A silicon rod blanking manipulator and a blanking device

Abstract

The present invention discloses a silicon rod blanking manipulator and a blanking device, including a hook for hooking the end of the silicon rod to be blanked, a rotary drive assembly for adjusting the position of the hook, and a walking drive assembly for moving the silicon rod. The hook is fixed to the output end of the rotary drive assembly, and the rotary drive assembly is fixed to the walking drive assembly. By setting the hook to simulate a human hand hooking the end of the cut silicon rod, and then driving the hook to move in the blanking direction through the walking drive assembly, thereby driving the silicon rod to move in the blanking direction. When there is no need for hooking or during the movement towards the end of the silicon material, the hook is retracted through the rotational movement of the rotary drive assembly to avoid collision between the hook and the silicon rod.

Description

Technical Field

[0001] The present invention belongs to the technical field of silicon rod truncating equipment, and particularly relates to a manipulator for feeding silicon rods and a feeding device. Background Art

[0002] At present, the feeding methods of single crystal silicon rod single-line truncating machines are suction cup type and clamping jaw type. However, both the suction cup type and the clamping jaw type are affected by the surface roughness of the silicon rod, are prone to falling off, and are prone to slipping due to the spraying of cutting fluid during the cutting process. Manual pushing is time-consuming and laborious, which is not conducive to improving production efficiency.

[0003] Therefore, the existing technology still needs to be further developed and improved. Summary of the Invention

[0004] In view of various deficiencies of the prior art, in order to solve the above problems, a manipulator for feeding silicon rods and a feeding device are now proposed. The present invention provides the following technical solutions:

[0005] A manipulator for feeding silicon rods includes a hook for hooking the end of the silicon rod to be fed, a rotary drive assembly for adjusting the position of the hook, and a walking drive assembly for moving the silicon rod. The hook is fixed to the output end of the rotary drive assembly, and the rotary drive assembly is fixed to the walking drive assembly.

[0006] Further, the rotary drive assembly includes a rotary box and a rotary motor fixed inside the rotary box. One end of an extension rod is fixedly connected to the output shaft of the rotary motor, and the other end of the extension rod is fixedly connected to the hook.

[0007] Further, a first synchronous pulley is provided at the end of the extension rod, a second synchronous pulley is provided on the output shaft of the rotary motor, and the first synchronous pulley and the second synchronous pulley are connected by a synchronous belt.

[0008] Further, the walking drive assembly includes a bracket and a lead screw assembly horizontally fixed on the bracket. The lead screw assembly includes a lead screw, a nut seat sleeved on the lead screw, and a servo motor for driving the lead screw to rotate. A moving table for moving back and forth on the lead screw is fixed on the nut seat, and the rotary drive assembly is fixedly connected to the side of the moving table.

[0009] Further, the walking drive assembly further includes a sliding limit assembly. The sliding limit assembly includes a guide rail parallel to the lead screw and a slider slidably connected to the guide rail. The slider is fixed to the bottom of the moving table.

[0010] Further, an optical eye for detecting the distance of the silicon rod and an optical eye bracket for fixing the optical eye are also provided on the rotating box. The free end of the optical eye bracket is fixed with the optical eye, and the other end is fixed on the output shaft of the rotating motor. The optical eye bracket is disposed opposite to the hook in the opposite direction.

[0011] Further, a wafer taking auxiliary rod for assisting in the blanking of thin silicon wafers is also provided on the hook. One side of the wafer taking auxiliary rod is fixedly connected to the fixed end of the hook.

[0012] A silicon rod blanking device includes a base frame, a bracket for supporting the silicon rod, a lifting assembly for lifting the bracket, and a blanking manipulator for conveying the cut silicon rod. The lifting assembly is fixed on the base frame. The lifting end of the lifting assembly is fixedly connected to the bottom of the bracket. The blanking manipulator is fixed on one side of the base frame along the conveying direction.

[0013] Further, the lifting assembly includes a screw lift for lifting the bracket and a speed reducer for driving the screw lift to move. The output shaft of the speed reducer is in transmission connection with the screw lift. The screw lift is fixedly connected to the bottom of the bracket. The speed reducer is fixed on the base frame.

[0014] Further, the bracket is located at the symmetry axis of the base frame along the conveying direction. A conveying roller assembly arranged along the conveying direction is provided on the bracket. The conveying roller assembly includes two rows of conveying rollers arranged towards the axis direction of the silicon rod.

