Laser processing equipment

Abstract

A laser processing apparatus may include a laser generating unit, a stage, and a suction unit, wherein: the laser generating unit generates a laser beam; an object to be processed by the laser beam is placed on the stage; and the suction unit is arranged between the laser generating unit and the stage and includes a main body and a plurality of fume suction pipes arranged on side walls of the main body to extract fume generated by processing the object. The plurality of fume suction pipes may include a first fume suction pipe and a second fume suction pipe, wherein: the first fume suction pipe is arranged along a first direction from the main body; the second fume suction pipe is arranged along a second direction opposite the first direction from the main body. The number of first fume suction pipes may be greater than the number of second fume suction pipes.

Description

Technical Field

[0001] The present invention relates to a laser processing device. Background Art

[0002] When manufacturing display devices such as organic light-emitting display devices and liquid crystal display devices, processing steps such as cutting or repairing an object may be performed. Such processing steps can be performed using a laser processing device. Laser processing is a process in which a laser beam is irradiated onto an object to melt or evaporate a substance. During the laser processing process, smoke (fume) as fine particles may be generated. This smoke may not only be harmful to the human body, but may also cause defects in the laser processing device. Therefore, it is necessary to effectively remove the smoke generated during the laser processing process. Summary of the Invention

[0003] Technical problems solved

[0004] An object of the present invention is to provide a laser processing apparatus including a suction unit that effectively removes fumes generated during laser processing.

[0005] However, the objects of the present invention are not limited to the above objects, and various extensions can be made within the scope not departing from the idea and scope of the present invention.

[0006] Solution to the problem

[0007] To achieve one objective of the present invention, a laser processing apparatus according to an embodiment may include a laser generating unit, a stage, and a suction unit, wherein: the laser generating unit generates a laser beam; an object to be processed by the laser beam is placed on the stage; and the suction unit is arranged between the laser generating unit and the stage and includes a main body and a plurality of fume suction pipes, wherein the plurality of fume suction pipes are arranged on side walls of the main body and extract fume generated by processing the object. The plurality of fume suction pipes may include a first fume suction pipe and a second fume suction pipe, wherein: the first fume suction pipe is arranged along a first direction from the main body; and the second fume suction pipe is arranged along a second direction opposite the first direction from the main body. The number of first fume suction pipes may be greater than the number of second fume suction pipes.

[0008] In one embodiment, the number of the first smoke extraction pipes may be three.

[0009] In one embodiment, the first smoke extraction pipe may include a lower smoke extraction pipe, a middle smoke extraction pipe and an upper smoke extraction pipe, wherein: the middle smoke extraction pipe is arranged separately from the lower smoke extraction pipe on the upper side of the lower smoke extraction pipe; and the upper smoke extraction pipe is arranged separately from the middle smoke extraction pipe on the upper side of the middle smoke extraction pipe.

[0010] In one embodiment, the interval between the lower fume extraction pipe and the middle fume extraction pipe may be smaller than the interval between the middle fume extraction pipe and the upper fume extraction pipe.

[0011] In one embodiment, the height of the second fume extraction pipe may be substantially equal to the height of the upper fume extraction pipe.

[0012] In one embodiment, the number of the second smoke extraction pipe may be one.

[0013] In one embodiment, the plurality of smoke extraction tubes may further include a third smoke extraction tube and a fourth smoke extraction tube, wherein: the third smoke extraction tube is arranged from the main body along a third direction perpendicular to the first direction and the second direction; and the fourth smoke extraction tube is arranged from the main body along a fourth direction opposite to the third direction.

[0014] In one embodiment, the number of the third smoke extraction tubes may be equal to the number of the fourth smoke extraction tubes.

[0015] In one embodiment, each of the number of the third smoke extraction tubes and the number of the fourth smoke extraction tubes may be one.

[0016] In one embodiment, the height of the third fume extraction pipe may be substantially equal to the height of the fourth fume extraction pipe.

[0017] In one embodiment, each of the height of the third fume extraction pipe and the height of the fourth fume extraction pipe may be lower than the height of the second fume extraction pipe.

[0018] In one embodiment, the suction unit may further include a cover and a plurality of air supply nozzles, wherein: the cover covers an upper surface of the body; and the plurality of air supply nozzles are arranged on the upper surface of the cover.

