Retaining mechanism of suction holder and ring frame

Abstract

This invention provides a suction and holding device and a holding mechanism for an annular frame, wherein the pleated portion of the suction and holding device does not deform when a component is suctioned and held. The suction and holding device suctions and holds the component, comprising: a suction cup; a cylindrical pleated portion connected to the lower end of the suction cup; and a cylinder disposed inside the cylindrical pleated portion, having an upper end positioned below the upper end of the suction cup, such that the lower opening of the cylinder communicates with a suction source, the component being held contacts the upper end of the suction cup, and the interior of the cylindrical pleated portion, forming a sealed space, is under negative pressure, thereby holding the component.

Description

Technical Field

[0001] This invention relates to a suction retaining device and a retaining mechanism for a ring frame. Background Technology

[0002] The tape attacher integrates a dicing tape onto an annular frame and a wafer. The tape attacher includes: an annular frame holding mechanism that holds an annular frame with an inner diameter larger than the wafer diameter; a wafer holding unit that holds the wafer at the opening of the annular frame; and a attaching unit that attaches the circular dicing tape to the annular frame and the wafer.

[0003] The annular frame holding mechanism includes: a suction cup for attracting and holding the lower surface of the annular frame; and a support table for supporting the lower surface of the annular frame.

[0004] The wafer holding unit has a holding stage with a holding surface that attracts and holds the lower surface of the wafer.

[0005] To align the center of the wafer with the center of the opening of the annular frame, the annular frame holding mechanism, as disclosed in Patent Document 1, uses a positioning unit or similar device to clamp the flat surface formed opposite each other on the outer periphery of the annular frame, thereby positioning the annular frame at the target position. After the annular frame is lifted by air ejected from the suction cup and positioned at the predetermined position, it is held on the suction cup and supported by a support stage.

[0006] The reason for using suction cups is that they will not scratch the lower surface of the ring frame, and they can be used to attract and retain the object even if there is slight deformation in the ring frame. The suction cups have cylindrical pleats to accommodate deformation.

[0007] Patent Document 1: Japanese Patent Application Publication No. 2013-082045

[0008] However, when the annular frame is held in place by the suction cup and supported on the support table, the folds will indent inward due to the attraction between the suction cup and the annular frame. Even if the suction holding of the annular frame is stopped, the indentation will not recover, thus leaving a residual indentation in the folds. As a result, the height relative to the other suction cups will change, making it impossible for the annular frame to float. Summary of the Invention

[0009] Therefore, the object of the present invention is to provide a suction and holding device and a holding mechanism for an annular frame, which, when using a suction and holding device having suction cups and pleats to suction and hold a part being held, prevents the pleats from deforming into an inappropriate shape.

[0010] According to one aspect of the invention, a suction and holding device is provided for attracting and holding a component, wherein the suction and holding device comprises: a suction cup; a cylindrical pleated portion connected to the lower end of the suction cup; and a cylinder disposed inside the cylindrical pleated portion, having an upper end positioned below the upper end of the suction cup, such that the lower opening of the cylinder communicates with a suction source, the component to be held contacts the upper end of the suction cup, and the interior of the cylindrical pleated portion, which becomes a sealed space, is under negative pressure, thereby holding the component.

[0011] According to another aspect of the invention, a retaining mechanism for an annular frame is provided, which retains the annular frame by attracting its lower surface using a suction retaining device. The retaining mechanism comprises: a worktable; the suction retaining device having a suction cup, a cylindrical pleated portion connected to the lower end of the suction cup, and a cylinder disposed inside the cylindrical pleated portion, the cylinder having an upper end positioned below the upper end of the suction cup; and the suction retaining device being disposed in a recess having an opening formed on the upper surface of the worktable. The suction retaining device holds the annular frame by attracting its lower surface. The annular frame contacts the upper end of the suction cup, thereby holding the annular frame; a suction path connects the suction holding device to the suction source; a suction valve is disposed in the suction path; and an air supply path connects the suction holding device to the air supply source. When the annular frame contacts the upper end of the suction cup, the interior of the cylindrical pleats is made negatively pressurized. The suction cup holds the annular frame, and a pressure difference is generated between the pressure applied inside the cylindrical pleats and the atmospheric pressure outside the cylindrical pleats. The cylindrical pleats contract due to the atmospheric pressure and are thus housed in the recess.