[0015] Beneficial effects:

[0016] In this application, a hook is set to simulate a human hand to hook the end of the cut silicon rod. Then, the hook is driven by the walking drive assembly to move in the blanking direction, thereby driving the silicon rod to move in the blanking direction. When there is no need to hook the material or during the movement towards the end of the silicon material, the hook is retracted through the rotational movement of the rotational drive assembly to avoid collision between the hook and the silicon rod, realizing the automatic and rapid blanking of the cut silicon rod. Description of the drawings

[0017] Figure 1 is a schematic structural diagram of a silicon rod blanking manipulator in a specific embodiment of the present invention;

[0018] Figure 2 is a schematic structural diagram of the blanking state of a silicon rod blanking manipulator in a specific embodiment of the present invention;

[0019] Figure 3 is a schematic structural diagram of the optical eye detection state of a silicon rod blanking manipulator in a specific embodiment of the present invention;

[0020] Figure 4It is a schematic structural diagram of the feeding state of a silicon rod feeding device in a specific embodiment of the present invention;

[0021] In the drawings: 1, hook; 2, rotating box; 3, rotating motor; 4, extension rod; 5, synchronous belt; 6, bracket; 7, lead screw assembly; 8, moving table; 9, sliding limit assembly; 10, light eye bracket; 11, auxiliary sheet-taking rod; 12, base frame; 13, bracket; 14, lifting assembly; 15, silicon rod. Specific embodiments

[0022] In order to enable those skilled in the art to better understand the technical solutions of the present invention, the technical solutions of the present invention will be clearly and completely described below in conjunction with the drawings of the present invention. Based on the embodiments in this application, other similar embodiments obtained by those of ordinary skill in the art without creative efforts shall all fall within the scope of protection of this application. In addition, the directional terms mentioned in the following embodiments, such as "up", "down", "left", "right", etc., are only references to the directions in the drawings. Therefore, the directional terms used are for illustration rather than limitation of the present invention.

[0023] Embodiment 1

[0024] As Figures 1-3 shown, a silicon rod feeding manipulator includes a hook 1 for hooking the end of the silicon rod 15 to be fed, a rotary drive assembly for adjusting the position of the hook 1, and a walking drive assembly for moving the silicon rod 15. The hook 1 is fixed to the output end of the rotary drive assembly, and the rotary drive assembly is fixed to the walking drive assembly. By setting the hook 1 to simulate a human hand hooking the end of the cut silicon rod 15, and then driving the hook 1 to move in the feeding direction through the walking drive assembly, thereby driving the silicon rod 15 to move in the feeding direction. When there is no need to hook the material or during the movement towards the end of the silicon material, the hook 1 is retracted through the rotational movement of the rotary drive assembly to avoid collision between the hook 1 and the silicon rod 15. Preferably, a hook cushion is arranged inside the hook 1, which is convenient for the hook 1 to firmly grasp the end of the silicon rod 15, avoiding the occurrence of slipping phenomenon, and at the same time playing a protective role for the edge of the silicon rod 15, avoiding the occurrence of edge chipping during the hooking process of the cut silicon rod 15, which affects the production quality of the truncated silicon rod 15.

[0025] Furthermore, the rotary drive assembly includes a rotating box 2 and a rotating motor 3 fixed inside the rotating box 2. One end of an extension rod 4 is fixedly connected to the output shaft of the rotating motor 3, and the other end of the extension rod 4 is fixedly connected to the hook 1. The rotating box 2 is used to fix and protect the rotating motor 3. The extension rod 4 keeps a certain distance between the hook 1 and the rotating box 2, and the extension rod 4 can extend the farthest end of the movement of the walking drive mechanism, so that the hook 1 can move to the cutting position of the cutting machine and directly hook the end of the cut silicon rod 15 through rotational movement.

[0026] Furthermore, a first synchronous pulley is provided at the end of the extension rod 4, and a second synchronous pulley is provided on the output shaft of the rotary motor 3. The first synchronous pulley and the second synchronous pulley are drivingly connected by a synchronous belt 5. By providing the synchronous belt 5 and the synchronous pulleys, the rotational displacement of the rotary motor 3 is transmitted to the synchronous pulleys, and thus to the extension rod 4 connected to the synchronous pulleys, and further to the hook 1 connected to the extension rod 4.

[0027] Furthermore, the traveling drive assembly includes a bracket 6 and a lead screw assembly 7 horizontally fixed to the bracket 6. The lead screw assembly 7 includes a lead screw, a nut seat sleeved on the lead screw, and a servo motor for driving the lead screw to rotate. A moving table 8 for moving back and forth on the lead screw is fixed to the nut seat, and a rotary drive assembly is fixedly connected to the side of the moving table 8. The lead screw assembly 7 drives the moving table 8 to move back and forth along the direction of the lead screw, and the moving distance of the moving table 8 can be accurately controlled by the lead screw assembly 7. The side of the rotary box 2 in the rotary drive assembly is fixedly connected to the side of the moving table 8, so as to ensure that the rotary box 2 moves back and forth along the direction of the lead screw along with the moving table 8.

