High-speed rotating sorter

Abstract

Embodiments of the present disclosure generally relate to a scalable substrate inspection system. The inspection system includes a plurality of metrology units adapted to inspect, detect, or measure one or more features of a substrate, including thickness, resistivity, saw marks, geometry, stains, debris, microcracks, and crystal fragments. The inspection system can be used to identify defects on a substrate and estimate unit efficiency before processing the substrate. The substrate can be conveyed through the inspection system and / or between metrology units on a track or conveyor, and then sorted into corresponding bins by at least one gripper coupled to a high-speed rotary sorter based on inspection data. The rotary sorter maintains a sorting capacity of at least 5400 substrates per hour. Each bin can optionally have a gas support pad for supporting the substrate when the substrate falls from the rotary sorter into the corresponding bin.

Description

[0001] This application is a divisional application of the patent application for invention with the application date of April 5, 2016, application number 201680001403.5, and invention name "High-Speed Rotary Sorter". Technical Field

[0002] Embodiments of the present disclosure generally relate to semiconductor inspection equipment. More specifically, the embodiments disclosed herein relate to systems and methods for high-speed sorting of substrates. Background Art

[0003] Substrates, such as semiconductor substrates, are subject to routine inspections at independent inspection stations during processing to ensure compliance with predetermined quality control standards. Different inspection techniques provide comprehensive data on the product and the process. However, due to the number of inspection stations required and the resulting transfer times for moving the substrates between the inspection stations, comprehensive inspections can be very time-consuming, thereby reducing throughput. Thus, equipment manufacturers often face a decision of choosing between a thorough inspection with heavy inspection / transfer times or certain previous inspection processes.

[0004] Typical sorting systems sort approximately 3,600 substrates per hour in a linear arrangement. However, as inspection processes have continuously reduced the amount of time to complete inspection steps, there is a need for sorting devices that can keep up with faster sorting to increase throughput.

[0005] As previously explained, there is a need for improved substrate inspection systems that can sort inspected substrates at a faster rate and allow for higher throughput. Thus, there is a need in the art for a high-speed rotary sorter. Summary of the Invention

[0006] In one embodiment, a device for inspecting and sorting a plurality of substrates is disclosed. The device includes a rotatable support. The rotatable support is disposed within a sorting unit and is configured to rotate about a rotation axis. A plurality of arms are coupled to the rotatable support and extend radially outward relative to the rotation axis. At least one gripper is coupled to each arm and is positionable over a plurality of bins. Each bin is located within the sorting unit and is positioned below the path along which the at least one gripper travels as the rotatable support rotates.

[0007] In another embodiment, a device adapted to inspect and sort substrates is disclosed. The device includes a loading unit, a metering unit, a sorting unit, and a plurality of individually removable sorting bins. The metering unit is coupled to the loading unit. The sorting unit is coupled to the metering unit. The sorting unit includes: a platform located within the sorting unit, a plurality of arms, and at least one gripper. The platform is configured to rotate about a central axis of the platform. Each of the plurality of arms has a first end and a second end. The first end is coupled to the platform. Each of the plurality of arms further extends radially outward from the central axis of the platform. The at least one gripper is coupled to the second end of each of the plurality of arms. Each of the plurality of individually removable sorting bins is located within the sorting unit and below a path along which the at least one gripper travels as the at least one gripper rotates.

[0008] In yet another embodiment, a method of operating a device for inspecting and sorting a plurality of substrates in a housing is disclosed. The method includes: loading a substrate into a loading unit of the housing; transferring the substrate to a metering unit of the housing; performing metering of the substrate in the metering unit; allocating the substrate to a sorting bin based on the metering; and transferring the substrate to a sorting unit. The step of transferring the substrate may include: holding the substrate with at least one gripper of a sorting module; rotating the substrate held by the at least one gripper about a central axis of the sorting unit to a desired position above the sorting bin allocated to the held substrate; and releasing the substrate from the at least one gripper into the allocated sorting bin. BRIEF DESCRIPTION OF THE DRAWINGS

[0009] To understand the above features of the present disclosure in detail, a more specific description of the present disclosure briefly outlined above may be realized by referring to the embodiments, some of which are illustrated in the drawings. However, it should be noted that the drawings merely illustrate exemplary embodiments of the present disclosure and should not be considered as limiting the scope of the present disclosure, as the present disclosure may be applicable to other equally effective embodiments.

