Processing device and chuck table

Abstract

Provided are a processing apparatus and a chuck table that prevent a deterioration in the processing quality of a workpiece accompanying replacement of the chuck table. The processing apparatus includes: a chuck table; a processing unit that processes the workpiece held by the chuck table; a moving unit that relatively moves the chuck table and the processing unit in the X-axis direction and the Y-axis direction parallel to the holding surface; a height measurement unit that is mounted on the processing unit and measures the heights at a plurality of coordinates of the holding surface measured by moving the moving unit as height data; a reading unit that can read an information medium; and a control unit. The chuck table includes an information medium that records identification information for distinguishing the chuck table. The control unit includes: a height data recording unit that records the height data in association with the identification information; and a processing control unit that controls the height of the processing unit during processing based on the height data associated with the identification information read by the reading unit.

Description

Technical Field

[0001] The present invention relates to a processing apparatus and a chuck table. Background Art

[0002] There is known a processing apparatus that cuts a workpiece such as a semiconductor wafer with a cutting tool mounted on a spindle to form a groove having a desired depth or divides the workpiece. For example, the following technique has been developed: when forming a groove having a desired depth with high precision on a workpiece, the cutting depth of the cutting tool with respect to the workpiece is controlled.

[0003] When controlling the cutting depth of the cutting tool with respect to the workpiece, it is necessary to accurately control the distance between the cutting edge of the cutting tool and the holding surface of the chuck table. Generally, the point where the tip (lower end) of the cutting tool contacts the holding surface of the chuck table is registered (set) as a so-called origin position, and the cutting depth is controlled by controlling the distance (height) from this origin position.

[0004] However, there are sometimes height deviations or inclinations on the order of several μm on the holding surface of the chuck table. Therefore, when applying the origin position at one place to the entire holding surface, there is a possibility of causing an error in the accuracy of the cutting depth. In addition, there are also limitations in the straightness of the Y-axis moving unit that moves the spindle in the indexing feed direction (Y-axis direction) or the X-axis moving unit that moves the chuck table in the machining feed direction (X-axis direction). Therefore, when attempting to control the cutting depth with very high precision, it is necessary to register the origin positions on the entire surface of the chuck table and correct the movements of the respective X, Y, and Z axes accordingly.

[0005] In view of this, the following technique has been proposed: measuring the height of the holding surface of the chuck table at multiple coordinates and storing the relationship between each coordinate and the height (for example, refer to Patent Document 1).

[0006] Patent Document 1: Japanese Unexamined Patent Application Publication No. 2018-27601

[0007] However, in a chip mass production site, in order to process wafers of different diameters or perform regular inspections, the chuck table of the processing apparatus is sometimes replaced. In the above processing apparatus, even when there is a replacement of the chuck table, it is required to improve the accuracy of the cutting depth of the cutting tool with respect to the workpiece and prevent a decrease in the processing quality of the workpiece. Summary of the Invention

[0008] Therefore, an object of the present invention is to provide a processing apparatus and a chuck table that can prevent a decrease in the processing quality of a workpiece associated with the replacement of the chuck table.

[0009] According to one aspect of the present invention, there is provided a processing apparatus having: a chuck table having a holding surface for holding a workpiece and a frame surrounding the holding surface; a processing unit for processing the workpiece held by the chuck table; a moving unit for relatively moving the chuck table and the processing unit in an X-axis direction parallel to the holding surface and a Y-axis direction perpendicular to the X-axis direction; a height measuring unit mounted on the processing unit for measuring the height (Z) at a plurality of coordinates (X, Y) of the holding surface measured by moving the moving unit as height data; a reading unit capable of reading an information medium; and a control unit. The chuck table includes an information medium that records identification information for distinguishing the chuck table. The reading unit reads the information medium provided on the chuck table of the processing apparatus. The control unit includes: a height data recording unit for recording the height data in association with the identification information; and a processing control unit for controlling the height of the processing unit during processing based on the height data associated with the identification information read by the reading unit.

[0010] According to another aspect of the present invention, there is provided a processing apparatus having: a chuck table having a holding surface for holding a workpiece and a frame surrounding the holding surface; a processing unit for processing the workpiece held by the chuck table; a moving unit for relatively moving the chuck table and the processing unit in an X-axis direction parallel to the holding surface and a Y-axis direction perpendicular to the X-axis direction; a height measuring unit mounted on the processing unit for measuring the height (Z) at a plurality of coordinates (X, Y) of the holding surface measured by moving the moving unit as height data; a reading unit capable of reading an information medium; and a control unit. The chuck table includes an information medium that records the height data of the chuck table. The control unit includes a processing control unit for controlling the height of the processing unit during processing based on the height data read by the reading unit.

[0011] Preferably, the information medium is composed of a two-dimensional code or a radio frequency tag of radio frequency identification, and the radio frequency identification can write and read information through wireless communication.

