Fluid control device

Abstract

The present invention discloses a fluid control device, which includes a piezoelectric pump and a control valve. The piezoelectric pump includes: a substrate having an opening, a flexible plate having suction holes, and a piezoelectric actuator having a vibration plate and a piezoelectric element. The substrate, the flexible plate, and the piezoelectric actuator are sequentially and overlappedly arranged. The control valve includes a valve body lower shell, a diaphragm, and a valve body upper shell that are sequentially and overlappedly arranged. The valve body lower shell is provided with an air inlet hole, and the valve body upper shell is provided with an air outlet hole and an exhaust hole. The diaphragm and the valve body lower shell form a first valve chamber, the diaphragm and the valve body upper shell form a second valve chamber, and the diaphragm is provided with a through hole capable of communicating the first valve chamber and the second valve chamber. The valve body lower shell is provided with a first protrusion, and a portion of the diaphragm around the through hole abuts against the first protrusion. The valve body upper shell is provided with a second protrusion, the exhaust hole is provided in the second protrusion, and a portion of the diaphragm around the exhaust hole abuts against the second protrusion. The valve body lower shell covers the piezoelectric actuator to form a pump chamber. Its structure is more compact, reducing the positions that need to be sealed.

Description

Technical Field

[0001] The present invention relates to the technical field of fluid control devices, and particularly to fluid control devices. Background Art

[0002] In the prior art, micro air pumps can be classified according to working principles into: motor diaphragm type, electromagnetic type, impeller type, piston type, piezoelectric ceramic type, etc. Among them, the driving sources of the motor diaphragm type, electromagnetic type, impeller type, and piston type air pumps are motors or electromagnets, etc., and their sizes cannot be made very small, so the sizes of the entire air pumps are relatively large. For piezoelectric ceramic type air pumps on the domestic market, since the piezoelectric ceramic elements are fixed and constrained around, the vibration amplitude of the piezoelectric ceramic elements is restricted after being energized, thus having the defects of small air volume and low pump air pressure. That is to say, the existing air pumps have their own advantages and disadvantages.

[0003] However, the common drawback of existing piezoelectric pumps is that when the piezoelectric pump is connected to a control valve, the structure is generally more complex, occupies a larger space, that is, the structure is not compact enough, and there are more points that need to be sealed. Summary of the Invention

[0004] In order to overcome the deficiencies of the prior art, the purpose of the present invention is to provide an air flow control device, which has a more compact structure and reduces the positions that need to be sealed.

[0005] The purpose of the present invention is achieved by adopting the following technical solutions:

[0006] A fluid control device, comprising a piezoelectric pump and a control valve;

[0007] The piezoelectric pump includes: a substrate having an opening, a flexible plate having suction holes, and a piezoelectric actuator having a vibration plate and a piezoelectric element; the substrate, the flexible plate, and the piezoelectric actuator are sequentially overlapped and arranged;

[0008] The control valve includes a valve body lower shell, a diaphragm, and a valve body upper shell that are sequentially overlapped and arranged; the valve body lower shell is provided with an air inlet hole, and the valve body upper shell is provided with an air outlet hole and an exhaust hole; the air outlet hole is used to connect an external airbag, and the exhaust hole communicates with the external environment; the diaphragm and the valve body lower shell form a first valve chamber, the diaphragm and the valve body upper shell form a second valve chamber, and the diaphragm is provided with a through hole capable of communicating the first valve chamber and the second valve chamber;

[0009] The valve body lower shell is provided with a first protrusion, and the first protrusion protrudes from the first valve chamber toward the side pointing to the diaphragm; a part of the diaphragm around the through hole abuts against the first protrusion, so that the through hole is covered;

[0010] The upper housing of the valve body is provided with a second protruding portion that protrudes from the inside of the second valve chamber toward the side facing the diaphragm. The exhaust hole is provided in the second protruding portion, and the portion of the diaphragm around the exhaust hole abuts against the second protruding portion, thereby closing the exhaust hole.

[0011] The lower housing of the valve body covers the piezoelectric actuator to form a pump chamber.

[0012] During inflation, the diaphragm is squeezed to open the through-hole and close the exhaust hole, and the opening, the suction hole, the pump chamber, the first valve chamber, the through-hole, the second valve chamber, and the air outlet are sequentially communicated.

[0013] During exhaust, the diaphragm is squeezed to close the through-hole and open the exhaust hole, and the air outlet, the second valve chamber, and the exhaust hole are sequentially communicated.