[0010] Figure 1 A top plan view of an inspection system according to one embodiment is shown.

[0011] Figure 2 Shows an inspection system according to one embodiment Figure 1 of a high-speed rotating sorter in a top plan view.

[0012] Figure 3 A perspective view of at least one Bernoulli picker of a high-speed rotating sorter according to one embodiment is shown.

[0013] Figure 4Shows a top plan view of a sorting bin according to one embodiment.

[0014] Figure 5 Shows a flowchart of a method for sorting substrates according to one embodiment.

[0015] For ease of understanding, the same element symbols have been used as much as possible to denote the same elements common to the figures. It should be understood that the elements and features of one embodiment can be advantageously incorporated into other embodiments without further recitation. Detailed Description

[0016] Embodiments of the present disclosure generally relate to a scalable substrate inspection system. The inspection system includes a plurality of metrology units adapted to analyze one or more characteristics of a substrate, including, by way of example only, thickness, resistivity, saw marks, geometry, stains, chips, micro cracks, and crystal fraction. The inspection system can be used to identify defects on a substrate and estimate cell efficiency before processing the substrate. The substrate can be conveyed through the inspection system and / or between metrology units on a track or conveyor system and then sorted into corresponding bins by at least one gripper coupled to a high-speed rotating sorting device based on inspection data. The sorting device maintains a sorting capacity of at least 5,400 substrates per hour. Each bin can optionally have a gas support pad for supporting the substrate when the substrate falls from the rotating sorting device into the corresponding bin.

[0017] Figure 1A top plan view of an inspection system 100 according to an embodiment implementation is shown. The inspection system 100 includes a front end 102, a module unit 104, and a sorting unit 106. The front end 102 may be, for example, a loading unit. The module unit 104 may be, for example, a metering unit. The sorting unit 106 may be, for example, a sorting module. By way of example only, the front end 102, the module unit 104, and the sorting unit 106 may be arranged linearly relative to one another. The front end 102 includes a transfer robot 108 having support elements 108E (such as suction elements, end effectors, and gripper jaws for gripping and transporting a substrate 110). The transfer robot 108 is adapted to transfer the substrate 110 from one or more cassettes 112 located within the front end 102 to a conveying device system 114. The conveying device system 114 may be a motor-driven conveying device system and may include one or more conveying devices, such as a conveyor belt or track driven by an actuator through rollers and / or drive gears. The conveying device system 114 may be arranged linearly to convey the substrate received from the transfer robot 108 through the module unit 104. Thus, the conveying device system 114 is disposed within the module unit 104 and facilitates the transfer of the substrate 110 through the module unit 104. Additional module units may be positioned between the front end 102 and the module unit 104, and / or between the module unit 104 and the sorting unit 106, and / or after the sorting unit 106 to facilitate the expansion of the inspection system 100.

[0018] The front end 102 receives one or more cassettes 112. Each cassette 112 may accommodate substrates 110 in a stacked configuration. For example, the substrates may be stacked horizontally or vertically. For example, each cassette 112 may include a plurality of slots therein, and each slot is configured to hold a substrate 110. As another example, the cassettes 112 may be positioned such that the substrates 110 are stacked on top of one another. The substrates 110 are transferred from the cassettes 112 to the conveying device system 114 by the transfer robot 108 for transfer through the system 100. The front end 102 includes a computer (not shown in the figure) having a graphical user interface adapted to present information related to operations occurring in the front end 102, including process metrics, lot numbers, etc. In one example, the computer may include a touch screen interface.

[0019] The module unit 104 may include one or more metering stations. In Figure 1 an implementation, the module unit 104 includes five metering stations 116A - 116E. It should be envisioned that when space permits, the inspection system 100 may also be improved by adding or reducing metering stations to the module unit 104 rather than adding a second module unit, thereby increasing the production rate and / or the number of metering processes performed.

[0020] By way of example only, the metrology station may include any one of the following: a microcrack inspection unit, a thickness measurement unit, a resistivity measurement unit, a photoluminescence unit, a geometry inspection unit, a saw mark detection unit, a stain detection unit, a debris detection unit, and / or a crystal fragment detection unit. By way of example only, the microcrack inspection unit may be configured to inspect substrate cracks and, optionally, to determine crystal fragments of the substrate. By way of example only, the geometry inspection unit may be configured to analyze surface properties of the substrate. By way of example only, the saw mark detection unit may be configured to identify saw marks on the substrate, including grooves, steps, and double step marks. The metrology station may also include other examples in addition to those listed above.

