Measuring device and measuring method for cylindrical target

Abstract

The present invention discloses a measuring device for a cylindrical target, comprising: a support mechanism configured to provide rotatable support to maintain the cylindrical target horizontally; a first drive module configured to drive the cylindrical target to rotate axially on the support mechanism; and a second drive module configured to carry a detection unit for multi-axis motion relative to the cylindrical target to measure the cylindrical target. The present invention can quickly determine whether the appearance dimensions and magnetic field strength of a cylindrical target meet the requirements and can accurately and three-dimensionally reflect the magnetic field strength distribution of the cylindrical target. The collected data is stable, large in quantity, and accurate, making it suitable for generalization. The present invention also discloses a measuring method for a cylindrical target.

Description

Technical Field

[0001] The present invention relates to the technical field of vacuum coating test equipment, and in particular to a measuring device and a measuring method for measuring the magnetic field intensity and straightness of a cylindrical target. Background Art

[0002] Cylindrical targets are commonly used as cathode targets in vacuum coating equipment (e.g., magnetron sputtering). Cylindrical targets generally consist of a hollow cylindrical tube as the target material and a magnetic core positioned within the tube, which can rotate coaxially with the tube.

[0003] During use, cylindrical targets are susceptible to bending and deformation due to factors such as transportation, installation, and high temperatures. This can negatively impact coating quality and lead to excessive target material loss. Furthermore, the uniformity of the magnetic field within the cylindrical target (magnetic core) is also a crucial factor influencing coating quality. Therefore, it is necessary to measure and control the magnetic field strength and straightness of the cylindrical target.

[0004] However, due to the large size and weight of cylindrical targets, there is a lack of suitable measurement equipment. Therefore, in practice, manual testing of indicators such as magnetic field strength and straightness of cylindrical targets is often used. However, this method has many problems, including high measurement difficulty, inaccurate results, difficulty in measuring the target's three-dimensional surface, and poor consistency between repeated measurements.

[0005] Therefore, in order to address the above shortcomings, it is necessary to design a measuring device suitable for measuring the magnetic field strength and straightness of a cylindrical target. Summary of the Invention

[0006] The purpose of the present invention is to overcome the deficiencies of the prior art and to provide a measuring device and a measuring method for a cylindrical target.

[0007] A technical solution of the present invention to achieve the above-mentioned purpose is:

[0008] The present invention provides a measuring device for a cylindrical target, comprising:

[0009] a support mechanism configured to provide rotatable support for keeping the cylindrical target horizontal;

[0010] a first driving module configured to drive the cylindrical target to rotate axially on the supporting mechanism;

[0011] The second driving module is configured to carry the detection unit to perform multi-axis motion relative to the cylindrical target to measure the cylindrical target.

[0012] Furthermore, the first driving module includes a rotation driving mechanism, a transmission mechanism and a clamping mechanism connected in sequence, the transmission mechanism is sleeved on the target head located at one end of the cylindrical target, and is fixed to the cylindrical target through the clamping mechanism, the rotation driving mechanism drives the transmission mechanism to rotate, and drives the clamping mechanism and the cylindrical target fixed by it to rotate axially on the support mechanism.

[0013] Furthermore, the transmission mechanism includes a first gear and two second gears, the first gear is sleeved on the target head of the cylindrical target, the clamping mechanism is arranged on the side of the first gear, and the two second gears are correspondingly arranged obliquely below the first gear. The first gear and the second gear are jointly sleeved with a toothed conveyor belt that matches them, and the rotation drive mechanism is connected to one of the second gears.

[0014] Furthermore, the clamping mechanism includes a movable retaining ring provided on a first side surface of the first gear, and a movable pressing portion provided on a second side surface opposite to the first gear, wherein the first side surface is a side opposite to the target head, the retaining ring is used to fix the outer periphery of the target head, and the pressing portion is used to press the outer periphery of the end of the magnetic core extending from the target head and provided in the hollow cylindrical target to restrict its relative rotation.

[0015] Furthermore, the support mechanism includes two pairs of rotating wheels, and the two pairs of rotating wheels are configured to provide rotatable support to the cylindrical target from below the target head end side and the target tail end side of the cylindrical target respectively.

