A multi-cavity test structure, system and method for thin film penetration detection

Abstract

The present disclosure provides a multi-cavity test structure, system and method for thin film permeation detection. The multi-cavity test structure includes a first cavity, a common cavity and a second cavity, all of which are provided with openings. The common cavity is located between the first cavity and the second cavity, and the common cavity includes a plurality of inner cavities that are interconnected. The first cavity includes at least one first inner cavity, and the opening of the first inner cavity is opposite to the inner cavity opening of the common cavity. The second cavity includes at least one second inner cavity, and the opening of the second inner cavity is opposite to the inner cavity opening of the common cavity. The minimum module of this structure can test two samples at the same time and ensure that the test conditions of the two test cavities are exactly the same. Based on this minimum module, the test cavity can be expanded into a cavity equipment structure with a multiple of 2, such as 4 cavities or 6 cavities. The structure is simple, compact and easy to operate.

Description

Technical Field

[0001] The present disclosure relates to the technical field of gas permeation testing, and in particular to a multi-cavity testing structure, system, and method for thin film permeation testing. Background Art

[0002] The statements in this section merely provide background information related to the present disclosure and do not necessarily constitute prior art.

[0003] At present, film materials are widely used in the food packaging industry. The barrier properties of film materials are a key factor in the shelf life of packaged food, so the barrier property testing of film materials is extremely important.

[0004] The inventors of the present disclosure have discovered that, in order to improve test efficiency, barrier property testing equipment generally sets up multiple test chambers on the same device for simultaneous testing. In current multi-chamber testing equipment, multiple test chambers are generally arranged horizontally or vertically in parallel. These structures occupy a large space and are inconvenient for test operations. Summary of the Invention

[0005] In order to address the shortcomings of the existing technology, the present disclosure provides a multi-cavity test structure, system and method for thin film penetration detection. The minimum module of this structure can test two samples at the same time and ensure that the test conditions of the two test chambers are exactly the same. Based on this minimum module, the test chamber can be expanded into a 4-cavity or 6-cavity equipment structure that is a multiple of 2. The structure is simple, compact and easy to operate.

[0006] In order to achieve the above objectives, the present disclosure adopts the following technical solutions:

[0007] A first aspect of the present disclosure provides a multi-cavity test structure for thin film penetration detection.

[0008] A multi-cavity test structure for thin film permeation detection, comprising a first cavity, a common cavity, and a second cavity, each of which has an opening. The common cavity is located between the first cavity and the second cavity, and the common cavity includes a plurality of interconnected cavities.

[0009] The first cavity includes at least one first inner cavity, the first inner cavity opening is opposite to the inner cavity opening of the common cavity, and the second cavity includes at least one second inner cavity, the second inner cavity opening is opposite to the inner cavity opening of the common cavity.

[0010] As some possible implementations, the first cavity is provided with a first air inlet and a first air outlet communicating with the first inner cavity, and the second cavity is provided with a second air inlet and a second air outlet communicating with the second inner cavity;

[0011] The first cavity is further provided with a third air inlet and a third air outlet. The third air inlet is communicated with the second air inlet, and the third air outlet is communicated with the second air outlet.

[0012] As some possible implementations, the common cavity is provided with a fourth air inlet and a fourth air outlet communicating with the inner cavity of the common cavity;

[0013] The first cavity is further provided with a fifth air inlet and a fifth air outlet. The fifth air inlet is communicated with the fourth air inlet, and the fifth air outlet is communicated with the fourth air outlet.

[0014] Some possible implementations further include a clamping mechanism, the clamping mechanism including a fixed member, a movable member, a connecting member, and a driving member, one end of the movable member being movably connected to the fixed member, the other end of the movable member being movably connected to the connecting member, and the fixed member being fixedly connected to the first cavity or the fixing bottom surface;

[0015] The connecting member is provided with a locking mechanism that cooperates with the first cavity, the driving member is fixedly connected to the movable member, and the moving end of the driving member passes through the movable member to contact the second cavity and press the test cavity.

[0016] A second aspect of the present disclosure provides a multi-cavity test system for thin film penetration detection, comprising at least one multi-cavity test structure for thin film penetration detection according to the first aspect of the present disclosure fixed on a substrate.

