Sheet expansion device

Abstract

A sheet expansion device is provided to suppress the sheet from being stretched locally. The device comprises: first and second clamping units that are opposed to each other with a workpiece sandwiched therebetween in a first direction and clamp the sheet respectively; third and fourth clamping units that are opposed to each other with the workpiece sandwiched therebetween in a second direction perpendicular to the first direction and clamp the sheet respectively; and a moving unit that moves the first and second clamping units in a direction away from each other and moves the third and fourth clamping units in a direction away from each other, each clamping unit comprises an inner clamping portion disposed vertically opposite to each other on the inner side where the workpiece is located, and an outer clamping portion that is adjacent to the inner clamping portion and disposed vertically opposite to each other on the outer side, a plurality of rollers that rotate around a rotation axis are arranged on the upper part of the inner and outer clamping portions on the lower side and on the lower part of the inner and outer clamping portions on the upper side, and at least in the first and second clamping units, the rotation axis of the roller of the outer clamping portion is disposed on the upper side and the lower side so as to be positioned between the rotation axes of the adjacent rollers of the inner clamping portion.

Description

Technical Field

[0001] The present invention relates to a sheet expanding device for expanding a sheet to which a workpiece is attached. Background Art

[0002] Conventionally, there is a known method of forming a reformed layer in the workpiece by laser beam irradiation, and then expanding the sheet to which the workpiece is attached by a sheet expanding device to separate the workpiece. The specific structure of the sheet expanding device is disclosed in Patent Document 1, for example.

[0003] Patent Document 1 discloses an expansion device that expands a sheet having a workpiece attached thereto by clamping the four sides of the sheet using a clamping mechanism. This allows the sheet to be expanded so that the intervals between the chips are an appropriate distance even in a workpiece having chips of different vertical and horizontal dimensions.

[0004] Patent Document 1: Japanese Patent Application Publication No. 2014-143297

[0005] In the structure disclosed in Patent Document 1, the clamping mechanism is a structure in which a plurality of rollers are arranged in a row to form a pair of upper and lower rollers, and the piece is clamped by the upper and lower rollers.

[0006] Here, the sheet to be pasted with the workpiece is usually manufactured in a strip shape, but in the manufacturing process, a tension is applied in the second direction, which is the length direction of the strip shape, so it is easy to shrink. And, due to the application of this tension, the sheet is not easy to stretch in the second direction.

[0007] On the other hand, in the first direction perpendicular to the second direction, the above-mentioned tension does not act, so the sheet is relatively easy to stretch.

[0008] In addition to the different eases of stretching the sheet in the first direction and the second direction, it is also considered that there is a difference in the amount of stretching of the sheet between the portion sandwiched by the rollers and the portion not sandwiched.

[0009] That is, from Fig.10 As shown on the left side of the sheet S, the four sides are clamped in the preparation state until Fig.10 When the sheet S is extended in the direction of arrow N as shown in the enlarged view on the right side of FIG. 1 , the elongation is large at the portion M1 sandwiched between the rollers R1 and R2, while the elongation is small at the portion M2 not sandwiched between the rollers R1 and R2. Thus, the elongation also differs depending on whether the sheet S is sandwiched between the rollers R1 and R2. In particular, when the direction of arrow N is the first direction that is easy to stretch, the difference in elongation becomes significant.

[0010] If the portion M2 not sandwiched between the rollers R1 and R2 further expands, the portion M1 partially stretched by being sandwiched between the rollers R1 and R2 is further stretched, and there is a concern that the portion M1 may break. Summary of the invention

[0011] In view of the above problems, the present invention proposes a new technology as follows: a sheet expanding device is provided, which can suppress the sheet from being locally stretched in a structure in which the sheet is expanded by clamping the sheet with rollers.