[0016] Furthermore, the second driving module includes a z-direction translation mechanism, an x-direction translation mechanism and a y-direction lifting mechanism that are orthogonally connected in sequence; wherein, the z-direction translation mechanism is configured to drive the x-direction translation mechanism to move horizontally relative to the axial direction of the cylindrical target, the x-direction translation mechanism is configured to drive the y-direction lifting mechanism to move horizontally in a direction orthogonal to the axial direction of the cylindrical target, and the y-direction lifting mechanism is configured to drive the detection unit to move vertically in a direction orthogonal to the axial direction of the cylindrical target.

[0017] Furthermore, the z-direction translation mechanism includes a z-direction electric cylinder, the x-direction translation mechanism includes an x-direction electric cylinder, the y-direction lifting mechanism includes a y-direction electric cylinder, the x-direction electric cylinder is arranged on the slider of the z-direction electric cylinder, the y-direction electric cylinder is arranged on the slider of the x-direction electric cylinder, and the detection unit is arranged on the slider of the y-direction electric cylinder.

[0018] Furthermore, the detection unit includes a distance measuring unit, which includes a distance meter for detecting the straightness of the cylindrical target; or, the detection unit also includes a magnetic field strength detection unit, which includes a Tesla meter for detecting the magnetic field strength of the cylindrical target, and the Tesla meter and the distance meter are on the same horizontal reference line.

[0019] Furthermore, the rotation drive mechanism includes a motor.

[0020] Furthermore, it also includes: a base, used to set the supporting mechanism, the first driving module and the second driving module thereon; a limiter is set on the base, used to axially limit the target tail end of the cylindrical target.

[0021] The present invention further provides a measuring method for a cylindrical target, comprising:

[0022] Step 01: Place the cylindrical target horizontally and define a measurement interval along its axis;

[0023] Step 02: Using a distance measuring unit, place it on one side of the cylindrical target at a position corresponding to the starting point of the measurement interval, and establish a spatial rectangular coordinate system with this position as the coordinate origin;

[0024] Step 03: Move the distance measuring unit vertically along the y-axis of the spatial rectangular coordinate system to obtain the coordinate position of the first point on the side surface of the cylindrical target that is closest to the distance measuring unit, and a first distance between the first point and the distance measuring unit;

[0025] Step 04: The distance measuring unit is translated along the z-axis of the spatial rectangular coordinate system to a predetermined coordinate, and the distance measuring unit is vertically moved along the y-axis of the spatial rectangular coordinate system to obtain the coordinate position of a second point on the side surface of the cylindrical target that is closest to the distance measuring unit, and a second distance between the second point and the distance measuring unit;

[0026] Step 05: Repeat step 04 until the coordinate position of the Nth point on the side surface of the cylindrical target that is closest to the distance measuring unit and the Nth distance between the Nth point and the distance measuring unit are obtained; wherein the coordinate position of the Nth point corresponds to the end point of the measurement interval, and N is a positive integer;

[0027] Step 06: Based on the coordinate positions of the first point and the Nth point, obtain the first slope of the cylindrical target in the measurement interval, and based on the maximum distance between the coordinate positions from the second point to the N-1th point and the first slope, obtain the first straightness of the cylindrical target.

[0028] Furthermore, it also includes:

[0029] Step 07: Return the distance measuring unit to the coordinate position corresponding to the first point, use a magnetic field strength detection unit, position it on one side of the distance measuring unit, and adjust the magnetic field strength detection unit to maintain a first sensing distance from the side surface of the cylindrical target;

[0030] Step 08: moving the magnetic field intensity detection unit to the coordinate position corresponding to the first point, and rotating the cylindrical target one circle to obtain the peak rotation angle of the cylindrical target corresponding to the peak value of the magnetic field intensity detected on the side surface of the cylindrical target;

[0031] Step 09: Rotate the cylindrical target to the peak rotation angle, move the magnetic field strength detection unit along the first slope direction, and scan and measure the magnetic field strength from the first point to the Nth point on the side surface of the cylindrical target between the measurement intervals to obtain a first magnetic field strength distribution along the axial direction of the cylindrical target; during the measurement, adjust the magnetic field strength detection unit to maintain the first sensing distance with the side surface of the cylindrical target according to the first distance to the Nth distance for measurement.

