Compensated micromanometer
By using automatic calculation design of laser displacement components and displacement sensors in the compensation micropressure gauge, the problem of labor-intensive and error in the prior art is solved, and high accuracy and automated pressure metering is achieved.
Patent Information
- Application Number
- CN202011205467.1
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- Filing Date
- 2020-11-02
- Publication Date
- 2024-12-24
- Estimated Expiration
- 2040-11-02
AI Technical Summary
The existing compensation micropressure gauge has problems such as laboriousness, wear screws, large measurement errors, liquid wall hanging and balance adjustment difficulties when used, which affects the accuracy of pressure gauge.
The compensation micropressure gauge design includes fixed parts and moving parts, and the pressure difference is automatically calculated through laser displacement parts and displacement sensors to reduce human operation and measurement errors and achieve fully automatic measurement.
It effectively reduces measurement errors, improves the accuracy and efficiency of pressure metering, avoids screw wear and liquid wall hanging, and realizes automatic measurement.
Smart Images
Figure CN112197898B_ABST
Abstract
Description
Technical Field
[0001] The invention relates to the technical field of instrument equipment, and in particular to a compensated micromanometer. Background Art
[0002] Pressure measurement includes four parts: ultra-micro pressure, medium pressure, high pressure and vacuum, each with a separate calibration system. my country's calibration system stipulates that the measurement range of micro pressure is -2.5kPa to 2.5kPa. The main micro pressure standards are compensated pressure gauges, liquid pressure gauges, digital pressure gauges and micro pressure piston pressure gauges. Micro pressure measurement is widely used in key areas and priority topics included in the "Outline of the National Medium- and Long-Term Science and Technology Development Plan", especially the development and utilization of energy, water and mineral resources, environmental monitoring and protection, modern agriculture, manufacturing, pharmaceuticals, transportation, national defense and large aircraft manufacturing industries are inseparable from micro pressure measurement. For example, altimeters, airspeed indicators and atmospheric data testers in aerospace, aviation and large aircraft manufacturing all use micro pressure and micro differential pressure measurement technology to measure flight altitude, flight speed and atmospheric comprehensive data. Micro pressure measurement has played a significant role in many major projects and cutting-edge technology research in our country.
[0003] The existing compensated micromanometer is based on the U-tube pressure measurement principle. Under the action of pressure, a liquid column height difference is formed. The position of a movable container is changed by rotating a screw with a scale, and the liquid level is restored to a balanced position by observing the position of the tip and the reflection of the water surface in the container. The reading is taken according to the water column height difference corresponding to the scale. This instrument has the following defects in actual use:
[0004] First, the pressure working point must be set by manually turning the screw rod, which only increases by 2 mm per turn. The full scale of 2.5 kPa corresponds to approximately 250 mm and requires 125 turns. This is laborious and will wear out the screw rod during frequent rotation, causing errors in the readings.
[0005] Second, when taking readings, the position of the tip and the reflection on the water surface must be adjusted very carefully, which is time-consuming and laborious, and will also lead to large measurement errors. When measuring the compensating pressure gauge, the two pressure gauges are adjusted for balance position at the same time. When the balance position of the standard pressure gauge is adjusted, the balance of the pressure gauge under test will change, and when the balance position of the pressure gauge under test is adjusted, the balance of the standard pressure gauge will also be destroyed;
[0006] Third, the compensated micromanometer changes the position of the container by rotating the angle of the screw. The angle of rotation of the screw corresponds to a fixed value of liquid column change, that is, pressure change. The processing accuracy, shape error and mechanical structure coordination of the screw directly affect the accuracy of the reading.
[0007] Fourth, when the compensated micromanometer is balanced and adjusted, only the liquid level of a container can be observed. In actual measurement, the liquid will hang on the wall, causing the volume of the liquid to change. The volume change of the connecting pipe under pressure, temperature change, volume change of the connecting pipe under pressure, and liquid evaporation will also cause the volume to change. In this way, the actual liquid column difference will deviate from the reading indicated by the dial. Summary of the invention
[0008] In view of this, an embodiment of the present invention provides a compensated micromanometer, the main purpose of which is to provide a compensated micromanometer capable of reducing measurement errors.
