Apparatus for manufacturing a display device

Abstract

The present application relates to an apparatus for manufacturing a display device. In the apparatus for manufacturing a display device, the apparatus has a mask assembly, the mask assembly comprising: a mask frame including an opening; a plurality of first supports, the plurality of first supports are spaced apart from each other on the mask frame, and each includes a first central portion intersecting the opening in a first direction and a first protrusion protruding from the first central portion in a direction intersecting the first direction; a plurality of second supports, the plurality of second supports are spaced apart from each other on the mask frame, and each includes a second central portion intersecting the opening in a second direction intersecting the first direction and a second protrusion protruding from the second central portion in a direction intersecting the second direction; and a mask sheet, comprising a plurality of pattern holes and arranged above the mask frame to be supported by the plurality of first supports and the plurality of second supports.

Description

[0001] CROSS-REFERENCE TO RELATED APPLICATIONS

[0002] This application claims priority to and the benefit of Korean Patent Application No. 10-2020-0001576 filed on January 6, 2020, in the Korean Intellectual Property Office, the disclosure of which is incorporated herein by reference in its entirety. Technical Field

[0003] Aspects of one or more embodiments are directed to a method and an apparatus for manufacturing a display device. Background Art

[0004] With the development of the information society, the demand for display devices for displaying images has increased. The field of display devices has rapidly developed into flat panel display (FPD) devices, which are thin, light and can have a relatively large display area, replacing cathode ray tube displays (CRT displays) with a relatively large volume. Examples of FPD devices include liquid crystal display (LCD) devices, plasma display panels (PDPs), organic light emitting diode (OLED) displays, and electrophoretic display (EPD) devices.

[0005] Recently, head mounted displays (HMDs) have been developed that a user wears on his or her head to experience augmented reality (AR) or virtual reality (VR).

[0006] The above information disclosed in this Background section is only for enhancement of understanding of the background technology and therefore the information discussed in this Background section does not necessarily constitute prior art. Summary of the invention

[0007] One or more embodiments include a method and an apparatus for manufacturing a display device, which is capable of manufacturing a display device including various types of display areas.

[0008] Additional aspects will be set forth in part in the description which follows and, in part, will be obvious from the description, or may be learned by practice of the presented exemplary embodiments of the disclosure.

[0009] According to one or more exemplary embodiments, an apparatus for manufacturing a display device includes a mask assembly, the mask assembly including: a mask frame including an opening; a plurality of first supports, the plurality of first supports being spaced apart from each other on the mask frame and each including a first central portion intersecting the opening in a first direction and a first protrusion protruding from the first central portion in a direction intersecting the first direction; a plurality of second supports, the plurality of second supports being spaced apart from each other on the mask frame and each including a second central portion intersecting the opening in a second direction intersecting the first direction and a second protrusion protruding from the second central portion in a direction intersecting the second direction; and a mask sheet including a plurality of pattern holes and being arranged above the mask frame to be supported by the plurality of first supports and the plurality of second supports, wherein the plurality of first supports adjacent to each other and the plurality of second supports adjacent to each other shield a portion of the plurality of pattern holes to define a deposition area.

[0010] According to some exemplary embodiments, the first protrusion may include: a first portion protruding from the first central portion in the second direction; and a second portion protruding from the first central portion in a direction opposite to the second direction.

[0011] According to some exemplary embodiments, a first distance from the first central portion to an end of the first portion may be different from a second distance from the first central portion to an end of the second portion.

[0012] According to some exemplary embodiments, the first portion and the second portion may each include a bent portion.

[0013] According to some example embodiments, a curvature of the first portion and a curvature of the second portion may be different from each other.

[0014] According to some exemplary embodiments, the first central portion may further include an alignment opening configured to align positions of the first support and the second support.

[0015] According to some exemplary embodiments, the second protrusion may include: a third portion protruding from the second central portion; and a fourth portion protruding from the second central portion and spaced apart from the third portion in the second direction.

[0016] According to some exemplary embodiments, a third distance from the second central portion to an end of the third portion may be equal to a fourth distance from the second central portion to an end of the fourth portion.

[0017] According to some exemplary embodiments, the third portion and the fourth portion may each include a bent portion.

[0018] According to some exemplary embodiments, the first separation distance between the third portion and the fourth portion may be equal to a maximum width of the first support in the second direction.

[0019] According to some exemplary embodiments, a first separation distance between the third portion and the fourth portion may be smaller than a maximum width of the first support in the second direction.