[0014] Further, the surfaces of the first protruding portion and the second protruding portion are both arc-shaped structures.

[0015] Further, the air outlet is provided in the air outlet pipe of the upper housing of the valve body, and the air outlet pipe extends in the horizontal direction; the substrate is provided with an air guiding groove extending in the horizontal direction, and both ends of the air guiding groove are respectively connected to the opening and the external environment.

[0016] Further, the piezoelectric actuator further includes a reinforcing plate, a first electrode plate, an insulating plate, and a second electrode plate; the reinforcing plate, the vibrating plate, the insulating plate, and the second electrode plate are sequentially overlapped and arranged.

[0017] The reinforcing plate and the suction hole of the flexible plate are arranged at intervals and oppositely, and the second electrode plate is connected to the lower housing of the valve body.

[0018] A plurality of elastic connecting ribs are connected to the middle of the first electrode plate. The vibrating plate is located in the middle of the first electrode plate and is connected to the first electrode plate through a plurality of the connecting ribs. The first electrode plate is connected with a first external power connection terminal; the first electrode plate, the connecting ribs, the vibrating plate, and the reinforcing plate are integrally formed into one part.

[0019] The middle of the insulating plate has a first accommodation ring, and the piezoelectric element is accommodated in the first accommodation ring; the second electrode plate is provided with a second accommodation ring, and the second electrode plate is connected with an internal power connection terminal accommodated in the second accommodation ring. The internal power connection terminal is connected to the piezoelectric element, and the second electrode plate is further connected with a second external power connection terminal.

[0020] Further, the bottom surface of the reinforcing plate is flush with the bottom surface of the first electrode plate.

[0021] Further, a plurality of first connection columns are fixed to the top of the lower valve body housing, and a plurality of second connection columns are fixedly connected to the bottom of the lower valve body housing. The first connection columns sequentially pass through the diaphragm and the upper valve body housing; the second connection columns sequentially pass through the second electrode plate, the insulating plate, the first electrode plate, the flexible plate, and the substrate.

[0022] Further, the first electrode plate and the flexible plate are fixedly connected by a hot melt adhesive film, and a third relief circle is formed in the middle of the hot melt adhesive film to communicate the piezoelectric actuator with the suction hole of the flexible plate.

[0023] Further, the distance between the reinforcing plate and the suction hole is less than 0.05 mm.

[0024] Further, the first valve chamber includes a first sub-valve chamber, a first notch, and a second sub-valve chamber that are sequentially connected in the horizontal direction; the second valve chamber includes a third sub-valve chamber, a second notch, and a fourth sub-valve chamber that are sequentially connected in the horizontal direction; the fourth sub-valve chamber is located directly above the first sub-valve chamber, and the third sub-valve chamber is located directly above the second sub-valve chamber; the air inlet is communicated with the first sub-valve chamber, the first protrusion is arranged in the second sub-valve chamber, the air outlet is communicated with the third sub-valve chamber, and the second protrusion is arranged in the fourth sub-valve chamber.

[0025] Further, the upper housing is provided with an anti-blocking flow path in the third sub-valve chamber. The anti-blocking flow path is located directly above the through hole, and one end of the anti-blocking flow path is connected to the air outlet.

[0026] Compared with the prior art, the beneficial effects of the present invention are as follows:

[0027] 1. By assembling the piezoelectric pump and the control valve together to form a fluid control device, the structure is more compact compared with the combination of the existing piezoelectric pump and the conventional valve body.

[0028] 2. By covering the piezoelectric actuator with the lower valve body housing of the control valve, the connection between the piezoelectric pump and the lower valve body housing is more compact. That is, the lower valve body housing participates in the composition of both the control valve and the piezoelectric pump, which not only reduces the cost, improves the structural compactness, reduces the positions that need to be sealed, but also reduces the height dimension of the fluid control device, which is beneficial to miniaturization and lightweight design.

[0029] 3. The surfaces of both the first protrusion and the second protrusion are arc-shaped structures. Such a setting can make the sealing connection between the diaphragm and the first protrusion closer in the natural state, and the sealing connection between the diaphragm and the second protrusion is also closer.

[0030] 4. The first electrode plate and the flexible plate are fixedly connected through a hot melt adhesive film, and a third relief ring is provided in the middle of the hot melt adhesive film. Since the hot melt adhesive film is made of a soft material, the thickness of the hot melt adhesive film allows the vibration plate of the piezoelectric actuator to squeeze the hot melt adhesive film to achieve vibration, that is, a certain vibration space is reserved. At the same time, the maximum vibration space of the vibration plate is also limited to prevent the connecting ribs from plastic deformation and resulting in a decline in elastic function.

