A target material ionization cooling bearing mechanism

Abstract

The present invention relates to the technical field of coating equipment, and in particular to a target material ionization cooling bearing mechanism, which includes a mounting seat, an arc striking mechanism, a driving mechanism, a target material chuck mechanism, a cooling mechanism and at least one group of vacuum tube mechanisms; the vacuum tube mechanism includes an inner tube, an outer tube, a first connecting block, a second connecting block and a plurality of locking members; a cooling liquid cavity is provided between the outer tube and the inner tube; the outer tube is provided with a first water inlet and a first water outlet; an electromagnetic induction coil is sleeved on the outer side of the outer tube. The target material ionization cooling bearing mechanism of the present application cools the ionized target material clamped by the target material chuck mechanism and the vacuum tube mechanism respectively through two cooling methods, which greatly improves the cooling effect of the target material ionization cooling bearing mechanism, protects the internal components of the target material ionization cooling bearing mechanism, ensures that the target material ionization cooling bearing mechanism can work stably and normally, reduces the failure rate and maintenance rate of the target material ionization cooling bearing mechanism, and thus reduces the production cost.

Description

Technical Field

[0001] The invention relates to the technical field of coating equipment, in particular to a target material ionization cooling bearing mechanism. Background Art

[0002] As a technology for producing specific film layers, vacuum coating technology has a wide range of applications in real production and life. There are three forms of vacuum coating technology, namely evaporation coating, sputtering coating and ion plating. Among them, sputtering coating can be considered one of the most outstanding achievements in coating technology. With its advantages of high sputtering rate, low substrate temperature rise, good film-substrate bonding, stable device performance, and convenient operation and control, it has become the preferred solution for continuous coating occasions in the coating industry application field, especially architectural coated glass, transparent conductive film glass, flexible substrate winding plating, etc., which have particularly stringent requirements on large-area uniformity.

[0003] The target material ionization bearing mechanism of the sputtering coating device generates a large amount of heat during operation. The existing target material ionization bearing mechanism has a poor cooling effect. The heat generated by the target material ionization bearing mechanism will affect the entire sputtering process, thereby causing coating failure. In addition, the heat generated by the target material ionization bearing mechanism will affect the internal components of the target material ionization bearing mechanism, causing the target material ionization bearing mechanism to fail to work normally, and even causing damage to the target material ionization bearing mechanism, increasing production costs. Summary of the invention

[0004] The technical problem to be solved by the present invention is to provide a target material ionization cooling supporting mechanism, which cools the ionized target material clamped by the target material chuck mechanism and the vacuum tube mechanism respectively through two cooling methods, thereby greatly improving the cooling effect of the target material ionization cooling supporting mechanism, protecting the internal components of the target material ionization cooling supporting mechanism, ensuring that the target material ionization cooling supporting mechanism can work stably and normally, reducing the failure rate and maintenance rate of the target material ionization cooling supporting mechanism, and thereby reducing the production cost.

[0005] In order to solve the above technical problems, the present invention adopts the following technical solutions:

[0006] A target material ionization cooling bearing mechanism, comprising a mounting seat, an arc striking mechanism, a driving mechanism, a target material chuck mechanism, a cooling mechanism and at least one set of vacuum tube mechanisms; the vacuum tube mechanism comprises an inner tube, an outer tube, a first connecting block, a second connecting block and a plurality of locking members;

[0007] The two ends of the inner tube are respectively connected to the first connection block and the second connection block, the two ends of the outer tube are respectively connected to the first connection block and the second connection block, the outer tube is sleeved on the outer side of the inner tube, and a cooling liquid cavity is arranged between the outer tube and the inner tube; the outer tube is provided with a first water inlet and a first water outlet, and the first water inlet and the first water outlet are both connected to the cooling liquid cavity; the first connection block is connected to the second connection block of the mounting seat or the adjacent vacuum tube mechanism, the second connection block is connected to the first connection block of the adjacent vacuum tube mechanism, a plurality of locking members are used to lock the first connection block to the mounting seat, and a plurality of locking members are also used to lock the second connection block to the first connection block of the adjacent vacuum tube mechanism; the outer side of the outer tube is sleeved with an electromagnetic induction coil;

[0008] The target material chuck mechanism is arranged on the mounting seat and located inside the inner tube, and the target material chuck mechanism is used to clamp the target material to be ionized; the cooling mechanism is arranged on the mounting seat and used to cool the target material to be ionized clamped by the target material chuck mechanism; the arc striking mechanism is rotatably connected to the mounting seat and located inside the inner tube, the driving mechanism is arranged on the mounting seat and used to drive the arc striking mechanism to rotate, and the arc striking mechanism is used to generate an arc spot on the target material to be ionized clamped by the target material chuck mechanism.

