How to measure attractiveness

Abstract

The present invention provides a method for measuring suction force, which can easily measure the suction force exerted by a suction source on an equipment side on an exhaust duct. The method for measuring suction force comprises the following steps: a measuring step (ST1), in which the rotation of the impeller of the exhaust fan, which is connected to an exhaust port and an exhaust duct and is provided on a processing device, is stopped by a motor of the exhaust fan, and the rotation speed of the impeller of the exhaust fan, which is rotated by wind generated by the suction force exerted by the suction source of the equipment provided with the processing device on the exhaust duct connected to the processing device, is measured; and a judging step (ST2), in which, when the rotation speed measured by the measuring step (ST1) is lower than an arbitrary threshold value, it is judged that the suction force of the exhaust duct is insufficient.

Description

Technical Field

[0001] The present invention relates to a method for measuring attractiveness. Background Art

[0002] In the case of a processing device that performs processing such as grinding or cutting, processing chips are mixed with the atomized processing cooling water provided during processing in the processing chamber and scattered inside. Therefore, the scattered mist and processing chips are sucked from the exhaust port formed in the wall of the processing chamber to the pipe on the equipment side connected to the processing device, and discharged to the outside of the processing device. In order to reliably exhaust the mist, the following device is provided: an exhaust fan is provided between the exhaust port and the equipment side pipe, and the mist is reliably discharged by both the exhaust fan and the suction source on the equipment side (for example, refer to patent document 1).

[0003] Patent Document 1: Japanese Patent Application Publication No. 2000-124165

[0004] However, in the device shown in Patent Document 1, when the number of processing devices suctioned by the suction source on the equipment side increases or a specific processing device needs to use a large amount of suction force, there is a problem that the suction force generated in the exhaust duct decreases and mist cannot be discharged normally.

[0005] Therefore, it is desirable to measure the suction force in the exhaust duct. However, in order to measure the suction force in the exhaust duct, a dedicated anemometer must be installed in the exhaust duct, which tends to increase the time and effort required to measure the suction force. Summary of the invention

[0006] The present invention has been made in view of the above-mentioned problems, and an object of the present invention is to provide a method for measuring the suction force exerted by a suction source on a facility side on an exhaust duct in a simple manner.

[0007] In order to solve the above-mentioned problems and achieve the purpose, the method for measuring attraction of the present invention measures the attraction of an exhaust duct, which connects a processing device with a suction source of an equipment in which the processing device is installed, and is characterized in that the processing device comprises: a chuck worktable, which holds the workpiece; a processing unit, which processes the workpiece held by the chuck worktable; an exhaust port, which discharges the mist generated in the processing area equipped with the processing unit to the outside; and an exhaust fan, which is connected to the exhaust port and the exhaust duct and is installed in the processing device, and the exhaust fan comprises: a motor, which rotates the exhaust fan; and a sensor, which detects the rotation speed of the exhaust fan. The method for measuring attraction comprises the following steps: a measuring step, which stops the rotation of the exhaust fan performed by the motor, and measures the rotation speed of the exhaust fan rotated by the wind generated by the attraction of the exhaust duct; and a judging step, which judges that the attraction of the exhaust duct is insufficient when the rotation speed measured by the measuring step is lower than an arbitrary threshold value.

[0008] In the method for measuring the suction force, in the determination step, when it is determined that the suction force of the exhaust duct is insufficient, the rotation speed of the exhaust fan is increased to promote the exhaust fan to discharge the mist.

[0009] The present invention has the effect of being able to simply measure the suction force of a suction source on the exhaust duct on the equipment side. BRIEF DESCRIPTION OF THE DRAWINGS

[0010] Figure 1 This is a perspective view showing a configuration example of a processing device that implements the method for measuring attractive force according to the first embodiment.

[0011] Figure 2 It is shown in cross section Figure 1 A side view of the main parts of the processing device is shown.

[0012] Figure 3 It is shown Figure 2 A stereoscopic view of an impeller of an exhaust fan of a processing device is shown.

[0013] Figure 4 This is a flowchart showing the flow of the method for measuring attractive force according to the first embodiment.