[0012] According to one embodiment of the present invention, a sheet expansion device is provided, which expands a sheet with a workpiece attached thereto, wherein the sheet expansion device comprises: a first clamping unit and a second clamping unit, which are arranged opposite to each other in a first direction with the workpiece in between, and respectively clamp the sheet; a third clamping unit and a fourth clamping unit, which are arranged opposite to each other in a second direction perpendicular to the first direction with the workpiece in between, and respectively clamp the sheet; and a moving unit, which can move the first clamping unit and the second clamping unit in a direction of separation from each other in the first direction, and can move the third clamping unit and the fourth clamping unit in a direction of separation from each other in the second direction, wherein the first clamping unit, the second clamping unit, and the third clamping unit are arranged opposite to each other in a second direction perpendicular to the first direction, and respectively clamp the sheet. And the fourth clamping unit respectively comprises: an inner clamping part, which is arranged to be opposite to each other up and down on the side where the workpiece is located, i.e., the inner side; and an outer clamping part, which is adjacent to the inner clamping part and is arranged to be opposite to each other up and down on the outer side of the inner clamping part, a plurality of rollers rotating around a rotation axis parallel to the separation direction are arranged at the upper part of the inner clamping part on the lower side and the upper part of the outer clamping part on the lower side, a plurality of rollers rotating around a rotation axis parallel to the separation direction are arranged at the lower part of the inner clamping part on the upper side and the lower part of the outer clamping part on the upper side, at least in the first clamping unit and the second clamping unit, the rotation axis of the roller of the outer clamping part is respectively arranged on the upper side and the lower side to position the rotation axis of the adjacent rollers of the inner clamping part.

[0013] According to one embodiment of the present invention, the third clamping unit and the fourth clamping unit are also arranged on the upper and lower sides so that the rotation axis of the roller of the outer clamping portion is positioned between the rotation axes of the adjacent rollers of the inner clamping portion.

[0014] According to the configuration of the present invention, when the sheet easily stretches in the first direction and the possibility of breakage increases, the interval between the sheets is narrowed, so that local stretching of the sheet can be suppressed and breakage of the sheet can be prevented. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] Figure 1 The diagram shows a workpiece as a workpiece and a sheet to which the workpiece is attached.

[0016] Figure 2 It is a diagram showing a configuration example of an expansion device.

[0017] Figure 3 (A) is a diagram showing the state in which the four sides of the sheet are held by the clamping unit as viewed from the upper side. Figure 3 (B) is a diagram illustrating the expansion in the first direction. Figure 3 (C) is a diagram for explaining the expansion in the second direction.

[0018] Figure 4 This is a diagram for explaining the structure of the first clamping unit.

[0019] Figure 5 This is also a diagram for explaining the structure of the first clamping unit.

[0020] Figure 6 This is a diagram for explaining the intervals between the clamping points of the first clamping unit.

[0021] Figure 7 This is a diagram for explaining the structure of the third clamping unit.

[0022] Figure 8 This is also a diagram for explaining the structure of the third clamping unit.

[0023] Fig. 9 (A) is a diagram showing a situation where the four sides of a sheet are held by a clamping unit of the same structure as viewed from above. Fig. 9 (B) is a diagram illustrating the expansion in the first direction. Fig. 9 (C) is a diagram for explaining the expansion in the second direction.

[0024] Fig.10 This is a diagram for explaining a situation in which sheet slip occurs, which is a problem.

[0025] Description of symbols

[0026] 1: sheet; 2: sheet expansion device; 3: holding table; 4A: first clamping unit; 4B: second clamping unit; 4C: third clamping unit; 4D: fourth clamping unit; 10: workpiece; 42: lower clamping part; 42A: inner clamping part; 42B: outer clamping part; 42a: inner roller; 42b: outer roller; 42m: rotating shaft; 42n: rotating shaft; 42u: support frame; 42v: support frame; 43 : Upper clamping part; 43A: Inner clamping part; 43B: Outer clamping part; 43a: Inner roller; 43b: Outer roller; 43m: Rotation axis; 43n: Rotation axis; 43u: Support frame; 43v: Support frame; 44: Lower moving mechanism; 45: Upper moving mechanism; 101: Predetermined dividing line; C1: Clamping point; C2: Clamping point; C3: Clamping point; C4: Clamping point; W1: Interval; W2: Interval. DETAILED DESCRIPTION

[0027] Hereinafter, one embodiment of the present invention will be described with reference to the drawings.

[0028] <Workpiece and Sheet>

[0029] Figure 1 The figure shows a workpiece 10 as a workpiece and a sheet 1 to which the workpiece 10 is attached.

[0030] The workpiece 10 is a disk-shaped wafer such as a semiconductor wafer or an optical device wafer. A plurality of planned dividing lines 101 intersecting each other at right angles are set in a grid pattern on the front surface of the workpiece 10 .

[0031] The workpiece 10 has a division start point formed along the division plan line 101 before or after being attached to the sheet 1. Then, the sheet 1 is expanded while the workpiece 10 with the division start point formed is attached to the sheet 1, and the workpiece 10 is divided into chips along the division start point.