[0031] 5. The first valve chamber includes a first sub-valve chamber, a first notch, and a second sub-valve chamber that are sequentially connected in the horizontal direction. The second valve chamber includes a third sub-valve chamber, a second notch, and a fourth sub-valve chamber that are sequentially connected in the horizontal direction. The fourth sub-valve chamber is located directly above the first sub-valve chamber, and the third sub-valve chamber is located directly above the second sub-valve chamber. The air inlet is communicated with the first sub-valve chamber, the first protrusion is provided in the second sub-valve chamber, the air outlet is communicated with the third sub-valve chamber, and the second protrusion is provided in the fourth sub-valve chamber. With this setting, the first valve chamber, the second valve chamber, and the air outlet are all structures extending in the horizontal direction, so that the compactness of the present fluid control device in the height direction can be maximized. Moreover, when the air inlet intakes air (i.e., during inflation), the airflow squeezes the diaphragm at the exhaust hole, which can improve the reliability of the exhaust hole being blocked during air intake. BRIEF DESCRIPTION OF THE DRAWINGS

[0032] Figure 1 is a schematic structural diagram of the fluid control device of the present invention. For ease of understanding, the fluid control device is in a disassembled state;

[0033] Figure 2 is Figure 1 another perspective view of the fluid control device shown, and this perspective is from bottom to top;

[0034] Figure 3 is Figure 1 a schematic cross-sectional view of the fluid control device shown, where the fluid control device is in an assembled state;

[0035] Figure 4 is Figure 3 an effect diagram of the fluid control device shown during inflation; the dashed line is the flow direction of the gas;

[0036] Figure 5 is Figure 3 an effect diagram of the fluid control device shown during exhaust; the dashed line is the flow direction of the gas;

[0037] Figure 6 is Figure 1 a schematic structural diagram of the first electrode plate shown.

[0038] In the figure:

[0039] 100, piezoelectric pump;

[0040] 110. Substrate;

[0041] 111. Opening;

[0042] 112. Heat dissipation groove;

[0043] 113. Bottom air holes;

[0044] 120. Flexible board;

[0045] 121. Suction holes;

[0046] 122. First heat dissipation holes;

[0047] 130. Piezoelectric actuator;

[0048] 131. Vibration plate;

[0049] 132. Piezoelectric element;

[0050] 133. Reinforcing plate;

[0051] 134. First electrode plate;

[0052] 1341. First external power connection terminal;

[0053] 1342. Second heat dissipation holes;

[0054] 135. Insulating plate;

[0055] 1351. First relief circle;

[0056] 136. Second electrode plate;

[0057] 1361. Second relief circle;

[0058] 1362. Internal power connection terminal;

[0059] 1363. Second external power connection terminal;

[0060] 137. Connecting rib;

[0061] 140. Hot melt adhesive film;

[0062] 141. Third relief circle;

[0063] 200. Control valve;

[0064] 210. Lower valve body;

[0065] 211. Air inlet holes;

[0066] 212. First protrusion;

[0067] 213. First connecting post;

[0068] 214. Second connecting post;

[0069] 220. Diaphragm;

[0070] 221. Through hole;

[0071] 230. Upper valve body housing;

[0072] 231. Air outlet hole;

[0073] 232. Exhaust hole;

[0074] 233. Second protruding part;

[0075] 234. Air outlet pipe;

[0076] 300. First valve chamber;

[0077] 310. First sub-valve chamber;

[0078] 320. First notch;

[0079] 330. Second sub-valve chamber;

[0080] 400. Second valve chamber;

[0081] 410. Third sub-valve chamber;

[0082] 420. Second notch;

[0083] 430. Fourth sub-valve chamber;

[0084] 440. Anti-blocking flow path;

[0085] 500. Pump chamber. Specific embodiments

[0086] Next, in combination with the accompanying drawings and specific embodiments, the present invention will be further described. It should be noted that, on the premise of non-conflict, the following-described embodiments or technical features can be arbitrarily combined to form new embodiments.

[0087] It should be noted that when an element is referred to as being "fixed to" another element, it can be directly on the other element or there may also be an intermediate element. When an element is considered to be "connected" to another element, it can be directly connected to the other element or there may be an intermediate element. The "vertical", "horizontal", "left", "right" and similar expressions used herein are only for illustrative purposes and do not represent the only implementation.