[0014] Description of symbols

[0015] 1: processing device; 4: processing area; 8: exhaust port; 10: chuck table; 20: cutting unit (processing unit); 70: exhaust fan; 72: motor; 73: sensor; 200: workpiece; 300: factory equipment (equipment); 301: suction source; 302: exhaust duct; ST1: measurement step; ST2: judgment step. DETAILED DESCRIPTION

[0016] The mode (embodiment) for implementing the present invention is described in detail with reference to the accompanying drawings. The present invention is not limited to the contents described in the following embodiments. In addition, the structural elements described below include substantially the same structural elements that can be easily thought of by those skilled in the art. In addition, the structures described below can be appropriately combined. In addition, various omissions, substitutions or changes in the structure can be made within the scope of the gist of the present invention.

[0017] [Implementation method 1]

[0018] The method for measuring attractive force according to the first embodiment of the present invention will be described with reference to the drawings. Figure 1 This is a perspective view showing a configuration example of a processing device that implements the method for measuring attractive force according to the first embodiment. Figure 2 It is shown in cross section Figure 1 A side view of the main parts of the processing device is shown. Figure 3 It is shown Figure 2 A stereoscopic view of an impeller of an exhaust fan of a processing device is shown. Figure 4 This is a flowchart showing the flow of the method for measuring attractive force according to the first embodiment.

[0019] (Processing equipment)

[0020] The method for measuring the attractive force of the first embodiment is as follows: Figure 1 The processing device 1 shown is used for implementation. Figure 1 The processing device 1 shown is installed in a factory facility 300 as an equipment. The factory facility 300 is provided with a plurality of Figure 1 The illustrated processing device 1. The factory equipment 300 has a suction source 301 connected to the processing device 1 and an exhaust duct 302 connecting the processing device 1 and the suction source 301. The suction source 301 is connected to the exhaust duct 302, and the atmosphere gas in the exhaust duct 302 is discharged to the outside of the processing device 1. The suction source 301 is composed of, for example, a vacuum pump, etc. The exhaust duct 302 is formed in a cylindrical shape.

[0021] Figure 1 The processing device 1 shown is a cutting device for cutting (equivalent to processing) a workpiece 200. In the first embodiment, the workpiece 200 is a wafer such as a disc-shaped semiconductor wafer or an optical device wafer using silicon, sapphire, gallium, etc. as a base material. The workpiece 200 has devices formed on the front surface 201 in the area divided in a grid shape by a plurality of predetermined dividing lines formed in a grid shape.

[0022] In addition, the workpiece 200 of the present invention may be a so-called TAIKO (registered trademark) wafer having a thin central portion and a thick wall portion formed at the outer periphery. In addition to the wafer, it may also be a rectangular package substrate having a plurality of resin-sealed devices, a ceramic substrate, a ferrite substrate, or a substrate containing at least one of nickel and iron, a glass substrate, etc. In the first embodiment, the back side 202 of the workpiece 200 is adhered to an adhesive tape 204 having an annular frame 203 mounted on the outer periphery, and is supported by the annular frame 203.

[0023] Figure 1 The processing device 1 shown is a cutting device that uses a chuck table 10 to hold a workpiece 200 and uses a cutting tool 21 to cut along a predetermined dividing line. Figure 1 As shown, the processing device 1 comprises: a chuck table 10, which uses a holding surface 11 to attract and hold the workpiece 200; a cutting unit 20 as a processing unit, which uses a cutting tool 21 to cut the workpiece 200 held by the chuck table 10; a photographing unit 30, which photographs the workpiece 200 held by the chuck table 10; and a control unit 100.

[0024] In addition, if Figure 1 As shown, the processing device 1 has a moving unit that moves the chuck table 10 and the cutting unit 20 relatively. The moving unit has: an X-axis moving unit that feeds the chuck table 10 along the X-axis direction parallel to the horizontal direction and the short side direction of the device body 2; a Y-axis moving unit that indexes the cutting unit 20 along the Y-axis direction parallel to the horizontal direction and the length direction of the device body 2 and perpendicular to the X-axis direction; a Z-axis moving unit that cuts and feeds the cutting unit 20 along the Z-axis direction parallel to the vertical direction, and the vertical direction is perpendicular to both the X-axis direction and the Y-axis direction; and a rotation moving unit that rotates the chuck table 10 around an axis parallel to the Z-axis direction, and feeds the chuck table 10 along the X-axis direction together with the chuck table 10 through the X-axis moving unit.