[0017] A third aspect of the present disclosure provides a thin film penetration testing method, which utilizes the multi-cavity test structure for thin film penetration testing described in the first aspect of the present disclosure, comprising the following steps:

[0018] The fifth gas inlet of the first cavity is connected to the test gas, and the first gas inlet and the third gas inlet of the first cavity are connected to the carrier gas;

[0019] The test gas enters the interconnected inner cavities of the common cavity through the fifth gas inlet on the first cavity, part of the test gas is discharged through the fourth gas outlet, and part of the test gas passes through the sample and enters the inner cavities of the first cavity and the second cavity;

[0020] The carrier gas in the first cavity and the second cavity is carried out through the first gas outlet and the third gas outlet respectively, enters the sensor for gas analysis, and completes the test.

[0021] A fourth aspect of the present disclosure provides a thin film penetration testing method, using the multi-cavity test structure for thin film penetration testing according to the first aspect of the present disclosure, comprising the following steps:

[0022] The fifth gas inlet of the first cavity is connected to the carrier gas, and the first gas inlet and the third gas inlet of the first cavity are connected to the test gas;

[0023] The carrier gas enters the interconnected inner cavities of the common cavity through the fifth gas inlet on the first cavity, and the test gas enters the inner cavity of the first cavity and the inner cavity of the second cavity through the first gas inlet and the second gas inlet respectively;

[0024] The test gas passes through the sample into the inner cavity of the common cavity, is carried out by the carrier gas through the fifth gas outlet, and enters the sensor for gas analysis, completing the test.

[0025] A fifth aspect of the present disclosure provides a multi-cavity test structure for thin film permeation detection, comprising a first cavity, a common cavity, and a second cavity, each of which has an opening. The common cavity is located between the first cavity and the second cavity, and the common cavity includes a plurality of inner cavities that are not interconnected.

[0026] The first cavity includes at least one first inner cavity, the first inner cavity opening is opposite to the corresponding inner cavity opening of the common cavity, and the second cavity includes at least one second inner cavity, the second inner cavity opening is opposite to the corresponding inner cavity opening of the common cavity.

[0027] As some possible implementations, the first cavity is provided with a first air inlet and a first air outlet communicating with the first inner cavity, and the second cavity is provided with a second air inlet and a second air outlet communicating with the second inner cavity;

[0028] The first cavity is further provided with a third air inlet and a third air outlet. The third air inlet is communicated with the second air inlet, and the third air outlet is communicated with the second air outlet.

[0029] As some possible implementations, the common cavity is provided with a fourth air inlet and a fourth air outlet that are in communication with the inner cavity of the common cavity, and the inner cavity of each common cavity is provided with an independent fourth air inlet and fourth air outlet;

[0030] The first cavity is further provided with a plurality of fifth air inlets and fifth air outlets. The fifth air inlets are connected to the fourth air inlets in a one-to-one manner, and the fifth air outlets are connected to the fourth air outlets in a one-to-one manner.

[0031] Some possible implementations further include a clamping mechanism, the clamping mechanism including a fixed member, a movable member, a connecting member, and a driving member, one end of the movable member being movably connected to the fixed member, the other end of the movable member being movably connected to the connecting member, and the fixed member being fixedly connected to the first cavity or the fixing bottom surface;

[0032] The connecting member is provided with a locking mechanism that cooperates with the first cavity, the driving member is fixedly connected to the movable member, and the moving end of the driving member passes through the movable member to contact the second cavity and press the test cavity.

[0033] A sixth aspect of the present disclosure provides a multi-cavity test system for thin film penetration detection, comprising at least one multi-cavity test structure for thin film penetration detection according to the fourth aspect of the present disclosure fixed on a substrate.

[0034] A seventh aspect of the present disclosure provides a thin film penetration detection method, which utilizes the multi-cavity test structure for thin film penetration detection according to the fourth aspect of the present disclosure, comprising the following steps:

[0035] The fifth gas inlet of the first cavity is connected to the test gas, and the first gas inlet and the third gas inlet of the first cavity are connected to the carrier gas;

[0036] The test gas enters the inner cavities of the common cavity through the fifth gas inlets on the first cavity, part of the test gas is discharged through the corresponding fourth gas outlets, and part of the test gas passes through the sample and enters the inner cavities of the first cavity and the second cavity;

[0037] The carrier gas in the first cavity and the second cavity is carried out through the first gas outlet and the third gas outlet respectively, enters the sensor for gas analysis, and completes the test.