[0032] Regarding the starting point of division formed along the predetermined division line 101, in addition to the modified layer formed in the workpiece 10 by laser irradiation, a groove may be formed along the predetermined division line 101 on the front surface of the workpiece 10, and the groove may be used as the starting point of division. The groove may be formed, for example, by ablation processing based on laser irradiation, cutting processing by cutting a cutting tool, or groove processing such as scribing.

[0033] The sheet 1 is a base material 11 made of an expandable synthetic resin sheet such as polyvinyl chloride or polyolefin, and has an adhesive layer 12 formed on one surface thereof to which the workpiece 10 is attached. For example, a rectangular sheet 1 larger than the workpiece 10 is used.

[0034] In addition, the workpiece 10 to be processed may be, in addition to wafers such as semiconductor wafers, adhesive sheets such as DAF (Die Attach Film) for chip mounting, which is adhered to a wafer divided into chips by DBG (Dicing Before Grinding: a process in which a half-cut groove is formed on the front side of the workpiece along a predetermined dividing line using a tool and then the workpiece is divided by back grinding) or SDBG (Stealth Dicing Before Grinding: a process in which the back side of the workpiece is ground and divided after SD processing (STEALTH DICING: a registered trademark) is performed), or various plate-like objects such as glass, ceramics, and resins.

[0035] <Slice expansion device>

[0036] Then, if Figure 2 As shown, an embodiment of a sheet expansion device for expanding a sheet with a workpiece attached thereto is described. The sheet expansion device 2 comprises: a square-shaped fixed base 20, the four corners of which are formed into right angles; a circular plate-shaped holding table 3, which is arranged on the fixed base 20 and horizontally places the sheet with the workpiece attached thereto; a first clamping unit 4A, a second clamping unit 4B, a third clamping unit 4C, and a fourth clamping unit 4D, which clamp the sheet (not shown) placed on the holding table 3; a first moving unit 5A, a second moving unit 5B, a third moving unit 5C, and a fourth moving unit 5D, which are arranged according to these clamping units 4A to 4D, the first moving unit 5A and the second moving unit 5B move the first and second clamping units 4A to 4B in the first direction respectively, and the third moving unit 5C and the fourth moving unit 5D move the third and fourth clamping units 4C to 4D in the second direction respectively. The first to fourth moving units 5A to 5D constitute a moving unit capable of moving the first clamping unit 4A and the second clamping unit 4B away from each other in the first direction and capable of moving the third clamping unit 4C and the fourth clamping unit 4D away from each other in the second direction.

[0037] The holding table 3 is supported on the upper surface of the central portion of the fixed base 20 by means of a cylindrical table 30. The holding table 3 is supported by a rotating mechanism (not shown) so as to be rotatable on the cylindrical table 30, and is supported by a vertical movement mechanism (not shown) so as to be able to move up and down on the cylindrical table 30. The upper surface of the holding table 3 has a diameter capable of mounting a workpiece, and a sheet to which the workpiece is attached is placed on the upper surface of the holding table 3 in a state where the workpiece is arranged on the upper side and arranged concentrically.

[0038] A rectangular convex portion 201 protruding outward is formed at the center of each end edge 200a, 200b, 200c, and 200d of the four sides of the fixed base 20. A rectangular first guide groove 201a, a second guide groove 201b, a third guide groove 201c, and a fourth guide groove 201d extending in the direction in which the corresponding convex portion 201 extends are formed in the portion of the fixed base 20 from each convex portion 201 to the inner side of the convex portion 201 (the holding table 3 side).

[0039] like Figure 2 As shown, in this case, the direction in which a pair of mutually parallel end edges 200c and 200d of the fixed base 20 extend is taken as the first direction, and the direction perpendicular to the first direction in which the end edges 200a and 200b extend is taken as the second direction, and the first clamping unit 4A and the second clamping unit 4B are respectively provided at both ends of the first direction of the fixed base 20, and the third clamping unit 4C and the fourth clamping unit 4D are respectively provided at both ends of the second direction side.

[0040] The first moving unit 5A and the second moving unit 5B reciprocate the first clamping unit 4A and the second clamping unit 4B respectively along the first direction, and the third moving unit 5C and the fourth moving unit 5D reciprocate the third clamping unit 4C and the fourth clamping unit 4D respectively along the second direction.

[0041] The first clamping unit 4A and the second clamping unit 4B are arranged to face each other in the first direction across the holding table 3, and can move in the first direction relative to the first guide groove 201a and the second guide groove 201b, respectively. In addition, the third clamping unit 4C and the fourth clamping unit 4D are arranged to face each other in the second direction across the holding table 3, and can move in the second direction relative to the third guide groove 201c and the fourth guide groove 201d, respectively.

