Semiconductor wet processing valve

Abstract

The utility model relates to a semiconductor wet processing valve, which comprises a valve body, the valve body comprises a conducting component, the conducting component is connected with a control component, the conducting component is provided with a liquid inlet channel and a liquid outlet channel, an accommodating cavity is arranged in the control component, the bottom of the accommodating cavity is provided with a control cavity communicated with the liquid inlet channel and the liquid outlet channel, and the control cavity is communicated with the liquid inlet channel and the liquid outlet channel. A control diaphragm assembly is arranged in the control cavity, the appearance of the bottom of the control diaphragm assembly is attached to the control cavity, an opening and closing executing mechanism is arranged on the control diaphragm assembly and located in the containing cavity, and a control assembly is arranged on the opening and closing executing mechanism. Therefore, the independent control diaphragm assembly is arranged, conduction control over the liquid medium can be achieved through deformation of the control diaphragm assembly, timely plugging can be achieved, and quick response to opening and closing of the valve body is achieved. The shape of the bottom of the control diaphragm assembly is attached to the control cavity, hard friction caused by matching is avoided, and combination abrasion of the control diaphragm assembly caused by hard friction can be reduced.

Description

Technical Field

[0001] The utility model relates to a processing valve, in particular to a semiconductor wet processing valve. Background Art

[0002] For semiconductor processing equipment, in order to facilitate the transmission of liquid media under specific hydraulic conditions, valve bodies involved in the control are often allocated. Currently, conventional valve bodies of this type are mainly based on plug-type line sealing structures.

[0003] During actual use, this sealing method will cause greater wear during the opening and closing of the valve, which will lead to particles on the surface of the material. These particles will enter the processing area through the liquid medium, affecting the final processing quality of the semiconductor.

[0004] At the same time, the existing structure has a high wear rate, which results in a reduction in the blocking control effect of the valve body and a shortened service life after long-term use.

[0005] In view of the above-mentioned defects, the designers have actively carried out research and innovation in order to create a semiconductor wet processing valve that has greater industrial utilization value. Utility Model Content

[0006] In order to solve the above technical problems, the purpose of the utility model is to provide a semiconductor wet processing valve.

[0007] The semiconductor wet processing valve of the utility model comprises a valve body, the valve body comprises a conducting component, the conducting component is connected to a control component, wherein: the conducting component is provided with a liquid inlet channel and a liquid outlet channel, the control component is provided with a accommodating cavity, the bottom of the accommodating cavity is provided with a control cavity which is conductive with the liquid inlet channel and the liquid outlet channel, the control cavity is provided with a control diaphragm assembly, the bottom shape of the control diaphragm assembly is fitted with the control cavity, the control diaphragm assembly is provided with an opening and closing actuator, the opening and closing actuator is located in the accommodating cavity, the opening and closing actuator is provided with a control component, and when in a default state, the bottom of the control diaphragm assembly abuts against the control cavity, and the liquid inlet channel and the liquid outlet channel are not conductive with each other.

[0008] Furthermore, in the above-mentioned semiconductor wet processing valve, the control diaphragm assembly includes a diaphragm body, a threaded rod is provided at the upper end of the diaphragm body, the threaded rod is connected to the opening and closing actuator, and a plane contact structure is provided at the bottom of the diaphragm body, and the shape of the plane contact structure is in contact with the control cavity.

[0009] Furthermore, in the above-mentioned semiconductor wet processing valve, an expansion limit plate is distributed at the lower end of the diaphragm body, and the expansion limit plate is connected to the planar contact structure through a connecting guide bar.

[0010] Furthermore, in the above-mentioned semiconductor wet processing valve, the opening and closing actuator includes an actuator shaft, the upper end of the actuator shaft is in contact with the control component, a laterally extending contact block is provided on the actuator shaft, a normally open elastic control component is provided at the lower end of the actuator shaft, the upper end of the normally open elastic control component is in contact with the contact block, the lower end of the normally open elastic control component is in contact with the inner bottom of the accommodating cavity, the upper end of the actuator shaft is provided with a normally closed elastic control component, the lower end of the normally closed elastic control component is in contact with the contact block, the upper end of the normally closed elastic control component is in contact with the inner top of the accommodating cavity, and the elastic coefficient of the normally closed elastic control component is greater than the elastic coefficient of the normally open elastic control component.