[0038] An eighth aspect of the present disclosure provides a thin film penetration detection method, using the multi-cavity test structure for thin film penetration detection according to the fourth aspect of the present disclosure, comprising the following steps:

[0039] The fifth gas inlet of the first cavity is connected to the carrier gas, and the first gas inlet and the third gas inlet of the first cavity are connected to the test gas;

[0040] The carrier gas enters the interconnected inner cavities of the common cavity through the fifth gas inlet on the first cavity, and the test gas enters the inner cavity of the first cavity and the inner cavity of the second cavity through the first gas inlet and the second gas inlet respectively;

[0041] The test gas passes through the sample into the inner cavity of the common cavity, is carried out by the carrier gas through each fifth gas outlet, and enters the sensor for gas analysis to complete the test.

[0042] Compared with the prior art, the present invention has the following advantages:

[0043] 1. The multi-cavity test structure, system or method for thin film permeation detection disclosed in the present invention has a minimum module of a stacked structure, which can test two samples at the same time and ensure that the test conditions of the two test chambers are exactly the same. Based on this minimum module, the test chamber can be expanded into a 4-cavity or 6-cavity device structure that is a multiple of 2. The structure is simple, compact and easy to operate.

[0044] 2. The multi-cavity test structure, system or method for thin film penetration detection disclosed in the present invention can achieve stable compression of the test cavity and the common cavity at the same time by providing a compression structure and compressing the uppermost cavity.

[0045] 3. In the multi-cavity test structure, system or method for thin film permeation detection disclosed in the present invention, each air inlet and outlet structure is arranged on the first cavity. During the test sample change process, there is no need to change the pipeline connection, and only the top test cavity and the common test cavity need to be operated, thereby eliminating the need for multiple debugging and avoiding air leakage caused by multiple movement of the pipeline.

[0046] 4. The multi-cavity test structure, system or method for thin film penetration detection disclosed in the present invention is more compact in structure, has high space utilization, can be pre-loaded with samples, reduces test preparation time, and improves test efficiency.

[0047] 5. In the multi-cavity test structure, system or method for thin film penetration detection described in the first, second, third and fourth aspects of the present disclosure, the inner cavities of the common cavity are interconnected, which further ensures the consistency of the test conditions of each test cavity, improves the stability of the test results, and facilitates comparative testing.

[0048] 6. The multi-cavity test structure, system or method for thin film penetration detection described in the fifth, sixth, seventh and eighth aspects of the present disclosure has the inner cavities of the common cavity not interconnected, which enables individual testing of each sample, ensures the independence of each test sample, and enables penetration testing of different gases.

[0049] Advantages of additional aspects of the present disclosure will be given in part in the following description and in part will become apparent from the following description or learned through practice of the present disclosure. BRIEF DESCRIPTION OF THE DRAWINGS

[0050] The accompanying drawings, which constitute a part of the present disclosure, are used to provide a further understanding of the present disclosure. The exemplary embodiments of the present disclosure and their descriptions are used to explain the present disclosure and do not constitute an improper limitation to the present disclosure.

[0051] Figure 1 A front view of the multi-cavity test structure for thin film penetration detection provided in Example 1 of the present disclosure.

[0052] Figure 2 AA view of the multi-cavity test structure for thin film penetration testing provided in Example 1 of the present disclosure.

[0053] Figure 3 BB view of the multi-cavity test structure for thin film penetration detection provided in Example 1 of the present disclosure.

[0054] Figure 4 Schematic diagram of the compression structure of the multi-cavity test structure for thin film penetration detection provided in Example 1 of the present disclosure.

[0055] Figure 5 Schematic diagram of the opening of the compression structure of the multi-cavity test structure for film penetration detection provided in Example 1 of the present disclosure.

[0056] Figure 6 Schematic diagram of the multi-cavity test structure provided in Example 1 of the present disclosure.

[0057] Figure 7 Schematic diagram of the multi-cavity test structure provided in Example 1 of the present disclosure.

[0058] Figure 8 Schematic diagram of the multi-chamber testing system provided in Example 2 of the present disclosure.

[0059] Figure 9 Schematic diagram of the multi-chamber testing system provided in Example 2 of the present disclosure.

[0060] Figure 10 A front view of a multi-cavity test structure for thin film penetration detection provided in Example 3 of the present disclosure.

