Handling system

Abstract

Provided is a conveyance system that is easy to construct. The conveyance system separately conveys workpieces to a plurality of processing devices, and includes: a conveyance passage that is provided in a space directly above the processing devices over the entire range of the plurality of processing devices; an unmanned carrier that travels on the conveyance passage, has a storage portion, a traveling portion, a traveling mechanism, a lifting mechanism, and a receiver that receives a control signal, wherein the storage portion has a storage space that stores the workpieces, the traveling portion has a storage space that stores the storage portion, the traveling mechanism is provided to the traveling portion, the lifting mechanism is provided to the traveling portion, and the storage portion is suspended from above and lifted, and the receiver receives the control signal; and a storage unit that has a storage portion holding table that holds the storage portion when the workpieces are transferred from a workpiece storage that stores the workpieces to the storage portion of the unmanned carrier, and a receiver that receives the control signal.

Description

TECHNICAL FIELD

[0001] The present application relates to a conveyance system which conveys a work to a processing device. BACKGROUND

[0002] In a manufacturing process of a device chip which is assembled in an electronic device or the like, a board-shaped work such as a semiconductor wafer or a resin package substrate is processed by various processing devices. When the work is conveyed to the processing device, a box for conveyance which can accommodate a plurality of works is generally used.

[0003] However, in the above method in which a plurality of works are accommodated in the box and conveyed to the processing device at one time, when the processing device is stopped for some reason, the unprocessed works accommodated in the box are all on standby. That is, the unprocessed works cannot be processed by other processing devices, and thus the efficiency of processing is greatly reduced.

[0004] To overcome this problem, for example, the works are conveyed to the processing device one by one depending on the operation state of the processing device. Therefore, a conveyance system in which a plurality of processing devices are connected by a path for conveyance so that the works can be conveyed to each processing device at an arbitrary timing is proposed (for example, refer to Patent Document 1).

[0005] Patent Document 1: Japanese Patent Application Laid-Open No. H6-177244

[0006] However, a pipe connection portion of a connection pipe or a door for maintenance or the like is provided on the side surface of each processing device, and when the above conveyance system is constructed, the path for conveyance needs to be designed so as not to interfere with them. Therefore, the construction of the conveyance system is not necessarily easy, and the path for conveyance is also likely to be long. SUMMARY

[0007] The present application is achieved in view of this problem, and an object thereof is to provide a conveyance system which can convey works to a plurality of processing devices respectively and is easy to construct.

[0008] According to one embodiment of the present application, a conveyance system which conveys works to a plurality of processing devices is provided, wherein the conveyance system includes: a conveyance passage which is provided in a space directly above the processing devices over the entire range of the plurality of processing devices; an unmanned carrier which travels on the conveyance passage, has an accommodation portion, a traveling portion, a traveling mechanism, a lifting mechanism, and a receiver, wherein the accommodation portion has an accommodation space which accommodates the works, the traveling portion has a storage space which stores the accommodation portion, the traveling mechanism is provided to the traveling portion, the lifting mechanism is provided to the traveling portion, and the accommodation portion is lifted by being suspended from above, and the receiver of the unmanned carrier receives a control signal;

[0009] a storage unit having a storage portion holding table that holds the storage portion when handing over the workpiece from a workpiece storage that stores the workpiece to the storage portion of the automated guided vehicle, and a receiver that receives a control signal; and

[0010] a control unit having a transmitter that transmits a control signal to the processing device, the automated guided vehicle, and the storage unit, a receiver that receives a notification signal transmitted from the processing device, and a control signal generating portion that generates a control signal transmitted from the transmitter of the control unit, the control signal generating portion of the control unit generates a control signal transmitted from the transmitter of the control unit in accordance with the notification signal received by the receiver of the control unit, the transmitter of the control unit transmits the control signal generated by the control signal generating portion of the control unit to the processing device, the automated guided vehicle, and the storage unit, the automated guided vehicle travels on the transportation path in a state where the storage portion is stored in the storage space in accordance with the control signal received by the receiver of the automated guided vehicle, and transports the storage portion by raising the storage portion between the first parking area corresponding to the upper side of the processing device on the transportation path or the second parking area corresponding to the upper side of the storage unit on the transportation path and the inside of the processing device or between the second parking area and the storage portion holding table of the storage unit when parking at the first parking area or the second parking area.

[0011] In the transportation system, it is preferable that the transportation path be provided on the upper surface of the processing device.

[0012] A transportation system of one embodiment of the present application includes: a transportation path provided in the entire range of a plurality of processing devices; an automated guided vehicle that travels on the transportation path, has a storage portion, a traveling portion, a traveling mechanism, a raising and lowering mechanism, and a receiver, in which the storage portion has a storage space that stores a workpiece, the traveling portion has a storage space that stores the storage portion, the traveling mechanism is provided to the traveling portion, the raising and lowering mechanism is arranged to the traveling portion, and the storage portion is suspended from above and raised and lowered, and the receiver of the automated guided vehicle receives a control signal; and a storage unit having a storage portion holding table that holds the storage portion when handing over the workpiece from a workpiece storage that stores the workpiece to the storage portion of the automated guided vehicle, and a receiver that receives a control signal.

[0013] Accordingly, the unmanned carrier is able to travel on the carrying passage in a state where the storage portion is stored in the storage space. In addition, the unmanned carrier is parked at the first parking area above the processing device of the carrying passage or the second parking area above the storage unit of the carrying passage to lift the storage portion, so that the storage portion is able to be carried between the first parking area and the inside of the processing device or between the second parking area and the storage portion holding table of the storage unit.

[0014] In addition, in the carrying system of one embodiment of the present application, the carrying passage is provided in a space directly above the processing device. Accordingly, when designing the carrying passage, the configuration of the side surface of each processing device does not need to be considered. That is, the construction of the carrying system becomes easy. BRIEF DESCRIPTION OF DRAWINGS

[0015] Figure 1 is a plan view showing a configuration example of the carrying system of Embodiment 1.

[0016] Figure 2 is a functional block diagram showing an example of the connection relationship of the carrying system of Embodiment 1.

[0017] Figure 3 is a side view schematically showing a configuration example of the storage unit of Embodiment 1.

[0018] Figure 4 (A) of FIG. 1 is a perspective view showing a configuration example of the unmanned processed object carrier of Embodiment 1, Figure 4 (B) of FIG. 1 is a perspective view showing a case where the storage portion of the unmanned processed object carrier is lifted.

[0019] Figure 5 is a perspective view showing the appearance of the cutting device, the carrying passage, and the like of Embodiment 1.

[0020] Figure 6 is a perspective view showing a configuration example of the cutting device.

[0021] Figure 7 is a perspective view showing a case where the carrying passage is provided to the cutting device.

[0022] Figure 8 (A) of FIG. 1, Figure 8 (B) of FIG. 1, and Figure 8 (C) of FIG. 1 are plan views showing a configuration example of the passage module.

[0023] Figure 9 is a perspective view showing a case where the carrying passage is formed by the passage module.

[0024] Figure 10 (A) of FIG. 1 and Figure 10 (B) of FIG. 1 are cross-sectional views showing a case where the passage modules are connected.

[0025] Figure 11 is a bottom view showing a structure example of the passage module.

[0026] Figure 12 (A) of FIG. 7 is a partial cross-sectional side view from the Y-axis direction of a case where the unmanned workpiece transport vehicle is moved to directly above the opening, Figure 12 (B) of FIG. 7 is a partial cross-sectional side view from the Y-axis direction of a case where the housing portion is lowered.

[0027] Figure 13 (A) of FIG. 8 is a partial cross-sectional side view from the X-axis direction of a state shown in (A) of FIG. 7, Figure 12 (A) of FIG. 8 is a partial cross-sectional side view from the X-axis direction of a state shown in (A) of FIG. 7, Figure 13 (B) of FIG. 8 is a partial cross-sectional side view from the X-axis direction of a state shown in (B) of FIG. 7. Figure 12 (B) of FIG. 8 is a partial cross-sectional side view from the X-axis direction of a state shown in (B) of FIG. 7.

[0028] Figure 14 is a functional block diagram for explaining an example of a control method of the transport system of Embodiment 1.

[0029] Figure 15 is a perspective view showing a structure example of the unmanned workpiece transport vehicle of Embodiment 2.

[0030] Figure 16 (A) of FIG. 9 is a plan view from the Z-axis direction of a case where the unmanned workpiece transport vehicle is moved to directly above the opening, Figure 16 (B) of FIG. 9 is a plan view from the Z-axis direction of a case where the housing portion is lowered.

[0031] Figure 17 (A) of FIG. 10 is a partial cross-sectional side view from the X-axis direction of a state shown in (A) of FIG. 9, Figure 16 (A) of FIG. 10 is a partial cross-sectional side view from the X-axis direction of a state shown in (A) of FIG. 9, Figure 17 (B) of FIG. 10 is a partial cross-sectional side view from the X-axis direction of a state shown in (B) of FIG. 9. Figure 16 (B) of FIG. 10 is a partial cross-sectional side view from the X-axis direction of a state shown in (B) of FIG. 9.

[0032] Figure 18 is a side view showing a structure example of the storage unit of Embodiment 3.

[0033] Figure 19 is a plan view schematically showing the configuration of the inside of the storage unit of Embodiment 3.

[0034] Figure 20 is a side view schematically showing a case where the first temporary placement stage and the second temporary placement stage of the storage unit of Embodiment 3 are moved in the second direction to exchange the position of the first temporary placement stage and the position of the second temporary placement stage.

[0035] Figure 21 (A) and Figure 21(A) and Figure 22 (B) is a plan view schematically showing an example of the operation of the storage unit of Embodiment 3.

[0036] Figure 22 (A) and Figure 22 (B) is a plan view schematically showing an example of the operation of the storage unit of Embodiment 3.