[0019] In one embodiment, each of the plurality of air supply nozzles may include an air injection portion and an air jet portion, wherein: the air injection portion extends in a horizontal direction; and the air jet portion extends in a vertical direction.

[0020] In one embodiment, the plurality of air supply nozzles may be arranged at equal intervals.

[0021] In one embodiment, the pressure of the air injected into the plurality of air supply nozzles may be greater than or equal to about 0 KPa and less than or equal to about 4 KPa.

[0022] In one embodiment, the suction unit may further include an air curtain forming member disposed between the body and the plurality of air supply nozzles and changing a direction of air ejected from the plurality of air supply nozzles in a vertical direction to a horizontal direction.

[0023] In one embodiment, the air curtain forming member may have a U-shaped cross-sectional shape.

[0024] In one embodiment, the suction unit may further include a particle suction member that is disposed on a side wall of the body and suctions particles generated by processing the object.

[0025] In one embodiment, the particle suction member may be arranged along the second direction from the main body.

[0026] In one embodiment, the particle extraction member may be arranged below the second fume extraction pipe.

[0027] Beneficial effects

[0028] The suction unit of the laser processing device according to an embodiment of the present invention includes a first smoke suction pipe and a second smoke suction pipe arranged along a first direction and a second direction from the main body, respectively, and since the number of the first smoke suction pipes is greater than the number of the second smoke suction pipes, an upward airflow is formed in the direction where the first smoke suction pipes are located and a downward airflow is formed in the direction where the second smoke suction pipes are located, and the smoke can be effectively removed by the suction unit.

[0029] However, the effects of the present invention are not limited to the above-described effects, and various extensions can be made within a scope not departing from the idea and scope of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS

[0030] Figure 1 FIG. 1 is a diagram schematically showing a laser processing apparatus according to an embodiment of the present invention.

[0031] Figure 2 is a front view showing a suction unit according to one embodiment of the present invention.

[0032] Figure 3 It shows Figure 2 Side view of the suction unit.

[0033] Figure 4 It shows Figure 2 Plan view of the suction unit.

[0034] Figure 5 It is along Figure 4 A cross-sectional view taken along line V-V'.

[0035] Figure 6 It is along Figure 4 A cross-sectional view taken along line VI-VI'. DETAILED DESCRIPTION

[0036] Hereinafter, a laser processing apparatus according to an embodiment of the present invention will be described in more detail with reference to the accompanying drawings. The same or similar reference numerals are used for the same components in the accompanying drawings.

[0037] First, refer to Figure 1 A laser processing apparatus 10 according to one embodiment will be described.

[0038] Figure 1 FIG. 1 is a diagram schematically showing a laser processing apparatus 10 according to an embodiment of the present invention.

[0039] refer to Figure 1 The laser processing apparatus 10 may include a laser generating unit 100 , an optical unit 200 , a stage 300 , a suction unit 400 , a dust collecting unit 500 , an air supply unit 600 , and a control unit 700 .

[0040] The laser generating unit 100 may generate a laser beam, thereby emitting the laser beam. The laser generating unit 100 may include a gas laser such as a carbon dioxide laser, an excimer laser, a helium-neon laser, or a solid laser such as a ruby ​​laser, a glass laser, a YAG laser, a YLF laser, or the like.

[0041] The optical unit 200 may be located in the path of the laser beam. The optical unit 200 may include a homogenizer to homogenize the shape of the laser beam and / or a focusing lens to converge the laser beam. The laser beam passing through the optical unit 200 may have a predetermined shape, such as a quadrilateral or a circle, and may form a line beam. Depending on the relative arrangement of the laser generating unit 100 and the optical unit 200, a mirror may be disposed between the laser generating unit 100 and the optical unit 200 to change the direction of the laser beam.

[0042] The laser beam passing through the optical unit 200 may be irradiated toward the object 20 placed on the stage 300. The stage 300 may support the object 20. In one embodiment, the stage 300 may be fixed. In another embodiment, the stage 300 may also move or rotate along a predetermined direction.

[0043] The suction unit 400 can extract smoke and particles generated during laser processing of the object 20. Smoke can refer to gaseous processing residues such as dust generated during laser processing that move with the airflow within the suction unit 400, and particles can refer to solid processing residues such as metal particles generated during laser processing that do not move with the airflow within the suction unit 400. Furthermore, the suction unit 400 can provide a path LP for the laser beam.