[0032] Furthermore, it also includes:

[0033] Step 10: Return the distance measuring unit to the coordinate origin, and continue to rotate the cylindrical target by a certain angle from the peak rotation angle;

[0034] Step 11: Repeat steps 03 to 06 to obtain the second slope and second straightness of the cylindrical target;

[0035] Step 12: Repeat steps 08 to 09 to obtain a second magnetic field intensity distribution along the axial direction of the cylindrical target;

[0036] Step 13: Repeat steps 10 to 12 until the cylindrical target rotates one circle to obtain the Mth magnetic field intensity distribution along the axis of the cylindrical target, where M is a positive integer. Based on the first magnetic field intensity distribution to the Mth magnetic field intensity distribution, the three-dimensional magnetic field intensity distribution on the side of the cylindrical target is obtained.

[0037] Compared with the prior art, the present invention has the following advantages:

[0038] (1) By setting a freely rotatable wheel as the support mechanism of the cylindrical target and cooperating with the cylindrical target through a transmission mechanism with a clamping mechanism, the cylindrical target with a certain weight can be driven by the motor to rotate smoothly, so that the rotation angle can be accurately measured. By setting a limit to prevent the cylindrical target from axial movement, the position offset and jump phenomenon during the measurement process are avoided, and the measurement accuracy is improved.

[0039] (2) By setting up an electric cylinder combination that can move along the three axes of x, y, and z, the detection unit can be driven to perform multi-axis movement relative to the cylindrical target, so that the detection unit can be accurately positioned, and the appearance size (straightness, etc.) and magnetic field strength of the cylindrical target can be quickly judged to be qualified, and the three-dimensional magnetic field strength distribution of the cylindrical target can be accurately reflected.

[0040] (3) The measurement value of the rangefinder is used as a reference for fixing the distance between the Tesla meter and the cylindrical target surface, ensuring that the distance between the Tesla meter and each measuring point on the cylindrical target surface is always maintained at a consistent measurement distance, thereby ensuring the stability and accuracy of the multiple data collected by the measurement. BRIEF DESCRIPTION OF THE DRAWINGS

[0041] Figure 1 The figure is a schematic structural diagram of a measuring device for a cylindrical target according to a preferred embodiment of the present invention.

[0042] Figure 2 The figure is a schematic diagram of the installation structure of a transmission gear according to a preferred embodiment of the present invention.

[0043] Figure 3 The figure is a schematic diagram of the installation structure of a motor and a transmission gear according to a preferred embodiment of the present invention.

[0044] Figure 4 The figure is a schematic structural diagram of a transmission gear with a clamping mechanism according to a preferred embodiment of the present invention.

[0045] Figure 5 The figure is a schematic diagram of the installation structure of a rotating wheel according to a preferred embodiment of the present invention.

[0046] Figure 6 The figure is a schematic diagram of the installation structure of an x-axis translation mechanism and a y-axis lifting mechanism with a detection unit according to a preferred embodiment of the present invention.

[0047] In the figure, 1. base, 2. gear bracket, 3. motor (rotation drive mechanism), 4. first gear, 5. y-axis lifting mechanism (y-axis electric cylinder), 6. cylindrical target, 7. turntable bracket, 8. turntable, 9. limiter, 10. z-axis translation mechanism (z-axis electric cylinder), 11. x-axis translation mechanism (x-axis electric cylinder), 12. z-axis slider, 13. toothed conveyor belt, 14. second gear, 15. pressure part (pressure block), 16. locking nut, 17 / 18. retaining ring, 19. hinge, 20. rangefinder (distance measuring unit), 21. y-axis slider, 22. Teslameter (magnetic field strength detection unit) / Teslameter probe. DETAILED DESCRIPTION

[0048] In order to better understand the technical solution of the present invention, a detailed description is given below through specific embodiments.

[0049] See also Figure 1 The measuring device for a cylindrical target of the present invention can be arranged on a base 1 and can include several main structural components such as a support mechanism, a first driving module, a second driving module and a detection unit.

[0050] The support mechanism provides rotatable support to maintain the cylindrical target 6 being measured horizontally. The first drive module drives the cylindrical target 6 to rotate axially on the support mechanism. The second drive module carries the detection unit for multi-axis motion relative to the cylindrical target 6, including movement (displacement) along mutually orthogonal z-, x-, and y-directions. The detection unit is used to measure the cylindrical target 6.

[0051] The cylindrical target 6 comprises a hollow cylindrical tube as a target material and a magnetic core arranged in the cylindrical tube. During coating, the magnetic core can rotate coaxially relative to the cylindrical tube in the cylindrical tube.

