A low-temperature plasma processing device capable of achieving online self-cleaning and a method of using the same

By setting the rotating shaft and a 360-degree circular discharge tube layer in the sealable box of the low-temperature plasma treatment device, combined with the arc-shaped conductive plate, the online self-cleaning and continuous work of the discharge tube are achieved, and the problems of low processing efficiency and short service life caused by coking are solved.

CN112807948BActive Publication Date: 2025-03-18SHANGHAI JUSA OPTOELECTRONICS TECH CO LTD
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Patent Information

Application Number
CN202110101762.0
Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
Filing Date
2021-01-26
Publication Date
2025-03-18
Estimated Expiration
2041-01-26

AI Technical Summary

Technical Problem

When the existing low-temperature plasma treatment device treats high-concentration organic waste gas, the discharge tube is prone to coking, affecting the discharge effect, and the existing online cleaning technology cannot achieve cleaning while discharge work, affecting continuous processing.

Method used

A low-temperature plasma treatment device with a closed box built-in rotating shaft is designed. The discharge tube layer is an annular with a uniform distribution of 360 degrees, and the conductive plate is arc-shaped. Through the rotation of the rotating shaft, some discharge tubes are realized in the working state and some are self-cleaned in the cleaning liquid.

Benefits of technology

The online self-cleaning of the low-temperature plasma processing device is realized to meet the needs of continuous work, and the discharge tube is cleaned in a timely manner. It has a simple structure, low manufacturing cost and small space.

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Abstract

The invention discloses a low-temperature plasma processing device capable of realizing online self-cleaning and a method for using the low-temperature plasma processing device. The low-temperature plasma processing device comprises a sealable box, a rotating shaft is penetrated in the transverse direction of the sealable box, a positive electrode fixing disc and a negative electrode fixing disc are rotatably connected on the rotating shaft, N layers of discharge tubes are penetrated between the positive electrode fixing disc and the negative electrode fixing disc, each layer of discharge tubes is formed by a plurality of similar discharge tubes uniformly distributed 360 degrees with the rotating shaft as the center, and the electrical properties of two adjacent layers of discharge tubes are opposite; conductive plate fixing seats are respectively sleeved on the rotating shafts located outside the positive electrode fixing disc and outside the negative electrode fixing disc, and each conductive plate fixing seat is respectively fixedly connected to the inner wall of the sealable box adjacent to it; an arc-shaped conductive plate is embedded on the inner side of each conductive plate fixing seat, and a plurality of conductive contacts capable of simultaneously conducting electricity with the arc-shaped conductive plate and the conductive end of the discharge tube are penetrated on the positive electrode fixing disc and the negative electrode fixing disc.
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Description

Technical Field

[0001] The present invention relates to a low-temperature plasma processing device capable of realizing online self-cleaning and a use method thereof, belonging to the technical field of low-temperature plasma equipment. Background Art

[0002] With the development of industrial economy, the volatile organic waste gas generated by industries such as petroleum, pharmaceuticals, paints, printing and coatings is also increasing. These waste gases will not only stay in the atmosphere for a long time, but also spread and drift to distant places, causing great harm to the environment and human health.

[0003] Low-temperature plasma is the fourth state of matter after solid, liquid and gas. It is a conductive fluid composed of electrons, ions, neutral particles and free radicals. It has been widely used in industrial waste gas treatment and flue gas dust removal and desulfurization. It has the advantages of low energy consumption, strong adaptability and fast processing speed. However, due to the presence of dust, aerosol, H2S and other components in industrial waste gas and the macromolecular polymers generated by low-temperature plasma during the discharge process, coking is easy to occur at the low-temperature plasma discharge site. Especially when treating high-concentration organic waste gas, the coking phenomenon on the discharge tube is more serious. If these cokes are not cleaned in time, the dielectric constant and discharge effect of the discharge tube will be affected, thereby reducing the efficiency of low-temperature plasma treatment of waste gas, increasing treatment energy consumption and shortening the service life. In order to reduce the above-mentioned effects of coke on the discharge tube, one of the current solutions is to remove the discharge tube and place it in an ultrasonic scrubber for cleaning. This method of cleaning coke is relatively time-consuming and labor-intensive. The key is that the discharge tube needs to be removed in a shutdown state, which affects normal production, and the frequent replacement and removal requires a huge workload.

