Multi-wavelength laser beam combining device

Abstract

The present invention belongs to the field of laser processing technology, and relates to a multi-wavelength laser beam combining device, comprising a first prism pair assembly, a second prism pair assembly, a first reflector, a second reflector and a first polychromatic beam combining mirror; the first prism pair assembly comprises a first prism and a second prism, and the first prism and the second prism are used to allow a laser of a first wavelength to pass through so as to perform dispersion compensation on the laser of the first wavelength; the second prism pair assembly comprises a third prism and a fourth prism, and the third prism and the fourth prism are used to allow a laser of a second wavelength to pass through so as to perform dispersion compensation on the laser of the second wavelength; the laser of the first wavelength reflected by the first reflector and passing through the first polychromatic beam combining mirror and the laser of the second wavelength reflected by the first polychromatic beam combining mirror are combined at the first polychromatic beam combining mirror and reflected by the second reflector into the laser processing system. The device can obtain a combined laser beam after dispersion compensation, thereby achieving the best processing effect.

Description

Technical Field

[0001] The invention belongs to the technical field of laser processing, and in particular relates to a multi-wavelength laser beam combining device. Background Art

[0002] Different materials respond differently to different laser wavelengths. For example, many non-metals and biological tissues have a high absorption of infrared, so infrared lasers are ideal for removing or processing materials. However, metal materials have a high absorption of green and ultraviolet light, so using green and ultraviolet light will have a better effect on processing and removing metals.

[0003] Most of the existing laser processing technologies are implemented with monochromatic lasers, so the processing technology is limited to the processing and treatment of one or several materials. With the development of science and technology and the birth of various microelectronic devices, there will be huge demand for corresponding laser processing technology. These devices, such as 5G chips, flexible displays, flexible circuit boards, high-density PCB boards and IC packaging, use a variety of different materials, including semiconductors, metals and various non-metals (such as glass, photoresist, etc.). Traditional laser processing technology can no longer meet these needs.

[0004] At present, although lasers that can simultaneously output multiple wavelengths have been designed for different materials, the lasers of multiple wavelengths output simultaneously cannot be well combined. In addition, since the lasers pass through various lens groups and frequency-doubling crystals, there will be large material dispersion and the light pulses will be greatly broadened, resulting in reduced processing effects. The current beam combining devices cannot effectively compensate for the dispersion of lasers of multiple wavelengths. Summary of the invention

[0005] The technical problem to be solved by the present invention is: to provide a multi-wavelength laser beam combining device in view of the problem that the existing laser beam combining device cannot effectively perform dispersion compensation for lasers of multiple wavelengths.

[0006] In order to solve the above technical problems, an embodiment of the present invention provides a multi-wavelength laser beam combining device, comprising a first prism pair assembly, a second prism pair assembly, a first reflector, a second reflector and a first polychromatic beam combining mirror;

[0007] The first prism pair assembly includes a first prism and a second prism, the first prism and the second prism are sequentially arranged along the transmission direction of the laser, and the first prism and the second prism are used for allowing the laser of the first wavelength to pass through so as to perform dispersion compensation on the laser of the first wavelength;

[0008] The second prism pair assembly includes a third prism and a fourth prism, wherein the third prism and the fourth prism are sequentially arranged along the transmission direction of the laser, and the third prism and the fourth prism are used for allowing the laser light of the second wavelength to pass through so as to perform dispersion compensation on the laser light of the second wavelength;

[0009] The first reflector is used to reflect the laser of the first wavelength after dispersion compensation, and the first polychromatic beam combiner is used to reflect the laser of the second wavelength after dispersion compensation. The laser of the first wavelength reflected by the first reflector and passing through the first polychromatic beam combiner and the laser of the second wavelength reflected by the first polychromatic beam combiner are combined at the first polychromatic beam combiner, and the two combined wavelengths of laser light are reflected by the second reflector and enter the laser processing system.

[0010] Optionally, the multi-wavelength laser beam combining device further comprises a third prism pair assembly and a second polychromatic beam combining mirror, the third prism pair assembly comprises a fifth prism and a sixth prism, the fifth prism and the sixth prism are sequentially arranged along the transmission direction of the laser, and the fifth prism and the sixth prism are used for allowing the laser light of the third wavelength to pass through so as to perform dispersion compensation on the laser light of the third wavelength;

[0011] The second polychromatic beam combiner is used to reflect the laser of the third wavelength after dispersion compensation. The two wavelengths of laser light combined by the first polychromatic beam combiner and after passing through the second polychromatic beam combiner and the third wavelength of laser light reflected by the second polychromatic beam combiner are combined by the second polychromatic beam combiner. The three wavelengths of laser light after combination are reflected by the second reflector and enter the laser processing system.