[0025] The X-axis moving unit moves the chuck table 10 in the X-axis direction as the processing feed direction, so that the chuck table 10 and the cutting unit 20 perform processing feed relative to each other in the X-axis direction. The X-axis moving unit moves the chuck table 10 in the X-axis direction between the loading and unloading area 3 where the workpiece 200 is loaded and unloaded and the processing area 4 where the workpiece 200 held by the chuck table 10 is cut by the cutting unit 20.

[0026] The Y-axis moving unit moves the cutting unit 20 in the Y-axis direction as the indexing feed direction, thereby performing indexing feed relative to the chuck table 10 and the cutting unit 20 in the Y-axis direction. The Z-axis moving unit moves the cutting unit 20 in the Z-axis direction as the plunge feed direction, thereby performing plunge feed relative to the chuck table 10 and the cutting unit 20 in the Z-axis direction.

[0027] The X-axis moving unit, the Y-axis moving unit and the Z-axis moving unit have: a known ball screw that is arranged to rotate freely around the axis; a known motor that rotates the ball screw around the axis; and a known guide rail, which supports the chuck table 10 or the cutting unit 20 so that it can move freely along the X-axis direction, the Y-axis direction or the Z-axis direction.

[0028] The chuck table 10 is in the shape of a disk, and a holding surface 11 for holding the workpiece 200 is formed of porous ceramics or the like. In addition, the chuck table 10 is configured to be movable in the X-axis direction in the loading and unloading area 3 and the processing area 4 by an X-axis moving unit, and is configured to be rotatable around an axis parallel to the Z-axis direction by a rotation moving unit. The chuck table 10 is connected to a vacuum suction source (not shown) and is sucked by the vacuum suction source, thereby sucking and holding the workpiece 200 placed on the holding surface 11. In the first embodiment, the chuck table 10 sucks and holds the back side 202 of the workpiece 200 via the adhesive tape 204.

[0029] The cutting unit 20 is disposed in the processing area 4 and is a cutting member on which a cutting tool 21 for cutting a workpiece 200 held by the chuck table 10 is detachably mounted. The cutting unit 20 is provided to be movable in the Y-axis direction by a Y-axis moving unit relative to the workpiece 200 held by the chuck table 10, and is provided to be movable in the Z-axis direction by a Z-axis moving unit. The cutting unit 20 can position the cutting tool 21 at any position on the holding surface 11 of the chuck table 10 by the Y-axis moving unit and the Z-axis moving unit.

[0030] The cutting unit 20 includes: a spindle housing 22, which is configured to be movable in the Y-axis direction and the Z-axis direction through a Y-axis moving unit and a Z-axis moving unit; a spindle 23, which is arranged in the spindle housing 22 in a manner that allows it to rotate around an axis and is rotated by an electric motor not shown in the figure, and a cutting tool 21 is installed at the front end; and a cutting water supply nozzle not shown in the figure, which supplies cutting water to the cutting tool 21.

[0031] The cutting tool 21 is an extremely thin cutting tool having a roughly annular shape. In the first embodiment, the cutting tool 21 is a so-called hub-shaped tool having an annular circular base and an annular cutting edge, and the cutting edge is arranged on the outer periphery of the circular base to cut the workpiece 200. The cutting edge is composed of abrasive grains such as diamond or CBN (Cubic Boron Nitride) and a bonding material (bonding material) such as metal or resin, and is formed into a predetermined thickness. In addition, in the present invention, the cutting tool 21 can also be a so-called shim tool consisting only of a cutting edge 212.

[0032] The main shaft 23 is rotated about the axis by the motor, thereby rotating the cutting tool 21. Since the cutting tool 21 is rotated about the axis by the main shaft 23, the cutting water is scattered together with the cutting chips generated by cutting the workpiece 200 from the lower end of the cutting edge that cuts the workpiece 200. In addition, the rotation speed of the main shaft 23 is a high speed of, for example, 30000 rpm or more and 100000 rpm or less, so the cutting water scattered from the lower end of the cutting edge of the cutting tool 21 is scattered in a mist state.