[0021] By way of further example and for illustrative purposes only, metrology station 116B may be a thickness measurement unit adapted to measure the thickness of the substrate. Metrology station 116B may alternatively also measure the resistivity of substrate 110. Metrology station 116B receives substrate 110 conveyed along conveyor system 114 after being inspected in metrology station 116A, which may be any type of metrology station. Metrology station 116B is disposed along the same straight-line path of substrate 110 downstream of the location of metrology station 116A as defined by conveyor system 114. Metrology station 116B performs one or more inspection processes on substrate 110. The inspection processes occurring at metrology station 116B may be performed while the substrate is in motion; however, it is contemplated that the motion of substrate 110 may be stopped to aid in increasing the accuracy of the inspection.

[0022] By way of further example and for illustrative purposes only, metrology station 116C may be a photoluminescence unit configured to detect defects and / or perform impurity measurements, and metrology station 116D may be a geometry inspection unit configured to analyze the geometry and surface properties of substrate 110.

[0023] Metrology station 116C receives substrate 110 conveyed along conveyor system 114 after being inspected in metrology station 116B. Metrology station 116D receives substrate 110 conveyed along conveyor system 114 after being inspected in metrology station 116C. Metrology station 116E receives substrate 110 conveyed along conveyor system 114 after being inspected in metrology station 116D, and so on if additional metrology units are in the straight-line path as shown. Additionally, in some embodiments, non-straight-line paths of inspection may be utilized. Thus, substrate 110 may be conveyed between metrology stations 116A - 116E in a non-straight-line manner, such as in a circular manner or in an arcuate manner.

[0024] The transport device system 114 transports the inspected substrate 110 from the module unit 104 towards the sorting unit 106. The transport device system 114 can deliver the inspected substrate 110 to a position near the rotary sorting system 120 housed in the sorting unit 106. Additionally, the transport device system 114 can continue through the sorting unit 106 to the connector 150. Thus, if the sorting unit 106 does not sort the substrate 110, the inspected substrate 110 can bypass the rotary sorting system 120 of the sorting unit 106. Further, if the inspected substrate 110 is not picked up by the rotary sorting system 120, the substrate can continue to move along the transport device system 114 towards the connector 150. In some embodiments, the substrate not picked up by the rotary sorting system 120 can continue to move along the transport device system 114, which may lead to an unsorted substrate bin. In some embodiments, the sorting unit 106 can be further connected to an additional unit through the connector 150, such as, by way of example only, the additional unit being an additional inspection system, an additional sorting unit, an additional metrology unit, and so on. The connector 150 can further allow the transport device system 114 to be aligned with the transport device systems of additional units (such as, by way of example only, an additional inspection system, an additional sorting unit, an additional metrology unit, and so on).

[0025] The inspection system 100 can further include a controller 190. The controller facilitates the control and automation of the system 100. The controller 190 can be coupled to or communicate with one or more of the transport device system 114, the front end 102, the module unit 104, the sorting unit 106, the transfer robot 108, and / or the metrology stations 116A - 116E. The inspection system 100 can provide information about substrate movement, substrate transfer, substrate sorting, and / or the metrology performed to the controller 190.

[0026] The controller 190 may include a central processing unit (CPU) (not shown in the figure), a memory (not shown in the figure), and support circuitry (or I / O) (not shown in the figure). The CPU may be one of any form of computer processor used in an industrial setting to control various processes and hardware (such as a graphics generator, motors, and other hardware) and monitor processes (such as processing time and substrate positioning or location). The memory (not shown in the figure) is connected to the CPU and may be one or more readily available memories, such as random access memory (RAM), read-only memory (ROM), floppy disks, hard disks, or any other form of local or remote digital memory. Software instructions and data may be encoded and stored in the memory for commanding the CPU. The support circuitry (not shown in the figure) is also connected to the CPU to support the processor in a conventional manner. The support circuitry may include conventional caches, power supplies, clock circuits, input / output circuitry, subsystems, and the like. The program (or computer instructions) readable by the controller 190 determines which tasks can be performed on the substrate. The program may be software readable by the controller 190 and may include code for monitoring and controlling, for example, the processing time and substrate positioning or location within the inspection system 100.

