An etching discharge and wafer flipping device

Abstract

The present invention discloses an etching discharging and wafer flipping device, characterized in that: the motor mounting seat is installed inside the frame, the driving motor is installed on the motor mounting seat, the driving pulley is installed on the output shaft of the driving motor, a plurality of conveying units are installed at equal intervals along the left-right direction on the top surface of the frame, and a flipping unit is installed on the front side of each conveying unit. The wafer receiving box is installed on the top surface of the frame and the wafer receiving box is located on the front side of the flipping unit. The driven pulley is installed at the right end of the transmission shaft, and the synchronous toothed belt is installed on the driven pulley and the driving pulley. The structure of the present invention is simple. By adopting a square Bernoulli suction cup, while ensuring the suction force, the volume of the suction cup is reduced. A wafer receiving device is installed. When the equipment fails, the silicon wafers flowing out of the etching equipment will not be blocked inside the equipment. The belt is wound in a special way to avoid the intermediate transmission shaft. When replacing the belt, there is no need to disassemble the transmission shaft, which greatly reduces the equipment maintenance time.

Description

Technical Field

[0001] The present invention belongs to the technical field of solar cell processing equipment, and particularly relates to an etching discharging and wafer flipping device. Background Art

[0002] In the back wet etching process of solar cell production, chemical polishing is also performed on the back of the cell. After the back contacts the conveyor belt, it will cause a certain degree of damage to the silicon wafer, resulting in defects in subsequent products. To avoid this situation, the wafer needs to be flipped so that the front side of the silicon wafer contacts the conveyor belt.

[0003] The existing wafer flipping mechanism is generally an impeller type wafer flipping mechanism. The servo motor drives the impeller to flip a certain angle until it is completely flipped by 180°. After contacting the belt, it is conveyed to the subsequent conveyor belt. This method cannot completely avoid the damage to the back of the silicon wafer. The impeller will slide relative to the back of the silicon wafer, resulting in scratches on the back of the silicon wafer. One servo motor drives 4 or 5 impellers, the mechanical structure is complex, and mechanical components such as couplings and motors are prone to failure. Once damaged, the entire device will stop running, resulting in a large loss of production capacity. Summary of the Invention

[0004] The technical problem to be solved by the present invention is to provide an etching discharging and wafer flipping device in view of the above-mentioned deficiencies of the prior art. The device has a simple structure, stable and reliable operation. It adopts a square Bernoulli suction cup, which reduces the volume of the suction cup while ensuring the suction force. It is equipped with a wafer receiving device. When the device fails, the silicon wafers flowing out of the etching device will not be blocked inside the device. It avoids the intermediate transmission shaft. When replacing the belt, there is no need to disassemble the transmission drive shaft, which greatly reduces the equipment maintenance time.

[0005] To achieve the above technical purpose, the technical solution adopted by the present invention is as follows:

[0006] An etching discharging and wafer flipping device, characterized in that it includes a frame, a conveying unit, a flipping unit, a wafer receiving box, a driven pulley, a transmission shaft, a synchronous toothed belt, a motor mounting seat, a driving pulley and a driving motor. The motor mounting seat is fixedly installed inside the frame, the driving motor is installed on the motor mounting seat, the driving pulley is fixedly installed on the output shaft of the driving motor. A plurality of conveying units are equidistantly installed along the left-right direction on the top surface of the frame, and a flipping unit is installed in front of each conveying unit. The flipping unit is installed on the top surface of the frame. The wafer receiving box is fixedly installed on the top surface of the frame and the wafer receiving box is located in front of the flipping unit. The transmission shaft is installed on the conveying unit, the driven pulley is fixedly installed at the right end of the transmission shaft, and the synchronous toothed belt is installed on the driven pulley and the driving pulley.

[0007] The above-mentioned conveying unit is composed of a base, a front support plate, a front idler wheel, a front conveyor belt, a rear conveyor belt, a rear support plate, a rear driving wheel, a bearing seat, a front driving wheel and a rear idler wheel. The base is fixedly installed on the top surface of the frame. The front driving wheel is fixedly installed on the transmission shaft and the front driving wheel is located on the front side of the base. A plurality of front idler wheels are installed on the front side surface of the base. The front conveyor belt is sequentially installed on the front idler wheels and the front driving wheel. The front support plate is fixedly installed on the front side surface of the base. The bearing seat is fixedly installed on the base and the transmission shaft is installed on the bearing seat through a bearing. The rear driving wheel is fixedly installed on the transmission shaft and the rear driving wheel is located on the rear side of the base. A plurality of rear idler wheels are installed on the rear side surface of the base. The rear conveyor belt is sequentially installed on the rear driving wheel and the rear idler wheels. The rear support plate is fixedly installed on the rear side surface of the base.