[0061] Figure 11 A view of a multi-cavity test structure MM for thin film penetration testing provided in Example 3 of the present disclosure.

[0062] Figure 12 NN view of the multi-cavity test structure for thin film penetration testing provided in Example 3 of the present disclosure.

[0063] Figure 13 PP view of the multi-cavity test structure for thin film penetration testing provided in Example 3 of the present disclosure.

[0064] Among them, 100, test unit, 101, second cavity air inlet, 102, common cavity air inlet, 103, common cavity air outlet, 104, first cavity air inlet, 105, first cavity air outlet, 106, second cavity air outlet; 111, sealing ring, 112, first cavity, 113, film sample, 114, common cavity, 115, film sample, 116, second cavity, 117, sealing ring;

[0065] 200, pressing mechanism, 201, fixing plate, 202, horizontal plate, 203, driving mechanism, 204, hook plate, 205, handle;

[0066] 301, multi-cavity first cavity;

[0067] 401. Substrate;

[0068] 501, air inlet of the second common cavity, 502, air outlet of the second common cavity, 511, common cavity. DETAILED DESCRIPTION

[0069] The present disclosure will be further described below with reference to the accompanying drawings and embodiments.

[0070] It should be noted that the following detailed descriptions are exemplary and intended to provide further explanation of the present disclosure. Unless otherwise specified, all technical and scientific terms used herein have the same meaning as commonly understood by those skilled in the art to which the present disclosure belongs.

[0071] It should be noted that the terms used herein are only for describing specific embodiments and are not intended to limit the exemplary embodiments according to the present disclosure. As used herein, unless the context clearly indicates otherwise, the singular form is intended to include the plural form. In addition, it should be understood that when the terms "comprise" and / or "include" are used in this specification, they indicate the presence of features, steps, operations, devices, components and / or combinations thereof.

[0072] In the present disclosure, terms such as "upper", "lower", "left", "right", "front", "back", "vertical", "horizontal", "side", "bottom", etc. indicating directions or positional relationships are based on the directions or positional relationships shown in the accompanying drawings. They are merely relational words determined for the convenience of describing the structural relationships of the various parts or elements of the present disclosure, and do not specifically refer to any part or element in the present disclosure, and should not be understood as limitations on the present disclosure.

[0073] In this disclosure, terms such as "fixed connection," "connected," and "connection" should be interpreted broadly to mean a fixed connection, an integral connection, or a detachable connection; a direct connection or an indirect connection through an intermediary. Relevant researchers or technicians in this field may determine the specific meaning of these terms in this disclosure based on specific circumstances, and they should not be construed as limiting this disclosure.

[0074] In the absence of conflict, the embodiments of the present disclosure and the features thereof may be combined with each other.

[0075] Example 1:

[0076] like Figure 1 、 Figure 2 and Figure 3 As shown, embodiment 1 of the present disclosure provides a multi-cavity test structure for thin film penetration detection. The test unit 100 of the multi-cavity test structure includes a first cavity 112 , a common cavity 114 and a second cavity 116 .

[0077] The first cavity 116 is provided with an inner cavity and a pair of air inlet and outlets communicating with the inner cavity, the common cavity 114 is provided with two communicating inner cavities and a pair of air inlet and outlets communicating with the inner cavity, and the second cavity 116 is provided with an inner cavity and a pair of air inlet and outlets communicating with the inner cavity.

[0078] The first cavity 112 is further provided with a second cavity air inlet 101 and an air outlet 106 , which are communicated with the air inlet and outlet of the second cavity 114 respectively;

[0079] The first cavity 112 is further provided with a common cavity air inlet 102 and a common cavity air outlet 103, which are respectively communicated with the air inlet and outlet of the common cavity 116;

[0080] The first cavity 112 is also provided with a first cavity air inlet 104 and a first cavity air outlet 105, which are respectively communicated with the inner cavity of the first cavity. The air inlet and outlet provided on the first cavity 112 are sealedly connected to the air ports of the corresponding cavities, and at least one sealing ring (111, 117) is provided.

[0081] It can be understood that in some other embodiments, more air inlets or air outlets can be opened on the first cavity, the second cavity and the common cavity. It is only necessary to open the corresponding air inlets and outlets on the first cavity. Those skilled in the art can select and design according to the specific working conditions, which will not be repeated here.