[0042] The first to fourth clamping units 4A to 4D have the same structure, and they have: an L-shaped movable base 41 assembled in a manner that allows it to move along the guide grooves 201a to 201d respectively; a lower clamping mechanism 420 and an upper clamping mechanism 430 installed on the inner side of the movable base 41 in a manner that allows them to move up and down; and a lower moving mechanism 44 and an upper moving mechanism 45 that enable these clamping mechanisms 420 and 430 to move in the up and down directions respectively.

[0043] The movable base 41 includes a sliding portion 411 slidably fitted in each of the guide grooves 201 a to 201 d , and a supporting portion 412 erected at an outer end portion of the sliding portion 411 .

[0044] A guide rail 412a extending in the up-down direction is formed on the inner surface of the support portion 412. A guide groove 412b extending in the up-down direction is formed on the outer surface of the support portion 412. A guide hole 412c extending in the up-down direction is formed in the support portion 412 and passes through the inner surface of the guide rail 412a to the guide groove 412b.

[0045] The first to fourth moving units 5A to 5D for moving the first to fourth clamping units 4A to 4D along the guide grooves 201a to 201d, respectively, have the same structure, and include: a threaded rod 51 that is screwed with the sliding portion 411 and extends along the guide grooves 201a to 201d, respectively; and a pulse motor 52 that is disposed on the convex portion 201 and drives the threaded rod 51 to rotate forward and reverse. The front end of the threaded rod 51 is rotatably supported by a bearing 53 that is fixed to the inner side of the guide grooves 201a to 201d on the fixed base 20, respectively.

[0046] The sliding portion 411 of the movable base 41 screwed with the threaded rod 51 is fed from the outside to the inside or from the inside to the outside along the guide grooves 201a to 201d according to the rotation direction of the threaded rod 51 driven by the pulse motor 52, thereby the first and second clamping units 4A and 4B reciprocate in the first direction, and the third and fourth clamping units 4C and 4D reciprocate in the second direction. Therefore, the first moving unit 5A and the second moving unit 5B can move the first clamping unit 4A and the second clamping unit 4B in the first direction to separate from each other, and the third moving unit 5C and the fourth moving unit 5D can move the third clamping unit 4C and the fourth clamping unit 4D in the second direction to separate from each other.

[0047] The lower clamping mechanism 420 includes an arm 421 extending inwardly and supported to be movable up and down along the guide rail 412a, and a lower clamping portion 42 fixed to the front end of the arm 421 perpendicular to the arm 421, and the lower clamping mechanism 420 is configured in a substantially T-shape. The base end 421c of the arm 421 passes through the guide hole 412c and is disposed in the outer guide groove 412b.

[0048] The lower clamping parts 42 of the first and second clamping units 4A and 4B extend in parallel with the second direction, and the lower clamping parts 42 of the third and fourth clamping units 4C and 4D extend in parallel with the first direction. Each lower clamping part 42 is formed in a rectangular parallelepiped shape, and on the upper surface of the lower clamping part 42, as shown in the first clamping unit 4A, a plurality of rollers (inner rollers 42a, outer rollers 42b (numbers are marked only in the first clamping unit 4A, and the same is omitted in other clamping units)) are arranged in two rows close to each other. The rollers (42a, 42b) of the first and second clamping units 4A and 4B are supported by the lower clamping part 42 so as to be rotatable around a rotation axis parallel to the first direction, and the rollers of the third and fourth clamping units 4C and 4D are supported by the lower clamping part 42 so as to be rotatable around a rotation axis parallel to the second direction. The lower rollers ( 42 a , 42 b (see the first clamping unit 4A)) are attached so that about half of the outer peripheral surface protrudes from the upper surface of the lower clamping portion 42 .

[0049] The upper clamping mechanism 430 disposed above the lower clamping mechanism 420 is a structure that is approximately symmetrical with the lower clamping mechanism 420 in terms of verticality. The upper clamping mechanism 430 includes: an arm portion 431 that extends inward and is supported to be able to move up and down along the guide rail 412a; and an upper clamping portion 43 that is perpendicular to the arm portion 431 and fixed to the front end of the arm portion 431, disposed opposite to the lower clamping portion 42, and the upper clamping mechanism 430 is configured in an approximately T-shape. The base end portion 431c of the arm portion 431 passes through the guide hole 412c and is disposed in the outer guide groove 412b.

