Radiation detection element

Abstract

The present invention comprises: a substrate having a first surface and a second surface on the side opposite to the first surface; a first electrode penetrating the substrate and electrically connecting the first surface side with the second surface side, and being exposed on the first surface side; a second electrode adjacent to the first electrode in a first direction, penetrating the substrate and electrically connecting the first surface side with the second surface side, and being exposed on the first surface side; a third electrode adjacent to the first electrode in a second direction intersecting the first direction, penetrating the substrate and electrically connecting the first surface side with the second surface side, and being exposed on the first surface side; a fourth electrode adjacent to the third electrode in the first direction and adjacent to the second electrode in the second direction, penetrating the substrate and electrically connecting the first surface side with the second surface side, and being exposed on the first surface side; and a fifth electrode arranged on the first surface side, disposed between the first electrode and the second electrode, between the second electrode and the third electrode, between the third electrode and the fourth electrode, and between the fourth electrode and the first electrode, and disposed separately from each of the first electrode, the second electrode, the third electrode, and the fourth electrode.

Description

Technical Field

[0001] The present disclosure relates to a radiation detection element for detecting radiation using gas amplification using pixel-type electrodes. Background Art

[0002] Research on gas electron amplification type radiation detectors based on pixel-type electrodes is progressing. Gas electron amplification type radiation detectors have the following characteristics: they can perform large-area and real-time imaging in imaging of detection areas that were insufficient in conventional detector-based radiation detection.

[0003] Patent document 1 discloses a radiation detector using a pixel-type electrode as a detector using electron avalanche amplification in a gas. The radiation detector includes a pixel-type electrode disposed in a pressure vessel and a drift electrode opposed to the pixel-type electrode. In addition, the pressure vessel is filled with a gas corresponding to the radiation to be detected. The pixel-type electrode has a plurality of anode electrodes and a plurality of cathode electrodes arranged in two dimensions in the X direction and the Y direction.

[0004] When radiation collides with the gas, the electrons generated by the ionization of the gas are affected by the electric field between the drift electrode and the cathode electrode, move toward the pixel electrode, and multiply in an avalanche manner through the electric field between the anode electrode and the cathode electrode. As a result, the electron group collected by the anode electrode reaches a level that can be read out as an electrical signal.

[0005] Patent Document 1 discloses a radiation detector using gas amplification based on pixel-type electrodes. The radiation detector synchronizes the electrical signals obtained from a plurality of anode electrodes arranged along the X direction and a plurality of cathode electrodes arranged along the Y direction with a clock signal and converts them into time and position data. The trajectory of the radiation can be measured by using the time information and the position information in the X direction and the Y direction.

[0006] Prior Art Literature

[0007] Patent Literature

[0008] Patent Document 1: Japanese Patent No. 3354551 Summary of the invention

[0009] Problems to be solved by the invention

[0010] However, in conventional radiation detectors using pixel-type electrodes, when signals are detected simultaneously in separate locations, it is difficult to distinguish between these signals, which results in a problem of reduced position detection accuracy.

[0011] One of the objects of the present disclosure is to provide a radiation detection element with improved position detection accuracy.

[0012] Means for solving problems

[0013] A radiation detection element according to one embodiment of the present invention comprises: a substrate having a first surface and a second surface on a side opposite to the first surface; a first electrode penetrating the substrate and electrically connecting the first surface side with the second surface side, and being exposed on the first surface side; a second electrode adjacent to the first electrode in a first direction, penetrating the substrate and electrically connecting the first surface side with the second surface side, and being exposed on the first surface side; a third electrode adjacent to the first electrode in a second direction intersecting the first direction, penetrating the substrate and electrically connecting the first surface side with the second surface side, and being exposed on the first surface side; a fourth electrode adjacent to the third electrode in the first direction, adjacent to the second electrode in the second direction, penetrating the substrate and electrically connecting the first surface side with the second surface side, and being exposed on the first surface side. The first surface side is electrically connected to the second surface side and exposed on the first surface side; the fifth electrode is arranged on the first surface side, set between the first electrode and the second electrode, between the second electrode and the third electrode, between the third electrode and the fourth electrode, and between the fourth electrode and the first electrode, and is separated from each of the first electrode, the second electrode, the third electrode and the fourth electrode; the first external terminal is electrically connected to the first electrode on the second surface side; the second external terminal is electrically connected to the second electrode on the second surface side; the third external terminal is electrically connected to the third electrode on the second surface side; and the fourth external terminal is electrically connected to the fourth electrode on the second surface side, and the first to fourth external terminals are electrically insulated from each other.

[0014] In the above configuration, the fifth electrode may include a plurality of openings surrounding each of the first electrode, the second electrode, the third electrode, and the fourth electrode.

[0015] In the above structure, it may also be that it further has: a 6th electrode, which is exposed on the 1st surface side and electrically connects the 1st surface side with the 2nd surface side through the substrate; and a 5th external terminal, which is electrically connected to the 6th electrode on the 2nd surface side, the 6th electrode is electrically connected to the 5th electrode, and the 5th external terminal is electrically insulated from the 1st external terminal to the 4th external terminal.

[0016] In the above structure, a first insulating layer may be further provided between the fifth electrode and the substrate, and the front end portion of the first electrode to the front end portion of the fourth electrode may be exposed from the surface of the first insulating layer.

[0017] In the above structure, it may also be that it further has: a 7th electrode, which is adjacent to the 3rd electrode in the second direction, penetrates the substrate and electrically connects the 1st surface side with the 2nd surface side, and is exposed on the 1st surface side; a 6th external terminal, which is electrically connected to the 7th electrode on the 2nd surface side; and an 8th electrode, which is arranged on the 1st surface and is separated from the 5th electrode and the 7th electrode, and the 6th external terminal is electrically insulated from the 1st external terminal to the 4th external terminal, respectively.

[0018] In the above configuration, the eighth electrode may include a fifth opening surrounding the seventh electrode.

[0019] In the above structure, it may also be that it further has: a 9th electrode, which penetrates the substrate and electrically connects the 1st surface side with the 2nd surface side, and is exposed on the 1st surface side; and a 7th external terminal, which is electrically connected to the 9th electrode on the 2nd surface side, and the 7th external terminal is electrically insulated from the 1st external terminal to the 4th external terminal.

[0020] In the above configuration, the device may further include a wiring substrate electrically connected to the first to seventh external terminals, and the wiring substrate may supply the fifth electrode with the same potential as that of the eighth electrode.

[0021] Effects of the Invention

[0022] According to one embodiment of the present disclosure, it is possible to provide a radiation detection element with improved position detection accuracy. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] Figure 1 This is a schematic diagram of a radiation detection device including a radiation detection element according to an embodiment of the present disclosure.

[0024] Figure 2 It is a top view of a radiation detection element according to one embodiment of the present disclosure.

[0025] Figure 3 This is a cross-sectional view of a radiation detection element according to an embodiment of the present disclosure.

[0026] Figure 4 This is a schematic diagram of a radiation detection device including a radiation detection element according to an embodiment of the present disclosure.

[0027] Figure 5 It is a top view of a radiation detection element according to one embodiment of the present disclosure.