[0011] Furthermore, in the above-mentioned semiconductor wet processing valve, the contact block does not contact the inner wall of the accommodating cavity, a contact groove is provided at the side end of the contact block, a shaft sealing ring is provided in the contact groove, and a lower end sealing ring is provided at the lower end of the actuator shaft.

[0012] Furthermore, in the above-mentioned semiconductor wet processing valve, a lower conducting channel is provided at the inner bottom of the accommodating cavity, the lower end of the actuator shaft is provided in the lower conducting channel, and the lower end of the normally open elastic control member is sleeved on the outer side of the lower conducting channel; an upper conducting channel is provided at the inner top of the accommodating cavity, the lower end of the opening and closing actuator is provided in the upper conducting channel, and the upper end of the normally closed elastic control member is sleeved on the outer side of the upper conducting channel.

[0013] Furthermore, in the above-mentioned semiconductor wet processing valve, the control component includes a manual shaft, the lower end of the manual shaft extends into the accommodating cavity and contacts the upper end of the opening and closing actuator, a stroke limiter is threadedly connected to the manual shaft, and a stroke knob is provided at the upper end of the manual shaft.

[0014] Furthermore, in the above-mentioned semiconductor wet processing valve, an expansion head is provided at the lower end of the manual shaft, an upper end sealing ring is provided on the expansion head, the stroke limiter is an internal threaded nut, and the stroke knob is connected to the manual shaft through a connecting screw.

[0015] Furthermore, in the semiconductor wet processing valve mentioned above, the liquid inlet channel and the liquid outlet channel are of L-shaped structure, and the outer ends of the liquid inlet channel and the liquid outlet channel are both threadedly connected with connecting nuts.

[0016] Furthermore, in the above-mentioned semiconductor wet processing valve, a sealing impact ring is provided on the inner side of the connecting nut.

[0017] By means of the above solution, the utility model has at least the following advantages:

[0018] 1. An independent control diaphragm assembly is provided, which can realize the conduction control of the liquid medium through its deformation, and can achieve timely blocking and rapid response of the opening and closing of the valve body.

[0019] 2. The bottom shape of the control diaphragm assembly fits the control cavity, and no hard friction occurs due to the fit. This can minimize the combined wear of the control diaphragm assembly caused by hard friction and reduce the generation of particulate matter.

[0020] 3. An opening and closing actuator is provided to adjust and control the compressive stress of the diaphragm assembly to meet the conduction control of the liquid medium under different pressure conditions.

[0021] 4. It is equipped with independent control components, which can adjust the free travel of the opening and closing actuators and the final release pressure to meet the different release thresholds of low-pressure and high-pressure media.

[0022] 5. Additional connecting nuts can be added to adapt to different pipeline structures.

[0023] 6. The overall structure is simple and easy to assemble and use.

[0024] The above description is only an overview of the technical solution of the utility model. In order to more clearly understand the technical means of the utility model and implement it according to the contents of the specification, the following is a detailed description of the preferred embodiments of the utility model in conjunction with the accompanying drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] Figure 1 It is a schematic diagram of the internal structure of a semiconductor wet processing valve.

[0026] The meanings of the reference numerals in the drawings are as follows.