[0009] In order to achieve the above object, the present invention mainly provides the following technical solutions:
[0010] An embodiment of the present invention provides a compensated micromanometer, comprising:
[0011] A fixing component, the fixing component comprising a base and a fixing container, the fixing container being arranged on the base and used for loading a liquid medium;
[0012] A moving component, the moving component includes a lifting component, a displacement sensor and a first moving container component, the displacement sensor is arranged on the base, the lifting component includes a lifting platform and a lifting track, the lifting track is arranged on the base, the lifting platform is arranged on the lifting track, the first moving container component is arranged on the lifting platform, the first moving container component includes a laser displacement component and a reflection component, the laser displacement component is arranged on the upper part of the reflection component, the reflection component includes a stable bracket, a reflector and a loading cavity, the loading cavity and the fixed container are communicated with each other through a first conduit, the reflector is arranged in the loading cavity, the stable bracket is movably connected to the reflector, the laser displacement component includes a processor, a transmitter and a receiver, the processor is respectively connected to the transmitter and the receiver, the transmitter can emit light toward the reflector, and the receiver can receive light reflected by the reflector.
[0013] Furthermore, the reflector includes a reflecting platform, a floating platform and a movable frame, the floating platform is arranged in the loading cavity, the movable frame is arranged at both ends of the floating platform and is movably connected to the stable bracket, the reflecting platform is arranged in the middle of the floating platform, and the reflecting platform has a reflecting plane for reflecting light.
[0014] Furthermore, the stabilizing bracket has a first notch, a second notch and a light-transmitting hole, the first notch and the second notch are arranged at both ends of the floating platform, the movable frame passes through the first notch and the second notch respectively, and the light-transmitting hole is arranged between the reflecting platform and the laser displacement component.
[0015] Furthermore, the laser displacement component also includes a lens, and the lens is arranged at the lower part of the receiver.
[0016] Furthermore, the second movable container part and the third movable container part are respectively fixedly connected to the base and are arranged on both sides of the fixed container.
[0017] Furthermore, the lifting component also includes a driving component, which is arranged on the top of the fixed container, and the output end of the driving component is connected to the lifting track to drive the lifting track to rotate.
[0018] Furthermore, the displacement sensor is a grating ruler.
[0019] Furthermore, the inner wall surface of the fixed container is covered with an anti-wall coating.
[0020] Furthermore, a level is provided, wherein the level is arranged on the base.
[0021] Furthermore, a leveling component is provided at the bottom of the base.
[0022] Compared with the prior art, the present invention has the following technical effects:
[0023] In the technical solution provided by the embodiment of the present invention, the function of the fixed component is to fix the fixed container, the fixed component includes a base and a fixed container, the fixed container is arranged on the base, and is used to load the liquid medium; the function of the moving component is to obtain the change of the page height through the change of the liquid level in the moving container component, so as to calculate the pressure difference, the moving component includes a lifting component, a displacement sensor and a moving container component, the displacement sensor is arranged on the base, the lifting component includes a lifting platform and a lifting track, the lifting track is arranged on the base, the lifting platform is arranged on the lifting track, the moving container component is arranged on the lifting platform, the moving container component includes a laser displacement component and a reflection component, the laser displacement component is arranged on the upper part of the reflection component, The reflective component includes a stable bracket, a reflector and a loading cavity. The loading cavity and the fixed container are connected to each other through a first conduit. The reflector is arranged in the loading cavity. The stable bracket is movably connected to the reflector. The laser displacement component includes a processor, a transmitter and a receiver. The processor is respectively connected to the transmitter and the