A reflow docking device based on the single crystal holder of NTC3050 wire cutting machine

Abstract

The present invention discloses a reflow docking device based on a single crystal material holder of an NTC3050 wire-cutting machine, comprising a frame and a single crystal rod body, the top of the frame is fixedly connected to a workbench, the top surface of the workbench is fixedly connected to a clamping device in a vertical position, a material holder is placed on the workbench, the material holder corresponds to the position of the clamping device, the two sides of the top surface of the workbench are fixedly connected to a centering cylinder, the power end of the centering cylinder is fixedly connected to one end of a push rod, the other end of the push rod is fixedly connected to one side of a push plate, and the other side of the push plate contacts the side surface of the material holder; the clamping device comprises a base, the base is fixedly connected to the top surface of the workbench by bolts, two sliding rods are respectively fixedly connected to the two sides of the top surface of the base, the two sliding rods are slidably connected to two left sliders on the left side, the two left sliders are fixedly connected to a left clamping arm, and the two sliding rods are slidably connected to two right sliders on the right side. The present invention has a high degree of automation, precise and fast centering, and can quickly dock the material holder, meeting the reflow work of the material holder after the degumming process.

Description

Technical Field

[0001] The invention relates to the technical field of NTC3050 type wire sawing machine equipment, in particular to a reflow docking device based on a single crystal material seat of an NTC3050 type wire sawing machine. Background Art

[0002] Single crystal silicon usually refers to a material formed by a certain arrangement of silicon atoms. The conductivity of semiconductors is between that of conductors and insulators. Silicon, germanium, gallium arsenide and cadmium sulfide are all semiconductor materials. The resistivity of semiconductor materials decreases with increasing temperature and radiation intensity. Adding trace impurities to semiconductors has a decisive influence on their conductivity, which is an important characteristic of semiconductor materials. Silicon is the most common and widely used semiconductor material. When molten silicon solidifies, silicon atoms are arranged in a diamond lattice to form crystal nuclei, which grow into grains with the same crystal plane orientation to form single crystal silicon. As a relatively active non-metallic element crystal, single crystal silicon is an important component of crystal materials and is at the forefront of the development of new materials. The manufacturing of single crystal silicon materials goes through the following process: quartz sand-metallurgical grade silicon-purification and refining-deposition of polycrystalline silicon ingots-single crystal silicon-silicon wafer cutting. Its main uses are as semiconductor materials and using solar photovoltaic power generation and heating. Single crystal silicon has the physical properties of a metalloid, has weak conductivity, and its conductivity increases with increasing temperature; it has significant semi-conductivity. Ultrapure single crystal silicon is an intrinsic semiconductor. Adding trace amounts of IIIA group elements, such as boron, to ultrapure single crystal silicon can improve its conductivity and form a p-type silicon semiconductor; adding trace amounts of VA group elements, such as phosphorus or arsenic, can also improve its conductivity and form an n-type silicon semiconductor. Single crystal silicon rods are silicon single crystal rods formed by shaping or pulling in a furnace through zone melting or Czochralski process.

[0003] In the semiconductor industry, NTC3050 wire cutting machines are usually used to cut single crystal ingots into single crystal wafers. When cutting, the single crystal ingot needs to be placed in the material holder slot. When placing, the single crystal ingot and the material holder need to be aligned. The accuracy of the alignment will directly affect the cutting quality of the single crystal ingot. The current alignment process has large errors, low automation, and low precision. The material holder is prone to offset after the debonding process, which in turn affects the quality of the reflow process.

[0004] To this end, we propose a reflow docking device based on the single crystal material holder of the NTC3050 wire cutting machine to solve the above problems. Summary of the invention

[0005] The object of the present invention is to provide a reflow docking device based on a single crystal material holder of an NTC3050 wire sawing machine to solve the problems raised in the above background technology.

[0006] To achieve the above-mentioned purpose, the present invention provides the following technical solutions: a reflow docking device based on a single crystal material seat of an NTC3050 wire-cutting machine, comprising a frame and a single crystal rod body, the top of the frame is fixedly connected to a workbench, the top surface of the workbench is fixedly connected to a clamping device in a vertical position, a material seat is placed on the workbench, the material seat corresponds to the position of the clamping device, both sides of the top surface of the workbench are fixedly connected to a centering cylinder, the power end of the centering cylinder is fixedly connected to one end of a push rod, the other end of the push rod is fixedly connected to one side of a push plate, and the other side of the push plate contacts the side surface of the material seat; the clamping device comprises a base, the base is fixedly connected to the top surface of the workbench by bolts, two sliding rods are respectively fixedly connected to the two sides of the top surface of the base, the two sliding rods are slidably connected to the two left sliding blocks on the left side, and the two left sliding blocks are fixedly connected to the left The clamping arm, the two sliding rods are slidably connected to the two right sliding blocks on the right side, and the two right sliding blocks are fixedly connected to the right clamping arm. The center positions at both ends of the top surface of the base are respectively rotatably connected to two synchronous pulleys, and belts are sleeved on the two synchronous pulleys. The bottom end of the left clamping arm is fixed to the left fixed block, and the left fixed block is fixed to the belt. The bottom end of the right clamping arm is fixed to the right fixed block, and the right fixed block is fixed to the belt. The top surface of the base is located at the two sides of the two sliding rods and is respectively fixed to two fixed plates, and the top ends of the two fixed plates are respectively fixed to two placing inclined plates, and the two placing inclined plates and the two fixed plates are in a symmetrical relationship. The top surface of the base is located at the center position of the two sliding rods and is fixed to the clamping cylinder, and the power end of the clamping cylinder is fixed to one end of the push rod, and the other end of the push rod is fixed to the right clamping arm.

