Parallel Two-Degree-of-Freedom Micro-Displacement Manual Adjustment Platform Based on Flexible Hinge Mechanism

Abstract

The present invention relates to the field of nano-displacement and positioning technologies, and specifically discloses a parallel two-degree-of-freedom micro-displacement manual adjustment platform based on a flexible hinge mechanism, which includes two drive systems respectively arranged along the X-axis and the Y-axis, a moving platform, a parallel hinge mechanism, and a fixed platform; the fixed platform is connected to the moving platform through the parallel hinge mechanism; the drive system includes a motion mechanism and a force application mechanism, the motion mechanism includes a lever, a push rod, a first connecting hinge, a second connecting hinge, and a third connecting hinge, and the force application mechanism includes a setscrew thread pair and a pre-tightening spring; the fixed platform is connected to the lever through the first connecting hinge, the setscrew thread pair includes a screw and a fixed part with a threaded hole, one end of the lever is clamped between the screw of the setscrew thread pair and the pre-tightening spring, and both the fixed part of the setscrew thread pair and one end of the pre-tightening spring are fixedly arranged on the fixed platform, and the other end of the lever is connected to the push rod through the second connecting hinge; the push rod is connected to the moving platform through the third connecting hinge.

Description

Technical Field

[0001] The present invention relates to the field of nano-displacement and positioning technology, and specifically discloses a parallel two-degree-of-freedom micro-displacement manual adjustment platform based on a flexible hinge mechanism. Background Art

[0002] With the development of emerging scientific and technological fields such as atomic energy, space technology, microelectronics, and bioengineering, higher and higher requirements have been put forward for precision motion positioning technology in ultra-precision detection equipment, precision optical systems, aerospace, etc. The development of advanced semiconductor chip manufacturing technology and large-scale memory (hard disk) manufacturing technology has continuously pushed nano-displacement and positioning technology to new limits. However, during the R & D process of precision systems, due to factors such as part processing quality and experimental environment, installation and positioning eccentric errors will inevitably occur. For high-precision motion positioning systems, installation eccentric errors cannot be ignored. Therefore, it is necessary to design a convenient manual adjustment platform suitable for high-precision micro-displacement adjustment of precision systems to manually adjust the positioning error to achieve precise positioning. Summary of the Invention

[0003] To solve the above problems, the present invention provides a parallel two-degree-of-freedom micro-displacement manual adjustment platform based on a flexible hinge mechanism.

[0004] The present invention is implemented as follows: A parallel two-degree-of-freedom micro-displacement manual adjustment platform based on a flexible hinge mechanism includes two drive systems respectively arranged along the X-axis and Y-axis, a moving platform, parallel hinges, and a fixed platform; the fixed platform is connected to the moving platform through the parallel hinges;

[0005] The drive system includes a motion mechanism and a force application mechanism. The motion mechanism includes a lever, a push rod, a first connecting hinge, a second connecting hinge, and a third connecting hinge. The force application mechanism includes a setscrew thread pair and a preloading spring. The axis of the force application mechanism of each drive system is arranged parallel to the axis of the push rod. The push rods of the two drive systems are respectively arranged along the X-axis and Y-axis, and the force application mechanisms of the two drive systems are respectively arranged along the X-axis and Y-axis; the fixed platform is connected to the lever through the first connecting hinge. The setscrew thread pair includes a screw and a fixed part provided with a threaded hole. One end of the lever is clamped between the screw of the setscrew thread pair and the preloading spring. The fixed part of the setscrew thread pair and one end of the preloading spring are both fixedly arranged on the fixed platform. The other end of the lever is connected to the push rod through the second connecting hinge; the push rod is connected to the moving platform through the third connecting hinge.

[0006] When rotating the screw of the jackscrew thread pair, the acting force is transmitted to the moving platform through the lever and the push rod, driving the moving platform to move in the positive axial direction. At this time, the pre-tightening spring is compressed by the lever; when rotating the screw of the jackscrew thread pair in the reverse direction, the compressed pre-tightening spring provides a restoring force to the lever, driving the moving platform to move in the reverse axial direction. The force application mechanisms arranged along the X-axis and the Y-axis are designed. By using the jackscrew thread pair to provide the driving force from one side of the moving platform, the micro-displacement adjustment of the moving platform along the X-axis and the Y-axis can be realized, saving the installation space of the adjustment platform and facilitating the adjustment.