receiver. The transmitter can emit light toward the reflector, and the receiver can receive the light reflected by the reflector. Compared with the prior art, the position of a movable container is changed by rotating a screw with a scale, and the liquid level is restored to a balanced position by observing the position of the reflection of the tip and the water surface in the container. The reading is taken according to the height difference of the water column corresponding to the scale. The setting of the pressure working point must be performed by manually turning the screw rod. Each turn only raises 2 mm, and the full scale of 2.5 kPa corresponds to about 250 mm, which requires 125 turns. It is laborious and will wear the screw during frequent turns, causing errors in the readings. When reading, the position of the tip and the reflection on the water surface must be adjusted very carefully, which is time-consuming and laborious, and will also cause large measurement errors. When measuring the compensating pressure gauge, the two pressure gauges are adjusted to the balance position at the same time. When the standard pressure gauge is balanced and adjusted, the balance of the pressure gauge being tested will change, and when the balance position of the pressure gauge being tested is adjusted, the balance of the standard pressure gauge will also be destroyed. In this technical solution, the pages in the loading cavity and the fixed container are first kept consistent, and then the set working point is input into the single-chip microcomputer. The lifting platform drives the mobile container component to move a corresponding displacement distance, the displacement sensor reads the position of the mobile container component, obtains the actual displacement distance, and then introduces pressurized gas into the fixed container, so that the liquid in the fixed container enters the loading cavity through the first conduit, and the transmitter emits light toward the reflector, and the receiver can receive the light reflected by the reflector. By comparing the distance between the two displacements of the reflector, the actual pressure value of the pressurized gas introduced into the fixed container is calculated, thereby achieving the technical effect of reducing the measurement error. In addition, the entire process is controlled by a single-chip microcomputer, and there is no need for manual rotation of the screw rod. At the same time, there is no need for human eye observation to measure the degree, thereby realizing fully automatic measurement. BRIEF DESCRIPTION OF THE DRAWINGS
[0024] Figure 1A schematic structural diagram of a compensated micromanometer provided by an embodiment of the present invention;
[0025] Figure 2 A schematic structural diagram of a first mobile container component provided by an embodiment of the present invention;
[0026] Figure 3 A schematic diagram of the structure of a first mobile container component in use state provided by an embodiment of the present invention. DETAILED DESCRIPTION
[0027] The present invention is further described in detail below in conjunction with the accompanying drawings and embodiments.
[0028] like Figures 1 to 3 As shown, an embodiment of the present invention provides a compensated micromanometer, comprising:
[0029] A fixed component, the fixed component includes a base 11 and a fixed container 12, the fixed container 12 is arranged on the base 11 and is used to load a liquid medium;
[0030] The moving component includes a lifting component 21, a displacement sensor 22 and a first moving container component 23. The displacement sensor 22 is arranged on the base 11. The lifting component 21 includes a lifting platform 211 and a lifting track 212. The lifting track 212 is arranged on the base 11. The lifting platform 211 is arranged on the lifting track 212. The first moving container component 23 is arranged on the lifting platform 211. The first moving container component 23 includes a laser displacement component 25 and a reflection component 24. The laser displacement component 25 is arranged on the upper part of the reflection component 24. The reflection component 24 includes a laser displacement component 25 and a reflection component 24. The laser displacement component 25 comprises a stabilizing bracket 241, a reflector 242 and a loading cavity 243. The loading cavity 243 is interconnected with the fixed container 12 through the first conduit 13. The reflector 242 is arranged in the loading cavity 243. The stabilizing bracket 241 is movably connected to the reflector 242. The laser displacement component 25 comprises a processor 251, a transmitter 252 and a receiver 253. The processor 251 is respectively connected to the transmitter 252 and the receiver 253. The transmitter 252 can emit light toward the reflector 242, and the receiver 253 can receive light reflected by the reflector 242.