[0028] Figure 6 It is a top view of a radiation detection element according to one embodiment of the present disclosure.

[0029] Figure 7 This is a cross-sectional view of a radiation detection element according to an embodiment of the present disclosure.

[0030] Figure 8 It is a top view of a radiation detection element according to one embodiment of the present disclosure.

[0031] Fig. 9 It is a cross-sectional view of a radiation detection element according to one embodiment of the present disclosure.

[0032] Fig.10It is a cross-sectional view of a radiation detection element according to one embodiment of the present disclosure.

[0033] Fig.11 It is a top view of a radiation detection element according to one embodiment of the present disclosure.

[0034] Fig.12 It is a cross-sectional view of a radiation detection element according to one embodiment of the present disclosure.

[0035] Fig.13 It is a cross-sectional view of a radiation detection element according to one embodiment of the present disclosure.

[0036] Fig.14 This is an enlarged plan view of a radiation detection element according to an embodiment of the present disclosure.

[0037] Fig.15 This is a top view of a conventional radiation detection element. DETAILED DESCRIPTION

[0038] Hereinafter, with reference to the accompanying drawings, a radiation detection element and a radiation detection device according to an embodiment of the present disclosure are described in detail. In addition, a radiation detection element and a radiation detection device according to an embodiment of the present disclosure are not limited to the following embodiments, and can be implemented in various deformations. In all embodiments, the same components are marked with the same figure marks for description. In addition, for the convenience of description, the dimensional ratios of the drawings are different from the actual ratios, or part of the structure is omitted from the drawings. In addition, for the convenience of description, the description is made using the phrases such as above or below, but, for example, the up and down relationship between the first component and the second component can also be configured to be opposite to that shown in the figure. In addition, in the following description, the first surface and the second surface of the substrate do not refer to specific surfaces of the substrate, but are used to determine the surface direction or the back direction of the substrate, that is, the names used to determine the up and down directions relative to the substrate.

[0039] (First embodiment)

[0040] Reference Figures 1 to 4 , an overview of the structure of a radiation detection apparatus 200 including a radiation detection element 100 according to an embodiment of the present disclosure will be described.

[0041] <Overview of Radiation Detection Device>

[0042] Figure 11 is a schematic diagram of a radiation detection device 200 having a radiation detection element 100 according to the present embodiment. The radiation detection device 200 according to the present embodiment has a drift electrode 20, a radiation detection element 100, and a chamber 30. The drift electrode 20 and the radiation detection element 100 are arranged opposite to each other in the chamber 30 with a certain space therebetween. A mixed gas of a rare gas such as argon or xenon and a gas having an extinction effect (quenching gas) including an alkane such as ethane or methane or carbon dioxide which is a gas at room temperature is sealed inside the chamber 30. In addition, these gases may be sealed inside the chamber 30 as a single gas, or a mixed gas of two or more gases may be sealed.

[0043] <Structure of Radiation Detection Element>

[0044] The radiation detection element 100 according to the present embodiment includes a substrate 10, a cathode electrode 111, an anode electrode 121, a through electrode 122, and an anode pattern electrode 123. The substrate 10 includes a first surface 10a and a second surface 10b opposite to the first surface 10a.

[0045] The anode electrode 121 has a structure that penetrates the substrate 10 and electrically connects the first surface 10a side with the second surface 10b side, and is exposed on the first surface 10a side. In the following description, the anode electrode 121, the through electrode 122, and the anode pattern electrode 123 are distinguished and described separately, but the anode electrode 121 may also include the through electrode 122 and the anode pattern electrode 123.

[0046] The anode electrodes 121 are arranged in the openings 112 of the cathode electrode 111. The anode electrodes 121 are arranged in 4 rows x 4 columns to match the number of the openings 112 of the cathode electrode 111. That is, the anode electrodes 121 are arranged in the plurality of openings 112 provided in the cathode electrode 111.

[0047] The through-electrode 122 is provided in a through-hole penetrating from the first surface 10a of the substrate 10 to the second surface 10b on the opposite side. The through-electrodes 122 are arranged in 4 rows×4 columns to match the number of anode electrodes 121. The through-electrode 122 is connected to the anode electrode 121. In the present embodiment, the exposed portion of the upper end of the through-electrode 122 corresponds to the anode electrode 121.

[0048] The anode pattern electrodes 123 are arranged on the second surface 10b of the substrate 10. The anode pattern electrodes 123 are arranged in 4 rows and 4 columns to match the number of anode electrodes 121. Each of the plurality of anode pattern electrodes 123 is connected to the through electrode 122. The anode pattern electrodes 123 are arranged at positions corresponding to the openings 112 of the cathode electrodes 111.

[0049] The cathode electrode 111 is arranged on the first surface 10a of the substrate 10. In this embodiment, an example in which the cathode electrode 111 is formed by one conductive layer is shown. In addition, the cathode electrode 111 has a plurality of openings 112. The plurality of openings 112 are circular. In this embodiment, an example in which the plurality of openings 112 are arranged in 4 rows×4 columns is shown.

[0050] In this specification, a part of the cathode electrode 111, the opening 112, and the anode electrode 121 are referred to as a pixel electrode 101. The pixel electrode 101 is substantially square. Figure 1 , an example is shown in which 16 pixel electrodes 101 are arranged in 4 rows×4 columns in one radiation detection element 100 , but the number of pixel electrodes 101 is not limited thereto. For example, the radiation detection element 100 may have 576 pixel electrodes 101 in 24 rows×24 columns.

[0051] <Structure of Radiation Detection Element>

[0052] Next, the structure of the pixel electrode 101 of the radiation detection element 100 according to the present embodiment will be described in detail. Figure 2 1 is a plan view of a radiation detection element 100 according to an embodiment of the present disclosure. Figure 3 It is along Figure 2 A cross-sectional view taken along line A1-A2 is shown.

[0053] exist Figure 2 as well as Figure 3 In the radiation detection element 100 shown, pixel electrodes 101-1, 101-2, 101-3, and 101-4 are exemplified for description. In the following description, when the pixel electrodes 101-1, 101-2, 101-3, and 101-4 are not distinguished from each other, they are described as pixel electrodes 101. In addition, the same applies to the constituent elements of each of the pixel electrodes 101-1, 101-2, 101-3, and 101-4.

[0054] The pixel electrode 101-1 includes a substrate 10, an anode electrode 121-1, a through electrode 122-1, an anode pattern electrode 123-1, and a cathode electrode 111. The pixel electrode 101-2 includes a substrate 10, an anode electrode 121-2, a through electrode 122-2, an anode pattern electrode 123-2, and a cathode electrode 111.

