Actuator

Abstract

An actuator includes an actuating part, a piezoelectric unit, a conduction unit and an adjusting part. The actuating part includes a first actuating area, a second actuating area and at least one connecting section located between the two actuating areas. The piezoelectric unit includes a first signal area and a second signal area. The first signal area and the second signal area are arranged between the same plane and have an isolation part. The piezoelectric unit is arranged at a corresponding position of the first actuating area of the actuating part. The conduction unit includes a first electrode and a second electrode. The first signal area of the piezoelectric unit is electrically connected to the first electrode of the conduction unit, and the second signal area of the piezoelectric unit is electrically connected to the second electrode of the conduction unit. The adjusting part, the piezoelectric unit and the conduction unit are all located on the same side surface of the actuating part.

Description

Technical Field

[0001] The present invention relates to an actuator, and particularly to an actuator whose overall composition structure has a consistent flatness through the design of an adjusting part. Background Art

[0002] A piezoelectric pump is a new type of fluid driver. It does not require an additional driving motor. Only through the inverse piezoelectric effect of the electro-ceramic can the piezoelectric vibrator generate deformation, and then the volume change of the pump chamber is generated based on the aforementioned deformation to achieve fluid output, or the fluid is transmitted through the fluctuation generated by the piezoelectric vibrator. Therefore, piezoelectric pumps have gradually replaced traditional pumps and are widely used in industries such as electronics, biomedicine, aerospace, automotive, and petrochemical industries.

[0003] Generally speaking, a piezoelectric pump is composed of a piezoelectric unit and a pump body. When an electric current is applied to the piezoelectric unit, the piezoelectric unit will be radially compressed under the action of an electric field and generate tensile stress inside it and bend and deform. When the piezoelectric unit bends forward, the volume of the chamber of the pump body (hereinafter referred to as the pump chamber) will increase, causing the pressure inside the pump chamber to decrease, so that the fluid flows into the pump chamber from the inlet. On the other hand, when the piezoelectric unit bends backward, the volume of the pump chamber decreases, causing the pressure inside the pump chamber to increase, so that the fluid inside the pump chamber is squeezed out from the outlet. Currently, the signal conduction layer used to supply power to the piezoelectric unit is usually a three-dimensional structure and is externally added to the pump body. The overall volume is large and it is relatively easy to be damaged. When using the process of separately welding positive and negative electrodes, the inconsistency of the solder joint reliability often affects the quality and performance of the piezoelectric pump. In addition, the solder joint protrusions located outside the pump body are easy to contact with foreign objects, resulting in abnormal pump body functions and abnormal noises. Summary of the Invention

[0004] The main purpose of the present invention is to overcome the defects of the prior art and propose an actuator. Specifically, an adjusting part is provided between the bearing part, the piezoelectric unit and the conduction unit. Through the planar electrical connection inside the pump body, the overall appearance structure of the actuator has a high flatness, which not only overcomes the problem of reduced reliability of the previous welding process, but also achieves the purpose of flatness on the surface of the actuator appearance and miniaturization of the volume through the internal planar electrical connection technology.

[0005] The purpose of the present invention and the solution to its technical problems are achieved by adopting the following technical solutions.

[0006] An actuator of the present invention includes an actuating part, a piezoelectric unit, a conducting unit, and an adjusting part. The actuating part has a first actuating area, a second actuating area, and at least one connecting section located between the first actuating area and the second actuating area. The piezoelectric unit has a first channel, and the piezoelectric unit has a first signal area and a second signal area. The first signal area and the second signal area are arranged between the same planes, and an isolation part is arranged between the first signal area and the second signal area. The piezoelectric unit is contactingly arranged below the first actuating area of the actuating part. The central part of the conducting unit has a second channel corresponding to and communicating with the first channel, and the conducting unit includes a first electrode and a second electrode. The first signal area of the piezoelectric unit is electrically connected to the first electrode of the conducting unit, and the second signal area of the piezoelectric unit is electrically connected to the second electrode of the conducting unit. A perforated sheet is passed through the second channel and the first channel and is arranged at a position corresponding to the first actuating area of the actuating part; the adjusting part is arranged between the piezoelectric unit and the conducting unit, and by controlling the thickness of the adjusting part, the overall structure of the actuator has excellent flatness.

[0007] The object of the present invention and the technical problems to be solved can be further realized by the following technical measures.

