having a reference pressure present therein such that at least one unsupported region can be warped by means of a physical pressure present outside the housing that is not equal to the reference pressure. The embodiments of the micromechanical component described here are therefore advantageously suitable for capacitive pressure sensors.

[0013] The aforementioned advantages are also ensured in a capacitive sensor device or switching device having such a micromechanical component.

[0014] The aforementioned advantages can also be achieved by a corresponding method for producing a micromechanical element for a capacitive sensor device or switching device. It is expressly pointed out that the production method can be expanded according to the above-described embodiments of the micromechanical component. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] Below, other features and advantages of the present invention are explained according to the accompanying drawings. It is shown here:

[0016] Figure 1a to Figure 1c Schematic representation of a first specific embodiment of a micromechanical component.

[0017] Figure 2a to Figure 2c Schematic representation of a second specific embodiment of a micromechanical component.

[0018] Figure 3a to Figure 3c Schematic representation of a third specific embodiment of a micromechanical component.

[0019] Figure 4a and Figure 4b Schematic representation of a fourth specific embodiment of a micromechanical component.

[0020] Figure 5 a schematic diagram of a fifth specific embodiment of a micromechanical component; and

[0021] Figure 6 Flowchart for illustrating one embodiment of a manufacturing method. DETAILED DESCRIPTION

[0022] Figure 1a to Figure 1c A schematic diagram shows a first specific embodiment of a micromechanical component.

[0023] Figure 1a to Figure 1c The micromechanical component schematically shown in illustrative figures comprises a substrate 10 having a substrate surface 10 a. Figure 1a A top view of the substrate surface 10a is shown, and Figure 1b and Figure 1c The substrate 10 is shown along Figure 1a At least one diaphragm 12 having at least one unsupported area is directly or indirectly tensioned on the substrate surface 10a so that the at least one unsupported area can be warped by means of a force F applied to the unsupported area (see Figure 1b and Figure 1c ).exist Figure 1a to Figure 1c In the embodiment of the present invention, at least one unsupported region of at least one membrane 12 seals hermetically one opening 14 formed by the substrate 10 only by way of example. Figure 1a The number of four diaphragms 12 given in FIG. 1 is also to be interpreted merely as an example.

[0024] The micromechanical component also has at least one lever element 16a to 16d, wherein at least one lever element 16a to 16d is connected to at least one unsupported region in such a way that in the event of a warping of the at least one unsupported region, the at least one lever element 16a to 16d can be placed / will be placed in a rotational movement. In addition, at least one electrode 18a is connected to at least one lever element 16a to 16d in such a way that the at least one connected electrode 18a can be placed in an adjustment movement oriented obliquely to the substrate surface 10a by a rotational movement of at least one lever element 16a to 16d. At least one lever element 16a to 16d is connected to at least one unsupported region at least by one first torsion spring 20a to 20d of each lever element 16a to 16d. Likewise, at least one lever element 16a to 16d is connected to the substrate surface 10a or to at least one layer deposited (abscheiden) on the substrate surface 10a at least by one second torsion spring 22a to 22d of each lever element 16a to 16d. Furthermore, at least one lever element 16a to 16d is connected to at least one electrode 18a at least via a respective third torsion spring 24a to 24 of each lever element 16a to 16d.

[0025] The micromechanical component described here therefore does not have problems without a conventional rocker structure, since it is advantageously equipped with at least one lever element 16a to 16d, which has its first torsion spring 20a to 20d, its second torsion spring 22a to 22d and its third torsion spring 24a to 24d. Therefore, the above-explained disadvantages of conventional rocker structures do not have to be accepted in the micromechanical component described here. With the help of at least one lever element 16a to 16d, the warping of at least one unsupported area of ​​at least one diaphragm 12 can be advantageously converted into an adjustment movement of at least one electrode 18a with respect to the substrate surface 10a and thus with respect to at least one counter electrode 26a and 26b fixed relative to the substrate surface 10a. For example, at least one first pair of electrodes 26a can be arranged on the side of at least one adjustable electrode 18a that is oriented toward the substrate surface 10a and / or at least one second pair of electrodes 26b can be arranged on at least one side of at least one adjustable electrode 18a that is directed away from the substrate surface 10a, as at least one pair of electrodes 26a and 26b fixed relative to the substrate surface 10a.