[0027] Figure 2 Shown accommodated within the sorting unit 106 Figure 1 A top plan view of the rotary sorting system 120. The rotary sorting system 120 includes a rotatable support 122 accommodated within the rotary sorting system 120. The rotatable support 122 has a rotation axis R. The rotatable support 122 may be a rotating disk, a circular support, or any other shape for effectively sorting the substrates 110. The rotatable support 122 includes a plurality of arms 124. Each arm 124 has a first end 126 and a second end 128. The first end 126 of each arm 124 is coupled to the rotatable support 122 by a suitable connection means (such as a welded connection, a pinned connection, a fastening connection, etc.). The second end 128 of each arm 124 extends radially outward with respect to the rotation axis R. In one embodiment, the rotatable support 122 may include at least twelve arms 124, such as fourteen arms or sixteen arms; however, it should be envisioned that any number of arms 124 may be utilized, by way of example only, ten or more arms 124.

[0028] At least one gripper 130 is coupled to the second end 128 of each arm 124. Each gripper 130 may be disposed on the underside or end of each arm 124 such that each gripper 130 can grasp the substrate 110 once the inspected substrate 110 reaches the sorting unit 106. By way of example only, each gripper 130 may be a suction gripper, a claw gripper, a magnetic gripper, or a picker. In one embodiment, each gripper 130 is a Bernoulli picker.

[0029] One or more sorting bins 140 are provided radially outside the axis of rotation R. In one embodiment, by way of example only, at least ten sorting bins 140 are employed; however, it should be envisioned that any number of sorting bins 140 may be employed, such as six, eight, or twelve sorting bins 140. When the plurality of arms 124 are rotated by the rotatable support 122, the sorting bins 140 can be positioned directly below the path taken by the gripper 130. In one mode of operation, the rotary sorting system 120 can rotate about the axis of rotation R in a stepwise manner such that when each substrate 110 enters the sorting unit 106, the rotary sorting system 120 stops to grip (i.e., pick up) the substrate 110 from the conveyor system 114. The sorting bins 140 are positioned to receive the substrate 110 from the rotary sorting system 120. The substrate 110 can be sorted into the sorting bins 140 in response to one or more substrate characteristics measured during one or more inspection processes performed at the metrology stations 116A - 116E. The rotary sorting system 120 positions the substrate 110 above the sorting bin 140 designated to receive substrates having at least one predetermined substrate characteristic. The substrate 110 is then released from the respective one or more grippers 130 into the appropriate sorting bin 140. The sorting bins 140 can store the sorted substrates 110 released by the grippers 130.

[0030] The sorting bins 140 can be individually removed from the sorting unit 106. Each sorting bin 140 can be detachably connected to the sorting unit 106. For example, and merely by way of illustration, the sorting unit 106 is a separately removable drawer or container, a slide-out container, or a pull-out drawer or container. As another example, each sorting bin 140 can be loaded and unloaded from the outside of the sorting unit 106 such that each sorting bin 140 can be removed from the sorting unit 106 without entering the sorting unit 106. A filled sorting bin 140 can be removed from the sorting unit 106, for example, by pulling the sorting bin 140 out of the sorting unit 106. The sorting bins 140 can be removed from the sorting unit 106 while the sorting unit 106 sorts the substrates 110. Thus, even if a particular sorting bin 140 is full or has been removed, the sorting of the substrates 110 can continue. Accordingly, the sorting bins 140 can be emptied or replaced while the sorting is in progress. Additionally, the controller 190 can count the number of substrates 110 in each sorting bin 140 by using a counter (not shown in the figures). Thus, when a particular sorting bin 140 is full or out of position, the sorting unit 106 can skip the full or removed sorting bin 140 until the full or removed sorting bin 140 is emptied or replaced. Once an empty sorting bin 140 has been replaced within the sorting unit 106, the counter can reset the count for this particular sorting bin 140. The counter can be automatically reset whenever a sorting bin 140 is replaced or emptied. A full sorting bin 140 can be emptied or replaced by an operator. Thus, the sorting unit 106 can continue to rotate the substrates 110 until a designated sorting bin 140 is available. If no sorting bin 140 is available, the sorting unit 106 can warn the operator and continue to rotate the substrates 110 until a suitable sorting bin 140 becomes available. Once the controller 190 determines that a particular sorting bin 140 will be full or is full, the controller 190 can warn the operator by emitting an alarm sound and / or displaying an alarm.