[0044] The dust collection unit 500 can capture smoke and particles sucked in by the suction unit 400. A connecting pipe C may be arranged between the suction unit 400 and the dust collection unit 500, and the connecting pipe C may provide a passage for the smoke and particles generated when processing the object 20 to move. The dust collection unit 500 may include a structure for adjusting the suction pressure provided by the suction unit 400. Such a structure may be a motor, a pump, or a fan, and may also be provided separately from the dust collection unit 500. In addition, the dust collection unit 500 may include a filter for filtering smoke and particles.

[0045] The air supply unit 600 can provide air for forming a downward airflow inside the suction unit 400 corresponding to the path LP of the laser beam. The downward airflow inside the suction unit 400 not only increases the suction capacity of the suction unit 400 but also prevents smoke from rising to the optical unit 200, thereby preventing the optical unit 200 from being contaminated or damaged by the smoke.

[0046] The control unit 700 may control the laser beam generated by the laser generating unit 100 , the suction applied by the dust collecting unit 500 , the air flow supplied by the air supply unit 600 , etc. The control unit 700 may include a processor, a memory, and the like.

[0047] The object 20 processed by the laser processing apparatus 10 may be a display panel or substrate of a display device. In one embodiment, the object 20 may be a display panel, and a laser beam may be irradiated onto a damaged portion of the display panel to repair the damaged portion. In another embodiment, the object 20 may be a display panel, and a laser beam may be irradiated onto the peripheral portion of the display panel to cut the display panel into a predetermined shape, or onto the central portion of the display panel to form a hole in the display panel.

[0048] So far, reference Figure 1 The overall structure of the laser processing device 10 is described. Figures 2 to 6 The suction unit 400 of the laser processing device 10 is described in detail. In addition, in order to describe the relationship between the suction unit 400 and other structures of the laser processing device 10, Figure 1 Reference was made.

[0049] Figure 2 is a front view illustrating a suction unit 400 according to one embodiment of the present invention. Figure 3 It shows Figure 2 Side view of the suction unit 400. Figure 4 It shows Figure 2 A plan view of the suction unit 400. Figure 5 It is along Figure 4 A cross-sectional view taken along line V-V'. Figure 6 It is along Figure 4 A cross-sectional view taken along line VI-VI'.

[0050] refer to Figure 2 、 Figure 3 、 Figure 4 、 Figure 5 and Figure 6 The suction unit 400 may include a main body 410 , a cover 420 , a plurality of smoke suction pipes 430 , a plurality of air supply nozzles 440 , an air curtain forming member 450 , and a particle suction member 460 .

[0051] The main body 410 can have a structure such that the emitted laser beam can be irradiated onto the object 20 located below the main body 410 through the optical unit 200 located on the upper side of the main body 410, and smoke and particles generated by the laser beam irradiation during laser processing of the object 20 can be effectively sucked out. To this end, the main body 410 can have a generally cylindrical shape. In addition to a cylindrical shape, the main body 410 can also have a polygonal prism shape. The interior of the main body 410 is hollow, thereby generating airflow within the main body 410.

[0052] The cover 420 may be disposed on the body 410. The cover 420 may cover the upper surface 411 of the body 410. The cover 420 may have a substantially annular shape in a plane. The path LP of the laser beam may be defined as a portion surrounded by the cover 420 in a plane.

[0053] The smoke extraction pipe 430 may be disposed on the side wall 412 of the main body 410. The smoke extraction pipe 430 may extract smoke generated during laser processing of the object 20. The smoke extraction pipe 430 may include a first smoke extraction pipe 431, a second smoke extraction pipe 432, a third smoke extraction pipe 433, and a fourth smoke extraction pipe 434 arranged in different directions.

[0054] The first smoke extraction duct 431 is arranged along a first direction DR1 from the main body 410, and the second smoke extraction duct 432 is arranged along a second direction DR2 opposite to the first direction DR1 from the main body 410. In other words, the first smoke extraction duct 431 and the second smoke extraction duct 432 may be separated from each other with the central portion of the main body 410 located therebetween.

[0055] The number of first smoke extraction tubes 431 may be greater than the number of second smoke extraction tubes 432. In one embodiment, the number of first smoke extraction tubes 431 may be three, and the number of second smoke extraction tubes 432 may be one. However, the present invention is not limited thereto, and in another embodiment, the number of first smoke extraction tubes 431 may be two or four or more.