[0033] The imaging unit 30 captures the workpiece 200 held by the holding surface 11 of the chuck table 10. The imaging unit 30 has an imaging element that captures the area to be divided of the workpiece 200 held by the chuck table 10 before cutting. The imaging element is, for example, a CCD (Charge-Coupled Device) imaging element or a CMOS (Complementary MOS) imaging element. The imaging unit 30 captures the workpiece 200 held by the chuck table 10 to obtain an image for performing alignment, i.e., aligning the predetermined dividing line of the workpiece 200 and the cutting tool 21, and outputs the obtained image to the control unit 100.

[0034] The control unit 100 controls each of the above-mentioned units of the processing device 1 so that the processing device 1 performs processing operations on the workpiece 200. In addition, the control unit 100 is a computer, and the control unit 100 has: an operation processing device having a microprocessor such as a CPU (Central Processing Unit); a storage device having a memory such as a ROM (Read Only Memory) or a RAM (Random Access Memory); and an input / output interface device. The operation processing device of the control unit 100 performs operation processing according to the computer program stored in the storage device, and outputs the control signal for controlling the processing device 1 to the above-mentioned structural elements of the processing device 1 via the input / output interface device.

[0035] In addition, the control unit 100 is connected to a display unit, which is composed of a liquid crystal display device that displays the state and image of the processing operation, and an input unit that is used when the operator registers the processing content information, etc. The input unit is composed of at least one of an external input device such as a touch panel and a keyboard provided on the display unit.

[0036] In addition, the processing device 1 has: an X-axis direction position detection unit (not shown) for detecting the position of the chuck table 10 in the X-axis direction; a Y-axis direction position detection unit (not shown) for detecting the position of the cutting unit 20 in the Y-axis direction; and a Z-axis direction position detection unit for detecting the position of the cutting unit 20 in the Z-axis direction. The X-axis direction position detection unit and the Y-axis direction position detection unit can be composed of a linear scale and a reading head parallel to the X-axis direction or the Y-axis direction. The Z-axis direction position detection unit detects the position of the cutting unit 20 in the Z-axis direction by a pulse of a motor. The X-axis direction position detection unit, the Y-axis direction position detection unit, and the Z-axis direction position detection unit output the position of the chuck table 10 in the X-axis direction, the Y-axis direction, or the Z-axis direction of the cutting unit 20 to the control unit 100. In addition, in the first embodiment, each position is determined by the distance from the predetermined reference position in the X-axis direction, the Y-axis direction, and the Z-axis direction.

[0037] In addition, if Figure 1 As shown, the processing device 1 includes: a box elevator 40, which carries a box 41 for storing the workpiece 200 before and after cutting, and moves the box 41 along the Z-axis direction; a cleaning unit 50, which cleans the workpiece 200 after cutting; and a conveying unit 60, which allows the workpiece 200 to enter and exit relative to the box 41 and conveys the workpiece 200.

[0038] The processing device 1 also includes: a plurality of external side walls 5 that surround the upper portion of the device body 2; and a top wall 6 that is connected to the upper ends of the plurality of external side walls 5 and closes the upper openings of the plurality of external side walls 5. The external side walls 5 surround the chuck table 10, the cutting unit 20, the imaging unit 30, the moving unit, the cassette elevator 40, the cleaning unit 50, and the conveying unit 60 and serve as the side walls of the processing device 1 itself. The top wall 6 closes the upper openings of the plurality of external side walls 5 and serves as the top plate of the processing device 1 itself.

[0039] In addition, if Figure 2 As shown, the processing device 1 has: a processing chamber wall 7, which is arranged within a plurality of external side walls 5 and surrounds the outside of the processing area 4 together with the external side walls 5 and the top wall 6 to suppress the diffusion of the mist of the cutting water; an exhaust port 8, which discharges the mist generated in the processing area 4 equipped with the cutting unit 20 to the outside; a connecting pipe 9, which is connected to the exhaust port 8 and the exhaust pipe 302; and an exhaust fan 70, which is arranged in the processing device 1.

[0040] The exhaust port 8 opens on the processing chamber wall 7. The connecting pipe 9 is formed in a cylindrical shape, one end of which is connected to the exhaust port 8, and the other end is connected to one end of the exhaust pipe 302. The exhaust fan 70 has: an impeller 71 ( Figure 3 as shown), which is arranged in the connecting pipe 9; a motor 72, which rotates the impeller 71 of the exhaust fan 70; and a sensor 73, which detects the rotation speed of the impeller 71 of the exhaust fan 70.