[0007] Further, the lever includes a long arm and a short arm. The long arm extends along the X-axis or the Y-axis direction. One end face of the long arm far from the force application mechanism is connected with the short arm. One side of the end of the long arm far from the force application mechanism is connected to the fixed platform through a first connecting hinge. The short arm is connected to the moving platform through a push rod. A second connecting hinge is arranged on the side of the end face where the long arm and the short arm are connected and far from the force application mechanism. When the screw of the jackscrew thread pair applies a force to the long arm, the pre-tightening spring is compressed. At the same time, the short arm moves to apply a force along the axial direction of the push rod to the push rod, realizing the micro-displacement movement of the moving platform along the X-axis.

[0008] Further, the fixed part of the jackscrew thread pair is a nut or a rectangular block. The screw is supported by the fixed part fixedly installed on the fixed platform.

[0009] Further, the center line of the first connecting hinge is parallel to the projection of the center line of the jackscrew thread pair on the XY plane; the center line of the second connecting hinge is collinear with the projection of the center line of the moving platform along the axial direction on the XY plane; the center line of the third connecting hinge is collinear with the projection of the center line of the moving platform along the axial direction on the XY plane.

[0010] Further, when the push rod is subjected to a force perpendicular to the axial direction of the push rod, the first connecting hinge deforms along the shorter direction of the hinge. When the push rod is subjected to a force along the axial direction of the push rod, the first connecting hinge conducts force transmission along the longer direction of the hinge, realizing the decoupling of the non-axis direction movement of the connecting hinge.

[0011] Further, the fixed platform includes a platform body and mounting positioning hole seats, and the mounting positioning hole seats are located at the four corners of the fixed platform. Further, the four inner corners of the fixed platform are connected to the four corners of the moving platform one by one through a parallel hinge mechanism. When the moving platform moves, the parallel hinge deforms along the shorter direction of the hinge and conducts force transmission along the longer direction of the hinge, realizing the movement guidance and decoupling of the parallel hinge in the X-axis direction and the Y-axis direction.

[0012] When the screw of the setscrew thread pair arranged along the X-axis rotates and moves in the positive X-axis direction, the acting force is transmitted to the moving platform through the lever and the push rod, driving the moving platform to move in the reverse direction along the X-axis, and at the same time, the pre-tightening spring arranged along the X-axis is compressed; when the screw of the setscrew thread pair arranged along the Y-axis rotates and moves in the positive Y-axis direction, the acting force is transmitted to the moving platform through the lever and the push rod, driving the moving platform to move in the negative direction along the Y-axis, and at the same time, the pre-tightening spring is compressed; when the setscrew thread pair arranged along the X-axis is rotated in the reverse direction, the elastic deformation of the pre-tightening spring provides a restoring force to the lever, driving the moving platform to move in the positive X-axis direction; when the setscrew thread pair arranged along the Y-axis is rotated in the reverse direction, the pre-tightening spring provides a restoring force to the lever, driving the moving platform to move in the positive Y-axis direction.

[0013] Compared with the prior art, the present invention has the following beneficial effects: Two force-applying mechanisms arranged along the X-axis and the Y-axis are adopted to drive two levers to respectively perform displacement reduction movements (reduction ratio is m / n) along the X-axis and the Y-axis, and the displacement reduction principle of the lever is used to reduce the displacement of the force-applying mechanism, thereby improving the movement accuracy of the platform. The parallel flexible hinge mechanism design makes the XY-axis moving platform the same moving platform, with a small platform volume, convenient installation and maintenance, low cost, and can be manually micro-displaced and adjusted with high precision in a small space.

[0014] BRIEF DESCRIPTION OF THE DRAWINGS BRIEF DESCRIPTION OF THE DRAWINGS

[0015] Figure 1 is a schematic structural diagram of a parallel two-degree-of-freedom micro-displacement manual adjustment platform based on a flexible hinge mechanism provided by the present invention; Figure 2 is a partial enlarged view of the X-axis drive system of the present invention;

[0016] Figure 3 is a partial enlarged view of the Y-axis drive system of the present invention.

[0017] Figure 4 is a force analysis diagram of the X and Y axis drive systems of the present invention. The figure includes: drive systems 1, 2, moving platform 3, parallel hinges 41, 42, 43, 44, fixed platform 5, installation positioning hole seats 51, 52, 53, 54, force-applying mechanisms 11, 21, setscrew thread pairs 12, 22, pre-tightening springs 13, 23, moving mechanisms 14, 24, levers 15, 25, long arms 15a, 25a, short arms 15b, 25b, first connecting hinges 16a, 26a, second connecting hinges 16b, 26b, third connecting hinges 16c, 26c, push rods 17, 27.

[0018] Figure 4 Including: m represents the arm of force of the acting force of the setscrew on the lever, and n represents the arm of force of the acting force of the lever on the push rod. DETAILED DESCRIPTION OF THE INVENTION

[0019] For the convenience of those skilled in the art to understand the present invention, the present invention will be further described in detail below in conjunction with specific embodiments and drawings.