[0008] In an embodiment of the present invention, the above actuator further includes a carrying part. The carrying part and the piezoelectric unit are in the same plane, and both the carrying part and the piezoelectric unit are located on the same side direction of the actuating part. The carrying part is arranged at a position corresponding to the second actuating area of the actuating part.

[0009] In a first embodiment of the present invention, the above conducting unit further includes an insulating layer, a conducting part, and a base material. The conducting unit is stacked and composed of the insulating layer, the conducting part, and the base material.

[0010] In a first embodiment of the present invention, the above adjusting part has conductive characteristics.

[0011] In a first embodiment of the present invention, the above piezoelectric unit, conducting unit, adjusting part, and carrying part are all located on the same side direction of the actuating part.

[0012] In a first embodiment of the present invention, the above first electrode and second electrode are in the same plane.

[0013] Based on the above technical solutions, the present invention has obvious advantages and beneficial effects compared with the prior art. According to the actuator proposed by the present invention, it can achieve considerable technical progressiveness and practicality, and has wide application value in the industry. It has at least the following advantages: The actuator of the present invention uniformly arranges the piezoelectric unit, the conducting unit, and the adjusting part on the same side direction of the actuating part, reducing the overall structure height of the actuator. Cooperating with the adjusting part to control the flatness of the structural components of the actuator, and further making the base material have a flat surface, improving and stabilizing the working efficiency of the actuator.

[0014] The above description is only an overview of the technical solution of the present invention. In order to better understand the technical means of the present invention, it can be implemented according to the content of the specification. And in order to make the above features and advantages of the present invention more obvious and understandable, specific embodiments are given below and are described in detail in conjunction with the accompanying drawings as follows. Description of the Drawings

[0015] Figure 1 FIG. is a schematic diagram of an actuator according to a first embodiment of the present invention.

[0016] Figure 2 is Figure 1 exploded schematic diagram of the actuator.

[0017] Figure 3 is Figure 1 another perspective exploded schematic diagram of the actuator.

[0018] Figure 4 is Figure 1 A-A line sectional schematic diagram of the actuator.

[0019] Figure 5 is Figure 4 a partially enlarged schematic diagram.

[0020] Figure 6 exploded schematic diagram of an actuator according to a second embodiment of the present invention.

[0021] Figure 7 is Figure 6 another perspective exploded schematic diagram.

[0022] Figure 8 is Figure 6 sectional schematic diagram of the actuator.

[0023] Figure 9 exploded schematic diagram of an actuator according to a third embodiment of the present invention.

[0024] Figure 10 is Figure 9 another perspective exploded schematic diagram.

[0025] Figure 11 is Figure 9 sectional schematic diagram of the actuator.

[0026] Figure 12 sectional schematic diagram of an actuator according to a fourth embodiment of the present invention.

[0027]

Reference Signs

[0028] 100, 100a, 100b, 100c: Actuator 140: Conductive unit

[0029] 110: Actuating part 141: First electrode

[0030] 112: First actuating area 141a: First conduction area

[0031] 114: Second actuating area 142: Second channel

[0032] 116: Connecting section 143: Second electrode

[0033] 120: Carrying part 143b: Second conduction area

[0034] 130: Piezoelectric unit 144: Insulating layer

[0035] 131: First channel 145: Conduction part

[0036] 132: First surface 146: Substrate

[0037] 133: Isolating part 146a: Flat surface

[0038] 134: First signal area 150: Adjusting part

[0039] 136: Second surface 160: Perforated sheet

[0040] 138: Second signal area Detailed implementation manner

[0041] To further elaborate on the technical means and effects adopted by the present invention to achieve the intended invention purpose, the following, in combination with the accompanying drawings and preferred embodiments, details the specific implementation manner, structure, method, steps, features and their effects of the actuator proposed according to the present invention as follows.

[0042] The foregoing and other technical contents, features and effects of the present invention will be clearly presented in the following detailed description of the preferred embodiments with reference to the drawings. Through the description of the specific implementation manner, a more in-depth and specific understanding of the technical means and effects adopted by the present invention to achieve the intended purpose can be obtained. However, the accompanying drawings are only for reference and illustration, and are not used to limit the present invention.