[0037] Reference Signs

[0038] 2: transport system; 4: cutting device (processing device); 4a: cutting device (processing device); 4b: cutting device (processing device); 6: transport passage; 6a: passage module; 6b: passage module; 6c: passage module; 8: storage unit; 10: unmanned workpiece transport vehicle (unmanned transport vehicle); 10a: unmanned workpiece transport vehicle (unmanned transport vehicle); 10b: unmanned workpiece transport vehicle (unmanned transport vehicle); 10c: unmanned workpiece transport vehicle (unmanned transport vehicle); 12: control unit; 16: housing; 16a: ceiling; 16b: opening; 18: cassette holding table; 20: cassette (workpiece storage); 22: push-pull arm; 24: guide rail; 26: storage portion holding table; 32: control device; 34: receiver; 36: transmitter; 37: base; 37a: lower surface; 37b: recess; 37c: space (storage space); 37d: opening; 37e: side surface; 37f: upper surface; 38: storage portion; 38a: space (storage space); 38b: side surface; 38c: opening; 38d: upper surface; 39: wheel (traveling mechanism); 40: lifting mechanism; 40a: wire; 40b: winch; 42: control device; 44: receiver; 46: transmitter; 50: storage portion holding table; 92: cover; 92a: ceiling; 92b: opening; 92c: door; 96: control device; 98: receiver; 100: transmitter; 102: passage portion; 102a: threaded hole; 102b: information providing portion; 104: guide portion; 106: standby portion; 106a: opening; 106b: passage; 132: control portion; 134: receiver; 136: transmitter; 138: reader; 210: unmanned workpiece transport vehicle; 239: wheel; 240: sub wheel; 11: workpiece; 13: tape (wafering tape); 15: frame; 21: pipe. DETAILED DESCRIPTION

[0039] Embodiments of the present application will be described with reference to the accompanying drawings. In addition, in each of the following embodiments, a transport system that transports a workpiece or the like to a plurality of cutting devices is described, but the transport system of the present application can be configured to transport a workpiece or the like to a plurality of processing devices. That is, the transport destination of the workpiece or the like can be a processing device other than a cutting device.

[0040] For example, the conveyance system of the present application is sometimes configured to be able to convey a workpiece to a plurality of laser processing devices. In addition, the conveyance system of the present application is sometimes configured to be able to sequentially convey a workpiece to a plurality of processing devices used in a series of processes. In addition, in the present specification, all devices that can be used in a series of processes for processing a workpiece are expressed as processing devices. That is, the processing device of the present application includes a tape attaching device, an ultraviolet irradiation device, a cleaning device, and the like, which are not necessarily for the purpose of processing a workpiece.

[0041] (Embodiment 1)

[0042] Figure 1 is a plan view showing a configuration example of the conveyance system 2 of the present embodiment, Figure 2 is a functional block diagram showing an example of a connection relationship of the conveyance system 2. As Figure 1 shown, the conveyance system 2 of the present embodiment includes a conveyance path 6 for conveying a plate-shaped workpiece 11 (refer to Figure 4 (A), Figure 4 (B), and the like) processed by a cutting device (processing device) 4.

[0043] The workpiece 11 is, for example, a disc-shaped wafer formed of a semiconductor material such as silicon. The front surface side of the workpiece 11 is divided into a plurality of small regions by a plurality of division intended lines (streets) that intersect each other, and a device such as an IC (Integrated Circuit) or a MEMS (Micro Electro Mechanical Systems) is formed in each small region.

[0044] A tape (dicing tape) 13 having a larger diameter than the workpiece 11 is attached to the back surface side of the workpiece 11. The outer peripheral portion of the tape 13 is fixed to a ring-shaped frame 15 that surrounds the workpiece 11. The workpiece 11 is conveyed to the cutting device 4 in a state of being supported to the frame 15 by the tape 13.

[0045] In addition, in the present embodiment, a disc-shaped wafer formed of a semiconductor material such as silicon is used as the workpiece 11, but there is no limitation on the material, shape, configuration, size, and the like of the workpiece 11. For example, a substrate formed of another semiconductor, ceramic, resin, metal, or the like can be used as the workpiece 11.

[0046] Also, there are no limitations on the kind, number, shape, configuration, size, arrangement, and the like of the devices. The devices can also not be formed on the work 11. Also, in the present embodiment, the work 11 in a state of being supported by the tape 13 to the frame 15 is taken as an object of conveyance, but the work 11 without the tape 13 attached, the work 11 not supported by the frame 15, and the like are also taken as objects of conveyance.

[0047] Also, the cutting device 4 that processes the work 11 is connected to the conveyance system 2 as a conveyance destination of the work 11, but is not necessarily a constituent element of the conveyance system 2. Thus, the cutting device 4 can be changed or omitted as described above in accordance with the usage mode of the conveyance system 2.

[0048] Also, in Figure 1 , only one cutting device 4a is shown for convenience of explanation, and in Figure 2 , two cutting devices 4a and 4b are shown, but in the present embodiment, two or more cutting devices 4 are required as conveyance destinations of the work 11. That is, the number of processing devices connected to the conveyance system 2 is two or more.

[0049] The conveyance passage 6 is provided to the plurality of cutting devices 4 in a manner that enables conveyance of the work 11 to each cutting device 4. That is, the plurality of cutting devices 4 are connected to each other via the conveyance passage 6. Also, the conveyance passage 6 is provided to a space directly above the cutting devices 4. Thus, the conveyance passage 6 does not interfere with the piping 21 and the like connected to the side surfaces of the cutting devices 4.

[0050] Below the conveyance passage 6, a storage unit 8 that can store a plurality of works 11 is provided in addition to the cutting devices 4. The works 11 stored in the storage unit 8 are conveyed to the unmanned work conveyance vehicle (automated guided vehicle) 10 at an arbitrary timing. The unmanned work conveyance vehicle 10 travels on the conveyance passage 6 and conveys the work 11 to each cutting device 4. Also, in Figure 1 , three unmanned work conveyance vehicles 10a, 10b, and 10c are shown, and in Figure 2 , two unmanned work conveyance vehicles 10a and 10b are shown, but there are no limitations on the number of unmanned work conveyance vehicles 10.

[0051] As shown in Figure 2 , the cutting devices 4, the storage unit 8, and the unmanned work conveyance vehicle 10 are connected to a control unit 12 that controls the operations thereof in a wireless manner. Among these, the control unit 12 can be connected to the cutting devices 4, the storage unit 8, and the unmanned work conveyance vehicle 10 in a wired manner as long as it is configured to be able to control the operations thereof.

[0052] Figure 3 is a side view schematically showing a structure example of the storage unit 8. As shown, the storage unit 8 includes a case 16 that houses various constituent elements. In addition, in this example, only the outline of the case 16 is shown for ease of explanation. Figure 3 Figure 3

[0053] A cassette holding table 18 that is raised and lowered by a first lifting mechanism (not shown) of a ball screw type is provided inside the case 16. A cassette (workpiece storage) 20 that can house a plurality of workpieces 11 is placed on the upper surface of the cassette holding table 18. In addition, the cassette 20 houses the workpieces 11 in the state in which the workpieces 11 are supported to the frame 15 by the belt 13 as described above.

[0054] A push-pull arm 22 that can move while holding the frame 15 is arranged to the side of the cassette holding table 18. For example, if the height of the frame 15 housed in the cassette 20 is made to coincide with the height of the push-pull arm 22 by the first lifting mechanism, and the frame 15 in the cassette 20 is held by the push-pull arm 22, the frame 15 is pulled out to the outside of the cassette 20.

[0055] A pair of guide rails 24 that approach and depart while maintaining a state in which they are parallel to each other are provided at a position across the push-pull arm 22. Each guide rail 24 has a support surface that supports the frame 15 from below and a side surface that is substantially perpendicular to the support surface, and each guide rail 24 sandwiches the frame 15 pulled out of the cassette 20 by the push-pull arm 22 to align it at a prescribed position.

[0056] A housing holding table 26 that is raised and lowered by a second lifting mechanism (not shown) of a ball screw type is provided to the other side of the push-pull arm 22 and the pair of guide rails 24. A housing 38 (refer to (A) of FIG. 6, (B) of FIG. 7, etc.) of the unmanned workpiece transport vehicle 10 that can house the workpieces 11 (frames 15) is placed on the upper surface of the housing holding table 26. Figure 4 Figure 4

[0057] The frame 15 aligned at the prescribed position by the pair of guide rails 24 is held again by the push-pull arm 22 and is inserted from the side into the housing 38 on the housing holding table 26 whose height is adjusted by the second lifting mechanism. In addition, a position limiting portion (not shown) that limits the position of the housing 38 is provided on the upper surface of the housing holding table 26. Thus, when the workpieces 11 are handed over from the cassette 20 in which the workpieces 11 are housed to the housing 38 of the unmanned workpiece transport vehicle 10, the housing 38 is positioned at the prescribed position determined by the position limiting portion on the housing holding table 26.

[0058] ​​​​An opening 16b is provided directly above the storage holding platform 26, extending vertically through the top 16a of the housing 16. This opening 16b is shaped and sized to allow passage of the storage section 38 of the unmanned workpiece transport vehicle 10, which is placed on the storage holding platform 26. The storage section 38 is transported from the outside to the inside of the housing 16 through this opening 16b, or from the inside to the outside of the housing 16 through this opening 16b.

[0059] The first lifting mechanism, push-pull arm 22, a pair of guide rails 24, the second lifting mechanism, and other components are connected to a control device 32 for controlling the operation of the storage unit 8. The control device 32 is typically a computer comprising a processing unit such as a CPU (Central Processing Unit) and a storage device such as flash memory. The processing unit and the like are operated according to software stored in the storage device, thereby realizing the function of the control device 32.

[0060] A receiver 34 and a transmitter 36 are also connected to the control device 32. The receiver 34 receives control signals (control signals) sent from the control unit 12 of the transport system 2, and the transmitter 36 sends notification signals (notification signals) to the control unit 12. The control device 32 controls the operation of the storage unit 8 according to the signals received by the receiver 34. In addition, the control device 32 sends the required signals to the control unit 12 via the transmitter 36.

[0061] Figure 4 (A) is a perspective view showing a structural example of the unmanned workpiece transport vehicle 10. Figure 4 (B) is a perspective view showing the raising and lowering of the storage section 38 of the unmanned workpiece transport vehicle 10. Figure 4 (A) and Figure 4 As shown in (B), the unmanned workpiece transport vehicle 10 includes, for example, a rectangular base (driving unit) 37. A portion (see reference ) is provided on the base 37 on its lower surface 37a. Figure 13 (A) etc.) Recess 37b of the opening (refer to) Figure 13 (A, etc.).

[0062] The space (storage space) 37c inside the recess 37b stores, for example, a cuboid storage section 38 configured to store a workpiece 11 (and frame 15). The opening 37d of the recess 37b is formed to allow the storage section 38 to pass through.