[0020] Referring to Figure 1 , the parallel two-degree-of-freedom micro-displacement manual adjustment platform based on a flexible hinge mechanism provided by the present invention is characterized in that: it includes an X-axis drive system 1, a Y-axis drive system 2, a moving platform 3, a parallel hinge mechanism 4 and a fixed platform; the moving platform 3 is connected to the fixed platform through the parallel hinge mechanism 4;

[0021] The drive system 1 arranged along the X-axis includes a motion mechanism 14 and a force application mechanism 11. The motion mechanism 14 includes a lever 15, a push rod 17, a first connecting hinge 16a, a second connecting hinge 16b, and a third connecting hinge 16c. The force application mechanism 11 includes a setscrew thread pair 12 and a preloading spring 13; the setscrew thread pair 12 includes a screw and a fixing part provided with a threaded hole. The fixing part is a nut fixedly arranged on the fixed platform or a rectangular block fixedly arranged on the fixed platform. The setscrew thread pair 12, the preloading spring 13 of the drive system arranged along the X-axis are arranged parallel to the axis of the push rod 17. The push rod 17 of the drive system arranged along the X-axis is arranged along the X-axis, and the setscrew thread pair 12, the preloading spring 13 of the drive system arranged along the X-axis are arranged along the X-axis; the lever 15 is connected to the fixed platform through the first connecting hinge 16a, the lever 15 is connected to the push rod 17 through the second connecting hinge 16b, one ends of the setscrew thread pair 12 and the preloading spring 13 are both fixed on the fixed platform, the other ends of the setscrew thread pair 12 and the preloading spring 13 are connected to the lever 15, and the push rod 17 is connected to the moving platform 3 through the X-axis third connecting hinge 16c.

[0022] The drive system 2 arranged along the Y-axis includes a motion mechanism 24 and a force application mechanism 22. The motion mechanism 24 includes a lever 25, a push rod 27, a first connection hinge 26a, a second connection hinge 26b, and a third connection hinge 26c. The force application mechanism 22 includes a setscrew thread pair 22 and a preloading spring 23. The setscrew thread pair 22 includes a screw and a fixed part provided with a threaded hole. The fixed part is a nut fixedly arranged on the fixed platform or a rectangular block fixedly arranged on the fixed platform. The setscrew thread pair 22 and the preloading spring 23 of the drive system arranged along the Y-axis are arranged parallel to the axis of the push rod 27. The push rod 27 of the drive system arranged along the Y-axis is arranged along the Y-axis, and the setscrew thread pair 22 and the preloading spring 23 of the drive system arranged along the Y-axis are arranged along the Y-axis. The lever 25 is connected to the fixed platform through the first connection hinge 26a. The lever 25 is connected to the push rod 27 through the second connection hinge 26b. One ends of the setscrew thread pair 22 and the preloading spring 23 are both fixed on the fixed platform, and the other ends of the setscrew thread pair 22 and the preloading spring 23 are connected to the lever 25. The push rod 27 is connected to the motion platform 3 through the Y-axis third connection hinge 26c.

[0023] When the screw of the setscrew thread pair is rotated, the acting force is transmitted to the motion platform 3 through the lever and the push rod, driving the motion platform 3 to move in the positive axial direction. At this time, the preloading spring is compressed by the lever. When the screw of the setscrew thread pair is rotated in the reverse direction, the compressed preloading spring provides a restoring force to the lever, driving the motion platform 3 to move in the reverse axial direction. The force application mechanisms arranged along the X-axis and the Y-axis are designed. By using the setscrew thread pair to provide the driving force from one side of the motion platform 3, the micro-displacement adjustment of the motion platform 3 along the X-axis and the Y-axis can be realized, saving the installation space of the adjustment platform and facilitating the adjustment.

[0024] Further, the lever includes a long arm and a short arm. The long arm extends along the X-axis or the Y-axis direction. A short arm is connected to the end face of the long arm away from the force application mechanism. One side of the end of the long arm away from the force application mechanism is connected to the fixed platform through the first connection hinge. The short arm is connected to the motion platform 3 through the push rod. The second connection hinge is arranged on the side of the end face where the long arm and the short arm are connected and away from the force application mechanism. When the screw of the setscrew thread pair applies an acting force to the long arm, the preloading spring is compressed. At the same time, the short arm moves to apply an acting force along the axial direction of the push rod, realizing the micro-displacement movement of the motion platform 3 along the X-axis. m is the force arm of the acting force of the setscrew on the lever, and n is the force arm of the acting force of the lever on the push rod. Theoretically, the reduction ratio of the displacement of the drive system is m / n.