[0008] The above-mentioned flipping unit is composed of a sucker fixing arm, a square sucker, a reducer bracket, a fixing plate, a servo motor, a reducer, an induction bracket, a proximity switch and a sensor mounting bracket. The reducer bracket is fixedly installed on the fixing plate. The fixing plate is fixedly installed on the top surface of the frame. The servo motor is installed on the reducer. The reducer is installed on the reducer bracket. Both the sucker fixing arm and the induction bracket are fixedly installed on the output shaft of the reducer. The square sucker is fixedly installed on the sucker fixing arm. The sensor mounting bracket is fixedly installed on the reducer bracket. The proximity switch is fixedly installed on the sensor mounting bracket.

[0009] The left and right symmetry plane of the base in the above-mentioned conveying unit coincides with the left and right symmetry plane of the square sucker in the flipping unit.

[0010] The sucker fixing arm in the above-mentioned flipping unit is provided with an air inlet hole and an air outlet hole, and quick connectors are installed on both the air inlet hole and the air outlet hole.

[0011] The main function of the present invention is to flip the silicon wafers flowing out of the rollers of the wet etching equipment, from the back side of the silicon wafer facing down to the front side of the silicon wafer facing down, so as to avoid product defects caused by damage to the back side of the silicon wafer by the conveyor belt; it is suitable for installation between the discharging end of the wet etching equipment and the discharging conveying device; the present invention mainly consists of a wafer receiving box, a flipping unit and a conveying unit. When the silicon wafers on the rollers of the wet etching equipment flow to the designated position, the suction cup fixing arm rotates 180°, the square suction cup faces downwards, sucks up the silicon wafer, and then rotates 180° in the opposite direction, the square suction cup faces upwards, the silicon wafer contacts the conveyor belt, and then the square suction cup releases the battery, and the belt starts to convey, and conveys the silicon wafer to the belt of the discharging conveying device to complete the conveying action. The flipping unit is driven by a servo motor, and the servo motor is equipped with an AC-DC shaft reducer to ensure that the servo motor has sufficient torque; the reducer drives the suction cup fixing arm to rotate, and a square Bernoulli square suction cup is installed on the suction cup fixing arm; the multi-channel conveying track is driven by a stepping motor driving a driven pulley, and a plurality of front driving wheels and rear driving wheels are installed on the transmission shaft, the front conveyor belt is wound around the front idler pulley, and the rear conveyor belt is wound around the rear idler pulley; the front end of the flipping unit is a wafer receiving box. If the flipping unit fails, the silicon wafers will slide into the wafer receiving box and will not cause wafer stacking and blockage in the etching equipment.

[0012] The advantages of the present invention are as follows: (1) Each channel is provided with a separately driven flipping mechanism, and the failure of one flipping mechanism will not affect the normal operation of other channels; (2) The square Bernoulli suction cup is adopted, which reduces the volume of the suction cup while ensuring the suction force, and greatly reduces the required installation space; (3) A wafer receiving device is installed. When the equipment fails, the silicon wafers flowing out of the etching equipment will not be blocked in the equipment; (4) The winding method of the conveyor belt in the conveying part is specially designed to avoid the middle transmission shaft. When replacing the belt, there is no need to disassemble the transmission drive shaft, which greatly reduces the equipment maintenance time; (5) The suction cup rotating arm adopts a curved design to ensure that the suction cup can be parallel to the rollers of the etching equipment and the rear conveyor belt respectively when flipping. Brief Description of the Drawings

[0013] Figure 1 is the axonometric view of the structure of the present invention;

[0014] Figure 2 is the front view of the structure of the present invention;

[0015] Figure 3 is the top view of the structure of the present invention;

[0016] Figure 4 is the left view of the structure of the present invention;

[0017] Figure 5 is the front view of the structure of the conveying unit of the present invention;

[0018] Figure 6 is the top view of the structure of the conveying unit of the present invention;

[0019] Figure 7 is the left view of the structure of the conveying unit of the present invention;

[0020] Figure 8 is the axonometric view of the structure of the flipping unit of the present invention;

[0021] Figure 9 is the front view of the structure of the flipping unit of the present invention;

[0022] Figure 10 is the top view of the structure of the flipping unit of the present invention;

[0023] Figure 11 is the left view of the structure of the flipping unit of the present invention.