[0063] A space (accommodation space) 38a for accommodating the workpiece 11 (and the frame 15) is formed inside the accommodation portion 38. An opening 38c of a size through which the workpiece 11 (and the frame 15) can pass is provided on each of a pair of side surfaces 38b of the accommodation portion 38, and the space 38a of the accommodation portion 38 is connected to the outside via the openings 38c. Thus, the workpiece 11 (and the frame 15) is carried into the space 38a of the accommodation portion 38 through the openings 38c and carried out of the space 38a of the accommodation portion 38 through the openings 38c.

[0064] Two wheels (traveling mechanisms) 39 having rotation axes that are substantially perpendicular to the side surfaces 37e are provided on each of a pair of mutually parallel side surfaces 37e of the base 37. That is, the unmanned workpiece carrier 10 has a total of four wheels 39. Each wheel 39 is coupled to a rotation drive source such as a motor and rotates.

[0065] The wheels 39 are rotated by the rotation drive source, and the unmanned workpiece carrier 10 (the base 37) travels on the carrying passage 6. As the wheels 39, a so-called Mecanum wheel or the like in which a plurality of rotation bodies in the shape of an inclined barrel (cylinder) are attached to an outer peripheral surface that contacts the carrying passage 6 can be used. In this case, the unmanned workpiece carrier 10 can be moved in an arbitrary direction by adjusting the amounts of rotation of the wheels 39.

[0066] The base 37 and the accommodation portion 38 are coupled to each other via a plurality of (four in the present embodiment) lifting mechanisms 40 disposed in a space 37c inside the recessed portion 37b. Each lifting mechanism 40 includes a wire 40a and a winch 40b for winding the wire 40a (see (A) of FIG. 10 and the like), and can suspend the accommodation portion 38 from above and lift it. Figure 13

[0067] Specifically, the winch 40b is fixed to an upper surface 37f corresponding to the bottom of the recessed portion 37b, for example, and is connected to a base end portion of the wire 40a. A front end portion of the wire 40a is connected to an upper surface 38d of the accommodation portion 38. Thus, if the winch 40b is operated in such a manner as to pull out the wire 40a, the accommodation portion 38 can be lowered and carried out of the space 37c as shown in (B) of FIG. 10. If the winch 40b is operated in such a manner as to wind the wire 40a, on the other hand, the accommodation portion 38 can be raised and stored in the space 37c. Figure 4

[0068] A control device 42 that controls the operation of the unmanned workpiece carrier 10 is provided inside the base 37. The control device 42 is typically constituted by a computer including a processing device such as a CPU and a storage device such as a flash memory. The processing device and the like are operated in accordance with software stored in the storage device, and the functions of the control device 42 are thereby realized.​​

[0069] A receiver 44 that receives a control signal transmitted from the control unit 12 of the conveyance system 2 and a transmitter 46 that transmits a notification signal to the control unit 12 are connected to the control device 42. The control device 42 controls the operation of the unmanned workpiece conveyance vehicle 10 based on the signal received by the receiver 44. In addition, the control device 42 transmits a desired signal to the control unit 12 via the transmitter 46.

[0070] The above-described rotating drive source, the lifting mechanism 40 (winch 40b), the control device 42, the receiver 44, the transmitter 46, and the like are connected to a secondary battery, for example, and each component of the unmanned workpiece conveyance vehicle 10 operates by power supplied from the secondary battery. The power supply (charging) to the secondary battery is preferably performed in a non-contact (wireless, non-contact) manner, but can also be performed in a contact manner.

[0071] Figure 5 is a perspective view showing the appearance of the cutting device 4, the conveyance passage 6, and the like, Figure 6 is a perspective view showing a configuration example of the cutting device 4. As shown in Figure 5 and Figure 6 The cutting device 4 has a base 48 that supports each component. An opening 48a is formed at a corner of the base 48, and a housing holding table 50 that is raised and lowered by a lifting mechanism (not shown) is provided at the opening 48a.

[0072] The housing 38 of the above-described unmanned workpiece conveyance vehicle 10 is placed on the upper surface of the housing holding table 50. In addition, a position limiting portion (not shown) that limits the position of the housing 38 is provided on the upper surface of the housing holding table 50, and the housing 38 on the housing holding table 50 is positioned at a predetermined position determined by the position limiting portion.

[0073] As shown in Figure 6 An opening 48b that is longer in the X-axis direction (front-rear direction, machining feed direction) is formed at the side of the opening 48a. A ball screw type X-axis moving mechanism (machining feed unit) 52 and a dust and drip-proof cover 54 that covers the upper portion of the X-axis moving mechanism 52 are arranged in the opening 48b. The X-axis moving mechanism 52 has an X-axis moving table 52a, and moves the X-axis moving table 52a in the X-axis direction.

[0074] A chuck table (holding table) 56 that attracts and holds the workpiece 11 is provided on the X-axis moving table 52a. The chuck table 56 is coupled to a rotational drive source (not shown) such as a motor, and rotates around a rotational axis that is substantially parallel to the Z-axis direction (vertical direction, plunge feed direction). In addition, the chuck table 56 is moved (machining feed) in the X-axis direction by the X-axis moving mechanism 52 described above.

[0075] The upper surface of the chuck table 56 is a holding surface 56a for holding the workpiece 11. The holding surface 56a is connected to a suction source (not shown) via a suction path (not shown) formed in the interior of the chuck table 56 or the like. In addition, four jigs 58 for fixing the frame 15 that supports the workpiece 11 from the periphery are provided around the chuck table 56.

[0076] A pair of rails (temporary placement area) 60 that approach and recede while maintaining a state of being parallel to the Y-axis direction (left-right direction, indexing feed direction) is provided above the opening 48b. The pair of rails 60 each has a support surface that supports the frame 15 from below and a side surface that is substantially perpendicular to the support surface, and the pair of rails 60 sandwiches the frame 15 that is pulled out of the housing portion 38 in the X-axis direction to align it at a prescribed position.

[0077] A door-shaped first support structure 62 is disposed above the base 48 in a manner that straddles the opening 48b. A first rail 64 that extends along the Y-axis direction is fixed to the front surface (the surface on the rail 60 side) of the first support structure 62, and the first rail 64 is coupled to a first holding unit 68 by a first moving mechanism 66 or the like.

[0078] The first holding unit 68, for example, contacts the upper surface of the frame 15 to suction and hold the frame 15, and is raised and lowered by the first moving mechanism 66 and moved in the Y-axis direction along the first rail 64. A gripping mechanism 68a for gripping the frame 15 is provided on the opening 48a side of the first holding unit 68.

[0079] For example, if the frame 15 is gripped by the gripping mechanism 68a and the first holding unit 68 is moved in the Y-axis direction, the frame 15 inside the housing portion 38 can be pulled out onto the pair of rails 60 or the frame 15 on the pair of rails 60 can be inserted into the housing portion 38. In addition, after the frame 15 is aligned by the pair of rails 60, the frame 15 (workpiece 11) is suctioned and held by the first holding unit 68 and carried into the chuck table 56.

[0080] Further, on the front surface of the first support structure 62, above the first rail 64, a second rail 70 along the Y-axis direction is fixed. This second rail 70 is linked to a second holding unit 74 by means of a second moving mechanism 72 or the like. The second holding unit 74, for example, is in contact with the upper surface of the frame 15 to adsorb and hold the frame 15, and is raised and lowered by the second moving mechanism 72 and moves in the Y-axis direction along the second rail 70.

[0081] A door-shaped second support structure 76 is arranged behind the first support structure 62. On the front surface (the face of the first support structure 62 side) of the second support structure 76, two sets of cutting units (machining units) 80 are provided by means of Y-axis Z-axis moving mechanisms (index feed units, plunge feed units) 78, respectively. Each cutting unit 80 moves (index feeds) in the Y-axis direction and moves (plunges) in the Z-axis direction by the corresponding Y-axis Z-axis moving mechanism 78.

[0082] Each cutting unit 80 has a spindle (not shown) as a rotation axis substantially parallel to the Y-axis direction. On one end side of each spindle, a circular ring-shaped cutting tool 82 is attached. On the other end side of each spindle, a rotation drive source (not shown) such as a motor is linked. Further, beside the cutting tool 82, a nozzle for supplying a cutting fluid such as pure water to the workpiece 11 and the cutting tool 82 is arranged.

[0083] While supplying the cutting fluid from the nozzle, the rotating cutting tool 82 is plunged into the workpiece 11 held by the chuck table 56, so that the workpiece 11 can be cut. Adjacent to the cutting unit 80, a photographing unit (camera) 84 for photographing the workpiece 11 held by the chuck table 56 or the like is arranged. This photographing unit 84 also moves in the Y-axis direction and moves in the Z-axis direction by the Y-axis Z-axis moving mechanism 78.

[0084] A cleaning unit 86 is arranged at a position opposite to the opening 48a with respect to the opening 48b. The cleaning unit 86 has a rotary table 88 for attracting and holding the workpiece 11 in a cylindrical cleaning space. In the lower portion of the rotary table 88, a rotation drive source (not shown) for rotating the rotary table 88 at a prescribed speed is linked.

[0085] Above the rotary table 88, an injection nozzle 90 for injecting a fluid for cleaning (typically, a mixed fluid of water and air) toward the workpiece 11 held by the rotary table 88 is arranged. By rotating the rotary table 88 holding the workpiece 11 and injecting the fluid for cleaning from the injection nozzle 90, the workpiece 11 can be cleaned.

[0086] After the machining target 11 is machined by the cutting unit 80, the frame 15 is sucked and held by the second holding unit 74, for example, and is carried into the cleaning unit 86. After the machining target 11 is cleaned by the cleaning unit 86, the frame 15 is sucked and held by the first holding unit 68, for example, and is placed on the pair of rails 60, and then the frame 15 is gripped by the gripping mechanism 68a and is accommodated in the accommodation portion 38.

[0087] As shown in Figure 5 , the upper surface side of the base 48 is covered with a cover 92, and each of the above-described components is accommodated inside the cover 92. An opening 92b (see Figure 7 ) that penetrates the ceiling 92a of the cover 92 is provided in the region directly above the opening 48a. The accommodation portion 38 of the unmanned machining target carrying vehicle 10 is carried into or out of the inside of the cover 92 through the opening 92b. The shape and size of the opening 92b are not particularly limited, but the opening 92b needs to be configured to at least allow the accommodation portion 38 to pass through.