[0031] Although not shown in the figures, it should be envisioned that additional sorting bins 140 can be located within the sorting unit 106 to receive substrates 110 that may have inadvertently been missed during sorting, thereby preventing damage to such substrates. Although ten sorting bins 140 are shown, it should be envisioned that more or fewer than ten sorting bins 140 can be included within the sorting unit 106, such as six, eight, eighteen, or twenty-four sorting bins 140. Additionally, a rejection bin 144 can be located within the sorting unit 106 to capture substrates 110 that have been rejected by one or more of the metering stations 116A - 116E of the module unit 104. Thus, the rotary sorting system 120 can deliver damaged substrates to the rejection bin 144.

[0032] The rotational sorting system 120 may also include a yield analysis server 146 accessible through one or more access panels. The yield analysis server 146 is coupled to the front end 102 and one or more of the metrology stations 116A - 116E, and is adapted to receive, collect, analyze, store, and / or report data received from the front end 102 and one or more of the metrology stations 116A - 116E through which each substrate 110 passes.

[0033] The rotatable support 122 may be coupled to a rotational actuator (not shown in the figures), such as a pneumatic cylinder or a stepper motor. For example, the rotational actuator rotates the rotatable support 122 in an indexing manner. At each indexing step of the rotatable support 122, a new substrate 110 is received from the module unit 104 through the conveyor system 114 and then placed onto the rotational sorting system 120 by each gripper 130. Additionally, and as further discussed below, the rotatable support 122 may index each of the plurality of arms 124 above the respective sorting bins 140 and / or above the scrap bin 144 such that the substrate 110 can be released into the sorting bin 140 or the scrap bin 144. By continuous movement or indexing steps, the substrate 110 can be continuously removed from the conveyor system 114, thereby immediately freeing up space on the conveyor system 114 for the next substrate 110. Thus, this rotational movement allows each gripper 130 to dock with each sorting bin 140 such that the substrate held by the gripper 130 will be released into one of the sorting bins 140 before the gripper 130 rotates back to the position for receiving another substrate 110. The rotational sorting system 120 will continue to move until all substrates 110 have been sorted.

[0034] In some embodiments, the rotational sorting system 120 may pick up the substrates 110 delivered from the module unit 104 through the conveyor system 114 every 2 / 3 of a second. In such embodiments, the rotational sorting system 120 may advantageously sort at least 5400 substrates per hour, which is a significant improvement over conventional sorting systems.

[0035] Figure 3 A perspective bottom view of at least one gripper 130 of the rotational sorting system 120 connected to one of the plurality of arms 124 of the rotatable support 122 is shown. Figure 3 Four grippers 130 are shown in the embodiment; however, any number of grippers 130 may be contemplated. As described above, in one embodiment, each gripper 130 may be a Bernoulli picker 210. Figure 3Four Bernoulli pickers 210 are shown in the embodiment. Each Bernoulli picker 210 may be operably connected to each of the plurality of arms 124, with one Bernoulli picker 210 located near each corner of each arm 124. Each Bernoulli picker 210 may extend downward from the arm 124 to lift the substrate 110. The position of each Bernoulli picker 210 depends on the number of Bernoulli pickers used. In one embodiment, each arm 124 may use only one Bernoulli picker 210, so it can be envisioned that the Bernoulli picker 210 may be located at the central position of each arm 124 and near the second end 128 of each arm 124. In addition, each Bernoulli picker 210 may be disposed on the bottom side 212 of each of the plurality of arms 124 such that each Bernoulli picker 210 can transfer the substrate 110 from the conveying device system 114 of the module unit 104 into a suitable sorting bin 140 or a scrap bin 144 around the sorting unit 106.

[0036] Each Bernoulli picker 210 may be suitable for lifting applications that require sensitive handling, such as handling of the substrate 110. Each Bernoulli picker 210 may be operable to provide soft contact transfer or non-contact transfer of the substrate 110 by applying an air flow between the non-contact surface 214A of the Bernoulli picker 210 and the substrate 110. The air flow from the non-contact surface 214A may create a vacuum and a lifting force on the surface of the substrate 110. A stopper 214B may be located between the non-contact surface 214A of the Bernoulli picker and the substrate 110. The stopper 214B may prevent the substrate 110 from slipping or moving away from the Bernoulli picker 210 when the substrate 110 is being sorted. The stopper 214B may be a soft surface that can contact the substrate 110; however, the stopper 214B may also be an intermediate member that provides a vacuum and a lifting force between the non-contact surface 214A and the substrate 110, such as to prevent damage to the substrate 110. The stopper 214B may be a thin material, such as a material that does not damage the substrate 110. The stopper 214B may prevent the substrate 110 from contacting the non-contact surface 214A of the Bernoulli picker 210. Due to the vacuum force and continuous flow generated between the non-contact surface 214A of the Bernoulli picker 210 and the substrate 110, the substrate 110 does not directly contact the Bernoulli picker 210, but may contact the stopper 214B, thereby enabling safe handling of the substrate 110 within the sorting unit 106. Advantages of using the Bernoulli picker 210 include the ability to pick up the substrate 110 without contact due to the air flow between the non-contact surface 214A and the surface of the substrate 110.