[0043] Figure 1 It is a schematic diagram of an actuator according to the first embodiment of the present invention. Figure 2 It is Figure 1 An exploded schematic diagram of the actuator. Figure 3 It is Figure 1 Another perspective exploded schematic diagram of the actuator. Figure 4 It is Figure 1 A sectional view taken along line A-A of the actuator. Figure 5 It is Figure 4A partial enlarged schematic diagram. Please refer to Figures 1 to 5 , the actuator 100 of this embodiment includes an actuating part 110, a piezoelectric unit 130, a bearing part 120, an adjusting part 150 and a conducting unit 140. The actuator 100 will be described in detail below.

[0044] Please refer to Figures 2 to 4 , in this embodiment, the piezoelectric unit 130 is disposed at a corresponding position of the first actuating area 112 of the actuating part 110. The piezoelectric unit 130 has a mutually corresponding first surface 132 and a second surface 136 (please refer to Figure 3 ), and at the same time, a first signal area 134 and a second signal area 138 are both disposed on the second surface 136, that is, both the first signal area 134 and the second signal area 138 are located between the same plane of the second surface 136. The first signal area 134 and the second signal area 138 are electrically isolated by an isolation part 133, wherein the conducting area of the second signal area 138 extends to the first surface 132 (please refer to Figure 2 ). The shapes formed by the first signal area 134 and the second signal area 138 are not limited by this embodiment.

[0045] Please refer to Figure 2 and Figure 3 , in this embodiment, the conducting unit 140 includes a first electrode 141 and a second electrode 143. The first electrode 141 and the second electrode 143 are both located in the same plane and are electrically insulated from each other. The first signal area 134 of the piezoelectric unit 130 is electrically connected to the first electrode 141 of the conducting unit 140, and the second signal area 138 of the piezoelectric unit 130 is electrically connected to the second electrode 143 of the conducting unit 140.

[0046] Please refer to Figure 2 and Figure 3 , in this embodiment, the actuator 100 includes a bearing part 120. The bearing part 120 and the piezoelectric unit 130 are located in the same plane. The bearing part 120, the piezoelectric unit 130 and the conducting unit 140 are all located on the same side direction of the actuating part 110. The bearing part 120 is disposed on the corresponding position surface of the second actuating area 114 of the actuating part 110.

[0047] Please refer to Figure 4, in this embodiment, the actuator 100 includes an adjustment part 150. The adjustment part 150, the piezoelectric unit 130, and the conduction unit 140 are all located on the same side of the actuator part 110. The adjustment part 150 is made of a material with conductive properties, such as conductors, colloids, powder particles, elastomers, anisotropic conductive materials, etc. By controlling the thickness of the adjustment part 150, the overall structure of the actuator 100 has excellent flatness. The appearance shape presented by the adjustment part 150 is set according to the space formed by the piezoelectric unit 130, the bearing part 120, and the conduction unit 140. The appearance shape of the adjustment part 150 is not limited to this embodiment.

[0048] Please refer to Figure 4 , in this embodiment, the conduction unit 140 further includes an insulating layer 144, a conduction part 145, and a substrate 146. The conduction part 145 includes a first electrode 141 and a second electrode 143. In this embodiment, the first electrode 141 and the second electrode 143 are both located on the same plane, but this is not a limitation. By adjusting the thickness of the adjustment part 150, the overall thickness and flatness of the conduction unit 140 are made consistent. The thickness of the insulating layer 144 is less than or equal to (≦) 1 millimeter (mm). The substrate 146 has a flat surface 146a through the adjustment of the thickness of the adjustment part 150.

[0049] Please refer to Figure 5 , for Figure 4 a partial enlarged schematic view of the circled area in the shape of a circle. In this embodiment, the conduction unit 140 is composed of an insulating layer 144, a conduction part 145, and a substrate 146. The flatness of each component of the actuator 100 is adjusted by the adjustment part 150 to make the overall structure flatness of the actuator 100 consistent. And the conduction part 145 and the bearing part 120 are isolated and insulated from each other through the insulating layer 144. The substrate 146 is located at the bottom surface of the conduction unit 140, and a flat surface 146a is formed through the adjustment part 150, so that the combined conduction unit 140 is flatly combined with the components of the actuator 100.