[0050] The upper clamping parts 43 of the first and second clamping units 4A and 4B extend in parallel with the second direction, and the upper clamping parts 43 of the third and fourth clamping units 4C and 4D extend in parallel with the first direction. Each upper clamping part 43 is formed in a rectangular parallelepiped shape, and a plurality of upper rollers (not shown) arranged in two rows are arranged close to each other as described later on the lower surface of the upper clamping part 43. These upper rollers are arranged in pairs with the rollers (42a, 42b (refer to the first clamping unit 4A)) of the lower clamping part 42, and the upper rollers of the first and second clamping units 4A and 4B are supported by the upper clamping part 43 so as to be rotatable around the rotation axis parallel to the first direction, and the upper rollers of the third and fourth clamping units 4C and 4D are supported by the upper clamping part 43 so as to be rotatable around the rotation axis parallel to the second direction. The upper rollers are installed so that about half of the outer circumference protrudes from the lower surface of the upper clamping part 43.

[0051] The lower clamping mechanism 420 and the upper clamping mechanism 430 are reciprocated in the up-down direction relative to the support portion 412 along the guide rail 412 a by the lower moving mechanism 44 and the upper moving mechanism 45 , respectively.

[0052] The lower moving mechanism 44 includes a threaded rod 441 that is screwed with the base end 421c of the arm 421 and extends in the up-down direction along the guide groove 412b, and a pulse motor 442 that is disposed at the lower end of the guide groove 412b and drives the threaded rod 441 to rotate forward and reversely. The upper end of the threaded rod 441 is supported by a bearing 443 fixed in the guide groove 412b so as to be rotatable. The base end 421c that the threaded rod 441 is screwed with is fed up and down along the guide groove 412b according to the rotation direction of the threaded rod 441 that is rotationally driven by the pulse motor 442, thereby the lower clamping mechanism 420 moves up and down.

[0053] The upper moving mechanism 45 disposed above the lower moving mechanism 44 has a structure that is approximately symmetrical with the lower moving mechanism 44 in terms of top and bottom. The upper moving mechanism 45 includes a threaded rod 451 that is screwed with the base end 431c of the arm 431 and extends in the up-down direction along the guide groove 412b, and a pulse motor 452 that is disposed at the upper end of the support 412 and drives the threaded rod 451 to rotate forward and reversely. The lower end of the threaded rod 451 is supported by a bearing 453 fixed in the guide groove 412b so as to be rotatable. The base end 431c that the threaded rod 451 is screwed with is fed up and down along the guide groove 412b according to the rotation direction of the threaded rod 451 that is rotationally driven by the pulse motor 452, thereby the upper clamping mechanism 430 moves up and down.

[0054] The control unit 7 sends an action control signal to each pulse motor 52 of the first to fourth moving units 5A to 5D. The control unit 7 controls the action of each pulse motor 52 according to a predetermined program, thereby controlling the movement of the first and second clamping units 4A, 4B in the first direction and the movement of the third and fourth clamping units 4C, 4D in the second direction.

[0055] Then, if Figure 3 (A)~ Figure 3 As shown in (C), the structure which expands the sheet 1 to which the workpiece 10 is attached in the first direction and the second direction will be described.

[0056] Figure 3 The sheet 1 shown in (A) has different elongation easiness in the first direction and the second direction, and is easier to elongate in the first direction than in the second direction. Figures 4 to 6 The structure of the third clamping unit 4C and the fourth clamping unit 4D opposite to each other in the second direction adopts Figure 7 and Figure 8 structure.

[0057] First, a configuration example of the first clamping unit 4A will be described. Figure 4 and Figure 5 4A is a diagram showing a structure of a first clamping unit 4A having an upper clamping portion 43 and a lower clamping portion 42. In addition, a second clamping unit 4B ( Figure 2 (A)) has the same structure as the first clamping unit 4A, so the description is omitted.

[0058] like Figure 4 and Figure 5 As shown in FIG. 1 , the upper clamping portion 43 includes an inner clamping portion 43A and an outer clamping portion 43B arranged in parallel. The inner clamping portion 43A and the outer clamping portion 43B are connected to the arm portion 431 and move up and down integrally.

[0059] The inner clamping portion 43A includes a plurality of inner rollers 43a arranged at equal intervals in the second direction, a rotation shaft 43m rotatably supporting each inner roller 43a, and a support frame 43u supporting the rotation shaft 43m and exposing the peripheral surface of the inner roller 43a.

