A large-range high-precision gas pressure and flow rapid adjustment device and adjustment method thereof
By adopting a combined structure of a main regulating valve and a multi-channel rapid regulating valve in the gas flow regulating device, the feedback control system is used to achieve high-precision and rapid regulation of flow and pressure, which solves the problem that the existing technology is difficult to meet the working conditions of high pressure and large flow range. It solves the problem of rapid adjustment of high-precision gas flow, achieving an efficient calibration process and cost savings.
Patent Information
- Application Number
- CN202010931020.6
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- Filing Date
- 2020-09-07
- Publication Date
- 2025-01-24
- Estimated Expiration
- 2040-09-07
AI Technical Summary
The existing technology is difficult to meet the needs of high pressure, large flow range working conditions, and high-precision gas flow rapid regulation. Especially in the aerospace industry, the flow flow and pressure variation range are wide, and there are simple independent valves. It is difficult for a flow control device to meet these needs at the same time.
A large-range, high-precision gas pressure and flow rapid adjustment device is used, including a main regulating valve and a feedback control system. The main regulating valve is installed on the main pipeline, and a linear throttle valve is used to achieve large flow regulation; a multi-channel rapid regulating valve is installed on the secondary pipeline. On the pipeline, throttling nozzles and quick valves are used to achieve small flow and high-precision adjustment, and the feedback control system is used to adjust the opening of each valve to achieve high-precision and rapid adjustment of flow and pressure throughout the process.
It achieves rapid adjustment of high-precision gas flow under high pressure and large flow range conditions, shortens the gas source consumption in the flow calibration process, saves calibration costs, and improves work efficiency.
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Figure CN112000160B_ABST
Abstract
Description
Technical field:
[0001] The invention belongs to the technical field of gas flow regulation, and in particular relates to a large-range high-precision gas pressure and flow rapid regulation device and a regulation method thereof. Background technology:
[0002] Precise control of gas flow is widely demanded in the fields of petroleum, natural gas, chemical industry, energy conservation, environmental protection, aerospace, etc. There are various forms of valves that can realize gas flow control and meet the general needs of industrial sites. However, in the field of flow measurement and calibration, the working conditions of the calibrated flow device are wide, especially the calibrated flow devices in the aerospace industry, whose flow rates are getting larger and larger, ranging from a few grams per second to several kilograms per second; the working pressure varies in a wide range, from negative pressure to positive pressure, resulting in many pressure change conditions. Therefore, the need for calibration of flow and pressure combined working conditions is proposed. In order to meet such calibration needs, a large-range high-precision gas pressure and flow rapid adjustment system suitable for the field of flow measurement is required to provide the required flow and pressure for the flow calibration device to match the objective situation that the flow and pressure working conditions of the calibrated flow device have a wide range of changes. One difficulty of this system is that the flow needs to be accurately controlled within the entire range, and the flow regulation resolution can be as small as 0.5g / s; another difficulty is how to make the calibrated flow device within such a large range of flow and pressure working range, and ensure that the system can quickly adjust the flow and pressure, which also means that a large amount of high-pressure gas source can be saved, the calibration work efficiency can be improved, and the objective economic cost can be saved. However, the current simple independent valve type flow control device is difficult to simultaneously meet the needs of such high pressure, large flow range working conditions, and high-precision gas flow rapid regulation. For example: the invention name is a fluid flow regulating valve and the invention name is a flow regulating valve, which publishes the same type of regulating valve, and both can achieve stable high-precision flow regulation, but are limited in flow regulation range and control speed. Therefore, the present invention proposes a high-precision gas flow rapid control device suitable for high pressure, large flow range working conditions, which plays an important role in some special pressure and flow control requirements. Summary of the invention:
[0003] In order to solve the defects of existing flow control devices that are difficult to meet high pressure, large flow range working conditions, high-precision gas flow, and rapid adjustment, the present invention provides a large-range high-precision gas pressure and flow rapid adjustment device and an adjustment method thereof. By setting different adjustment pipelines, the gas source consumption of the entire flow calibration process is shortened, thereby saving calibration costs and improving work efficiency.