[0026] By means of at least one lever element 16a to 16d, a relatively large force can also be transmitted to at least one electrode 18a connected to at least one diaphragm 12 to 12d. Since none of the torsion springs 20a to 20d, 22a to 22d and 24a to 24d of at least one lever element 16a to 16d extends along the axis of rotation (not shown) of the corresponding lever element 16a to 16d, it is not necessary to design the torsion springs 20a to 20d, 22a to 22d and 24a to 24d with a relatively low bending stiffness. On the contrary, the bending stiffness of the torsion springs 20a to 20d, 22a to 22d and 24a to 24d of at least one lever element 16a to 16d can be determined in such a way that the torsion springs 20a to 20d, 22a to 22d and 24a to 24d prevent an undesired attraction of at least one adjustable electrode 18a to at least one of its associated counter electrodes 26a or 26b only due to the voltage applied between the electrodes. Thus, the at least one adjustable electrode 18a can also be at a small distance from its at least one counter electrode 26a, without having to worry about an undesired attraction of the at least one adjustable electrode 18a to its at least one assigned counter electrode 26a or 26b. Thus, there is no risk of / little risk of false signals due to the at least one adjustable electrode 18a undesirably attracting its at least one assigned counter electrode 26a or 26b. Since the at least one electrode 18a can be at a small distance from its at least one assigned counter electrode 26a, it can be easily implemented. Figure 1a to Figure 1c Miniaturization of micromechanical components. Due to the saving of material, miniaturized micromechanical components can also be manufactured relatively cost-effectively.

[0027] Another advantage of using at least one lever element 16a to 16d is that at least one diaphragm 12 can be easily designed to be elastic in such a way that a force F applied to at least one unsupported region causes a relatively large warping. The relatively large elasticity of the at least one diaphragm 12 ensures that the at least one diaphragm 12 hardly reacts to mechanical stresses that occur, for example, when the substrate 10 is bent. The micromechanical component described here therefore has very good stress decoupling.

[0028] Preferably, the first torsion spring 20a to 20d of at least one lever element 16a to 16d is oriented parallel to the second torsion spring 22a to 22d of the same lever element 16a to 16d. It is also advantageous if the first torsion spring 20a to 20d of at least one lever element 16a to 16d is oriented parallel to the third torsion spring 24a to 24d of the same lever element 16a to 16d. In both cases, a good conversion of the warping of at least one unsupported region of at least one diaphragm 12 into the desired adjustment movement of at least one adjustable electrode 18a is ensured.

[0029] As an optional expansion solution, Figure 1a to Figure 1c The micromechanical component also has a fourth torsion spring 28a to 28d for each lever element 16a to 16d, by means of which at least one lever element 16a to 16d is also connected to at least one unsupported region (in addition to its first torsion spring 20a to 20d). In particular, an anchoring point 30a to 30d on each unsupported region is connected in a universal joint manner between the first torsion spring 20a to 20d and the fourth torsion spring 28a to 28d of the respective lever element 16a to 16d. Furthermore, at least one lever element 16a to 16d is also connected to the substrate surface 10a or to at least one layer deposited on the substrate surface (in addition to its second torsion spring 22a to 22d) by means of a fifth torsion spring 32a to 32d for each lever element 16a to 16d. Between the second torsion spring 22a to 22d and the fifth torsion spring 32a to 32d of the same lever element 16a to 16d, one anchor point 34a to 34d is located on the substrate surface 10a or on at least one layer deposited on the substrate surface. However, it is also possible to omit at least one fourth torsion spring 28a to 28d and / or at least one fifth torsion spring 32a to 32d.

[0030] Furthermore, it is also not necessary to arrange at least one membrane 12 between the at least one lever element 16a to 16d and the substrate 10. Alternatively, the at least one membrane 12 can also be braced on the side of the at least one lever element 12 pointing away from the substrate 10.

[0031] exist Figure 1a to Figure 1cIn the example of , at least one adjustable electrode 18a is respectively assigned a first lever element pair consisting of lever elements 16a and 16b and a second lever element pair consisting of lever elements 16c and 16d, wherein the assigned lever elements 16a to 16d are respectively connected to the assigned electrode 18a at least through their third torsion springs 24a to 24d. The third torsion springs 24a and 24b of the first lever element pair consisting of lever elements 16a and 16b are oriented parallel to each other. Correspondingly, the third torsion springs 24c and 24d of the second lever element pair consisting of lever elements 16c and 16d are also oriented parallel to each other. However, the third torsion springs 24a and 24b of the first lever element pair consisting of lever elements 16a and 16b are oriented perpendicularly to the third torsion springs 24c and 24d of the second lever element pair consisting of lever elements 16c and 16d. Thus, at least one electrode 18 can be "symmetrically connected" via its two lever element pairs consisting of lever elements 16a to 16d to at least one membrane 12. This "symmetrical connection" ensures that a warping of at least one unsupported region of at least one membrane 12 is advantageously converted into an adjustment movement of at least one adjustable electrode 18a that is oriented (almost) perpendicularly to the substrate surface 10a.