[0012] Optionally, the multi-wavelength laser beam combining device further includes a first right-angle mirror, a second right-angle mirror and a third right-angle mirror;

[0013] The first reflector is arranged between the laser and the first prism, the first right-angle mirror is arranged on the side of the second prism away from the first prism, and the first right-angle mirror is used to reflect the laser light of the first wavelength which passes through the first prism and the second prism in sequence, so that the laser light changes its height and passes through the second prism and the first prism in sequence to reach the first reflector;

[0014] The first polychromatic beam combining mirror is arranged between the laser and the third prism, the second right-angle mirror is arranged on the side of the fourth prism away from the third prism, and the second right-angle mirror is used to reflect the laser light of the second wavelength which passes through the third prism and the fourth prism in sequence, so that the laser light changes its height and then passes through the fourth prism and the third prism in sequence to reach the first polychromatic beam combining mirror;

[0015] The second polychromatic beam combining mirror is arranged between the laser and the fifth prism, and the third right-angle mirror is arranged on the side of the sixth prism away from the fifth prism. The third right-angle mirror is used to reflect the laser of the third wavelength that passes through the fifth prism and the sixth prism in sequence, so that it changes its height and then passes through the sixth prism and the fifth prism in sequence to reach the second polychromatic beam combining mirror.

[0016] Optionally, the first prism and the second prism are set to a Brewster angle for laser light of a first wavelength;

[0017] The third prism and the fourth prism are configured to have a Brewster angle for laser light of a second wavelength;

[0018] The fifth prism and the sixth prism are arranged at a Brewster angle for laser light of a third wavelength.

[0019] Optionally, the first prism pair assembly further includes a first linear displacement platform, a second linear displacement platform, a first rotating platform disposed on the first linear displacement platform, and a second rotating platform disposed on the second linear displacement platform. The first prism is disposed on the first rotating platform, and the second prism is disposed on the second rotating platform. The distance between the first prism and the second prism can be changed by changing the distance between the first linear displacement platform and the second linear displacement platform. The angle of the first prism can be changed by driving the first rotating platform to rotate, and the angle of the second prism can be changed by driving the second rotating platform to rotate.

[0020] Optionally, the second prism pair assembly further includes a third linear displacement platform, a fourth linear displacement platform, a third rotation platform disposed on the third linear displacement platform, and a fourth rotation platform disposed on the fourth linear displacement platform. The third prism is disposed on the third rotation platform, and the fourth prism is disposed on the fourth rotation platform. The distance between the third prism and the fourth prism can be changed by changing the distance between the third linear displacement platform and the fourth linear displacement platform, the angle of the third prism can be changed by driving the third rotation platform to rotate, and the angle of the fourth prism can be changed by driving the fourth rotation platform to rotate.

[0021] Optionally, the third prism pair assembly further includes a fifth linear displacement platform, a sixth linear displacement platform, a fifth rotation platform arranged on the fifth linear displacement platform, and a sixth rotation platform arranged on the sixth linear displacement platform, the fifth prism is arranged on the fifth rotation platform, the sixth prism is arranged on the sixth rotation platform, the distance between the fifth prism and the sixth prism can be changed by changing the distance between the fifth linear displacement platform and the sixth linear displacement platform, the angle of the fifth prism can be changed by driving the fifth rotation platform to rotate, and the angle of the sixth prism can be changed by driving the sixth rotation platform to rotate.

[0022] Optionally, the laser of the first wavelength is red light, the laser of the second wavelength is green light, and the laser of the third wavelength is purple light. The first reflector is a monochrome red light reflector; the first multi-color beam combining mirror is a multi-color beam combining mirror with high red light and high reflection of green light; the second multi-color beam combining mirror is a multi-color beam combining mirror with high transmittance of red and green light and high reflection of purple light; the second reflector is a reflector that can reflect lasers of all wavelengths.