[0052] See also Figure 1 In conjunction with Figure 5 The support mechanism may include two pairs of runners 8, each pair of runners 8 comprising two freely rotatable runners 8 arranged horizontally and side by side, and each pair of runners 8 is arranged parallel to the axial direction of the cylindrical target 6. Each pair of runners 8 can be mounted on the base 1 via a runner bracket 7. In this way, the two pairs of runners 8 can provide rotatable support for the cylindrical target 6 from below the target head end (left side in the figure) and the target tail end (right side in the figure), respectively, and can keep the cylindrical target 6 in a horizontal state.

[0053] See also Figure 1 The first drive module may include a rotation drive mechanism 3, a transmission mechanism, and a clamping mechanism, which are connected in sequence. The transmission mechanism is mounted on a target head at one end of a cylindrical target 6 and secured to the cylindrical target 6 via a clamping mechanism. The rotation drive mechanism 3 drives the transmission mechanism to rotate, causing the clamping mechanism and the cylindrical target 6 secured thereto to rotate axially (autorotate) on two pairs of rotating wheels 8.

[0054] See also Figure 1 In conjunction with Figure 2-Figure 4 The transmission mechanism may include a first gear 4 and two second gears 14. The first gear 4 is suspended and sleeved on the target head of the cylindrical target 6. The two second gears 14 are correspondingly located diagonally below the first gear 4 and can be mounted on the base 1 via the gear bracket 2. A toothed conveyor belt 13 is mounted on the first gear 4 and the two second gears 14.

[0055] The rotation drive mechanism 3 can be connected to one of the two second gears 14, and the other of the two second gears 14 can be used to adjust the tightness of the toothed conveyor belt 13 by adjusting its position on the base 1. The rotation drive mechanism 3 may include a motor 3 and a reducer. The motor 3 may be, for example, a servo motor 3, which can achieve precise control of the rotation angle of the cylindrical target 6, such as Figure 2 shown.

[0056] like Figure 3 As shown (showing a perspective view), the clamping mechanism is provided on the side surface of the first gear 4. The clamping mechanism may include movable retaining rings 17 and 18 provided on the first side surface (the side facing outward in the figure) of the first gear 4, and a movable pressing portion 15 provided on the second side surface (the side facing inward in the figure) opposite the first gear 4. The first side surface is the side facing the target head of the cylindrical target 6, and the retaining rings 17 and 18 are used to fix the outer periphery of the target head. The pressing portion 15 is used to press against the outer periphery of the end of the magnetic core extending from the target head and provided in the hollow cylindrical target 6 to constrain the magnetic core from rotating relative to the cylindrical tube of the cylindrical target 6. That is, during measurement, the magnetic core and the cylindrical tube of the cylindrical target 6 need to be relatively fixed.

[0057] Furthermore, the clasps 17 and 18 can be constructed of two semicircular rings 17 and 18; one end of the two semicircular rings 17 and 18 can be movably connected by a hinge 19. When the cylindrical target 6 is mounted via the clasps 17 and 18, the target head is inserted into the two semicircular rings 17 and 18, and the other ends of the two semicircular rings 17 and 18 are locked by locking nuts 16 provided on the other ends of the two semicircular rings 17 and 18 to secure the target head. Screws can also be used to further secure the target head to the clasps 17 and 18.

[0058] Furthermore, the pressing portion 15 may be a pressing block 15 having a contour corresponding to the contour of the magnetic core. The pressing block 15 is pressed against the exposed end of the magnetic core, and the magnetic core and the pressing block 15 are fixed with screws.

[0059] See also Figure 1 In conjunction with Figure 6. The second driving module may include a z-direction translation mechanism 10, an x-direction translation mechanism 11 and a y-direction lifting mechanism 5 that are orthogonally connected in sequence. Among them, the z-direction translation mechanism 10 is horizontally arranged toward the axial direction of the cylindrical target 6, and is used to drive the x-direction translation mechanism 11 (including the y-direction lifting mechanism 5) to make horizontal movements relative to the axial direction of the cylindrical target 6. The x-direction translation mechanism 11 is horizontally arranged and perpendicular to the z-direction translation mechanism 10, and is used to move on the z-direction translation mechanism 10, and drive the y-direction lifting mechanism 5 to make horizontal movements in an orthogonal direction relative to the z-direction translation mechanism 10 (the axial direction of the cylindrical target 6). The y-direction lifting mechanism 5 is vertically arranged on the x-direction translation mechanism 11, and is used to drive the detection unit to make vertical movements in an orthogonal direction relative to the z-direction translation mechanism 10 (the axial direction of the cylindrical target 6).