[0004] In order to clean the coke on the discharge tube without disassembling the discharge tube, the Chinese utility model patent with application number CN201620139574.1 discloses an online cleaning device for the row-tube plasma discharge tube. The patent realizes online flushing of the row-tube plasma discharge tube without disassembling each discharge tube by installing and connecting the plasma discharge tube with the cleaning device; however, according to the introduction in paragraph 0027 of the patent specification, "When in use, the plasma discharge tube is installed and connected with the cleaning device, the main pipe flange is responsible for connecting with the rear water pipe, the main water pipe is responsible for diversion, and the water pipe is responsible for spraying. The water pressure in the main pipe is maintained at 3-5 kgf / m 2Generally, the water flow rate of each small hole on the water pipe is guaranteed to be about 3m / s. The faster the water flow rate of the small hole, the greater the impact force and the better the flushing effect. The flushing liquid can be selected according to the different project conditions, such as: 1%~5% alkali solution, 40℃~80℃ hot water, solution containing detergent, etc. "Those skilled in the art can easily infer that the online cleaning described in this patented technology does not mean cleaning while discharging. This patent cannot perform plasma discharge at the same time when cleaning the plasma discharge tube, so it cannot meet the working conditions of continuous processing at all; in addition, although the Chinese invention patent with application number CN201710409665.1 discloses a method for online decoking of a low-temperature plasma waste gas treatment device, it can be seen from the patent specification that the method needs to turn off the power supply of the low-temperature plasma discharge disk and turn off the power supply before ultrasonic cleaning. The exhaust gas inlet valve and the exhaust valve, obviously, when the patented technology is defocusing the plasma discharge tube, it is still impossible to perform plasma discharge work at the same time. The online defocusing only means that the defocusing process can be performed without disassembling the discharge tube, and it is still impossible to achieve the goal of cleaning while discharging. Although the low-temperature plasma processing device provided in the Chinese utility model patent with application number CN201921797243.7, by setting at least two parallel plasma boxes, when one of the plasma boxes is being cleaned, the other plasma boxes can work at the same time, which can meet the working conditions of continuous processing in a sense, the patented device has problems such as large size, high manufacturing cost, and limited use space. Summary of the invention

[0005] In view of the above problems existing in the prior art, the object of the present invention is to provide a low-temperature plasma processing device and a method for using the same which can realize online self-cleaning and can realize continuous operation and has a simple structure, low manufacturing cost, and small space occupation.

[0006] To achieve the above object, the present invention adopts the following technical solution:

[0007] A low-temperature plasma processing device capable of achieving online self-cleaning comprises a sealable box, a rotating shaft is provided in the transverse direction of the sealable box, a positive electrode fixed disc and a negative electrode fixed disc are rotatably connected on the rotating shaft located in the sealable box, N layers of discharge tubes are provided between the positive electrode fixed disc and the negative electrode fixed disc, wherein N is a natural number greater than or equal to 2, each layer of discharge tubes is formed by a plurality of discharge tubes of the same type being evenly distributed 360 degrees with the rotating shaft as the center, and the electrical properties of two adjacent layers of discharge tubes are opposite; in addition, conductive plate fixing seats are respectively sleeved on the rotating shafts located outside the positive electrode fixed disc and outside the negative electrode fixed disc, and each conductive plate fixing seat is respectively fixedly connected to the inner wall of the sealable box adjacent thereto; and an arc-shaped conductive plate is embedded on the inner side of each conductive plate fixing seat, and a plurality of conductive contacts capable of conducting electricity simultaneously with the conductive ends of the arc-shaped conductive plate and the discharge tube are provided on the positive electrode fixed disc and the negative electrode fixed disc.

[0008] In one embodiment, a sealing cover that can be opened and closed is provided on the top of the sealable box.

[0009] In one implementation scheme, an air inlet, an air outlet, a positive electrode line inlet and a negative electrode line inlet are provided on the sealable box, and a cleaning liquid discharge port is provided at the bottom of the sealable box.