[0037] Figure 4FIG. 0 shows a top view of the sorting bin 140 according to one embodiment. The scrap bin 144 can be similarly explained. As described above, each substrate 110 is sorted into the sorting bin 140 or the scrap bin 144 based on the inspection data obtained in one or more of the metering stations 116A - 116E. The yield analysis server 146 analyzes the received inspection data and determines the specific sorting bin 140 or scrap bin 144 into which the substrate 110 will be sorted. The sorting bin 140 and the scrap bin 144 can be the same; however, each can be used for separate and different purposes. When the substrate is positioned over the appropriate bin, the rotary sorting system 120 can pause to pick up a new substrate 110. During the stop, any substrate 110 positioned above the appropriate sorting bin 140 can be released from the corresponding gripper 130 such that the substrate falls into the sorting bin 140. Just before the release, the substrate 110 is substantially parallel to the sorting bin such that the substrate 110 encounters an air cushion 192 or resistance when released, which slows the fall of the substrate 110. The air cushion 192 can provide resistance to the falling substrate 110 such that the substrate 110 gently falls into the sorting bin 140.

[0038] As Figure 4 Further shown, in some embodiments, each sorting bin 140 can optionally include a plurality of gas outlets 162. The gas outlets 162 are oriented to provide an additional gas support pad 160 within the sorting bin 140. The gas support pad 160 can allow each substrate 110 released by the gripper 130 to gently fall into the sorting bin 140 due to gas (such as air) leaking into the sorting bin 140, which cushions the fall and protects the substrate 110 from cracks, breaks, or other damage. The optional gas support outlets 162 can release pressurized gas, such as air, oxygen, or any other suitable pressurized or non - pressurized gas. The gas outlets 162 can be located on the walls 164 of each sorting bin 140 and / or the scrap bin 144. In one embodiment, gas can optionally be supplied to the gas outlets 162 through a supply line connected to a gas source (not shown in the figure). In another embodiment, gas can be supplied through the gas outlets 162 by a gas source not directly connected to the sorting bin 140. The gas supply amount can be controlled by the controller 190.

[0039] Figure 5FIG. 500 is a flowchart showing a method for inspecting and sorting a plurality of substrates according to an embodiment. Flowchart 500 begins at operation 510, in which a substrate is loaded into the front end (e.g., a loading module) of inspection system 100. To load the substrate into the front end, a cassette carrying a plurality of substrates for inspection may be located at a loading station at the front end (e.g., front end 102 of inspection system 100). In operation 520, the substrate is transferred into a module unit (e.g., a metrology module) of inspection system 100. A robot located within the module unit may remove the substrate from the cassette and place the substrate on a conveyance system (such as conveyance system 114). As the conveyance system moves through inspection system 100, conveyance system 114 transports the substrate through each metrology unit disposed along conveyance system 114 within module unit 104.

[0040] In operation 530, metrology is performed on the substrate within module unit 104. The substrate may be inspected using a first metrology station (such as metrology station 116A). By way of example only, metrology station 116A may be a microcrack inspection unit, a thickness measurement unit, a resistivity measurement unit, a photoluminescence unit, a geometry inspection unit, or a saw mark detection unit. Metrology station 116A may perform one or more operations on the substrate as the substrate moves relative to metrology station 116A and then forward the inspection data to a yield analysis server 146. Conveyance system 114 may continue to move the substrate through the module unit and various other metrology units housed within the module unit, such as metrology stations 116B - 116E. Any number of metrology units may be included along conveyance system 114 within module unit 104.