[0060] In a preferred embodiment, the z-axis translation mechanism 10 may include a z-axis electric cylinder 10, the x-axis translation mechanism 11 may include an x-axis electric cylinder 11, and the y-axis lifting mechanism 5 may include a y-axis electric cylinder 5. The z-axis electric cylinder 10 is provided with a z-axis slide 12, and the x-axis electric cylinder 11 is provided on the z-axis slide 12; the x-axis electric cylinder 11 is provided with an x-axis slide, and the y-axis electric cylinder 5 is provided on the x-axis slide; the detection unit is provided on the y-axis slide 21 of the y-axis electric cylinder 5.

[0061] See also Figure 6 In an optional embodiment, the detection unit may include a distance measuring unit 20 ; the distance measuring unit 20 may include a rangefinder 20 , for example, a laser rangefinder 20 (the figure shows a probe of the laser rangefinder 20 ). The rangefinder 20 is used to detect the straightness of the cylindrical target 6 .

[0062] In another optional embodiment, the detection unit may include both a distance measuring unit 20 and a magnetic field strength detection unit 22. The distance measuring unit 20 may include a rangefinder 20, such as a laser rangefinder 20; and the magnetic field strength detection unit 22 may include a Tesla meter 22 (shown as a probe of the Tesla meter 22), which is used to detect the magnetic field strength of the cylindrical target 6.

[0063] Optionally, the Tesla meter 22 and the rangefinder 20 may be arranged on the same horizontal reference line.

[0064] Furthermore, a limiter 9 is provided on the base 1. The limiter 9 is installed on the base 1 near one end of the target tail and is used to axially limit the target tail end of the cylindrical target 6 to prevent the cylindrical target 6 from axially moving during measurement.

[0065] The present invention also provides a measurement method for a cylindrical target, which can be implemented using the above-mentioned measurement device for a cylindrical target (but is not limited thereto).

[0066] A measuring method for a cylindrical target of the present invention may include the following steps:

[0067] Step 01: Place the cylindrical target 6 horizontally on the rotating wheel 8 as the supporting mechanism, and install and connect the target head and magnetic core of the cylindrical target 6 with the transmission mechanism (first gear 4 and retaining rings 17, 18, and pressure block 15). At the same time, make the target tail of the cylindrical target 6 contact the limit 9, and complete the installation of the cylindrical target 6 to be measured on the measuring device. Figure 1 shown.

[0068] Then, according to the measurement requirements, a measurement interval (ie, a measurement length) is defined on the cylindrical target 6 along the axial direction of the cylindrical target 6 .

[0069] Step 02: Install the distance measuring unit 20, such as a laser distance meter 20, on the y-direction slider 21 of the y-direction electric cylinder 5 through the mounting bracket (refer to Figure 6 ).

[0070] At this time, the x-axis electric cylinder 11 is located on the target head side of the cylindrical target 6 and at a position corresponding to the starting point of the measurement interval, that is, the laser rangefinder 20 is also located on the target head side of the cylindrical target 6 and at a position corresponding to the starting point of the measurement interval.

[0071] The current position of the laser rangefinder 20 is defined as the coordinate origin, and a spatial rectangular coordinate system is established.

[0072] The axial electric cylinders (z-, x-, and y-axis electric cylinders 10, 11, and 5) can be connected to a control module, which can include, for example, a servo driver and a host computer. The servo driver can be controlled by the host computer. Preset software on the host computer can establish a spatial rectangular coordinate system, based on which the displacement of the axial electric cylinders 10, 11, and 5 can be controlled, thereby controlling and calibrating the movement and position (including the zero point) of the laser rangefinder 20. The servo motor 3 of the rotation drive mechanism 3 can also be controlled by the preset software on the host computer, and this can be linked to the control of the axial electric cylinders.

[0073] Step 03: At the coordinate origin, that is, the position corresponding to the starting point of the measurement interval, the laser rangefinder 20 is moved vertically along the y-axis of the spatial rectangular coordinate system to obtain the coordinate position of the first point on the side of the cylindrical target 6 that is closest to the laser rangefinder 20 (probe), as well as the distance between the first point and the laser rangefinder 20 (first distance).