[0012] In one and other embodiments of the present invention, a cylinder is disposed inside the pleated portion of the cylinder. Therefore, when the pleated portion is about to cave in, it is supported by the cylinder, thereby preventing the pleated portion from deforming into an unsuitable shape. This ensures that the height of each of the plurality of suction cups remains constant, allowing the annular frame to float and be positioned. Furthermore, the positioned annular frame can be attracted and held. Attached Figure Description

[0013] Figure 1 This is a perspective view showing the overall structure of the ring-shaped frame retaining mechanism.

[0014] Figure 2 This is a cross-sectional view of the ring-shaped frame retaining mechanism viewed from the side.

[0015] Figure 3 This is a sectional view from the side showing the use of a conveying mechanism to move the ring frame to the ring frame holding mechanism.

[0016] Figure 4This is a cross-sectional view taken from the side, showing an air layer formed between the annular frame and the suction cup.

[0017] Figure 5 This is a cross-sectional view of the annular frame being attracted and held on the suction cup from the side.

[0018] Figure 6 This is a cross-sectional view of the annular frame retaining mechanism viewed from the side in the following case: The suction retaining device provided in the annular frame retaining mechanism is a bellows pad that is an integral part of the suction cup and the cylindrical pleated part, and the cylinder inside the cylindrical pleated part has a structure with a shoulder.

[0019] Label Explanation

[0020] 1: Annular frame; 1a: Upper surface of the annular frame; 1b: Lower surface of the annular frame; 10: Annular frame holding mechanism; 11: Annular worktable; 11a: Upper surface of the annular worktable; 11c: Recess; 110b: Hole; 110c: Internal thread; 12: Holding worktable; 12a: Holding surface; 2: Conveying mechanism; 21: Adsorption part; 22: Holding component; 23: Support part; 24: Arm; 25: Connecting component; 26: Conveying suction source; 27: Connecting path; 31: First flat surface; 32: Second flat surface; 33: Third flat surface; 34: Fourth flat surface; 40: Suction holding device; 41: Suction cup; 41a: Upper end of suction cup; 41b: Lower end of suction cup; 42: Cylinder pleat; 43: Cylinder; 4 3a: Upper end of the cylinder; 43b: Lower opening of the cylinder; 430: Shoulder; 431: External thread; 51: First fixed positioning part; 51B: First fixed component; 51P: First fixed pin; 53: First movable positioning part; 53B: First movable component; 53P: First movable pin; 53S: First shaft; 55: Second fixed positioning part; 55B: Second fixed component; 55P: Second fixed pin; 57: Second movable positioning part; 57B: Second movable component; 57P: Second movable pin; 57S: Second shaft; 61: Suction source; 62: Suction valve; 63: Suction path; 64: Air supply source; 65: Air valve; 66: Air supply path; a: Confluence point; 67: Common passage; 71: First block; 72: Second block. Detailed Implementation

[0021] 1. Structure of the ring frame retaining mechanism

[0022] like Figure 1 As shown, the annular frame holding mechanism 10 is a holding mechanism for holding the annular frame 1. The annular frame 1 is, for example, attached together with a wafer (not shown) to an adhesive tape (not shown). By integrating the annular frame 1 with the wafer (not shown), the operational performance of the wafer (not shown) can be improved.

[0023] The annular frame 1 has: a first flat surface 31 and a second flat surface 32 that are parallel to each other; and a third flat surface 33 and a fourth flat surface 34 that are parallel to the direction perpendicular to the first flat surface 31 and the second flat surface 32. These four flat surfaces 31 to 34 are disposed on the outer periphery of the annular frame 1.