[0012] According to still another aspect of the present invention, there is provided a chuck table having: a holding surface; a frame surrounding the holding surface; and an information medium that records height data obtained by measuring the height at a plurality of coordinates of the holding surface in a state where the chuck table is set in a processing apparatus.

[0013] Preferably, the information medium is composed of a two-dimensional code or a radio frequency tag of radio frequency identification, and the radio frequency identification can write and read information through wireless communication.

[0014] According to the present invention, an effect is achieved that can prevent a reduction in the processing quality of a workpiece associated with the replacement of the chuck table. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] Figure 1 is a perspective view showing the external structure of the processing apparatus according to the first embodiment.

[0016] Figure 2 is a perspective view showing the external structure of the workpiece according to the first embodiment.

[0017] Figure 3 is a perspective view schematically showing a structural example of the chuck table according to the first embodiment.

[0018] Figure 4 is a side view showing the positional relationship between the chuck table and the height measuring unit according to the first embodiment.

[0019] Figure 5 is a view showing a setting example of the measurement line according to the first embodiment.

[0020] Figure 6 is a view showing a setting example of the measurement point according to the first embodiment.

[0021] Figure 7 is a view showing an outline of the height data according to the first embodiment.

[0022] Figure 8 is a top view schematically showing the processing control according to the first embodiment.

[0023] Figure 9 is a flowchart showing an example of the processing procedure of the processing apparatus according to the first embodiment.

[0024] Figure 10 is a perspective view schematically showing a structural example of the chuck table of a modified example.

[0025] Figure 11 is a perspective view showing the external structure of the processing apparatus according to the second embodiment.

[0026] Figure 12 is a perspective view schematically showing a structural example of the chuck table according to the second embodiment.

[0027] Figure 13 is a flowchart showing an example of the processing procedure of the processing apparatus according to the second embodiment.

[0028] REFERENCE SIGNS LIST

[0029] 1: Processing device; 4: Base; 6: Cassette support table; 10: X-axis moving worktable; 11: Workpiece to be processed; 13: Division predetermined line; 14: Chuck worktable; 15: Device; 16: Holding surface; 17: Frame; 18: Processing unit; 20: Support structure; 22: Processing unit moving mechanism; 24: Y-axis guide rail; 26: Y-axis moving plate; 28: Y-axis ball screw; 32: Z-axis guide rail; 34: Z-axis moving plate; 36: Z-axis ball screw; 42: Cutting tool; 44: Composite measurement unit; 44-1: Height measurement unit; 44-2: Imaging unit; 46: Cleaning unit; 90: Reader; 100: Control unit; 110: Data recording unit; 120: Processing control unit; 201: Two-dimensional barcode; 202: QR code; 203: Radio frequency tag. Detailed implementation mode

[0030] Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings. The present invention is not limited to the content described in the following embodiments. Moreover, among the constituent elements described below, there are constituent elements that are substantially the same and can be easily conceived by those skilled in the art. Moreover, the structures described below can be appropriately combined. Moreover, various omissions, substitutions, or changes of the structure can be made without departing from the gist of the present invention.

[0031] Moreover, in the embodiments of the present invention, when it is not necessary to particularly distinguish each of a plurality of constituent elements having substantially the same functional structure, the same reference numerals may be used and described. Moreover, there are cases where different numbers or characters are added after the same reference numeral for distinction.

[0032] In the embodiments described below, an XYZ rectangular coordinate system is set, and the positional relationship of each part is described with reference to this XYZ rectangular coordinate system. One direction in the horizontal plane is set as the X-axis direction, the direction perpendicular to the X-axis direction in the horizontal plane is set as the Y-axis direction, and the direction perpendicular to the X-axis direction and the Y-axis direction respectively is set as the Z-axis direction. The XY plane including the X-axis and the Y-axis is parallel to the horizontal plane. The Z-axis direction perpendicular to the XY plane is the vertical direction.

[0033] 〔First Embodiment〕

[0034] Figure 1 is a perspective view showing the external structure of the processing device according to the first embodiment. Figure 2 is a perspective view showing the external structure of the workpiece to be processed according to the first embodiment. Figure 1 The processing device 1 shown is a device that holds the workpiece 11 using the chuck worktable 14 and performs cutting using the cutting tool 42.

[0035] Figure 2The workpiece 11 shown is a disk-shaped wafer such as a semiconductor wafer or an optical device wafer made of raw materials such as silicon, sapphire, and gallium. On the front surface 11a of the workpiece 11, functional layers such as a metal film serving as wiring and an insulating film for insulating between wirings are provided.