[0010] In a preferred embodiment, one end of the discharge tube is a closed end, and the other end is an open end, and a conductive contact is provided through the open end to form a conductive end of the discharge tube.

[0011] In a preferred solution, a conductive terminal is provided on the outer side of each conductive plate fixing seat.

[0012] In a preferred embodiment, four connecting rods are symmetrically arranged between the positive electrode fixing disc and the negative electrode fixing disc.

[0013] In one embodiment, the low-temperature plasma processing device further includes two mounting brackets, each mounting bracket includes a vertical support portion, an upper fixing portion with a 90-degree bend is provided at the upper end of the vertical support portion, and a lower fixing portion with a 90-degree bend is provided at the lower end of the vertical support portion, each upper fixing portion is fixedly connected to an outer side of a sealable box, and a bearing seat is fixedly provided on each upper fixing portion, and the rotating shaft is rotatably connected to the bearing seats on both sides.

[0014] According to a further embodiment, the low-temperature plasma processing device further includes a mounting base plate, and the lower fixing parts of the two mounting brackets are respectively fixedly connected to two sides of the mounting base plate.

[0015] A method for using the above-mentioned low-temperature plasma processing device that can achieve online self-cleaning is to first add a cleaning liquid with a liquid level lower than the lowest end of the arc-shaped conductive plate into a sealed box, then connect the positive and negative power lines and open the exhaust gas inlet valve and outlet valve, and then start the external drive motor that drives the shaft to rotate.

[0016] In a preferred embodiment, the cleaning solution is a weakly alkaline cleaning solution.

[0017] Compared with the prior art, the present invention has the following beneficial technical effects:

[0018] The present invention arranges a rotatable annular discharge tube layer evenly distributed at 360 degrees in a sealed box, and makes the conductive plates at both ends into an open arc shape, so that in each layer of discharge tubes, there are always some discharge tubes that can be in conductive contact with the arc-shaped conductive plate for discharge work, and at the same time, there are some discharge tubes that cannot be in conductive contact with the arc-shaped conductive plate for discharge work, so that when a cleaning liquid with a liquid level lower than the lowermost end of the arc-shaped conductive plate is added into the sealed box, the discharge tubes located above the cleaning liquid can maintain normal discharge work because they can be in conductive contact with the arc-shaped conductive plate, while the discharge tubes located in the cleaning liquid cannot be in conductive contact with the arc-shaped conductive plate and are in a non-conductive cleaning state, thereby realizing that some discharge tubes are in work while some discharge tubes are immersed in the cleaning liquid for self-cleaning, and through the rotation of the rotating shaft, the cyclic alternation between the conductive working state and the non-conductive cleaning state of all discharge tubes can be realized;

[0019] Therefore, the present invention truly realizes the online self-cleaning of the low-temperature plasma processing device, which can not only meet the needs of continuous operation, but also realize the timely cleaning of the discharge tube. It also has the advantages of simple structure, low manufacturing cost, small space occupation, and convenient use. It has important significance and practical value in solving the problems of low processing efficiency, high energy consumption and short service life caused by coking materials, and is significantly progressive compared with the existing technology. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] Figure 1 A schematic front view of a low-temperature plasma processing device capable of online self-cleaning provided by an embodiment of the present invention;

[0021] Figure 2 A schematic diagram of the rear structure of a low-temperature plasma processing device capable of achieving online self-cleaning provided by an embodiment of the present invention;

[0022] Figure 3 for Figure 1 A cross-sectional view of

[0023] Figure 4 for Figure 1 The schematic diagram of the structure of the low-temperature plasma treatment device capable of online self-cleaning without the sealable box;

[0024] Figure 5 for Figure 4 A cross-sectional view of

[0025] Figure 6 for Figure 4 A schematic diagram of the structure after further removing the discharge tube and installing the bottom plate;

[0026] Figure 7 is a schematic diagram showing the outer structure of the positive electrode fixing disc / negative electrode fixing disc described in the embodiment;

[0027] Figure 8 is a schematic diagram showing the connection structure between the outer side of the positive electrode fixing disc / negative electrode fixing disc and the conductive plate in the embodiment;

[0028] Fig. 9 for Figure 8 A cross-sectional view of

[0029] Fig.10 is a schematic structural diagram of the conductive plate fixing seat described in the embodiment;