[0041] The impeller 71 of the exhaust fan 70 is disposed in the connection duct 9 connected to the exhaust port 8 and the exhaust duct 302, and is connected to the exhaust port 8 and the exhaust duct 302. The impeller 71 is rotatably arranged around the axis. The motor 72 rotates the impeller 71 around the axis. In the first embodiment, the exhaust fan 70 is a so-called DC (Direct Current) fan, and the motor 72 is supplied with DC power to rotate the impeller 71.

[0042] The sensor 73 detects the rotation speed of the impeller 71 and outputs the detection result to the control unit 100. The sensor 73 can use a Hall sensor that detects the rotation speed by changes in the magnetic field of a magnet or a pulse sensor that detects a voltage generated on the motor 72 side by rotation.

[0043] The motor 72 rotates the impeller 71 about the axis, so that the exhaust fan 70 exhausts the atmosphere gas in the processing area 4 , that is, the mist, through the exhaust port 8 via the connecting duct 9 and the exhaust duct 302 .

[0044] In addition, the control unit 100 of the processing device 1 has a storage unit 101 and a determination unit 102. The storage unit 101 stores a set rotation speed 401 and an arbitrary threshold value 402 of the rotation speed. In addition, the rotation speed of the impeller 71 of the exhaust fan 70 and the wind speed in the exhaust duct 302 correspond to each other and are proportional to each other in Embodiment 1. That is, in Embodiment 1, when the rotation speed of the exhaust fan 70 increases, the wind speed in the exhaust duct 302 increases, and when the rotation speed of the exhaust fan 70 decreases, the wind speed in the exhaust duct 302 decreases.

[0045] In a state where the rotation of the impeller 71 of the exhaust fan 70 by the motor 72 is stopped, a dedicated anemometer is provided in the exhaust duct 302 to confirm that the wind speed of the exhaust duct 302 is greater than the wind speed 502 required for the processing operation of the processing device 1 specified in advance. Furthermore, in a state where the wind speed 502 is greater than the specified value, the rotation of the impeller 71 of the exhaust fan 70 by the motor 72 is stopped, the rotation of the impeller 71 rotated by the suction force of the exhaust duct 302 is measured, and the measured rotation speed or the measurement number obtained by appropriately adding or subtracting the measured rotation speed is set as an arbitrary threshold value 402.

[0046] In addition, when the wind speed of the exhaust duct 302 can be easily adjusted, a dedicated anemometer is provided in the exhaust duct 302 and adjusted so that the wind speed of the exhaust duct 302 becomes the minimum wind speed required for the processing operation of the processing device 1. In addition, the rotation of the impeller 71 of the exhaust fan 70 by the motor 72 may be stopped, the rotation of the impeller 71 rotated by the suction force of the exhaust duct 302 may be measured, and the measured rotation speed may be set as the threshold value 402.

[0047] The process of setting the arbitrary threshold value 402 is performed, for example, in a state where the exhaust duct 302 is connected to the suction source 301 of the factory equipment 300 after the processing device 1 is installed in the factory.

[0048] When the rotation of the impeller 71 of the exhaust fan 70 by the motor 72 is stopped and the rotation speed of the impeller 71 of the exhaust fan 70 rotated by the wind generated by the suction force of the suction source 301 on the exhaust duct 302 is lower than an arbitrary threshold value 402, the determination unit 102 determines that the suction force of the suction source 301 on the exhaust duct 302 is insufficient. When the rotation of the impeller 71 of the exhaust fan 70 by the motor 72 is stopped and the rotation speed of the impeller 71 of the exhaust fan 70 rotated by the wind generated by the suction force of the suction source 301 on the exhaust duct 302 is greater than an arbitrary threshold value 402, the determination unit 102 determines that the suction force of the suction source 301 on the exhaust duct 302 is sufficient.

[0049] In addition, the storage unit 101 stores the determination result of the determination unit 102. The determination result of the determination unit 102 is stored in a second predetermined storage area set in advance in the storage device of the control unit 100. Only one determination result of the determination unit 102 is stored in the predetermined storage area, and when a new determination result is written by the calculation processing device, the already written determination result disappears. That is, with respect to the determination result of the determination unit 102, the latest determination result is always overwritten in the predetermined storage area by the calculation processing device.