[0036] Moreover, the front surface 11a of the workpiece 11 is divided into a plurality of regions by dividing predetermined lines 13 arranged in a grid pattern, and devices 15 such as ICs and LSIs are formed in each region. Further, a notch 11c serving as a mark when determining the orientation (crystal orientation) of the workpiece 11 is provided at the outer edge portion of the workpiece 11, but a flat orientation plane may be provided instead of the notch 11c. Also, when determining the orientation of the workpiece 11 based on the pattern of the device 15 or the like, the notch 11c may not be provided.

[0037] The material, shape, structure, etc. of the workpiece 11 are not particularly limited, and a substrate made of materials such as ceramics, metals, and resins may also be used as the workpiece 11. The type, number, arrangement, etc. of the devices 15 are also not particularly limited.

[0038] As Figure 2 shown, a protection member 21 is adhered to the back surface 11b of the workpiece 11. The protection member 21 is composed of a circular film (tape) having the same diameter as the workpiece 11. A paste layer having adhesiveness is provided on the front surface 21a of the protection member 21. By bringing the front surface 21a side of the protection member 21 provided with this paste layer into contact with the back surface 11b of the workpiece 11, the protection member 21 is adhered to the workpiece 11. In addition, the protection member 21 may also be a member composed only of a base material layer of synthetic resin and adhered to the workpiece 11 by thermocompression bonding. Also, the workpiece 11 may be adhered to the opening of the annular frame via the protection member 21.

[0039] The processing apparatus 1 has a base 4 that supports each structure. Inside a rectangular opening 4a formed at the front corner of the base 4, a cassette support table 6 that moves up and down is provided. The cassette support table 6 has a placement surface on which a cassette 8 that can accommodate a plurality of workpieces 11 can be placed.

[0040] On the side of the cassette support table 6, inside a long rectangular opening 4b formed along the processing feed direction (X-axis direction), an X-axis moving table 10 and a dust cover 12 that move in the X-axis direction by an X-axis moving unit (an example of a moving unit) (not shown) are provided.

[0041] The X-axis moving unit has a pair of X-axis guide rails (not shown) parallel to the X-axis direction. An X-axis moving table 10 is slidably mounted on the X-axis guide rails. A nut portion (not shown) is provided on the lower surface of the X-axis moving table 10, and an X-axis ball screw (not shown) parallel to the X-axis guide rails is screwed onto the nut portion. One end of the X-axis ball screw is connected to an X-axis motor (not shown), and the X-axis ball screw is rotated by the X-axis motor, whereby the X-axis moving table 10 moves along the X-axis guide rails. Above the X-axis moving table 10, a chuck table 14 for holding the workpiece 11 is provided.

[0042] Figure 3 FIG. schematically shows a structural example of the chuck table according to the first embodiment. As Figure 3 shown, the chuck table 14 has a disk shape and includes: a holding surface 16 formed of porous ceramics or the like for holding the workpiece 11; and a frame 17 surrounding the holding surface 16. Further, a two-dimensional bar code 201 (an example of an information medium) is provided on the upper surface of the frame 17, and the two-dimensional bar code 201 records a table ID (an example of identification information) for distinguishing the chuck table 14. The table ID is information individually assigned to each of the plurality of chuck tables provided in the processing apparatus 1.

[0043] Further, the chuck table 14 is arranged to be movable in the X-axis direction between a processing area below the processing unit 18 and a loading / unloading area for loading / unloading the workpiece 11 that is separated from below the processing unit 18 by the X-axis moving unit. The chuck table 14 is arranged to be rotatable about an axis parallel to the Z-axis direction by a rotation drive source such as a motor (not shown). The chuck table 14 is connected to a vacuum suction source (not shown), and the workpiece 11 placed on the holding surface 16 is attracted and held by being attracted by the vacuum suction source.

[0044] On the upper surface of the base 4, a gantry-type support structure 20 for supporting two sets of processing units 18 is arranged so as to straddle the opening 4b. Two sets of processing unit moving mechanisms 22 (an example of a moving unit) for moving each processing unit 18 in the indexing feed direction (Y-axis direction) and the plunge feed direction (Z-axis direction) are provided on the upper part of the front surface of the support structure 20.

[0045] The processing unit moving mechanisms 22 each commonly include a pair of Y-axis guide rails 24 parallel to the Y-axis direction disposed on the front surface of the support structure 20. The Y-axis moving plates 26 are each slidably mounted along the Y-axis direction on the Y-axis guide rails 24. On the back surface of each Y-axis moving plate 26, there are respectively provided nut portions (not shown), and on each of these nut portions, there is screwed a Y-axis ball screw 28 parallel to the Y-axis guide rails 24. By rotating the Y-axis ball screws 28 by means of Y-axis motors 30 respectively connected to one end portion of each Y-axis ball screw 28, each Y-axis moving plate 26 moves along the Y-axis guide rails 24 respectively.