[0056] The first smoke extraction pipe 431 may include a lower smoke extraction pipe 431a, a middle smoke extraction pipe 431b, and an upper smoke extraction pipe 431c. The middle smoke extraction pipe 431b may be arranged above the lower smoke extraction pipe 431a, separately from the lower smoke extraction pipe 431a. The upper smoke extraction pipe 431c may be arranged above the middle smoke extraction pipe 431b, separately from the middle smoke extraction pipe 431b.

[0057] When the number of first fume extraction tubes 431 is greater than the number of second fume extraction tubes 432, an upward airflow is generated in the first direction DR1 within the main body 410 where the first fume extraction tubes 431 are located. The fume can follow the air AR moving upward in the first direction DR1 within the main body 410, thereby being drawn in by the first fume extraction tubes 431. Furthermore, a downward airflow is generated in the second direction DR2 within the main body 410 where the second fume extraction tubes 432 are located. The fume can follow the air AR moving downward in the second direction DR2 within the main body 410, thereby being drawn in by the second fume extraction tubes 432. Because the fume generated on the front surface of the object 20 due to laser processing follows the air AR circulating throughout the main body 410 of the suction unit 400 in the first and second directions DR1 and DR2, not only the fume generated in the peripheral portion of the object 20 but also the fume generated in the central portion of the object 20 can be drawn in by the first and second fume extraction tubes 431 and 432. Therefore, it is possible to prevent the optical unit 200 from being contaminated by the smoke, and it is possible to extend the replacement cycle of the suction unit 400 .

[0058] In one embodiment, the interval D1 between the lower smoke suction pipe 431a and the middle smoke suction pipe 431b may be smaller than the interval D2 between the middle smoke suction pipe 431b and the upper smoke suction pipe 431c. When the interval D1 between the lower smoke suction pipe 431a and the middle smoke suction pipe 431b is smaller than the interval D2 between the middle smoke suction pipe 431b and the upper smoke suction pipe 431c, an upward airflow can be formed at a portion of the interior of the main body 410 that is closer to the first smoke suction pipe 431, and thus the amount of smoke sucked into the first smoke suction pipe 431 can be increased.

[0059] In one embodiment, the height of the second fume extraction pipe 432 may be substantially equal to the height of the upper fume extraction pipe 431 c. In other words, the distance from the table 300 to the second fume extraction pipe 432 may be substantially equal to the distance from the table 300 to the upper fume extraction pipe 431 c.

[0060] The third smoke extraction duct 433 may be arranged from the main body 410 along a third direction DR3 perpendicular to the first direction DR1 and the second direction DR2, and the fourth smoke extraction duct 434 may be arranged from the main body 410 along a fourth direction DR4 opposite to the third direction DR3. In other words, the third smoke extraction duct 433 and the fourth smoke extraction duct 434 may be separated from each other with the central portion of the main body 410 located therebetween.

[0061] The number of the third smoke extraction tubes 433 may be equal to the number of the fourth smoke extraction tubes 434. In one embodiment, the number of the third smoke extraction tubes 433 and the number of the fourth smoke extraction tubes 434 may each be one.

[0062] In one embodiment, the height of the third fume extraction pipe 433 may be substantially equal to the height of the fourth fume extraction pipe 434. In other words, the distance from the stage 300 to the third fume extraction pipe 433 may be substantially equal to the distance from the stage 300 to the fourth fume extraction pipe 434.

[0063] In one embodiment, the heights of the third and fourth smoke extraction pipes 433 and 434 can each be lower than the height of the second smoke extraction pipe 432. For example, the heights of the third and fourth smoke extraction pipes 433 and 434 can each be substantially equal to the height of the middle smoke extraction pipe 431b. In this case, the heights of the third and fourth smoke extraction pipes 433 and 434 can each be higher than the height of the lower smoke extraction pipe 431a and lower than the height of the upper smoke extraction pipe 431c.

[0064] When the number of third smoke suction tubes 433 is equal to the number of fourth smoke suction tubes 434, an upward airflow is formed in the third direction DR3 where the third smoke suction tubes 433 are located and in the fourth direction DR4 where the fourth smoke suction tubes 434 are located inside the main body 410, and the smoke can move along the air AR that moves and rises along the third direction DR3 and the fourth direction DR4 inside the main body 410, thereby being sucked in by the third smoke suction tubes 433 and the fourth smoke suction tubes 434.