[0009] Furthermore, the cooling mechanism includes a water pipe sleeve, a water inlet pipe, a water outlet pipe, a water outlet pipe locking assembly and a heat exchange seat, the heat exchange seat is arranged on one side of the mounting seat and located inside the inner tube, the water pipe sleeve and the water outlet pipe locking assembly are arranged on the other side of the mounting seat; the water pipe sleeve is provided with a second water inlet and a second water outlet, the heat exchange seat is provided with a first accommodating cavity, a second accommodating cavity and a through hole, the through hole connects the first accommodating cavity and the second accommodating cavity, the heat exchange seat is connected to the target material chuck mechanism, the first accommodating cavity is located on one side of the heat exchange seat close to the target material chuck mechanism end; the water outlet pipe sleeve is arranged on the outside of the water inlet pipe, and a flow gap is arranged between the water inlet pipe and the water outlet pipe; the mounting seat is provided with a mounting hole, the mounting hole passes through the mounting seat, one end of the water inlet pipe is connected to the water pipe sleeve, the other end of the water inlet pipe passes through the mounting hole and is connected to the heat exchange seat, and the water inlet pipe is connected to the second water inlet and the first accommodating chamber; one end of the water outlet pipe is connected to the water pipe sleeve, the other end of the water outlet pipe passes through the mounting hole and is connected to the heat exchange seat, and the water outlet pipe is connected to the second water outlet and the second accommodating chamber; the water outlet pipe locking assembly is used to lock the water outlet pipe to the mounting seat.

[0010] Furthermore, the water pipe sleeve is provided with a third accommodating chamber and a fourth accommodating chamber, and the fourth accommodating chamber connects the third accommodating chamber and the outside; the second water inlet is connected with the third accommodating chamber, and the second water outlet is connected with the fourth accommodating chamber; the inner wall of the third accommodating chamber is provided with a first internal thread, and the outer wall of the water inlet pipe is provided with a first external thread for threaded connection with the first internal thread; the inner wall of the fourth accommodating chamber is provided with a second internal thread, and the outer wall of the water outlet pipe is provided with a second external thread for threaded connection with the second internal thread.

[0011] Furthermore, the water pipe sleeve is provided with a water pipe sleeve sealing ring, a sealing pressure holding sleeve and a sealing ring locking sleeve; the water pipe sleeve sealing ring and the sealing pressure holding sleeve are respectively sleeved on the outer wall of the water outlet pipe, and the sealing pressure holding sleeve is used to press the water pipe sleeve sealing ring onto the water pipe sleeve; the inner wall of the sealing ring locking sleeve is provided with a third internal thread, and the outer wall of the water pipe sleeve is provided with a third external thread for threaded connection with the third internal thread; the sealing ring locking sleeve is clamped with the sealing pressure holding sleeve and is used to lock the sealing pressure holding sleeve onto the water pipe sleeve.

[0012] Furthermore, the water outlet pipe locking assembly includes a water outlet pipe threaded seat, which is connected to the mounting seat. The water outlet pipe threaded seat is provided with a water outlet pipe threaded hole, which passes through the water outlet pipe threaded seat, and the inner wall of the water outlet pipe threaded hole is provided with a fourth internal thread; the outer wall of the water outlet pipe is provided with a fourth external thread for threaded connection with the fourth internal thread.

[0013] Furthermore, the target material chuck mechanism includes a chuck base and a chuck seat, the chuck base is connected to the mounting seat, the chuck seat is connected to one end of the chuck base away from the mounting seat, and the chuck seat is used to clamp the target material to be ionized; the chuck base is provided with a cooling mechanism accommodating cavity, and the heat exchange seat is located in the cooling mechanism accommodating cavity and abuts against the bottom of the chuck seat.

[0014] Furthermore, a chuck seat sealing ring is provided between the heat exchange seat and the chuck seat, and the chuck seat sealing ring is used to seal the gap between the heat exchange seat and the chuck seat.

[0015] Furthermore, the chuck base is provided with an insulating sleeve, and the insulating sleeve is arranged on the outer side of the chuck base.

[0016] Furthermore, the outer wall of the water outlet pipe is connected to a limit nut, the limit nut is located in the cooling mechanism accommodating cavity, and the limit nut is used to abut against the chuck base.

[0017] Furthermore, the arc-striking mechanism includes an arc-striking head and an arc-striking head connecting rod, one end of the arc-striking head connecting rod is rotatably connected to the mounting seat, and the other end of the arc-striking head connecting rod is connected to the arc-striking head; the driving mechanism is used to drive the arc-striking head connecting rod to rotate.

