Wafer inspection machine

Abstract

The invention discloses a wafer inspection machine, comprising an LP component, a manipulator component, a pre-alignment component, a macro-detection component, a wafer back inspection component and an automatic positioning component. The components of the invention are suitable for both 8-inch and 12-inch wafers. There is no need to replace hardware when inspecting wafers of different sizes, which greatly saves costs. After identification and statistics by the LP component, the wafer is transported to the pre-alignment component by the manipulator component for pre-alignment, and then the wafer is transported to the macro-detection component for macro-detection. After that, the wafer back inspection component flips the wafer for inspection. Finally, the automatic positioning component transports the wafer to a microscope for microscopic inspection. The inspection includes morphology (including graphics and appearance, etc.), defects (including foreign matter, missing and scratches) and measurement data (including CD key size, Overlay engraving size and line size, etc.), which is conducive to realizing automatic inspection of wafers and greatly improves work efficiency.

Description

Technical Field

[0001] The invention relates to the technical field of wafer inspection, in particular to a wafer inspection machine. Background Art

[0002] Wafer refers to the substrate (also called base) for manufacturing semiconductor transistors or integrated circuits. Because it is a crystalline material and its shape is round, it is called a wafer. Substrate materials include silicon, germanium, GaAs, InP, GaN, etc. Since silicon is the most commonly used, if the crystalline material is not specifically specified, it usually refers to silicon wafer. Various circuit component structures can be processed on silicon wafers to become integrated circuit products with specific electrical functions.

[0003] Wafers are easily affected by static electricity and easily scratched, so there will be a certain defective rate. Therefore, it is necessary to use an inspection machine to check out defective products. Traditional wafer inspection machines can only inspect wafers of a single size during the inspection process, and the scope of application is relatively small. When wafers of different sizes need to be inspected, the hardware needs to be replaced, which wastes time and is inefficient. Most steps of general wafer inspection machines still require manual participation, cannot be automated, and have low efficiency. Summary of the invention

[0004] The object of the present invention is to provide a wafer inspection machine to solve the problems raised in the above background technology.

[0005] In order to solve the above technical problems, the present invention provides the following technical solutions: a wafer inspection machine, including an LP component, a manipulator component, a pre-alignment component, a macro detection component, a wafer back inspection component, an automatic running component, a first shell, a sensor, a first fixed plate, a cover plate, a feeding arm, a box, a connecting rod, a manipulator arm, a base, a mounting plate, a second fixed plate, a first through hole, a second shell, a wafer support table, a second through hole, a first support arm, a third shell, a support table, a display, a microscope, a fixed block, a second support arm, a top cover, an alarm light, an observation window, a slide rail, a slider and a side door, wherein one side of the top center of the support table is fixedly connected to the bottom of the third shell, the top center of the support table is fixedly connected to the bottom of the microscope, one side of the microscope is provided with a display, the bottom of the display is fixedly connected to one side of the top of the support table, and one side of the support table is connected to the box Side welding, the box body is located at the middle and upper part of one side of the support platform and is hinged with the side door through a hinge, an observation window is arranged above the side door, the observation window is hinged with the middle and upper side wall of the box body through a hinge, the top of the box body is welded to the bottom of the top cover, one side of the top of the top cover is fixedly connected with the bottom of the alarm light by bolts, a mounting plate is arranged at the middle and upper part of the interior of the box body, the mounting plate is fixedly connected with the box body, an LP component is arranged near the top position of the box body on an adjacent side of the support platform, one side of the top of the mounting plate is fixedly connected with the bottom of the macro detection component by bolts, a crystal back inspection component is arranged on one side of the macro detection component, the other side of the top of the mounting plate is fixedly connected with the bottom of the pre-alignment component by bolts, the top of the mounting plate is located on the same side of the LP component and is fixedly connected with the bottom of the manipulator component, and an automatic running component is arranged near the top center of the support platform.

[0006] Furthermore, the LP component is composed of a first shell, a sensor, a first fixed plate, a cover plate and a feeding arm. The bottom of the sensor is fixedly connected to the top of the cover plate, the bottom of the cover plate is fixedly connected to the top of the first shell, one side of the first shell is fixedly connected to one side of the box body, one side of the first shell is fixedly connected to one end of the feeding arm, a first fixed plate is arranged under the first shell, the first fixed plate is fixedly connected to one side of the box body, a feeding table is arranged on the top of the first fixed plate, and a servo motor and a screw are arranged at the bottom of the feeding table.