[0023] Compared with the prior art, the multi-wavelength laser beam combining device provided by the embodiment of the present invention is capable of performing dispersion compensation on the laser beam of the first wavelength by sequentially arranging the first prism and the second prism along the transmission direction of the laser beam, when the laser beam of the first wavelength passes through the first prism and the second prism (the first wavelength is named to distinguish laser beams of different wavelengths. For the dispersion compensation of laser beams of different wavelengths, the setting distance between the first prism and the second prism will be different, and is set accordingly according to the specific wavelength of the laser beam and the thickness of the material through which the laser beam of the wavelength passes. The same is true for the naming of the second wavelength and the setting of the third prism and the fourth prism below). The third prism and the fourth prism are sequentially arranged along the transmission direction of the laser beam, when the laser beam of the second wavelength passes through the third prism and the fourth prism, the third prism and the fourth prism can perform dispersion compensation on the laser beam of the second wavelength. The first reflector is arranged to reflect the dispersion-compensated laser beam of the first wavelength to the first multi-color beam combining mirror to combine it with the dispersion-compensated second wavelength, thereby obtaining a dispersion-compensated combined laser beam. BRIEF DESCRIPTION OF THE DRAWINGS

[0024] Figure 1 It is a schematic structural diagram of a multi-wavelength laser beam combining device provided by an embodiment of the present invention;

[0025] Figure 2 yes Figure 1 Schematic diagram of the structures of the first prism pair assembly, the second prism pair assembly, the third prism pair assembly, the first right-angle mirror, the second right-angle mirror, the third right-angle mirror, the first reflector, the first polychromatic beam combiner and the second polychromatic beam combiner.

[0026] The reference numerals in the specification are as follows:

[0027] 1. a first prism pair assembly; 11. a first prism; 12. a second prism;

[0028] 2. a second prism pair assembly; 21. a third prism; 22. a fourth prism;

[0029] 3. a third prism pair assembly; 31. a fifth prism; 32. a sixth prism;

[0030] 4. First reflector; 5. Second reflector; 6. First polychromatic beam combiner; 7. Second polychromatic beam combiner; 8. First right-angle mirror; 9. Second right-angle mirror; 10. Third right-angle mirror;

[0031] 20. Laser processing system;

[0032] a. Laser of the first wavelength; b. Laser of the second wavelength; c. Laser of the third wavelength. DETAILED DESCRIPTION

[0033] In order to make the technical problems, technical solutions and beneficial effects solved by the present invention more clearly understood, the present invention is further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present invention and are not used to limit the present invention.

[0034] like Figure 1-2 As shown, the multi-wavelength laser beam combining device provided in the embodiment of the present invention comprises a first prism pair assembly 1, a second prism pair assembly 2, a first reflector 4, a second reflector 5 and a first polychromatic beam combining mirror 6;

[0035] The first prism pair assembly 1 comprises a first prism 11 and a second prism 12, which are arranged in sequence along the transmission direction of the laser, and the first prism 11 and the second prism 12 are used for allowing the laser light a of the first wavelength to pass through so as to perform dispersion compensation on the laser light a of the first wavelength;

[0036] The second prism pair assembly 2 includes a third prism 21 and a fourth prism 22, which are arranged in sequence along the transmission direction of the laser light, and the third prism 21 and the fourth prism 22 are used for allowing the laser light b of the second wavelength to pass through so as to perform dispersion compensation on the laser light b of the second wavelength;

[0037] The first reflector 4 is used to reflect the laser a of the first wavelength after dispersion compensation, and the first polychromatic beam combining mirror 6 is used to reflect the laser b of the second wavelength after dispersion compensation and to allow the laser a of the first wavelength reflected by the first reflector 4 to pass through. The laser a of the first wavelength reflected by the first reflector 4 and passing through the first polychromatic beam combining mirror 6 and the laser b of the second wavelength reflected by the first polychromatic beam combining mirror 6 are combined at the first polychromatic beam combining mirror 6, and the two combined wavelengths of laser light are reflected by the second reflector 5 and enter the laser processing system 20.