[0018] The beneficial effects of the present invention are as follows: in actual work, the target material to be ionized is first loaded into the target material chuck mechanism, the target material chuck mechanism clamps the target material to be ionized, and then one or more sets of vacuum tube mechanisms are installed on the mounting seat according to production needs, and then the interior of the inner tube is evacuated and filled with inert gas. The target material chuck mechanism is connected to the cathode, the arc-starting mechanism is electrically connected to the arc-starting circuit, the arc-starting circuit is a conventional circuit, and the current output by the arc-starting mechanism hits the target material to be ionized clamped by the target material chuck mechanism to generate arc spots on the surface of the target material to be ionized. After the electromagnetic induction coil is energized, a magnetic field will be generated near the vacuum tube mechanism, and after the target material to be ionized clamped by the target material chuck mechanism is ionized to produce charged target atoms, the charged target atoms are sputtered to the surface of the substrate (workpiece) along a specific path under the action of the magnetic field force and deposited to form a coating, and at the same time, the magnetic field also has a screening effect, and some ionized heteroatoms or ions are thrown onto the inner tube under the action of the magnetic field force. At the same time, the target material ionization cooling bearing mechanism generates a large amount of heat during operation. In order to reduce the temperature of the target material ionization cooling bearing mechanism, on the one hand, the cooling mechanism will introduce cooling liquid to cool the target material to be ionized clamped by the target material chuck mechanism; on the other hand, the external water pump transports the cooling liquid of the external water tank to the cooling liquid chamber through the first water inlet, and the cooling liquid in the cooling liquid chamber cools the vacuum tube mechanism. At the same time, the cooling liquid in the cooling liquid chamber is discharged to the external water tank through the first water outlet, thereby realizing the recycling of the cooling liquid. The target material ionization cooling bearing mechanism of the present application cools the ionized target material clamped by the target material chuck mechanism and the vacuum tube mechanism respectively through two cooling methods, which greatly improves the cooling effect of the target material ionization cooling bearing mechanism, protects the internal components of the target material ionization cooling bearing mechanism, ensures that the target material ionization cooling bearing mechanism can work stably and normally, reduces the failure rate and maintenance rate of the target material ionization cooling bearing mechanism, and thus reduces the production cost. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] Figure 1 It is a structural schematic diagram of the present invention.

[0020] Figure 2 It is a schematic structural diagram of the arc striking mechanism, target material chuck mechanism and cooling mechanism of the present invention.

[0021] Figure 3 It is a schematic structural diagram of the water pipe sleeve of the present invention.

[0022] Description of reference numerals:

[0023] Mounting seat 21; arc striking mechanism 22; arc striking head 221; arc striking head connecting rod 222; driving mechanism 23; target material chuck mechanism 24; chuck base 241; insulating sleeve 2411; chuck seat 242; chuck seat sealing ring 2421; cooling mechanism 25; water pipe sleeve 251; second water inlet 2511; second water outlet 2512; third accommodating chamber 2513; fourth accommodating chamber 2514; water pipe sleeve sealing ring 2515; sealing pressure holding sleeve 2516 ; Sealing ring locking sleeve 2517; Water inlet pipe 252; Water outlet pipe 253; Limit nut 2531; Water outlet pipe locking assembly 254; Water outlet pipe threaded seat 2541; Heat exchange seat 255; First accommodating chamber 2551; Second accommodating chamber 2552; Through hole 2553; Vacuum tube mechanism 26; Inner tube 261; Outer tube 262; First connecting block 263; Second connecting block 264; Locking piece 265; Cooling liquid chamber 266; Electromagnetic induction coil 267. DETAILED DESCRIPTION

[0024] In order to facilitate the understanding of those skilled in the art, the present invention is further described below in conjunction with embodiments and drawings. The contents mentioned in the implementation modes are not intended to limit the present invention.

[0025] like Figures 1 to 3 As shown, a target material ionization cooling bearing mechanism provided by the present invention comprises a mounting seat 21, an arc striking mechanism 22, a driving mechanism 23, a target material chuck mechanism 24, a cooling mechanism 25 and at least one set of vacuum tube mechanisms 26; the vacuum tube mechanism 26 comprises an inner tube 261, an outer tube 262, a first connecting block 263, a second connecting block 264 and a plurality of locking members 265;