[0088] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the technical field to which this invention belongs. The terms used in the specification of the invention herein are for the purpose of describing specific embodiments only and are not intended to limit the invention. The term "and / or" used herein includes any and all combinations of one or more of the related listed items.

[0089] Figures 1 - 5 A fluid control device showing a preferred embodiment of the present invention mainly includes a piezoelectric pump 100 and a control valve 200.

[0090] For ease of understanding, the function of the fluid control device is explained here first: The fluid control device can be applied to an armband for blood pressure measurement and can also be used to inflate the airbag of a massager, etc. Therefore, the fluid control device should have three functions: pumping air (i.e., intake), then inflating the airbag-like element, and finally draining the gas of the airbag-like element (i.e., discharging) to the external environment. Therefore, in this embodiment (taking gas as an example, but it can be understood that the fluid includes gas, liquid, etc.):

[0091] During inflation, refer to Figure 4 , the diaphragm 220 is squeezed by the gas so that the through-hole 221 is opened and the exhaust hole 232 is closed. At this time, the bottom air hole 113, the opening 111, the suction hole 121, the pump chamber 500, the first valve chamber 300, the through-hole 221, the second valve chamber 400, and the air outlet hole 231 are sequentially connected, so that the gas sucked by the piezoelectric pump 100 flows out from the air outlet hole 231 of the control valve 200 to inflate the airbag-like element.

[0092] During exhaust, refer to Figure 5 , the diaphragm 220 is squeezed by the gas so that the through-hole 221 is closed and the exhaust hole 232 is opened, and the air outlet hole 231, the second valve chamber 400, and the exhaust hole 232 are sequentially connected, so that the gas of the airbag-like element is sequentially discharged to the external environment along the air outlet hole 231, the second valve chamber 400, and the exhaust hole 232.

[0093] Therefore, in order to achieve the control of the gas flow direction during inflation and exhaust, in this embodiment, as a preferred implementation manner:

[0094] Refer to Figure 1 and Figure 3 , the piezoelectric pump 100 includes: a substrate 110 having an opening 111, a flexible plate 120 having a suction hole 121, and a piezoelectric actuator 130 having a vibration plate 131 and a piezoelectric element 132 (preferably a ceramic piezoelectric element). The substrate 110, the flexible plate 120, and the piezoelectric actuator 130 are sequentially overlapped and arranged.

[0095] Refer to Figure 1 andFigure 3 , the control valve 200 includes a valve body lower shell 210, a diaphragm 220, and a valve body upper shell 230 that are sequentially and overlappedly arranged. The valve body lower shell 210 is provided with an air inlet hole 211, and the valve body upper shell 230 is provided with an air outlet hole 231 and an exhaust hole 232. The air outlet hole 231 is used to connect to an external airbag, and the exhaust hole 232 communicates with the external environment. The diaphragm 220 and the valve body lower shell 210 form a first valve chamber 300, the diaphragm 220 and the valve body upper shell 230 form a second valve chamber 400, and the diaphragm 220 is provided with a through hole 221 that can communicate the first valve chamber 300 and the second valve chamber 400.

[0096] The valve body lower shell 210 is provided with a first protrusion 212, and the first protrusion 212 protrudes from the inside of the first valve chamber 300 toward the side pointing to the diaphragm 220; a portion of the diaphragm 220 around the through hole 221 abuts against the first protrusion 212, so that the through hole 221 is covered. Thus, in the natural state, the through hole 221 is blocked by the diaphragm 220, so that the through hole 221 can be opened only when the air pressure in the first valve chamber 300 is relatively high.

[0097] The valve body upper shell 230 is provided with a second protrusion 233, and the second protrusion 233 protrudes from the inside of the second valve chamber 400 toward the side pointing to the diaphragm 220. The exhaust hole 232 is provided on the second protrusion 233, and a portion of the diaphragm 220 around the exhaust hole 232 abuts against the second protrusion 233, so that the exhaust hole 232 is closed. Thus, in the natural state, the exhaust hole 232 is blocked by the diaphragm 220, so that the exhaust hole 232 can be opened only when the second valve chamber 400 is relatively high in pressure.

[0098] Importantly, the valve body lower shell 210 covers the piezoelectric actuator 130 to form a pump chamber 500; thus, the valve body lower shell 210, as a part of the piezoelectric pump 100, not only simplifies the structure of the fluid control device, thereby improving the structural compactness, but also can reduce the number of gaps that need to be sealed, and to a certain extent improves the airtightness of the whole machine. And, at this time, the height dimension of the fluid control device is further compressed, so that its volume is further miniaturized.