[0041] In operation 540, the substrate may be assigned to a sorting bin based on the results obtained or the measurements made within the respective metrology units. Data and results from the respective metrology units may be sent to a yield analysis server, which may include and analyze the data and inspection results to determine which substrate belongs to which sorting bin. By way of illustration, and by way of example only, as described above, metrology station 116A may be a microcrack inspection unit. If metrology station 116A inspects the substrate and determines that the substrate contains one or more microcracks, such data may be sent to the yield analysis server. The yield analysis server may then determine that, due to the microcracks, this particular substrate must be assigned to, for example, sorting bin D. For illustrative purposes only, sorting bin D may be a sorting bin that houses substrates that will be remelted.

[0042] At operation 550, the substrate is transferred to the sorting module. To facilitate the transfer, the substrate may be coupled to at least one gripper of the sorting module and then rotated about the central axis of the sorting module until it reaches a desired position above the appropriate sorting bin. The appropriate sorting bin is selected based on the results and inspection data determined by the yield analysis server and obtained in one or more of operations 510 - 540. The yield analysis server 146 analyzes the received inspection data and determines the specific bin into which the substrate will be sorted. When the substrate reaches a position above the appropriate sorting bin, the substrate may be released from the at least one gripper such that the substrate can fall into the sorting bin. After the substrate is released from the at least one gripper, the substrate may be supported by an air pillow 192 as it is released above the sorting bin. The air pillow 192 can prevent the substrate from being damaged. In some embodiments, the substrate 110 may optionally be supported by an air cushion. The gas may be air or any other suitable gas for supporting the substrate. Additionally, the gas or air may be pressurized. Operation 550 may be repeated until each substrate that has been inspected within the inspection system has been sorted into an appropriate bin.

[0043] The disclosed substrate sorting system provides for sorting substrates into appropriate sorting bins based on received metrology inspection data. The disclosed inspection system is scalable and can be used to detect various substrate defects prior to processing the substrate. The system may use a rotating sorter coupled to at least one gripper (such as a Bernoulli picker) to sort inspected substrates received from a metrology unit. When a gripper picks up each substrate, the space on the conveyor from the metrology unit is immediately vacated, allowing the next substrate to be conveyed towards the sorting module through the conveyor. During this time, the next substrate moves along the conveyor, the rotating sorter advances with the picked-up substrate about the axis of rotation of the rotating sorter to the next position, and a subsequent gripper is positioned to receive the next substrate. The rotating sorter with the picked-up substrate continues to step about the axis of rotation of the rotating sorter until the appropriate gripper has reached a position above the selected sorting bin. Once each gripper has reached a position above the selected sorting bin, the gripper will release the substrate or drop the substrate into the sorting bin. Due to the air pillow or the air resistance between the falling substrate and the sorting bin, the substrate will fall smoothly into the sorting bin. Optionally, a gas (such as air) may be provided below the falling substrate, which can further cushion the fall of the substrate and thus prevent any additional damage to the substrate.

[0044] Those skilled in the art will understand that the previous examples are illustrative and not restrictive. All permutations, improvements, equivalent forms, and modifications that are obvious to those skilled in the art upon reading the specification and studying the drawings are intended to be included within the true spirit and scope of this disclosure. Accordingly, the following appended claims are intended to cover all such modifications, permutations, and equivalent forms that fall within the true spirit and scope of these teachings.

Claims

1. An apparatus for inspecting and sorting a plurality of substrates, the apparatus comprising: A sorting unit; A rotatable support, the rotatable support being disposed within the sorting unit and being capable of rotating about a rotation axis; A plurality of arms, each arm of the plurality of arms having a first end coupled to the rotatable support and a second end extending radially outward from the rotatable support relative to the rotation axis; A gripper, the gripper being coupled to the second end of each arm; A plurality of bins, the plurality of bins being located within the sorting unit and below a path along which the gripper travels as the rotatable support rotates; And A plurality of gas outlets, at least a first gas outlet of the plurality of gas outlets being positioned to dispense gas to provide a support pad with a first bin of the plurality of bins, the support pad being sufficient to provide resistance to a substrate released from one of the grippers and falling into the first bin, Wherein the plurality of bins are each associated with a predetermined substrate characteristic, Wherein the sorting unit is configured to release the substrate into a corresponding bin of the plurality of bins associated with the substrate characteristic of the substrate, and the sorting unit is configured to continue rotating the substrate until a bin associated with the substrate characteristic of the substrate is available below the path when no bin in the plurality of bins is available to receive the substrate.