[0074] When the laser rangefinder 20 is moved vertically along the y-axis of the spatial rectangular coordinate system, in order to eliminate the error of the y-axis electric cylinder 5, the error of the laser rangefinder 20 when moving vertically along the y-axis of the spatial rectangular coordinate system can be corrected by controlling the combined movement of the electric cylinders in each direction according to the origin coordinates (or zero position), thereby ensuring that the laser rangefinder 20 is accurately moved vertically along the y-axis of the spatial rectangular coordinate system.

[0075] Step 04: The laser rangefinder 20 is translated along the z-axis of the spatial rectangular coordinate system to a predetermined coordinate, ie, the position of the second measurement point when performing scanning measurement according to the set scanning step length in the measurement interval.

[0076] When the laser rangefinder 20 is translated to the second measurement point, its movement coordinates can also be corrected to ensure that the laser rangefinder 20 is accurately translated along the z-axis of the spatial rectangular coordinate system.

[0077] Similarly, the laser rangefinder 20 is moved vertically along the y-axis of the spatial rectangular coordinate system to obtain the coordinate position of the second point on the side of the cylindrical target 6 that is closest to the laser rangefinder 20, as well as the distance between the second point and the laser rangefinder 20 (second distance).

[0078] Step 05: Repeat step 04 in this manner until the coordinate position of the Nth point on the side of the cylindrical target 6 closest to the laser rangefinder 20 and the distance between the Nth point and the laser rangefinder 20 (the Nth distance) are obtained. The coordinate position of the Nth point corresponds to the end point of the measurement interval, and N is a positive integer whose value can be determined based on the scanning step size.

[0079] Step 6: Based on the coordinates of the first and Nth (last) points, the software program calculates the slope (first slope) of the cylindrical target 6 over the measurement interval. Furthermore, based on the maximum distance between the coordinates of the second point to the N-1th (last) point and the first slope (represented as a straight line), the straightness (first straightness) of the cylindrical target 6 at this initial angle (e.g., set to zero degrees) can be calculated.

[0080] The magnetic field strength of the cylindrical target 6 surface may be further detected. The method may include the following steps:

[0081] Step 07: Return the laser rangefinder 20 to the coordinate position corresponding to the first point. Utilize a magnetic field intensity detection unit 22, such as a Tesla meter 22, and install the Tesla meter 22 on one side of the laser rangefinder 20 (in practice, the Tesla meter 22 and the laser rangefinder 20 can be installed simultaneously). Adjust the Tesla meter 22 (probe) to maintain a certain distance from the side of the cylindrical target 6 (a first sensing distance; during measurement, the Tesla meter probe 22 needs to maintain a certain distance, such as 1 mm, from the side of the cylindrical target 6).

[0082] Step 08: Move the Tesla meter 22 probe to the coordinate position corresponding to the first point (this can be achieved by calculating and controlling the combined movement of the axial electric cylinders), and control the motor 3 to rotate the cylindrical target 6 one circle. The Tesla meter probe 22 is used for detection to obtain the peak value of the magnetic field intensity on the side of the cylindrical target 6, and the peak rotation angle of the cylindrical target 6 corresponding to the detected peak value of the magnetic field intensity on the side of the cylindrical target 6 (that is, the rotation angle of the motor 3 corresponding to the peak value) is obtained.

[0083] Step 09: According to the rotation angle, the motor 3 is controlled to rotate, and the cylindrical target 6 is rotated to the peak rotation angle (at this time, the peak point on the side of the cylindrical target 6 corresponding to the peak value is exactly facing the Tesla meter probe 22).

[0084] Next, the unidirectional electric cylinder is controlled to move the Teslameter probe 22 along the direction of the first slope obtained previously. The magnetic field intensity is scanned and measured from the first to the Nth point on the side surface of the cylindrical target 6 within the measurement interval, thereby obtaining a magnetic field intensity distribution (a first magnetic field intensity distribution) corresponding to each measurement point along the axial direction of the cylindrical target 6. During measurement, the unidirectional electric cylinder is controlled to adjust the Teslameter probe 22 to maintain the first sensing distance from the side surface of the cylindrical target 6 for measurement, based on the first to Nth distances.

[0085] Furthermore, when measuring the magnetic field strength, the following steps may also be included:

[0086] Step 10: Return the laser rangefinder 20 to the coordinate origin, and continue to rotate the cylindrical target 6 by a certain angle from the peak rotation angle;

[0087] Step 11: Repeat steps 03 to 06 to obtain the second slope and second straightness of the cylindrical target 6.