[0024] The reference numerals therein are: frame 1, conveying unit 2, base 201, front support plate 202, front idler wheel 203, front conveyor belt 204, rear conveyor belt 205, rear support plate 206, rear driving wheel 207, bearing seat 208, front driving wheel 209, rear idler wheel 210, flipping unit 3, suction cup fixing arm 301, square suction cup 302, reducer bracket 303, fixing plate 304, servo motor 305, reducer 306, induction bracket 307, proximity switch 308, sensor mounting bracket 309, slide receiving box 4, driven pulley 5, transmission shaft 6, synchronous toothed belt 7, motor mounting seat 8, driving pulley 9, driving motor 10. Detailed Embodiment

[0025] The following further describes the detailed embodiment of the present invention with reference to the accompanying drawings:

[0026] An etching discharging and flipping device, characterized in that it includes a frame 1, a conveying unit 2, a flipping unit 3, a slide receiving box 4, a driven pulley 5, a transmission shaft 6, a synchronous toothed belt 7, a motor mounting seat 8, a driving pulley 9 and a driving motor 10. The motor mounting seat 8 is fixedly installed inside the frame 1, the driving motor 10 is installed on the motor mounting seat 8, the driving pulley 9 is fixedly installed on the output shaft of the driving motor 10. A plurality of conveying units 2 are equidistantly installed along the left-right direction on the top surface of the frame 1, and a flipping unit 3 is installed on the front side of each conveying unit 2. The flipping unit 3 is installed on the top surface of the frame 1. The slide receiving box 4 is fixedly installed on the top surface of the frame 1 and the slide receiving box 4 is located in front of the flipping unit 3. The transmission shaft 6 is installed on the conveying unit 2, the driven pulley 5 is fixedly installed at the right end of the transmission shaft 6, and the synchronous toothed belt 7 is installed on the driven pulley 5 and the driving pulley 9.

[0027] In the embodiment, the conveying unit 2 is composed of a base 201, a front support plate 202, a front idler pulley 203, a front conveyor belt 204, a rear conveyor belt 205, a rear support plate 206, a rear driving wheel 207, a bearing seat 208, a front driving wheel 209 and a rear idler pulley 210. The base 201 is fixedly installed on the top surface of the frame 1. The front driving wheel 209 is fixedly installed on the transmission shaft 6 and the front driving wheel 209 is located on the front side of the base 201. A plurality of front idler pulleys 203 are installed on the front side surface of the base 201. The front conveyor belt 204 is sequentially installed on the front idler pulleys 203 and the front driving wheel 209. The front support plate 202 is fixedly installed on the front side surface of the base 201. The bearing seat 208 is fixedly installed on the base 201 and the transmission shaft 6 is installed on the bearing seat 208 through a bearing. The rear driving wheel 207 is fixedly installed on the transmission shaft 6 and the rear driving wheel 207 is located on the rear side of the base 201. A plurality of rear idler pulleys 210 are installed on the rear side surface of the base 201. The rear conveyor belt 205 is sequentially installed on the rear driving wheel 207 and the rear idler pulleys 210. The rear support plate 206 is fixedly installed on the rear side surface of the base 201.

[0028] In the embodiment, the flipping unit 3 is composed of a sucker fixing arm 301, a square sucker 302, a reducer bracket 303, a fixing plate 304, a servo motor 305, a reducer 306, a sensing bracket 307, a proximity switch 308 and a sensor mounting bracket 309. The reducer bracket 303 is fixedly installed on the fixing plate 304. The fixing plate 304 is fixedly installed on the top surface of the frame 1. The servo motor 305 is installed on the reducer 306. The reducer 306 is installed on the reducer bracket 303. Both the sucker fixing arm 301 and the sensing bracket 307 are fixedly installed on the output shaft of the reducer 306. The square sucker 302 is fixedly installed on the sucker fixing arm 301. The sensor mounting bracket 309 is fixedly installed on the reducer bracket 303. The proximity switch 308 is fixedly installed on the sensor mounting bracket 309.

[0029] In the embodiment, the left and right symmetry planes of the base 201 in the conveying unit 2 coincide with the left and right symmetry planes of the square sucker 302 in the flipping unit 3.

[0030] In the embodiment, the sucker fixing arm 301 in the flipping unit 3 is provided with an air inlet hole and an air outlet hole, and quick connectors are installed on both the air inlet hole and the air outlet hole.

[0031] The main function of the present invention is to flip the silicon wafers flowing out of the rollers of the wet etching equipment, from the back side of the silicon wafer facing down to the front side of the silicon wafer facing down, so as to avoid product defects caused by damage to the back side of the silicon wafer by the conveyor belt; it is suitable for installation between the discharging end of the wet etching equipment and the discharging conveyor device; the present invention mainly consists of a wafer receiving box 4, a flipping unit 3 and a conveying unit 2. When the silicon wafers on the rollers of the wet etching equipment flow to the designated position, the suction cup fixing arm 301 rotates 180°, the square suction cup 302 faces down, sucks up the silicon wafer, and then rotates 180° in the reverse direction, the square suction cup 302 faces up, the silicon wafer contacts the conveyor belt, and then the square suction cup 302 releases the battery, and the belt starts to convey, and conveys the silicon wafer to the belt of the discharging conveyor device to complete the conveying action. The flipping unit 3 is driven by a servo motor 305, and the servo motor 305 is equipped with an AC-DC shaft reducer 306, which can ensure that the servo motor 305 has sufficient torque; the reducer 306 drives the suction cup fixing arm 301 to rotate, and a square Bernoulli square suction cup 302 is installed on the suction cup fixing arm 301; the multi-channel conveying track is driven by a stepping motor driving a driven pulley 5, and a plurality of front driving wheels 209 and rear driving wheels 207 are installed on the transmission shaft 6, the front conveyor belt 204 is wound around the front idler pulley 203, and the rear conveyor belt 205 is wound around the rear idler pulley 210; the front end of the flipping unit 3 is a wafer receiving box 4. If the flipping unit 3 fails, the silicon wafers will slide into the wafer receiving box 4, which will not cause wafer stacking and blockage in the etching equipment.