[0088] Each of the components of the cutting device 4 described above is connected to a control device 96. Figure 5 The control device 96 is typically configured by a computer including a processing device such as a CPU and a storage device such as a flash memory. The processing device and the like are caused to act in accordance with software stored in the storage device, thereby realizing the functions of the control device 96.

[0089] A receiver 98 that receives a control signal for control transmitted from the control unit 12 of the carrying system 2 and a transmitter 100 that transmits a notification signal for notification to the control unit 12 are also connected to the control device 96. The control device 96 controls each of the components of the cutting device 4 described above, for example, in accordance with the signal received by the receiver 98 and the like.

[0090] A pipe connection portion 48c (see Figure 5 ) that connects various pipes 21 is provided on the side wall of the base 48. In addition, a door 92c (see Figure 5 ) that is opened and closed at the time of maintenance and the like is provided on the side wall of the cover 92. In addition, an operation panel (not shown) or a display (not shown) and the like can be provided on the side wall of the cover 92.

[0091] Figure 7 is a perspective view showing a case where the carrying passage 6 of the carrying system 2 is provided to the cutting device 4. As shown in Figure 7 and the like, the carrying passage 6 of the carrying system 2 of the present embodiment is installed on the upper surface side of the ceiling 92a of the cover 92 possessed by the cutting device 4. That is, the carrying passage 6 is provided in the space directly above the cutting device 4.

[0092] Thus, the conveyance passage 6 does not interfere with the configuration of the pipe connection portion 48c and the door 92c provided on the side surface of the cutting device 4, and the like. That is, when designing the conveyance passage 6, the configuration of the side surface of the cutting device 4 does not need to be taken into consideration. Therefore, the construction of the conveyance system 2 becomes easy.

[0093] Figure 8 (A) of FIG. 6 is a plan view showing a configuration example of the passage module 6a used in the conveyance passage 6, Figure 8 (B) of FIG. 6 is a plan view showing a configuration example of the passage module 6b, Figure 8 (C) of FIG. 6 is a plan view showing a configuration example of the passage module 6c. The conveyance passage 6 is configured by combining the plurality of passage modules 6a, 6b, 6c shown in (A) of FIG. 6, Figure 8 (A) of FIG. 6, Figure 8 (B) of FIG. 6, and Figure 8 (C) of FIG. 6.

[0094] Each of the passage modules 6a, 6b, 6c includes a passage portion 102 having a flat upper surface suitable for the travel of the unmanned workpiece conveyance vehicle 10, and a guide portion 104 provided at the end portion in the width direction of the passage portion 102, along which the passage portion 102 is guided. The height of the upper end of the guide portion 104 from the passage portion 102 is higher than, for example, the height of the wheel 39 of the unmanned workpiece conveyance vehicle 10. Thus, it is possible to prevent the unmanned workpiece conveyance vehicle 10 traveling on the passage portion 102 from falling off the passage portion 102.

[0095] Figure 8 The passage module 6a of (A) of FIG. 6 further has a standby portion 106 for the standby of the unmanned workpiece conveyance vehicle 10, which is provided, for example, directly above the cutting device 4 or the storage unit 8. An opening 106a of a size that allows the passage of the housing portion 38 can be provided in the standby portion 106. In a state where the passage module 6a is appropriately provided, the opening 106a is positioned directly above the opening 92b of the cutting device 4 or the opening 16b of the storage unit 8.

[0096] On the other hand, Figure 8 The passage module 6b of (B) of FIG. 6 is formed in a straight line shape, Figure 8 The passage module 6c of (C) of FIG. 6 is formed in a right angle shape suitable for a corner. The passage modules 6b, 6c are used, for example, to connect between two adjacent passage modules 6a.

[0097] There are no restrictions on the type, quantity, or configuration (connection relationship) of the pathway modules constituting the transport pathway 6. For example, two pathway modules 6a can be connected using other pathway modules 6a. Additionally, for example, an arc-shaped (curved) pathway module can be used instead of a right-angled pathway module 6c. A power supply device (charger) for supplying power to the secondary battery of the unmanned workpiece transport vehicle 10 can be provided in the standby section 106 of the pathway module 6a.

[0098] Figure 9 This is a perspective view showing the transport path 6 formed by the path module 6a and the path module 6b. Figure 10 (A) and Figure 10 (B) is a cross-sectional view showing the connection between pathway module 6a and pathway module 6b. Additionally, Figure 11 This is a bottom view showing a structural example of the pathway module 6b.

[0099] like Figure 9 As shown, a pair of L-shaped angle irons (supports) 108 are provided at the end of the lower surface of the passage portion 102 along its length (the end along the direction of the transport passage 6). Each angle iron 108 has a generally horizontal support surface 108a and a side surface 108b that is generally perpendicular to the support surface 108a. Each angle iron 108 is fixed to the lower surface of the passage portion 102 along the transport passage 6 in the manner that each angle iron 108 is along its length.

[0100] When connecting path module 6a and path module 6b, firstly as follows: Figure 10 As shown in (A), the longitudinal end of the passage portion 102 constituting the passage module 6a is brought close enough to the longitudinal end of the passage portion 102 constituting the passage module 6b. Then, as... Figure 10 As shown in (B), the connector 110 is inserted into the angle iron 108 provided in the passage section 102 constituting the passage module 6a and the angle iron 108 provided in the passage section 102 constituting the passage module 6b.

[0101] The connector 110 includes, for example, a rod portion 110a, which is longer than the sum of the lengths of the angle iron 108 of the passage module 6a and the angle iron 108 of the passage module 6b; and a ring portion 110b, which is disposed at both ends of the rod portion 110a and has an opening in the center. The rod portion 110a of the connector 110 is inserted into the angle iron 108.

[0102] After inserting the rod 110a into the angle iron 108, the bolt 112 is screwed into the bolt hole (not shown) on the lower surface side of the passage portion 102 through the opening of the ring portion 110b. Thus, the passage module 6a and the passage module 6b can be connected by means of the connecting member 110. Furthermore, the passage module 6c is also connected to other passage modules (such as passage module 6a or passage module 6b) using the same procedure.

[0103] The mounting of the pathway modules 6a, 6b, and 6c relative to the cutting device 4 is, for example, by means of... Figure 9 , Figure 11 The foot component 114 shown above is used for this purpose. The foot component 114 includes: a plate-shaped base 114a; a columnar column portion 114b that protrudes from near the center of one side of the surface of the base 114a; and a suction cup-shaped adsorption portion 114c. Figure 11 It is installed at the front end of column 114b.

[0104] Four openings 114d extending through the base 114a in the thickness direction are formed in the region of the base 114a that does not overlap with the column portion 114b. Additionally, bolt holes 102a corresponding to each opening 114d are formed on the lower surface of the passage portion 102 constituting the passage modules 6a, 6b, and 6c. Figure 11 ).

[0105] Therefore, as long as the other side of the base 114a contacts the lower surface of the passage portion 102 and the bolt 116 is screwed into the bolt hole 102a through the opening 114d, the foot component 114 can be fixed to the passage modules 6a, 6b, and 6c. Furthermore, there are no restrictions on the number or arrangement of the openings 114d and the bolt holes 102a.

[0106] like Figure 11 As shown, in the passage module 6b of this embodiment, four bolt holes 102a corresponding to the four openings 114d of the base 114a are formed in multiple regions on the lower surface of the passage portion 102, allowing the foot component 114 to be installed in any region. The same applies to the other passage modules 6a and 6c.

[0107] That is, the foot component 114 is installed in any region selected from multiple regions on the lower surface of the passage section 102. Furthermore, it is preferable to install multiple foot components 114 in each passage module 6a, 6b, 6c. This facilitates the stabilization of the position of the transport passage 6 relative to the cutting device 4.

[0108] When installing the passage modules 6a, 6b, and 6c onto the cutting device 4, for example, aligning the passage modules 6a, 6b, and 6c relative to the cover 92 of the cutting device 4, such as... Figure 7As shown, the suction portion 114c of the foot member 114 is pressed against the upper surface of the roof 92a of the cover 92. This allows the suction portion 114c to adhere to the upper surface of the roof 92a of the cover 92, thereby mounting any of the passage modules 6a, 6b, and 6c onto the cover 92. In other words, any of the passage modules 6a, 6b, and 6c are mounted onto the cover 92 of the cutting device 4 using the foot member 114.

[0109] Furthermore, it is not necessary to install all the passage modules 6a, 6b, and 6c on the cutting device 4. For example, sometimes the passage module located between two cutting devices 4 is supported by the adjacent passage module only by means of the connecting member 110. Additionally, as... Figure 1 As shown, an information providing unit 102b, such as a QR code or a wireless tag, is provided on the passage section 102 of the passage module installed on the cutting device 4 or the storage unit 8. The information provided by this information providing unit 102b is used, for example, to confirm the position of the unmanned workpiece transport vehicle 10.

[0110] Next, the operation of transporting the storage section 38 of the unmanned workpiece transport vehicle 10 between the first parking area above the cutting device 4 in the transport passage 6 and the storage section holding platform 50 of the cutting device 4 will be described in detail. Figure 12 (A) is a partial cross-sectional side view of the situation when the unmanned workpiece transport vehicle 10 is moved to directly above the opening 106a, viewed from the Y-axis direction. Figure 12 (B) is a partial sectional side view of the storage section 38 when it is lowered, viewed from the Y-axis direction.

[0111] in addition, Figure 13 (A) is viewed from the X-axis direction. Figure 12 A partial sectional side view of the state shown in (A). Figure 13 (B) is viewed from the X-axis direction. Figure 12 (B) is a partial cross-sectional side view of the state shown. When the receiving part 38 is transported from the first parking area above the cutting device 4 in the transport passage 6 to the receiving part holding table 50 of the cutting device 4, as... Figure 12 (A) and Figure 13 As shown in (A), the unmanned workpiece transport vehicle 10 is first positioned to the side of the opening 106a.

[0112] Next, the wheels 39 are rotated to move the unmanned workpiece transport vehicle 10 above the opening 106a. Specifically, for example, the rotation axes of the four wheels 39 are aligned perpendicularly to the direction of movement of the unmanned workpiece transport vehicle 10 (the X-axis direction in this embodiment), and then the unmanned workpiece transport vehicle 10 is moved in such a way that the four wheels 39 are used to cross the opening 106a, positioning the recess 37b (space 37c) directly above the opening 106a.