[0025] Furthermore, the central axis of the first connecting hinge and the central axis of the setscrew thread pair are arranged in parallel in the projection on the XY plane; the central axis of the second connecting hinge and the central axis of the moving platform 3 along the axial direction are collinear in the projection on the XY plane; the central axis of the third connecting hinge and the central axis of the moving platform 3 along the axial direction are collinear in the projection on the XY plane.

[0026] Furthermore, when the push rod is subjected to a force perpendicular to the axial direction of the push rod, the first connecting hinge deforms along the shorter direction of the hinge; when the push rod is subjected to a force along the axial direction of the push rod, the first connecting hinge transfers the force along the longer direction of the hinge, realizing the decoupling of the motion of the connecting hinge in the non-axis direction.

[0027] Furthermore, the fixed platform includes a platform body and mounting positioning hole seats, and mounting positioning hole seats 51, 52, 53, and 54 are respectively installed at the four corners of the fixed platform.

[0028] Furthermore, the inner four corners of the fixed platform are respectively connected to the four corners of the moving platform 3 through a parallel hinge mechanism 4. When the moving platform 3 moves, the parallel hinge 4 deforms along the shorter direction of the hinge and transfers the force along the longer direction of the hinge, realizing the motion guiding and decoupling of the parallel hinge mechanism 4 in the X-axis direction and the Y-axis direction.

[0029] When the screw of the setscrew thread pair 12 arranged along the X-axis rotates and moves in the positive X-axis direction, the acting force is transmitted to the moving platform 3 through the lever 15 and the push rod 17, driving the moving platform 3 to move in the negative X-axis direction along the axial direction, and at the same time, the pre-tightening spring 13 arranged along the X-axis is compressed; when the screw of the setscrew thread pair 22 arranged along the Y-axis rotates and moves in the positive Y-axis direction, the acting force is transmitted to the moving platform 3 through the lever 25 and the push rod 27, driving the moving platform 3 to move in the negative Y-axis direction along the axial direction, and at the same time, the pre-tightening spring 23 is compressed; when the setscrew thread pair 12 arranged along the X-axis is rotated in the reverse direction, the pre-tightening spring 13 elastically deforms to provide a restoring force to the lever 15, driving the moving platform 3 to move in the positive X-axis direction; when the setscrew thread pair 22 arranged along the Y-axis is rotated in the reverse direction, the pre-tightening spring 23 provides a restoring force to the lever 25, driving the moving platform 3 to move in the positive Y-axis direction.

[0030] When the moving platform 3 needs to move in the X-axis direction, the screw of the setscrew thread pair rotates in the feed direction to apply a force to the long arm 15a of the lever 15, the pre-tightening spring 13 is compressed, the short arm 15b applies a force to the moving platform 3 through the push rod 17, and the moving platform 3 performs a displacement reduction movement in the reverse X-axis direction under the action of the parallel hinge 4; when the screw of the setscrew thread pair rotates in the withdrawal direction, the pre-tightening spring 13 resets to drive the short arm 15b of the lever 15 to move in the positive X-axis direction, thereby driving the moving platform 3 to move in the positive direction; when the moving platform 3 moves in the positive X-axis direction, the moving platform 3 will drive the push rod 27, the second connecting hinge 26b, and the third connecting hinge 26c to generate a displacement in the X-axis direction, so as to perform displacement decoupling on the drive system 2 that drives the moving platform 3 to move in the Y-axis direction.

[0031] When the moving platform 3 needs to move in the Y-axis direction, the screw of the setscrew thread pair rotates in the feed direction to apply a force to the long arm 25a of the lever 25, the pre-tightening spring 23 is compressed, the short arm 25b applies a force to the moving platform 3 through the push rod 27, and the moving platform 3 performs a displacement reduction movement in the reverse X-axis direction under the action of the parallel hinge 4; when the screw of the setscrew thread pair rotates in the withdrawal direction, the pre-tightening spring 23 resets to drive the short arm 25b of the lever 25 to move in the positive Y-axis direction, thereby driving the moving platform 3 to move in the positive Y-axis direction; when the moving platform 3 moves in the Y-axis direction, the moving platform 3 will drive the push rod 17, the second connecting hinge 16b, and the third connecting hinge 16c to generate a displacement in the Y direction, so as to perform displacement decoupling on the drive system 1 that drives the moving platform 3 to move in the X-axis direction.

[0032] In the description of the present invention, it should be understood that the indicated orientation or positional relationship is based on the orientation or positional relationship shown in the drawings, and is only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of the present invention.