[0032] exist Figure 1a to Figure 1c In the embodiment of the present invention, the lever elements 16a to 16d are designed such that the first torsion springs 20a to 20d are respectively closer to the second torsion springs 22a to 22d of the same lever element 16a to 16d than the third torsion springs 24a to 24d of the same lever element 16a to 16d. As a result, the warping of at least one unsupported area of ​​at least one diaphragm 12 is converted into an adjustment movement of at least one connected electrode 18a, which adjustment movement is as follows: Figure 1c As indicated by arrow 36 a , the force F which causes the warping is directed in the opposite direction.

[0033] Figure 2a to Figure 2c A schematic diagram shows a second specific embodiment of a micromechanical component.

[0034] exist Figure 2a The micromechanical component schematically shown in a top view with respect to the component substrate surface 10a differs from the previous embodiment only in that the lever elements 16a to 16d of the component are designed such that the first torsion spring 20a to 20d of each lever element 16a to 16d is closer to the third torsion spring 24a to 24d of the same lever element 16a to 16d than to the second torsion spring 22a to 22d of the same lever element 16a to 16d. Figure 2b and Figure 2c Along Figure 2aAs shown in the cross section extending from line BB', the warping of at least one unsupported area of ​​at least one diaphragm 12 is thus converted into an adjustment movement of at least one adjustable electrode 18b, which is as shown in FIG. Figure 2c As indicated by arrow 36 b , it points in the direction of the force F caused by the warping.

[0035] about Figure 2a to Figure 2c For other characteristics of the micromechanical component, reference may be made to the aforementioned embodiments.

[0036] If, in both of the aforementioned micromechanical components, at least one first pair of electrodes 26a is formed on the side of at least one adjustable electrode 18a or 18b oriented toward the substrate surface 10a and at least one second pair of electrodes 26a is formed on the side of at least one adjustable electrode 18a or 18b oriented away from the substrate surface 10a, then it can be described as a “fully differential arrangement” of the at least one adjustable electrode 18a or 18b with respect to its pair of electrodes 26a and 26b. Thus, a measured value can be determined by means of the difference formed by the first capacitance present between the at least one adjustable electrode 18a or 18b and its corresponding first pair of electrodes 26a and by the second capacitance present between the at least one adjustable electrode 18a or 18b and its corresponding second pair of electrodes 26b, which measured value indicates a force F acting on the at least one unsupported region or a physical variable or an ambient condition corresponding to the force F. The signal obtained by the difference is twice as large as the comparison signal obtained by only the first capacitance change of the first capacitor or only the second capacitance change of the second capacitor. Therefore, the "full differential arrangement" of at least one adjustable electrode 18a or 18b relative to its electrodes 26a and 26b can be used to achieve further miniaturization of the micromechanical element while maintaining the sensitivity and / or measurement accuracy of the micromechanical component. Correspondingly, the "full differential arrangement" can also be used to improve the sensitivity and / or measurement accuracy of the micromechanical component while maintaining the structural size of the micromechanical component. Therefore, in order to analyze and evaluate the micromechanical component described herein, a simple, low-cost electronic analysis and evaluation device that requires very little installation space can be used.

[0037] Another advantage of the "full differential arrangement" and the difference between the first and second capacitors is that the temperature offset is automatically "filtered out". In addition, the "full differential arrangement" and the difference formation help to "filter out" the measurement error caused by the bending of the substrate 10.

[0038] Figure 3a to Figure 3c A schematic illustration of a third specific embodiment of a micromechanical component is shown.