[0030] Fig.11 and Fig.12 is a cross-sectional view showing a low-temperature plasma processing device capable of achieving online self-cleaning provided by an embodiment in a working state;

[0031] The numbers in the figure are as follows: 1. Sealed box; 1-1. Openable and closable sealing cover; 1-2. Air inlet; 1-3. Positive electrode inlet; 1-4. Air outlet; 1-5. Negative electrode inlet; 1-6. Cleaning liquid discharge port; 2. Rotating shaft; 3. Positive electrode fixing disk; 4. Negative electrode fixing disk; 5. Discharge tube; 5a. Discharge tube located above the cleaning liquid; 5b. Discharge tube located in the cleaning liquid; 51. Closed end; 52. Open end; 6. Conductive plate fixing seat; 6-1. Conductive plate mounting groove; 7. Arc-shaped conductive plate; 8. Conductive contact; 9. Conductive terminal; 10. Connecting rod; 11. Mounting bracket; 11-1. Vertical support portion; 11-2. Upper fixing portion; 11-3. Lower fixing portion; 12. Bearing seat; 13. Mounting base plate; 14. Cleaning liquid. DETAILED DESCRIPTION

[0032] The technical solution of the present invention will be further described in detail and completely in conjunction with the accompanying drawings and embodiments. In the description of the present invention, it should be understood that the terms "front", "back", "left", "right", "up", "down", "top", "bottom", "inside", "outside" and other terms indicating directions or positions are based on Figure 1The orientation or positional relationship shown is only for the convenience of describing the present invention and simplifying the description, and does not indicate or imply that the device or component referred to must have a specific orientation, be constructed and operate in a specific orientation, and therefore cannot be understood as a limitation of the present invention. In addition, unless otherwise clearly specified and limited, the terms "connected" and "connected" should be understood in a broad sense, for example: it can be a fixed connection, a detachable connection, or an integral connection; it can be directly connected, or indirectly connected through an intermediate medium, or it can be the internal communication of two components. For those of ordinary skill in the art, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0033] Example

[0034] Please combine Figures 1 to 10 As shown: the present embodiment provides a low-temperature plasma treatment device capable of achieving online self-cleaning, comprising a sealable box 1, a rotating shaft 2 is provided in the transverse direction of the sealable box 1, a positive electrode fixing disc 3 and a negative electrode fixing disc 4 are rotatably connected on the rotating shaft 2 located in the sealable box 1, and N layers of discharge tubes 5 are provided between the positive electrode fixing disc 3 and the negative electrode fixing disc 4, wherein N is a natural number greater than or equal to 2, and each layer of discharge tubes is formed by a plurality of similar discharge tubes uniformly distributed 360 degrees around the rotating shaft as the center, and the electrical properties of the adjacent two layers of discharge tubes are opposite (in the present embodiment, N is taken as 3 as an example, wherein the outermost layer and the innermost layer are both positive electrode layers, and the middle layer is a negative electrode layer; however, the present invention is not limited to this design, and can be specifically designed according to the waste The number of layers is designed according to the demand for gas processing efficiency); in addition, conductive plate fixing seats 6 are respectively sleeved on the rotating shafts located on the outside of the positive fixed disk 3 and the outside of the negative fixed disk 4, and each conductive plate fixing seat 6 is fixedly connected to the inner wall of the adjacent airtight box 1; and an arc-shaped conductive plate 7 is embedded on the inner side of each conductive plate fixing seat 6 (specifically, in this embodiment, a conductive plate mounting groove 6-1 adapted to the arc-shaped conductive plate 7 is provided on the inner side of each conductive plate fixing seat 6, and the arc-shaped conductive plate 7 is fixed in the conductive plate mounting groove 6-1 by screws), and a plurality of conductive contacts 8 that can conduct electricity simultaneously with the arc-shaped conductive plate 7 and the conductive end of the discharge tube are penetrated on the positive fixed disk 3 and the negative fixed disk 4.