[0024] The following describes the annular frame retaining mechanism 10.

[0025] like Figure 1 As shown, the annular frame holding mechanism 10 has a holding stage 12. The upper surface of the holding stage 12 serves as a holding surface 12a for holding wafers, etc.

[0026] The annular frame holding mechanism 10 has an annular worktable 11. The annular worktable 11 surrounds the holding worktable 12 and has a plurality of openings (in the upper surface 11a of the annular worktable 11) formed therein. Figure 1 (There are four) concave parts 11c.

[0027] The annular frame holding mechanism 10 includes, for example, a first fixed positioning part 51 and a first movable positioning part 53 arranged facing each other; and a second fixed positioning part 55 and a second movable positioning part 57 arranged facing each other. For example, the direction in which the first fixed positioning part 51 and the first movable positioning part 53 face each other is perpendicular to the direction in which the second fixed positioning part 55 and the second movable positioning part 57 face each other.

[0028] The first fixed positioning part 51 has: a first fixed component 51B fixed to the annular worktable 11; and two first fixed pins 51P mounted on the first fixed component 51B.

[0029] The first movable positioning part 53, opposite to the first fixed positioning part 51, includes: a first movable member 53B; a first movable pin 53P mounted on the first movable member 53B; and a first shaft 53S that passes through the first movable member 53B radially in the annular worktable 11. The first movable member 53B is capable of moving radially along the first shaft 53S in the annular worktable 11.

[0030] Similarly, the second fixed positioning part 55 has: a second fixed member 55B fixed to the annular worktable 11; and two second fixed pins 55P mounted on the second fixed member 55B.

[0031] The second movable positioning part 57, opposite to the second fixed positioning part 55, includes: a second movable member 57B; a second movable pin 57P mounted on the second movable member 57B; and a second axis 57S that passes through the second movable member 57B radially in the annular worktable 11. The second movable member 57B is capable of moving radially along the second axis 57S in the annular worktable 11.

[0032] In the first movable positioning part 53, for example, a spring mechanism (not shown) is provided inside the first movable member 53B. For example, when the first movable pin 53P is pressed from the +Z direction side, the first movable pin 53P descends in the -Z direction and is housed inside the first movable member 53B by means of this spring mechanism. Furthermore, by releasing the pressing force applied to the first movable pin 53P from the +Z direction side, the first movable pin 53P, housed inside the first movable member 53B, rises in the +Z direction and protrudes again from the annular worktable 11. Figure 1 In the process, without applying the aforementioned pressing force to the first movable pin 53P, the first movable pin 53P protrudes on the annular worktable 11.

[0033] In the second movable positioning part 57, the second movable pin 57P can also be moved up and down, for example, by a spring mechanism (not shown) disposed inside the second movable member 57B.

[0034] With the annular frame 1 placed on the upper surface 11a of the annular worktable 11, for example, the first flat surface 31 and the second flat surface 32 of the annular frame 1 are clamped by the first fixed positioning part 51 and the first movable positioning part 53, thereby positioning and fixing the annular frame 1 on the upper surface 11a of the annular worktable 11.

[0035] like Figure 2 As shown, a hole 110b smaller than the recess 11c is formed on the bottom surface of the recess 11c formed in the annular worktable 11.

[0036] A suction and holding device 40 is provided in the recess 11c.

[0037] The suction and holding device 40 has a suction cup 41. An annular frame 1 can be mounted on the suction cup 41.

[0038] The suction and holding device 40 has a cylindrical pleated portion 42 that is telescopic in the Z-axis direction. The cylindrical pleated portion 42 is connected to the lower end 41b of the suction cup 41.

[0039] The suction and holding device 40 has a hollow cylindrical tube 43. The tube 43 is disposed inside the tube pleats 42, and the lower opening 43b of the tube 43 is connected to the hole 110b.