[0082] Between the common cavity and the film sample 113, grease sealing or at least one sealing ring or fluid ring sealing is provided;

[0083] Between the first cavity and the film sample 113, grease sealing or at least one sealing ring or fluid ring sealing is provided;

[0084] Grease sealing or at least one sealing ring or fluid ring sealing is provided between the second cavity and the film sample 113 .

[0085] The specific test method is as follows:

[0086] When performing a film permeation test, the common cavity air inlet 102 on the first cavity 112 is connected to the test gas, and the first cavity air inlet 104 and the second cavity air inlet 101 are connected to the carrier gas;

[0087] The test gas enters the two communicating inner cavities of the common cavity 114 through the common cavity air inlet 102 on the first cavity, and part of the test gas is discharged through the common cavity air outlet 103;

[0088] Part of the test gas passes through the two test film samples 115 and enters the inner cavity of the first cavity 112 and the inner cavity of the second cavity 116, and is carried out by the carrier gas of the first cavity 112 and the second cavity 116 through the first cavity gas outlet 105 and the second cavity gas outlet 106 respectively, and enters the sensor for gas analysis to complete the test.

[0089] It is understandable that during the above test process, the test gas and carrier gas can be swapped and the reverse test can be performed. The final result can be divided by 2 to obtain the test result. The specific method is as follows:

[0090] When performing a film permeation test, the common cavity air inlet 102 on the first cavity 112 is connected to the carrier gas, and the first cavity air inlet 104 and the second cavity air inlet 101 are connected to the test gas;

[0091] The carrier gas enters the two communicating inner cavities of the common cavity 114 through the common cavity gas inlet 102 on the first cavity;

[0092] Part of the test gas passes through the two test film samples 115 and enters the inner cavity of the common cavity, is carried out by the carrier gas through the first common cavity gas outlet 103, and enters the sensor for gas analysis, completing the test.

[0093] like Figure 4 and Figure 5 The test unit 100 may further include a pressing mechanism 200 , which includes a fixing plate 201 , a horizontal plate 202 , a driving mechanism 203 , a hook plate 204 and a handle 205 ;

[0094] The fixed plate 201 is rigidly connected to the first cavity 112, the horizontal plate 202 is hingedly connected to the fixed plate 201, and a driving mechanism 203 is also fixed on the horizontal plate 202, the hook plate 204 is hingedly connected to the horizontal plate, the hook plate 204 is in contact with the slot of the first cavity 112 and clamped, the moving end of the driving mechanism 203 is in plane contact with the second cavity 116, and the handle 205 is fixed on the hook plate 204.

[0095] The hook plate 204 in this embodiment can also be provided with one or more protrusions on a plate to cooperate with the slots on the first cavity. Those skilled in the art can make a choice according to the specific working conditions, which will not be elaborated here.

[0096] The fixed plate 201 in this embodiment may also adopt fixing parts of other structures, such as blocks or other regular or irregular shapes, as long as it can achieve a fixed connection with the fixed bottom surface or the first cavity and be hinged with the horizontal plate 202. Those skilled in the art can make a choice according to the specific working conditions, which will not be elaborated here.

[0097] The horizontal plate 202 in this embodiment can also be a beam, or other regular or irregular shapes, as long as it can be tightly pressed together with the fixed plate, the driving mechanism and the hook plate. Those skilled in the art can choose the shape according to the specific working conditions, which will not be elaborated here.

[0098] When the driving mechanism 203 moves toward the second cavity 116 , it pushes the second cavity 116 , so that the first cavity 112 , the second cavity 116 and the common cavity 114 are pressed against each other;

[0099] When the driving mechanism 203 moves in the opposite direction of the second cavity 116, the driving mechanism 203 disengages from the second cavity 116. Holding the handle 205 drives the hook plate 204 to be taken out of the slot of the first cavity 112. There is no clamping force on the first cavity 112, the second cavity 116 and the common cavity 114, and the three cavities can be separated freely.

[0100] In this embodiment, the driving mechanism 203 can be a cylinder, a hydraulic cylinder, an electric cylinder, a linear motor, a motor screw linear mechanism, an electromagnetic driving mechanism, or a manual screw pressing mechanism. Those skilled in the art can choose according to the specific working conditions, which will not be repeated here.

[0101] In this embodiment, the first cavity 301 is configured as one or more inner cavities, each inner cavity corresponds to a group of common cavities and second cavities, forming a new multi-cavity test structure.