[0046] On the front surface of each Y-axis moving plate 26, there are respectively provided a pair of Z-axis guide rails 32 parallel to the Z-axis direction. The Z-axis moving plates 34 are each slidably mounted along the Z-axis direction on each Z-axis guide rail 32. On the back surface of each Z-axis moving plate 34, there are respectively provided nut portions (not shown), and on each of these nut portions, there is screwed a Z-axis ball screw 36 parallel to the Z-axis guide rails 32. By rotating the Z-axis ball screws 36 by means of Z-axis motors 38 respectively connected to one end portion of each Z-axis ball screw 36, each Z-axis moving plate 34 moves along its respective Z-axis guide rail 32.

[0047] On the lower part of each Z-axis moving plate 34, there is respectively provided a processing unit 18 (an example of a processing unit). Figure 1 The shown processing device 1 is a so-called face-to-face dual-axis type device which is a cutting machine having two processing units 18, i.e., two spindles.

[0048] Each processing unit 18 processes the workpiece 11 held by the chuck table 14. Each processing unit 18 has an annular cutting tool 42 for cutting the workpiece 11. The cutting tool 42 is detachably mounted on one end portion of the spindle 40.

[0049] On each processing unit 18, there is mounted a composite measurement unit 44. The composite measurement unit 44 is configured as a composite unit integrating a height measurement unit 44-1 (an example of a height measurement portion) and a photographing unit 44-2 (a reading portion), wherein the height measurement unit 44-1 is used to measure the height of the holding surface 16 of the chuck table 14, and the photographing unit 44-2 is used to photograph the workpiece 11, etc.

[0050] The height measurement unit 44-1 is installed, for example, using a laser displacement meter which uses a laser beam L1 to measure the height of an object. The height measurement unit 44-1 can measure the height of the holding surface 16 of the chuck table 14 in a non-contact manner. The height measurement unit 44-1 is installed on the processing unit 18, and measures the height (Z) at a plurality of coordinates (X, Y) of the holding surface 16 obtained by moving the X-axis moving unit and each processing unit moving mechanism 22 as height data.

[0051] The photographing unit 44-2 (an example of a reading unit) is mounted, for example, by a camera having a CCD (Charge-Coupled Device) imaging element or a CMOS (Complementary MOS) imaging element. The photographing unit 44-2 photographs the workpiece 11 held by the chuck table 14 to obtain an image for alignment such as alignment between the workpiece 11 and the cutting tool 42, and outputs the obtained image to the control unit 100.

[0052] In addition, the photographing unit 44-2 has a function of reading information recorded in the two-dimensional barcode 201 provided on the chuck table 14. The photographing unit 44-2 sends the table ID for differentiating the chuck table read from the two-dimensional barcode to the control unit 100.

[0053] The X-axis movement unit and each processing unit movement mechanism 22 relatively move the chuck table 14 and the processing unit 18 in the X-axis direction and the Y-axis direction parallel to the holding surface 16. That is, the chuck table 14 is moved in the X-axis direction, which is the machining feed direction, by the X-axis movement unit, whereby the chuck table 14 and the processing unit 18 are relatively machined and fed along the X-axis direction. Further, the Y-axis movement plate 26 is moved in the Y-axis direction by each processing unit movement mechanism 22, whereby the processing unit 18 and the composite measurement unit 44 are indexed and fed in the Y-axis direction. In addition, the Z-axis movement plate 34 is moved in the Z-axis direction by each processing unit movement mechanism 22, whereby the processing unit 18 and the composite measurement unit 44 are plunge-fed in the Z-axis direction.

[0054] A cleaning unit 46 is provided inside the opening 4c of the base 4. The cleaning unit 46 cleans the machined workpiece 11 and the like after cutting.

[0055] Each component of the processing apparatus 1, namely, the X-axis movement unit (not shown), the chuck table 14, the processing unit 18, the processing unit movement mechanism 22, the composite measurement unit 44, and the cleaning unit 46 are respectively connected to the control unit 100.

[0056] The control unit 100 (an example of a control unit) includes an arithmetic processing device such as a CPU (central processing unit), a storage device such as a ROM (read only memory) or a RAM (random access memory), and an input / output interface device. In order to perform various processes described below by these units, the control unit 100 is a computer capable of executing a computer program or the like for controlling the above-described respective components.

[0057] As Figure 1As shown, the control unit 100 has a data recording unit 110 and a processing control unit 120, and the functions and roles of various processes of the processing device 1 of the first embodiment are implemented or executed by each of these units. Each unit of the control unit 100 is implemented, for example, by functions provided by a program stored in a storage device. That is, each unit of the control unit 100 is implemented by an arithmetic processing device executing a program stored in the storage device using a RAM or the like as a work area. The functional structure of the control unit 100 does not need to be particularly limited to Figure 1 the structural example shown, and may be other structures as long as they can perform various processes in the processing device 1 described later.