[0027] 1 Conducting component 2 Control component

[0028] 3 Liquid inlet channel 4 Liquid outlet channel

[0029] 5 Accommodating chamber 6 Control diaphragm assembly

[0030] 7 Threaded rod 8 Flat contact structure

[0031] 9 Extended limit piece 10 Connecting guide bar

[0032] 11 Actuator shaft 12 Contact block

[0033] 13 Normally open elastic control element 14 Normally closed elastic control element

[0034] 15 Shaft seal ring 16 Lower seal ring

[0035] 17 Manual axis 18 Travel limiter

[0036] 19 Travel knob 20 Upper sealing ring

[0037] 21 Connecting screw 22 Connecting nut

[0038] 23 Sealing impact ring DETAILED DESCRIPTION

[0039] The following is a further detailed description of the specific implementation of the present invention in conjunction with the accompanying drawings and examples. The following examples are used to illustrate the present invention, but are not intended to limit the scope of the present invention.

[0040] like Figure 1 The semiconductor wet processing valve includes a valve body, the valve body includes a conducting component 1, and the conducting component 1 is connected to a control component 2, which is different in that: the conducting component 1 is provided with a liquid inlet channel 3 and a liquid outlet channel 4 for guiding the liquid flow. At the same time, a receiving chamber 5 is provided in the control component 2, and a control chamber (not shown in the figure) that is in communication with the liquid inlet channel 3 and the liquid outlet channel 4 is provided at the bottom of the receiving chamber 5, and a control diaphragm assembly 6 is provided in the control chamber for physical control of whether the subsequent liquid flow is conducted or not. During the implementation, the bottom shape of the control diaphragm assembly 6 fits the control chamber to avoid contact wear due to the difference in shape, effectively reduce the generation of particulate matter, and improve the cleanliness of the valve during use. In addition, in order to meet the actual opening and closing formation control of the control diaphragm assembly 6 and adapt to different liquid flow conduction flow and hydraulic pressure control, an opening and closing actuator is provided on the control diaphragm assembly 6, and the opening and closing actuator is located in the receiving chamber 5. Furthermore, considering the convenience of external adjustment control, the utility model is provided with a control component on the opening and closing actuator. If flow control for low-pressure media is required, an adjustable gap can be preset between the opening and closing actuator and the control component after assembly.

[0041] (Normally open model) In the default state, the bottom of the control diaphragm assembly 6 is against the control cavity, and the liquid inlet channel 3 and the liquid outlet channel 4 are not connected to each other. In this way, the default normally closed use state requirements can be met.

[0042] In combination with a preferred embodiment of the utility model, the control diaphragm assembly 6 includes a diaphragm body, and a threaded rod 7 is provided at the upper end of the diaphragm body, and the threaded rod 7 is connected to the opening and closing actuator. In this way, it is convenient to control whether it is conductive and the conductive flow rate through the opening and closing actuator in the future. At the same time, a plane contact structure 8 is provided at the bottom of the diaphragm body, and the shape of the plane contact structure 8 fits the control cavity. In this way, the sealing effect during closing can be met, and scratches due to mismatch in shape can be avoided, resulting in the defect of falling particles. In addition, the utility model is provided with an expansion limit plate 9 at the lower end of the diaphragm body, and the expansion limit plate 9 is connected to the plane contact structure 8 through a connecting guide bar 10. In this way, when in contact with the control cavity, the plane contact structure 8 has an appropriate deformation rebound reset effect, so that it can better block the control cavity and no leakage will occur. Furthermore, when the utility model is reset from the conducting state to the off state, the planar contact structure 8 can be reset in time due to the shape impacted by the liquid flow by expanding the limit piece 9 and cooperating with the connecting guide bar 10, so as to achieve effective fitting and combination with the control cavity.