[0102] like Figure 6 As shown, the first cavity can be a cubic cavity with multiple inner cavity openings on each side. Each inner cavity corresponds to a group of common cavities and second cavities to form a new multi-cavity test structure. The first cavity can also be a rectangular parallelepiped or other body-shaped structures. Those skilled in the art can make a choice according to the specific working conditions, which will not be repeated here.

[0103] like Figure 7 As shown, multiple inner cavity openings are opened on the upper surface of the first cavity, and each inner cavity corresponds to a group of common cavities and second cavities, forming a new multi-cavity test structure. The first cavity can also be a rectangular parallelepiped or other body-shaped structures. Those skilled in the art can choose according to the specific working conditions, which will not be repeated here.

[0104] Example 2:

[0105] like Figure 8 and Figure 9 As shown, embodiment 2 of the present disclosure provides a multi-cavity test system for thin film penetration detection. One or more test units described in embodiment 1 are fixed on a substrate 401 to form a multi-cavity test system. Those skilled in the art can select and arrange them according to specific working conditions, such as a matrix arrangement or a random arrangement.

[0106] Example 3:

[0107] like Figure 10 、 Figure 11 、 Figure 12 and Figure 13 As shown, in this embodiment, the test unit 500 of the multi-cavity test structure includes a first cavity 112 , a common cavity 114 and a second cavity 116 .

[0108] The first cavity 116 is provided with an inner cavity and a pair of air inlet and outlet ports communicating with the inner cavity, the common cavity 511 is provided with two non-communicating inner cavities and two pairs of air inlet and outlet ports communicating with the inner cavity, and the second cavity 116 is provided with an inner cavity and a pair of air inlet and outlet ports communicating with the inner cavity.

[0109] The first cavity 112 is further provided with a second cavity air inlet 101 and an air outlet 106 , which are communicated with the air inlet and outlet of the second cavity 114 respectively;

[0110] The first cavity 112 is also provided with a common cavity air inlet (102, 501) and a common cavity air outlet (103, 502), which are respectively communicated with the two pairs of air inlets and outlets of the common cavity 511;

[0111] The first cavity 112 is also provided with a first cavity air inlet 104 and a first cavity air outlet 105 communicating with the inner cavity of the first cavity. The air inlet and outlet provided on the first cavity 112 are sealedly connected to the air port of the corresponding cavity, and at least one sealing ring is provided.

[0112] Grease seals, or at least one sealing ring, or fluid ring seals are used between the common cavity and the specimen. Grease seals, or at least one sealing ring, or fluid ring seals are used between the first cavity and the specimen. Grease seals, or at least one sealing ring, or fluid ring seals are used between the second cavity and the specimen.

[0113] It can be understood that in some other embodiments, more air inlets or air outlets can be opened on the first cavity, the second cavity and the common cavity. It is only necessary to open the corresponding air inlets and outlets on the first cavity. Those skilled in the art can select and design according to the specific working conditions, which will not be repeated here.

[0114] The specific test method is:

[0115] When conducting a film permeation test, the common cavity air inlet (102, 501) on the first cavity 112 is connected to the test gas, and the first cavity air inlet 104 and the second cavity air inlet 101 are connected to the carrier gas; the test gas enters the two inner cavities on the common cavity 114 through the common cavity air inlet (102, 501) on the first cavity respectively, part of the test gas is discharged through the common cavity air outlet (103, 502), and part of the test gas passes through the two test film samples 115 and enters the inner cavity of the first cavity 112 and the inner cavity of the second cavity 116, and is carried out by the carrier gas of the first cavity 112 and the second cavity 116 respectively through the first cavity air outlet 105 and the second cavity air outlet 106, and enters the sensor for gas analysis to complete the test.

[0116] It is understandable that during the above test process, the test gas and carrier gas of the paired chambers can be swapped to perform reverse testing, and the test gas and carrier gas used in the two pairs of chambers are not limited to the same gas. The specific method is as follows:

[0117] When performing a film permeation test, the common cavity air inlet (102, 501) on the first cavity 112 is connected to the carrier gas, and the first cavity air inlet 104 and the second cavity air inlet 101 are connected to the test gas;

[0118] The carrier gas enters the two inner cavities on the common cavity 114 through the common cavity gas inlets (102, 501) on the first cavity respectively;

[0119] The test gas enters each inner cavity of the common cavity through the two test film samples 115, is carried out by the carrier gas in the common cavity through the common cavity gas outlets (103, 502), enters the sensor for gas analysis, and completes the test.