[0060] The outer clamping portion 43B includes a plurality of outer rollers 43b arranged at equal intervals in the second direction, a rotation shaft 43n rotatably supporting each outer roller 43b, and a support frame 43v supporting the rotation shaft 43n and exposing the peripheral surface of the outer roller 43b.

[0061] The diameters of the inner roller 43a and the outer roller 43b and the diameters of the rotation axes 43m and 43n are configured to be the same. In addition, the rotation axis 43m of the inner clamping part 43A and the rotation axis 43n of the outer clamping part 43B are arranged to be offset in the direction perpendicular to the rotation axis, that is, the second direction.

[0062] According to this structure, Figure 5 As shown, the axis of the rotation shaft 43n, 43n of the outer clamping part 43B is arranged in the middle position of the adjacent inner rollers 43a, 43a, and the axis of the rotation shaft 43m, 43m of the inner clamping part 43A is arranged in the middle position of the adjacent outer rollers 43b, 43b.

[0063] Likewise, if Figure 4 and Figure 5 As shown, the lower clamping part 42 is configured to include an inner clamping part 42A and an outer clamping part 42B arranged in parallel. The inner clamping part 42A and the outer clamping part 42B are connected to the arm part 421 and move up and down integrally.

[0064] The inner clamping portion 42A includes a plurality of inner rollers 42a arranged at equal intervals in the second direction, a rotation shaft 42m rotatably supporting each inner roller 42a, and a support frame 42u supporting the rotation shaft 42m and exposing the peripheral surface of the inner roller 42a.

[0065] The outer clamping portion 42B includes a plurality of outer rollers 42b arranged at equal intervals in the second direction, a rotation shaft 42n rotatably supporting each outer roller 42b, and a support frame 42v supporting the rotation shaft 42n and exposing the peripheral surface of the outer roller 42b.

[0066] The diameters of the inner roller 42a and the outer roller 42b and the diameters of the rotation axes 42m and 42n are configured to be the same. In addition, the rotation axis 42m of the inner clamping part 42A and the rotation axis 42n of the outer clamping part 42B are arranged to be offset in the direction perpendicular to the rotation axis, that is, the second direction.

[0067] According to this structure, Figure 5 As shown, the axis of the rotation axis 42n, 42n of the outer clamping part 42B is arranged in the middle position of the adjacent inner rollers 42a, 42a, and the axis of the rotation axis 42m, 42m of the inner clamping part 42A is arranged in the middle position of the adjacent outer rollers 42b, 42b.

[0068] In this way, Figure 5 and Figure 6 As shown, the axes of the rollers of the inner clamping parts 42A, 43A and the outer clamping parts 42B, 43B are offset in the second direction, so that the clamping point C2 of the outer clamping parts 42B, 43B on the sheet 1 is arranged in the middle position of the clamping point C1 of the inner clamping parts 42A, 43A on the sheet 1.

[0069] Furthermore, by alternately arranging the clamping points C1 and C2, the interval W2 ( Figure 5 , Figure 6 ) becomes narrower (in this embodiment, the interval is halved).

[0070] Next, a configuration example of the third clamping unit 4C will be described. Figure 7 and Figure 8 14 is a diagram showing the structure of the third clamping unit 4C having the upper clamping portion 143 and the lower clamping portion 142. The fourth clamping unit 4D facing the third clamping unit 4C in the second direction has the same structure as the third clamping unit 4C, and thus description thereof is omitted.

[0071] like Figure 7 and Figure 8As shown, the upper clamping part 143 is configured to include an inner clamping part 143A and an outer clamping part 143B arranged in parallel. The inner clamping part 143A and the outer clamping part 143B are connected to the arm part 431 and move up and down integrally.

[0072] The inner clamping portion 143A includes a plurality of inner rollers 143a arranged at equal intervals in the first direction, a rotation shaft 143m rotatably supporting each inner roller 143a, and a support frame 143u supporting the rotation shaft 143m and exposing the peripheral surface of the inner roller 143a.

[0073] The outer clamping portion 143B includes a plurality of outer rollers 143b arranged at equal intervals in the first direction, a rotation shaft 143n rotatably supporting each outer roller 143b, and a support frame 143v supporting the rotation shaft 143n and exposing the peripheral surface of the outer roller 143b.

[0074] The diameter of the inner roller 143a of the inner clamping part 143A is the same as the diameter of the outer roller 143b of the outer clamping part 143B, and each roller 143a, 143b is arranged so as to be exposed downward from the support frame 143u, 143v. In addition, the two rotating shafts 143m, 143n are arranged on the same axis, so that the positions of the two rollers 143a, 143b in the first direction are the same.