[0026] The two ends of the inner tube 261 are respectively connected to the first connection block 263 and the second connection block 264, and the two ends of the outer tube 262 are respectively connected to the first connection block 263 and the second connection block 264. The outer tube 262 is sleeved on the outer side of the inner tube 261, and a cooling liquid cavity 266 is provided between the outer tube 262 and the inner tube 261; the outer tube 262 is provided with a first water inlet (not shown in the figure) and a first water outlet (not shown in the figure), and the first water inlet and the first water outlet are both connected to the cooling liquid cavity 266; the first connection block 2 63 is connected to the second connecting block 264 of the mounting base 21 or the adjacent vacuum tube mechanism 26, the second connecting block 264 is connected to the first connecting block 263 of the adjacent vacuum tube mechanism 26, a plurality of locking members 265 are used to lock the first connecting block 263 to the mounting base 21, and a plurality of locking screws 265 are also used to lock the second connecting block 264 to the first connecting block 263 of the adjacent vacuum tube mechanism 26; an electromagnetic induction coil 267 is sleeved on the outer side of the outer tube 262; preferably, the locking member 265 is a locking screw.

[0027] The target material chuck mechanism 24 is arranged on the mounting seat 21 and is located inside the inner tube 261. The target material chuck mechanism 24 is used to clamp the target material to be ionized; the cooling mechanism 25 is arranged on the mounting seat 21 and is used to cool the target material to be ionized clamped by the target material chuck mechanism 24; the arc striking mechanism 22 is rotatably connected to the mounting seat 21 and is located inside the inner tube 261. The driving mechanism 23 is arranged on the mounting seat 21 and is used to drive the arc striking mechanism 22 to rotate. The arc striking mechanism 22 is used to make the target material to be ionized clamped by the target material chuck mechanism 24 produce an arc spot.

[0028] Sputtering principle: first, let the inert gas (usually Ar gas) produce glow discharge to generate charged ions, and then use positive ions (usually Ar+) to bombard the cathode (target material made of deposition material) in the vacuum chamber; the charged ions are accelerated by the electric field and hit the surface of the target material, causing the target atoms to be bombarded and fly out, and at the same time generate secondary electrons, which then collide with gas atoms to form more charged ions; the target atoms carry enough kinetic energy to sputter to the surface of the substrate (workpiece) for deposition to form a coating. After the target atoms pass through the plasma zone and are bombarded and collided by high-energy electrons, some of the target atoms will be ionized. The ionized target atoms are not necessarily in the state of single ions, but are usually in the form of clusters.

[0029] In actual work, the target material to be ionized is first loaded into the target material chuck mechanism 24, and the target material chuck mechanism 24 clamps the target material to be ionized, and then one or more sets of vacuum tube mechanisms 26 are installed on the mounting seat 21 according to production needs, and then the interior of the inner tube 261 is evacuated and filled with inert gas. The target material chuck mechanism 24 is connected to the cathode, and the arc striking mechanism 22 is electrically connected to the arc striking circuit. The arc striking circuit is a conventional circuit. The current output by the arc striking mechanism 22 hits the target material to be ionized clamped by the target material chuck mechanism 24 to generate an arc spot on the surface of the target material to be ionized. After the electromagnetic induction coil 267 is energized, a magnetic field will be generated near the vacuum tube mechanism 26. After the target material to be ionized clamped by the target material chuck mechanism 24 is ionized to produce charged target atoms, the charged target atoms are sputtered along a specific path to the surface of the substrate (workpiece) under the action of the magnetic field force and deposited to form a coating. At the same time, the magnetic field also has a screening effect. Some ionized heteroatoms or ions are thrown onto the inner tube 261 under the action of the magnetic field force. At the same time, the target material ionization cooling bearing mechanism will generate a large amount of heat during operation. In order to reduce the temperature of the target material ionization cooling bearing mechanism, on the one hand, the cooling mechanism 25 will pass the cooling liquid to cool the ionized target material clamped by the target material chuck mechanism 24; on the other hand, the external water pump transports the cooling liquid of the external water tank to the cooling liquid chamber 266 through the first water inlet, and the cooling liquid in the cooling liquid chamber 266 cools the vacuum tube mechanism 26. At the same time, the cooling liquid in the cooling liquid chamber 266 is discharged to the external water tank through the first water outlet, thereby realizing the recycling of the cooling liquid.

[0030] The target material ionization cooling support mechanism of the present application cools the ionized target material clamped by the target material chuck mechanism 24 and the vacuum tube mechanism 26 respectively through two cooling methods, which greatly improves the cooling effect of the target material ionization cooling support mechanism, protects the internal components of the target material ionization cooling support mechanism, ensures that the target material ionization cooling support mechanism can work stably and normally, reduces the failure rate and maintenance rate of the target material ionization cooling support mechanism, and thus reduces the production cost.