[0120] It can be understood that a clamping mechanism may also be provided in this embodiment. The specific clamping mechanism is the same as the clamping mechanism provided in Example 1 and will not be described in detail here.

[0121] Example 4:

[0122] Embodiment 4 of the present disclosure provides a multi-cavity test system for thin film penetration detection, in which one or more test units described in Embodiment 3 are fixed on a substrate to form a multi-cavity test structure. Those skilled in the art can select and arrange them according to specific working conditions, such as a matrix arrangement or a random arrangement.

[0123] The foregoing description is merely a preferred embodiment of the present disclosure and is not intended to limit the present disclosure. Those skilled in the art will readily appreciate that various modifications and variations are possible. Any modifications, equivalent substitutions, or improvements made within the spirit and principles of the present disclosure shall be included within the scope of protection of the present disclosure.

Claims

1. A multi-cavity test structure for thin film penetration detection, characterized in that: The invention comprises a first cavity, a common cavity and a second cavity, each of which has an opening. The common cavity is located between the first cavity and the second cavity, and the common cavity comprises a plurality of inner cavities that are interconnected. The first cavity includes at least one first inner cavity, the opening of the first inner cavity is opposite to the inner cavity opening of the common cavity, and the second cavity includes at least one second inner cavity, the opening of the second inner cavity is opposite to the inner cavity opening of the common cavity; The thin film sample is placed between the first inner cavity opening and the inner cavity opening of the common cavity, and the thin film sample is placed between the second inner cavity opening and the inner cavity opening of the common cavity. A laminated structure is adopted to test the two samples at the same time, and the test conditions of the test cavities corresponding to the two thin film samples are exactly the same.

2. The multi-cavity test structure for thin film penetration detection according to claim 1, characterized in that: The first cavity is provided with a first air inlet and a first air outlet communicating with the first inner cavity, and the second cavity is provided with a second air inlet and a second air outlet communicating with the second inner cavity; The first cavity is further provided with a third air inlet and a third air outlet. The third air inlet is communicated with the second air inlet, and the third air outlet is communicated with the second air outlet.

3. The multi-cavity test structure for thin film penetration detection according to claim 1, characterized in that: The common cavity is provided with a fourth air inlet and a fourth air outlet which are in communication with the inner cavity of the common cavity; The first cavity is further provided with a fifth air inlet and a fifth air outlet. The fifth air inlet is communicated with the fourth air inlet, and the fifth air outlet is communicated with the fourth air outlet.

4. The multi-cavity test structure for thin film penetration detection according to claim 1, characterized in that: The invention also includes a clamping mechanism, which includes a fixed member, a movable member, a connecting member and a driving member, wherein one end of the movable member is movably connected to the fixed member, the other end of the movable member is movably connected to the connecting member, and the fixed member is fixedly connected to the first cavity or the fixing bottom surface; The connecting member is provided with a locking mechanism that cooperates with the first cavity, the driving member is fixedly connected to the movable member, and the moving end of the driving member passes through the movable member to contact the second cavity and press the test cavity.

5. A multi-chamber test system for thin film penetration detection, characterized in that: The invention comprises at least one multi-cavity test structure for thin film penetration detection according to any one of claims 1 to 4 fixed on a substrate.

6. A film penetration detection method, characterized in that: The multi-cavity test structure for thin film penetration detection according to any one of claims 1 to 4 comprises the following steps: The fifth gas inlet of the first cavity is connected to the test gas, and the first gas inlet and the third gas inlet of the first cavity are connected to the carrier gas; The test gas enters the interconnected inner cavities of the common cavity through the fifth gas inlet on the first cavity, part of the test gas is discharged through the fourth gas outlet, and part of the test gas passes through the sample and enters the inner cavities of the first cavity and the second cavity; The carrier gas in the first cavity and the second cavity is carried out through the first gas outlet and the third gas outlet respectively, enters the sensor for gas analysis, and completes the test.