[0035] Please refer to Figure 1 and Figure 2 As shown: In this embodiment, an openable and closable sealing cover 1-1 is provided on the top of the sealable box 1, an air inlet 1-2 and a positive electrode inlet 1-3 are provided on the front side of the sealable box 1, an air outlet 1-4 and a negative electrode inlet 1-5 are provided on the rear side of the sealable box 1, and a cleaning liquid discharge port 1-6 is provided at the bottom of the sealable box 1.

[0036] Please refer to Figure 3 and Figure 5 As shown: In this embodiment, one end of the discharge tube 5 is a closed end 51, and the other end is an open end 52, and the conductive contact 8 is arranged through the open end 52 to form the conductive end of the discharge tube. In addition, the outer layer of the discharge tube 5 is sintered by an inorganic material, and the inorganic material is a quartz tube, ceramic or microcrystalline glass; the inner layer of the discharge tube 5 is made of a metal sheet, a metal wire, a metal powder or a conductive grease or a conductive oil.

[0037] Please refer to Figures 3 to 6 As shown: In this embodiment, a conductive terminal 9 is provided on the outer side of each conductive plate fixing seat 6 for electrical connection between an external power line and the conductive plate.

[0038] Please refer to Figure 6 As shown: In this embodiment, four connecting rods 10 are symmetrically arranged between the positive electrode fixing disc 3 and the negative electrode fixing disc 4 to ensure that the discharge tube 5 fixed between the positive electrode fixing disc 3 and the negative electrode fixing disc 4 can rotate stably and synchronously.

[0039] Please refer to Figures 1 to 6 As shown: In this embodiment, the low-temperature plasma processing device also includes two mounting brackets 11, each mounting bracket 11 includes a vertical support portion 11-1, the upper end of the vertical support portion 11-1 is provided with an upper fixed portion 11-2 bent at 90 degrees, and the lower end of the vertical support portion 11-1 is provided with a lower fixed portion 11-3 bent at 90 degrees, each upper fixed portion 11-2 is fixedly connected to an outer side of the sealable box 1, and a bearing seat 12 is fixedly provided on each upper fixed portion 11-2, and the rotating shaft 2 is rotatably connected to the bearing seats 12 on both sides; in addition, the low-temperature plasma processing device also includes a mounting base plate 13, and the lower fixed portions 11-3 of the two mounting brackets 11 are respectively fixedly connected to the two sides of the mounting base plate 13, and the mounting base plate 13 facilitates the fixed installation of the entire device at the place of use.

[0040] Please combine Fig.11 and Fig.12 As shown, the method of using the low-temperature plasma processing device capable of online self-cleaning described in this embodiment is as follows:

[0041] First, add a cleaning liquid 14 (preferably a weakly alkaline cleaning liquid, but it can also be other liquid cleaning liquids, such as water) whose liquid level is lower than the lower end of the arc-shaped conductive plate 7 into the sealable box 1, then connect the positive and negative power lines and open the exhaust gas inlet valve and outlet valve, and then start the external drive motor (not shown in the figure) that drives the shaft to rotate, so as to achieve self-cleaning of the discharge tube while treating the exhaust gas.

[0042] Since the low-temperature plasma treatment device of the present invention has a rotatable annular discharge tube layer evenly distributed at 360 degrees in the sealed box 1, and the conductive plates 7 at both ends are in an open arc shape, when a cleaning liquid 14 with a liquid level lower than the lowermost end of the arc-shaped conductive plate 7 is added into the sealed box 1, the discharge tube 5a located above the cleaning liquid can maintain normal discharge operation because it can be in conductive contact with the arc-shaped conductive plate 7, while the discharge tube 5b located in the cleaning liquid is in a non-conductive state because it cannot be in conductive contact with the arc-shaped conductive plate 7, thereby realizing self-cleaning by immersion in the cleaning liquid; the rotation of the rotating shaft 2 is driven by an external driving motor, so that the positive electrode fixed disk 3 and the negative electrode fixed disk 4 and the discharge tube 5 fixed therebetween can be driven to rotate, thereby realizing the cyclic alternation between the conductive working state and the non-conductive state of all the discharge tubes, which not only ensures the continuous operation of the low-temperature plasma treatment device, but also realizes the timely cleaning of the discharge tubes.