[0099] It should be noted here that during inflation, after the through hole 221 is opened, the air flow direction is the first valve chamber 300 → the through hole 221 → the second valve chamber 400 → the air outlet hole 231. Generally speaking, since the gas expands the diaphragm 220 from the first valve chamber 300 to open the through hole 221, a part of the air pressure has been lost, that is, the air pressure in the second valve chamber 400 is lower than that in the first valve chamber 300, so that the diaphragm 220 can keep blocking the exhaust hole 232. On the other hand, in the case of not considering the air pressure loss, even if the air pressure in the first valve chamber 300 is equal to the air pressure in the second valve chamber 400, based on the fact that the diaphragm 220 has blocked the exhaust hole 232, the exhaust hole 232 is kept blocked.

[0100] As a further preferred embodiment:

[0101] The surfaces of the first protrusion 212 and the second protrusion 233 are both arc-shaped structures. With such a setting, in the natural state, the sealing connection between the diaphragm 220 and the first protrusion 212 can be made closer, and the sealing connection between the diaphragm 220 and the second protrusion 233 can also be made closer.

[0102] As a further preferred embodiment:

[0103] The air outlet 231 is provided on the air outlet pipe 234 of the valve body upper shell 230, and the air outlet pipe 234 extends in the horizontal direction; in this way, the air outlet pipe 234 being provided in the horizontal direction can further compress the space of this fluid control device in the height direction. At the same time, in order to further compress its space in the height direction, the substrate 110 is provided with an air guiding groove extending in the horizontal direction, and both ends of the air guiding groove are respectively connected to the opening 111 and the external environment. In this way, when gas enters the opening 111 from the air guiding groove, the air flow will not be unable to enter the opening 111 due to the bottom of the substrate 110 being blocked. However, in this embodiment, as an alternative to the air guiding groove, preferably, the bottom air hole 113 is provided at the bottom of the substrate 110, penetrates the substrate 110 in the vertical direction, and the bottom air hole 113 is communicated with the opening 111.

[0104] As a further preferred embodiment:

[0105] See Figure 2 , the piezoelectric actuator 130 further includes a reinforcing plate 133, a first electrode plate 134, an insulating plate 135 and a second electrode plate 136; the reinforcing plate 133, the vibrating plate 131, the insulating plate 135 and the second electrode plate 136 are sequentially arranged in an overlapping manner.

[0106] See Figure 1 , the reinforcing plate 133 and the suction holes 121 of the flexible plate 120 are arranged at intervals and opposite to each other. The reinforcing plate 133 can not only be used to strengthen the strength of the vibrating plate 131, but also be used to fit the suction holes 121 of the flexible plate 120, so as to introduce the air flow into the pump chamber 500. At this time, the piezoelectric actuator 130 is connected to the valve body lower shell 210 through its own second electrode plate 136.

[0107] See Figure 6, a plurality of elastic connecting ribs 137 are connected to the middle of the first electrode plate 134, the vibration plate 131 is located in the middle of the first electrode plate 134 to improve compactness, the vibration plate 131 is connected to the first electrode plate 134 through a plurality of connecting ribs 137 to maintain the vibration function of the vibration plate 131, and the first electrode plate 134 is connected to a first external power terminal 1341; the first electrode plate 134, the connecting ribs 137, the vibration plate 131 and the reinforcing plate 133 are integrated into one part (that is, they together constitute one part) through an electric etching process. In this way, the connection strength of the entire piezoelectric actuator 130 is more stable, and it is ensured that the reinforcing plate 133 is not easy to fall off from the vibration plate 131. Obviously, as an alternative, the connecting ribs 137 can be replaced by springs or other elastic members.

[0108] Further, see Figure 1 The middle part of the insulating plate 135 has a first clearance circle 1351, and the piezoelectric element 132 is accommodated in the first clearance circle 1351; the second electrode plate 136 is provided with a second clearance circle 1361, and the second electrode plate 136 is connected to an internal power terminal 1362 accommodated in the second clearance circle 1361, and the internal power terminal 1362 is connected to the piezoelectric element 132, and the second electrode plate 136 is also connected to a second external power terminal 1363.

[0109] As a closed loop of current, the current or electrons flow from the first electrode plate 134 → the piezoelectric element 132 → the internal power terminal 1362 → the second electrode plate 136 .