[0058] 〔Outline of Processing〕

[0059] The control unit 100 executes a height measurement process for measuring the height of the holding surface 16 of the chuck table 14 through the height measurement unit 44-1 of the composite measurement unit 44. Figure 4 It is a side view showing the positional relationship between the chuck table and the height measurement unit of the first embodiment. Figure 5 It is a diagram showing an example of setting of the measurement line of the first embodiment. Figure 6 It is a diagram showing an example of setting of the measurement points of the first embodiment.

[0060] As Figure 4 shown, the data recording unit 110 of the control unit 100 positions the imaging unit 44-2 of the composite measurement unit 44 above the chuck table 14 provided in the processing device 1. Next, the data recording unit 110 causes the imaging unit 44-2 to read the two-dimensional barcode 201 provided on the frame 17 of the chuck table 14. Then, the data recording unit 110 acquires the table ID read by the imaging unit 44-2.

[0061] Next, the data recording unit 110 relatively moves the chuck table 14 and the height measurement unit 44-1 to move the height measurement unit 44-1 above the holding surface 16 of the chuck table 14. Next, the data recording unit 110 positions the height measurement unit 44-1 at a position where the measurement laser beam L1 irradiated from the height measurement unit 44-1 can irradiate on the measurement line 16-1 ( Figure 5 ) set in advance on the holding surface 16. Then, the data recording unit 110 relatively moves the chuck table 14 and the height measurement unit 44-1 to move the measurement laser beam L1 along a plurality of measurement lines 16-1 ( Figure 5Irradiation is performed in sequence to execute the height measurement process. Thereby, the data recording unit 110 can measure the height (Z) at multiple coordinates (X, Y) on the holding surface 16 of the chuck table 14. The data recording unit 110 can record data representing the correlation between the multiple coordinates (X, Y) obtained as the measurement results and the height (Z) at the multiple coordinates (X, Y) as height data. In addition, the height measurement unit 44-1 is not limited to a laser irradiation type sensor, and other measurement units using a back pressure sensor or a contact sensor etc. can also be installed and used.

[0062] As Figure 5 shown, a plurality of measurement lines 16-1 are set in advance on the holding surface 16 at a prescribed interval (spacing) in the X-axis direction and the Y-axis direction. By measuring the height along these measurement lines 16-1, information on the height (Z) at multiple coordinates (X, Y) on the holding surface 16 is obtained. A plurality of measurement lines 16-1 can be set on the holding surface 16 at an interval of, for example, 20 mm to 50 mm. In addition, the number, interval, and arrangement position of the measurement lines 16-1 set on the holding surface 16 are not particularly limited, and an operator can arbitrarily change them.

[0063] Moreover, the data recording unit 110 is not particularly limited to the example of measuring the height along the measurement lines 16-1. As Figure 6 shown, a plurality of measurement points 16-2 can also be set in advance on the holding surface 16, and the height is measured for each measurement point 16-2.

[0064] The data recording unit 110 records the height data obtained through the above height measurement process in association with the table ID of the chuck table 14. Figure 7 is a diagram showing an outline of the height data of the first embodiment. As Figure 7 shown, the height data recorded by the data recording unit 110 has respective items of table ID, coordinates, and height, and these items correspond to each other. In the item of table ID, the table ID of the chuck table 14 read by the photographing unit 44-2 is stored. In the item of coordinates, the values of the coordinates (X, Y) of the holding surface 16 in the height measurement process are stored. In the item of height, the value of the height (Z) of the holding surface 16 in the height measurement process is stored.

[0065] The processing control unit 120 of the control unit 100 controls the height of the processing unit 18 during processing based on the height data recorded by the data recording unit 110. That is, the processing control unit 120 obtains the height data associated with the table ID read by the photographing unit 44-2 from the data recording unit 110, and controls the height of the processing unit 18 during processing based on the obtained height data. Figure 8 is a top view schematically showing the processing control of the first embodiment. AsFigure 8 As shown, the machining control unit 120 causes the cutting tool 42 to cut into the workpiece 11 based on the height data, thereby forming a cutting groove with a desired depth in the workpiece 11.

[0066] 〔Processing procedure〕

[0067] Use Figure 9 An example of the processing procedure of the machining apparatus according to the first embodiment will be described. Figure 9 It is a flowchart showing an example of the processing procedure of the machining apparatus according to the first embodiment. Figure 9 The processing shown is executed by each part included in the control unit 100.

[0068] As Figure 9 shown, the data recording unit 110 acquires the table ID of the chuck table 14 from the imaging unit 44-2 (step S101).

[0069] Next, the data recording unit 110 determines whether height data of the holding surface 16 of the chuck table 14 associated with the table ID is recorded (step S102).

[0070] When the data recording unit 110 determines that the height data associated with the table ID is recorded (step S102; YES), it acquires the height data associated with the table ID (step S103).