[0043] Further, the adopted opening and closing actuator includes an actuator shaft 11, the upper end of which contacts the control assembly, so as to limit the free travel of the actuator shaft 11 by being restricted by the control assembly, so as to adjust the flow rate. At the same time, a contact block 12 extending laterally is distributed on the actuator shaft 11, and a normally open elastic control member 13 is arranged at the lower end of the actuator shaft 11, the upper end of which contacts the contact block 12, and the lower end of which contacts the inner bottom of the accommodating chamber 5. In addition, a normally closed elastic control member 14 is arranged at the upper end of the actuator shaft 11, the lower end of which contacts the contact block 12, and the upper end of which contacts the inner top of the accommodating chamber 5. During the implementation, the elastic coefficient of the normally closed elastic control member 14 is greater than the elastic coefficient of the normally open elastic control member 13. In this way, it is ensured that under normal hydraulic conditions, the normally closed elastic control member 14 can achieve effective downward pressure to meet the use requirements of the normally closed state. Considering the convenience of implementation, the normally closed elastic control member 14 and the normally open elastic control member 13 can use valve springs of appropriate types. In this way, the manufacturing cost is reduced, the difficulty of assembly is reduced, and the normally closed use requirements can be met. After the control component is released and opened, the up and down floating of the actuator shaft 11 can be achieved under the premise of appropriate hydraulic pressure, which is used for corresponding conduction control. Furthermore, during actual manufacturing, the actuator shaft 11 and the control diaphragm assembly 6 can also be selected as an integrated structure to form a whole and reduce assembly steps.

[0044] During the implementation, the contact block 12 does not contact the inner wall of the accommodating chamber 5. The existence of the contact block 12 assists the execution shaft 11 to move up and down better, avoiding unnecessary skew. That is to say, when the execution shaft 11 is skewed, the contact block 12 can slightly contact the accommodating chamber 5 to straighten the execution shaft 11. In the default state, it does not contact the inner wall of the accommodating chamber 5 to avoid friction resistance. At the same time, a contact groove is provided at the side end of the contact block 12, and a shaft sealing ring 15 is provided in the contact groove. In this way, the execution shaft 11 can have a better damping stroke, and will not have excessive up and down vibration movement due to the impact of the liquid flow during the subsequent conduction period, which is convenient for the normally closed elastic control member 14 and the normally open elastic control member 13 to participate in the conduction and closing control. In addition, a lower end sealing ring 16 is provided at the lower end of the execution shaft 11. In this way, when the subsequent liquid flows through, it can effectively prevent it from pouring into the accommodating chamber 5. In order to satisfy the vertical movement of the normally closed elastic control member 14 and the normally open elastic control member 13 during the force period, a lower conduction channel is provided at the inner bottom of the accommodating chamber 5, the lower end of the actuator shaft 11 is provided in the lower conduction channel, and the lower end of the normally open elastic control member 13 is sleeved outside the lower conduction channel. An upper conduction channel is provided at the inner top of the accommodating chamber 5, the lower end of the opening and closing actuator is provided in the upper conduction channel, and the upper end of the normally closed elastic control member 14 is sleeved outside the upper conduction channel. In this way, appropriate pressure and release motion trajectory guidance can be performed.

[0045] Further, the control assembly adopted by the utility model includes a manual shaft 17, the lower end of which extends into the accommodating chamber 5 and contacts the upper end of the executive shaft 11 to which the opening and closing actuator belongs. At the same time, a travel limiter 18 is threadedly connected to the manual shaft 17, which can limit the free travel of the manual shaft 17, and then control the free travel of the executive shaft 11 to meet the flow control during the subsequent conduction period. In addition, considering the convenience of user operation, a travel knob 19 is provided at the upper end of the manual shaft 17. The utility model is provided with an expansion head at the lower end of the manual shaft 17, and an upper end sealing ring 20 is provided on the expansion head, and the expansion head is arranged in the upper conduction channel. In this way, it has a better sealing effect and can prevent external foreign matter such as oil from entering the accommodating chamber 5 through the assembly gap. Considering the convenience of adjusting the travel limit, the travel limiter 18 is an internal threaded nut. Furthermore, in order to meet the convenience of convenient and stable combination, the travel knob 19 is connected to the manual shaft 17 through a connecting screw 21.