2. The apparatus according to claim 1, wherein the first gas outlet of the plurality of gas outlets is located in a wall of the first bin.

3. The apparatus according to claim 1, wherein the first gas outlet of the plurality of gas outlets provides pressurized air.

4. The apparatus according to claim 1, further comprising a loading unit coupled to a metering unit, wherein the metering unit is coupled to the sorting unit.

5. The apparatus according to claim 1, wherein the plurality of bins are positioned to receive substrates released by the at least one gripper.

6. The apparatus according to claim 1, wherein the gas is air.

7. The apparatus according to claim 1, wherein the plurality of bins are removably separable from outside the sorting unit.

8. The apparatus according to claim 7, wherein the plurality of bins are removably separable while sorting is occurring.

9. The apparatus according to claim 1, wherein the plurality of bins are removably separable while sorting is occurring.

10. The apparatus according to claim 1, further comprising a controller, wherein the controller includes a computer-readable medium storing instructions that, when executed by a processor, cause the controller to sort the plurality of substrates by performing the following steps: Holding the substrate with at least one gripper of the sorting unit; Rotating the substrate held by the at least one gripper about a central axis of the sorting unit to a position above a sorting bin assigned to the substrate; And Releasing the substrate from the at least one gripper into the assigned sorting bin.

11. An apparatus suitable for inspecting and sorting substrates, the apparatus comprising: A loading unit; A metering unit, the metering unit being coupled to the loading unit; And A sorting unit, the sorting unit being coupled to the metering unit, wherein the sorting unit includes: A plurality of arms that extend radially outward from a rotation axis; At least one gripper coupled to one end of each arm; and A plurality of individually removable sorting bins located within the sorting unit and below the path along which the at least one gripper travels as it rotates, wherein each of the individually removable sorting bins includes one or more gas outlets positioned to create a gas support pad within the individually removable sorting bin, Wherein the plurality of individually removable sorting bins are each associated with a predetermined substrate characteristic, Wherein the sorting unit is configured to release the substrate into the respective sorting bin of the plurality of individually removable sorting bins associated with the substrate characteristic of the substrate, and the sorting unit is configured to continue rotating the substrate until a sorting bin associated with the substrate characteristic of the substrate is available below the path when no sorting bin in the plurality of individually removable sorting bins is available to receive the substrate.

12. The apparatus according to claim 11, further comprising a controller, wherein the controller includes a computer-readable medium storing instructions that, when executed by a processor, cause the controller to sort the substrate by performing the following steps: Holding the substrate with the at least one gripper of the sorting unit; Rotating the substrate held by the at least one gripper about a central axis of the sorting unit to a position above the sorting bin assigned to the substrate; and Releasing the substrate from the at least one gripper into the assigned sorting bin.

13. The apparatus according to claim 11, wherein each individually removable sorting bin includes a wall.

14. The apparatus according to claim 13, wherein the one or more gas outlets are located in the wall of the individually removable sorting bin.

15. The apparatus according to claim 11, wherein the gas support pad includes air.

16. An apparatus suitable for inspecting and sorting substrates, the apparatus including: A loading unit; A metering unit, the metering unit being coupled to the loading unit; And A sorting unit, the sorting unit being coupled to the metering unit, wherein the sorting unit includes: A plurality of arms that extend radially outward from a rotation axis; At least one gripper coupled to one end of each arm; and A plurality of individually removable sorting bins located within the sorting unit and below the path along which the at least one gripper travels as it rotates, wherein each of the individually removable sorting bins includes a plurality of gas outlets operable to create a pressurized gas support pad within the individually removable sorting bin, Wherein the plurality of individually removable sorting bins are each associated with a predetermined substrate characteristic, Wherein the sorting unit is configured to release the substrate into a respective sorting bin of the plurality of individually removable sorting bins associated with the substrate characteristics of the substrate, and the sorting unit is configured to continue to rotate the substrate until a sorting bin associated with the substrate characteristics of the substrate is available below the path when no sorting bin in the plurality of individually removable sorting bins is available to receive the substrate.

17. The apparatus according to claim 16, wherein the pressurized gas support pad comprises air.

18. The apparatus according to claim 16, wherein each of the individually removable sorting bins is removable while sorting is taking place.

19. The apparatus according to claim 16, wherein each individually removable sorting bin comprises a wall.

20. The apparatus according to claim 19, wherein the plurality of gas outlets are located in the wall of the individually removable sorting bin.

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