A device for picking up breathable material in a wafer box

Abstract

The present invention relates to a device for picking up air-permeable materials in a wafer box, the device comprising a Bernoulli disk (1), a guide disk (2) and an air pipe joint (3), wherein the guide disk (2) is fixed in the middle area of ​​the lower surface of the Bernoulli disk (1) and forms an air circulation gap with the Bernoulli disk (1), the air circulation gap is connected to an air source through the air pipe joint (3), and the guide disk (2) is used to conduct and disperse the airflow input into the air circulation gap to the peripheral side of the Bernoulli disk (1). Compared with the prior art, the present invention realizes the automatic picking up of air-permeable materials without manual participation, greatly improves production efficiency, and reduces labor costs.

Description

Technical Field

[0001] The invention relates to the technical field of semiconductor wafer automatic packaging, and in particular to a device for picking up air-permeable materials in a wafer box. Background Art

[0002] Chip manufacturers generally use wafer boxes to transport and store wafers. Usually, a wafer box stores 20 to 30 wafers in layers, and adjacent wafers are separated by isolation paper and sponge.

[0003] In order to separate the wafer from the wafer box, the wafer, isolation paper and sponge need to be picked up one by one. The wafer can be picked up by a vacuum robot. However, the isolation paper and sponge are breathable materials. The vacuum robot effectively separates the isolation paper and sponge. Most of the existing technologies use manual separation methods, which are inefficient and have high labor costs. Therefore, it is urgent to design a device for automatically picking up breathable materials in a wafer box. Summary of the invention

[0004] The purpose of the present invention is to provide a device for picking up breathable materials in a wafer box in order to overcome the defects of the above-mentioned prior art.

[0005] The purpose of the present invention can be achieved by the following technical solutions:

[0006] A device for picking up breathable materials in a wafer box, the device comprising a Bernoulli disk, a guide disk and an air pipe joint, the guide disk being fixed in the middle area of ​​the lower surface of the Bernoulli disk and forming an air circulation gap with the Bernoulli disk, the air circulation gap being connected to an air source through the air pipe joint, and the guide disk being used to conduct and disperse the airflow input into the air circulation gap toward the periphery of the Bernoulli disk.

[0007] Preferably, the outer contours of the Bernoulli disk and the guide disk are both circular.

[0008] Preferably, the centers of the Bernoulli disk and the guide disk are aligned, and the diameter of the guide disk is 1 / 2 to 2 / 3 of the diameter of the Bernoulli disk.

[0009] Preferably, the upper surface of the guide plate is arranged opposite to the Bernoulli plate, and the upper surface of the guide plate is in the shape of an annular step, thereby forming an annular stepped air circulation gap, and the height of the air circulation gap changes as follows: from the center position of the guide plate to the edge position of the guide plate, the height of the air circulation gap changes from small to large.

[0010] Preferably, the air pipe connector is fixed on the upper surface of the Bernoulli disk, and the air pipe connector passes through the Bernoulli disk to communicate with the air circulation gap.

[0011] Preferably, a plurality of guide grooves are radially arranged on the lower surface of the Bernoulli disk.

[0012] Preferably, the guide grooves are evenly distributed.

[0013] Preferably, the guide groove starts at the edge of the guide disk and ends at the edge of the Bernoulli disk.

[0014] Preferably, the device further comprises a distance measuring sensor for detecting the distance to the air-permeable material to be picked up, the sensor being mounted at the edge of the Bernoulli disk, and the Bernoulli disk being provided with a sensor mounting hole for mounting the distance measuring sensor.

[0015] Preferably, the distance measuring sensor comprises an infrared distance measuring sensor.