[0031] In the technical solution provided by the embodiment of the present invention, the function of the fixed component is to fix the fixed container 12, the fixed component includes a base 11 and a fixed container 12, the fixed container 12 is arranged on the base 11, and is used to load the liquid medium; the function of the movable component is to obtain the change of the page height through the change of the liquid level in the first movable container component 23, so as to calculate the pressure difference, the movable component includes a lifting component 21, a displacement sensor 22 and a first movable container component 23, the displacement sensor 22 is arranged on the base 11, the lifting component 21 includes a lifting platform 211 and a lifting rail 212, the lifting rail 212 is arranged on the base 11, the lifting platform 211 is arranged on the lifting rail 212, the first movable container component 23 is arranged on the lifting platform 211, the first movable container component 23 includes a laser displacement component 25 and a reflection component 24, the laser displacement component 25 is arranged on the upper part of the reflection component 24, and the reflection component 24 includes The stable bracket 241, the reflector 242 and the loading chamber 243 are connected to each other through the first conduit 13. The reflector 242 is arranged in the loading chamber 243. The stable bracket 241 is movably connected to the reflector 242. The laser displacement component 25 includes a processor 251, a transmitter 252 and a receiver 253. The processor 251 is connected to the transmitter 252 and the receiver 253 respectively. The transmitter 252 can emit light toward the reflector 242, and the receiver 253 can receive the light reflected by the reflector 242. Compared with the prior art, the position of a movable container is changed by rotating a screw with a scale, and the liquid level is restored to a balanced position by observing the position of the reflection of the tip and the water surface in the container. The reading is taken according to the height difference of the water column corresponding to the scale. The setting of the pressure working point must be carried out by manually turning the screw rod. Each turn only raises 2 mm, and the full scale is 2.5kPa corresponds to approximately 250 mm and requires 125 turns, which is laborious and will wear the screw during frequent rotation, causing errors in the readings. When reading, the position of the tip and the reflection on the water surface must be carefully adjusted, which is time-consuming and laborious, and will also cause large measurement errors. When measuring the compensating pressure gauge, the two pressure gauges are simultaneously adjusted for balance position. When the standard pressure gauge is balanced and adjusted, the balance of the pressure gauge being tested will change, and when the balance position of the pressure gauge being tested is adjusted, the balance of the standard pressure gauge will also be destroyed. In this technical solution, the pages in the loading cavity 243 and the fixed container 12 are first kept consistent, and then the set working point is input into the single-chip microcomputer, and the lifting platform 211 drives the first movable container component 23 to move the corresponding displacement The displacement sensor 22 reads the position of the first movable container component 23 to obtain the actual displacement distance, and then introduces pressurized gas into the fixed container 12, so that the liquid in the fixed container 12 enters the loading cavity 243 through the first conduit 13. The transmitter 252 emits light toward the reflector 242, and the receiver 253 can receive the light reflected by the reflector 242. By comparing the distance between the two displacements of the reflector 242, the actual pressure value of the pressurized gas introduced into the fixed container 12 is calculated, thereby achieving the technical effect of reducing the measurement error. In addition, the entire process is controlled by a single-chip microcomputer, and there is no need for manual rotation of the screw rod. At the same time, there is no need for human observation to measure the degree, and fully automatic measurement is achieved. .
[0032] The function of the above-mentioned fixed component is to fix the fixed container 12. The fixed component includes a base 11 and a fixed container 12. The fixed container 12 is arranged on the base 11 and is used to load a liquid medium. The fixed container 12 contains a liquid, and the liquid is usually water. The fixed container 12 is arranged on the base 11. The base 11 is placed flat on a desktop or on the ground, and the two ends of the base 11 need to be in a parallel state. Therefore, a spirit level can be set on the base 11, or a leveling component can be set at the bottom of the base 11 to facilitate leveling of the base 11; the function of the moving component is to obtain the change of the page height through the change of the liquid level in the first moving container component 23, so as to calculate the pressure difference. The moving component includes a lifting component 21, a displacement sensor 22 and a first moving container component 23. A movable container component 23, a displacement sensor 22 is arranged on the base 11, and the displacement sensor 22 adopts a grating ruler. The grating ruler is a measurement feedback device that works on the optical principle of the grating, and can accurately measure the displacement distance of the first movable container component 23. The grating ruler belongs to the existing equipment and is not repeated here. The lifting component 21 includes a lifting platform 211 and a lifting track 212. The lifting track 212 is arranged on the base 11, and the lifting platform 211 is arranged on the lifting track 212. The first movable container component 23 is arranged on the lifting platform 211. The first movable container component 23 includes a laser displacement component 25 and a reflection component 24. The laser displacement component 25 is arranged on the upper part of the reflection component 24. The reflection component 24 includes a stabilizing bracket 241 and a reflector 242. 