[0007] Furthermore, the manipulator assembly consists of a connecting rod, a mechanical arm, a base and a second fixed plate, the bottom of the base is fixedly connected to the top of the mounting plate by bolts, tracks are provided on both sides of the top of the base, the second fixed plate is located above the tracks, a motor and a screw rod are provided on one side of the center of the base, and the top of the nut block on the screw rod is fixedly connected to one side of the bottom of the second fixed plate, a motor is provided on one side of the top of the second fixed plate, an output end of the motor is fixedly connected to one side of the bottom of the mechanical arm, the other side of the bottom of the mechanical arm is fixedly connected to one end of the connecting rod, and the other end of the connecting rod is fixedly connected to the loading tray by bolts.

[0008] Furthermore, the pre-alignment assembly consists of a first through hole, a second shell, a wafer support table, a second through hole and a first support arm. The bottom of the second shell is fixedly connected to the top of the mounting plate by bolts, a wafer support table is provided on one side of the top center of the second shell, a plurality of second through holes are opened at the top center of the wafer support table, a plurality of first through holes are opened on one side of the top center of the wafer support table, the other side of the top center of the second shell is fixedly connected to the bottom of the first support arm near the corner, and a sensor is provided on one side of the top center of the first support arm.

[0009] Furthermore, the macro detection component is composed of a loading platform, a motor and a rotating shaft, the bottom of the loading platform is fixedly connected to one end of the rotating shaft, and the other end of the rotating shaft is fixedly connected to the output end of the motor.

[0010] Furthermore, the crystal back inspection assembly consists of a fixed block and a second support arm, the bottom of the fixed block is fixedly connected to one side of the top of the second support arm, the other side of the second support arm is fixedly connected to the output end of the motor, a movable plate is provided at the bottom of the motor, and the bottom of the movable plate is fixedly connected to the output end of the hydraulic lifting and retracting rod.

[0011] Furthermore, the automatic running assembly consists of a slide rail and a slider. A slider is provided under the microscope, and the slider is located above the slide rail. Both ends of the slide rail are fixedly connected to the top side walls inside the support platform, the bottom of the slider is connected to the top of the nut block, and the nut block is spirally connected to the lead screw, and one end of the lead screw is fixedly connected to the output end of the motor.

[0012] Compared with the prior art, the beneficial effects achieved by the present invention are:

[0013] 1. The invention has a simple and compact structure, and each component is suitable for both 8-inch and 12-inch wafers, realizing the inspection of wafers of different sizes, which is beneficial to improving the practicality of the device. In addition, there is no need to replace hardware when inspecting wafers of different sizes, which greatly saves costs.

[0014] 2. The invention uses the LP component to count the materials and then uses the robot component to move them to the pre-alignment component for pre-alignment. The robot then moves the wafer to the macro-inspection component for macro-inspection. The backside inspection component then flips the wafer over for backside inspection. The automatic positioning component then transports the wafer to a microscope for careful inspection, which is beneficial for realizing automatic inspection of wafers, greatly improving work efficiency and reducing labor costs. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] The accompanying drawings are used to provide a further understanding of the present invention and constitute a part of the specification. Together with the embodiments of the present invention, they are used to explain the present invention and do not constitute a limitation of the present invention. In the accompanying drawings:

[0016] Figure 1It is a top view of the overall structure of the present invention;

[0017] Figure 2 It is a three-dimensional schematic diagram of the overall structure of the present invention;

[0018] Figure 3 The present invention Figure 1 A partial enlarged view of the middle A area;

[0019] Figure 4 The present invention Figure 1 A partial enlarged view of the middle B area;

[0020] Figure 5 The present invention Figure 1 A partial enlarged view of the middle C area;

[0021] In the figure: 1. LP assembly; 2. Robot assembly; 3. Pre-alignment assembly; 4. Macro detection assembly; 5. Crystal back inspection assembly; 6. Automatic running assembly; 7. First shell; 8. Sensor; 9. First fixed plate; 10. Cover plate; 11. Feed arm; 12. Box; 13. Connecting rod; 14. Robot arm; 15. Base; 16. Mounting plate; 17. Second fixed plate; 18. First through hole; 19. Second shell; 20. Wafer table; 21. Second through hole; 22. First support arm; 23. Third shell; 24. Support table; 25. Display; 26. Microscope; 27. Fixed block; 28. Second support arm; 29. ​​Top cover; 30. Alarm light; 31. Observation window; 32. Slide rail; 33. Slider; 34. Side door. DETAILED DESCRIPTION