[0113] As Figure 12 (B) and Figure 13 (B) shown, in the state of making the unmanned workpiece carrier 10 stop at the first parking position where the recess 37b is positioned directly above the opening 106a, the winch 40b of the lifting mechanism 40 is made to act to pull out the wire 40a. Thereby, the housing 38 can be lowered in a manner passing through the opening 106a and the opening 92b to place the housing 38 on the housing holding table 50.

[0114] After the housing 38 is placed on the housing holding table 50, the workpiece 11 (frame 15) is carried out from the housing 38. In addition, after the cutting of the workpiece 11 is completed, the workpiece 11 (frame 15) is carried into the housing 38.

[0115] When the housing 38 is carried from the housing holding table 50 of the cutting device 4 to the first parking area of the carrying passage 6 corresponding to the upper side of the cutting device 4, first the winch 40b of the lifting mechanism 40 is made to act to wind up the wire 40a. Thereby, the housing 38 can be raised in a manner passing through the opening 92b and the opening 106a, the housing 38 is carried out to the outside of the cover 92 of the cutting device 4, and the housing 38 is stored in the space 37c inside the recess 37b.

[0116] After the housing 38 is stored in the space 37c inside the recess 37b, the wheels 39 are made to rotate to move the unmanned workpiece carrier 10 from the first parking area. In addition, here, the operation when the housing 38 is carried between the first parking area of the carrying passage 6 corresponding to the upper side of the cutting device 4 and the housing holding table 50 of the cutting device 4 is described, but the operation when the housing 38 is carried between the second parking area of the carrying passage 6 corresponding to the upper side of the storage unit 8 and the housing holding table 26 of the storage unit 8 is the same.

[0117] Next, an example of the control method of the carrying system 2 of the present embodiment will be described. Figure 14 is a functional block diagram for describing an example of the control method of the carrying system 2. For example, when in a situation where a new workpiece 11 (unprocessed workpiece 11) is needed, the control device 96 of the cutting device 4 generates a notification signal (workpiece request signal) for notifying of this intention. The notification signal (workpiece request signal) generated by the control device 96 is transmitted from the transmitter 100 to the control unit 12.

[0118] As Figure 14As shown, the control unit 12 includes a control unit (control signal generation unit) 132 that generates control signals for performing various controls. This control unit 132 is typically configured as a computer including a processing unit such as a CPU and a storage device such as flash memory. The processing unit and the like are operated according to software stored in the storage device, thereby realizing the functions of the control unit 132.

[0119] A receiver 134 and a transmitter 136 are connected to the control unit 132. The receiver 134 receives notification signals from the cutting device 4, the storage unit 8, the unmanned workpiece transport vehicle 10, etc., and the transmitter 136 sends control signals to the cutting device 4, the storage unit 8, the unmanned workpiece transport vehicle 10, etc.

[0120] When the receiver 134 of the control unit 12 receives a notification signal (workpiece request signal) sent from the transmitter 100 of the cutting device 4, it sends the notification signal to the control unit 132. When the control unit 132 confirms the notification signal (workpiece request signal) from the cutting device 4, it instructs the unmanned workpiece transport vehicle 10 to move to the side of the storage unit 8 and transport the storage unit 38 to the storage unit holding table 26 of the storage unit 8. Specifically, the control unit 132 generates a control signal (first transport instruction signal) corresponding to the instruction and sends it from the transmitter 136 to the unmanned workpiece transport vehicle 10.

[0121] When the receiver 44 of the unmanned workpiece transport vehicle 10 receives a control signal (first transport instruction signal) from the control unit 12, it sends the control signal to the control device 42. The control device 42 controls the movement of the wheels (driving mechanism) 39 and the like according to the control signal (first transport instruction signal), so that the unmanned workpiece transport vehicle 10 travels along the transport path 6.

[0122] In addition, such as Figure 14 As shown, the control device 42 of the unmanned workpiece transport vehicle 10 is connected to a reader 138 for reading information from the information supply unit 102b provided in the transport path 6. Therefore, by reading the information from the information supply unit 102b through the reader 138, the control device 42 can determine its own position (the unmanned workpiece transport vehicle 10).

[0123] When the control device 42 confirms that it (the unmanned workpiece transport vehicle 10) has moved to the side of the storage unit 8, it again controls the movement of the wheels 39, etc., so that the unmanned workpiece transport vehicle 10 moves to a second parking area that can use the multiple wheels 39 to cross the opening 106a, which overlaps with the opening 16b. As a result, the space 37c of the storage unit 38 is positioned directly above the opening 106a.

[0124] Thus, in the state where the unmanned workpiece carrier 10 is parked in the second parking area, the control device 42 causes the winch 40b of the lifting mechanism 40 to act to pull out the wire 40a. Thereby, it is possible to lower the housing 38 in a manner passing through the opening 106a and the opening 16b to place the housing 38 on the housing holding table 26.

[0125] After the housing 38 is placed on the housing holding table 26, the control device 42 generates a notification signal (first carrying completion signal) for notifying the meaning that the carrying of the housing 38 to the storage unit 8 is completed. The notification signal (first carrying completion signal) generated by the control device 42 is transmitted from the transmitter 46 to the control unit 12.

[0126] When the receiver 134 of the control unit 12 receives the notification signal (first carrying completion signal) transmitted from the transmitter 46 of the unmanned workpiece carrier 10, the notification signal is transmitted to the control section 132. When the control section 132 confirms the notification signal (first carrying completion signal) from the unmanned workpiece carrier 10, it issues an instruction to the storage unit 8 to carry a new workpiece 11 to the housing 38 on the housing holding table 26. Specifically, the control section 132 generates a control signal (first carrying instruction signal) corresponding to the instruction and transmits it from the transmitter 136 to the storage unit 8.

[0127] When the receiver 34 of the storage unit 8 receives the control signal (first carrying instruction signal) from the control unit 12, the control signal is transmitted to the control device 32. The control device 32 controls the actions of the first lifting mechanism, the push-pull arm 22, the pair of guide rails 24, the second lifting mechanism, and the like in accordance with the control signal (first carrying instruction signal) to carry the new workpiece 11 to the housing 38.

[0128] When the new workpiece 11 is carried to the housing 38, the control device 32 generates a notification signal (first carrying completion signal) for notifying the meaning that the carrying of the workpiece 11 to the housing 38 is completed. The notification signal (first carrying completion signal) generated by the control device 32 is transmitted from the transmitter 36 to the control unit 12.

[0129] When the receiver 134 of the control unit 12 receives the notification signal (1st carrying-in completion signal) transmitted from the transmitter 36 of the storage unit 8, the notification signal is transmitted to the control section 132. When the control section 132 confirms the notification signal (1st carrying-in completion signal) from the storage unit 8, the unmanned workpiece carrier 10 is instructed to move to the side of the cutting device 4 and carry the base 37 to the housing portion holding table 50 of the cutting device 4. Specifically, the control section 132 generates a control signal (2nd carrying instruction signal) corresponding to the instruction and transmits it from the transmitter 136 to the unmanned workpiece carrier 10.

[0130] When the receiver 44 of the unmanned workpiece carrier 10 receives the control signal (2nd carrying instruction signal) from the control unit 12, the control signal is transmitted to the control device 42. The control device 42 causes the housing portion 38 to rise in accordance with the control signal (2nd carrying instruction signal) to the space 37c inside the base 37. Then, the unmanned workpiece carrier 10 is caused to travel along the carrying passage 6 by controlling the actions of the wheels 39 and the like.

[0131] When the control device 42 confirms that the unmanned workpiece carrier 10 has moved to the side of the cutting device 4, the unmanned workpiece carrier 10 is caused to move to the 1st parking area where the plurality of wheels 39 can straddle the opening 106a overlapping the opening 92b by controlling the actions of the wheels 39 and the like again. As a result, the space 37c of the storage housing portion 38 is positioned directly above the opening 106a.

[0132] Thus, in the state where the unmanned workpiece carrier 10 is parked at the 1st parking area, the control device 42 causes the winch 40b of the lifting mechanism 40 to act to pull out the wire 40a. Thereby, the housing portion 38 can be lowered in a manner passing through the opening 106a and the opening 92b to be placed on the housing portion holding table 50.

[0133] After the housing portion 38 is placed on the housing portion holding table 50, the control device 42 generates a notification signal (2nd carrying completion signal) for notifying that the carrying of the housing portion 38 to the cutting device 4 has been completed. The notification signal (2nd carrying completion signal) generated by the control device 42 is transmitted from the transmitter 46 to the control unit 12.

[0134] When the receiver 134 of the control unit 12 receives the notification signal (2nd conveyance completion signal) transmitted from the transmitter 46 of the unmanned workpiece conveyance vehicle 10, the notification signal is transmitted to the control section 132. When the control section 132 confirms the notification signal (2nd conveyance completion signal) from the unmanned workpiece conveyance vehicle 10, the control section 132 generates a control signal (1st conveyance instruction signal) corresponding to the instruction, and transmits the control signal to the cutting device 4 from the transmitter 136.

[0135] When the receiver 98 of the cutting device 4 receives the control signal (1st conveyance instruction signal) from the control unit 12, the control signal is transmitted to the control means 96. The control means 96 controls the operation of each component according to the control signal (1st conveyance instruction signal), and conveys the new workpiece 11 out of the storage section 38.

[0136] When the new workpiece 11 is conveyed out of the storage section 38, the control means 96 generates a notification signal (1st conveyance completion signal) for notifying that the conveyance of the workpiece 11 out of the storage section 38 has been completed, for example. The notification signal (1st conveyance completion signal) generated by the control means 96 is transmitted to the control unit 12 from the transmitter 100.

[0137] According to such steps, the workpiece 11 stored in the storage unit 8 can be conveyed to the cutting device 4 by the arbitrary cutting device 4. In addition, the steps when the workpiece 11 is conveyed from the storage unit 8 to the cutting device 4 are mainly described here, but the steps when the workpiece 11 is conveyed from the cutting device 4 to the storage unit 8 and the like are the same.

[0138] When the control means 96 of the cutting device 4 completes the processing of the workpiece 11, for example, a notification signal (processing completion signal) for notifying that the processing has been completed is generated. The notification signal (processing completion signal) generated by the control means 96 is transmitted to the control unit 12 from the transmitter 100. When the receiver 134 of the control unit 12 receives the notification signal (processing completion signal) transmitted from the transmitter 100 of the cutting device 4, the notification signal is transmitted to the control section 132.