[0028] Furthermore, the traveling drive assembly further includes a sliding limit assembly 9. The sliding limit assembly 9 includes a guide rail arranged parallel to the lead screw and a slider slidably connected to the guide rail. The slider is fixed to the bottom of the moving table 8. By providing the sliding limit assembly 9, the lead screw assembly 7 is assisted to jointly limit the moving table 8 and the rotary box 2 fixed to the side of the moving table 8 to keep horizontal and not rotate back and forth.

[0029] Furthermore, an optical eye for detecting the distance of the silicon rod 15 and an optical eye bracket 10 for fixing the optical eye are further provided on the rotary box 2. The free end of the optical eye bracket 10 is fixed with an optical eye, and the other end is fixed to the output shaft of the rotary motor 3. The optical eye bracket 10 and the hook 1 are arranged opposite to each other in the opposite direction. Further, the optical eye bracket 10 is fixedly connected to the first synchronous pulley. The displacement of the output shaft of the rotary motor 3 is transmitted to the first synchronous pulley. The first synchronous pulley transmits the rotational displacement to the second synchronous pulley through the synchronous belt 5, and the second synchronous pulley transmits the rotational displacement to the optical eye bracket 10 again. The optical eye bracket 10 and the hook 1 are arranged opposite to each other in the opposite direction. While the second synchronous pulley rotates, the two rotate in the opposite direction at the same time without interfering with each other. During use, the silicon rod 15 first cuts off the headstock at the cutting head at the end. The cross-section of the cut silicon rod 15 is flat, easy to detect the distance, and the cross-section is the cutting point of the tool head. By rotating the optical eye bracket 10 to the position directly below and opposite to the cross-section of the silicon rod 15, the optical eye is started to detect the distance between the silicon rod 15 and the optical eye at this time, and it is uploaded to the total control system. The length of the silicon rod 15 to be cut is input into the total control system. The system calculates the distance between the cut silicon rod 15 and the optical eye through conversion, and starts the conveying device to convey the silicon rod 15. When the optical eye detects the set converted distance, the conveying device stops the conveying action. After the silicon rod 15 is stable and motionless, the cutting head starts the cutting operation, so as to realize the automatic and accurate cutting of the required length of the silicon rod 15.

[0030] Further, a wafer picking auxiliary rod 11 for assisting in the blanking of thin silicon wafers is provided on the hook 1, and one side of the wafer picking auxiliary rod 11 is fixedly connected to the fixed end of the hook 1. When the silicon rod 15 needs to be cut into thin wafers, due to the action of the cutting fluid, the thin wafers of the silicon rod 15 after being cut by the diamond wire are easily adhered to the silicon rod 15 and are not easy to remove. Since the silicon wafers are made of hard and brittle materials, hard breaking easily causes damage to the thin wafers. They can only be removed by sliding along the cutting direction. However, due to the presence of the cutting fluid, manual sliding is difficult. There is a small wire cutting gap between the silicon wafer and the original silicon rod 15, which is in an almost vacuum state and requires a large pushing force to move. By setting the wafer picking auxiliary rod 11, when wafer picking is required, the wafer picking auxiliary rod 11 is rotated. The wafer picking auxiliary rod 11 rotates closely along the cutting position of the cutting wire, so as to peel the thin wafer of the silicon rod 15 from the position of the original silicon rod 15, facilitating the exposure of the corners for the staff to grasp, and thus removing the thin wafer of the silicon rod 15.