[0050] Please refer to Figure 2 and Figure 3, in this embodiment, the conduction unit 140 is arranged at the bottom layer. When the conduction unit 140 is powered on, the electrical signals are respectively conducted and input to the first electrode 141 and the second electrode 143. The first electrode 141 is connected to the first conduction area 141a, and the second electrode 143 is connected to the second conduction area 143b. According to the concept of the present invention, regardless of how the components such as the bearing part 120, the piezoelectric unit 130, the adjustment part 150, and the conduction unit 140 are arranged in order, as long as the first signal area 134 of the piezoelectric unit 130 can be electrically linked to the first electrode 141 of the conduction unit 140, and the second signal area 138 can be electrically linked to the second electrode 143, the structure is not limited to this embodiment. For example, the first electrode 141 forms the first conduction area 141a near the center of the conduction unit 140, and uses the first conduction area 141a as a medium to electrically link the first signal area 134 of the piezoelectric unit 130 to the first electrode 141 of the conduction unit 140; in this embodiment, the second electrode 143 forms the second conduction area 143b at the exact center of the conduction unit 140, and uses the second conduction area 143b as a medium to electrically link the second signal area 138 of the piezoelectric unit 130 to the second electrode 143 of the conduction unit 140. The appearance forms presented by the patterns of the two conduction areas can be arbitrarily changed, such as: long strip shape, circular arc shape, triangular shape, polygonal shape and other shapes. The set shapes and quantities of the first conduction area 141a and the second conduction area 143b are not limited to this embodiment. To sum up, in actual application, as long as the first signal area 134 can be electrically linked to the first electrode 141, and the second signal area 138 can be electrically linked to the second electrode 143, the set shapes and quantities of the first conduction area 141a and the second conduction area 143b of the present invention are not limited to this embodiment.

[0051] Next, other forms of the actuator 100a are introduced. The elements that are the same as or similar to those in the first embodiment are represented by the same or similar symbols, and will not be elaborated here. Only the main differences between different embodiments will be described below. Figure 6 is an exploded schematic view of an actuator according to the second embodiment of the present invention. Figure 7 is Figure 6 an exploded schematic view from another perspective. Figure 8 is Figure 6 a cross-sectional schematic view of the actuator. Please refer to Figure 4 and Figure 8 , the main difference between the actuator 100a in this embodiment and the actuator 100 in the previous embodiment is that the actuator 100a further includes a perforated sheet 160.

[0052] Please refer to Figures 6 to 8, in this embodiment, the perforated sheet 160 is disposed at the central position of the actuating portion 110 corresponding to the first actuating area 112. The difference between the piezoelectric unit 130 and the previous embodiment further includes a first channel 131. The perforated sheet 160 passes through the first channel 131. Therefore, the piezoelectric unit 130 is in the form of a hollow sheet body. In addition, the conduction unit 140 also includes a second channel 142 corresponding to the perforated sheet 160. After the perforated sheet 160 passes through the second channel 142, it is fixed to the first actuating area 112 of the actuating portion 110. When the actuator 100a is assembled, the perforated sheet 160 is sequentially passed through the second channel 142 and the first channel 131 and then fixed to the first actuating area 112 of the actuating portion 110. In this embodiment, the perforated sheet 160 can be made of materials such as metal, ceramic, plastic, etc. The type of material of the perforated sheet 160 is not limited thereto.

[0053] In addition, as Figure 6 to and Figure 7 shown, in this embodiment, the piezoelectric unit 130 is in the form of a hollow annular sheet body, so that the perforated sheet 160 is stably installed and positioned around the first channel 131 at the center of the piezoelectric unit 130. However, the appearance shapes and the number of configurations of the piezoelectric unit 130 and the perforated sheet 160 are not limited thereto, and the corresponding configuration relationship between the piezoelectric unit 130 and the perforated sheet 160 is not limited thereto. The number of configurations and the appearance shape of the second channel 142 of the conduction unit 140 can be arbitrarily changed in synchronization with the number of configurations and the appearance shape of the perforated sheet 160, and are not limited to this embodiment.

[0054] Please refer to Figure 8 , in this embodiment, the bottom surface of the perforated sheet 160 is flush with the flat surface 146a of the base material 146. According to the design concept of the present invention, whether the bottom surface of the perforated sheet 160 is flush with or protrudes from the flat surface 146a of the base material 146 does not affect the implementation of the adjustment portion 150 for adjusting the flatness of the flat surface 146a of the base material 146. Therefore, whether the bottom surface of the perforated sheet 160 is flush with or protrudes from the flat surface 146a of the base material 146 varies in accordance with the overall design of the actuator and is not limited to this embodiment.