[0004] The technical solution adopted by the present invention is: a large-range high-precision gas pressure and flow rapid regulating device, comprising: a main regulating valve, installed in the main pipeline, used to adjust the flow of high-pressure airflow as needed; a feedback control system, used to control the opening of the main regulating valve according to the flow target or pressure target of the high-pressure airflow in the main pipeline, and also includes a multi-channel rapid regulating valve arranged in parallel with the main regulating valve, the multi-channel rapid regulating valve is installed in a secondary pipeline parallel to the main pipeline, and is used to adjust the flow of high-pressure airflow; the multi-channel rapid regulating valve includes a plurality of throttling nozzles arranged in parallel and a rapid valve respectively connected in series with each throttling nozzle, and the feedback control system is used to control the opening and closing of each rapid valve.
[0005] Preferably, the nozzle size of each throttling nozzle is different, and the nozzle throat areas of different throttling nozzles are set in a multiple relationship, and the minimum throat area of the throttling nozzle is set according to the need of adjustment accuracy.
[0006] Preferably, the main regulating valve is a linear throttle valve, which includes a linear throttle head and a driving device for driving the linear throttle head to move, and the feedback control system realizes the adjustment of the throttling area of the pipeline by the linear throttle head by controlling the driving device.
[0007] Preferably, the feedback control system includes a controller, an operator, a first sensor and a second sensor. The first sensor is used to collect the total pressure value P01 and the total temperature value T01 of the high-pressure airflow at the inlet of the device, and feed them back to the operator; the second sensor is used to collect the total pressure value P02 and the gas mass flow rate m3 of the high-pressure airflow at the outlet of the device after the main pipeline and the secondary pipeline are adjusted and mixed, and feed them back to the operator. The controller controls the opening of the main regulating valve and the opening and closing of the multi-channel fast regulating valve according to the feedback data from the operator.
[0008] According to the adjustment method of the large-range high-precision gas pressure and flow rapid adjustment device, the specific adjustment steps are as follows:
[0009] Step 1, flow regulation: the required flow target m includes adjusting the main regulating valve in the main pipeline to achieve a large-range flow target m1 and adjusting the multi-channel fast regulating valve in the secondary pipeline to achieve a small-range flow target m2;
[0010] Step 2, pressure regulation: the total pressure of the mixed airflow after the main pipeline and the secondary pipeline are adjusted to P02, and the main regulating valve on the main pipeline and the fast valve on the secondary pipeline are adjusted according to the target pressure P0 to achieve accurate pressure regulation.
[0011] Preferably, in step 1, m1=k*m, where k is in the range of 0.8 to 0.9, and the throttling area formed by the linear throttle valve is calculated based on the flow target m1 of the main pipeline, the total pressure value P01 and the total temperature value T01 of the high-pressure airflow at the inlet of the device. According to the linear change formula of the throttling area and opening of the linear throttle valve A=C*L, where C is the linear change coefficient, the opening of the linear throttle valve is determined by reverse calculation, that is, L=A / C, and then the feedback control system controls the driving device to achieve the required opening, thereby obtaining a flow value greater than or less than the flow target m1.
[0012] Preferably, in step 1, m2=m-m1, and the throttling area formed by the secondary pipeline is calculated according to the flow target m2, the total pressure value P01 and the total temperature value T01 of the high-pressure airflow at the inlet of the device. According to the throttling area A2 of the secondary pipeline and the throat area of each throttling nozzle, the number n of the adapted throttling nozzles and the nozzle throat area of the throttling nozzle that needs to be opened are calculated, so that the nozzle throat area of each adapted throttling nozzle is Thus, a flow value greater than or less than the flow target m2 is obtained. Then, the feedback control system adjusts the throttling nozzle in the multi-channel fast regulating valve multiple times according to the gas mass flow m3 obtained at the outlet of the second sensor acquisition device, so that the adapted throttling nozzle is opened and the unnecessary throttling nozzle is closed, thereby achieving the desired flow target m.
[0013] Preferably, in step 2, the feedback control system adjusts the throttling nozzle in the multi-channel quick regulating valve multiple times according to the total pressure P02 obtained at the outlet of the second sensor acquisition device, so that the adapted throttling nozzle is opened and the unnecessary throttling nozzle is closed, thereby achieving the desired pressure target P0.
[0014] Preferably, the specific steps of the feedback control system for multiple adjustments to the throttling nozzle are that the operator compares the value collected by the second sensor with the required target value. If the collected value is greater than the target value, the operator closes the corresponding number of throttling nozzles through the controller to reduce the flow rate; if the collected value is less than the target value, the operator quickly opens the corresponding number of throttling nozzles through the controller to increase the flow rate, thereby achieving precise adjustment.