[0139] When the control section 132 confirms the notification signal (processing completion signal) from the cutting device 4, the control section 132 generates a control signal (3rd conveyance instruction signal) corresponding to the instruction, and transmits the control signal to the unmanned workpiece conveyance vehicle 10 from the transmitter 136.

[0140] When the receiver 44 of the unmanned processed object carrier 10 receives the control signal (the 3rd carrying instruction signal) from the control unit 12, the control signal is transmitted to the control device 42. The control device 42 controls the operation of the wheels (running mechanisms) 39 and the like in accordance with the control signal (the 3rd carrying instruction signal), and causes the unmanned processed object carrier 10 to travel along the carrying passage 6.

[0141] When the control device 42 confirms that the unmanned processed object carrier 10 has moved to the side of the cutting device 4, the operation of the wheels 39 and the like is controlled again to move the unmanned processed object carrier 10 to the 1st parking area where the plurality of wheels 39 can straddle the opening 106a overlapping the opening 92b. As a result, the space 37c of the storage housing portion 38 is positioned directly above the opening 106a.

[0142] Thus, in the state where the unmanned processed object carrier 10 is parked at the 1st parking area, the control device 42 causes the winch 40b of the lifting mechanism 40 to operate to pull out the wire 40a. Thereby, it is possible to lower the housing portion 38 through the opening 106a and the opening 92b to place the housing portion 38 on the housing portion holding table 50.

[0143] After the housing portion 38 is placed on the housing portion holding table 50, the control device 42 generates a notification signal (the 3rd carrying completion signal) to notify the meaning that the carrying of the housing portion 38 to the cutting device 4 has been completed. The notification signal (the 3rd carrying completion signal) generated by the control device 42 is transmitted from the transmitter 46 to the control unit 12.

[0144] When the receiver 134 of the control unit 12 receives the notification signal (the 3rd carrying completion signal) transmitted from the transmitter 46 of the unmanned processed object carrier 10, the notification signal is transmitted to the control section 132. When the control section 132 confirms the notification signal (the 3rd carrying completion signal) from the unmanned processed object carrier 10, the cutting device 4 is instructed to carry the processed processed object 11 into the housing portion 38 on the housing portion holding table 50. Specifically, the control section 132 generates a control signal (the 2nd carrying-in instruction signal) corresponding to the instruction, and transmits it from the transmitter 136 to the cutting device 4.

[0145] When the receiver 98 of the cutting device 4 receives the control signal (the 2nd carrying-in instruction signal) from the control unit 12, the control signal is transmitted to the control device 96. The control device 96 controls the operation of each constituent element in accordance with the control signal (the 2nd carrying-in instruction signal), and carries the processed processed object 11 into the housing portion 38.

[0146] When the machined workpiece 11 is carried into the storage portion 38, the control device 96 generates a notification signal (2nd carrying completion signal) for notifying the meaning that the carrying of the machined workpiece 11 into the storage portion 38 has been completed. The notification signal (2nd carrying completion signal) generated by the control device 96 is transmitted from the transmitter 100 to the control unit 12.

[0147] When the receiver 134 of the control unit 12 receives the notification signal (2nd carrying completion signal) transmitted from the transmitter 100 of the cutting device 4, the notification signal is transmitted to the control section 132. When the control section 132 confirms the notification signal (2nd carrying completion signal) from the cutting device 4, the unmanned workpiece carrier 10 is instructed to move to the side of the storage unit 8, and then the storage portion 38 is carried to the storage portion holding table 26 of the storage unit 8. Specifically, the control section 132 generates a control signal (4th carrying instruction signal) corresponding to the instruction, and transmits the control signal from the transmitter 136 to the unmanned workpiece carrier 10.

[0148] When the receiver 44 of the unmanned workpiece carrier 10 receives the control signal (4th carrying instruction signal) from the control unit 12, the control signal is transmitted to the control device 42. The control device 42 causes the storage portion 38 to rise to the space 37c inside the base 37 in accordance with the control signal (4th carrying instruction signal). Then, the unmanned workpiece carrier 10 is caused to travel along the carrying passage 6 by controlling the operation of the wheels 39 and the like.

[0149] When the control device 42 confirms that the unmanned workpiece carrier 10 has moved to the side of the storage unit 8, the unmanned workpiece carrier 10 is caused to move to the 2nd parking area where the plurality of wheels 39 can straddle the opening 106a overlapping the opening 16b by controlling the operation of the wheels 39 and the like again. As a result, the space 37c storing the storage portion 38 is positioned directly above the opening 106a.

[0150] In this way, in a state where the unmanned workpiece carrier 10 is parked in the 2nd parking area, the control device 42 causes the winch 40b of the lifting mechanism 40 to operate to pull out the wire 40a. Thereby, the storage portion 38 can be lowered in a manner passing through the opening 106a and the opening 16b to be placed on the storage portion holding table 26.

[0151] After the storage portion 38 is placed on the storage portion holding table 26, the control device 42 generates a notification signal (4th carrying completion signal) for notifying the meaning that the carrying of the storage portion 38 into the storage unit 8 has been completed. The notification signal (4th carrying completion signal) generated by the control device 42 is transmitted from the transmitter 46 to the control unit 12.

[0152] When the receiver 134 of the control unit 12 receives the notification signal (the 4th conveyance completion signal) transmitted from the transmitter 46 of the unmanned workpiece conveyance vehicle 10, the notification signal is transmitted to the control section 132. When the control section 132 confirms the notification signal (the 4th conveyance completion signal) from the unmanned workpiece conveyance vehicle 10, the control section 132 generates a control signal (the 2nd conveyance-out instruction signal) corresponding to the instruction and transmits the control signal to the storage unit 8 from the transmitter 136.

[0153] When the receiver 34 of the storage unit 8 receives the control signal (the 2nd conveyance-out instruction signal) from the control unit 12, the control signal is transmitted to the control device 32. The control device 32 controls the operation of the 1st lifting mechanism, the push-pull arm 22, the pair of guide rails 24, the 2nd lifting mechanism, and the like in accordance with the control signal (the 2nd conveyance-out instruction signal) and conveys the machined workpiece 11 out of the storage section 38.

[0154] When the machined workpiece 11 is conveyed out of the storage section 38, the control device 32 generates a notification signal (the 2nd conveyance-out completion signal) for notifying that the conveyance of the workpiece 11 out of the storage section 38 has been completed, for example. The notification signal (the 2nd conveyance-out completion signal) generated by the control device 32 is transmitted to the control unit 12 from the transmitter 36. In this way, the storage unit 8 can convey the machined workpiece 11 processed by the cutting device 4.

[0155] In addition, the above-described steps can be arbitrarily changed within a range in which the workpiece 11 can be appropriately conveyed. For example, a plurality of steps included in the above-described steps can be performed simultaneously, or the order of the steps can be changed within a range in which the conveyance of the workpiece 11 is not hindered. Similarly, any step can be added, changed, or omitted within a range in which the conveyance of the workpiece 11 is not hindered.

[0156] As described above, the carrying system 2 of the present embodiment includes: a carrying passage 6 provided in the entire range of the plurality of cutting devices (machining devices) 4; an unmanned workpiece carrying vehicle (automated guided vehicle) 10 that travels on the carrying passage 6, has a storage portion 38 having a space (storage space) 38a in which the workpiece 11 is stored, a base (traveling portion) 37 having a space (storage space) 37c in which the storage portion 38 is stored, wheels (traveling mechanism) 39 provided to the base 37, a lifting mechanism 40 provided to the space 37c of the base 37, and a receiver 44 that receives a control signal, the lifting mechanism 40 suspending the storage portion 38 from above and lifting the storage portion 38; and a storage unit 8 having a storage portion holding table 26 that holds the storage portion 38 when the workpiece 11 is transferred from a case (workpiece storage) 20 in which the workpiece 11 is stored to the storage portion 38 of the unmanned workpiece carrying vehicle 10, and a receiver 34 that receives the control signal.

[0157] Therefore, the unmanned workpiece carrying vehicle 10 can travel on the carrying passage 6 in a state in which the storage portion 38 is stored in the space 37c. In addition, the unmanned workpiece carrying vehicle 10 stops at a first parking area above the cutting device (machining device) 4 of the carrying passage 6 or a second parking area above the storage unit 8 of the carrying passage 6, lifts the storage portion 38, and thereby can carry the storage portion 38 between the first parking area and the storage portion holding table 50 inside the cutting device 4 or between the second parking area and the storage portion holding table 26 inside the storage unit 8.

[0158] In addition, in the carrying system 2 of the present embodiment, the carrying passage 6 is provided in a space directly above the cutting device 4. Therefore, when the carrying passage 6 is designed, the configuration of the side surface of each cutting device 4 does not need to be considered. That is, the construction of the carrying system becomes easy.

[0159] (Embodiment 2)

[0160] In the present embodiment, an unmanned workpiece carrying vehicle (automated guided vehicle) different from the unmanned workpiece carrying vehicle (automated guided vehicle) 10 of Embodiment 1 is described. In addition, the basic configuration of the unmanned workpiece carrying vehicle of the present embodiment is the same as that of the unmanned workpiece carrying vehicle 10 of Embodiment 1. Therefore, the same reference numerals are marked on the same configurations, and detailed description is omitted. Similarly, the same reference numerals are marked on the same constituent elements as those of the carrying system 2 of Embodiment 1, and detailed description is omitted.

[0161] Figure 15 is a perspective view showing a configuration example of the unmanned workpiece carrying vehicle (automated guided vehicle) 210 of the present embodiment. As shown in the drawing, the unmanned workpiece carrying vehicle 210 of the present embodiment has a base 37, wheels 39 provided to the base 37, a lifting mechanism 40 provided to the space 37c of the base 37, and a receiver 44 that receives a control signal.Figure 15 As shown in FIG. 1, four wheels (traveling mechanisms) 239 having rotation axes substantially perpendicular to each of the four side surfaces 37e of the rectangular parallelepiped-shaped base (traveling portion) 37 of the unmanned workpiece carrier 210 are provided on the four side surfaces 37e, respectively. That is, the unmanned workpiece carrier 210 has a total of four wheels 239.

[0162] Each wheel 239 is coupled to a rotation drive source such as a motor and rotates. The unmanned workpiece carrier 210 (base 37) travels on the carrying passage 6 by rotating the wheels 239 by the rotation drive source. Alternatively, a so-called Mecanum wheel or the like in which a plurality of rotation bodies in a tilted barrel shape (cylindrical shape) are attached to an outer peripheral surface in contact with the carrying passage 6 can be used as the wheels 239. In this case, the unmanned workpiece carrier 210 can be moved in an arbitrary direction by adjusting the rotation amounts of the wheels 239.