[0040] Furthermore, the upper end 43a of the cylinder 43 is positioned below the upper surface 11a of the annular worktable 11. The positional relationship between the upper end 43a of the cylinder 43 and the upper end 41a of the suction cup 41 is adjusted, for example, so that even if the annular frame 1 is attracted and held on the suction cup 41 and the cylinder pleats 42 are contracted, the height of the upper end 43a of the cylinder 43 will not be higher than the height of the upper end 41a of the suction cup 41.

[0041] Below the holding worktable 12 are arranged: a suction source 61; a suction path 63 connected to the suction source 61; and a suction valve 62, which switches the connection state between the suction source 61 and the suction path 63. Additionally, below the holding worktable 12 are arranged: an air supply source 64; an air supply path 66 connected to the air supply source 64; and an air valve 65, which switches the connection state between the air supply source 64 and the air supply path 66.

[0042] The suction path 63 and the air supply path 66 merge at the confluence point a and connect to the common passage 67. The common passage 67 connects to the orifice 110b.

[0043] For example, when the suction valve 62 is open and the air valve 65 is closed, when the suction source 61 exerts a suction force, the resulting suction force is transmitted through the suction path 63 to the common passage 67, and further transmitted through the common passage 67 to the orifice 110b. Furthermore, the suction force is transmitted from the lower opening 43b of the cylinder 43 connected to the orifice 110b into the interior of the cylinder 43, and from the upper end 43a of the cylinder 43 towards the top of the annular worktable 11.

[0044] Additionally, for example, when the suction valve 62 is closed and the air valve 65 is open, when the air supply source 64 is activated to supply air, the supplied air is transmitted through the air supply path 66 to the common passage 67, and further transmitted through the common passage 67 to the orifice 110b. Furthermore, air is transmitted from the lower opening 43b of the cylinder 43 connected to the orifice 110b into the interior of the cylinder 43, supplying air to the top of the annular worktable 11.

[0045] like Figure 3 As shown, the annular frame holding mechanism 10 may, for example, replace the first fixed positioning part 51, the first movable positioning part 53, the second fixed positioning part 55 and the second movable positioning part 57, and have a first block 71 and a second block 72.

[0046] The first block 71 is connected to the cylinder mechanism 8. The first block 71, the second block 72, and the cylinder mechanism 8 have the function of positioning the annular frame 1.

[0047] For example, with the annular frame 1 placed on the annular worktable 11, the cylinder mechanism 8 is used to move the first block 71 radially (in the +Y direction) toward the annular frame 1, thereby causing the side 71c of the first block 71 to contact the first flat surface 31, and the side 72c of the second block 72 to contact the second flat surface 32, thus enabling the first flat surface 31 and the second flat surface 32 to be clamped from the outside. By appropriately adjusting the position of the first block 71 using the cylinder mechanism 8, the annular frame 1 on the annular worktable 11 can be positioned.

[0048] Alternatively, for example, two blocks and a cylinder mechanism that also have the positioning function of the annular frame 1 can be arranged in a direction perpendicular to the side 71c of the first block 71 and the side 72c of the second block 72.

[0049] A conveying mechanism 2 is disposed near the annular frame holding mechanism 10. This conveying mechanism 2, for example, has the function of moving the annular frame 1 onto or off the annular worktable 11. The conveying mechanism 2 includes, for example: a plurality of adsorption portions 21 for adsorbing the annular frame 1; holding members 22 for holding the plurality of adsorption portions 21 respectively; a support portion 23 for supporting the plurality of holding members 22; an arm portion 24 connected to a drive source (not shown); and a connecting member 25 connecting the support portion 23 and the arm portion 24. A connecting passage 27 is formed inside the adsorption portion 21, and the connecting passage 27 is connected to the conveying attraction source 26.

[0050] When the transfer attraction source 26 is activated while the lower surface of the adsorption section 21 is in contact with the upper surface 1a of the annular frame 1, and the transfer attraction source 26 exerts an attraction force, the generated attraction force is transmitted to the lower surface of the adsorption section 21 through the connecting passage 27. Thus, the annular frame 1 can be attracted and held using the adsorption section 21.