[0015] The beneficial effects of the present invention are:
[0016] 1. The present invention adopts a multi-channel parallel form, and installs a linear throttle valve in the main pipeline. The larger the size of the linear throttle valve, the higher the airflow pressure and the larger the flow range, so that the main pipeline can achieve rapid adjustment of a large flow range; at the same time, the multi-channel rapid adjustment valve is installed on the secondary pipeline in parallel with the main pipeline, and the throttling nozzle is used to achieve small flow, fast and high-precision pressure and flow stable adjustment. The combination of the main pipeline and the secondary pipeline realizes high-precision and rapid adjustment of the flow and pressure in the whole process. This structure is conducive to shortening the gas source consumption of the entire flow calibration process, saving calibration costs, and improving work efficiency.
[0017] 2. When the present invention performs high-precision and rapid regulation of large flow rates, the feedback control system pre-calculates a large range of throttling areas, and uses a linear throttling valve for rapid regulation to achieve 80-90% of the flow target, while the remaining small flow is rapidly and accurately controlled by a multi-channel rapid regulating valve on the secondary pipeline, so that the final output gas flow meets the target flow value. The entire regulation process takes less time and has high regulation accuracy. Description of the drawings:
[0018] Figure 1 It is a structural schematic diagram of the present invention;
[0019] Figure 2 for Figure 1 A in the enlarged view;
[0020] Among them: 1 high-pressure airflow, 2 device inlet, 3 main pipeline, 4 main regulating valve, 5 linear throttling head, 6 driving device, 7 feedback control system, 8 controller, 9 operator, 10 first sensor, 11 second sensor, 12 secondary pipeline, 13 multi-channel fast regulating valve, 14 branch pipeline, 15 throttling nozzle, 16 fast valve, 17 device outlet, 18 regulated airflow. Specific implementation method:
[0021] Example 1
[0022] like Figure 1 and Figure 2 As shown, the present invention is a large-range, high-precision gas pressure and flow rapid regulating device. The high-pressure airflow in the main pipeline 3 enters from the device inlet 2 of the regulating device, and the regulated airflow 18 flows out from the device outlet 17.
[0023] The regulating device includes a main regulating valve 4, a feedback control system 7 and a multi-channel fast regulating valve 13. The main regulating valve 4 is installed on the main pipeline 3 to achieve large flow regulation of high-pressure airflow. The main regulating valve 4 adopts a linear throttle valve, which includes a linear throttle head 5 and a driving device 6. The driving device 6 can drive the linear throttle head 5 to move forward and backward to change the flow area of the pipeline. The larger the size of the linear throttle valve, the higher the airflow pressure and the larger the flow range, thereby realizing a large range of flow regulation of the main pipeline 3, and the regulation of the pressure of the regulated airflow 18 is ultimately achieved through conversion through the regulation of the flow.
[0024] The multi-channel fast regulating valve 13 is arranged in parallel with the main regulating valve 4, and the multi-channel fast regulating valve 13 is installed on the secondary pipeline 12 arranged in parallel with the main pipeline 3, so as to realize small flow, fast and high-precision regulation of the high-pressure airflow in the secondary pipeline 12.
[0025] The multi-channel quick regulating valve 13 includes a plurality of throttling nozzles 15 arranged in parallel and a quick valve 16 connected in series with each throttling nozzle 15. Each throttling nozzle 15 is connected to the secondary pipeline 12 through a branch pipeline 14. By controlling the quick valve 16, the branch pipeline 14 can be quickly opened or closed, which plays a role in rapid flow regulation and throttling area change. The adjustment time of the quick valve 16 can reach milliseconds. The nozzle sizes of the throttling nozzles 15 arranged side by side in different channels are different, and the nozzle throat areas between different throttling nozzles 15 are set in multiples, which can be increased or decreased in multiples, wherein the throat area of the smallest nozzle determines the minimum flow resolution of the secondary pipeline 12. The specific number of branch pipelines 14 arranged side by side in the multi-channel quick regulating valve 13 can be specifically designed according to the flow ratio of the entire range and the required small flow.
[0026] The increment of the flow control of the secondary pipeline 12 is determined by the required number of throttling nozzles 15 and the nozzle throat area of the smallest throttling nozzle 15, and the control accuracy is determined by the flow rate of the smallest throttling nozzle 15. Since the flow capacity of the multi-channel fast regulating valve 13 is limited, it is mainly used to improve accuracy and fast regulation, and plays a role in fine-tuning and supplementing large flow regulation. It can also be used alone to regulate small flow.