[0020] According to some exemplary embodiments, an end portion of the third portion and an end portion of the fourth portion may be connected to each other by a connecting portion.

[0021] According to some example embodiments, the mask sheet may include a plurality of mask sheets arranged on a mask frame.

[0022] According to some example embodiments, the apparatus may further include: a source unit facing the mask assembly and configured to supply a deposition material; and a magnetic unit disposed at a side opposite to the source unit with respect to the mask assembly and configured to guide the mask assembly toward the display substrate.

[0023] According to one or more exemplary embodiments, a method for manufacturing a display device includes: arranging a mask assembly in a chamber so that the mask assembly faces a source unit configured to supply a deposition material; arranging a display substrate at a side of the mask assembly opposite to the source unit; guiding the mask assembly toward the display substrate by using a magnetic unit; and depositing the deposition material ejected from the source unit and passing through the mask assembly on the display substrate, wherein the mask assembly includes: a mask frame including an opening; a plurality of first supports, the plurality of first supports being spaced apart from each other on the mask frame and each including a first support intersecting the opening in a first direction; A central portion and a first protrusion protruding from the first central portion in a direction intersecting the first direction; a plurality of second supports, the plurality of second supports are spaced apart from each other on the mask frame and each includes a second central portion intersecting with the opening in a second direction intersecting the first direction and a second protrusion protruding from the second central portion in a direction intersecting the second direction; and a mask sheet including a plurality of pattern holes and arranged above the mask frame to be supported by the plurality of first supports and the plurality of second supports, wherein the plurality of first supports adjacent to each other and the plurality of second supports adjacent to each other shield a portion of the plurality of pattern holes to define a deposition area.

[0024] According to some exemplary embodiments, the first protrusion may include: a first portion protruding from the first central portion in the second direction; and a second portion protruding from the first central portion in a direction opposite to the second direction.

[0025] According to some exemplary embodiments, a first distance from the first central portion to an end of the first portion may be different from a second distance from the first central portion to an end of the second portion.

[0026] According to some exemplary embodiments, the first portion and the second portion may each include a bent portion.

[0027] According to some example embodiments, a curvature of the first portion and a curvature of the second portion may be different from each other.

[0028] According to some exemplary embodiments, the first central portion may further include an alignment opening configured to align positions of the first support and the second support.

[0029] According to some exemplary embodiments, the second protrusion may include: a third portion protruding from the second central portion; and a fourth portion protruding from the second central portion and spaced apart from the third portion in the second direction.

[0030] According to some exemplary embodiments, a third distance from the second central portion to an end of the third portion may be equal to a fourth distance from the second central portion to an end of the fourth portion.

[0031] According to some exemplary embodiments, the third portion and the fourth portion may each include a bent portion.

[0032] According to some exemplary embodiments, the first separation distance between the third portion and the fourth portion may be equal to a maximum width of the first support in the second direction.

[0033] According to some exemplary embodiments, a first separation distance between the third portion and the fourth portion may be smaller than a maximum width of the first support in the second direction.

[0034] According to some exemplary embodiments, an end portion of the third portion and an end portion of the fourth portion may be connected to each other by a connecting portion.

[0035] According to some example embodiments, the mask sheet may include a plurality of mask sheets arranged on a mask frame. BRIEF DESCRIPTION OF THE DRAWINGS

[0036] The above and other aspects, features and characteristics of certain embodiments of the present disclosure will become more apparent from the following description taken in conjunction with the accompanying drawings, in which:

[0037] Figure 1 is a cross-sectional view of an apparatus for manufacturing a display device;

[0038] Figure 2 is a perspective view of a mask assembly according to some exemplary embodiments;

[0039] Figure 3 yes Figure 2 A plan view of the first support, the first outer support, the second support and the mask sheet shown in FIG.