[0051] With the annular frame 1 held in the adsorption section 21, a moving unit (not shown) or the like moves the arm 24, thereby enabling the conveying mechanism 2 to move the annular frame 1 onto the upper surface 11a of the annular worktable 11 or to remove the annular frame 1 from the upper surface 11a of the annular worktable 11.

[0052] 2. The action of the ring frame retaining mechanism

[0053] The operation of the annular frame holding mechanism 10 when holding the annular frame 1 using the above-described annular frame holding mechanism 10 will be explained.

[0054] First, such as Figure 3 As shown, the conveying mechanism 2 is used to transport the annular frame 1 to the annular worktable 11, and the annular frame 1 is placed on the annular worktable 11. With the annular frame 1 placed on the annular worktable 11, the lower surface 1b of the annular frame 1 contacts the upper end 41a of the suction cup 41 protruding from the recess 11c of the annular worktable 11.

[0055] And, as Figure 4As shown, suction valve 62 is closed, air valve 65 is opened, and air supply source 64 is activated. Air supplied from air supply source 64 is then transferred from air supply path 66 to common path 67 and to orifice 110b. Air supplied to orifice 110b is provided from the lower opening 43b of cylinder 43 connected to orifice 110b into the interior of cylinder 43 and above suction cup 41.

[0056] When air is supplied above the suction cup 41, force is applied to the annular frame 1 from the lower surface 1b side upwards, and an air layer A is formed between the upper end 41a of the suction cup 41 and the lower surface 1b of the annular frame 1.

[0057] With air layer A formed between the upper end 41a of suction cup 41 and the lower surface 1b of annular frame 1, for example, the cylinder mechanism 8 is used to move the first block 71 radially (in the +Y direction) toward annular frame 1. This causes the side 71c of the first block 71 to contact the first flat surface 31. Furthermore, the first block 71 is slid laterally in the +Y direction, causing the side 72c of the second block 72 to contact the second flat surface 32, clamping the first flat surface 31 and the second flat surface 32 from the outside. In this state, the position of the first block 71 is appropriately adjusted using the cylinder mechanism 8, thereby positioning the annular frame 1 on the annular worktable 11.

[0058] Next, the operation of the air supply source 64 is stopped, thus ceasing the supply of air to the upper part of the suction cup 41. As a result, the air layer A previously formed between the upper end 41a of the suction cup 41 and the lower surface 1b of the annular frame 1 disappears, as... Figure 5 As shown, the lower surface 1b of the annular frame 1 abuts against the upper end 41a of the suction cup 41.

[0059] Then, the air valve 65 is closed, the suction valve 62 is opened, and the suction source 61 is activated to exert a suction force. The suction force generated by the suction source 61 is thus transmitted through the suction path 63 to the common passage 67 and then to the orifice 110b. Furthermore, it is transmitted from the lower opening 43b of the cylinder 43 connected to the orifice 110b to the interior of the cylinder 43, and from the upper end 43a of the cylinder 43 to the lower surface 1b of the annular frame 1.

[0060] In this way, by making the interior of the cylindrical pleated portion 42 negative pressure while the lower surface 1b of the annular frame 1 is in contact with the upper end 41a of the suction cup 41, a pressure difference is generated between the pressure applied inside the cylindrical pleated portion 42 and the atmospheric pressure outside the cylindrical pleated portion 42. As a result, the annular frame 1 is attracted and held to the suction cup 41, and the cylindrical pleated portion 42 contracts due to atmospheric pressure, and the suction cup 41 is housed inside the recess 11c.

[0061] As the pleated portion 42 gradually contracts, the tube 43 disposed inside the pleated portion 42 guides the pleated portion 42, thereby preventing deformation of the pleated portion 42 in a direction perpendicular to the contraction direction. Therefore, the annular frame 1 can be lifted and positioned while ensuring that the height of each of the plurality of suction cups 41 remains constant. Furthermore, the positioned annular frame 1 can be attracted and held.