[0038] Compared with the prior art, the multi-wavelength laser beam combining device provided in the embodiment of the present invention sequentially arranges the first prism 11 and the second prism 12 along the transmission direction of the laser, so that when the laser a of the first wavelength passes through the first prism 11 and the second prism 12, the first prism 11 and the second prism 12 can perform dispersion compensation on the laser a of the first wavelength (wherein, the first wavelength is named to distinguish lasers of different wavelengths. For dispersion compensation of lasers of different wavelengths, the setting distance between the first prism 11 and the second prism 12 will be different, and the setting distance will be correspondingly adjusted according to the specific wavelength of the laser and the thickness of the material through which the laser of the wavelength passes. Setting, the naming of the second wavelength below and the setting of the third prism 21 and the fourth prism 22 also apply), by sequentially setting the third prism 21 and the fourth prism 22 along the direction of laser transmission, so that when the laser light b of the second wavelength passes through the third prism 21 and the fourth prism 22, the third prism 21 and the fourth prism 22 can perform dispersion compensation on the laser light b of the second wavelength; by setting the first reflector 4, the laser light a of the first wavelength after dispersion compensation can be reflected to the first multi-color beam combiner 6 to be combined with the second wavelength after dispersion compensation, thereby obtaining a combined laser beam after dispersion compensation, thereby achieving the best processing effect.

[0039] In one embodiment, if Figure 1-2 As shown, the multi-wavelength laser beam combining device further includes a third prism pair assembly 3 and a second polychromatic beam combining mirror 7. The third prism pair assembly 3 includes a fifth prism 31 and a sixth prism 32. The fifth prism 31 and the sixth prism 32 are sequentially arranged along the transmission direction of the laser. The fifth prism 31 and the sixth prism 32 are used for allowing the laser light c of the third wavelength to pass through so as to perform dispersion compensation on the laser light c of the third wavelength.

[0040] The second polychromatic beam combiner 7 is used to reflect the third wavelength laser c after dispersion compensation and the two wavelength lasers combined by the first polychromatic beam combiner 6. The two wavelength lasers combined by the first polychromatic beam combiner 6 and after passing through the second polychromatic beam combiner 7 and the third wavelength laser c reflected by the second polychromatic beam combiner 7 are combined by the second polychromatic beam combiner 7. The combined three wavelength lasers are reflected by the second reflector 5 and enter the laser processing system 20. This arrangement realizes dispersion compensation of the three wavelength lasers and combines the three wavelength lasers, so that it can be used to process workpieces of various materials.

[0041] Any transparent material (such as a glass window or lens and a prism itself) will produce dispersion for ultrafast laser pulses. For laser pulses of different wavelengths (different colors), the dispersion produced by the material is also very different. In addition, in the process of generating lasers of various wavelengths (colors), lasers of various wavelengths (colors) will pass through materials of different thicknesses and materials. Usually, in the visible light and ultraviolet bands, the dispersion of the material is positive dispersion. Therefore, by using a prism pair to produce negative dispersion, reverse dispersion compensation for material dispersion is achieved. Different degrees of negative dispersion can be produced by changing the distance between the prism pairs. Usually, the longer the distance, the more negative dispersion will be produced. Therefore, by changing the distance between the prism pairs, the dispersion caused by any material of different thickness can be compensated. Therefore, in order to perform dispersion compensation for lasers of different wavelengths, the setting distance between the prism pairs of the present invention (i.e., the distance between the first prism 11 and the second prism 12, the distance between the third prism 21 and the fourth prism 22, and the distance between the fifth prism 31 and the sixth prism 32) needs to be adaptively adjusted according to the specific wavelength of the laser and the thickness of the material through which the wavelength laser passes.

[0042] In one embodiment, the first wavelength of laser a is red light, the second wavelength of laser b is green light, and the third wavelength of laser c is purple light. The first reflector 4 is a monochrome red light reflector, the first multi-color beam combiner 6 is a multi-color beam combiner with high red light and high reflection of green light, the second multi-color beam combiner 7 is a multi-color beam combiner with high transmittance of red and green light and high reflection of purple light, and the second reflector 5 is a reflector that can reflect lasers of all wavelengths.

[0043] It should be noted that the embodiments of the present application only list dispersion compensation and beam combining for three lasers of different wavelengths. It is not intended to limit the present application to dispersion compensation and beam combining for three lasers of different wavelengths. It can also achieve dispersion compensation and beam combining for four or more lasers of different wavelengths according to the concept of this solution.