[0088] Step 12: Repeat steps 08 to 09 to obtain a second magnetic field intensity distribution along the axial direction of the cylindrical target 6 .

[0089] Step 13: Repeat steps 10 to 12 until the cylindrical target 6 rotates one revolution to obtain the Mth magnetic field intensity distribution along the axial direction of the cylindrical target 6, where M is a positive integer. Based on the first to Mth magnetic field intensity distributions, a three-dimensional magnetic field intensity distribution on the side of the cylindrical target 6 is obtained.

[0090] By using the measuring device for cylindrical targets and the measuring method for cylindrical targets of the present invention, it is possible to quickly determine whether the appearance dimensions (straightness, etc.) and magnetic field strength of the cylindrical target are qualified, and an accurate three-dimensional reflection of the magnetic field strength distribution of the cylindrical target can be made. The collected data is stable, a large amount of data is collected, the data is accurate, and is suitable for promotion.

[0091] Those skilled in the art should recognize that the above embodiments are merely intended to illustrate the present invention and are not intended to limit the present invention. As long as they are within the spirit of the present invention, any changes or modifications to the above embodiments will fall within the scope of the claims of the present invention.

Claims

1. A measuring method for a cylindrical target, characterized in that: include: Step 01: Place the cylindrical target horizontally and define a measurement interval along its axis; Step 02: Using a distance measuring unit, place it on one side of the cylindrical target at a position corresponding to the starting point of the measurement interval, and establish a spatial rectangular coordinate system with this position as the coordinate origin; Step 03: Move the distance measuring unit vertically along the y-axis of the spatial rectangular coordinate system to obtain the coordinate position of the first point on the side surface of the cylindrical target that is closest to the distance measuring unit, and a first distance between the first point and the distance measuring unit; Step 04: The distance measuring unit is translated along the z-axis of the spatial rectangular coordinate system to a predetermined coordinate, and the distance measuring unit is vertically moved along the y-axis of the spatial rectangular coordinate system to obtain the coordinate position of a second point on the side surface of the cylindrical target that is closest to the distance measuring unit, and a second distance between the second point and the distance measuring unit; Step 05: Repeat step 04 until the coordinate position of the Nth point on the side surface of the cylindrical target that is closest to the distance measuring unit and the Nth distance between the Nth point and the distance measuring unit are obtained; wherein the coordinate position of the Nth point corresponds to the end point of the measurement interval, and N is a positive integer; Step 06: Obtain a first slope of the cylindrical target in the measurement interval based on the coordinate positions of the first point and the Nth point, and obtain a first straightness of the cylindrical target based on the maximum distance between the coordinate positions of the second point to the N-1th point and the first slope; Step 07: Return the distance measuring unit to the coordinate position corresponding to the first point, use a magnetic field strength detection unit, position it on one side of the distance measuring unit, and adjust the magnetic field strength detection unit to maintain a first sensing distance from the side surface of the cylindrical target; Step 08: moving the magnetic field intensity detection unit to the coordinate position corresponding to the first point, and rotating the cylindrical target one circle to obtain the peak rotation angle of the cylindrical target corresponding to the peak value of the magnetic field intensity detected on the side surface of the cylindrical target; Step 09: Rotate the cylindrical target to the peak rotation angle, move the magnetic field strength detection unit along the first slope direction, and scan and measure the magnetic field strength from the first point to the Nth point on the side surface of the cylindrical target between the measurement intervals to obtain a first magnetic field strength distribution along the axial direction of the cylindrical target; during the measurement, adjust the magnetic field strength detection unit to maintain the first sensing distance with the side surface of the cylindrical target according to the first distance to the Nth distance for measurement.

2. The measuring method for a cylindrical target according to claim 1, characterized in that: Also includes: Step 10: Return the distance measuring unit to the coordinate origin, and continue to rotate the cylindrical target by a certain angle from the peak rotation angle; Step 11: Repeat steps 03 to 06 to obtain the second slope and second straightness of the cylindrical target; Step 12: Repeat steps 08 to 09 to obtain a second magnetic field intensity distribution along the axial direction of the cylindrical target; Step 13: Repeat steps 10 to 12 until the cylindrical target rotates one circle to obtain the Mth magnetic field intensity distribution along the axis of the cylindrical target, where M is a positive integer. Based on the first magnetic field intensity distribution to the Mth magnetic field intensity distribution, the three-dimensional magnetic field intensity distribution on the side of the cylindrical target is obtained.