[0110] Preferably, in order to balance strength and compactness in height, the bottom surface of the reinforcing plate 133 is flush with the bottom surface of the first electrode plate 134. The reinforcing plate 133 protrudes from the bottom surface of the vibration plate 131 by a certain height to form a stepped structure gap for fluid circulation.

[0111] As a further preferred embodiment:

[0112] In order to make the entire fluid control device compact and the connection relationship stable, a plurality of first connecting columns 213 are fixed to the top of the valve body lower shell 210, and a plurality of second connecting columns 214 are fixedly connected to the bottom of the valve body lower shell 210. The first connecting columns 213 sequentially pass through the diaphragm 220 and the valve body upper shell 230; the second connecting columns 214 sequentially pass through the second electrode plate 136, the insulating plate 135, the first electrode plate 134, the flexible plate 120 and the substrate 110.

[0113] As a further preferred embodiment: The first electrode plate 134 and the flexible plate 120 are fixedly connected through a hot melt adhesive film 140. A third relief circle 141 is formed in the middle of the hot melt adhesive film 140 to communicate the piezoelectric actuator 130 with the suction hole 121 of the flexible plate 120 (i.e., ensure smooth gas path). With this arrangement, since the hot melt adhesive film 140 is made of a soft material, the hot melt adhesive film 140 allows the vibration plate 131 of the piezoelectric actuator 130 to have a downward vibration space to achieve vibration, that is, a certain vibration space is reserved. The greater the thickness of the hot melt adhesive film 140, the greater the vibration space. At the same time, the maximum vibration space of the vibration plate 131 is also limited to prevent the plastic deformation of the connecting rib 137 and the resulting decline in elastic function. Preferably, the distance between the reinforcing plate 133 and the suction hole 121 is less than 0.05 mm.

[0114] As a further preferred embodiment:

[0115] See Figure 3 , the first valve chamber 300 includes a first sub-valve chamber 310, a first notch 320, and a second sub-valve chamber 330 that are sequentially connected in the horizontal direction. The second valve chamber 400 includes a third sub-valve chamber 410, a second notch 420, and a fourth sub-valve chamber 430 that are sequentially connected in the horizontal direction. The fourth sub-valve chamber 430 is located directly above the first sub-valve chamber 310, and the third sub-valve chamber 410 is located directly above the second sub-valve chamber 330. The air inlet hole 211 is communicated with the first sub-valve chamber 310, the first protrusion 212 is provided in the second sub-valve chamber 330, the air outlet hole 231 is communicated with the third sub-valve chamber 410, and the second protrusion 233 is provided in the fourth sub-valve chamber 430. With this arrangement, the first valve chamber 300, the second valve chamber 400, and the air outlet hole 231 are all structures extending in the horizontal direction, so that the compactness of the present fluid control device in the height direction can be maximized. Moreover, when the air inlet hole 211 intakes air (i.e., during inflation), the airflow squeezes the diaphragm 220 at the exhaust hole 232, which can improve the reliability of the exhaust hole 232 being blocked during air intake.

[0116] Obviously, when inflating, if there is a situation with relatively high air pressure, the part of the diaphragm 220 around the through hole 221 may arch excessively due to the instantaneously too high air pressure in the second sub-valve chamber 330, resulting in the part of the diaphragm 220 around the through hole 221 being in contact with the top wall of the third sub-valve chamber 410, causing the through hole 221 to be blocked again immediately after it is opened, thus cutting off the air flow. To solve this problem, the upper shell is provided with an anti-blocking flow path 440 in the third sub-valve chamber 410. The anti-blocking flow path 440 is located directly above the through hole 221, and one end of the anti-blocking flow path 440 is connected to the air outlet 231. Among them, the anti-blocking flow path 440 can be a groove or a protrusion, so that the top wall of the third sub-valve chamber 410 is uneven. At this time, even if the diaphragm 220 is in contact with the top wall of the third sub-valve chamber 410, the through hole 221 will not be completely blocked. After the air pressures in the second sub-valve chamber 330 and the third sub-valve chamber 410 are equalized, the diaphragm 220 returns to its normal open position to ensure the normal progress of inflation.