42 and a loading cavity 243, the loading cavity 243 and the fixed container 12 are connected to each other through the first conduit 13, the reflector 242 is arranged in the loading cavity 243, the stabilizing bracket 241 is movably connected to the reflector 242, the laser displacement component 25 includes a processor 251, a transmitter 252 and a receiver 253, the processor 251 is respectively connected to the transmitter 252 and the receiver 253, the transmitter 252 can emit light toward the reflector 242, the receiver 253 can receive the light reflected by the reflector 242, the transmitter 252 adopts a semiconductor laser transmitter 252, the receiver 253 adopts a linear CCD array receiver 253, and the processor 251 adopts an existing signal processor 251. First, the device is zero-differential pressure balanced. Adjustment is performed to keep the liquid level of the first movable container component 23 consistent with the liquid level of the fixed container 12, and the readings of the grating ruler and the laser displacement meter are cleared respectively, and a set working point height h is input to the lifting component 21 through a computer or a single-chip microcomputer, and the set working point height h is determined by the height difference between the liquid level of the first movable container component 23 and the liquid level of the fixed container 12, and then the computer or the single-chip microcomputer inputs a certain amount of pressurized gas to the liquid surface in the fixed container 12 through a pressure input device, and the liquid in the fixed container 12 enters the loading cavity 243 through the first conduit 13, so that the liquid level in the loading cavity 243 rises, thereby driving the position of the reflector 242 to rise, and the stabilizing bracket 241 can adjust the position of the reflector 242,The reflector 242 can only move longitudinally. The processor 251 is respectively connected to the transmitter 252 and the receiver 253. The transmitter 252 can emit light toward the reflector 242, and the receiver 253 can receive the light reflected by the reflector 242. Before the pressure gas is introduced into the fixed container 12, the transmitter 252 emits light toward the reflector 242, and the receiver 253 can receive the light reflected by the reflector 242, thereby obtaining the starting position of the reflector 242. After the pressure gas is introduced into the fixed container 12 and the liquid level in the loading cavity 243 is stable, the transmitter 252 emits light toward the reflector 242, and the receiver 253 can receive the light reflected by the reflector 242, thereby obtaining the moving position of the reflector 242. The transmitter 252 obtains the moving distance between the starting position and the moving position, and then according to the formula:
[0033] P=ρgh
[0034] Wherein, P is the pressure value;
[0035] ρ is the density of the liquid;
[0036] g is the local gravitational acceleration;
[0037] h is the relative height;
[0038] The actual pressure value of the pressurized gas input to the liquid surface in the fixed container 12 is calculated.
[0039] Furthermore, the reflector 242 includes a reflecting platform 2421, a floating platform 2422 and a movable frame 2423. The floating platform 2422 is arranged in the loading cavity 243, the movable frame 2423 is arranged at both ends of the floating platform 2422 and is movably connected to the stabilizing bracket 241, and the reflecting platform 2421 is arranged in the middle of the floating platform 2422. The reflecting platform 2421 has a reflecting plane for reflecting light. In this embodiment, the reflector 242 is further defined, and the reflector 242 needs to be kept horizontally placed. The reflector 242 includes a reflection platform 2421, a floating platform 2422 and a movable frame 2423. The floating platform 2422 can float in the loading cavity 243. The movable frames 2423 are arranged at both ends of the floating platform 2422. The movable frames 2423 are movably connected to the stable bracket 241, so that the movable frame 2423 can move longitudinally on the stable bracket 241. The reflection platform 2421 is arranged on the floating platform 2422, and the reflection platform 2421 is fixed on the floating platform 2422. When the liquid in the fixed container 12 enters the loading cavity 243, the floating platform 2422 may shake. Therefore, when the floating platform 2422 and the liquid in the loading cavity 243 are stable, the position of the reflection platform 2421 is detected by the laser displacement component 25, so as to achieve the technical effect of conveniently obtaining the starting position and the moving position of the reflection platform 2421.