[0055] First, the structure of the anode electrode 121 is described. Figure 3As shown, the anode electrode 121 has a structure that penetrates the substrate 10 and electrically connects the first surface 10a and the second surface 10b, and is exposed on the first surface 10a side. The anode electrode 121 is arranged on the first surface 10a of the substrate 10. In the present embodiment, the anode electrode 121 has a structure in which the upper end of the through electrode 122 protrudes from the first surface 10a of the substrate 10 in the opening 112 of the cathode electrode 111, but it is not limited to this shape. The anode electrode 121 may also be a shape in which the upper end of the through electrode 122 does not protrude from the first surface 10a of the substrate 10 in the opening 112 of the cathode electrode 111. For example, the anode electrode 121 may also be a shape in which the upper end of the through electrode 122 is roughly consistent with the first surface 10a of the substrate 10 or a shape in which the upper end of the through electrode 122 is located inside the substrate 10. However, by making the heights of the cathode electrode 111 and the anode electrode 121 on the first surface 10 a of the substrate 10 substantially the same, discharge can be suppressed even when a high voltage is applied and electric lines of force are concentrated on the anode electrode 121 .

[0056] Next, the positions where the anode electrode 121-1, the anode electrode 121-2, and the anode electrodes 121-3 and 121-4 are respectively arranged will be described. Figure 2 As shown, if the anode electrode 121-1 is used as a reference, the anode electrode 121-2 is adjacent to the anode electrode 121-1 in the first direction D1. In addition, the anode electrode 121-3 is adjacent to the anode electrode 121-1 in the second direction D2 intersecting the first direction D1. In addition, the anode electrode 121-4 is adjacent to the anode electrode 121-3 in the first direction D1, and adjacent to the anode electrode 121-2 in the second direction D2.

[0057] Anode pattern electrodes 123-1, 123-2, 123-3, and 123-4 are arranged on the second surface 10b side of the substrate 10. Anode pattern electrodes 123-1, 123-2, 123-3, and 123-4 are electrically insulated from each other. Anode pattern electrode 123-1 is connected to through electrode 122-1 on the second surface 10b side of substrate 10. In addition, anode pattern electrode 123-2 is connected to through electrode 122-2 on the second surface 10b of substrate 10. In addition, anode pattern electrodes 123-3 and 123-4 are also connected to through electrode 122 (not shown) on the second surface 10b of substrate 10. In addition, anode pattern electrodes 123-1, 123-2, 123-3, and 123-4 are electrically insulated from each other.

[0058] The through hole 11 is connected from the first surface 10a of the substrate 10 to the second surface 10b. In the present embodiment, the through hole 11 and the through electrode 122 are cylindrical. That is, the through hole 11 has substantially the same inner diameter in the thickness direction of the substrate 10. Here, the so-called inner diameter of the through hole 11 refers to the maximum diameter, which refers to the length of two points on the contour line of the through hole 11 in the cross section perpendicular to the thickness direction of the substrate 10 where the distance between them is the largest. Therefore, the inner diameter of the through electrode 122 on the first surface 10a side of the through hole 11 is substantially the same as the inner diameter of the through electrode 122 on the second surface 10b side of the through hole 11.

[0059] The aspect ratio of the through hole 11 is preferably in the range of 4 or more. Here, the so-called aspect ratio of the through hole 11 is defined as the depth of the through hole 11 (the thickness of the substrate 10) relative to the inner diameter of the through hole 11 (when the through hole 11 has different inner diameters in the thickness direction of the substrate 10, the maximum value is taken). When the aspect ratio of the through hole 11 is less than 4, leakage of electric lines occurs between the anode pattern electrode 123 and the cathode electrode 111, and electric lines are not concentrated between the anode electrode 121 and the cathode electrode 111, and the gas amplification factor decreases.

[0060] The cathode electrode 111 is arranged on the first surface 10a side of the substrate 10. The cathode electrode 111 is provided between the anode electrode 121-1 and the anode electrode 121-2, between the anode electrode 121-2 and the anode electrode 121-3, between the anode electrode 121-3 and the anode electrode 121-4, and between the anode electrode 121-4 and the anode electrode 121-1. In addition, the cathode electrode 111 is provided separately from the anode electrodes 121-1, 121-2, 121-3, and 121-4. Specifically, the cathode electrode 111 is provided with openings 112-1, 112-2, 112-3, and 112-4 so as to surround the anode electrodes 121-1, 121-2, 121-3, and 121-4, respectively. In addition, the cathode electrode 111 is electrically insulated from the anode electrodes 121-1, 121-2, 121-3, and 121-4.

[0061] exist Figure 2 , the following structure is shown, that is, an anode electrode 121 is provided in the opening 112 of the cathode electrode 111 so that the distance between the cathode electrode 111 and the anode electrode 121 is fixed in all directions with respect to the anode electrode 121, but it is not limited to this structure. For example, the distance between the cathode electrode 111 and the anode electrode 121 may be closer in a certain direction than in other directions with respect to the anode electrode 121. By setting such a structure, the detection sensitivity can be improved in a certain direction. In addition, in Figure 2, an example is shown in which the cathode electrode 111 surrounds the anode electrode 121, but a part of the cathode electrode 111 may be open.

[0062] The anode pattern electrode 123-1 is connected to an external terminal 131-1, and the anode pattern electrode 123-2 is connected to an external terminal 131-2. Although not shown, the anode pattern electrode 123-3 is connected to an external terminal, and the anode pattern electrode 123-4 is connected to an external terminal. In addition, the plurality of external terminals respectively connected to the anode pattern electrodes 123-1, 123-2, 123-3, and 123-4 are electrically insulated. Figure 3 , an example using solder balls as the external terminals 131 - 1 and 131 - 2 is shown, but the present invention is not limited thereto. Copper pillars, leads, terminal pads, etc. may be used as the external terminals 131 - 1 and 131 - 2 .

[0063] <Parameters of Radiation Detection Element>

[0064] An example of each parameter of the radiation detection element 100 according to one embodiment of the present disclosure is shown below. In addition, since each parameter shown below is an example, it is also possible to change it as appropriate.

[0065] The shape of the substrate: 9.6 mm square

[0066] Cathode electrode width: 9550μm square

[0067] Cathode electrode opening diameter d1: 250μm

[0068] Inner diameter of through hole d2: 50 μm

[0069] Anode electrode spacing d3: 400 μm

[0070] Thickness of substrate: 300μm

[0071] The cathode electrode 111 is preferably a region slightly smaller than the outer shape of the substrate 10. For example, it is preferably arranged at least 20 μm inside the end of the substrate 10. This can prevent the cathode electrode 111 from peeling off from the substrate 10.

[0072] The inner diameter d2 of the through hole 11 is preferably slightly smaller than the upper end of the through electrode 122. Thus, when etching the upper end of the through electrode 122, the etching liquid can be prevented from intruding into the through hole 11, and the through electrode 122 in the through hole 11 can be prevented from being etched.

[0073] As the substrate 10, an organic insulating material can be used. As the organic insulating substrate, polyimide, epoxy, benzocyclobutene, polyamide, phenol, silicone, fluorine, liquid crystal polymer, polyamide-imide, polybenzoxazole, cyanate, aromatic polyamide, polyolefin, polyester, BT resin, FR-4, FR-5, polyacetal, polybutylene terephthalate, syndiotactic polystyrene, polyphenylene sulfide, polyetheretherketone, polyethernitrile, polycarbonate, polyphenylene ether polysulfone, polyethersulfone, polyarylate, polyetherimide, etc. can be used. In addition, as the substrate, inorganic materials such as glass, silicon, and ceramics can also be used.