[0022] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0023] See also Figure 1-5The present invention provides a technical solution: a wafer inspection machine, including an LP component 1, a robot component 2, a pre-alignment component 3, a macro detection component 4, a wafer back inspection component 5, an automatic running component 6, a first shell 7, a sensor 8, a first fixing plate 9, a cover plate 10, a feeding arm 11, a box 12, a connecting rod 13, a robot arm 14, a base 15, a mounting plate 16, a second fixing plate 17, a first through hole 18, a second shell 19, a wafer support 20, a second through hole 21, a first support arm 22, a third shell 23, a support table 24, a display 25, a microscope 26, a fixing block 27, a second support arm 28, a top cover 29, an alarm light 30, an observation window 31, a slide rail 32, a slider 33 and a side door 34, the top center of the support table 24 One side is fixedly connected to the bottom of the third shell 23, the top center of the support platform 24 is fixedly connected to the bottom of the microscope 26, a display 25 is arranged on one side of the microscope 26, the bottom of the display 25 is fixedly connected to one side of the top of the support platform 24, one side of the support platform 24 is welded to one side of the box 12, the box 12 is located in the middle and upper part of one side of the support platform 24 and is hinged with the side door 34, an observation window 31 is arranged above the side door 34, the observation window 31 is hinged to the middle and upper side wall of the box 12 through a hinge, the top of the box 12 is welded to the bottom of the top cover 29, one side of the top of the top cover 29 is fixedly connected to the bottom of the alarm light 30 through bolts, a mounting plate 16 is arranged in the middle and upper part of the box 12, the mounting plate 16 is fixedly connected to the box 12, the box 12 is located on one side adjacent to the support platform 24 An LP component 1 is arranged near the top, and the LP component 1 consists of a first shell 7, a sensor 8, a first fixed plate 9, a cover plate 10 and a feeding arm 11. The bottom of the sensor 8 is fixedly connected to the top of the cover plate 10, the bottom of the cover plate 10 is fixedly connected to the top of the first shell 7, one side of the first shell 7 is fixedly connected to one side of the box 12, one side of the first shell 7 is fixedly connected to one end of the feeding arm 11, a first fixed plate 9 is arranged below the first shell 7, the first fixed plate 9 is fixedly connected to one side of the box 12, a feeding table is arranged on the top of the first fixed plate 9, a servo motor and a lead screw are arranged at the bottom of the feeding table, which is beneficial to the statistical identification of wafers, one side of the top of the mounting plate 16 is fixedly connected to the bottom of the macro detection component 4 by bolts, and the macro detection component 4 consists of a loading table, a motor and a lead screw. The bottom of the loading platform is fixedly connected to one end of the rotating shaft, and the other end of the rotating shaft is fixedly connected to the output end of the motor, which is conducive to macroscopic inspection of the wafer. A crystal back inspection component 5 is arranged on one side of the macroscopic detection component 4. The crystal back inspection component 5 is composed of a fixed block 27 and a second support arm 28. The bottom of the fixed block 27 is fixedly connected to one side of the top of the second support arm 28, and the other side of the second support arm 28 is fixedly connected to the output end of the motor. A movable plate is arranged at the bottom of the motor, and the bottom of the movable plate is fixedly connected to the output end of the hydraulic lifting and retracting rod, which is conducive to inspecting the back side of the wafer. The other side of the top of the mounting plate 16 is fixedly connected to the bottom of the pre-alignment component 3 by bolts. The pre-alignment component 3 is composed of a first through hole 18, a second shell 19, a wafer carrier 20, a second through hole 21 and a first support arm 22.The bottom of the second shell 19 is fixedly connected to the top of the mounting plate 16 by bolts, a wafer table 20 is provided on one side of the top center of the second shell 19, a plurality of second through holes 21 are provided at the top center of the wafer table 20, a plurality of first through holes 18 are provided on one side of the top center of the wafer table 20, the