[0046] In view of the actual implementation, the liquid inlet channel 3 and the liquid outlet channel 4 are L-shaped structures. In this way, the liquid inlet channel 3 and the liquid outlet channel 4 can be better connected with the accommodating chamber 5, so as to facilitate the conduction control through the accommodating chamber 5. At the same time, the outer ends of the liquid inlet channel 3 and the liquid outlet channel 4 are threadedly connected with a connecting nut 22. In this way, stable and effective docking can be achieved for the model of the current adapter pipeline. In addition, the utility model is provided with a sealing impact ring 23 on the inner side of the connecting nut 22. In this way, the assembly gap that may exist in the connecting nut 22 due to tolerance can be effectively filled, ensuring that the connecting nut 22 is firmly installed, and will not shake due to the passage of liquid flow, thereby reducing the generation of resonance.

[0047] The working principle of the utility model is as follows:

[0048] Embodiment 1: Control of high flow or high pressure medium.

[0049] It is used to control the adjustment gap by turning the stroke knob 19 to limit the maximum free stroke of the upward movement of the actuator shaft 11. Thus, the flow rate in the subsequent conduction state can be limited.

[0050] In the normally closed state, the actuator shaft 11 completely presses the plane contact structure 8 of the control diaphragm assembly 6 against the control cavity due to the constraint of the normally closed elastic control member 14. In this way, the liquid medium entering through the liquid inlet channel 3 cannot lift the plane contact structure 8 under its normal pressure.

[0051] When the pressure of the liquid medium entering the liquid inlet channel 3 reaches the preset diversion pressure, the pressure overcomes the elastic coefficients of the normally closed elastic control member 14 and the normally open elastic control member 13. As a result, the control diaphragm assembly 6 is lifted upward in coordination with the actuator shaft 11. In this way, the liquid medium flows into the liquid outlet channel 4 through the control cavity and reaches the subsequent designated area.

[0052] When the current pressure of the liquid medium decreases, the normally closed elastic control member 14 and the normally open elastic control member 13 are reset, thereby causing the actuator shaft 11 to carry the control diaphragm assembly 6 to be reset, completing the blocking of the control chamber.

[0053] Embodiment 2: Control of low-pressure medium.

[0054] Since an adjustment gap is preset between the opening and closing actuator and the control component, there is no need to adjust the control component.

[0055] When the pressure of the liquid medium reaches the release pressure, it impacts the control diaphragm assembly 6, causing the control diaphragm assembly 6 to be slightly lifted upward. At the same time, the plane contact structure 8 below the control diaphragm assembly 6 is deformed to bulge upward, so that the accommodating cavity 5 is in a conducting state with the liquid inlet channel 3 and the liquid outlet channel 4.

[0056] After the liquid medium returns to a normal state, the planar contact structure 8 is reset to perform blocking.

[0057] It can be seen from the above text description and the accompanying drawings that the following advantages are achieved after adopting the utility model:

[0058] 1. An independent control diaphragm assembly is provided, which can realize the conduction control of the liquid medium through its deformation, and can achieve timely blocking and rapid response of the opening and closing of the valve body.

[0059] 2. The bottom shape of the control diaphragm assembly fits the control cavity, and no hard friction occurs due to the fit. This can minimize the combined wear of the control diaphragm assembly caused by hard friction and reduce the generation of particulate matter.

[0060] 3. An opening and closing actuator is provided to adjust and control the compressive stress of the diaphragm assembly to meet the conduction control of the liquid medium under different pressure conditions.

[0061] 4. It is equipped with independent control components, which can adjust the free travel of the opening and closing actuators and the final release pressure to meet the different release thresholds of low-pressure and high-pressure media.

[0062] 5. Additional connecting nuts can be added to adapt to different pipeline structures.

[0063] 6. The overall structure is simple and easy to assemble and use.

[0064] In addition, the indicated orientations or positional relationships described in the present invention are based on the orientations or positional relationships shown in the accompanying drawings and are only for the convenience of describing the present invention and simplifying the description. They do not indicate or imply that the device or structure referred to must have a specific orientation or be operated with a specific orientation structure. Therefore, they cannot be understood as a limitation on the present invention.

[0065] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. It should be pointed out that a person skilled in the art can make several improvements and modifications without departing from the technical principle of the present invention, and these improvements and modifications should also be regarded as within the protection scope of the present invention.