[0039] exist Figure 3aThe micromechanical component schematically shown in the top view with respect to the component substrate surface 10a has at least one first adjustable electrode 18a and at least one second adjustable electrode 18b as at least one adjustable electrode 18a and 18b of the component. At least one first electrode 18a is respectively assigned at least one lever element 16a and 16b, which is respectively connected to the corresponding first electrode 18a at least via its third torsion spring 24a and 24b, and whose first torsion spring 20a or 20b is closer to its second torsion spring 22a or 22b than to the third torsion spring 24a or 24b of the at least one lever element. In contrast, at least one second electrode 18b is respectively assigned at least one lever element 16c and 16d, which is connected to the corresponding second electrode 18b at least via its third torsion spring 24c or 24d, and whose first torsion spring 20c or 20d is closer to its third torsion spring 24c or 24d than to the second torsion spring 22c or 22d of the at least one lever element. Thus, in the event of a warping of at least one unsupported region, at least one first electrode 18a can be placed in its corresponding adjustment movement with a first movement component oriented perpendicularly to the substrate surface 10a, and at least one second electrode 18b can be placed in its corresponding adjustment movement with a second movement component oriented perpendicularly to the substrate surface 10a and oriented opposite to the first movement component.

[0040] Figure 3b and Figure 3c Shown along Figure 3a It can be seen that the adjustment movement of at least one first electrode 18a is directed opposite to the force F causing the warping (arrow 36a), while the adjustment movement of at least one second electrode 18b is directed in the direction of the force F causing the warping (arrow 36b).

[0041] exist Figure 3a to Figure 3c In the micromechanical component of , its single first electrode 18a and its single second electrode 18b are optionally also mechanically coupled to one another via a connecting web 38. Figure 3a to Figure 3c For other characteristics of the micromechanical component, refer to the above-mentioned embodiments.

[0042] Figure 4a and Figure 4b A schematic illustration of a fourth specific embodiment of a micromechanical component is shown.

[0043] Figure 4a An overview of a substrate surface 10a of a micromechanical component is shown, and Figure 4b Show Figure 4a An enlarged partial cross section D. Figure 4a and Figure 4bThe micromechanical component also has a first pair of lever elements consisting of lever elements 16a and 16b and a second pair of lever elements consisting of lever elements 16c and 16d for each adjustable electrode 18a and 18b. Figure 4a and Figure 4b In the micromechanical component of the embodiment of the present invention, the third torsion springs 24a and 24b of the first pair of lever elements consisting of the lever elements 16a and 16b of at least one electrode 18a and 18b are oriented parallel to the third torsion springs 24c and 24d of the second pair of lever elements consisting of the lever elements 16c and 16d of the same electrode 18a or 18b. In this way, a "symmetrical connection" of at least one electrode 18a and 18b to at least one unsupported region of at least one diaphragm 12 can also be achieved in such a way that the connected at least one electrode 18a and 18b can be adjusted (approximately) perpendicularly to the substrate surface 10a.

[0044] from Figure 4a It can also be seen in FIG. 1 that the first adjustable electrode 18a and the second adjustable electrode 18b of the micromechanical component can be arranged alternately with each other along one direction so that a second adjustable electrode 18b is arranged between two adjacent first adjustable electrodes 18a, and a first adjustable electrode 18a is arranged between two adjacent second adjustable electrodes 18b. In this way, it can be achieved that the bending of the substrate 10 usually causes a first capacitance change of the first capacitance applied between the first adjustable electrode 18a and its associated counter electrode 26a and / or 26b, and the magnitude of the first capacitance change is (approximately) equal to the magnitude of the second capacitance change caused by the second capacitance applied between the second adjustable electrode 18b and its associated counter electrode 26a and / or 26b, wherein these capacitance changes have different positive and negative signs. Therefore, by means of the difference formation, the capacitance changes of the first capacitance and the second capacitance caused by the bending of the substrate 10 can be easily "filtered out".

[0045] about Figure 4a and Figure 4b For other characteristics of the micromechanical component, reference may be made to the aforementioned embodiments.

[0046] Figure 5 is a schematic diagram of a fifth exemplary embodiment of a micromechanical component.

[0047] exist Figure 5In the micromechanical component of FIG. 1 , four lever elements 16a to 16d of two adjustable electrodes 18b are connected to two diaphragms 12 of the micromechanical component via an outer frame 40. Furthermore, two lever elements 16a and 16c or 16b and 16d assigned to the same electrode 18b are connected to one another via two connecting webs 42 in each case. This makes it possible to connect another adjustable electrode 44 to two lever elements 16a and 16c on one side of the electrode 44 via two torsion springs 46 and to two lever elements 16b and 16d on the opposite side of the electrode 44 via two further torsion springs 46. This has the effect that, in the event of a warping of the unsupported region of the diaphragm 12, the two electrodes 18b are placed in their respective adjustment movement with a first movement component oriented perpendicularly to the substrate surface 10a, while the other electrode 44 is (simultaneously) placed in an adjustment movement with a second movement component oriented perpendicularly to the substrate surface 10a and oriented opposite to the first movement component.