[0074] <Conventional Radiation Detection Methods>

[0075] Next, refer to Fig.15 The principle of radiation detection by the conventional radiation detection element 500 will be described.

[0076] Fig.15 This is a top view of a conventional radiation detection element 500. The radiation detection element 500 has a plurality of anode pattern electrodes 523-1 and 523-2 arranged along the D2 direction (when not distinguished, only the anode pattern electrodes 523 are recorded), and a plurality of cathode electrodes 511-1 and 511-2 arranged along the D1 direction (when distinguished, only the cathode electrodes 511 are recorded). The plurality of cathode electrodes 511-1 and 511-2 are provided on the first surface of the substrate 10, and the plurality of anode pattern electrodes 523-1 and 523-2 are provided on the second surface of the substrate 10.

[0077] The radiation detection method of the conventional radiation detection element 500 is described by taking pixel electrodes 501-1, 501-2, 501-3, and 501-4 (when not distinguished, simply recorded as pixel electrode 501) as an example. In the pixel electrode 501-1, an anode electrode 521-1 is arranged in the opening 512-1 of the cathode electrode 511. The anode electrode 521-1 is connected to a through electrode (not shown) that penetrates the substrate 10. The through electrode is connected to the anode pattern electrode 523-1. In addition, in the pixel electrode 501-2, an anode electrode 521-2 is arranged in the opening 512-2 of the cathode electrode 511-2. The anode electrode 521-2 is connected to a through electrode (not shown) that penetrates the substrate 10. The through electrode is connected to the anode pattern electrode 523-1. In addition, when the anode electrodes 521-1 and 521-2 are not distinguished, they are simply recorded as anode electrode 521. In addition, the detailed description of the structure of the pixel electrodes 501-3 and 501-4 is omitted.

[0078] exist Fig.15In the embodiment, an electric field is formed by applying a voltage between the cathode electrode 511 and the anode electrode 521. The cathode electrode 511 is connected to the ground (GND), and a voltage is also applied between the drift electrode (not shown) and the cathode electrode 511, thereby forming an electric field.

[0079] When radiation is incident, due to the influence of the electric field generated between the drift electrode and the cathode electrode 511, the radiation forms an electron cloud by interacting with the gas present in the chamber. Each electron of the electron cloud is attracted in the direction of the pixel electrode 501 including the anode electrode 521 and the cathode electrode 511. At this time, the attracted electrons collide with the gas atoms and ionize the gas atoms. Through gas amplification, the ionized electrons avalanche-like multiplication, and the electron group collected by the anode electrode 521 reaches a level that can be read as an electrical signal. Then, the electrical signal can be read out from the external terminal (for example, the external terminal 524-1) through the anode pattern electrode 523. On the other hand, a positive charge induced by the electron group is generated at the cathode electrode 511, and the electrical signal obtained here can be read out from the external terminal (for example, the external terminal 525-1) of the cathode electrode 511. By measuring these electrical signals in a time series, the trajectory of the charged particles can be measured.

[0080] However, in the conventional radiation detection element 500, it is difficult to separate the signals when the signals are detected simultaneously in separate places. Specifically, the description is made with reference to the anode pattern electrodes 523-1, 523-2 and the cathode electrodes 511-1, 511-2. Pixel electrodes 501-1, 501-2, 501-3, 501-4 are arranged at the position S where the anode pattern electrodes 523-1, 523-2 intersect with the cathode electrodes 511-1, 511-2. For example, it is assumed that the following situation is that the signal is detected simultaneously in the anode pattern electrode 523-1 and the anode pattern electrode 523-2, and is detected simultaneously in the cathode electrode 511-1 and the cathode electrode 511-2, and it is determined that the signals match. In this case, it cannot be determined whether the signal is detected simultaneously in the pixel electrode 501-1 and the pixel electrode 501-4, or whether the signal is detected simultaneously in the pixel electrode 501-2 and the pixel electrode 501-3. Therefore, there is a problem that the position detection accuracy of the radiation detection element 500 decreases.

[0081] <Radiation Detection Method According to the Present Embodiment>

[0082] Next, refer to Figure 4 , the principle of radiation detection by the radiation detection element 100 according to the present embodiment will be described.

[0083] In a radiation detection element 100 according to an embodiment of the present disclosure, a cathode electrode 111 and a plurality of anode electrodes 121 are provided on the first surface 10a of the substrate 10, and each of the plurality of anode electrodes 121 is connected to each of the plurality of anode pattern electrodes 123 on the second surface 10b of the substrate 10. Each of the plurality of anode pattern electrodes 123 is electrically insulated. In addition, each of the plurality of anode pattern electrodes 123 is connected to each of a plurality of external terminals (not shown).

[0084] exist Figure 4 In the embodiment, it is assumed that among the pixel electrodes 101-1, 101-2, 101-3, and 101-4, a signal is detected simultaneously in the pixel electrode 101-1 and the pixel electrode 101-4, and a signal is detected simultaneously in the pixel electrode 101-2 and the pixel electrode 101-3. In the case of this embodiment, the anode pattern electrodes of each of the pixel electrodes 101-1, 101-2, 101-3, and 101-4 are electrically insulated. Therefore, the signal detected in each of the pixel electrodes 101-1, 101-2, 101-3, and 101-4 can be read out from each anode pattern electrode via an external terminal. Therefore, even when a signal is detected simultaneously in the pixel electrode 101-1 and the pixel electrode 101-4, and a signal is detected simultaneously in the pixel electrode 101-2 and the pixel electrode 101-3, it is possible to distinguish the signal detected simultaneously in the pixel electrode 101-1 and the pixel electrode 101-4 from the signal detected simultaneously in the pixel electrode 101-2 and the pixel electrode 101-3. Thus, the position information accuracy of the radiation detection element 100 can be improved. In addition, since matching processing for acquiring detection position information is not required, the signal processing speed can be improved.

[0085] exist Figure 1 In the above description, an example in which the plurality of pixel electrodes 101 are arranged in 4 rows×4 columns is described, but the present invention is not limited to this arrangement. The plurality of pixel electrodes 101 may be arranged in a close-packed arrangement.

[0086] <Structure of External Terminals of Radiation Detection Element>

[0087] Next, the external terminals of the conventional radiation detection element 500 are described. In the conventional radiation detection element 500, the external terminals 524-1 and 525-1 are connected to the wiring substrate after being mounted on the wiring substrate. Therefore, the external terminals 524-1 and 525-1 can only be formed on the peripheral portion of the substrate 10 of the radiation detection element 500. In addition, since the length of one side of the substrate 10 of the radiation detection element 500 is also limited, the number of external terminals has to be limited.

[0088] like Figure 3 As shown, a radiation detection element 100 according to one embodiment of the present disclosure has a structure in which an external terminal 131 is connected to the anode pattern electrode 123. By setting such a structure, a plurality of external terminals 131 can be connected to the wiring substrate at once, thereby shortening the assembly and manufacturing time of the radiation detection element 100. In addition, since it is not necessary to provide an external terminal on the first surface 10a of the substrate 10, the formation area of ​​the pixel electrode 101 can be increased.