[0163] Two sub-wheels 240 having rotation axes substantially parallel to the rotation axes of any two wheels 239 are provided on the lower surface 37a of the base 37. The distance between the two sub-wheels 240 is wider than the width of the opening 37d of the recess 37b. In addition, the diameters of the two sub-wheels 240 are small to the extent that the sub-wheels 240 do not come into contact with the passage portion 102 or the like when the unmanned workpiece carrier 210 travels on the passage portion 102 or the like by the wheels 239.

[0164] Each sub-wheel 240 is not coupled to a rotation drive source and can freely rotate. Alternatively, each sub-wheel 240 can be coupled to a rotation drive source. The number of sub-wheels 240 is not particularly limited. The unmanned workpiece carrier 210 can have one sub-wheel 240 having a rotation axis substantially parallel to any two wheels 239 or three or more sub-wheels 240 having the same rotation axis.

[0165] Next, the operation of carrying the housing portion 38 of the unmanned workpiece carrier 210 between the first parking area above the cutting device 4 and the receiving table 50 of the housing portion of the cutting device 4 in the carrying passage 6 will be described in detail. Figure 16 (A) is a plan view of the state in which the unmanned workpiece carrier 210 is moved to directly above the opening 106a from the Z-axis direction, Figure 16 (B) is a plan view of the state in which the housing portion 38 is lowered from the Z-axis direction.

[0166] In addition, Figure 17 (A) is a plan view of the state in which the unmanned workpiece carrier 210 is moved to directly above the opening 106a from the X-axis direction, Figure 16 (A) is a partial cross-sectional side view of the state shown in Figure 17(B) is a state viewed from the X-axis direction Figure 16 (B) is a state viewed from the X-axis direction Figure 16 (B) is a state viewed from the X-axis direction Figure 17 (A) and (A) and

[0167] (A) and (A) and

[0168] (A) and (A) and

[0169] (A) and Figure 16 (A) and Figure 16 (A) and Figure 17 (A) and Figure 17 (A) and (A) and

[0170] (A) and (A) and

[0171] (A) and Figure 16 (A) andFigure 17 As shown in (B), after stopping the unmanned workpiece carrier 210 at the first parking position where the recess 37b is positioned directly above the opening 106a, the winch 40b of the lifting mechanism 40 is operated to pull out the wire 40a. Thereby, the housing 38 can be lowered through the opening 106a and the opening 92b to be placed on the housing holding table 50.

[0172] After the housing 38 is placed on the housing holding table 50, the workpiece 11 (the frame 15) is carried out from the housing 38. In addition, after the cutting of the workpiece 11 is completed, the workpiece 11 (the frame 15) is carried into the housing 38.

[0173] When the housing 38 is carried from the housing holding table 50 of the cutting device 4 to the first parking area of the carrying passage 6 corresponding to the upper side of the cutting device 4, the winch 40b of the lifting mechanism 40 is first operated to wind up the wire 40a. Thereby, the housing 38 can be raised through the opening 92b and the opening 106a to be carried out to the outside of the cover 92 of the cutting device 4 and stored in the space 37c inside the recess 37b.

[0174] After the housing 38 is stored in the space 37c inside the recess 37b, the wheel 239 is rotated to move the unmanned workpiece carrier 210 from the first parking area. In addition, here, the operation when the housing 38 is carried between the first parking area of the carrying passage 6 corresponding to the upper side of the cutting device 4 and the housing holding table 50 of the cutting device 4 is described, and the operation when the housing 38 is carried between the second parking area of the carrying passage 6 corresponding to the upper side of the storage unit 8 and the housing holding table 26 of the storage unit 8 is the same.

[0175] (Embodiment 3)

[0176] In the present embodiment, a storage unit different from the storage unit 8 is described. In addition, the basic structure of the carrying system or the like in which the storage unit of the present embodiment is assembled is the same as that of the carrying system 2 or the like of Embodiment 1. Therefore, the same reference numerals are marked on the same constituent elements, and detailed description is omitted.

[0177] Figure 18 is a side view schematically showing a structure example of the storage unit 308 of the present embodiment, Figure 19 is a plan view schematically showing the configuration of the inside of the storage unit 308. As shown in Figure 18 , the storage unit 308 includes a housing 316 that houses various constituent elements. In Figure 18 , only the outline of the housing 316 is shown for convenience of description.

[0178] A cassette holding table 318 that is raised and lowered by a first lifting mechanism (not shown) of a ball screw type, for example, is provided inside the housing 316. A cassette (workpiece reservoir) 20 that can accommodate a plurality of workpieces 11 is placed on the upper surface of the cassette holding table 318. In addition, the cassette 20 accommodates workpieces 11 in a state in which the workpieces 11 are supported to the frame 15 by the belt 13, for example.

[0179] As shown in FIG. 1, a first workpiece moving unit 320 that moves while gripping the frame 15 is disposed at a first position facing the cassette holding table 318 (cassette 20). The first workpiece moving unit 320 includes a gripping portion 322 that grips the frame 15 up and down, and a driving portion 324 that moves the gripping portion 322 in a substantially horizontal direction. Figure 19

[0180] An opening 324a in the form of a slit that extends substantially horizontally toward the cassette holding table 318 is formed on the upper surface of the driving portion 324, and the driving portion 324 moves the gripping portion 322 in a first direction along the opening 324a. That is, the gripping portion 322 moves in a manner that approaches or moves away from the cassette holding table 318 in proximity to the cassette holding table 318.

[0181] Therefore, for example, if the height of the frame 15 accommodated in the cassette 20 is made to coincide with the height of the gripping portion 322 and the gripping portion 322 is made to approach the cassette holding table 318 by the first lifting mechanism, the frame 15 in the cassette 20 can be gripped by the gripping portion 322. In addition, if the gripping portion 322 is made to move away from the cassette holding table 318 after the frame 15 in the cassette 20 is gripped by the gripping portion 322, the frame 15 is pulled out to the outside of the cassette 20.

[0182] A first temporary placement table 326 that temporarily places the frame 15 moved out from the cassette 20 is disposed around the first workpiece moving unit 320. The first temporary placement table 326 includes a pair of guide portions 326a that are each longer in a first direction, and a base portion 326b that is longer in a second direction that is perpendicular to and horizontal with the first direction. The pair of guide portions 326a are connected by the base portion 326b in a manner that the lengthwise directions thereof are parallel to each other. The frame 15 pulled out from the cassette 20 by the first workpiece moving unit 320 is placed on the pair of guide portions 326a.

[0183] The first temporary placement table 326 is supported by a first temporary placement table moving portion 328 that moves the first temporary placement table 326 in the second direction. The first temporary placement table moving portion 328 has a guide rail 330 that is longer in the second direction. A moving member 332 is slidably installed on the guide rail 330.

[0184] ​A nut portion (not shown) is provided on the moving member 332, and a ball screw (not shown) substantially parallel to the guide rail 330 is screwed to the nut portion. A pulse motor 334 is connected to one end of the ball screw. When the ball screw is rotated by the pulse motor 334, the moving member 332 moves in the second direction along the guide rail 330.

[0185] The base portion 326b of the first temporary placement table 326 is fixed to the upper portion of the moving member 332. Therefore, the first temporary placement table 326 moves in the second direction together with the moving member 332. In addition, the first temporary placement table moving portion 328 is configured to be able to move the first temporary placement table 326 between the first position and the second position beside the first position.

[0186] The second workpiece moving unit 336 that holds and moves the frame 15 is arranged in the second position. That is, the second workpiece moving unit 336 is arranged beside the first workpiece moving unit 320. The configuration of the second workpiece moving unit 336 is the same as that of the first workpiece moving unit 320.

[0187] Specifically, the second workpiece moving unit 336 includes a holding portion 338 that holds the frame 15 up and down, and a driving portion 340 that moves the holding portion 338 in a substantially horizontal direction. A slit-shaped opening 340a that is longer in the first direction is formed on the upper surface of the driving portion 340, and the driving portion 340 moves the holding portion 338 along the opening 340a.

[0188] The second temporary placement table 342 having the same configuration as the first temporary placement table 326 is arranged around the second workpiece moving unit 336. That is, the second temporary placement table 342 includes a pair of guide portions 342a each of which is longer in the first direction, and a base portion 342b which is longer in the second direction perpendicular to the first direction and horizontal. The pair of guide portions 342a are connected by the base portion 342b in a manner that the length directions thereof are parallel to each other.

[0189] The second temporary placement table 342 is supported by a second temporary placement table moving portion 344 that moves the second temporary placement table 342 in the second direction and the vertical direction. The second temporary placement table moving portion 344 has a guide rail 346 that is longer in the second direction. A moving member 348 is slidably installed on the guide rail 346.

[0190] A nut portion (not shown) is provided on the moving member 348, and a ball screw (not shown) substantially parallel to the guide rail 346 is screwed to the nut portion. A pulse motor 350 is connected to one end of the ball screw. When the ball screw is rotated by the pulse motor 350, the moving member 348 moves in the second direction along the guide rail 346.

[0191] A base portion 342b of the second temporary placement table 342 is fixed to an upper portion of the moving member 348 by means of a lifting mechanism 352 constituted by a cylinder or the like. Therefore, the second temporary placement table 342 moves in the second direction together with the moving member 348 and the lifting mechanism 352, and is lifted by the lifting mechanism 352. In addition, the second temporary placement table moving portion 344 is configured to be able to move the second temporary placement table 342 between the second position and a first position beside the second position.

[0192] Figure 20 is a side view schematically showing a case where the positions of the first temporary placement table 326 and the second temporary placement table 342 are exchanged by moving them in the second direction. When exchanging the positions of the first temporary placement table 326 and the second temporary placement table 342, first, the second temporary placement table 342 is lifted by the lifting mechanism 352. Specifically, the second temporary placement table 342 is positioned at a lifted position at which the height of the lower end of the second temporary placement table 342 is higher than the height of the upper end of the first temporary placement table 326.