[0031] like Figure 2 As shown, in this embodiment, the cooling mechanism 25 includes a water pipe sleeve 251, a water inlet pipe 252, a water outlet pipe 253, a water outlet pipe locking assembly 254 and a heat exchange seat 255. The heat exchange seat 255 is arranged on one side of the mounting seat 21 and is located inside the inner tube 261. The water pipe sleeve 251 and the water outlet pipe locking assembly 254 are arranged on the other side of the mounting seat 21; the water pipe sleeve 251 is provided with a second water inlet 2511 and a second water outlet 2512, the heat exchange seat 255 is provided with a first accommodating cavity 2551, a second accommodating cavity 2552 and a through hole 2553, the through hole 2553 connects the first accommodating cavity 2551 and the second accommodating cavity 2552, the heat exchange seat 255 is connected to the target chuck mechanism 24, the first accommodating cavity 2551 is located on the heat exchange seat 255 close to the target chuck mechanism 2 4; the water outlet pipe 253 is sleeved on the outside of the water inlet pipe 252, and a flow gap (not marked in the figure) is set between the water inlet pipe 252 and the water outlet pipe 253; the mounting seat 21 is provided with a mounting hole (not marked in the figure), the mounting hole passes through the mounting seat 21, one end of the water inlet pipe 252 is connected to the water pipe sleeve 251, the other end of the water inlet pipe 252 passes through the mounting hole and is connected to the heat exchange seat 255, the water inlet pipe 252 communicates with the second water inlet 2511 and the first accommodating chamber 2551; one end of the water outlet pipe 253 is connected to the water pipe sleeve 251, the other end of the water outlet pipe 253 passes through the mounting hole and is connected to the heat exchange seat 255, the water outlet pipe 253 communicates with the second water outlet 2512 and the second accommodating chamber 2552; the water outlet pipe locking assembly 254 is used to lock the water outlet pipe 253 to the mounting seat 21.

[0032] In actual operation, the external water pump delivers the cooling liquid of the external water tank to the first accommodating chamber 2551 through the second water inlet 2511 and the water inlet pipe 252. The cooling liquid in the first accommodating chamber 2551 absorbs the heat of the target material chuck mechanism 24 through the heat exchange seat 255, thereby reducing the temperature of the target material chuck mechanism 24, ensuring that the target material chuck mechanism 24 can work normally and stably, extending the service life of the target material chuck mechanism 24, reducing the failure rate and maintenance rate of the target material chuck mechanism 24, and thus reducing the production cost. At the same time, the cooling liquid in the first accommodating chamber 2551 flows into the second accommodating chamber 2552 through the through hole 2553, and the cooling liquid in the second accommodating chamber 2552 is discharged to the external water tank through the outlet pipe 253 and the second outlet 2512. The heat exchange seat 255 of the present application is provided with a first accommodating chamber 2551 and a second accommodating chamber 2552, which can ensure to the greatest extent that the temperature of the coolant delivered to the first accommodating chamber 2551 is the lowest, thereby improving the cooling effect of the target chuck mechanism 24. If the heat exchange seat 255 is provided with only one accommodating chamber, the coolant newly flowing into the accommodating chamber will be mixed with the original coolant in the accommodating chamber. Since the original coolant in the accommodating chamber has absorbed the heat of the target chuck mechanism 24, after the two are mixed, the temperature of the coolant in the accommodating chamber will be high, reducing the cooling effect of the coolant in the accommodating chamber. The structural design of the cooling mechanism 25 of the present application is reasonable, and the cooling mechanism 25 has a good cooling effect on the target chuck mechanism 24.

[0033] like Figure 2 and Figure 3 As shown, in this embodiment, the water pipe sleeve 251 is provided with a third accommodating chamber 2513 and a fourth accommodating chamber 2514, and the fourth accommodating chamber 2514 connects the third accommodating chamber 2513 and the outside; the second water inlet 2511 is connected with the third accommodating chamber 2513, and the second water outlet 2512 is connected with the fourth accommodating chamber 2514; the inner wall of the third accommodating chamber 2513 is provided with a first internal thread (not shown in the figure), and the outer wall of the water inlet pipe 252 is provided with a first external thread (not shown in the figure) for threaded connection with the first internal thread; the inner wall of the fourth accommodating chamber 2514 is provided with a second internal thread (not shown in the figure), and the outer wall of the water outlet pipe 253 is provided with a second external thread (not shown in the figure) for threaded connection with the second internal thread.