[0062] In addition, the suction holding device 40 of the annular frame holding mechanism 10 can be as follows: Figure 6 The example shown is a so-called bellows pad where the suction cup 41 and the tube pleats 42 are integrated.

[0063] A generally cylindrical cylinder 43 is disposed inside the pleated portion 42, and an external thread 431 is formed on the lower part of the side of the cylinder 43. An internal thread 110c corresponding to the external thread 431 is formed in the hole 110b. The external thread 431 of the cylinder 43 engages with the internal thread 110c to fix the cylinder 43 to the hole 110b.

[0064] For example, a shoulder 430 is formed on the side of the cylinder 43 in a radially extending manner toward the cylinder 43.

[0065] The external thread 431 of the cylinder 43 engages with the internal thread 110c, and the cylinder fold 42 is clamped by the shoulder 430 and the bottom of the recess 11c, fixing the cylinder fold 42 to the recess 11c. Furthermore, as described above, when the annular frame 1 is placed on the suction cup 41 and the suction source 61 is used to create a negative pressure inside the cylinder fold 42, the annular frame 1 is attracted and held on the suction cup 41, causing the cylinder fold 42 to contract. At this time, the inner wall of the cylinder fold 42, which is fixed by the shoulder 430, is pressed by the upper end 43a (cylinder 43), thus preventing deformation of the cylinder fold 42 in a direction perpendicular to the contraction direction due to atmospheric pressure.

Claims

1. A ring-shaped frame holding mechanism that holds a ring-shaped frame by attracting a lower surface of the ring-shaped frame using an attraction holding device, wherein the ring-shaped frame holding mechanism has: a table; the attraction holding device disposed in a recess having an opening formed in an upper surface of the table; an attraction path that communicates the attraction holding device with an attraction source; an attraction valve provided in the attraction path; and an air supply path that communicates the attraction holding device with an air supply source, the attraction holding device has: a suction pad; a cylinder wrinkle portion connected to a lower end of the suction pad; and a cylinder provided inside the cylinder wrinkle portion, the cylinder having an upper end positioned lower than an upper end of the suction pad and lower than an upper surface of the table, the lower opening of the cylinder is communicated with the attraction source, the ring-shaped frame is brought into contact with the upper end of the suction pad, the suction pad holds the ring-shaped frame by making the inside of the cylinder wrinkle portion, which becomes a closed space, a negative pressure in a state where the ring-shaped frame is in contact with the upper end of the suction pad, and a pressure difference is generated between the negative pressure applied to the inside of the cylinder wrinkle portion and the atmospheric pressure outside the cylinder wrinkle portion, the cylinder wrinkle portion, whose inner side is supported by the outer side of the cylinder, is guided by the outer side of the cylinder and shrinks due to the atmospheric pressure, the suction pad is moved in the direction of the shrinkage of the cylinder wrinkle portion, and thus the suction pad is accommodated in the recess, and the ring-shaped frame is held by the upper surface of the table in a state where the cylinder is not in contact with the ring-shaped frame.

2. The ring-shaped frame holding mechanism according to claim 1, wherein the ring-shaped frame has: a first flat surface and a second flat surface that are parallel and opposed to each other; and a third flat surface and a fourth flat surface that are opposed to each other in a direction perpendicular to the direction in which the first flat surface and the second flat surface are opposed to each other, the ring-shaped frame holding mechanism has: a first fixed positioning portion and a first movable positioning portion that sandwich the first flat surface and the second flat surface; and a second fixed positioning portion and a second movable positioning portion that sandwich the third flat surface and the fourth flat surface, the suction pad holding the ring-shaped frame positioned thereby is lowered in a direction perpendicular to the upper surface of the table and accommodated in the recess, and the ring-shaped frame is supported by the upper surface of the table. ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​

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