[0027] The feedback control system 7 determines the opening of the linear throttle valve in the main pipeline 3 according to the required flow or pressure, and determines the number of throttling nozzles 15 that need to be opened and the throat area of the adapted throttling nozzles 15 according to the requirements of flow accuracy, so that the multi-channel fast regulating valve 13 in the secondary pipeline 12 can achieve small flow, fast, and high-precision regulation, thereby achieving stable control of the outlet flow and pressure of the regulating device.
[0028] The feedback control system 7 includes a controller 8, an operator 9, a first sensor 10 and a second sensor 11. The controller 8 is connected to the operator 9, the first sensor 10 is connected to the inlet 2 of the collection device, the second sensor 11 is connected to the outlet 17 of the device, the first sensor 10 and the second sensor 11 are also connected to the operator 9, and the controller 8 is also connected to the drive device 6 and the quick valve 16; the first sensor is used to collect the total pressure value P01 and the total temperature value T01 of the high-pressure airflow at the inlet 2 of the device, and feed them back to the operator; the second sensor 11 includes a pressure sensor and a gas mass flowmeter, which are respectively used to collect the total pressure value P02 and the gas mass flow m3 of the high-pressure airflow after the main pipeline and the secondary pipeline are adjusted and mixed, and feed them back to the operator. The controller 8 controls the driving device 6 in the main regulating valve 4 according to the data fed back by the operator 9, so as to realize the adjustment opening of the linear throttling head 5 on the flow area of the pipeline. The actuation speed of the driving device 6 can ensure the actuation accuracy within 0.1mm and the actuation speed of 1-2m / s. At the same time, by opening or closing the fast valve 16 in each branch pipeline 14 of the multi-channel fast regulating valve 13, the throttling area of the secondary pipeline 12 can be quickly adjusted in milliseconds. The pressure adjustment is finally realized by conversion through the flow adjustment.
[0029] Example 2
[0030] Example 2 is a regulating method for the regulating device described in Example 1. The regulating method of this embodiment is mainly for regulating the flow rate. The specific regulating steps are as follows:
[0031] Step 1. The required flow target m includes adjusting the main regulating valve 4 in the main pipeline 3 to achieve a large-range flow target m1 and adjusting the multi-channel fast regulating valve 13 in the secondary pipeline 12 to achieve a fast, accurate, small-range flow target m2. 80% to 90% of the flow target m is the flow target m1, and the flow target m1 is achieved by adjusting the main regulating valve 4. m1 = k*m, where the value range of k is 0.8 to 0.9. According to the flow target m1 of the main pipeline 3, the total pressure value P01 and the total temperature value T01 of the high-pressure airflow at the device inlet 2, the throttling area formed by the linear throttle valve is calculated. According to the linear change formula of the throttling area and opening of the linear throttle valve A=C*L, where C is the linear change coefficient, the opening of the linear throttle valve is determined by reverse calculation, that is, L=A / C, and then the feedback control system 7 controls the drive device 6 to achieve the required opening, thereby obtaining a flow value close to the flow target m1.
[0032] Step 2: The remaining 10% to 20% of the flow target m in step 1 is the flow target m2, that is, m2 = m-m1. The flow target m2 is achieved by adjusting the secondary pipeline 12. The throttling area formed by the secondary pipeline 12 is calculated based on the flow target m2, the total pressure value P01 and the total temperature value T01 of the high-pressure airflow at the inlet 2 of the device. According to the throttling area A2 of the secondary pipeline 12 and the throat area of each throttling nozzle 15, the number n of the adapted throttling nozzles 15 and the nozzle throat area of the throttling nozzle 15 that needs to be opened are calculated, so that the nozzle throat area of each adapted throttling nozzle 15 is Thereby obtaining a flow value close to the flow target m2.
[0033] Step 3, the operator 9 of the feedback control system 7 compares the gas mass flow m3 collected by the second sensor 11 at the device outlet 17 with the required flow target m, and only adjusts the multi-channel fast regulating valve 13 according to the comparison result, but does not adjust the opening of the main regulating valve 4. The specific adjustment process is:
[0034] When the collected gas mass flow m3 is greater than the flow target m, the operator 9 quickly closes an adapted number of throttling nozzles 15 through the controller 8, thereby achieving the purpose of quickly and accurately reducing the flow rate; when the collected gas mass flow m3 is less than the flow target m, the operator 9 quickly opens an adapted number of throttling nozzles 15 through the controller 8, thereby achieving the purpose of quickly and accurately increasing the flow rate, through multiple adjustments until the gas mass flow m3 reaches the required flow target m.