[0034] In actual work, after the water inlet pipe 252 is inserted into the interior of the water outlet pipe 253, one end of the water inlet pipe 252 is connected to the water pipe sleeve 251 via the threaded cooperation of the first external thread and the first internal thread, and the second water inlet 2511 is communicated with the water inlet pipe 252 via the third accommodating chamber 2513; one end of the water outlet pipe 253 is connected to the water pipe sleeve 251 via the threaded cooperation of the second external thread and the second internal thread, and the second water outlet 2512 is communicated with the water outlet pipe 253 via the fourth accommodating chamber 2514. The water pipe sleeve 251, water inlet pipe 252 and water outlet pipe 253 of the present application are easy to install and disassemble. At the same time, the second water inlet 2511 and the second water outlet 2512 can be detachably connected to the water pipe sleeve 251. When a problem occurs to a component of the water pipe sleeve 251, the second water inlet 2511, the second water outlet 2512, the water inlet pipe 252 or the water outlet pipe 253, only the corresponding component needs to be replaced, which makes maintenance convenient and the maintenance cost is low.

[0035] like Figure 3 As shown, in this embodiment, the water pipe sleeve 251 is provided with a water pipe sleeve sealing ring 2515, a sealing pressure holding sleeve 2516 and a sealing ring locking sleeve 2517; the water pipe sleeve sealing ring 2515 and the sealing pressure holding sleeve 2516 are respectively sleeved on the outer wall of the water outlet pipe 253, and the sealing pressure holding sleeve 2516 is used to press the water pipe sleeve sealing ring 2515 on the water pipe sleeve 251; the inner wall of the sealing ring locking sleeve 2517 is provided with a third internal thread (not shown in the figure), and the outer wall of the water pipe sleeve 251 is provided with a third external thread (not shown in the figure) for threaded connection with the third internal thread; the sealing ring locking sleeve 2517 is clamped with the sealing pressure holding sleeve 2516 and is used to lock the sealing pressure holding sleeve 2516 to the water pipe sleeve 251.

[0036] In actual work, the water pipe sleeve sealing ring 2515 and the sealing pressure holding sleeve 2516 are respectively sleeved on the outer wall of the water outlet pipe 253, and then the water outlet pipe 253 is connected to the water pipe sleeve 251. After the water outlet pipe 253 and the water pipe sleeve 251 are connected, the sealing ring locking sleeve 2517 is connected to the water pipe sleeve 251 through the threaded cooperation of the third internal thread and the third external thread, and then the sealing pressure holding sleeve 2516 and the water pipe sleeve sealing ring 2515 are locked to the water pipe sleeve 251. The water pipe sleeve sealing ring 2515 is used to seal the gap between the water outlet pipe 253 and the water pipe sleeve 251 to prevent water leakage between the water outlet pipe 253 and the water pipe sleeve 251.

[0037] like Figure 2As shown, in this embodiment, the water outlet pipe locking assembly 254 includes a water outlet pipe threaded seat 2541, which is connected to the mounting seat 21, and the water outlet pipe threaded seat 2541 is provided with a water outlet pipe threaded hole (not shown in the figure), the water outlet pipe threaded hole passes through the water outlet pipe threaded seat 2541, and the inner wall of the water outlet pipe threaded hole is provided with a fourth internal thread (not shown in the figure); the outer wall of the water outlet pipe 253 is provided with a fourth external thread (not shown in the figure) for threaded connection with the fourth internal thread.

[0038] In actual work, the water outlet pipe 253 is connected to the water outlet pipe threaded seat 2541 via the threaded cooperation of the fourth external thread and the fourth internal thread, which facilitates the installation and disassembly of the water outlet pipe 253. At the same time, the water pipe locking assembly 254 can firmly install the cooling mechanism 25 on the mounting seat 21, ensuring that the cooling mechanism 25 can work stably.

[0039] like Figure 2 As shown, in this embodiment, the target chuck mechanism 24 includes a chuck base 241 and a chuck seat 242, the chuck base 241 is connected to the mounting seat 21, the chuck seat 242 is connected to one end of the chuck base 241 away from the mounting seat 21, and the chuck seat 242 is used to clamp the target to be ionized; the chuck base 241 is provided with a cooling mechanism accommodating cavity (not shown in the figure), and the heat exchange seat 255 is located in the cooling mechanism accommodating cavity and abuts against the bottom of the chuck seat 242. The target chuck mechanism 24 has a compact structure, and the chuck seat 242 can effectively clamp the target to be ionized. Preferably, the chuck base 241 is made of insulating material, which can effectively prevent the current output by the arc striking mechanism 22 from being transmitted to the mounting seat 21 and causing leakage, thereby ensuring the safety of production.

[0040] like Figure 2 As shown, in this embodiment, a chuck seat sealing ring 2421 is provided between the heat exchange seat 255 and the chuck seat 242. The chuck seat sealing ring 2421 is used to seal the gap between the heat exchange seat 255 and the chuck seat 242, and has good sealing performance. In actual work, the chuck seat sealing ring 2421 can prevent water leakage between the heat exchange seat 255 and the chuck seat 242.