[0055] According to the design concept of the present invention, no matter how the components such as the actuating portion 110, the piezoelectric unit 130, the bearing portion 120, the adjusting portion 150, the conduction unit 140, and the perforated sheet 160 are configured to change, the first signal area 134 can be electrically connected to the first electrode 141, and the second signal area 138 can be electrically connected to the second electrode 143. At the same time, whether the piezoelectric unit 130 is a solid sheet body or a hollow sheet body structure does not affect the electrical conduction of the first signal area 134 and the second signal area 138 of the piezoelectric unit 130.

[0056] Other forms of actuator 100b will be introduced below. Elements that are the same as or similar to those in the first embodiment are denoted by the same or similar symbols, and will not be elaborated further. Only the main differences between different embodiments will be described below. Figure 9 is an exploded schematic view of an actuator according to the third embodiment of the present invention. Figure 10 is Figure 9 an exploded schematic view from another perspective. Figure 11 is Figure 9 a cross-sectional schematic view of the actuator. Please refer jointly to Figure 4 and Figure 11 In this embodiment, the main difference between the actuator 100b and the actuator 100 of the previous embodiment is that the conduction unit 140 is disposed between the actuation unit 110 and the piezoelectric unit 130.

[0057] Please refer to Figure 10 The conduction unit 140 includes a first electrode 141 and a second electrode 143. The first electrode 141 and the second electrode 143 are both located in the same plane and are electrically insulated from each other. Please refer to Figure 9 In this embodiment, the piezoelectric unit 130 is a solid sheet structure. The first signal region 134 and the second signal region 138 of the piezoelectric unit 130 are also located in the same plane, and are electrically isolated by the isolation portion 133 between the first signal region 134 and the second signal region 138. The first signal region 134 of the piezoelectric unit 130 is electrically connected to the first electrode 141 of the conduction unit 140, and the second signal region 138 is electrically connected to the second electrode 143 of the conduction unit 140.

[0058] Please refer jointly to Figure 4 and Figure 11 In this embodiment, the stacking direction of the insulating layer 144, the conduction portion 145, and the substrate 146 of the conduction unit 140 is opposite to that of the first embodiment. In this embodiment, the conduction unit 140 is stacked in sequence from top to bottom with the substrate 146, the conduction portion 145, and the insulating layer 144. Please refer to Figure 9 and Figure 10 In this embodiment, the setting directions of the first signal region 134 and the second signal region 138 of the piezoelectric unit 130 are also opposite to those of the first embodiment. In this embodiment, both the first signal region 134 and the second signal region 138 are located in the same plane between the first surfaces 132, and are electrically isolated by the isolation portion 133. The conduction region of the second signal region 138 extends to the second surface 136. According to the design concept of the present invention, even if the positions of the piezoelectric unit 130 and the conduction unit 140 are interchanged, it does not affect the implementation of the adjustment of the flatness of the overall structure of the actuator by the adjustment unit 150, and the first signal region 134 of the piezoelectric unit 130 can still be electrically connected to the first electrode 141 of the conduction unit 140, and the second signal region 138 can be electrically connected to the second electrode 143 of the conduction unit 140.

[0059] Other forms of actuator 100c will be introduced below. Elements that are the same as or similar to those in the third embodiment are denoted by the same or similar symbols, and will not be elaborated further. Only the main differences between different embodiments will be described below. Figure 12 It is a cross-sectional schematic view of an actuator according to the fourth embodiment of the present invention. Please refer jointly to Figure 11 and Figure 12 , the main difference between the actuator 100c of this embodiment and the actuator 100b of the third embodiment is that the actuator 100c further includes a perforated sheet 160, and the piezoelectric unit 130 is a hollow sheet structure.

[0060] Please refer to Figure 12 , the conduction unit 140 is disposed between the actuating portion 110 and the piezoelectric unit 130. The perforated sheet 160 is disposed at the central position of the actuating portion 110 corresponding to the first actuating area 112. The piezoelectric unit 130 is correspondingly provided with a first channel 131. The conduction unit 140 is also provided with a second channel 142. The adjusting portion 150 is formed in the space formed by the piezoelectric unit 130, the bearing portion 120, and the conduction unit 140 in cooperation with the change in the configuration position of the perforated sheet 160. When the actuator 100c is assembled, the perforated sheet 160 is sequentially passed through the second channel 142 and the first channel 131, and then fixed to the first actuating area 112 of the actuating portion 110.