[0044] In one embodiment, if Figure 1-2 As shown, the multi-wavelength laser beam combining device further includes a first right-angle mirror 8, a second right-angle mirror 9 and a third right-angle mirror 10;

[0045] The first reflector 4 is arranged between the laser and the first prism 11, and the first right-angle mirror 8 is arranged on the side of the second prism 12 away from the first prism 11. The first right-angle mirror 8 is used to reflect the laser light a of the first wavelength that passes through the first prism 11 and the second prism 12 in sequence, so that the laser light a changes its height and then passes through the second prism 12 and the first prism 11 in sequence to reach the first reflector 4; by setting the first right-angle mirror 8 to change the conduction height of the laser light, the outgoing laser beam can avoid the incident laser beam, so that the laser light of the first wavelength can reach the first reflector 4 conveniently.

[0046] The first polychromatic beam combining mirror 6 is arranged between the laser and the third prism 21, and the second right-angle mirror 9 is arranged on the side of the fourth prism 22 away from the third prism 21. The second right-angle mirror 9 is used to reflect the laser light b of the second wavelength that passes through the third prism 21 and the fourth prism 22 in sequence, so that it changes its height and then passes through the fourth prism 22 and the third prism 21 in sequence to reach the first polychromatic beam combining mirror 6; by setting the second right-angle mirror 9 to change the transmission height of the laser, the outgoing laser beam can avoid the incident laser beam, so as to facilitate the laser light of the second wavelength to reach the first polychromatic beam combining mirror 6.

[0047] The second polychromatic beam combiner 7 is arranged between the laser and the fifth prism 31, and the third right-angle mirror 10 is arranged on the side of the sixth prism 32 away from the fifth prism 31. The third right-angle mirror 10 is used to reflect the laser light c of the third wavelength that passes through the fifth prism 31 and the sixth prism 32 in sequence, so that the laser light c changes its height and passes through the sixth prism 32 and the fifth prism 31 in sequence to reach the second polychromatic beam combiner 7. By setting the third right-angle mirror 10 to change the transmission height of the laser light, the outgoing laser light beam can avoid the incident laser light beam, so that the laser light of the third wavelength can reach the second polychromatic beam combiner 7 conveniently.

[0048] Among them, Figure 1 As shown, in order to change the conduction height of the laser, the first right-angle mirror 8, the second right-angle mirror 9 and the third right-angle mirror 10 are arranged longitudinally, that is, the two reflecting surfaces of the right-angle mirrors used to change the conduction height of the laser are in the longitudinal direction.

[0049] The laser is a laser that can emit multiple different wavelengths simultaneously, and preferably, a multi-wavelength femtosecond laser is used.

[0050] In one embodiment, if Figure 1As shown, the first prism 11 and the second prism 12 are set to the Brewster angle for the laser of the first wavelength; the third prism 21 and the fourth prism 22 are set to the Brewster angle for the laser of the second wavelength; the fifth prism 31 and the sixth prism 32 are set to the Brewster angle for the laser of the third wavelength, which can effectively reduce the reflection loss caused by the laser passing through the prism pairs (the first prism 11 and the second prism 12, the third prism 21 and the fourth prism 22, the fifth prism 31 and the sixth prism 32).

[0051] In one embodiment, the first prism pair assembly 1 further includes a first linear displacement platform (not shown), a second linear displacement platform (not shown), a first rotating platform (not shown) disposed on the first linear displacement platform, and a second rotating platform (not shown) disposed on the second linear displacement platform. The first prism 11 is disposed on the first rotating platform, and the second prism 12 is disposed on the second rotating platform. The distance between the first prism 11 and the second prism 12 can be changed by changing the distance between the first linear displacement platform and the second linear displacement platform. The angle of the first prism 11 can be changed by driving the first rotating platform to rotate, and the angle of the second prism 12 can be changed by driving the second rotating platform to rotate. By providing the first linear displacement platform, the second linear displacement platform, the first rotating platform, and the second rotating platform, the position between the first prism 11 and the second prism 12 can be conveniently adaptively adjusted according to a specific application environment to achieve an optimal dispersion compensation effect. The first linear displacement platform, the second linear displacement platform, the first rotating platform, and the second rotating platform can be adjusted manually, or they can be precisely controlled by a control system with a computer algorithm pre-recorded through components with a driving function such as a driving motor.