[0040] Further, the stable bracket 241 has a first notch, a second notch and a light-transmitting hole 2411, the first notch and the second notch are arranged at both ends of the floating platform 2422, the movable frame 2423 passes through the first notch and the second notch respectively, and the light-transmitting hole 2411 is arranged between the reflection platform 2421 and the laser displacement component 25. In this embodiment, the stable bracket 241 is further defined, the stable bracket 241 has a first notch and a second notch at both ends, the movable frame 2423 passes through the first notch and the second notch respectively, the first notch and the second notch are rectangular, and are arranged longitudinally, so that the first notch and the second notch can limit the moving direction of the movable frame 2423, so that the movable frame 2423 can only move longitudinally along the extension direction of the first notch and the second notch, and the light-transmitting hole 2411 is arranged in the middle position of the stable bracket 241, and is located between the reflection platform 2421 and the laser displacement component 25, so that the light emitted by the laser displacement component 25 can be irradiated on the reflection platform 2421, and the reflection platform 2421 can reflect the light onto the receiver 253, which can not only improve the detection accuracy, but also improve the applicability and convenience; optionally, the laser displacement component 25 also includes a first lens 254, and the first lens 254 is arranged at the lower part of the receiver 253. The first lens 254 usually adopts a convex lens, which can focus the light reflected by the reflection platform 2421 on the receiver 253, thereby achieving the technical effect of focusing the light; optionally, the second lens 255 is also arranged at the lower part of the semiconductor laser emitter 252, which can focus the light emitted by the semiconductor laser emitter 252 and irradiate it on the reflection platform 2421.
[0041] It should be noted that the laser displacement component 25 adopts the optical triangulation measurement principle, and the monochromatic light emitted by the semiconductor laser emitter 252 is focused by the second lens 255 onto the reflection platform 2421. The reflected light is first collected and projected onto the linear CCD array receiver 253; the signal processor 251 calculates the position of the light spot on the linear CCD array receiver 253 through trigonometric functions to obtain the distance to the object, and its measurement uncertainty is less than 7μ (k=2) and the measurement range is 10mm.
[0042] Further, the second movable container part 231 and the third movable container part 232 are respectively fixedly connected to the base 11 and are arranged on both sides of the fixed container 12. In this embodiment, the second movable container part 231 and the third movable container part 232 are added, the second movable container part 231 and the third movable container part 232 are respectively fixedly connected to the base 11 and are arranged on both sides of the fixed container 12, the second movable container part 231 and the third movable container part 232 are respectively connected through the second conduit and the third conduit, that is, the second movable container part 231 is connected to the fixed container 12 through the second conduit, and the third movable container part is connected to the fixed container 12 through the third conduit. The second movable container part 231 and the third movable container part 232 are used to detect whether the equilibrium position of the fixed container 12 changes. The structures of the second movable container part 231 and the third movable container part 232 are the same as those of the first movable container part, and will not be repeated here.
[0043] Furthermore, the lifting component 21 also includes a driving component 213, which is arranged on the top of the fixed container 12, and the output end of the driving component 213 is connected to the lifting track 212, which is used to drive the lifting track 212 to rotate. In this embodiment, the lifting component 21 is further defined, and the driving component 213 is used to drive the lifting track 212 to rotate, thereby driving the lifting platform 211 and the mobile container component 23 to move longitudinally, so as to achieve the technical effect of driving the lifting platform 211 to move; optionally, the driving component 213 adopts a program-controlled stepper motor, and the lifting track 212 adopts a ball screw, and the stepper motor drives the ball screw to move the lifting platform 211 up and down along the ball screw. The verticality of the lifting track 212 and the base must be less than 2', the parallelism of the lifting track 212 must be less than 0.02mm, and the straightness of the lifting track 212 must be less than 0.01mm, so that the lifting platform 211 can always maintain the horizontal position of the platform during the up and down movement, and the introduced measurement uncertainty is less than 3ppm.
[0044] Furthermore, the inner wall surface of the fixed container 12 is covered with an anti-wall coating. In this embodiment, an anti-wall coating is added. Since the inner wall of the fixed container 12 has a certain adhesion, the medium will adhere to the inner wall, thereby causing the wall hanging phenomenon. Therefore, an anti-wall coating is provided on the inner wall of the fixed container 12. The anti-wall coating is usually made of Teflon coating, which can reduce the cohesive force between liquid molecules, thereby achieving the technical effect of reducing the adhesion of the inner surface of the fixed container 12 to the medium; optionally, an anti-wall coating is provided on the inner wall of the loading cavity 243, thereby achieving the technical effect of reducing the adhesion of the inner surface of the loading cavity 243 to the medium.