[0089] (Second embodiment)

[0090] The radiation detection element 100A according to the present embodiment is different from the cathode electrode 111 of the radiation detection element 100 according to the first embodiment in that it has a plurality of cathode electrodes 111A. In addition, the structure of the radiation detection element 100A is the same as that of the radiation detection element 100 except for the structure of the cathode electrode 111A. Therefore, the same reference numerals are attached to the same parts as those of the radiation detection element 100 or parts having the same functions, and repeated descriptions are omitted.

[0091] <Structure of Radiation Detection Element>

[0092] Reference Figure 5 , the structure of the radiation detection element 100A according to this embodiment will be described in detail. Figure 5 1 is a plan view of a radiation detection element 100A according to an embodiment of the present disclosure.

[0093] exist Figure 5 In the radiation detection element 100A shown in FIG. 1 , the cathode electrode 111 is divided into a plurality of cathode electrodes 111A. In addition, the cathode electrode 111A has a plurality of openings 112. Figure 5 , an example is shown in which the plurality of openings 112 of the cathode electrode 111A are arranged in 2 rows×2 columns. The number of divided cathode electrodes 111A is not limited to Figure 5 In addition, the number of the plurality of openings 112 in one cathode electrode 111A is not limited to Figure 5 In addition, the width d4 of the adjacent cathode electrodes 111A may be, for example, 20 μm, as long as the adjacent cathode electrodes 111A are electrically insulated.

[0094] The anode electrodes 121 are respectively arranged in the plurality of openings 112 provided in the cathode electrode 111A.

[0095] The anode pattern electrodes 123 are arranged on the second surface 10b of the substrate 10. The anode pattern electrodes 123 are arranged in the same number as the anode electrodes 121. The anode pattern electrodes 123 are connected to the anode electrodes 121 via through electrodes (not shown). The anode pattern electrodes 123 are arranged at positions corresponding to the openings of the cathode electrodes 111A.

[0096] <Radiation Detection Method According to the Present Embodiment>

[0097] When radiation enters a radiation detection device having the radiation detection element 100A according to the present embodiment, the radiation reacts with the gas with a certain probability to release electrons with kinetic energy. Then, if the released electrons move while consuming kinetic energy, the surrounding gas is ionized, and electric charges (electrons) are generated in turn. The electric charges reach the radiation detection element 100A through the added electric field, whereby the electric charges are amplified by electron avalanche and become signals.

[0098] On the other hand, due to the electron avalanche and the amplification of the charge, a potential change occurs locally. A power supply for stabilizing the potential is supplied to the portion where the electron avalanche occurs. The power supply is performed from a power supply terminal connected to the cathode electrode 111A. Therefore, the potential becomes unstable between the power supply terminal and the cathode electrode 111A where the electron avalanche occurs.

[0099] As shown in this embodiment, a plurality of cathode electrodes 111A are divided and provided with potentials respectively. At this time, the potentials supplied to the plurality of cathode electrodes 111A are preferably the same. In this way, it is possible to suppress the potentials in the divided cathode electrodes 111A from becoming unstable. In addition, by making the areas of the divided cathode electrodes 111A equal, it is possible to suppress the in-plane deviation of the potential supply and the deviation of the electron amplification factor.

[0100] (Third embodiment)

[0101] In this embodiment, in the radiation detection element 100B, the structure of the external terminal 132 connected to the cathode electrode 111 is described. In addition, the structure of the radiation detection element 100B is the same as that of the radiation detection element 100 except for the structure of the external terminal 132. Therefore, the same reference numerals are attached to the same parts as those of the radiation detection element 100 or parts having the same functions, and repeated descriptions are omitted.

[0102] <Structure of Radiation Detection Element>

[0103] Next, refer to Figure 6 as well as Figure 7 , the structure of the radiation detection element 100B according to the present embodiment will be described. Figure 6It is a plan view of the radiation detection element 100B according to the present embodiment. Figure 7 It is along Figure 6 A cross-sectional view taken along line B1-B2 is shown.

[0104] Figure 6 as well as Figure 7 The radiation detection element 100B shown in the figure has a cathode electrode 111 provided on the first surface 10a of the substrate 10, a through electrode 124 provided in the through hole 12 of the substrate 10, and a conductive layer 125 provided on the second surface 10b of the substrate 10. The cathode electrode 111 is connected to the through electrode 124, and the through electrode 124 is connected to the conductive layer 125. In addition, the conductive layer 125 is connected to the external terminal 132. In addition, the external terminal 132 is electrically insulated from each of the plurality of external terminals 131.

[0105] By making the external terminal 132 connected to the cathode electrode 111 have the same structure as the external terminal 131 connected to the anode electrode 121 , when the radiation detection element 100B is mounted on a wiring substrate, mounting can be facilitated.

[0106] Furthermore, by making the inner diameter d2 of the through hole 11 where the through electrode 122 is provided and the inner diameter d5 of the through hole 12 where the through electrode 124 is provided substantially the same, the through hole 11 and the through hole 12 can be formed simultaneously in the substrate 10 , thereby improving productivity when forming the radiation detection element 100B.

[0107] <Modification 1>

[0108] Next, refer to Figure 8 , for Figure 5 A radiation detection element 100C having a partially different structure from the radiation detection element 100A shown will be described. Figure 8 It is a plan view of the radiation detection element 100C according to the present embodiment.

[0109] exist Figure 8 In the radiation detection element 100C shown in FIG. Figure 5 Similarly, in the radiation detection element 100A shown, the cathode electrode 111 is divided into a plurality of cathode electrodes 111C. The cathode electrode 111C provided on the first surface of the substrate 10 is connected to a through-electrode 124C provided in a through hole of the substrate. In addition, the through-electrode 124C is connected to a conductive layer 125C provided on the second surface 10b of the substrate 10. In addition, the conductive layer 125C is connected to an external terminal (not shown). The external terminal is electrically insulated from the plurality of external terminals 131.

[0110] In order to make the in-plane potential distribution of the plurality of cathode electrodes 111C equal, the through electrodes 124C connected to the respective plurality of cathode electrodes 111C are preferably arranged at equal intervals.

[0111] In the radiation detection element 100C, the external terminal connected to the cathode electrode 111C is configured to be the same as the external terminal connected to the anode electrode 121. This makes it easy to mount the radiation detection element 100C on a wiring substrate. Even when the cathode electrode 111 is divided into a plurality of cathode electrodes 111C, the same potential can be supplied from the wiring substrate to each of the plurality of cathode electrodes 111C.

[0112] (Fourth embodiment)

[0113] Reference Fig. 9 The structure of the radiation detection element 100D according to this embodiment in which the anode pattern electrode 123 is connected to the external terminal 131 via the wiring layer 142 will be described. In addition, regarding the structure of the radiation detection element 100D, repeated descriptions of the same structures as those of the radiation detection element 100 will be omitted.

[0114] <Structure of Radiation Detection Element>

[0115] The structure of the radiation detection element 100D according to the present embodiment will be described. Fig. 9 It is a cross-sectional view of a radiation detection element 100D according to the present embodiment.