[0035] Example 3
[0036] Example 3 is a regulating method for the regulating device described in Example 1. The regulating method of this embodiment is mainly for regulating pressure. The specific regulating steps are as follows:
[0037] The high-pressure airflow at the device inlet 2 is the total pressure value P01, and the high-pressure airflow at the device outlet 17 is the total pressure P02, that is, the total pressure of the airflow after the main pipeline 3 flows through the linear throttle valve and the secondary pipeline 12 flows through the multi-channel quick regulating valve 13. When the total pressure ratio σ=P02 / P01<0.77 (i.e., the existing parameters that need to be met when the linear throttling head is in the throttling state), the high-pressure airflow in the main pipeline 3 can reach the throttling state by flowing through the main regulating valve 4 and the multi-channel rapid regulating valve 13. The operator 9 of the feedback control system 7 compares the total pressure P02 collected by the second sensor 11 at the device outlet 17 with the required pressure target P0. When the total pressure P02 is greater than the pressure target P0, the operator 9 quickly closes the adapted number of throttling nozzles 15 through the controller 8 to achieve the purpose of quickly and accurately reducing the flow rate; when the total pressure P02 is less than the pressure target P0, the operator 9 quickly opens the adapted number of throttling nozzles 15 through the controller 8 to achieve the purpose of quickly and accurately increasing the flow rate, and adjusts multiple times until the high-pressure airflow at the device outlet 17 is the total pressure P02 and reaches the required pressure target P0.
[0038] The above are only preferred specific embodiments of the present invention, which are all different implementations based on the overall concept of the present invention, and the protection scope of the present invention is not limited thereto. Any changes or substitutions that can be easily thought of by a person skilled in the art within the technical scope disclosed by the present invention should be included in the protection scope of the present invention. Therefore, the protection scope of the present invention should be based on the protection scope of the claims.
Claims
1. A method for regulating a large-range high-precision gas pressure and flow rate fast regulating device, the method being implemented based on a large-range high-precision gas pressure and flow rate fast regulating device, the device comprising a main regulating valve (4) installed on a main pipe (3) for regulating the flow rate of a high-pressure gas flow as required; The feedback control system (7) is used to control the opening of the main regulating valve (4) according to the flow target or pressure target of the high-pressure air flow in the main pipeline (3). It also includes a multi-channel fast regulating valve (13) arranged in parallel with the main regulating valve (4), The multi-channel fast regulating valve (13) is installed on a secondary pipeline (12) connected in parallel with the main pipeline (3) and is used to adjust the flow rate of the high-pressure airflow; the multi-channel fast regulating valve (13) includes a plurality of throttling nozzles (15) arranged in parallel and a fast valve (16) connected in series with each throttling nozzle (15), and the feedback control system (7) is used to control the opening and closing of each fast valve (16); the main regulating valve (4) is a linear throttling valve, which includes a linear throttling head (5) and a driving mechanism for driving the linear throttling head (5) to move The feedback control system (7) controls the driving device (6) to adjust the throttling area of the pipeline by the linear throttling head (5); the actuation speed of the driving device (6) ensures an actuation accuracy of less than 0.1 mm and an actuation speed of 1-2 m / s, and at the same time, by opening or closing the fast valve (16) in each branch pipeline (14) of the multi-channel fast regulating valve (13), the throttling area of the sub-pipeline (12) is quickly adjusted in milliseconds, and the pressure adjustment is finally achieved by conversion through the adjustment of the flow rate; It is characterized in that The specific adjustment steps are as follows: Step 1, flow regulation: the required flow target m includes adjusting the main regulating valve (4) in the main pipeline (3) to achieve a large-range flow target m1 and adjusting the multi-channel fast regulating valve (13) in the secondary pipeline (12) to achieve a small-range flow target m2; Step 2, pressure regulation: the main pipeline (3) and the secondary pipeline (12) regulate the total pressure of the mixed airflow to P02, and the main regulating valve (4) on the main pipeline (3) and the fast valve (16) on the secondary pipeline (12) are respectively regulated according to the target pressure P0 to achieve accurate pressure regulation; Step 3: The operator (9) of the feedback control system (7) compares the gas mass flow m3 collected by the second sensor (11) at the device outlet (17) with the required flow target m, and adjusts only the multi-channel fast regulating valve (13) according to the comparison result, but does not adjust the opening of the main regulating valve (4). The specific adjustment process is as follows: When the collected gas mass flow rate m3 is greater than the flow rate target m, the operator (9) quickly closes the adapted number of throttling nozzles (15) through the controller (8), thereby achieving the purpose of quickly and accurately reducing the flow rate; when the collected gas mass flow rate m3 is less than the flow rate target m, the operator (9) quickly opens the adapted number of throttling nozzles (15) through the controller (8), thereby achieving the purpose of quickly and accurately increasing the flow rate, and the gas mass flow rate m3 is adjusted multiple times until it reaches the required flow rate target m; In step 1, m1=k*m, where k is in the range of 0.8 to 0.