[0065] The air supply nozzle 440 may be disposed on the cover 420. The air supply nozzle 440 may receive air from the air supply unit 600 and eject the air from the upper portion of the suction unit 400 toward the interior of the suction unit 400. The air injected through the air supply nozzle 440 may form a downward airflow in the upper portion of the interior of the suction unit 400. The downward airflow in the upper portion of the interior of the suction unit 400 may prevent smoke from rising to the optical unit 200, thereby preventing the optical unit 200 from being contaminated or damaged by the smoke and improving the suction capacity of the suction unit 400.

[0066] The air supply nozzles 440 may be arranged at equal intervals. In one embodiment, six air supply nozzles 440 may be arranged on the upper surface 421 of the cover 420, and adjacent air supply nozzles 440 may form an angle of approximately 60 degrees with respect to the center of the cover 420 and be arranged at equal intervals.

[0067] The air supply nozzle 440 may be arranged on the upper surface 421 of the cover 420. Arranging the air supply nozzle 440 on the upper surface 421 of the cover 420 allows air ejected from the air supply nozzle 440 to be uniformly supplied to the interior of the suction unit 400, compared to a case where the air supply nozzle 440 is arranged on the sidewall of the cover 420. When the air supply nozzle 440 is arranged on the sidewall of the cover 420, air is ejected horizontally from the air supply nozzle 440 into the interior of the suction unit 400, and a pressure difference is generated between the portion of the sidewall of the cover 420 where the air supply nozzle 440 is arranged and the portion of the sidewall of the cover 420 where the air supply nozzle 440 is not arranged. Consequently, a vortex may be formed in the upper portion of the interior of the suction unit 400. However, in the case where the air supply nozzle 440 is arranged on the upper surface 421 of the cover 420, since the air is ejected from the air supply nozzle 440 to the inside of the suction unit 400 in the vertical direction and the air is diffused, no pressure difference is generated between the portion of the upper surface 421 of the cover 420 where the air supply nozzle 440 is arranged and the portion of the upper surface 421 of the cover 420 where the air supply nozzle 440 is not arranged, and a vortex may not be formed in the upper part of the inside of the suction unit 400.

[0068] Each of the air supply nozzles 440 may include an air injection portion 441 extending horizontally and an air ejection portion 442 extending vertically. For example, the air injection portion 441 may extend in the first direction DR1 or the second direction DR2, and the air ejection portion 442 may extend from the cover 420 of the suction unit 400 toward the body 410 of the suction unit 400. Air is injected horizontally from the air supply unit 600 through the air injection portion 441, and air is ejected vertically toward the interior of the suction unit 400 through the air ejection portion 442. Compared to a case where each of the air supply nozzles 440 has a straight shape, by having each of the air supply nozzles 440 have a bent shape, it is possible to prevent the velocity of the air ejected from the air supply nozzles 440 from increasing above a certain level.

[0069] The pressure of the air injected from the air supply unit 600 into the air supply nozzle 440 may be greater than or equal to about 0 KPa and less than or equal to about 4 KPa. In the case where the pressure of the air is greater than about 4 KPa, since a strong downward airflow is formed inside the suction unit 400 by the air injected from the air supply nozzle 440, the pressure of the upper portion of the suction unit 400 may become lower than the pressure of the lower portion of the suction unit 400, and thus an upward airflow is formed inside the suction unit 400, so that smoke generated when performing laser processing may move to the upper portion of the suction unit 400.

[0070] The air curtain forming member 450 may be disposed between the body 410 and the air supply nozzle 440 inside the cover 420. The air curtain forming member 450 may function to change the direction of air ejected from the air supply nozzle 440 in a vertical direction to a horizontal direction.

[0071] The air curtain forming member 450 can have a generally circular shape in plan view, corresponding to the sidewalls of the cover 420. Furthermore, the air curtain forming member 450 can have a U-shaped cross-section with an open top. Therefore, air ejected vertically from the air supply nozzle 440 toward the air curtain forming member 450 can fill the air curtain forming member 450. The air entering the air curtain forming member 450 can then be transformed horizontally and move toward the center of the cover 420, forming a vertically descending airflow. The velocity of the air ejected from the air supply nozzle 440 is reduced by the air curtain forming member 450, thereby forming an air curtain above the suction unit 400. This air curtain acts as a barrier, preventing airflow within the main body 410 from moving through the cover 420 toward the upper portion of the suction unit 400. Thus, the air curtain prevents smoke generated during laser processing of the object 20 from traveling toward the upper portion of the suction unit 400 along with the rising airflow.