3. A measuring device for a cylindrical target, used to implement the measuring method for a cylindrical target according to claim 1 or 2, characterized in that: include: a support mechanism configured to provide rotatable support for keeping the cylindrical target horizontal; a first drive module configured to drive the cylindrical target to perform axial rotation on the support mechanism, the first drive module comprising a rotation drive mechanism, a transmission mechanism, and a clamping mechanism connected in sequence, the rotation drive mechanism driving the transmission mechanism to rotate, thereby driving the clamping mechanism and the cylindrical target fixed thereto to perform axial rotation on the support mechanism, the rotation drive mechanism comprising a motor; a second driving module configured to carry the detection unit for multi-axis motion relative to the cylindrical target to measure the cylindrical target, the second driving module comprising a z-axis translation mechanism, an x-axis translation mechanism, and a y-axis lifting mechanism that are orthogonally connected in sequence; wherein the z-axis translation mechanism is configured to drive the x-axis translation mechanism to perform horizontal movement relative to the axial direction of the cylindrical target, the x-axis translation mechanism is configured to drive the y-axis lifting mechanism to perform horizontal movement in a direction orthogonal to the axial direction of the cylindrical target, and the y-axis lifting mechanism is configured to drive the detection unit to perform vertical movement in a direction orthogonal to the axial direction of the cylindrical target, the z-axis translation mechanism comprises a z-axis electric cylinder, the x-axis translation mechanism comprises an x-axis electric cylinder, the y-axis lifting mechanism comprises a y-axis electric cylinder, the x-axis electric cylinder is disposed on a slider of the z-axis electric cylinder, the y-axis electric cylinder is disposed on a slider of the x-axis electric cylinder, the detection unit is disposed on a slider of the y-axis electric cylinder, and the detection unit comprises a distance measuring unit and a magnetic field strength detection unit; The control module includes a servo driver and a host computer. The servo driver is controlled by the host computer, and a spatial rectangular coordinate system is established by the host computer. Based on the system, the displacement of the x-axis electric cylinder, the y-axis electric cylinder, and the z-axis electric cylinder is controlled, the rotation angle of the motor is controlled, and the straightness of the cylindrical target is calculated.

4. The measuring device for cylindrical targets according to claim 3, characterized in that: The transmission mechanism is sleeved on a target head located at one end of the cylindrical target and is fixed to the cylindrical target through the clamping mechanism.

5. The measuring device for cylindrical targets according to claim 4, characterized in that: The transmission mechanism includes a first gear and two second gears. The first gear is sleeved on the target head of the cylindrical target. The clamping mechanism is arranged on the side of the first gear. The two second gears are correspondingly arranged obliquely below the first gear. The first gear and the second gear are jointly sleeved with a toothed conveyor belt that matches them. The rotation drive mechanism is connected to one of the second gears.

6. The measuring device for cylindrical targets according to claim 5, characterized in that: The clamping mechanism includes a movable retaining ring provided on a first side surface of the first gear, and a movable pressing portion provided on a second side surface opposite to the first gear, wherein the first side surface is a side opposite to the target head, the retaining ring is used to fix the outer periphery of the target head, and the pressing portion is used to press the outer periphery of the end of the magnetic core extending from the target head and provided in the hollow cylindrical target to restrict its relative rotation.

7. The measuring device for cylindrical targets according to claim 3 or 4, characterized in that: The supporting mechanism includes two pairs of rotating wheels, and the two pairs of rotating wheels are configured to provide rotatable support to the cylindrical target from below the target head end side and the target tail end side of the cylindrical target respectively.

8. The measuring device for cylindrical targets according to claim 3, characterized in that: The distance measuring unit includes a distance meter for detecting the straightness of the cylindrical target; the magnetic field strength detection unit includes a Tesla meter for detecting the magnetic field strength of the cylindrical target, and the Tesla meter and the distance meter are on the same horizontal reference line.

9. The measuring device for cylindrical targets according to claim 3, characterized in that: Also includes: a base, for arranging the supporting mechanism, the first driving module, and the second driving module thereon; The limiter is arranged on the base and is used to axially limit the tail end of the cylindrical target.

Images