[0061] In addition, in this embodiment, the bottom surface of the perforated sheet 160 protrudes from the flat surface 146a of the base material 146. According to the design concept of the present invention, whether the bottom surface of the perforated sheet 160 is flush with or protrudes from the flat surface 146a of the base material 146 does not affect the implementation of the adjusting portion 150 for adjusting the flatness of the flat surface 146a of the base material 146. Therefore, even if the bottom surface of the perforated sheet 160 protrudes from the flat surface 146a of the base material 146, the flatness of the actuator can still be adjusted, and the first signal area 134 of the piezoelectric unit 130 is electrically connected to the first electrode 141 of the conduction unit 140, and the second signal area 138 is electrically connected to the second electrode 143 of the conduction unit 140.

[0062] According to the design concept of the present invention, no matter how the positions of the elements such as the actuating portion 110, the piezoelectric unit 130, the bearing portion 120, the adjusting portion 150, the conduction unit 140, and the perforated sheet 160 are changed and adjusted, the first signal area 134 can be electrically connected to the first electrode 141, and the second signal area 138 can be electrically connected to the second electrode 143. At the same time, no matter whether the piezoelectric unit 130 is a solid sheet or a hollow sheet structure, it does not affect the electrical conduction of the first signal area 134 and the second signal area 138 of the piezoelectric unit 130.

[0063] In summary, the actuator of the present invention is designed by arranging the piezoelectric unit 130, the bearing part 120, the adjusting part 160, the conduction unit 140 and the perforated sheet 150 on the same side direction of the actuating part 110. By cooperating with the adjusting part 160 to control the flatness of the overall composition structure of the actuator, and making the base material 146 of the conduction unit 140 have a flat surface. Compared with the known multi-layer actuator composition structure, the actuator of this embodiment not only has a thinner overall thickness and a miniaturized structure, but also has the characteristic of high flatness of the overall structure of the actuator, which can effectively increase the driving efficiency of the actuator.

[0064] Within the technical field of the present invention, as long as one has the most basic knowledge, other operable embodiments of the present invention can be improved. In the present invention, a patent protection request is made for the substantial technical solution, and its protection scope should include all change modes with the above technical characteristics.

[0065] The above is only a preferred embodiment of the present invention, and does not impose any form of limitation on the present invention. Although the present invention has been disclosed above with a preferred embodiment, it is not intended to limit the present invention. Any person skilled in the art can make some changes or modifications to equivalent embodiments by using the above-disclosed technical content within the scope of the technical solution of the present invention. However, as long as it does not depart from the content of the technical solution of the present invention, any simple modification, equivalent change and modification made to the above embodiments based on the technical essence of the present invention still fall within the scope of the technical solution of the present invention.

Claims

1. An actuator, characterized in that, Comprising: An actuating part having a first actuating area, a second actuating area, and at least one connecting section located between the first actuating area and the second actuating area; A piezoelectric unit having a first channel, and the piezoelectric unit having a first signal area and a second signal area, the first signal area and the second signal area being disposed between the same plane, and a separating part being disposed between the first signal area and the second signal area, the piezoelectric unit being disposed in contact below the first actuating area of the actuating part; A conduction unit having a second channel corresponding to and communicating with the first channel at its central part, and the conduction unit including a first electrode and a second electrode, the first signal area of the piezoelectric unit being electrically connected to the first electrode of the conduction unit, and the second signal area of the piezoelectric unit being electrically connected to the second electrode of the conduction unit; A perforated sheet is inserted through the second channel and the first channel and is disposed at a position corresponding to the first actuating area of the actuating part; and An adjusting part is disposed between the piezoelectric unit and the conduction unit, and by controlling the thickness of the adjusting part, the overall structure of the actuator has excellent flatness.

2. The actuator according to claim 1, characterized in that, Further comprising: A bearing part, the bearing part and the piezoelectric unit being in the same plane, and both the piezoelectric unit and the bearing part being on the same side direction of the actuating part, the bearing part being disposed at a position corresponding to the second actuating area of the actuating part.

3. The actuator according to claim 1, wherein The conduction unit further includes: An insulating layer, a conduction part, and a substrate, and the conduction unit is stacked and composed of the insulating layer, the conduction part, and the substrate.

4. The actuator according to claim 1, characterized in that, The adjusting part has electrical conductivity.

5. The actuator according to claim 2, wherein The piezoelectric unit, the conduction unit, the adjusting part, and the bearing part are all on the same side direction of the actuating part.

6. The actuator according to claim 1, characterized in that, The first electrode and the second electrode are in the same plane.

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