[0016] Compared with the prior art, the present invention has the following advantages:

[0017] (1) The present invention is designed with a Bernoulli disk and a guide disk. By passing air to the lower surface of the Bernoulli disk, based on the Bernoulli principle, since the air flow rate between the Bernoulli disk and the breathable material to be picked up is large, and the pressure is reduced, the atmospheric pressure below the breathable material to be picked up pushes the breathable material to the Bernoulli disk, thereby realizing automatic picking of the breathable material without manual participation, greatly improving production efficiency and reducing labor costs;

[0018] (2) The present invention adopts an annular stepped design on the upper surface of the guide plate, so that the height of the air circulation gap increases from the center position of the guide plate to the edge position of the guide plate, providing a uniform and rapid flow of air to the circumference, making the pressure in the area below the Bernoulli disk tend to be uniform, thereby improving the adsorption effect;

[0019] (3) The present invention provides a guide groove, which further improves the uniformity of air flow and improves the adsorption effect;

[0020] (4) The present invention is provided with a distance measuring sensor. When the Bernoulli disk approaches the breathable material to be picked up, the air pipe joint is controlled to open and input air into the air circulation gap, thereby ensuring the accuracy of the adsorption position and saving resources at the same time. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] Figure 1 It is an assembly explosion diagram of a device for picking up air-permeable materials in a wafer box according to the present invention;

[0022] In the figure, 1 is a Bernoulli disk, 2 is a guide disk, 3 is an air pipe joint, 4 is a guide groove, and 5 is a sensor mounting hole. DETAILED DESCRIPTION

[0023] The present invention is described in detail below in conjunction with the accompanying drawings and specific embodiments. Note that the following embodiments are merely illustrative in nature, and the present invention is not intended to limit its applicable objects or uses, and the present invention is not limited to the following embodiments.

[0024] Example

[0025] like Figure 1 As shown, a device for picking up breathable materials in a wafer box includes a Bernoulli disk 1, a guide disk 2 and an air pipe connector 3. The guide disk 2 is fixed in the middle area of ​​the lower surface of the Bernoulli disk 1 and forms an air circulation gap with the Bernoulli disk 1. The air circulation gap is connected to an air source through the air pipe connector 3. The guide disk 2 is used to conduct and disperse the airflow input into the air circulation gap toward the side of the Bernoulli disk 1.

[0026] The Bernoulli disk 1 and the guide disk 2 are designed. Air is passed through the lower surface of the Bernoulli disk 1. Based on the Bernoulli principle, since the air flow rate between the Bernoulli disk 1 and the breathable material to be picked up is large and the pressure is reduced, the atmospheric pressure below the breathable material to be picked up pushes the breathable material toward the Bernoulli disk 1, thereby realizing the automatic picking of the breathable material without human intervention, greatly improving production efficiency and reducing labor costs.

[0027] The outer contours of the Bernoulli disk 1 and the guide disk 2 are both circular, the centers of the Bernoulli disk 1 and the guide disk 2 are aligned, and the diameter of the guide disk 2 is 1 / 2 to 2 / 3 of the diameter of the Bernoulli disk 1. In this embodiment, the diameter of the guide disk 2 is designed to be 1 / 2 of the diameter of the Bernoulli disk 1.

[0028] The upper surface of the guide plate 2 is arranged opposite to the Bernoulli plate 1, and the upper surface of the guide plate 2 is annular stepped, thereby forming an annular stepped air circulation gap, and the height of the air circulation gap changes as follows: from the center position of the guide plate 2 to the edge position of the guide plate 2, the height of the air circulation gap changes from small to large. The air pipe joint 3 is fixed on the upper surface of the Bernoulli plate 1, and the air pipe joint 3 passes through the Bernoulli plate 1 to communicate with the air circulation gap. Through the annular stepped design of the upper surface of the guide plate 2, the height of the air circulation gap changes from small to large from the center position of the guide plate 2 to the edge position of the guide plate 2, providing uniform and rapid flow of air to the surrounding side, making the pressure in the area below the Bernoulli plate 1 tend to be uniform, and improving the adsorption effect.

[0029] A plurality of guide grooves 4 are radially arranged on the lower surface of the Bernoulli disk 1, and the guide grooves 4 are evenly distributed. In a preferred embodiment, the guide grooves 4 start at the edge of the guide disk 2 and end at the edge of the Bernoulli disk 1. By arranging the guide grooves 4, the uniformity of the airflow is further improved, and the adsorption effect is improved.