7. A film penetration detection method, characterized in that: The multi-cavity test structure for thin film penetration detection according to any one of claims 1 to 4 comprises the following steps: The fifth gas inlet of the first cavity is connected to the carrier gas, and the first gas inlet and the third gas inlet of the first cavity are connected to the test gas; The carrier gas enters the interconnected inner cavities of the common cavity through the fifth gas inlet on the first cavity, and the test gas enters the inner cavity of the first cavity and the inner cavity of the second cavity through the first gas inlet and the second gas inlet respectively; The test gas passes through the sample into the inner cavity of the common cavity, is carried out by the carrier gas through the fifth gas outlet, and enters the sensor for gas analysis, completing the test.

8. A multi-cavity test structure for thin film penetration detection, characterized in that: The invention comprises a first cavity, a common cavity and a second cavity, each of which has an opening. The common cavity is located between the first cavity and the second cavity, and the common cavity includes a plurality of inner cavities that are not connected to each other. The first cavity includes at least one first inner cavity, the opening of the first inner cavity is opposite to the corresponding inner cavity opening of the common cavity, and the second cavity includes at least one second inner cavity, the opening of the second inner cavity is opposite to the corresponding inner cavity opening of the common cavity; The film sample is placed between the first inner cavity opening and the inner cavity opening of the common cavity, and the film sample is placed between the second inner cavity opening and the inner cavity opening of the common cavity. A laminated structure is adopted to test two samples at the same time.

9. The multi-cavity test structure for thin film penetration detection according to claim 8, characterized in that: The first cavity is provided with a first air inlet and a first air outlet communicating with the first inner cavity, and the second cavity is provided with a second air inlet and a second air outlet communicating with the second inner cavity; The first cavity is further provided with a third air inlet and a third air outlet. The third air inlet is communicated with the second air inlet, and the third air outlet is communicated with the second air outlet.

10. The multi-cavity test structure for thin film penetration detection according to claim 8, characterized in that: The common cavity is provided with a fourth air inlet and a fourth air outlet which are in communication with the inner cavity of the common cavity, and the inner cavity of each common cavity is provided with an independent fourth air inlet and fourth air outlet; The first cavity is further provided with a plurality of fifth air inlets and fifth air outlets. The fifth air inlets are connected to the fourth air inlets in a one-to-one manner, and the fifth air outlets are connected to the fourth air outlets in a one-to-one manner.

11. The multi-cavity test structure for thin film penetration detection according to claim 8, characterized in that: The invention also includes a clamping mechanism, which includes a fixed member, a movable member, a connecting member and a driving member, wherein one end of the movable member is movably connected to the fixed member, the other end of the movable member is movably connected to the connecting member, and the fixed member is fixedly connected to the first cavity or the fixing bottom surface; The connecting member is provided with a locking mechanism that cooperates with the first cavity, the driving member is fixedly connected to the movable member, and the moving end of the driving member passes through the movable member to contact the second cavity and press the test cavity.

12. A multi-chamber test system for thin film penetration detection, characterized in that: The invention comprises at least one multi-cavity test structure for thin film penetration detection according to any one of claims 8 to 11 fixed on a substrate.

13. A film penetration detection method, characterized in that: The multi-cavity test structure for thin film penetration detection according to any one of claims 8 to 11 comprises the following steps: The fifth gas inlet of the first cavity is connected to the test gas, and the first gas inlet and the third gas inlet of the first cavity are connected to the carrier gas; The test gas enters the inner cavities of the common cavity through the fifth gas inlets on the first cavity, part of the test gas is discharged through the corresponding fourth gas outlets, and part of the test gas passes through the sample and enters the inner cavities of the first cavity and the second cavity; The carrier gas in the first cavity and the second cavity is carried out through the first gas outlet and the third gas outlet respectively, enters the sensor for gas analysis, and completes the test.

14. A film penetration detection method, characterized in that: The multi-chamber test structure for thin film permeation detection according to any one of claims 8 to 11 comprises the following steps: connecting the fifth gas inlet of the first cavity to a carrier gas, and connecting the first gas inlet and the third gas inlet of the first cavity to a test gas; The carrier gas enters the interconnected inner cavities of the common cavity through the fifth gas inlet on the first cavity, and the test gas enters the inner cavity of the first cavity and the inner cavity of the second cavity through the first gas inlet and the second gas inlet respectively; The test gas passes through the sample into the inner cavity of the common cavity, is carried out by the carrier gas through each fifth gas outlet, and enters the sensor for gas analysis to complete the test.

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