[0048] In Figure 3 to Figure 5 In the micromechanical component of , it can also be referred to as a "fully differential arrangement" consisting of at least one first adjustable electrode 18a and at least one second adjustable electrode 18b, or a "fully differential arrangement" consisting of two adjustable electrodes 18a and another electrode 44. (The micromechanical components of Figures 3 to 5 can be equipped with a first and a second pair of electrodes 26a and 26b for each adjustable electrode 18a and 18b, however, this arrangement is not necessary to cause a "fully differential arrangement"). In the micromechanical components of Figures 3 and 4, a measured value can also be determined by means of a difference formed by a first capacitance applied between at least one first adjustable electrode 18a and its at least one assigned pair of electrodes 26a and / or 26b and a second capacitance applied between at least one second adjustable electrode 18b and its at least one assigned pair of electrodes 26a and / or 26b, which indicates a force F acting on at least one unsupported area or a physical variable or ambient condition corresponding to the force F. Accordingly, in Figure 5 In the case of a micromechanical component of the embodiment of the present invention, the measured value can be determined by means of a difference formed by a first capacitance applied between the two electrodes 18a and at least one of their associated counter electrodes 26a and / or 26b and a second capacitance applied between the further electrode 44 and at least one of its associated counter electrodes 26a and / or 26b. In both cases, all the advantages of the "fully differential arrangement" and the difference formation listed above can be achieved.

[0049] All of the above-mentioned micromechanical components are suitable for capacitive sensor devices or switch devices. The electronic evaluation device of the capacitive sensor device is designed, for example, to determine a measured value, which describes the force F acting on the unsupported area or a physical variable or ambient conditions corresponding to the force F, at least taking into account a measured variable determined in real time with respect to at least one first voltage applied between at least one adjustable electrode 18a and 18b and at least one assigned counter electrode 26a and 26b. However, any of the above-mentioned micromechanical components can also be used in a microphone or a switch device.

[0050] In particular, at least one diaphragm 12 can hermetically seal a housing having a reference pressure p0 present therein, so that at least one unsupported region can be warped / warped by means of a physical pressure p present outside the housing that is not equal to the reference pressure p0. In the aforementioned embodiment, the force F acting on the unsupported region is, for example, a pressure caused by the difference between the reference pressure p0 and the physical pressure p present outside the housing. In this case, the electronic analysis and evaluation device is preferably designed to determine and output a measured value of the physical pressure p present on the unsupported region of the at least one diaphragm 12, at least taking into account the measured variable determined in real time.

[0051] Figure 6 A flow chart is shown to illustrate one specific embodiment of the production method.

[0052] All of the above-mentioned micromechanical components can be manufactured using the manufacturing method described below. However, the feasibility of the manufacturing method is not limited to manufacturing the above-mentioned micromechanical components.

[0053] In method step S1 , at least one membrane is tensioned directly or indirectly on a substrate surface of a substrate in such a way that at least one unsupported region of the at least one membrane warps when a force is applied to the corresponding unsupported region.

[0054] In a further method step S2, at least one lever element is connected to at least one unsupported region and at least one electrode is connected to the at least one lever element in such a way that in the event of a warping of the at least one unsupported region, the at least one lever element is set in a rotational movement, whereby the connected at least one electrode is set in a respective adjustment movement oriented obliquely relative to the substrate surface. When carrying out method step S2, at least one lever element is connected to at least one unsupported region via at least one first torsion spring per lever element, to the substrate surface or to at least one layer deposited on the substrate surface via at least one second torsion spring per lever element, and to at least one electrode via at least one third torsion spring per lever element.

[0055] With regard to further features of the produced micromechanical component, reference is made to the above-described embodiments.