Claims

1. A semiconductor wet processing valve, comprising a valve body, wherein the valve body comprises a conducting component, and a control component is connected to the conducting component, wherein: The conducting component is provided with a liquid inlet channel and a liquid outlet channel, the control component is provided with a accommodating cavity, the bottom of the accommodating cavity is provided with a control cavity which is conductive with the liquid inlet channel and the liquid outlet channel, the control cavity is provided with a control diaphragm assembly, the bottom shape of the control diaphragm assembly is in contact with the control cavity, the control diaphragm assembly is provided with an opening and closing actuator, the opening and closing actuator is located in the accommodating cavity, the opening and closing actuator is provided with a control assembly, and in a default state, the bottom of the control diaphragm assembly is against the control cavity, and the liquid inlet channel and the liquid outlet channel are not conductive with each other.

2. The semiconductor wet processing valve according to claim 1, characterized in that: The control diaphragm assembly includes a diaphragm body, a threaded rod is arranged at the upper end of the diaphragm body, the threaded rod is connected to the opening and closing actuator, and a plane contact structure is arranged at the bottom of the diaphragm body, and the shape of the plane contact structure fits the control cavity.

3. The semiconductor wet processing valve according to claim 2, characterized in that: An expansion limit piece is distributed at the lower end of the diaphragm body, and the expansion limit piece is connected with the plane contact structure through a connecting guide bar.

4. The semiconductor wet processing valve according to claim 1, characterized in that: The opening and closing actuator includes an actuator shaft, the upper end of which contacts the control assembly, a laterally extending contact block is provided on the actuator shaft, a normally open elastic control member is provided at the lower end of the actuator shaft, the upper end of the normally open elastic control member contacts the contact block, and the lower end of the normally open elastic control member contacts the inner bottom of the accommodating cavity, a normally closed elastic control member is provided at the upper end of the actuator shaft, the lower end of the normally closed elastic control member contacts the contact block, and the upper end of the normally closed elastic control member contacts the inner top of the accommodating cavity, and the elastic coefficient of the normally closed elastic control member is greater than the elastic coefficient of the normally open elastic control member.

5. The semiconductor wet processing valve according to claim 4, characterized in that: The contact block does not contact the inner wall of the accommodating cavity, a contact groove is arranged at the side end of the contact block, a shaft sealing ring is arranged in the contact groove, and a lower end sealing ring is arranged at the lower end of the actuator shaft.

6. The semiconductor wet processing valve according to claim 4, characterized in that: A lower conducting channel is provided at the inner bottom of the accommodating cavity, the lower end of the actuator shaft is provided in the lower conducting channel, and the lower end of the normally open elastic control member is sleeved on the outside of the lower conducting channel; an upper conducting channel is provided at the inner top of the accommodating cavity, the lower end of the opening and closing actuator is provided in the upper conducting channel, and the upper end of the normally closed elastic control member is sleeved on the outside of the upper conducting channel.

7. The semiconductor wet processing valve according to claim 1, characterized in that: The control assembly includes a manual shaft, the lower end of which extends into the accommodating cavity and contacts the upper end of the opening and closing actuator, a travel limiter is threadedly connected to the manual shaft, and a travel knob is arranged at the upper end of the manual shaft.

8. The semiconductor wet processing valve according to claim 7, characterized in that: An expansion head is arranged at the lower end of the manual shaft, an upper end sealing ring is arranged on the expansion head, the travel limiter is an internal thread nut, and the travel knob is connected to the manual shaft through a connecting screw.

9. The semiconductor wet processing valve according to claim 1, characterized in that: The liquid inlet channel and the liquid outlet channel are L-shaped structures, and the outer ends of the liquid inlet channel and the liquid outlet channel are both threadedly connected with connecting nuts.

10. The semiconductor wet processing valve according to claim 9, characterized in that: A sealing impact ring is arranged on the inner side of the connecting nut.

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