[0043] From the above, it can be seen that the present invention truly realizes the online self-cleaning of the low-temperature plasma processing device, which can not only meet the needs of continuous operation, but also realize the timely cleaning of the discharge tube, and also has the advantages of simple structure, low manufacturing cost, small space occupation, and convenient use. It has important significance and practical value in solving the problems of low processing efficiency, high energy consumption and short service life caused by coking materials, and is significantly progressive compared with the existing technology.

[0044] Finally, it is necessary to point out here that the above description is only a preferred specific implementation manner of the present invention, but the protection scope of the present invention is not limited thereto, and any changes or substitutions that can be easily thought of by any technician familiar with the technical field within the technical scope disclosed by the present invention should be covered within the protection scope of the present invention.

Claims

1. A low-temperature plasma processing device capable of achieving online self-cleaning, comprising a sealable box, characterized in that: A rotating shaft is provided in the transverse direction of the sealable box, and a positive electrode fixing disc and a negative electrode fixing disc are rotatably connected on the rotating shaft located in the sealable box. N layers of discharge tubes are provided between the positive electrode fixing disc and the negative electrode fixing disc, wherein N is a natural number greater than or equal to 2, and each layer of discharge tubes is formed by a plurality of discharge tubes of the same type being evenly distributed 360 degrees around the rotating shaft as the center, and the electrical properties of two adjacent layers of discharge tubes are opposite; in addition, conductive plate fixing seats are respectively sleeved on the rotating shafts located outside the positive electrode fixing disc and outside the negative electrode fixing disc, and each conductive plate fixing seat is provided ... The plate fixing seats are respectively fixedly connected to the inner walls of the adjacent airtight boxes; and an arc-shaped conductive plate is embedded on the inner side of each conductive plate fixing seat, and a plurality of conductive contacts capable of conducting electricity simultaneously with the arc-shaped conductive plate and the conductive end of the discharge tube are pierced on the positive electrode fixing disc and the negative electrode fixing disc; an air inlet, an air outlet, a positive electrode inlet and a negative electrode inlet are arranged on the airtight box, and a cleaning liquid discharge port is arranged at the bottom of the airtight box; when in use, a cleaning liquid having a liquid level lower than the lowest end of the arc-shaped conductive plate is first added into the airtight box.

2. The low-temperature plasma processing device capable of achieving online self-cleaning according to claim 1, characterized in that: The top of the airtight box is provided with an openable and closable sealing cover.

3. The low-temperature plasma processing device capable of achieving online self-cleaning according to claim 1, characterized in that: One end of the discharge tube is a closed end, and the other end is an open end. A conductive contact is arranged through the open end to form a conductive end of the discharge tube.

4. The low-temperature plasma processing device capable of achieving online self-cleaning according to claim 1, characterized in that: A conductive terminal is arranged on the outer side of each conductive plate fixing seat.

5. The low-temperature plasma processing device capable of achieving online self-cleaning according to claim 1, characterized in that: Four connecting rods are symmetrically arranged between the positive electrode fixing disc and the negative electrode fixing disc.

6. The low-temperature plasma processing device capable of achieving online self-cleaning according to claim 1, characterized in that: It also includes two mounting brackets, each mounting bracket includes a vertical support portion, an upper fixing portion with a 90-degree bend is provided at the upper end of the vertical support portion, and a lower fixing portion with a 90-degree bend is provided at the lower end of the vertical support portion, each upper fixing portion is fixedly connected to an outer side of the sealable box body, and a bearing seat is fixedly provided on each upper fixing portion, and the rotating shaft is rotatably connected to the bearing seats on both sides.

7. The low-temperature plasma processing device capable of achieving online self-cleaning according to claim 6, characterized in that: It also includes a mounting base plate, and the lower fixing parts of the two mounting brackets are respectively fixedly connected to the two sides of the mounting base plate.

8. A method for using the low-temperature plasma processing device capable of achieving online self-cleaning according to claim 1, characterized in that: First, add cleaning liquid whose liquid level is lower than the lowest end of the arc-shaped conductive plate into the sealable box, then connect the positive and negative power lines and open the exhaust gas inlet valve and outlet valve, and then start the external drive motor that drives the shaft to rotate.

9. The method of use according to claim 8, characterized in that: The cleaning solution is a weak alkaline cleaning solution.

Citation Information

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