[0193] Then, with the second temporary placement table 342 positioned at the lifted position, the second temporary placement table 342 is moved to the first position side by the second temporary placement table moving portion 344. In addition, at the same time, the first temporary placement table 326 is moved to the second position side by the first temporary placement table moving portion 328. In addition, in the case shown in Figure 20 is a side view schematically showing a case where the positions of the first temporary placement table 326 and the second temporary placement table 342 are exchanged by moving them in the second direction. When exchanging the positions of the first temporary placement table 326 and the second temporary placement table 342, first, the second temporary placement table 342 is lifted by the lifting mechanism 352. Specifically, the second temporary placement table 342 is positioned at a lifted position at which the height of the lower end of the second temporary placement table 342 is higher than the height of the upper end of the first temporary placement table 326.

[0194] After the movement of the first temporary placement table 326 and the second temporary placement table 342 is completed, the second temporary placement table 342 is lowered by the lifting mechanism 352, and is positioned at a reference position at which the height of the lower end of the second temporary placement table 342 is substantially equal to the height of the lower end of the first temporary placement table 326. In this way, in the storage unit 308, the first temporary placement table moving portion 328 and the second temporary placement table moving portion 344 are able to move in such a manner that the first temporary placement table 326 and the second temporary placement table 342 are exchanged between the first position and the second position.

[0195] A storage portion holding table 354 that is lifted by a second lifting mechanism (not shown) of a ball screw type is provided at a position facing the second position in which the second workpiece moving unit 336 is arranged. On the upper surface of this storage portion holding table 354, the storage portion 38 of the unmanned workpiece carrier 10 or the unmanned workpiece carrier 210 (hereinafter referred to as the unmanned workpiece carrier 10 or the like) is placed. As shown in Figure 18As shown, an opening 316b is provided in the area directly above the storage holding platform 354, through which the top 316a of the housing 316 passes vertically. The opening 316b is shaped and sized to allow the storage section 38 placed on the storage holding platform 354 to pass through.

[0196] A control device 362 for controlling the operation of the storage unit 308 is connected to the following components: a first lifting mechanism for raising and lowering the box holding table 318, a first workpiece moving unit 320, a first temporary table moving part 328, a second workpiece moving unit 336, a second temporary table moving part 344, a lifting mechanism 352, and a second lifting mechanism for raising and lowering the storage holding table 354. The control device 362 is typically a computer comprising a processing unit such as a CPU and a storage unit such as flash memory. It operates the processing unit according to software stored in the storage unit, thereby realizing the function of the control device 362.

[0197] A receiver 364 and a transmitter 366 are also connected to the control device 362. The receiver 364 receives control signals (control signals) sent from the control unit 12 of the conveying system, and the transmitter 366 sends notification signals (notification signals) to the control unit 12. The control device 362 controls the operation of the storage unit 308 based on the signals received by the receiver 364. In addition, the control device 362 sends the required signals to the control unit 12 via the transmitter 366.

[0198] Next, the operation of the storage unit 308 in this embodiment will be explained. Figure 21 (A) Figure 21 (B) Figure 22 (A) and Figure 22 (B) is a top view schematically illustrating an example of the operation of the storage unit 308. Furthermore, in this embodiment, the operation is described when the first temporary platform 326 is positioned in the first position and the second temporary platform 342 is positioned in the second position, but the operation is the same when the first temporary platform 326 is positioned in the second position and the second temporary platform 342 is positioned in the first position.

[0199] For example, the unmanned workpiece transport vehicle 10 places the storage section 38 containing the processed workpiece 11 (frame 15) on the storage section holding table 354. In addition, the box 20 containing the unprocessed workpiece 11 (frame 15) is placed in advance on the box holding table 318.

[0200] Then, as Figure 21The gripping portion 322 is caused to approach the cassette 20 on the cassette holding table 318 and grip the frame 15 housed in the cassette 20 with the gripping portion 322. At the same time, the gripping portion 338 is caused to approach the housing portion 38 on the housing portion holding table 354 and grip the frame 15 housed in the housing portion 38 with the gripping portion 338.

[0201] After the frame 15 in the cassette 20 is gripped with the gripping portion 322, as shown in (B) of FIG. 3, the gripping portion 322 is caused to move away from the cassette holding table 318. Likewise, after the frame 15 in the housing portion 38 is gripped with the gripping portion 338, as shown in (B) of FIG. 4, the gripping portion 338 is caused to move away from the housing portion holding table 354. Figure 21 Figure 21 After the frame 15 in the cassette 20 is gripped with the gripping portion 322, as shown in (B) of FIG. 3, the gripping portion 322 is caused to move away from the cassette holding table 318. Likewise, after the frame 15 in the housing portion 38 is gripped with the gripping portion 338, as shown in (B) of FIG. 4, the gripping portion 338 is caused to move away from the housing portion holding table 354.

[0202] Next, as shown in (A) of FIG. 5, the first temporary placement table 326 and the second temporary placement table 342 are moved in such a manner that they are exchanged between the first position and the second position. That is, the second temporary placement table 342 is caused to rise to the raised position by the lifting mechanism 352. Then, the second temporary placement table 342 is caused to move to the first position side in the second direction. Figure 22 At the same time, the first temporary placement table 326 is caused to move to the second position side in the second direction. After the movement of the first temporary placement table 326 and the second temporary placement table 342 is completed, the second temporary placement table 342 is caused to descend to the reference position by the lifting mechanism 352. As a result, the first temporary placement table 326 is positioned at the second position facing the housing portion holding table 354, and the second temporary placement table 342 is positioned at the first position facing the cassette holding table 318.

[0203] Then, as shown in (B) of FIG. 6, the frame 15 on the first temporary placement table 326 is gripped with the gripping portion 338, and the gripping portion 338 is caused to approach the housing portion 38 on the housing portion holding table 354. As a result, the frame 15 on the first temporary placement table 326 that supports the workpiece 11 before processing is housed in the housing portion 38 on the housing portion holding table 354.

[0204] Figure 22 At the same time, the frame 15 on the second temporary placement table 342 is gripped with the gripping portion 322, and the gripping portion 338 is caused to approach the cassette 20 on the cassette holding table 318. As a result, the frame 15 on the second temporary placement table 342 that supports the workpiece 11 after processing is housed in the cassette 20 on the cassette holding table 318.

[0205] At the same time, the frame 15 on the second temporary placement table 342 is gripped with the gripping portion 322, and the gripping portion 338 is caused to approach the cassette 20 on the cassette holding table 318. As a result, the frame 15 on the second temporary placement table 342 that supports the workpiece 11 after processing is housed in the cassette 20 on the cassette holding table 318.

[0206] ​​After the unmanned workpiece transport vehicle 10 or the like stores the frame 15 on the first temporary platform 326 into the storage section 38 on the storage section holding platform 354, the storage section 38 is moved from the storage section holding platform 354. Through this process, the processed workpiece 11 can be moved from the unmanned workpiece transport vehicle 10 or the like to the storage unit 308, and the unprocessed workpiece 11 can be moved from the storage unit 308 to the unmanned workpiece transport vehicle 10 or the like.

[0207] Furthermore, the first temporary platform 326 and the second temporary platform 342 have the same function, allowing the frame 15 removed from the box 20 to be temporarily placed on either the first temporary platform 326 or the second temporary platform 342. For example, if the second temporary platform 342 is positioned in the first position, the frame 15 removed from the box 20 can be temporarily placed on the second temporary platform 342.

[0208] Furthermore, the first workpiece moving unit 320 moves the workpiece 11 between the first temporary table 326 or the second temporary table 342 positioned at the first position and the box holding table 318 (box 20). Similarly, the second workpiece moving unit 336 moves the workpiece 11 between the second temporary table 342 or the first temporary table 326 positioned at the second position and the storage holding table 354 (storage section 38).

[0209] Furthermore, the present invention is not limited to the embodiments described above, and various modifications and implementations are possible. For example, the transport path 6 may have a space (standby area) for separating two unmanned workpiece transport vehicles 10, etc. Additionally, the transport path 6 may be configured to allow only one-way traffic, i.e., allowing unmanned workpiece transport vehicles 10, etc., to travel in one direction. In this case, a forward transport path 6 and a return transport path 6 may be provided on the cutting device (processing device).

[0210] In addition, in the above embodiment, an information providing unit 102b, such as an identification code or a wireless tag, is provided on the passage section 102, but the information providing unit may also be installed on the guide section 104. In this case, for example, the information providing unit may be installed on the inner wall or upper end of the guide section 104.

[0211] In addition, the structure and method of the above-described embodiments or variations can be appropriately modified and implemented as long as they do not depart from the scope of the present invention.

Claims

1. A conveyance system that individually conveys workpieces to a plurality of processing devices, characterized by comprising: a conveyance passage that is provided in a space directly above the processing devices over the entire range of the plurality of processing devices; a transport vehicle that travels on the conveyance passage, has a storage portion that has a storage space that stores the workpieces, a traveling portion that has a storage space that stores the storage portion, a traveling mechanism that is provided to the traveling portion, a lifting mechanism that is provided to the traveling portion and suspends the storage portion from above to lift the storage portion, and a receiver that receives a control signal; a storage unit that has a storage portion holding table that holds the storage portion when handing over the workpieces from a workpiece storage that stores the workpieces to the storage portion of the transport vehicle, and a receiver that receives a control signal; and a control unit that has a transmitter that transmits a control signal to the processing devices, the transport vehicle, and the storage unit, a receiver that receives a notification signal transmitted from the processing devices, and a control signal generating portion that generates a control signal transmitted from the transmitter of the control unit, wherein the control signal generating portion of the control unit generates a control signal transmitted from the transmitter of the control unit in accordance with the notification signal received by the receiver of the control unit, the transmitter of the control unit transmits the control signal generated by the control signal generating portion of the control unit to the processing devices, the transport vehicle, and the storage unit, an opening of a size that allows the storage portion to pass through is provided in the conveyance passage, the transport vehicle travels on the conveyance passage in a state where the storage portion is stored in the storage space in accordance with the control signal received by the receiver of the transport vehicle, and when stopping at a first stop area that corresponds to a position above the processing devices in the conveyance passage or a second stop area that corresponds to a position above the storage unit in the conveyance passage, the storage portion is lifted in a state where the transport vehicle stops by straddling the opening of the conveyance passage to convey the storage portion between the first stop area and the inside of the processing devices or between the second stop area and the storage portion holding table of the storage unit via the opening.

2. The conveyance system according to claim 1, characterized in that the conveyance passage is provided on an upper surface of the processing devices. ​ ​ ​ ​ ​ ​ ​ ​ ​ ​

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