[0031] Embodiment 2

[0032] As Figure 4 shown, a silicon rod blanking device includes a base frame 12, a bracket 13 for supporting the silicon rod 15, a lifting assembly 14 for lifting the bracket 13, and a blanking manipulator for conveying the cut silicon rod 15. The lifting assembly 14 is fixed on the base frame 12, and the lifting end of the lifting assembly 14 is fixedly connected to the bottom of the bracket 13. The blanking manipulator is fixed on one side of the base frame 12 along the conveying direction. A cutting head for cutting the silicon rod 15 is arranged between the loading device and the unloading device. The loading device is similar to the unloading device, and the only difference is that the blanking manipulator is replaced by a jaw assembly for conveying the silicon rod 15 for loading. Through the cooperation of the bracket 13 and the lifting assembly 14, the controllable rising or falling of the silicon rod 15 is realized. When the cutting is completed, the lifting assembly 14 of the loading device remains in the original descending state unchanged, while the lifting assembly 14 of the unloading device rises. The bracket 13 lifts the cut silicon rod 15, separating it from the silicon rod 15 placed in the original loading section up and down. The silicon rod 15 in the rising section is mainly supported by the rollers on the bracket 13, so it is easy to move along the direction of the rollers. However, at this time, due to the diamond wire cutting effect, the gap between the two is small and they are not separated. At this time, the hook 1 of the blanking manipulator is driven to move to the cutting position of the silicon rod 15, and the hook 1 is rotated to hook the end of the silicon rod 15, and then it is pulled in the blanking direction by the pulling of the traveling drive assembly, so as to move away from the cutting area and complete the blanking operation.

[0033] Furthermore, the lifting assembly 14 includes a spiral elevator for lifting the bracket 13 and a reducer for driving the spiral elevator to move. The output shaft of the reducer is connected to the spiral elevator, the spiral elevator is fixedly connected to the bottom of the bracket 13, and the reducer is fixed to the base frame 12. By arranging the bracket 13 on the base frame 12 and fixing the spiral elevator under the bracket 13, the silicon rod 15 can be raised or lowered on the base frame 12. When the spiral elevator rises, the silicon rod 15 is mainly supported by the bracket 13. The bracket 13 is mainly arranged under the silicon rod 15, which is convenient for the gripping and moving components such as the clamp to grip and move the silicon rod 15. When the spiral elevator descends, the bracket 13 is separated from the silicon rod 15, and the silicon rod 15 is mainly supported by the support seats with a lower center of gravity arranged on both sides of the base frame 12. At this time, the center of gravity of the silicon rod 15 drops, thereby ensuring the stability of the support. Furthermore, the screw elevator includes a housing and a lifting rod, the output shaft of the reducer is connected to the lifting rod, and the end of the lifting rod is fixedly connected to the bottom of the bracket 13. The output shaft of the reducer transmits the horizontal rotation displacement to the vertical rotation displacement of the lifting rod through the turbine, so that the lifting rod can rise or fall, driving the bracket 13 connected to the top of the lifting rod to rise or fall. Further, a connecting flange is fixed to the end of the lifting rod, and the outer diameter of the connecting flange is larger than the outer diameter of the lifting rod. The lifting rod is fixedly connected to the bracket 13 through the connecting flange, and the larger outer diameter facilitates assembly and can more stably support the bracket 13. Further, the reducer and the screw elevator are connected through a coupling. The coupling is provided to prevent the connected screw elevator from bearing excessive load due to a fault, play a role in overload protection, and extend the service life of the reducer and the screw elevator. Further, the reducer is a double-shaft reducer, and the two ends of the double-shaft reducer are respectively connected to two screw elevators through a transmission shaft. The transmission shaft transmits the linear speed of the reducer synchronously, and pulls apart the linkage distance between the reducer and the screw elevator, so as to facilitate the control of two screw elevators far apart to rise or fall synchronously through the dual-axis reducer. Furthermore, a guide assembly for assisting the up and down movement of the screw elevator is fixed on the side of the screw elevator, and the guide assembly includes a guide shaft and a linear bearing sleeved on the guide shaft. The end of the guide shaft is vertically fixed to the bottom of the bracket 13, and the linear bearing is fixedly connected to the screw elevator. Through the guiding action of the guide assembly, the movement direction of the lifting rod of the screw elevator is limited, thereby ensuring that the bracket 13 can only rise or fall in the vertical direction, and avoiding the situation where the bracket 13 tilts and causes the silicon rod 15 to fall. The guide shaft is fixed vertically, and the linear bearing moves linearly along the guide shaft on the guide shaft, thereby causing the screw elevator fixed on the linear bearing to move vertically along the guide shaft.

[0034] Further, the bracket 13 is located at the axis of symmetry of the base frame 12 along the conveying direction. The bracket 13 is provided with a conveying roller assembly arranged along the conveying direction. The conveying roller assembly includes two rows of conveying rollers arranged in the direction of the axis of the silicon rod 15. Through the two rows of conveying rollers, the silicon rod 15 can be supported on the conveying rollers. The surface of the conveying roller is made of a soft material, which increases the friction between the surface of the conveying roller and the silicon rod 15, avoids the occurrence of slipping phenomenon, and does not affect the conveying of the silicon rod 15 on the conveying rollers at the same time.