[0032] The above is only the preferred embodiment of the present invention, and the protection scope of the present invention is not limited to the above embodiments. All technical solutions falling within the idea of the present invention belong to the protection scope of the present invention. It should be pointed out that for those of ordinary skill in the art, several improvements and refinements made without departing from the principle of the present invention should be regarded as within the protection scope of the present invention.

Claims

1. An etching discharge and wafer flipping device, characterized in that: it includes a frame (1), a conveying unit (2), a flipping unit (3), a wafer receiving box (4), a driven pulley (5), a transmission shaft (6), a synchronous toothed belt (7), a motor mounting base (8), a driving pulley (9) and a driving motor (10). The motor mounting base (8) is fixedly installed inside the frame (1), the driving motor (10) is installed on the motor mounting base (8), the driving pulley (9) is fixedly installed on the output shaft of the driving motor (10). A plurality of conveying units (2) are equidistantly installed on the top surface of the frame (1) in the left-right direction, and a flipping unit (3) is installed on the front side of each conveying unit (2). The flipping unit (3) is installed on the top surface of the frame (1). The wafer receiving box (4) is fixedly installed on the top surface of the frame (1) and the wafer receiving box (4) is located on the front side of the flipping unit (3). The transmission shaft (6) is installed on the conveying unit (2), the driven pulley (5) is fixedly installed at the right end of the transmission shaft (6), and the synchronous toothed belt (7) is installed on the driven pulley (5) and the driving pulley (9); The conveying unit (2) is composed of a base (201), a front support plate (202), a front idler pulley (203), a front conveyor belt (204), a rear conveyor belt (205), a rear support plate (206), a rear driving wheel (207), a bearing seat (208), a front driving wheel (209) and a rear idler pulley (210). The base (201) is fixedly installed on the top surface of the frame (1), the front driving wheel (209) is fixedly installed on the transmission shaft (6) and the front driving wheel (209) is located on the front side of the base (201). A plurality of front idler pulleys (203) are installed on the front side surface of the base (201), the front conveyor belt (204) is sequentially installed on the front idler pulleys (203) and the front driving wheel (209). The front support plate (202) is fixedly installed on the front side surface of the base (201), the bearing seat (208) is fixedly installed on the base (201) and the transmission shaft (6) is installed on the bearing seat (208) through a bearing. The rear driving wheel (207) is fixedly installed on the transmission shaft (6) and the rear driving wheel (207) is located on the rear side of the base (201). A plurality of rear idler pulleys (210) are installed on the rear side surface of the base (201), the rear conveyor belt (205) is sequentially installed on the rear driving wheel (207) and the rear idler pulleys (210). The rear support plate (206) is fixedly installed on the rear side surface of the base (201); The described flipping unit (3) is composed of a suction cup fixing arm (301), a square suction cup (302), a reducer bracket (303), a fixing plate (304), a servo motor (305), a reducer (306), an induction bracket (307), a proximity switch (308) and a sensor mounting bracket (309). The reducer bracket (303) is fixedly installed on the fixing plate (304), the fixing plate (304) is fixedly installed on the top surface of the frame (1), the servo motor (305) is installed on the reducer (306), the reducer (306) is installed on the reducer bracket (303), the suction cup fixing arm (301) and the induction bracket (307) are both fixedly installed on the output shaft of the reducer (306), the square suction cup (302) is fixedly installed on the suction cup fixing arm (301), the sensor mounting bracket (309) is fixedly installed on the reducer bracket (303), and the proximity switch (308) is fixedly installed on the sensor mounting bracket (309).

2. A kind of etching discharging and flipping device according to claim 1, characterized in that: The left and right symmetry planes of the base (201) in the conveying unit (2) coincide with the left and right symmetry planes of the square suction cup (302) in the flipping unit (3).

3. A kind of etching discharging and flipping device according to claim 1, characterized in that: The suction cup fixing arm (301) in the flipping unit (3) is provided with an air inlet hole and an air exhaust hole, and quick connectors are installed on both the air inlet hole and the air exhaust hole.

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