[0030] The device also includes a distance measuring sensor for detecting the distance from the air permeable material to be picked up, and the sensor is installed at the edge of the Bernoulli disk 1. The Bernoulli disk 1 is provided with a sensor mounting hole 5 for mounting the distance measuring sensor. The distance measuring sensor includes an infrared distance measuring sensor. When the distance measuring sensor detects that the Bernoulli disk 1 is close to the air permeable material to be picked up, the air pipe joint 3 is controlled to open and input air into the air circulation gap, thereby ensuring the accuracy of the adsorption position and saving resources at the same time.

[0031] The working principle of the device for picking up breathable materials in a wafer box of the present invention is as follows: the device extends into the wafer box from the top of the wafer box, and a distance sensor detects the distance between the Bernoulli disk 1 and the breathable material to be picked up. When the measured distance is less than a set value, the air pipe joint 3 is opened, and the air pipe joint 3 introduces gas into the lower surface of the Bernoulli disk 1 and flows in the air circulation gap. The gas flows along the air circulation gap to the edge of the guide disk 2, and finally enters the guide groove 4 and flows along the guide groove 4 to the edge of the Bernoulli disk 1. At this time, due to the large air flow rate between the Bernoulli disk 1 and the breathable material to be picked up, and then the pressure is reduced, the atmospheric pressure below the breathable material to be picked up pushes the breathable material toward the Bernoulli disk 1, and then the automatic picking of the breathable material is achieved through the Bernoulli disk 1.

[0032] The above embodiments are merely examples and do not limit the scope of the present invention. These embodiments can also be implemented in various other ways, and various omissions, substitutions, and changes can be made without departing from the technical concept of the present invention.

Claims

1. A device for picking up breathable materials in a wafer box, characterized in that: The device comprises a Bernoulli disk (1), a guide disk (2) and an air pipe joint (3); the guide disk (2) is fixed in the middle area of ​​the lower surface of the Bernoulli disk (1) and forms an air circulation gap with the Bernoulli disk (1); the air circulation gap is connected to an air source through the air pipe joint (3); the guide disk (2) is used to conduct and disperse the airflow input into the air circulation gap toward the peripheral side of the Bernoulli disk (1); The outer contours of the Bernoulli disk (1) and the guide disk (2) are both circular; The Bernoulli disk (1) and the guide disk (2) are centered, and the diameter of the guide disk (2) is 1 / 2 to 2 / 3 of the diameter of the Bernoulli disk (1); The upper surface of the guide plate (2) is arranged opposite to the Bernoulli plate (1), and the upper surface of the guide plate (2) is in an annular step shape, thereby forming an annular step-shaped air circulation gap, and the height of the air circulation gap changes in the following manner: from the center position of the guide plate (2) to the edge position of the guide plate (2), the height of the air circulation gap changes from small to large; A plurality of guide grooves (4) are radially arranged on the lower surface of the Bernoulli disk (1); The guide grooves (4) are evenly distributed; The guide groove (4) starts from the edge of the guide disk (2) and ends at the edge of the Bernoulli disk (1).

2. The device for picking up the air-permeable material in the wafer box according to claim 1, characterized in that: The air pipe joint (3) is fixed on the upper surface of the Bernoulli disk (1), and the air pipe joint (3) passes through the Bernoulli disk (1) and is connected to the air circulation gap.

3. The device for picking up the breathable material in the wafer box according to claim 1, characterized in that: The device also includes a distance measuring sensor for detecting the distance to the air permeable material to be picked up, the sensor being mounted at the edge of the Bernoulli disk (1), and a sensor mounting hole (5) for mounting the distance measuring sensor being provided on the Bernoulli disk (1).

4. The device for picking up the air-permeable material in the wafer box according to claim 3, characterized in that: The distance measuring sensor comprises an infrared distance measuring sensor.

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