[0035] The present invention has been described in detail above. The above description is only the preferred embodiment of the present invention, and it cannot limit the scope of the present invention. That is, all equivalent changes and modifications made according to the scope of this application should still fall within the scope covered by the present invention.

Claims

1. A silicon rod blanking device, characterized in that, It includes a base frame, a bracket for holding a silicon rod, a lifting assembly for lifting the bracket, and a blanking manipulator for conveying the cut silicon rod. The lifting assembly is fixed on the base frame, the lifting end of the lifting assembly is fixedly connected to the bottom of the bracket, and the blanking manipulator is fixed on one side of the base frame along the conveying direction; The blanking manipulator includes a hook for hooking the end of the silicon rod to be blanked, a rotary drive assembly for adjusting the position of the hook, and a walking drive assembly for moving the silicon rod. The hook is fixed to the output end of the rotary drive assembly, and the rotary drive assembly is fixed on the walking drive assembly; The lifting assembly includes a screw lift for lifting the bracket and a reduction gear for driving the screw lift to move. The output shaft of the reduction gear is drivingly connected to the screw lift, the screw lift is fixedly connected to the bottom of the bracket, and the reduction gear is fixed on the base frame; The screw lift includes a housing and a lifting rod. The output shaft of the reduction gear is drivingly connected to the lifting rod, and the end of the lifting rod is fixedly connected to the bottom of the bracket; the output shaft of the reduction gear transmits the horizontal rotational displacement to the vertical rotational displacement of the lifting rod through a turbine, so that the lifting rod can rise or fall, driving the bracket connected to the top of the lifting rod to rise or fall. A connecting flange is fixed at the end of the lifting rod, and the outer diameter of the connecting flange is larger than the outer diameter of the lifting rod. The lifting rod is fixedly connected to the bracket through the connecting flange; A guiding assembly for assisting the up and down movement of the screw lift is fixed on the side of the screw lift. The guiding assembly includes a guiding shaft and a linear bearing sleeved on the guiding shaft. The end of the guiding shaft is vertically fixed to the bottom of the bracket, and the linear bearing is fixedly connected to the screw lift; through the guiding action of the guiding assembly, the movement direction of the lifting rod of the screw lift is restricted, and further it is ensured that the bracket can only rise or fall in the vertical direction; the guiding shaft is vertically fixed, and the linear bearing moves linearly along the guiding shaft on the guiding shaft, so that the screw lift fixed on the linear bearing moves vertically along the guiding shaft; A wafer taking auxiliary rod for assisting in blanking thin silicon wafers is further arranged on the hook, and one side of the wafer taking auxiliary rod is fixedly connected to the fixed end of the hook.

2. The silicon rod cutting device according to claim 1, characterized in that, The rotary drive assembly includes a rotary box and a rotary motor fixed inside the rotary box. One end of an extension rod is fixedly connected to the output shaft of the rotary motor, and the other end of the extension rod is fixedly connected to the hook.

3. The silicon rod cutting device according to claim 2, wherein, A first synchronous pulley is arranged at the end of the extension rod, a second synchronous pulley is arranged on the output shaft of the rotary motor, and the first synchronous pulley and the second synchronous pulley are drivingly connected through a synchronous belt.

4. The silicon rod cutting device according to claim 1, wherein, The walking drive assembly includes a bracket and a lead screw assembly horizontally fixed on the bracket. The lead screw assembly includes a lead screw, a nut seat sleeved on the lead screw, and a servo motor for driving the lead screw to rotate. A moving platform for moving back and forth on the lead screw is fixed on the nut seat, and the side of the moving platform is fixedly connected to the rotary drive assembly.

5. The silicon rod blanking device according to claim 4, characterized in that, The walking drive assembly further includes a sliding limit assembly. The sliding limit assembly includes a guide rail arranged in parallel with the lead screw and a slider slidably connected to the guide rail. The slider is fixed to the bottom of the moving platform.

6. The silicon rod blanking device according to claim 2, characterized in that An optoelectronic sensor for detecting the distance of the silicon rod and an optoelectronic sensor bracket for fixing the optoelectronic sensor are further provided on the rotating box. The free end of the optoelectronic sensor bracket is fixed with the optoelectronic sensor, and the other end is fixed on the output shaft of the rotating motor. The optoelectronic sensor bracket is arranged opposite to the hook in the opposite direction.

7. The silicon rod cutting device according to claim 1, characterized in that, The bracket is located at the symmetry axis of the base frame along the conveying direction. A conveying roller assembly arranged along the conveying direction is provided on the bracket. The conveying roller assembly includes two rows of conveying rollers arranged towards the axis direction of the silicon rod.

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