[0050] In addition, when the determination result of the determination unit 102 stored in the storage unit 101 is that the suction force of the suction source 301 on the exhaust duct 302 is insufficient, the determination unit 102 makes the rotation speed of the impeller 71 of the exhaust fan 70 higher by a predetermined rotation speed than the set rotation speed 401 during the processing operation, and rotates the impeller 71 of the exhaust fan 70. When the determination result of the determination unit 102 stored in the storage unit 101 is that the suction force of the suction source 301 on the exhaust duct 302 is sufficient, the determination unit 102 does not perform the process of increasing the rotation speed of the impeller 71 of the exhaust fan 70 during the processing operation.

[0051] The function of the storage unit 101 is realized by a storage device, and the function of the determination unit 102 is realized by a processing unit executing a computer program stored in the storage device.

[0052] The method for measuring the suction force of the first embodiment is performed periodically or at any time when there are many defects in the processing results of the processing device 1. The method for measuring the suction force of the first embodiment is a method for measuring the suction force of the exhaust duct 302 connecting the processing device 1 and the suction source 301 of the factory equipment 300, such as Figure 4 As shown, there are a measuring step ST1 and a determining step ST2.

[0053] The measurement step ST1 is a step of stopping the rotation of the impeller 71 of the exhaust fan 70 by the motor 72, and measuring the rotation speed of the impeller 71 of the exhaust fan 70 that is rotated by the wind generated by the suction force of the suction source 301 on the exhaust duct 302. In the measurement step ST1, the control unit 100 of the processing device 1 stops the rotation of the impeller 71 by the motor 72 of the exhaust fan 70. Then, the impeller 71 of the exhaust fan 70 is rotated by the wind generated by the suction force of the suction source 301 on the exhaust duct 302. In the measurement step ST1, the sensor 73 detects the rotation speed of the impeller 71 of the exhaust fan 70, and outputs the detection result to the control unit 100.

[0054] The determination step ST2 is a step of determining that the suction force of the suction source 301 on the exhaust duct 302 is insufficient when the rotation speed of the impeller 71 measured in the measurement step ST1 is lower than an arbitrary threshold value 402. In the determination step ST2, the determination unit 102 of the control unit 100 compares the rotation speed of the impeller 71 as the detection result of the sensor with the predetermined threshold value 402. In the determination step ST2, when the rotation speed of the impeller 71 as the detection result of the sensor is lower than the predetermined threshold value 402, the determination unit 102 of the control unit 100 determines that the suction force of the suction source 301 on the exhaust duct 302 is insufficient. In the determination step ST2, when the rotation speed of the impeller 71 as the detection result of the sensor is greater than or equal to the predetermined threshold value 402, the determination unit 102 of the control unit 100 determines that the suction force of the suction source 301 on the exhaust duct 302 is sufficient. In the determination step ST2, the control unit 100 stores the determination result of the determination unit 102 in the storage unit 101 and ends the method for determining the suction force.

[0055] The operator registers the processing content information in the control unit 100, places the box 51 storing the workpiece 200 on the box elevator 40, and when the control unit 100 receives the start instruction of the processing action from the operator, the processing device 1 of the above structure starts the processing action. When the processing action is started, in the processing device 1, the determination unit 102 of the control unit 100 refers to the determination result of the determination unit 102 of the storage unit 101, and when the determination result of the determination unit 102 is that the suction force of the suction source 301 to the exhaust duct 302 is insufficient, the impeller 71 of the exhaust fan 70 is rotated at a speed higher than the set speed 401. In addition, in the processing device 1, when the determination result of the determination unit 102 is that the suction force of the suction source 301 to the exhaust duct 302 is sufficient, the impeller 71 of the exhaust fan 70 is rotated at the set speed 401. In this way, in the processing device 1 and the method for determining the suction force, when it is determined in the determination step ST2 that the suction force of the suction source 301 on the exhaust duct 302 is insufficient, the rotation speed of the impeller 71 of the exhaust fan 70 is increased compared to the set rotation speed 401, thereby promoting the discharge of mist by the impeller 71 of the exhaust fan 70.