9. The throttling area formed by the linear throttling valve is calculated based on the flow target m1 of the main pipeline (3), the total pressure value P01 and the total temperature value T01 of the high-pressure airflow at the device inlet (2). According to the linear change formula of the throttling area and the opening of the linear throttle valve, A=C*L, where C is the linear change coefficient, A is the throttling area, and L is the throttle valve opening, the opening of the linear throttle valve is determined by reverse calculation, that is, L=A / C, and then the feedback control system (7) controls the driving device (6) to achieve the required opening, thereby obtaining a flow value greater than or less than the flow target m1; In step 1, m2=m-m1, and the throttling area formed by the secondary pipeline (12) is calculated based on the flow target m2, the total pressure value P01 and the total temperature value T01 of the high-pressure airflow at the device inlet (2). , according to the throttling area A2 of the secondary pipeline (12) and the throat area of each throttling nozzle (15), the number n of the adapted throttling nozzles (15) and the nozzle throat area of the throttling nozzle (15) to be opened are calculated, so that the nozzle throat area of each adapted throttling nozzle (15) is , thereby obtaining a flow value greater than or less than the flow target m2, and then the feedback control system (7) adjusts the throttling nozzle (15) in the multi-channel fast regulating valve (13) multiple times according to the gas mass flow m3 obtained at the outlet (17) of the second sensor (11) acquisition device, so that the adapted throttling nozzle (15) is opened and the unnecessary throttling nozzle (15) is closed, thereby achieving the desired flow target m.
2. The method for adjusting a large-range high-precision gas pressure and flow rate rapid adjustment device as claimed in claim 1, characterized in that: The nozzle size of each throttling nozzle (15) is different, and the nozzle throat areas of different throttling nozzles (15) are set in a multiple relationship, and the minimum throat area of the throttling nozzle (15) is set according to the need for adjustment accuracy.
3. The method for adjusting a large-range high-precision gas pressure and flow rate rapid adjustment device as claimed in claim 2, characterized in that: The feedback control system (7) comprises a controller (8), an operator (9), a first sensor (10) and a second sensor (11). The first sensor (10) is used to collect a total pressure value P01 and a total temperature value T01 of the high-pressure airflow at the device inlet (2), and feeds the values back to the operator (9). The second sensor (11) is used to collect a total pressure value P02 and a gas mass flow rate m3 of the high-pressure airflow at the device outlet (17) after the main pipeline (3) and the secondary pipeline (12) are adjusted and mixed, and feeds the values back to the operator (9). The controller (8) controls the opening of the main regulating valve (4) and the opening and closing of the multi-channel fast regulating valve (13) according to the data fed back by the operator (9).
4. The method for adjusting a large-range high-precision gas pressure and flow rate rapid adjustment device as claimed in claim 1, characterized in that: In the step 2, the feedback control system (7) adjusts the throttling nozzle (15) in the multi-channel fast regulating valve (13) multiple times according to the total pressure P02 obtained at the outlet (17) of the second sensor (11) acquisition device, so that the adapted throttling nozzle (15) is opened and the unnecessary throttling nozzle (15) is closed, thereby achieving the desired pressure target P0.
5. The method for adjusting a large-range, high-precision gas pressure and flow rate rapid adjustment device according to claim 1, characterized in that: The feedback control system (7) performs multiple adjustments on the throttling nozzles (15) in the following specific steps: the operator (9) compares the value collected by the second sensor (11) with the required target value; if the collected value is greater than the target value, the operator (9) closes the corresponding number of throttling nozzles (15) through the controller (8) to reduce the flow rate; If the collected value is less than the target value, the operator (9) quickly opens a corresponding number of throttling nozzles (15) through the controller (8) to increase the flow rate, thereby achieving precise regulation.
Citation Information
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