[0052] In one embodiment, the second prism pair assembly 2 further includes a third linear displacement platform (not shown), a fourth linear displacement platform (not shown), a third rotating platform (not shown) disposed on the third linear displacement platform, and a fourth rotating platform (not shown) disposed on the fourth linear displacement platform. The third prism 21 is disposed on the third rotating platform, and the fourth prism 22 is disposed on the fourth rotating platform. The distance between the third prism 21 and the fourth prism 22 can be changed by changing the distance between the third linear displacement platform and the fourth linear displacement platform. The angle of the third prism 21 can be changed by driving the third rotating platform to rotate, and the angle of the fourth prism 22 can be changed by driving the fourth rotating platform to rotate. By providing the third linear displacement platform, the fourth linear displacement platform, the third rotating platform, and the fourth rotating platform, the position between the third prism 21 and the fourth prism 22 can be conveniently adaptively adjusted according to a specific application environment to achieve an optimal dispersion compensation effect. The third linear displacement platform, the fourth linear displacement platform, the third rotating platform, and the fourth rotating platform can be adjusted manually, or they can be precisely controlled by a control system pre-loaded with a computer algorithm through components with a driving function such as a driving motor.

[0053] In one embodiment, the third prism pair assembly 3 further includes a fifth linear displacement platform (not shown), a sixth linear displacement platform (not shown), a fifth rotating platform (not shown) disposed on the fifth linear displacement platform, and a sixth rotating platform (not shown) disposed on the sixth linear displacement platform. The fifth prism 31 is disposed on the fifth rotating platform, and the sixth prism 32 is disposed on the sixth rotating platform. The distance between the fifth prism 31 and the sixth prism 32 can be changed by changing the distance between the fifth linear displacement platform and the sixth linear displacement platform. The angle of the fifth prism 31 can be changed by driving the fifth rotating platform to rotate, and the angle of the sixth prism 32 can be changed by driving the sixth rotating platform to rotate. By providing the fifth linear displacement platform, the sixth linear displacement platform, the fifth rotating platform, and the sixth rotating platform, the position between the fifth prism 31 and the sixth prism 32 can be conveniently adaptively adjusted according to a specific application environment to achieve an optimal dispersion compensation effect. The fifth linear displacement platform, the sixth linear displacement platform, the fifth rotating platform, and the sixth rotating platform can be adjusted manually, or they can be precisely controlled by a control system pre-recorded with a computer algorithm through components with a driving function such as a driving motor.

[0054] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Any modifications, equivalent substitutions and improvements made within the spirit and principles of the present invention should be included in the protection scope of the present invention.

Claims

1. A multi-wavelength laser beam combining device, characterized in that: It includes a first prism pair assembly, a second prism pair assembly, a first reflector, a second reflector and a first polychromatic beam combiner; The first prism pair assembly includes a first prism and a second prism, the first prism and the second prism are sequentially arranged along the transmission direction of the laser, and the first prism and the second prism are used for allowing the laser of the first wavelength to pass through so as to perform dispersion compensation on the laser of the first wavelength; The second prism pair assembly includes a third prism and a fourth prism, wherein the third prism and the fourth prism are sequentially arranged along the transmission direction of the laser, and the third prism and the fourth prism are used for allowing the laser light of the second wavelength to pass through so as to perform dispersion compensation on the laser light of the second wavelength; The first reflector is used to reflect the laser of the first wavelength after dispersion compensation, and the first polychromatic beam combiner is used to reflect the laser of the second wavelength after dispersion compensation. The laser of the first wavelength reflected by the first reflector and passing through the first polychromatic beam combiner and the laser of the second wavelength reflected by the first polychromatic beam combiner are combined at the first polychromatic beam combiner, and the two combined wavelengths of laser light are reflected by the second reflector and enter the laser processing system.

2. The multi-wavelength laser beam combining device according to claim 1, characterized in that: The multi-wavelength laser beam combining device further comprises a third prism pair assembly and a second polychromatic beam combining mirror, wherein the third prism pair assembly comprises a fifth prism and a sixth prism, wherein the fifth prism and the sixth prism are sequentially arranged along the transmission direction of the laser, and the fifth prism and the sixth prism are used for allowing the laser beam of the third wavelength to pass through so as to perform dispersion compensation on the laser beam of the third wavelength; The second polychromatic beam combiner is used to reflect the laser of the third wavelength after dispersion compensation. The two wavelengths of laser light combined by the first polychromatic beam combiner and after passing through the second polychromatic beam combiner and the third wavelength of laser light reflected by the second polychromatic beam combiner are combined by the second polychromatic beam combiner. The three wavelengths of laser light after combination are reflected by the second reflector and enter the laser processing system.