[0045] Optionally, a temperature compensation device is added, which is respectively arranged in the fixed container 12, the first movable container part 23 and the first conduit 13, and can monitor and compensate the ambient temperature in the fixed container 12, the first movable container part 23 and the first conduit 13. Considering the density change of the liquid in the first conduit 13 under the action of pressure, the pressure reproduction calculation formula of the pressure gauge should be:
[0046]
[0047] Where Δp is the pressure difference between the pressurized port and the reference port;
[0048] g l is the local gravitational acceleration;
[0049] ρ(h) is the density of the medium under the pressure at each level and is a function of the height of the liquid column;
[0050] βt is the temperature coefficient of medium density;
[0051] h 0 It is the state of the liquid column when the pressure at the pressurized port and the reference port are equal. When in use, take h 0 =0;
[0052] h 1 The height difference of the liquid column at the actual working point;
[0053] ΔT is the temperature difference from the established ρ(h) function;
[0054] The pressure difference between the pressurized port and the reference port can be calculated by the above formula, thereby improving the accuracy of the detection.
[0055] The above is only a specific embodiment of the present invention, but the protection scope of the present invention is not limited thereto. Any person skilled in the art can easily think of changes or substitutions within the technical scope disclosed by the present invention, which should be included in the protection scope of the present invention. Therefore, the protection scope of the present invention should be based on the protection scope of the claims.
Claims
1. A compensated micromanometer, characterized in that: include: A fixing component, the fixing component comprising a base and a fixing container, the fixing container being arranged on the base and used for loading a liquid medium; A moving component, the moving component includes a lifting component, a displacement sensor and a first moving container component, the displacement sensor is arranged on the base, the lifting component includes a lifting platform and a lifting track, the lifting track is arranged on the base, the lifting platform is arranged on the lifting track, the first moving container component is arranged on the lifting platform, the first moving container component includes a laser displacement component and a reflection component, the laser displacement component is arranged on the upper part of the reflection component, the reflection component includes a stable bracket, a reflector and a loading cavity, the loading cavity and the fixed container are communicated with each other through a first conduit, the reflector is arranged in the loading cavity, the stable bracket is movably connected to the reflector, the laser displacement component includes a processor, a transmitter and a receiver, the processor is respectively connected to the transmitter and the receiver, the transmitter can emit light toward the reflector, and the receiver can receive light reflected by the reflector; The temperature compensation device is respectively arranged in the fixed container, the first movable container component and the first conduit. The pressure reproduction calculation formula is: Where Δp is the pressure difference between the pressurized port and the reference port; g l is the local gravitational acceleration; ρ(h) is the density of the medium under the pressure at each level and is a function of the height of the liquid column; βt is the temperature coefficient of medium density; h0 is the state of the liquid column when the pressure at the pressurized port and the reference port are equal. When in use, take h0=0; h1 height difference of liquid column at actual working point; ΔT is the temperature difference from the established ρ(h) function; A level, the level being arranged on the base; A leveling component is arranged at the bottom of the base.
2. The compensated micromanometer according to claim 1, characterized in that: The reflector includes a reflection platform, a floating platform and a movable frame. The floating platform is arranged in the loading cavity. The movable frame is arranged at both ends of the floating platform and is movably connected to the stable bracket. The reflection platform is arranged in the middle of the floating platform. The reflection platform has a reflection plane for reflecting light.
3. The compensated micromanometer according to claim 2, characterized in that: The stabilizing bracket has a first notch, a second notch and a light-transmitting hole, the first notch and the second notch are arranged at two ends of the floating platform, the movable frame passes through the first notch and the second notch respectively, and the light-transmitting hole is arranged between the reflecting platform and the laser displacement component.
4. The compensated micromanometer according to claim 3, characterized in that: The laser displacement component further includes a first lens, which is disposed at a lower portion of the receiver.
5. The compensated micromanometer according to claim 1, characterized in that: Also includes: The second movable container part and the third movable container part are respectively fixedly connected to the base and arranged on both sides of the fixed container.
6. The compensated micromanometer according to any one of claims 1 to 5, characterized in that: The lifting component also includes a driving component, which is arranged on the top of the fixed container. The output end of the driving component is connected to the lifting track to drive the lifting track to rotate.
7. The compensated micromanometer according to any one of claims 1 to 5, characterized in that: The displacement sensor is a grating ruler.
8. The compensated micromanometer according to any one of claims 1 to 5, characterized in that: The inner wall surface of the fixed container is covered with an anti-wall coating.