[0033] In addition, the terms "first", "second", etc. are only used for descriptive purposes, and cannot be understood as indicating or implying relative importance or implicitly specifying the quantity of the indicated technical features. Thus, the features defined with "first" and "second" may explicitly or implicitly include one or more of such features. In the description of the present invention, "a plurality" means two or more, unless otherwise specifically defined.

[0034] In the present invention, unless otherwise clearly specified or limited, terms such as "connection" and "fixation" shall be understood in a broad sense. For example, it may be a fixed connection, a detachable connection, or integrated; it may be a mechanical connection or an electrical connection; it may be directly connected or indirectly connected through an intermediate medium, and it may be the communication inside two elements or the interaction relationship between two elements. For those of ordinary skill in the art, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0035] Although the description of the present invention is made in conjunction with the above specific embodiments, it is obvious that those skilled in the art can make many substitutions, modifications and variations based on the above content. Therefore, all such substitutions, improvements and variations are included within the scope of the appended claims.

Claims

1. A parallel two-degree-of-freedom micro-displacement manual adjustment platform based on a flexible hinge mechanism, characterized in that: It includes two drive systems respectively arranged along the X-axis and the Y-axis, a moving platform, a parallel hinge mechanism and a fixed platform; The fixed platform is connected to the moving platform through the parallel hinge mechanism; The drive system includes a motion mechanism and a force application mechanism. The motion mechanism includes a lever, a push rod, a first connecting hinge, a second connecting hinge and a third connecting hinge. The force application mechanism includes a setscrew thread pair and a preloading spring. The axis of the force application mechanism of each drive system is arranged parallel to the axis of the push rod. The push rods of the two drive systems are respectively arranged along the X-axis and the Y-axis, and the force application mechanisms of the two drive systems are respectively arranged along the X-axis and the Y-axis. The fixed platform is connected to the lever through the first connecting hinge. The setscrew thread pair includes a screw and a fixed part provided with a threaded hole. One end of the lever is clamped between the screw of the setscrew thread pair and the preloading spring. The fixed part of the setscrew thread pair and one end of the preloading spring are both fixedly arranged on the fixed platform. The other end of the lever is connected to the push rod through the second connecting hinge. The push rod is connected to the moving platform through the third connecting hinge; The center line of the first connecting hinge is arranged parallel to the projection of the center line of the setscrew thread pair on the XY plane; the center line of the second connecting hinge is collinear with the projection of the center line of the moving platform along the axis on the XY plane; the center line of the third connecting hinge is collinear with the projection of the center line of the moving platform along the axis on the XY plane.

2. The parallel two-degree-of-freedom micro-displacement manual adjustment platform based on a flexible hinge mechanism according to claim 1, characterized in that: The lever includes a long arm and a short arm. The long arm extends along the X-axis or the Y-axis. A short arm is connected to the end face of the long arm far away from the force application mechanism. The side of one end of the long arm far away from the force application mechanism is connected to the fixed platform through the first connecting hinge. The short arm is connected to the moving platform through the push rod. The second connecting hinge is arranged on the side of the end face where the long arm and the short arm are connected and far away from the force application mechanism.

3. The parallel two-degree-of-freedom micro-displacement manual adjustment platform based on a flexible hinge mechanism according to claim 1, wherein: The fixed part of the setscrew thread pair is a nut or a rectangular block.

4. The parallel two-degree-of-freedom micro-displacement manual adjustment platform based on a flexible hinge mechanism according to claim 1, characterized in that: When a force perpendicular to the axial direction of the push rod acts on the push rod, the first connecting hinge deforms along the shorter direction of the hinge. When a force along the axial direction of the push rod acts on the push rod, the first connecting hinge conducts force transmission along the longer direction of the hinge, realizing the decoupling of the motion of the first connecting hinge in the non-axis direction.

5. The parallel two-degree-of-freedom micro-displacement manual adjustment platform based on a flexible hinge mechanism according to claim 1, wherein: The fixed platform includes a platform body and mounting positioning hole seats, and the mounting positioning hole seats are located at the four corners of the fixed platform.

6. The parallel two-degree-of-freedom micro-displacement manual adjustment platform based on a flexible hinge mechanism according to claim 1, characterized in that: The four corners of the fixed platform are connected to the four corners of the moving platform through the parallel hinge mechanism one by one. When the moving platform moves, the parallel hinge mechanism deforms along the shorter direction of the hinge and conducts force transmission along the longer direction of the hinge, realizing the motion guiding and decoupling of the parallel hinge mechanism in the X-axis direction and the Y-axis direction.

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