[0116] like Fig. 9 As shown, in the radiation detection element 100D, an insulating layer 141 is provided on a plurality of anode pattern electrodes 123 provided on the second surface 10b of the substrate 10. In addition, a plurality of wiring layers 142 are provided on the insulating layer 141. Each of the plurality of wiring layers 142 is connected to each of the plurality of anode pattern electrodes 123. In addition, the wiring layer 142 is connected to the external terminal 131.

[0117] By connecting the anode pattern electrode 123 and the external terminal 131 via the wiring layer 142, the layout of the external terminal 131 can be adjusted. As a result, the spacing d10 between adjacent external terminals 131 can be smaller than the spacing d3 between adjacent anode electrodes 121. In addition, if the radiation detection element becomes large in size, the connection of the external terminal will be poor due to the difference in thermal expansion with the installed wiring substrate, and there is a concern about reliability degradation. However, by connecting the anode pattern electrode 123 and the external terminal 131 via the wiring layer 142, the difference in thermal expansion between the radiation detection element 100D and the wiring substrate can be alleviated. In addition, when a plurality of radiation detection elements 100D are arranged adjacently on a wiring substrate, dead space can be prevented from being generated between the radiation detection elements 100D.

[0118] (Fifth embodiment)

[0119] Reference Fig.10 , an example in which the radiation detection element 100E according to the present embodiment has a structure in which the insulating layers 143 and 144 are provided on the first surface 10 a and the second surface 10 b of the substrate 10 , respectively, will be described.

[0120] An insulating layer 143 is provided on the first surface 10a of the substrate 10. An opening is provided in the insulating layer 143 corresponding to the position where the through electrode 122 is formed. The through electrode 122 is electrically connected to the anode electrode 121 via the opening provided in the insulating layer 143. The upper surface of the anode electrode 121 is exposed from the surface of the insulating layer 143. The cathode electrode 111 is provided on the insulating layer 143. Although a top view of the cathode electrode 111 is not particularly shown, it can be Figure 2 As shown, a cathode electrode 111 is provided, which can also be Figure 5 As shown, a plurality of cathode electrodes 111A are provided. In this embodiment, the cathode electrodes 111 and the anode electrodes 121 can be formed by processing one conductive layer made of the same material.

[0121] In the manufacturing process such as the etching process when forming the through hole 11 in the substrate 10 and the conductor plating process when forming the through electrode 122, there is a case where the surface of the through electrode 122 is rough or uneven. By providing the insulating layer 143 on the first surface 10a of the substrate 10, the surface unevenness of the first surface 10a can be alleviated. In addition, since the adhesion between the first surface 10a of the substrate 10 and the cathode electrode 111 can be improved, the cathode electrode 111 can be prevented from peeling off. In addition, by processing a conductive layer having the same material on the insulating layer 143, the cathode electrode 111 and the anode electrode 121 can be formed. As a result, compared with the case where the anode electrode 121 is formed by the through electrode 122, it is easy to make the height of the cathode electrode 111 consistent with the height of the anode electrode 121.

[0122] An insulating layer 141 is provided on the second surface 10b of the substrate 10. An opening is provided in the insulating layer 141 corresponding to a position where the through electrode 122 is formed. The through electrode 122 is electrically connected to the anode pattern electrode 123 via the opening provided in the insulating layer 141. The anode pattern electrode 123 is provided on the insulating layer 141.

[0123] The surface irregularities of the second surface 10b can be mitigated by providing the insulating layer 141 on the second surface 10b of the substrate 10. In addition, since the adhesion between the second surface 10b of the substrate 10 and the anode pattern electrode 123 can be improved, the anode pattern electrode 123 can be prevented from peeling off.

[0124] exist Fig.10 In the example shown, an insulating layer 143 is provided between the cathode electrode 111 and the substrate 10, and an insulating layer 141 is provided between the anode electrode 121 and the substrate 10, but an embodiment of the present disclosure is not limited thereto. A structure in which at least one of the insulating layer 143 and the insulating layer 141 is omitted is also possible.

[0125] As the insulating layers 141 and 143, organic insulating materials can be used. As the organic insulating layer, polyimide, epoxy resin, polyimide resin, benzocyclobutene resin, polyamide, phenolic resin, silicone resin, fluororesin, liquid crystal polymer, polyamide-imide, polybenzoxazole, cyanate resin, aromatic polyamide, polyolefin, polyester, BT resin, FR-4, FR-5, polyacetal, polybutylene terephthalate, syndiotactic polystyrene, polyphenylene sulfide, polyetheretherketone, polyethernitrile, polycarbonate, polyphenylene ether polysulfone, polyethersulfone, polyarylate, polyetherimide, etc. can be used. In addition, as the insulating layer, a member that easily transmits gas can be used. For example, a porous material containing bubbles inside can also be used.

[0126] The thickness of the insulating layers 141 and 143 is not particularly limited, but can be appropriately selected within a range of, for example, 1 μm or more and 20 μm or less. If the thickness of the insulating layers 141 and 143 is thinner than the above lower limit, the surface insulation of the anode electrode 121 and the cathode electrode 111 becomes smaller, which may cause discharge. In addition, if the thickness of the insulating layers 141 and 143 is thicker than the above upper limit, the process of forming the opening portion becomes longer, the manufacturing process will be prolonged, and the manufacturing cost will also increase. In addition, due to the internal stress caused by the insulating layers 141 and 143, the insulating member is prone to warping and cracking.

[0127] (Sixth embodiment)

[0128] Reference Fig.11 as well as Fig.12 , a description will be given of a situation in which the radiation detection element 100 according to an embodiment of the present disclosure is mounted and connected to the wiring substrate 150 . Fig.11 It is a plan view of a wiring substrate 150 on which the radiation detection element 100 according to one embodiment of the present disclosure is mounted. Fig.12 It is along Fig.11 A cross-sectional view taken along line C1-C2 is shown.

[0129] like Fig.11 as well as Fig.12 As shown, a bonding pad 151 is provided on the wiring substrate 150. The bonding pad 151 can be connected to the cathode electrode 111 by a bonding wire 152. As the bonding wire 152, for example, a 20 μm φ gold wire is used. In addition, the connection method between the cathode electrode 111 and the wiring substrate 150 is not limited to wire bonding based on the bonding wire 152. The connection method between the radiation detection element 100 and the wiring substrate 150 can be appropriately changed, such as welding using a wire, contact connection using a connection pin, etc.

[0130] exist Fig.11 as well as Fig.12 In the example of providing two connection points between the cathode electrode 111 and the wiring substrate 150, at least one connection point between the cathode electrode 111 and the wiring substrate 150 is sufficient. By providing a plurality of connection points between the cathode electrode 111 and the wiring substrate 150, the difference in potential distribution within the cathode electrode 111 can be reduced.

[0131] In addition, Figure 5 When the radiation detection element 100A shown is mounted and connected to a wiring substrate 150 , it is sufficient to provide bonding pads 151 on the wiring substrate 150 in accordance with the number of divided cathode electrodes 111A.