[0075] Likewise, if Figure 7 and Figure 8 As shown, the lower clamping part 142 is configured to include an inner clamping part 142A and an outer clamping part 142B arranged in parallel. The inner clamping part 142A and the outer clamping part 142B are connected to the arm part 421 and move up and down integrally.

[0076] The inner clamping portion 142A includes a plurality of inner rollers 142a arranged at equal intervals in the first direction, a rotation shaft 142m rotatably supporting each inner roller 142a, and a support frame 142u supporting the rotation shaft 142m and exposing the peripheral surface of the inner roller 142a.

[0077] The outer clamping portion 142B includes a plurality of outer rollers 142b arranged at equal intervals in the first direction, a rotation shaft 142n rotatably supporting each outer roller 142b, and a support frame 142v supporting the rotation shaft 142n and exposing the peripheral surface of the outer roller 142b.

[0078] The diameter of the inner roller 142a of the inner clamping portion 142A is the same as the diameter of the outer roller 142b of the outer clamping portion 142B, and each roller 142a, 142b is provided so as to be exposed upward from the support frames 142u, 142u. In addition, the two rotating shafts 142m, 142n are arranged on the same axis, so that the positions of the two rollers 142a, 142b in the first direction are the same.

[0079] In addition, if Figure 7 As shown, the upper rotating shafts 143m, 143n and the lower rotating shafts 142m, 142n are located at the same position in the first direction, and the upper rollers 143a, 143b and the lower rollers 142a, 142b are located at the same position in the first direction.

[0080] According to the above structure, Figure 7 and Figure 8 As shown in FIG. 1 , a clamping point C3 is formed between the inner clamping parts 142A and 143A, and a clamping point C4 is formed between the outer clamping parts 142B and 143B, and the sheet 1 is clamped at each clamping point C3 and C4. Figure 8 As shown, the positions of the first direction of the clamping points C3 and C4 where the sheet 1 is clamped are the same, and the first direction interval W1 of each clamping point C3 and C4 is consistent with the first direction interval of the rotation axes 142m, 142n, 143m, and 143n. This interval W1 becomes the above-mentioned interval W2 ( Figure 5 , Figure 6 ) times.

[0081] As described above, Figure 3 (A)~ Figure 3 As shown in (C), the four sides of the quadrangular sheet 1 to which the workpiece 10 is attached are clamped by the first clamping unit 4A to the fourth clamping unit 4D, and expanded in the first direction and the second direction. By this expansion, the workpiece 10 is broken along the predetermined dividing line and singulated into chips.

[0082] In this case, the sheet 1 is easily stretched in the first direction, and the possibility of breakage increases. Figure 5 and Figure 6 As shown, in the first clamping units 4A (4B) opposed in the first direction, the interval W2 where the sheet 1 is clamped is narrowed, so that local elongation of the sheet 1 can be suppressed, and breakage of the sheet can be prevented.

[0083] In addition, if Figure 3 (A) Figure 3As shown in (B), when the sheet 1 is expanded, the orientation of the sheet 1 is pre-set by clamping the ends of the sheet 1 in the first direction which is easy to stretch by the first clamping unit 4A and the second clamping unit 4B respectively, and then provided to the expansion device 2, or the orientation of the sheet 1 is adjusted in the expansion device 2.

[0084] In addition, in the above structure, if Fig. 9 (A)~ Fig. 9 As shown in (C), the third clamping unit 4C and the fourth clamping unit 4D opposed to each other in the second direction also adopt the same structure as the first clamping unit 4A and the second clamping unit 4B opposed to each other in the first direction. In the third clamping unit 4C and the fourth clamping unit 4D, a structure that more reliably suppresses the sliding of the sheet 1 is also adopted.

[0085] According to this structure, the breakage of the sheet 1 at the portion where the sheet 1 is clamped can be effectively prevented not only in the first direction but also in the second direction.

[0086] In addition, in the above structure, the third clamping unit 4C and the fourth clamping unit 4D opposite to each other in the second direction are as follows: Figure 7 As shown, a structure with two rows of rollers including inner clamping parts 142A, 143A and outer clamping parts 142B, 143B is adopted, but the third clamping unit 4C and the fourth clamping unit 4D can adopt a structure with only one row of rollers (for example, only inner clamping parts 142A, 143A).

[0087] The present invention can be achieved as described above.