[0056] In addition, while the processing device 1 supplies cutting water from the cutting water supply nozzle, it rotates the spindle 23 around the axis to rotate the cutting tool 21, and the conveying unit 60 takes out a workpiece 200 from the box 51 and places the back side 202 on the holding surface 11 of the chuck worktable 10 through the adhesive tape 204.

[0057] The processing device 1 holds the workpiece 200 on the holding surface 11 by suction via the adhesive tape 204, moves the chuck table 10 to below the imaging unit 30 by the moving unit, and performs alignment by imaging the workpiece 200 held by the chuck table 10 by the imaging unit 30.

[0058] The processing device 1 relatively moves the cutting tool 21 and the workpiece 200 along the predetermined dividing line by the moving unit according to the processing content information, and supplies cutting water from the cutting water supply nozzle, so that the cutting tool 21 cuts into the predetermined dividing line of the workpiece 200 until it reaches the adhesive tape 204. When all the predetermined dividing lines of the workpiece 200 are cut, the processing device 1 transports the workpiece 200 to the cleaning unit 50 by the transport unit 60, and after being cleaned by the cleaning unit 50, the workpiece 200 is transported into the box 51 by the transport unit 60.

[0059] As described above, in the method for determining the attraction of the first embodiment, the rotation of the impeller 71 of the exhaust fan 70 by the motor 72 is stopped, and the rotation speed of the impeller 71 of the exhaust fan 70 rotated by the wind generated only by the attraction of the suction source 301 to the exhaust duct 302 is measured by the sensor 73. Therefore, in the method for determining the attraction of the first embodiment, the attraction of the exhaust duct 302 of the suction source 301 on the factory equipment 300 side can be measured based on the rotation speed of the impeller 71 of the exhaust fan 70, so it is not necessary to set a measuring device such as a wind speed sensor in the exhaust duct 302, which is efficient. As a result, the method for measuring the attraction of the first embodiment has the effect that the attraction of the suction source 301 on the factory equipment 300 side to the exhaust duct 302 can be easily measured.

[0060] In addition, in the method for measuring the suction force of the first embodiment, when it is determined in the determination step ST2 that the suction force of the suction source 301 alone on the exhaust duct 302 is insufficient, the rotation speed of the impeller 71 of the exhaust fan 70 is increased compared to the set rotation speed 401 during the processing operation, thereby promoting the exhaust fan 70 to discharge the mist in the processing area 4. As a result, the method for measuring the suction force of the first embodiment promotes the discharge of the mist in the processing area 4, and thus can suppress the occurrence of processing defects of the workpiece 200.

[0061] In addition, the present invention is not limited to the above-mentioned embodiment. That is, it can be implemented by various deformations within the scope of the main purpose of the present invention. In the first embodiment, the processing device 1 is a cutting device for cutting the workpiece 200, but in the present invention, it is not limited to a cutting device, and it can also be a grinding device for grinding (equivalent to processing) the workpiece 200, or a grinding device for grinding (equivalent to processing) the workpiece 200.

Claims

1. A method for measuring attraction, wherein the attraction of an exhaust duct is measured, wherein the exhaust duct connects a processing device to an attraction source of a device in which the processing device is installed, characterized in that: The processing device has: A chuck table, which holds the workpiece; A processing unit that processes a workpiece held by the chuck table; an exhaust port for discharging mist generated in a processing area in which the processing unit is installed to the outside; and an exhaust fan connected to the exhaust port and the exhaust duct and provided in the processing device, The exhaust fan has: a motor that rotates the exhaust fan; and A sensor detects the rotation speed of the exhaust fan. The method for measuring attraction has the following steps: a measuring step of stopping the rotation of the exhaust fan by the motor and measuring the rotation speed of the exhaust fan rotated by the wind generated by the suction force of the exhaust duct; as well as The determining step is to determine that the suction force of the exhaust duct is insufficient when the rotation speed measured in the measuring step is lower than an arbitrary threshold value.

2. The method for measuring attractiveness according to claim 1, characterized in that: In the determination step, when it is determined that the suction force of the exhaust duct is insufficient, the rotation speed of the exhaust fan is increased to promote the exhaust fan to discharge the mist.

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