[0132] Although not shown in the figure, a signal processing circuit, a control circuit, etc. are formed on the wiring substrate 150. In addition, it is possible to connect to an external circuit through a connector component such as FPC (Flexible printed circuits) installed on the wiring substrate 150. In addition, the external terminal 131 installed and connected to the wiring substrate 150 can be fixed and protected by a bottom filling material or a sealing resin material.

[0133] On the wiring substrate 150, for example, atoms of large mass such as tungsten and molybdenum or substances that cause scintillation by radiation such as cesium iodide (CsI) and barium fluoride (BaF2) are dispersed. This can reduce the radiation leakage to the outside by attenuating the radiation that has passed through the radiation detection element. In addition, the above-mentioned large mass atoms can also be used as Fig. 9 Conductive layer in wiring board 150 shown. The above-mentioned heavy atoms as materials for absorbing radiation and the above-mentioned substances that scintillate due to radiation as materials for converting radiation into light can be selected according to the energy and type of radiation.

[0134] <Inspection Method of Radiation Detection Element>

[0135] Before mounting the radiation detection element 100 according to one embodiment of the present disclosure on the wiring substrate 150, it is preferable to perform an open circuit / short circuit test on the cathode electrode 111 and the anode electrode 121. As a method for performing the open circuit / short circuit test, the insulation between the cathode electrode 111 and the anode electrode 121 can be checked by contacting the radiation detection element 100 with a conductive sheet having a buffering property. Alternatively, for each of the plurality of anode electrodes 121, by measuring the electrostatic capacitance with respect to the cathode electrode 111, it is possible to confirm the open circuit / short circuit in each electrode.

[0136] After the radiation detection element 100 is mounted on the wiring substrate 150, it is preferable to check whether there is any practical problem by applying a potential required for actual operation or a test potential. For example, appropriate settings are made so that, for example, -400 V is applied to the cathode electrode 111 and GND is applied to each of the plurality of anode electrodes 121, thereby generating a necessary electric field between the cathode electrode 111 and the anode electrode 121.

[0137] (Seventh Implementation Method)

[0138] In this embodiment, refer to Fig.13 as well as Fig.14 , a wiring substrate 150A on which a plurality of radiation detection elements 100 according to an embodiment of the present disclosure are mounted will be described.

[0139] <Structure of Radiation Detection Device>

[0140] exist Fig.13 , an example is shown in which radiation detection elements 100-1, 100-2, and 100-3 are mounted on a wiring substrate 150A. The radiation detection element 100-1 is connected to the wiring substrate 150A via a plurality of external terminals 131-1. The radiation detection element 100-2 is connected to the wiring substrate 150A via a plurality of external terminals 131-2. In addition, the radiation detection element 100-3 is connected to the wiring substrate 150A via a plurality of external terminals 131-3.

[0141] Fig.14 This is an enlarged view of the adjacent radiation detection element 100-1 and the radiation detection element 100-2 when viewed from above. In the radiation detection element 100-1, a cathode electrode 111-1 is arranged on the substrate 10-1. In addition, in the radiation detection element 100-2, a cathode electrode 111-2 is arranged on the substrate 10-2. The cathode electrode 111-1 of the radiation detection element 100-1 and the cathode electrode 111-2 of the radiation detection element 100-2 are electrically connected via a connecting portion 153. As the connecting portion 153, for example, a copper tape, wire bonding, conductive paste, solder connection, etc. are used. Fig.14 , an example of connection by a copper tape is shown as the connection portion 153. By connecting the plurality of radiation detection elements 100-1, 100-2, and 100-3 by the connection portion 153, respectively, it is possible to easily configure the radiation detection apparatus 200 of a desired size.

[0142] In this embodiment, an example of connecting adjacent radiation detection elements 100-1 and radiation detection elements 100-2 through a connection portion 153 is shown, but the connection method is not limited to this. When multiple radiation detection elements 100B or radiation detection elements 100C involved in the third embodiment are used to be installed on the wiring substrate 150A, the connection portion 153 may not be used. For example, when multiple radiation detection elements 100B are directly connected to the wiring substrate 150, each of the cathode electrodes 111 of the multiple radiation detection elements 100B is directly connected to the wiring substrate 150A through the external terminal 131 connected via the through electrode 122. Even when the cathode electrode 111 is directly connected to the wiring substrate 150A through the external terminal 131, in order to stabilize the potential distribution of the cathode electrode 111, the connection portion 153 may be appropriately used to connect adjacent cathode electrodes 111.

[0143] As shown in the present embodiment, by mounting a plurality of radiation detection elements on the wiring substrate 150 , a radiation detection apparatus of a desired size can be easily configured.

[0144] Furthermore, in the radiation detection element 100 according to the present disclosure, since a plurality of external terminals 131 are provided on the second surface 10 b of the base 10 , connection to the wiring board 150A can be performed at once, and the assembly manufacturing time of the radiation detection element 100 can be shortened.

[0145] <Parameters of Radiation Detection Device>

[0146] An example of each parameter of the radiation detection device 200 according to one embodiment of the present disclosure is shown below. In addition, since each parameter shown below is an example, it is also possible to change it appropriately.

[0147] The shape of the substrate: 9.6 mm square

[0148] Cathode electrode width: 9550μm square

[0149] Cathode electrode opening diameter d1: 250μm

[0150] Inner diameter of through hole d2: 50 μm

[0151] Distance d3 between adjacent anode electrodes: 400 μm

[0152] Thickness of substrate: 300μm

[0153] Distance d6 between adjacent substrates: 50 μm

[0154] Distance d7 from the end of the substrate to the cathode electrode: 20 μm

[0155] Distance d8 from the end of the cathode electrode to the opening: 30 μm

[0156] Distance d9 between adjacent anode electrodes on substrate: 400 μm

[0157] By setting the distance between adjacent substrates 10-1 and 10-2 to 50 μm, the distance between the anode electrode 121-1 disposed at the end of the radiation detection element 100-1 and the anode electrode 121-2 disposed at the end of the radiation detection element 100-2 becomes 400 μm. Thus, the distance between adjacent anode electrodes 121 disposed in the radiation detection element 100-1 and the distance between adjacent anode electrodes 121-1 and 121-2 of the radiation detection elements 100-1 and 100-2 can be made consistent.

[0158] Description of Reference Numerals

[0159] 10: substrate, 10a: first surface, 10b: second surface, 11: through hole, 12: through hole, 20: drift electrode, 30: chamber, 100: radiation detection element, 101: pixel electrode, 111: cathode electrode, 112: opening, 121: anode electrode, 122: through electrode, 123: anode pattern electrode, 124: through electrode, 125: conductive layer, 131: external terminal, 132: external terminal, 141: insulating layer, 142: wiring layer, 143: insulating layer, 144: insulating layer, 150: wiring substrate, 151: bonding pad, 152: bonding wire, 153: connecting portion, 200: radiation detection device, 500: radiation detection element, 501: pixel electrode, 511: cathode electrode, 521: anode electrode, 523: anode pattern electrode.