[0040] Figure 4A is a plan view of the first support;

[0041] Figure 4B is a plan view of the first outer support;

[0042] Figure 5A is a plan view of the second support;

[0043] Figure 5B is a plan view of the second outer support;

[0044] Fig. 6A and Figure 6B is a comparative example for comparison with the embodiment;

[0045] Fig. 7A is a plan view of a second support according to some exemplary embodiments;

[0046] Figure 7B is a plan view of a second outer support according to some exemplary embodiments;

[0047] Fig. 8A is a plan view of a second support according to some exemplary embodiments;

[0048] Figure 8B is a plan view of a second outer support according to some exemplary embodiments;

[0049] Fig. 9 is through Figure 1 A plan view of a display device manufactured by the apparatus shown in ;

[0050] Fig.10 It is along Fig. 9 A cross-sectional view of the display device taken along line AA'; and

[0051] Fig.11 yes Fig.10 A plan view of the arrangement of the intermediate layers and dummy intermediate layers shown in FIG. DETAILED DESCRIPTION

[0052] Reference will now be made in more detail to aspects of some exemplary embodiments, examples of which are shown in the accompanying drawings, wherein the same reference numerals represent the same elements throughout. In this regard, the exemplary embodiments may have different forms and should not be construed as being limited to the description set forth herein. Therefore, exemplary embodiments are described below only by reference to the accompanying drawings to explain aspects of the embodiments according to this specification. As used herein, the term "and / or" includes any and all combinations of one or more of the relevant listed items. Throughout the disclosure, the statement "at least one of a, b, and c" means only a, only b, only c, both a and b, both a and c, both b and c, or all of a, b, and c.

[0053] Hereinafter, aspects of some exemplary embodiments will be described in more detail with reference to the accompanying drawings, wherein like reference numerals refer to like elements throughout and some repeated descriptions thereof may be omitted.

[0054] Although terms such as "first" and "second" may be used to describe various components, these components are not necessarily limited to the above terms. The above terms are only used to distinguish one component from another.

[0055] As used herein, the singular forms “a”, “an” and “the” are intended to include the plural forms as well, unless the context clearly indicates otherwise.

[0056] It should be understood that as used herein, the terms "comprise", "comprising", "include" and / or "including" specify the presence of stated features or components, but do not preclude the presence or addition of one or more other features or components.

[0057] It will be further understood that when a layer, region or component is referred to as being "on" another layer, region or component, it can be directly or indirectly on the other layer, region or component. That is, for example, intervening layers, regions or components may be present.

[0058] For the convenience of explanation, the size of the components in the drawings may be enlarged or reduced. For example, since the size and thickness of the components in the drawings are arbitrarily shown for the convenience of explanation, the present disclosure is not limited thereto.

[0059] When the embodiment can be implemented differently, a specific process order can be performed differently from the described order. For example, two processes described successively can be performed substantially simultaneously, or in the reverse order of the described order.

[0060] It will be further understood that when layers, regions, or components are referred to as being “connected” to each other, they may be “directly connected” to each other and / or “indirectly connected” to each other with intervening layers, regions, or components. For example, when layers, regions, or components are referred to as being “electrically connected” to each other, they may be “directly electrically connected” to each other and / or “indirectly electrically connected” to each other with intervening layers, regions, or components.

[0061] Figure 1 is a cross-sectional view of an apparatus 1000 for manufacturing a display device. Figure 2 is a perspective view of a mask assembly 1500 according to some exemplary embodiments.

[0062] refer to Figure 1 , the apparatus 1000 may include a chamber 1100 , a substrate support 1200 , a mask support 1300 , a source unit 1400 , a mask assembly 1500 , a magnetic unit 1600 , a vision unit 1700 , and a pressure regulator 1800 .

[0063] The chamber 1100 may include a space therein, and may have an open side to take out or receive the display substrate D. In this regard, a cover 1110 including a gate valve may be disposed on the open portion of the chamber 1100 to selectively open or close the chamber 1100 .

[0064] The substrate support 1200 may seat the display substrate D thereon and support the display substrate D. In this regard, the substrate support 1200 may support the display substrate D by seating the display substrate D thereon or by adsorbing or attaching to one surface of the display substrate D. According to some exemplary embodiments, the substrate support 1200 may be in the form of a bracket fixed within the chamber 1100. According to some exemplary embodiments, the substrate support 1200 may be in the form of a shuttle, which may seat the display substrate D thereon and may be linearly moved within the chamber 1100. Hereinafter, for ease of description, a case in which the substrate support 1200 is in the form of a bracket fixed within the chamber 1100 will be mainly described in detail.

[0065] The mask support 1300 may seat the mask assembly 1500 thereon. In this regard, the mask support 1300 may be located within the chamber 1100. The mask support 1300 may fine-tune the position of the mask assembly 1500. In this case, the mask support 1300 may include a separate drive or alignment unit for moving the mask assembly 1500 in different directions.