Claims

1. A micromechanical component for a capacitive sensor device or a switch device, comprising: A substrate (10) having a substrate surface (10a); at least one membrane (12) directly or indirectly stretched on the substrate surface (10a), the membrane having at least one unsupported area, each of which can be warped by means of a force (F) applied to the corresponding unsupported area; and at least one lever element and at least one electrode connected to the at least one lever element, wherein The at least one lever element is connected to the at least one unsupported area so that when the at least one unsupported area is warped, the at least one lever element can be placed in a rotational movement, whereby the at least one connected electrode can be placed in an adjustment movement oriented obliquely relative to the substrate surface (10a), It is characterized in that The at least one lever element is connected to the at least one unsupported area at least via a first torsion spring of each lever element, is connected to the substrate surface (10a) or to at least one layer deposited on the substrate surface (10a) at least via a second torsion spring of each lever element, and is connected to the at least one electrode at least via a third torsion spring of each lever element.

2. The micromechanical component according to claim 1, wherein: The micromechanical component has at least one first electrode and at least one second electrode as the at least one electrode, wherein, in the event of warping of the at least one unsupported area, the at least one first electrode can be placed in its corresponding adjustment movement with a first movement component oriented perpendicularly to the substrate surface (10a), and the at least one second electrode can be placed in its corresponding adjustment movement with a second movement component oriented perpendicularly to the substrate surface (10a) and oriented opposite to the first movement component.

3. The micromechanical component according to claim 2, wherein: The at least one first electrode is respectively assigned at least one lever element, and the at least one lever element is respectively connected to the corresponding first electrode at least via its third torsion spring, and the first torsion spring of the at least one lever element is closer to the second torsion spring of the at least one lever element than to the third torsion spring of the at least one lever element, wherein the at least one second electrode is respectively assigned at least one lever element, and the at least one lever element is respectively connected to the corresponding second electrode at least via its third torsion spring, and the first torsion spring of the at least one lever element is closer to the third torsion spring of the at least one lever element than to the second torsion spring of the at least one lever element.

4. The micromechanical component according to claim 1, wherein: The first torsion spring of the at least one lever element is respectively oriented parallel to the second torsion spring of the same lever element and / or the first torsion spring of the at least one lever element is respectively oriented parallel to the third torsion spring of the same lever element.

5. The micromechanical component according to claim 4, wherein: At least one first lever element pair consisting of the lever elements is respectively associated with the at least one electrode of the micromechanical component, which lever elements are respectively connected to the corresponding electrode at least via their third torsion springs and whose third torsion springs are oriented parallel to one another.

6. The micromechanical component according to claim 5, wherein: In addition, a second pair of lever elements formed by the lever elements is assigned to the at least one electrode of the micromechanical component, which lever elements are each connected to the corresponding electrode at least via their third torsion springs and whose third torsion springs are oriented parallel to one another.

7. The micromechanical component according to claim 6, wherein: The third torsion spring of the first pair of lever elements formed by the lever elements of the at least one electrode is oriented parallel to the third torsion spring of the second pair of lever elements formed by the lever elements of the same electrode.

8. The micromechanical component according to claim 6, wherein: The third torsion spring of the first pair of lever elements formed by the lever elements of the at least one electrode is oriented perpendicularly to the third torsion spring of the second pair of lever elements formed by the lever elements of the same electrode.

9. The micromechanical component according to any one of claims 1 to 3 and 5 to 8, wherein: The at least one diaphragm (12) hermetically seals a housing having a reference pressure (p0) present therein, so that the at least one unsupported region can be warped by means of a physical pressure (p) present outside the housing that is not equal to the reference pressure (p0).

10. A capacitive sensor device or switch device having: The micromechanical component according to any one of claims 1 to 9.

11. A method for producing a micromechanical component for a capacitive sensor device or a switching device, comprising the following steps: directly or indirectly tensioning at least one membrane (12) on a substrate surface (10a) of a substrate (10) such that at least one unsupported area of ​​the at least one membrane (12) warps when a force (F) is applied to the corresponding unsupported area; and Connecting at least one lever element to the at least one unsupported area and connecting at least one electrode to the at least one lever element, so that when the at least one unsupported area is warped, the at least one lever element is placed in a rotational movement, whereby the at least one connected electrode is respectively placed in an adjustment movement oriented obliquely relative to the substrate surface (10a); It is characterized in that The at least one lever element is connected to the at least one unsupported area at least via a first torsion spring of each lever element, is connected to the substrate surface (10a) or to at least one layer deposited on the substrate surface (10a) at least via a second torsion spring of each lever element, and is connected to the at least one electrode at least via a third torsion spring of each lever element.

Images