[0007] Preferably, the left fixed block and the right fixed block are respectively fixed to two sides of the belt, and the distance between the left fixed block and the left synchronous belt pulley is consistent with the distance between the right fixed block and the right synchronous belt pulley.

[0008] Preferably, the single crystal ingot body is placed on an inclined placement plate, and two inclined placement plates are rotatably connected to a plurality of rollers, and the rollers contact the single crystal ingot body.

[0009] Preferably, a placement groove is provided at the center of the material holder, the vertical position of the placement groove is consistent with the vertical position of the placement inclined plate, and two material holder handles are fixedly connected to both ends of the material holder.

[0010] Preferably, the bottom end of the frame is fixedly connected to four supporting legs, and the bottom end of the frame is fixedly connected to four auxiliary supporting frames at the sides of the four supporting legs, and the auxiliary supporting frames are L-shaped structures.

[0011] Compared with the prior art, the present invention has the following beneficial effects:

[0012] The invention has a high degree of automation, is accurate and fast in centering, can quickly carry out docking of the material seat, and meets the reflow work of the material seat after the degumming process. BRIEF DESCRIPTION OF THE DRAWINGS

[0013] Figure 1 It is a schematic diagram of the structure of the present invention;

[0014] Figure 2 It is a schematic diagram of the enlarged structure of the explosion structure of the present invention;

[0015] Figure 3 It is a schematic diagram of an enlarged structure of the clamping device in the present invention;

[0016] Figure 4 It is a schematic diagram of an enlarged side view of the clamping device in the present invention;

[0017] Figure 5 It is a schematic diagram of an enlarged top view of the clamping device in the present invention.

[0018] In the figure: 1 frame, 2 workbench, 3 material holder, 4 clamping device, 5 centering cylinder, 6 ejector, 7 push plate, 8 single crystal ingot body, 9 support leg, 10 auxiliary support frame, 31 placement slot, 32 material holder handle, 41 base, 42 slide bar, 43 left slider, 44 left clamping arm, 45 left fixed block, 46 right slider, 47 right clamping arm, 48 right fixed block, 49 synchronous pulley, 410 belt, 411 fixed plate, 412 placement inclined plate, 413 roller, 414 clamping cylinder, 415 push rod, 416 bolt. DETAILED DESCRIPTION

[0019] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0020] See also Figure 1-3The present invention provides a technical solution: a reflow docking device based on a single crystal material seat of an NTC3050 wire cutting machine, comprising a frame 1 and a single crystal rod body 8, the top of the frame 1 is fixedly connected to a workbench 2, the top surface of the workbench 2 is fixedly connected to a clamping device 4 at a vertical position, a material seat 3 is placed on the workbench 2, the material seat 3 corresponds to the position of the clamping device 4, both sides of the top surface of the workbench 2 are fixedly connected to a centering cylinder 5, the power end of the centering cylinder 5 is fixedly connected to one end of a push rod 6, the other end of the push rod 6 is fixedly connected to one side of a push plate 7, and the other side of the push plate 7 contacts the side surface of the material seat; the clamping device 4 comprises a base 41, the base 41 is fixedly connected to the top surface of the workbench 2 by bolts 416, two sliding rods 42 are respectively fixedly connected to the two sides of the top surface of the base 41, the two sliding rods 42 are slidably connected to two left sliding blocks 43 on the left side, the two left sliding blocks 43 are fixedly connected to a left clamping arm 44, and the two sliding rods 42 are slidably connected to two right Slider 46, two right sliders 46 are fixedly connected to the right clamping arm 47, the center positions at both ends of the top surface of the base 41 are rotatably connected to two synchronous pulleys 49, and the two synchronous pulleys 49 are sleeved with belts 410, the bottom end of the left clamping arm 44 is fixedly connected to the left fixed block 45, and the left fixed block 45 is fixedly connected to the belt 410, the bottom end of the right clamping arm 47 is fixedly connected to the right fixed block 48, and the right fixed block 48 is fixedly connected to the belt 410, the top surface of the base 41 is located on both sides of the two sliding rods 42 and is respectively fixed to two fixed plates 411, and the top ends of the two fixed plates 411 are respectively fixed to two placement inclined plates 412, and the two placement inclined plates 412 and the two fixed plates 411 are in a symmetrical relationship, the top surface of the base 41 is located at the center position of the two sliding rods 42 and is fixed to the clamping cylinder 414, the power end of the clamping cylinder 414 is fixedly connected to one end of the push rod 415, and the other end of the push rod 415 is fixedly connected to the right clamping arm 47.