Claims

1. A radiation detection element, It is characterized in that have: A substrate having a first surface and a second surface opposite to the first surface; a first electrode penetrating the substrate and electrically connecting the first surface side and the second surface side, and exposed on the first surface side; a second electrode, adjacent to the first electrode in the first direction, penetrating the substrate and electrically connecting the first surface side and the second surface side, and exposed on the first surface side; a third electrode, adjacent to the first electrode in a second direction intersecting the first direction, penetrating the substrate and electrically connecting the first surface side and the second surface side, and exposed on the first surface side; a fourth electrode, adjacent to the third electrode in the first direction, adjacent to the second electrode in the second direction, penetrating the substrate and electrically connecting the first surface side and the second surface side, and exposed on the first surface side; a fifth electrode disposed on the first surface side, provided between the first electrode and the second electrode, between the second electrode and the third electrode, between the third electrode and the fourth electrode, and between the fourth electrode and the first electrode, and provided separately from the first electrode, the second electrode, the third electrode, and the fourth electrode; a first external terminal electrically connected to the first electrode on the second surface side; a second external terminal electrically connected to the second electrode on the second surface side; a third external terminal electrically connected to the third electrode on the second surface side; and a fourth external terminal electrically connected to the fourth electrode on the second surface side, The first to fourth external terminals are solder balls electrically insulated from each other. The first electrode to the fourth electrode are electrically insulated from each other. When viewed from the vertical direction, the first electrode overlaps with the first external terminal, the second electrode overlaps with the second external terminal, the third electrode overlaps with the third external terminal, the fourth electrode overlaps with the fourth external terminal, and the area of ​​the fifth electrode overlaps with any one of the first to fourth external terminals.

2. The radiation detection element according to claim 1, It is characterized in that The fifth electrode has a plurality of openings surrounding the first electrode, the second electrode, the third electrode, and the fourth electrode, respectively.

3. The radiation detection element according to claim 1, It is characterized in that The radiation detection element further comprises: a sixth electrode that penetrates the substrate and electrically connects the first surface side and the second surface side, and is exposed on the first surface side; and a fifth external terminal electrically connected to the sixth electrode on the second surface side, The sixth electrode is electrically connected to the fifth electrode, The fifth external terminal is electrically insulated from the first to fourth external terminals.

4. The radiation detection element according to claim 1, It is characterized in that The radiation detection element further includes a first insulating layer between the fifth electrode and the substrate. The upper surface of the first electrode to the upper surface of the fourth electrode are exposed from the surface of the first insulating layer.

5. The radiation detection element according to claim 1, It is characterized in that The radiation detection element further comprises: a seventh electrode, adjacent to the third electrode in the second direction, penetrating the substrate and electrically connecting the first surface side and the second surface side, and exposed on the first surface side; a sixth external terminal electrically connected to the seventh electrode on the second surface side; as well as an eighth electrode disposed on the first surface and separated from the fifth electrode and the seventh electrode; The sixth external terminal is electrically insulated from the first to fourth external terminals.

6. The radiation detection element according to claim 5, It is characterized in that The eighth electrode has a fifth opening surrounding the seventh electrode.

7. The radiation detection element according to claim 5, It is characterized in that The radiation detection element further comprises: a ninth electrode that penetrates the substrate and electrically connects the first surface side and the second surface side, and is exposed on the first surface side; and a seventh external terminal electrically connected to the ninth electrode on the second surface side, The seventh external terminal is electrically insulated from the first to fourth external terminals.

8. The radiation detection element according to claim 7, It is characterized in that The radiation detection element further includes: a wiring substrate electrically connected to the first external terminal to the seventh external terminal; The fifth electrode is supplied with the same potential as that of the eighth electrode from the wiring substrate.

9. A radiation detection element, It is characterized in that have: A substrate having a first surface and a second surface opposite to the first surface; a first electrode penetrating the substrate and electrically connecting the first surface side and the second surface side, and exposed on the first surface side; a second electrode, adjacent to the first electrode in the first direction, penetrating the substrate and electrically connecting the first surface side and the second surface side, and exposed on the first surface side; a third electrode, adjacent to the first electrode in a second direction intersecting the first direction, penetrating the substrate and electrically connecting the first surface side and the second surface side, and exposed on the first surface side; a fourth electrode, adjacent to the third electrode in the first direction, adjacent to the second electrode in the second direction, penetrating the substrate and electrically connecting the first surface side and the second surface side, and exposed on the first surface side; a fifth electrode disposed on the first surface side, provided between the first electrode and the second electrode, between the second electrode and the third electrode, between the third electrode and the fourth electrode, and between the fourth electrode and the first electrode, and provided separately from the first electrode, the second electrode, the third electrode, and the fourth electrode; a first external terminal electrically connected to the first electrode on the second surface side; a second external terminal electrically connected to the second electrode on the second surface side; a third external terminal electrically connected to the third electrode on the second surface side; and a fourth external terminal electrically connected to the fourth electrode on the second surface side, The first to fourth external terminals are terminals that are electrically insulated from each other and connected to a wiring substrate. The first electrode to the fourth electrode are electrically insulated from each other. When viewed from the vertical direction, the first electrode overlaps with the first external terminal, the second electrode overlaps with the second external terminal, the third electrode overlaps with the third external terminal, the fourth electrode overlaps with the fourth external terminal, and the area of ​​the fifth electrode overlaps with any one of the first to fourth external terminals.

10. The radiation detection element according to claim 9, It is characterized in that The fifth electrode has a plurality of openings surrounding the first electrode, the second electrode, the third electrode, and the fourth electrode, respectively.

11. The radiation detection element according to claim 9, It is characterized in that The radiation detection element further comprises: a sixth electrode that penetrates the substrate and electrically connects the first surface side and the second surface side, and is exposed on the first surface side; and a fifth external terminal electrically connected to the sixth electrode on the second surface side, The sixth electrode is electrically connected to the fifth electrode, The fifth external terminal is electrically insulated from the first to fourth external terminals.

12. The radiation detection element according to claim 9, It is characterized in that The radiation detection element further includes a first insulating layer between the fifth electrode and the substrate. The upper surface of the first electrode to the upper surface of the fourth electrode are exposed from the surface of the first insulating layer.

13. The radiation detection element according to claim 9, It is characterized in that The radiation detection element further comprises: a seventh electrode, adjacent to the third electrode in the second direction, penetrating the substrate and electrically connecting the first surface side and the second surface side, and exposed on the first surface side; a sixth external terminal electrically connected to the seventh electrode on the second surface side; as well as an eighth electrode disposed on the first surface and separated from the fifth electrode and the seventh electrode; The sixth external terminal is electrically insulated from the first to fourth external terminals.

14. The radiation detection element according to claim 13, It is characterized in that The eighth electrode has a fifth opening surrounding the seventh electrode.

15. The radiation detection element according to claim 13, It is characterized in that The radiation detection element further comprises: a ninth electrode that penetrates the substrate and electrically connects the first surface side and the second surface side, and is exposed on the first surface side; and a seventh external terminal electrically connected to the ninth electrode on the second surface side, The seventh external terminal is electrically insulated from the first to fourth external terminals.

16. The radiation detection element according to claim 15, It is characterized in that The radiation detection element further includes: a wiring substrate electrically connected to the first external terminal to the seventh external terminal; The fifth electrode is supplied with the same potential as that of the eighth electrode from the wiring substrate.

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