[0088] That is, Figures 1 to 6 As shown, a sheet expansion device 2 is provided, which expands the sheet 1 to which the workpiece 10 is attached, wherein:

[0089] The sheet expansion device 2 has:

[0090] A first clamping unit 4A and a second clamping unit 4B are disposed opposite to each other across the workpiece 10 in a first direction, and clamp the sheet 1 respectively;

[0091] A third clamping unit 4C and a fourth clamping unit 4D are disposed opposite to each other with the workpiece 10 interposed therebetween in a second direction perpendicular to the first direction, and clamp the sheet 1 respectively; and

[0092] moving units (5A to 5D) capable of moving the first clamping unit 4A and the second clamping unit 4B in a first direction away from each other, and capable of moving the third clamping unit 4C and the fourth clamping unit 4D in a second direction away from each other,

[0093] The first clamping unit 4A, the second clamping unit 4B, the third clamping unit 4C and the fourth clamping unit 4D respectively have:

[0094] Inner clamping parts 42A and 43A are disposed vertically opposite to each other on the inner side of the workpiece 10; and

[0095] The outer clamping parts 42B and 43B are disposed adjacent to the inner clamping parts 42A and 43A and vertically opposed to each other on the outer sides of the inner clamping parts 42A and 43A.

[0096] A plurality of rollers 42a and 42b are provided on the upper portion of the lower inner clamping portion 42A and the upper portion of the lower outer clamping portion 42B. The rollers 42a and 42b rotate around rotation axes 42m and 42n parallel to the separation direction.

[0097] A plurality of rollers 43a and 43b are provided at the lower portion of the upper inner clamping portion 43A and the lower portion of the upper outer clamping portion 43B. The rollers 43a and 43b rotate around rotation axes 43m and 43n parallel to the separation direction.

[0098] At least in the first clamping unit 4A and the second clamping unit 4B, the rotation axes 42n, 43n of the rollers 42b, 43b of the outer clamping parts 42B, 43B are positioned between the rotation axes 42m, 43m of the adjacent rollers 42a, 43a of the inner clamping parts 42A, 43A at the upper and lower sides, respectively.

[0099] According to this configuration, when the sheet is likely to stretch in the first direction and break, the interval between the sheets is narrowed, so that local stretching of the sheet can be suppressed and breakage of the sheet can be prevented.

[0100] In addition, if Fig. 9 As shown,

[0101] In the third clamping unit 4C and the fourth clamping unit 4D, the upper and lower sides are also respectively configured to position the rotation axes 42n, 43n of the rollers 42b, 43b of the outer clamping parts 42B, 43B between the rotation axes 42m, 43m of the adjacent rollers 42a, 43a of the inner clamping parts 42A, 43A.

[0102] According to this configuration, the interval between the sheets is narrowed also in the second direction perpendicular to the first direction, so that local elongation of the sheets can be suppressed, and breakage of the sheets can be prevented.

Claims

1. A sheet expansion device, which expands a sheet to which a workpiece is attached, wherein: The sheet extension device has: A first clamping unit and a second clamping unit are disposed opposite to each other across the workpiece in a first direction and clamp the sheet respectively; A third clamping unit and a fourth clamping unit are disposed opposite to each other across the workpiece in a second direction perpendicular to the first direction, and clamp the sheet respectively; as well as a moving unit capable of moving the first clamping unit and the second clamping unit in a direction away from each other in the first direction, and capable of moving the third clamping unit and the fourth clamping unit in a direction away from each other in the second direction, The first clamping unit, the second clamping unit, the third clamping unit and the fourth clamping unit respectively have: An inner clamping portion disposed on the inner side of the workpiece and arranged vertically opposite to each other; and an outer clamping portion, which is adjacent to the inner clamping portion and arranged vertically opposite to the outer side of the inner clamping portion, A plurality of rollers rotating around a rotation axis parallel to the separation direction are arranged on the upper portion of the inner clamping portion on the lower side and the upper portion of the outer clamping portion on the lower side. A plurality of rollers rotating around a rotation axis parallel to the separation direction are arranged at the lower portion of the inner clamping portion on the upper side and the lower portion of the outer clamping portion on the upper side. At least in the first clamping unit and the second clamping unit, the rotation axis of the roller of the outer clamping portion is respectively arranged on the upper side and the lower side so as to be positioned between the rotation axes of the adjacent rollers of the inner clamping portion.

2. The sheet expansion device according to claim 1, characterized in that: In the third clamping unit and the fourth clamping unit, the upper side and the lower side are also respectively arranged so that the rotation axis of the roller of the outer clamping part is positioned between the rotation axes of the adjacent rollers of the inner clamping part.

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