other side of the top center of the second shell 19 is fixedly connected to the bottom of the first support arm 22 near the corner, a sensor is provided on one side of the top center of the first support arm 22, which is beneficial to the pre-alignment of the wafer, the top of the mounting plate 16 is located on the same side of the LP component 1 and is fixedly connected to the bottom of the robot component 2, the robot component 2 is composed of a connecting rod 13, a robot arm 14, a base 15 and a second fixed plate 17, the bottom of the base 15 is fixedly connected to the top of the mounting plate 16 by bolts, and both sides of the top of the base 15 A track is provided, and a second fixed plate 17 is located above the track. A motor and a lead screw are provided on one side of the center of the base 15, and the top of the nut block on the lead screw is fixedly connected to one side of the bottom of the second fixed plate 17. A motor is provided on one side of the top of the second fixed plate 17, and the output end of the motor is fixedly connected to one side of the bottom of the robot arm 14. The other side of the bottom of the robot arm 14 is fixedly connected to one end of the connecting rod 13, and the other end of the connecting rod 13 is fixedly connected to the loading tray by bolts, which is conducive to the transportation of wafers. An automatic running assembly 6 is provided near the top center of the support table 24. The automatic running assembly 6 consists of a slide rail 32 and a slider 33. A slider 33 is provided under the microscope 26. The slider 33 is located above the slide rail 32, and both ends of the slide rail 32 are fixedly connected to the top side wall inside the support table 24. The slider 33 The bottom is connected to the top of the nut block, the nut block is spirally connected to the lead screw, and one end of the lead screw is fixedly connected to the output end of the motor, which is conducive to the automatic movement of the wafer and the careful inspection of the wafer by the microscope 26; during the use of the invention, the handling robot first transports the wafer to the first shell 7, so that the sensor 8 starts statistical recognition, and then the wafer is transported to the loading table on the manipulator assembly 2 through the feeding arm 11, and then the motor at the top of the base 15 starts to work, driving the second fixed plate 17 to move relative to the base 15. At this time, the motor at the bottom of the robot arm 14 rotates, driving the robot arm 14 to rotate, thereby sending the wafer to the wafer stage 20, and the rotation of the wafer stage 20 drives the wafer to rotate, and the center of the wafer is found through the sensor, and then the top column lifts the wafer, and the wafer stage 20 moves to The center of the wafer is then lowered to the wafer stage 20, and the wafer stage 20 rotates again to align the wafer through the sensor, and then the robot arm 14 moves the pre-aligned wafer to the loading platform of the macro detection component 4, and the motor at the bottom of the loading platform rotates, thereby driving the loading platform to rotate, and then driving the wafer to rotate for macro inspection, and then the hydraulic lifting and retracting rod at the bottom of the second support arm 28 extends, driving the second support arm 28 to rise, and then driving the wafer to rise, and then the motor on one side of the second support arm 28 rotates, driving the second support arm 28 to rotate, thereby turning the wafer 180 degrees, so as to carry out wafer back inspection, after the inspection is completed, the robot moves the wafer to the automatic running component 6, and the motor at the bottom of the slider 33 rotates, driving the screw to rotate, and then driving the nut block to move,This drives the slider 33 to move on the slide rail 32, thereby driving the automatic movement of the wafer, so that the damage of the wafer can be observed in the microscope 26, thereby completing the inspection of the wafer, which is conducive to realizing the automatic inspection of the wafer and greatly improving the work efficiency. There are very few steps that require manual participation during the inspection process, which is conducive to reducing labor costs. In addition, the various components of the wafer inspection machine can simultaneously meet the inspection of 8-inch and 12-inch wafers, which is conducive to improving the practicality of the device. There is no need to replace hardware when inspecting wafers of different sizes, which greatly saves costs.