[0117] As a further preferred embodiment:

[0118] Refer to Figure 1 , since a relatively large amount of heat is generated when the piezoelectric element 132 operates under a loaded voltage, in order to facilitate heat dissipation, the substrate 110 is provided with heat dissipation grooves 112, the flexible plate 120 is provided with first heat dissipation holes 122, and the first electrode plate 134 is provided with second heat dissipation holes 1342. The heat dissipation grooves 112, the first heat dissipation holes 122, and the second heat dissipation holes 1342 are sequentially connected to form a heat dissipation channel. The top of the heat dissipation channel is connected to the pump chamber 500, and the bottom of the heat dissipation channel is blocked by the substrate 110 and isolated from the external environment. Heat is dissipated through the substrate 110 and heat exchange is carried out with the gas in the heat dissipation channel. Therefore, in order to facilitate the rapid heat dissipation of the substrate 110, the substrate 110 is made of a heat-conducting material, such as copper, aluminum, alloy materials, and so on.

[0119] The beneficial effects mainly include but are not limited to:

[0120] 1. By assembling the piezoelectric pump 100 and the control valve 200 together to form a fluid control device, compared with the combination of the existing piezoelectric pump 100 and a conventional valve body, the structure is more compact.

[0121] 2. By covering the piezoelectric actuator 130 with the valve body lower shell 210 of the control valve 200, the connection between the piezoelectric pump 100 and the valve body lower shell 210 is made more compact. That is, the valve body lower shell 210 participates in the composition of both the control valve 200 and the piezoelectric pump 100. This not only reduces the cost, improves the structural compactness, and reduces the positions that need to be sealed, but also reduces the height dimension of the fluid control device, which is beneficial to miniaturization and lightweight design.

[0122] 3. The surfaces of the first protrusion 212 and the second protrusion 233 are both arc-shaped structures. With such a setting, in the natural state, the diaphragm 220 can be more tightly sealed to the first protrusion 212, and the diaphragm 220 can also be more tightly sealed to the second protrusion 233.

[0123] 4. The first electrode plate 134 and the flexible plate 120 are fixedly connected through a hot melt adhesive film 140, and a third relief circle 141 is provided in the middle of the hot melt adhesive film 140. Since the hot melt adhesive film 140 is made of a soft material, the thickness of the hot melt adhesive film 140 allows the vibration plate 131 of the piezoelectric actuator 130 to squeeze the hot melt adhesive film 140 to achieve vibration, that is, a certain vibration space is reserved. At the same time, the maximum vibration space of the vibration plate 131 is also limited to prevent the connecting rib 137 from plastically deforming and causing a decline in the elastic function.

[0124] 5. The first valve chamber 300 includes a first sub-valve chamber 310, a first notch 320, and a second sub-valve chamber 330 that are sequentially connected in the horizontal direction. The second valve chamber 400 includes a third sub-valve chamber 410, a second notch 420, and a fourth sub-valve chamber 430 that are sequentially connected in the horizontal direction. The fourth sub-valve chamber 430 is located directly above the first sub-valve chamber 310, and the third sub-valve chamber 410 is located directly above the second sub-valve chamber 330. The air inlet hole 211 is communicated with the first sub-valve chamber 310, the first protrusion 212 is provided in the second sub-valve chamber 330, the air outlet hole 231 is communicated with the third sub-valve chamber 410, and the second protrusion 233 is provided in the fourth sub-valve chamber 430. With such a setting, the first valve chamber 300, the second valve chamber 400, and the air outlet hole 231 are all structures extending in the horizontal direction, so that the compactness of the present fluid control device in the height direction can be maximized. Moreover, when the air inlet hole 211 intakes air (i.e., during inflation), the airflow squeezes the diaphragm 220 at the exhaust hole 232, which can improve the reliability of the exhaust hole 232 being blocked during air intake.

[0125] The above embodiments are only the preferred embodiments of the present invention, and the scope of protection of the present invention cannot be limited thereby. Any non-substantial changes and substitutions made by those skilled in the art based on the present invention belong to the scope of protection required by the present invention.