3. The multi-wavelength laser beam combining device according to claim 2, characterized in that: The multi-wavelength laser beam combining device further comprises a first right-angle mirror, a second right-angle mirror and a third right-angle mirror; The first reflector is arranged between the laser and the first prism, the first right-angle mirror is arranged on the side of the second prism away from the first prism, and the first right-angle mirror is used to reflect the laser light of the first wavelength which passes through the first prism and the second prism in sequence, so that the laser light changes its height and passes through the second prism and the first prism in sequence to reach the first reflector; The first polychromatic beam combining mirror is arranged between the laser and the third prism, the second right-angle mirror is arranged on the side of the fourth prism away from the third prism, and the second right-angle mirror is used to reflect the laser light of the second wavelength which passes through the third prism and the fourth prism in sequence, so that the laser light changes its height and then passes through the fourth prism and the third prism in sequence to reach the first polychromatic beam combining mirror; The second polychromatic beam combining mirror is arranged between the laser and the fifth prism, and the third right-angle mirror is arranged on the side of the sixth prism away from the fifth prism. The third right-angle mirror is used to reflect the laser of the third wavelength that passes through the fifth prism and the sixth prism in sequence, so that it changes its height and then passes through the sixth prism and the fifth prism in sequence to reach the second polychromatic beam combining mirror.

4. The multi-wavelength laser beam combining device according to claim 3, characterized in that: The first prism and the second prism are set to a Brewster angle for laser light of a first wavelength; The third prism and the fourth prism are configured to have a Brewster angle for laser light of a second wavelength; The fifth prism and the sixth prism are arranged at a Brewster angle for laser light of a third wavelength.

5. The multi-wavelength laser beam combining device according to claim 2, characterized in that: The first prism pair assembly also includes a first linear displacement platform, a second linear displacement platform, a first rotating platform arranged on the first linear displacement platform, and a second rotating platform arranged on the second linear displacement platform. The first prism is arranged on the first rotating platform, and the second prism is arranged on the second rotating platform. The distance between the first prism and the second prism can be changed by changing the distance between the first linear displacement platform and the second linear displacement platform. The angle of the first prism can be changed by driving the first rotating platform to rotate, and the angle of the second prism can be changed by driving the second rotating platform to rotate.

6. The multi-wavelength laser beam combining device according to claim 5, characterized in that: The second prism pair assembly also includes a third linear displacement platform, a fourth linear displacement platform, a third rotation platform arranged on the third linear displacement platform, and a fourth rotation platform arranged on the fourth linear displacement platform. The third prism is arranged on the third rotation platform, and the fourth prism is arranged on the fourth rotation platform. The distance between the third prism and the fourth prism can be changed by changing the distance between the third linear displacement platform and the fourth linear displacement platform, the angle of the third prism can be changed by driving the third rotation platform to rotate, and the angle of the fourth prism can be changed by driving the fourth rotation platform to rotate.

7. The multi-wavelength laser beam combining device according to claim 6, characterized in that: The third prism pair assembly also includes a fifth linear displacement platform, a sixth linear displacement platform, a fifth rotation platform arranged on the fifth linear displacement platform, and a sixth rotation platform arranged on the sixth linear displacement platform. The fifth prism is arranged on the fifth rotation platform, and the sixth prism is arranged on the sixth rotation platform. The distance between the fifth prism and the sixth prism can be changed by changing the distance between the fifth linear displacement platform and the sixth linear displacement platform, the angle of the fifth prism can be changed by driving the fifth rotation platform to rotate, and the angle of the sixth prism can be changed by driving the sixth rotation platform to rotate.

8. The multi-wavelength laser beam combining device according to claim 2, characterized in that: The first wavelength of laser is red light, the second wavelength of laser is green light, and the third wavelength of laser is purple light. The first reflector is a monochrome red light reflector; the first multi-color beam combiner is a multi-color beam combiner with high red light and high green light reflection; the second multi-color beam combiner is a multi-color beam combiner with high transmittance of red and green light and high reflection of purple light; the second reflector is a reflector that can reflect lasers of all wavelengths.

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