[0072] The particle suction member 460 may be disposed on the sidewall 412 of the body 410. The particle suction member 460 may suction particles generated when the object 20 is laser-processed.

[0073] In one embodiment, the particle suction member 460 may be arranged along the second direction DR2 from the body 410 . For example, the particle suction member 460 may be arranged below the second fume suction pipe 432 .

[0074] In one embodiment, the smoke and particles generated during laser processing of the object 20 can be extracted substantially simultaneously by the smoke extraction pipe 430 and the particle extraction member 460, respectively. In another embodiment, the smoke and particles generated during laser processing of the object 20 can be extracted separately by the smoke extraction pipe 430 and the particle extraction member 460, respectively. For example, the particles can be extracted by the particle extraction member 460 after the smoke is extracted by the smoke extraction pipe 430.

[0075] Industrial Availability

[0076] The laser processing apparatus according to an exemplary embodiment of the present invention may be applied to a manufacturing process of a display device included in a computer, a notebook, a mobile phone, a smartphone, a smartbook, a PMP, a PDA, an MP3 player, and the like.

[0077] Although the laser processing apparatus according to an exemplary embodiment of the present invention has been described above with reference to the accompanying drawings, the described embodiment is exemplary and can be modified and changed by a person skilled in the art without departing from the technical idea of ​​the present invention as described in the appended claims.

[0078] Explanation of symbols

[0079] 10: Laser processing device 20: Object

[0080] 100: Laser generating unit 300:

[0081] 400: Suction unit 410: Main body

[0082] 420: Cover 430: Smoke extraction tube

[0083] 431: First smoke suction pipe 431a: Lower smoke suction pipe

[0084] 431b: Middle smoke extraction pipe 431c: Upper smoke extraction pipe

[0085] 432: Second smoke extraction pipe 433: Third smoke extraction pipe

[0086] 434: Fourth smoke suction pipe 440: Air supply nozzle

[0087] 450: Air curtain forming member 460: Particle suction member

Claims

1. Laser processing equipment, comprising: a laser generating unit for generating a laser beam; a stage on which an object to be processed by the laser beam is placed; as well as a suction unit disposed between the laser generating unit and the stage and including a main body and a plurality of fume suction pipes disposed on a side wall of the main body and sucking fume generated by processing the object, Wherein, the plurality of smoke extraction pipes include: a first smoke extraction pipe arranged along a first direction from the main body; and a second smoke extraction pipe, arranged from the main body along a second direction opposite to the first direction; wherein the number of the first smoke extraction pipes is greater than the number of the second smoke extraction pipes, The first smoke extraction pipe comprises: lower smoke extraction pipe; a middle smoke extraction pipe, arranged separately from the lower smoke extraction pipe and on an upper side of the lower smoke extraction pipe; and The upper smoke extraction pipe is arranged separately from the middle smoke extraction pipe on the upper side of the middle smoke extraction pipe.

2. The laser processing device according to claim 1, wherein: The number of the first smoke extraction pipes is three.

3. The laser processing device according to claim 1, wherein The interval between the lower smoke extraction pipe and the middle smoke extraction pipe is smaller than the interval between the middle smoke extraction pipe and the upper smoke extraction pipe.

4. The laser processing device according to claim 1, wherein The height of the second smoke extraction pipe is equal to the height of the upper smoke extraction pipe.

5. The laser processing device according to claim 1, wherein The number of the second smoke extraction pipe is one.

6. The laser processing device according to claim 1, wherein The plurality of smoke extraction pipes further comprises: a third smoke extraction pipe arranged from the main body along a third direction perpendicular to the first direction and the second direction; and The fourth smoke extraction pipe is arranged from the main body along a fourth direction opposite to the third direction.

7. The laser processing device according to claim 6, wherein: The number of the third smoke extraction pipes is equal to the number of the fourth smoke extraction pipes.

8. The laser processing device according to claim 6, wherein: Each of a height of the third fume extraction pipe and a height of the fourth fume extraction pipe is lower than a height of the second fume extraction pipe.

9. The laser processing device according to claim 1, wherein The suction unit further comprises: a cover covering an upper surface of the main body; and A plurality of air supply nozzles are arranged on the upper surface of the cover.

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