[0071] The machining control unit 120 performs machining control based on the height data acquired by the data recording unit 110 (step S104), and ends Figure 9 the processing shown.

[0072] In step S102 above, when the data recording unit 110 determines that the height data associated with the table ID is not recorded (step S102; NO), it measures the height data of the holding surface 16 of the chuck table 14 (step S105). Alternatively, when it is determined that the height data associated with the table ID is not recorded, the machining control unit 120 may be controlled to machine the workpiece 11 by causing the cutting tool 42 to cut into the holding surface 16 to a certain height instead of using the height data as in the past.

[0073] Next, the data recording unit 110 records the height data obtained in the measurement in step S105 in association with the table ID obtained in step S101 (step S106), and transfers to the processing procedure of step 104 above. That is, the machining control unit 120 performs machining control based on the height data measured by the data recording unit 110.

[0074] As described above, the processing apparatus 1 of the first embodiment includes a chuck table 14, a processing unit 18, an X-axis moving unit (not shown), a processing unit moving mechanism 22, a height measurement unit 44-1, an imaging unit 44-2, and a control unit 100. The chuck table 14 has a holding surface 16 for holding the workpiece 11 and a frame 17 surrounding the holding surface 16, and includes a two-dimensional barcode 201 (an example of an information medium) for recording identification information for distinguishing the chuck table 14. The processing unit 18 (an example of a processing unit) processes the workpiece 11 held by the chuck table 14. The X-axis moving unit (not shown) and the processing unit moving mechanism 22 (an example of a moving unit) relatively move the chuck table 14 and the processing unit 18 in the X-axis direction and the Y-axis direction parallel to the holding surface 16. The height measurement unit 44-1 (an example of a height measurement unit) is mounted on the processing unit 18, and measures the height (Z) at a plurality of coordinates (X, Y) of the holding surface 16 and the plurality of coordinates (X, Y) obtained by moving the X-axis moving unit (not shown) and the processing unit moving mechanism 22 as height data. The imaging unit 44-2 (an example of a height measurement unit) can read the two-dimensional barcode 201. That is, the imaging unit 44-2 can read the two-dimensional barcode 201 to obtain the table ID. The control unit 100 (an example of a control unit) includes a data recording unit 110 and a processing control unit 120. The data recording unit 110 (an example of a height data recording unit) records the height data in association with the table ID. The processing control unit 120 controls the height of the processing unit 18 during processing according to the height data associated with the table ID read by the imaging unit 44-2. Thus, even if the chuck table 14 of the processing apparatus 1 of the first embodiment is replaced, processing control can be performed according to the height data corresponding to the chuck table 14. Therefore, the processing apparatus 1 of the first embodiment can prevent a reduction in the processing quality of the workpiece 11 accompanying the replacement of the chuck table 14.

[0075] 〔Modification〕

[0076] In the above first embodiment, as an information medium for recording the table ID (identification information) of the chuck table 14, an example using the two-dimensional barcode 201 has been described, but it is not particularly limited to this example. Figure 10 FIG. schematically shows a structural example of a modified chuck table. As Figure 10As shown, a two-dimensional code 202 (an example of an information medium), which records a worktable ID (an example of identification information) for distinguishing the chuck worktable 14, may also be provided on the upper surface of a frame 17 around a holding surface 16 of the chuck worktable 14. In this case, the photographing unit 44-2 has a function of reading information recorded in the two-dimensional code 202 provided on the chuck worktable 14, and transmits the worktable ID read from the two-dimensional code 202 to the control unit 100. The two-dimensional code 202 is also referred to as a matrix two-dimensional code and includes Quick Response Code (QR code: registered trademark).

[0077] 〔Second Embodiment〕

[0078] In the above-described first embodiment, an example in which the two-dimensional bar code 201 or the two-dimensional code 202 is used as an information medium for recording the worktable ID of the chuck worktable 14 has been described. However, it is not particularly limited to this example, and a radio frequency tag corresponding to radio frequency identification (RFID) may also be used as an information medium for recording the worktable ID of the chuck worktable 14. Hereinafter, Figures 11 to 13 the processing apparatus according to the second embodiment will be described. Figure 11 FIG. is a perspective view showing an external structure of the processing apparatus according to the second embodiment. Figure 12 FIG. is a diagram schematically showing a structural example of the chuck worktable according to the second embodiment. Figure 13 FIG. is a flowchart showing an example of a processing procedure of the processing apparatus according to the second embodiment.

[0079] As Figure 12 shown, a radio frequency tag 203 (an example of an information medium), which records the worktable ID of the chuck worktable 14, is provided on a frame 17 around a holding surface 16 of the chuck worktable 14. Further, the radio frequency tag 203 may not be exposed on the surface of the frame 17 but may be housed inside the chuck worktable 14.