[0021] The left fixing block 45 and the right fixing block 48 are respectively fixed to the two sides of the belt 410 , and the distance between the left fixing block 45 and the left synchronous pulley 49 is consistent with the distance between the right fixing block 48 and the right synchronous pulley 49 .

[0022] The single crystal ingot body 8 is placed on the placement inclined plates 412 , and a plurality of rollers 413 are rotatably connected to the two placement inclined plates 412 , and the rollers 413 contact the single crystal ingot body 8 .

[0023] A placement groove 31 is provided at the center of the material holder 3 , and the vertical position of the placement groove 31 is consistent with the vertical position of the placement inclined plate 412 . Two ends of the material holder 3 are respectively fixed with two material holder handles 32 .

[0024] The bottom end of the frame 1 is fixedly connected to four supporting legs 9 , and the bottom end of the frame 1 is fixedly connected to four auxiliary supporting frames 10 located at the sides of the four supporting legs 9 , and the auxiliary supporting frames 10 are L-shaped structures.

[0025] Working principle: When the present invention is in use, it is necessary to place the single crystal ingot on the inclined plate on the clamping device, and then the clamping cylinder in the clamping device drives the right clamping arm to move inward, and under the state of the synchronous pulley, the left clamping arm also moves inward, and the stroke is the same, and the two ends of the single crystal ingot are clamped under the action of the roller. At this time, the single crystal ingot is located in the center of the clamping device, and then the cylinders on both sides of the workbench push the edge position of the material holder, and the two cylinders have the same stroke, so that the material holder is located in the center of the workbench, and the single crystal ingot and the placement groove in the material holder can be completed. The present invention has a high degree of automation, accurate and fast centering, and can quickly dock the material holder to meet the reflux work of the material holder after the degumming process.

[0026] Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A reflow docking device based on a single crystal holder of an NTC3050 wire sawing machine, comprising a frame (1) and a single crystal ingot body (8), characterized in that: The top of the frame (1) is fixedly connected to a workbench (2), the top surface of the workbench (2) is fixedly connected to a clamping device (4) in a vertical position, a material seat (3) is placed on the workbench (2), the material seat (3) and the clamping device (4) correspond in position, and both sides of the top surface of the workbench (2) are fixedly connected to a centering cylinder (5), the power end of the centering cylinder (5) is fixedly connected to one end of a push rod (6), the other end of the push rod (6) is fixedly connected to one side of a push plate (7), and the other side of the push plate (7) contacts the side surface of the material seat; The clamping device (4) comprises a base (41), the base (41) is fixedly connected to the top surface of the workbench (2) by bolts (416), two sliding rods (42) are respectively fixedly connected to the two sides of the top surface of the base (41), the two sliding rods (42) are slidably connected to the two left sliders (43) on the left side, the two left sliders (43) are fixedly connected to the left clamping arm (44), the two sliding rods (42) are slidably connected to the two right sliders (46) on the right side, the two right sliders (46) are fixedly connected to the right clamping arm (47), the center positions of the two ends of the top surface of the base (41) are respectively rotatably connected to two synchronous pulleys (49), the two synchronous pulleys (49) are sleeved with belts (410), and the bottom end of the left clamping arm (44) is fixedly connected to the left fixed block (45), The left fixed block (45) is fixedly connected to the belt (410), the bottom end of the right clamping arm (47) is fixedly connected to the right fixed block (48), the right fixed block (48) is fixedly connected to the belt (410), the top surface of the base (41) is located at the two sides of the two slide bars (42) and is respectively fixedly connected to two fixed plates (411), the top ends of the two fixed plates (411) are respectively fixedly connected to two placement inclined plates (412), the two placement inclined plates (412) and the two fixed plates (411) are symmetrical, the top surface of the base (41) is located at the center of the two slide bars (42) and is fixedly connected to the clamping cylinder (414), the power end of the clamping cylinder (414) is fixedly connected to one end of the push rod (415), and the other end of the push rod (415) is fixedly connected to the right clamping arm (47); The left fixed block (45) and the right fixed block (48) are respectively fixed to two sides of the belt (410), and the distance between the left fixed block (45) and the left synchronous belt pulley (49) is consistent with the distance between the right fixed block (48) and the right synchronous belt pulley (49); The single crystal ingot body (8) is placed on a placement inclined plate (412), and a plurality of rollers (413) are rotatably connected to the two placement inclined plates (412), and the rollers (413) contact the single crystal ingot body (8); a placement groove (31) is provided at the center of the material holder (3), and the vertical position of the placement groove (31) is consistent with the vertical position of the placement inclined plate (412), and two material holder handles (32) are respectively fixed to the two ends of the material holder (3).

2. According to claim 1, a reflow docking device based on a single crystal holder of an NTC3050 wire sawing machine is characterized in that: The bottom end of the frame (1) is fixedly connected to four supporting legs (9), and the bottom end of the frame (1) is fixedly connected to four auxiliary supporting frames (10) at the sides of the four supporting legs (9), and the auxiliary supporting frames (10) are L-shaped structures.

Images