[0024] It should be noted that, in this article, relational terms such as first and second, etc. are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Moreover, the terms "include", "comprise" or any other variants thereof are intended to cover non-exclusive inclusion, so that a process, method, article or device including a series of elements includes not only those elements, but also other elements not explicitly listed, or also includes elements inherent to such process, method, article or device.

[0025] Finally, it should be noted that the above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art can still modify the technical solutions described in the aforementioned embodiments or replace some of the technical features therein by equivalents. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present invention shall be included in the protection scope of the present invention.

Claims

1. A wafer inspection machine, comprising an LP component (1), a robot component (2), a pre-alignment component (3), a macro detection component (4), a wafer back inspection component (5), an automatic positioning component (6), a first shell (7), a sensor (8), a first fixing plate (9), a cover plate (10), a feeding arm (11), a box (12), a connecting rod (13), a robot arm (14), a base (15), a mounting plate (16), a second fixing plate (17), a first through hole (18), a second shell (19), a wafer support table (20), a second through hole (21), a first support arm (22), a third shell (23), a support table (24), a display (25), a microscope (26), a fixing block (27), a second support arm (28), a top cover (29), an alarm light (30), an observation window (31), a slide rail (32), a slider (33) and a side door (34), characterized in that: The center of the top of the support platform (24) is fixedly connected to the bottom of the third shell (23), the center of the top of the support platform (24) is fixedly connected to the bottom of the microscope (26), one side of the microscope (26) is provided with a display (25), the bottom of the display (25) is fixedly connected to the top of the support platform (24), one side of the support platform (24) is welded to one side of the box (12), the box (12) is located in the middle and upper part of one side of the support platform (24) and is hinged to the side door (34), an observation window (31) is arranged above the side door (34), the observation window (31) is hinged to the side wall of the middle and upper part of the box (12), the top of the box (12) is welded to the bottom of the top cover (29), and the top of the top cover (29) is connected to the alarm light ( 30) is fixedly connected at the bottom by bolts, a mounting plate (16) is arranged at the middle and upper part of the box body (12), the mounting plate (16) is fixedly connected to the box body (12), an LP component (1) is arranged near the top of the box body (12) on one side adjacent to the support platform (24), one side of the top of the mounting plate (16) is fixedly connected to the bottom of the macro detection component (4) by bolts, a back-of-crystal inspection component (5) is arranged on one side of the macro detection component (4), the other side of the top of the mounting plate (16) is fixedly connected to the bottom of the pre-alignment component (3) by bolts, the top of the mounting plate (16) is located on the same side of the LP component (1) and is fixedly connected to the bottom of the manipulator component (2), and an automatic running component (6) is arranged near the top center of the support platform (24); The LP component (1) is composed of a first shell (7), a sensor (8), a first fixing plate (9), a cover plate (10) and a feeding arm (11); the bottom of the sensor (8) is fixedly connected to the top of the cover plate (10); the bottom of the cover plate (10) is fixedly connected to the top of the first shell (7); one side of the first shell (7) is fixedly connected to one side of the box (12); one side of the first shell (7) is fixedly connected to one end of the feeding arm (11); a first fixing plate (9) is arranged below the first shell (7); the first fixing plate (9) is fixedly connected to one side of the box (12); a feeding table is arranged on the top of the first fixing plate (9); and a servo motor and a screw are arranged at the bottom of the feeding table; The robot assembly (2) is composed of a connecting rod (13), a robot arm (14), a base (15) and a second fixed plate (17); the bottom of the base (15) is fixedly connected to the top of the mounting plate (16) by bolts; tracks are arranged on both sides of the top of the base (15); the second fixed plate (17) is located above the tracks; a motor and a screw rod are arranged on one side of the center of the base (15); the top of the nut block on the screw rod is fixedly connected to one side of the bottom of the second fixed plate (17); a motor is arranged on one side of the top of the second fixed plate (17); the output end of the motor is fixedly connected to one side of the bottom of the robot arm (14); the other side of the bottom of the robot arm (14) is fixedly connected to one end of the connecting rod (13); and the other end of the connecting rod (13) is fixedly connected to the loading tray by bolts; The pre-alignment component (3) is composed of a first through hole (18), a second shell (19), a wafer support platform (20), a second through hole (21) and a first support arm (22); the bottom of the second shell (19) is fixedly connected to the top of the mounting plate (16) by bolts; a wafer support platform (20) is provided on one side of the top center of the second shell (19); a plurality of second through holes (21) are provided on the top center of the wafer support platform (20); a plurality of first through holes (18) are provided on one side of the top center of the wafer support platform (20); the other side of the top center of the second shell (19) is fixedly connected to the bottom of the first support arm (22) near the corner; and a sensor is provided on one side of the top center of the first support arm (22); The macro detection component (4) is composed of a loading platform, a motor and a rotating shaft, the bottom of the loading platform is fixedly connected to one end of the rotating shaft, and the other end of the rotating shaft is fixedly connected to the output end of the motor; The crystal back inspection assembly (5) is composed of a fixed block (27) and a second support arm (28), the bottom of the fixed block (27) is fixedly connected to one side of the top of the second support arm (28), the other side of the second support arm (28) is fixedly connected to the output end of the motor, a movable plate is provided at the bottom of the motor, and the bottom of the movable plate is fixedly connected to the output end of the hydraulic lifting and retracting rod; The automatic positioning assembly (6) is composed of a slide rail (32) and a slider (33). The slider (33) is arranged below the microscope (26). The slider (33) is located above the slide rail (32). Both ends of the slide rail (32) are fixedly connected to the top side wall inside the support platform (24). The bottom of the slider (33) is connected to the top of the nut block, and the nut block is spirally connected to the lead screw, and one end of the lead screw is fixedly connected to the output end of the motor.

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