[0080] As Figure 11 shown, the processing apparatus 2 according to the second embodiment includes a reader 90 (an example of a reading unit). The reader 90 is, for example, a radio frequency identification (RFID) device capable of writing and reading information through wireless communication. The reader 90 reads Figure 12 the worktable ID of the chuck worktable 14 from the radio frequency tag 203 provided in the chuck worktable 14 shown. The reader 90 can communicate wirelessly or by wire, and transmits the worktable ID read from the radio frequency tag 203 to the control unit 100.

[0081] 〔Processing Procedure〕

[0082] Using Figure 13An example of the processing procedure of the processing apparatus according to the second embodiment will be described. Figure 13 The processing shown is executed by each unit included in the control unit 100. Additionally, Figure 13 The difference between the processing procedure shown and Figure 9 the processing procedure shown lies in the procedure of step S201.

[0083] As Figure 13 shown, the data recording unit 110 acquires the worktable ID of the chuck table 14 read by the reader 90 (step S201).

[0084] Next, the data recording unit 110 determines whether height data of the holding surface 16 of the chuck table 14 associated with the worktable ID acquired in step S201 is recorded (step S202).

[0085] When the data recording unit 110 determines that the height data associated with the worktable ID is recorded (step S202; YES), it acquires the height data associated with the worktable ID (step S203).

[0086] The machining control unit 120 performs machining control based on the height data acquired by the data recording unit 110 (step S204), and ends Figure 13 the processing shown.

[0087] In step S202 above, when the data recording unit 110 determines that the height data associated with the worktable ID acquired in step S201 is not recorded (step S202; NO), it measures the height data of the holding surface 16 of the chuck table 14 (step S205). Alternatively, when it is determined that the height data associated with the worktable ID is not recorded, the machining control unit 120 may also be controlled to machine the workpiece 11 by cutting into the holding surface 16 to a certain height using the cutting tool 42 instead of using the height data as in the past.

[0088] Next, the data recording unit 110 associates the height data acquired in the measurement of step S205 with the worktable ID acquired in step S201 and records it (step S206), and transfers to the processing procedure of step 204 above. That is, the machining control unit 120 performs machining control based on the height data measured by the data recording unit 110.

[0089] 〔Third Embodiment〕

[0090] In the above-described embodiment, an example was described in which the processing apparatus 1 reads the table ID from information media such as the two-dimensional bar code 201, the two-dimensional code 202, and the radio frequency tag 203, and performs processing control based on the height data associated with the read table ID. However, it is not particularly limited to this example. For example, for these information media, the height data of the holding surface 16 of the chuck table 14 may be recorded instead of the table ID. Thereby, the processing apparatus 1 can directly use the height data read from these information media to perform processing control.

[0091] For example, in the case of using the two-dimensional bar code 201 or the two-dimensional code 202, before using the chuck table 14, the operator sets the chuck table 14 in the processing apparatus 1 and performs the height measurement process of the chuck table 14. Then, a two-dimensional bar code 201 or a two-dimensional code 202 recording the height data obtained by the height measurement process is generated, and the operator previously sets the generated two-dimensional bar code 201 or two-dimensional code 202 in the chuck table 14 before use. The processing control unit 120 of the control unit 100 causes the imaging unit 44-2 of the composite measurement unit 44 to read the two-dimensional bar code 201 or the two-dimensional code 202 of the frame 17 provided in the chuck table 14. The processing control unit 120 acquires the height data read by the imaging unit 44-2 and performs processing control using the acquired height data.

[0092] Further, in the case of using the radio frequency tag 203, before using the chuck table 14, the operator sets the chuck table 14 in the processing apparatus 1 and performs the height measurement process of the chuck table 14. The operator writes the height data obtained by the height measurement process into the radio frequency tag 203 using a writer corresponding to radio frequency identification (RFID), and previously sets the radio frequency tag 203 in which the height data is written in the chuck table 14 before use. The processing control unit 120 of the control unit 100 acquires the height data read from the radio frequency tag 203 by the reader 90 from the reader 90 and performs processing control using the acquired height data.

[0093] Thus, according to the third embodiment, the processing apparatus 1 can directly acquire the height data recorded in the information medium of the chuck table 14 to perform processing control, without spending time associating the height data with the table ID and recording it in the data recording unit 110.