Claims

1. A fluid control device, characterized in that: It includes a piezoelectric pump and a control valve; The piezoelectric pump includes: a substrate with an opening, a flexible plate with suction holes, and a piezoelectric actuator with a vibrating plate and a piezoelectric element; the substrate, the flexible plate, and the piezoelectric actuator are sequentially and overlappedly arranged, and the piezoelectric actuator further includes a reinforcing plate, a first electrode plate, an insulating plate, and a second electrode plate; the reinforcing plate, the vibrating plate, the insulating plate, and the second electrode plate are sequentially and overlappedly arranged, and the first electrode plate and the flexible plate are fixedly connected through a hot-melt adhesive film, and a third relief circle is formed in the middle of the hot-melt adhesive film to enable the piezoelectric actuator to communicate with the suction holes of the flexible plate; The control valve includes a valve body lower shell, a diaphragm, and a valve body upper shell that are sequentially and overlappedly arranged; the valve body lower shell is provided with an air inlet hole, and the valve body upper shell is provided with an air outlet hole and an exhaust hole; the air outlet hole is used to connect an external airbag, and the exhaust hole communicates with the external environment; the diaphragm and the valve body lower shell form a first valve chamber, the diaphragm and the valve body upper shell form a second valve chamber, and the diaphragm is provided with a through hole capable of communicating the first valve chamber and the second valve chamber; The valve body lower shell is provided with a first protrusion that protrudes from the first valve chamber toward the side pointing to the diaphragm; the portion of the diaphragm around the through hole abuts against the first protrusion, so that the through hole is covered; The valve body upper shell is provided with a second protrusion that protrudes from the second valve chamber toward the side pointing to the diaphragm, the exhaust hole is arranged on the second protrusion, and the portion of the diaphragm around the exhaust hole abuts against the second protrusion, so that the exhaust hole is closed, and the surfaces of the first protrusion and the second protrusion are both arc-shaped structures; The valve body lower shell covers the piezoelectric actuator to form a pump chamber; During inflation, the diaphragm is squeezed to open the through hole and close the exhaust hole, and the opening, the suction holes, the pump chamber, the first valve chamber, the through hole, the second valve chamber, and the air outlet hole are sequentially communicated; During exhaust, the diaphragm is squeezed to close the through hole and open the exhaust hole, and the air outlet hole, the second valve chamber, and the exhaust hole are sequentially communicated.

2. The fluid control device according to claim 1, wherein: The air outlet hole is arranged on an air outlet pipe of the valve body upper shell, and the air outlet pipe extends in the horizontal direction; the substrate is provided with an air guiding groove extending in the horizontal direction, and both ends of the air guiding groove are respectively connected to the opening and the external environment.

3. The fluid control device according to claim 1, wherein: The reinforcing plate and the suction holes of the flexible plate are arranged at intervals and oppositely, and the second electrode plate is connected to the valve body lower shell; Several elastic connecting ribs are connected to the middle of the first electrode plate, the vibrating plate is located in the middle of the first electrode plate and is connected to the first electrode plate through several connecting ribs, and the first electrode plate is connected with a first external power connection terminal; the first electrode plate, the connecting ribs, the vibrating plate, and the reinforcing plate are integrally formed into one part; The middle part of the insulating plate has a first relief circle, and the piezoelectric element is accommodated in the first relief circle; the second electrode plate is provided with a second relief circle, and an internal power connection terminal accommodated in the second relief circle is connected to the second electrode plate. The internal power connection terminal is connected to the piezoelectric element, and the second electrode plate is further connected to a second external power connection terminal.

4. The fluid control device according to claim 3, wherein: The bottom surface of the reinforcing plate is flush with the bottom surface of the first electrode plate.

5. The fluid control device according to claim 3, wherein: A plurality of first connecting columns are fixed to the top of the valve body lower shell, and a plurality of second connecting columns are fixedly connected to the bottom of the valve body lower shell. The first connecting columns sequentially pass through the diaphragm and the valve body upper shell; the second connecting columns sequentially pass through the second electrode plate, the insulating plate, the first electrode plate, the flexible plate and the substrate.

6. The fluid control device according to claim 1, characterized in that: The distance between the reinforcing plate and the suction hole is less than 0.05 mm.

7. The fluid control device according to claim 1, characterized in that: The first valve chamber includes a first sub-valve chamber, a first notch and a second sub-valve chamber that are sequentially communicated in the horizontal direction; the second valve chamber includes a third sub-valve chamber, a second notch and a fourth sub-valve chamber that are sequentially communicated in the horizontal direction; the fourth sub-valve chamber is located directly above the first sub-valve chamber, and the third sub-valve chamber is located directly above the second sub-valve chamber; the air inlet hole is communicated with the first sub-valve chamber, a first protrusion is arranged in the second sub-valve chamber, the air outlet hole is communicated with the third sub-valve chamber, and a second protrusion is arranged in the fourth sub-valve chamber.

8. The fluid control device according to claim 7, characterized in that: The upper shell is provided with an anti-blocking flow path in the third sub-valve chamber. The anti-blocking flow path is located directly above the through hole, and one end of the anti-blocking flow path is connected to the air outlet hole.

Images