[0041] like Figure 2 As shown, in this embodiment, the chuck base 241 is provided with an insulating sleeve 2411, and the insulating sleeve 2411 is sleeved on the outer side of the chuck seat 242. In actual operation, the insulating sleeve 2411 can protect the chuck seat 242 and the cooling mechanism 25 disposed inside the chuck seat 242, and can effectively prevent the current output by the arc striking mechanism 22 from damaging the chuck seat 242 and the cooling mechanism 25 disposed inside the chuck seat 242.

[0042] like Figure 2As shown, in this embodiment, the outer wall of the water outlet pipe 253 is connected to a limiting nut 2531 , and the limiting nut 2531 is located in the cooling mechanism accommodating cavity, and the limiting nut 2531 is used to abut against the chuck base 241 .

[0043] In actual work, the limiting nut 2531 can limit the position of the water outlet pipe 253 in the cooling mechanism accommodating cavity, which is convenient for the installation and positioning of the water outlet pipe 253. Preferably, the limiting nut 2531 is a copper nut. The copper nut has good ductility. Since the target material ionization cooling bearing mechanism generates a lot of heat during operation, the water outlet pipe 253 may expand and contract due to heat. The copper nut can change well with the change of the water outlet pipe 253 to prevent the water outlet pipe 253 or the limiting nut 2531 from being damaged.

[0044] like Figure 1 and Figure 2 As shown, in this embodiment, the arc-striking mechanism 22 includes an arc-striking head 221 and an arc-striking head connecting rod 222, one end of the arc-striking head connecting rod 222 is rotatably connected to the mounting seat 21, and the other end of the arc-striking head connecting rod 222 is connected to the arc-striking head 221; the driving mechanism 23 is used to drive the arc-striking head connecting rod 222 to rotate.

[0045] In actual operation, the driving mechanism 23 drives the arc-starting head connecting rod 222 to rotate, and the rotating arc-starting head connecting rod 222 drives the arc-starting head 221 to rotate. When the arc-starting head 221 rotates to the surface of the target material to be ionized clamped by the target material clamping mechanism 24, the arc-starting head 221 will output current to hit the target material to be ionized clamped by the target material clamping mechanism 24 so that an arc spot is generated on the surface of the target material to be ionized. When the arc-starting head 221 is not working, the driving mechanism 23 drives the arc-starting head connecting rod 222 to rotate to drive the arc-starting head 221 to rotate to the working position. The arc-starting mechanism 22 has a simple structure and high controllability.

[0046] All technical features in this embodiment can be freely combined according to actual needs.

[0047] The above embodiments are preferred implementation schemes of the present invention. In addition, the present invention may also be implemented in other ways. Any obvious replacement without departing from the concept of the present technical solution is within the protection scope of the present invention.

Claims

1. A target material ionization cooling bearing mechanism, characterized in that: It includes a mounting seat, an arc striking mechanism, a driving mechanism, a target material chuck mechanism, a cooling mechanism and at least one set of vacuum tube mechanisms; the vacuum tube mechanism includes an inner tube, an outer tube, a first connecting block, a second connecting block and a plurality of locking members; The two ends of the inner tube are respectively connected to the first connection block and the second connection block, the two ends of the outer tube are respectively connected to the first connection block and the second connection block, the outer tube is sleeved on the outer side of the inner tube, and a cooling liquid cavity is arranged between the outer tube and the inner tube; the outer tube is provided with a first water inlet and a first water outlet, and the first water inlet and the first water outlet are both connected to the cooling liquid cavity; the first connection block is connected to the second connection block of the mounting seat or the adjacent vacuum tube mechanism, the second connection block is connected to the first connection block of the adjacent vacuum tube mechanism, a plurality of locking members are used to lock the first connection block to the mounting seat, and a plurality of locking members are also used to lock the second connection block to the first connection block of the adjacent vacuum tube mechanism; the outer side of the outer tube is sleeved with an electromagnetic induction coil; The target material chuck mechanism is arranged on the mounting seat and located inside the inner tube, and the target material chuck mechanism is used to clamp the target material to be ionized; the cooling mechanism is arranged on the mounting seat and used to cool the target material to be ionized clamped by the target material chuck mechanism; the arc striking mechanism is rotatably connected to the mounting seat and located inside the inner tube, the driving mechanism is arranged on the mounting seat and used to drive the arc striking mechanism to rotate, and the arc striking mechanism is used to generate an arc spot on the target material to be ionized clamped by the target material chuck mechanism; The cooling mechanism includes a water pipe sleeve, a water inlet pipe, a water outlet pipe, a water outlet pipe locking assembly and a heat exchange seat, the heat exchange seat is arranged on one side of the mounting seat and located inside the inner tube, and the water pipe sleeve and the water outlet pipe locking assembly are arranged on the other side of the mounting seat; the water pipe sleeve is provided with a second water inlet and a second water outlet, the heat exchange seat is provided with a first accommodating cavity, a second accommodating cavity and a through hole, the through hole connects the first accommodating cavity and the second accommodating cavity, the heat exchange seat is connected to the target material chuck mechanism, the first accommodating cavity is located at one end of the heat exchange seat close to the target material chuck mechanism; the water outlet pipe sleeve is arranged on the outside of the water inlet pipe, and a flow gap is arranged between the water inlet pipe and the water outlet pipe; the mounting seat is provided with a mounting hole, the mounting hole passes through the mounting seat, one end of the water inlet pipe is connected to the water pipe sleeve, and the other end of the water inlet pipe passes through the mounting hole and Connected to the heat exchange seat, the water inlet pipe is connected to the second water inlet and the first accommodating chamber; one end of the water outlet pipe is connected to the water pipe sleeve, the other end of the water outlet pipe passes through the mounting hole and is connected to the heat exchange seat, and the water outlet pipe is connected to the second water outlet and the second accommodating chamber; the water outlet pipe locking assembly is used to lock the water outlet pipe to the mounting seat; the water pipe sleeve is provided with a third accommodating chamber and a fourth accommodating chamber, and the fourth accommodating chamber is connected to the third accommodating chamber and the outside; the second water inlet is connected to the third accommodating chamber, and the second water outlet is connected to the fourth accommodating chamber; the inner wall of the third accommodating chamber is provided with a first internal thread, and the outer wall of the water inlet pipe is provided with a first external thread for threaded connection with the first internal thread; the inner wall of the fourth accommodating chamber is provided with a second internal thread, and the outer wall of the water outlet pipe is provided with a second external thread for threaded connection with the second internal thread.