[0094] Further, in the above-described embodiments, at least one of the worktable ID and the height data of the chuck table 14 may be recorded in the information medium in advance. When only the worktable ID is recorded in the information medium, similar to the first and second embodiments, the processing apparatus 1 can obtain the height data associated with the worktable ID from the data recording unit 110 and perform processing control. Further, when only the height data is recorded in the information medium, similar to the third embodiment, the processing apparatus 1 can obtain the height data recorded in the information medium and perform processing control. Further, when the worktable ID and the height data are recorded in the information medium, the processing apparatus 1 can obtain the height data associated with the worktable ID from the data recording unit 110 in the same manner as in the first and second embodiments to perform processing control, or can obtain the height data recorded in the information medium in the same manner as in the third embodiment to perform processing control. Additionally, when the worktable ID and the height data are recorded in the information medium, the processing apparatus 1 determines whether the height data associated with the worktable ID is recorded in the data recording unit 110. When the height data associated with the worktable ID is recorded in the data recording unit 110, the processing apparatus 1 may also determine whether the height data recorded in the information medium is consistent with the height data recorded in the data recording unit 110. When it is determined that the height data is consistent, the processing apparatus 1 uses any of the height data to perform processing control. When it is determined that the height data is inconsistent, the measurement of the height data may be performed again, and the measured height data may be used to perform processing control. Thereby, processing control can be performed using more reliable height data.

[0095] 〔Other〕

[0096] In addition to being applied to processing apparatuses such as cutting apparatuses, the above-described embodiments can also be similarly applied to laser processing apparatuses. For example, the height data of the chuck table included in the laser processing apparatus can be obtained in the same manner as in the above-described embodiments, and the formation position of the condensing point of the laser beam can be moved up and down based on the obtained height data. Thereby, regardless of the unevenness of the chuck table included in the laser processing apparatus, the laser beam can be irradiated at a uniform height position of the workpiece, and the processing quality can be improved.

[0097] Each component of the processing apparatus 1 described in the above embodiments is a functional concept, and does not necessarily need to be physically configured as shown in the drawings. That is, the specific manner of dispersion / unification of the control unit 100 included in the processing apparatus 1 is not limited to the manner shown in the drawings, and can be configured to disperse or unify all or a part thereof functionally or physically in any unit according to various loads or usage conditions, etc. For example, the data recording unit 110 and the processing control unit 120 of the control unit 100 may also be installed in the control unit 100 in a functionally or physically unified state.

Claims

1. A processing device, comprising: A chuck table having a holding surface for holding a workpiece and a frame surrounding the holding surface; A processing unit for processing the workpiece held by the chuck table; A moving unit for relatively moving the chuck table and the processing unit in the X-axis direction parallel to the holding surface and in the Y-axis direction perpendicular to the X-axis direction; A height measuring unit mounted on the processing unit, measuring the height (Z) at multiple coordinates (X, Y) of the holding surface measured by moving the moving unit as height data, the height data being used for each of the multiple chuck tables; A reading unit capable of reading an information medium; and A control unit, The chuck table includes an information medium having identification information associated with the chuck table, the identification information being capable of distinguishing the chuck table from other chuck tables among the multiple chuck tables, and the information medium further includes the height data associated with the chuck table, the height data being obtained by recording each of the multiple chuck tables before processing; The reading unit reads the information medium provided on the chuck table of the processing device; The control unit includes: A height data recording unit for recording the height data and the identification information in association with each other; and A processing control unit for, when the chuck table includes the information medium, adjusting the height of the processing unit during processing according to the height data for the chuck table associated with the identification information read by the reading unit, and when the chuck table does not include the information medium, causing the height measuring unit to measure the height of one of the multiple chuck tables before processing.

2. A processing device, comprising: A chuck table having a holding surface for holding a workpiece and a frame surrounding the holding surface; A processing unit for processing the workpiece held by the chuck table; A moving unit for relatively moving the chuck table and the processing unit in the X-axis direction parallel to the holding surface and in the Y-axis direction perpendicular to the X-axis direction; A height measuring unit mounted on the processing unit, measuring the height (Z) at multiple coordinates (X, Y) of the holding surface measured by moving the moving unit as height data, the height data being used for each of the multiple chuck tables; A reading unit configured to read an information medium; and A control unit, The chuck table includes an information medium having identification information associated with the chuck table and the height data of the chuck table, the height data being obtained by recording each of the multiple chuck tables before processing; The control unit includes a processing control unit which, when the chuck table holds the information medium, adjusts the height of the processing unit during processing according to the height data of the chuck table read by the reading unit, and when the chuck table does not hold the information medium, causes the height measuring unit to measure the height of one of the plurality of chuck tables before processing.

3. The processing apparatus according to claim 1 or 2, wherein the information medium is composed of a two-dimensional code or a radio frequency tag for radio frequency identification, and the radio frequency identification can write and read information through wireless communication.

4. The processing apparatus according to claim 1 or 2, wherein the processing apparatus further includes setting a plurality of measurement lines at a predetermined interval on the holding surface before processing, the plurality of measurement lines extending in the X-axis direction and the Y-axis direction and including the plurality of coordinates (X, Y) of the holding surface.

5. The processing apparatus according to claim 1 or 2, wherein the information medium includes a table that stores the identification information and the height data for each of the plurality of chuck tables.

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