2. A target material ionization cooling bearing mechanism according to claim 1, characterized in that: The water pipe sleeve is provided with a water pipe sleeve sealing ring, a sealing pressure holding sleeve and a sealing ring locking sleeve; the water pipe sleeve sealing ring and the sealing pressure holding sleeve are respectively sleeved on the outer wall of the water outlet pipe, and the sealing pressure holding sleeve is used to press the water pipe sleeve sealing ring onto the water pipe sleeve; the inner wall of the sealing ring locking sleeve is provided with a third internal thread, and the outer wall of the water pipe sleeve is provided with a third external thread for threaded connection with the third internal thread; the sealing ring locking sleeve is clamped with the sealing pressure holding sleeve and is used to lock the sealing pressure holding sleeve onto the water pipe sleeve.

3. A target material ionization cooling bearing mechanism according to claim 1, characterized in that: The water outlet pipe locking assembly includes a water outlet pipe threaded seat, which is connected to the mounting seat. The water outlet pipe threaded seat is provided with a water outlet pipe threaded hole. The water outlet pipe threaded hole penetrates the water outlet pipe threaded seat, and the inner wall of the water outlet pipe threaded hole is provided with a fourth internal thread; the outer wall of the water outlet pipe is provided with a fourth external thread for threaded connection with the fourth internal thread.

4. A target material ionization cooling bearing mechanism according to claim 1, characterized in that: The target material chuck mechanism includes a chuck base and a chuck seat, the chuck base is connected to the mounting seat, the chuck seat is connected to one end of the chuck base away from the mounting seat, and the chuck seat is used to clamp the target material to be ionized; the chuck base is provided with a cooling mechanism accommodating cavity, the heat exchange seat is located in the cooling mechanism accommodating cavity and abuts against the bottom of the chuck seat.

5. A target material ionization cooling bearing mechanism according to claim 4, characterized in that: A chuck seat sealing ring is arranged between the heat exchange seat and the chuck seat, and the chuck seat sealing ring is used to seal the gap between the heat exchange seat and the chuck seat.

6. A target material ionization cooling bearing mechanism according to claim 4, characterized in that: The chuck base is provided with an insulating sleeve, and the insulating sleeve is sleeved on the outer side of the chuck base.

7. A target material ionization cooling bearing mechanism according to claim 4, characterized in that: The outer wall of the water outlet pipe is connected with a limiting nut, the limiting nut is located in the cooling mechanism accommodating cavity, and the limiting nut is used to abut against the chuck base.

8. The target material ionization cooling bearing mechanism according to claim 1, characterized in that: The arc striking mechanism comprises an arc striking head and an arc striking head connecting rod, one end of the arc striking head connecting rod is rotatably connected to the mounting seat, and the other end of the arc striking head connecting rod is connected to the arc striking head; the driving mechanism is used to drive the arc striking head connecting rod to rotate.

Images