[0066] The source unit 1400 may face the mask assembly 1500. In this regard, the source unit 1400 may receive the deposition material, and may evaporate or sublime the deposition material by applying heat to the deposition material. Thus, the source unit 1400 may supply the deposition material.

[0067] The mask assembly 1500 may be supported by the mask support 1300. The mask assembly 1500 may include a mask frame 1510, a first support 1530, a second support 1550, and a mask sheet 1570. A detailed description of the mask assembly 1500 will be given below.

[0068] The magnetic unit 1600 may be arranged at a side opposite to the source unit 1400 with respect to the mask assembly 1500. In this regard, the magnetic unit 1600 may apply a force to the mask assembly 1500 through the display substrate D by applying a magnetic force to the mask sheet 1570. Specifically, the magnetic unit 1600 may not only prevent or reduce sagging of the mask sheet 1570, but may also guide the mask sheet 1570 toward the display substrate D. In addition, the magnetic unit 1600 may maintain a uniform interval between the mask sheet 1570 and the display substrate D with respect to a length direction of the mask sheet 1570.

[0069] The vision unit 1700 may be disposed in the chamber 1100, and may capture the positions of the display substrate D and the mask assembly 1500. The vision unit 1700 may include a camera for capturing the display substrate D and the mask assembly 1500. The positions of the display substrate D and the mask assembly 1500 may be identified based on an image captured by the vision unit 1700, and based on the image, the position of the mask assembly 1500 may be fine-tuned by the mask support 1300.

[0070] The pressure regulator 1800 may be connected to the chamber 1100 and may adjust the pressure inside the chamber 1100. For example, the pressure regulator 1800 may adjust the pressure inside the chamber 1100 to a level that is the same as or similar to the atmospheric pressure. In addition, the pressure regulator 1800 may adjust the pressure inside the chamber 1100 to a level that is the same as or similar to the pressure in a vacuum state.

[0071] The pressure regulator 1800 may include a connection pipe 1810 connected to the chamber 1100 and a pump 1820 mounted on the connection pipe 1810. In this regard, according to the operation of the pump 1820, external air may be introduced through the connection pipe 1810, or gas within the chamber 1100 may be guided to the outside through the connection pipe 1810.

[0072] Reference Figure 2 , the mask assembly 1500 may include a mask frame 1510 , a first support 1530 , a second support 1550 , and a mask sheet 1570 .

[0073] The mask frame 1510 may include an opening 1511. In this regard, the deposition material may pass through the opening 1511. The mask frame 1510 may include a plurality of frames surrounding the opening 1511. The plurality of frames may extend in a first direction (eg, direction X) or a second direction (eg, direction Y).

[0074] The mask frame 1510 may include a highly rigid metal, which is a material having a small deformation.

[0075] The first support 1530 may be disposed on the mask frame 1510. The first support 1530 may be fixed to the mask frame 1510 when the first support 1530 is expanded. In this regard, the first support 1530 and the mask sheet 1570 may be fixed by welding.

[0076] A plurality of first supports 1530 may be arranged on the mask frame 1510 so that the plurality of first supports 1530 are spaced apart from each other. For example, the plurality of first supports 1530 may be spaced apart from each other in the second direction (e.g., direction Y). In this regard, the first supports 1530 may prevent or reduce a warping phenomenon of the mask sheet 1570 due to its own weight, and may support the mask frame 1510.

[0077] The first support member 1530 and the mask sheet 1570 may include materials different from each other. For example, the first support member 1530 may include austenitic stainless steel.

[0078] The first support 1530 may include a first central portion 1531 and a first protrusion 1533. In this case, the first central portion 1531 and the first protrusion 1533 may be integrally provided.

[0079] The first central portion 1531 may be provided in the form of a plate. In addition, the first central portion 1531 may intersect the opening 1511 in a first direction (e.g., direction X). In this regard, the first central portions 1531 included in the plurality of first supports 1530 may be spaced apart from each other in a second direction (e.g., direction Y).

[0080] The first protrusion 1533 may protrude from the first central portion 1531 in a direction intersecting the first direction (e.g., direction Y or direction -Y). In this regard, a plurality of first protrusions 1533 may be arranged in the first direction (e.g., direction X). According to some exemplary embodiments, a plurality of first protrusions 1533 may be arranged at regular intervals in the first direction (e.g., direction X). According to some exemplary embodiments, a plurality of first protrusions 1533 may be arranged at different intervals in the first direction (e.g., direction X). Hereinafter, the case where a plurality of first protrusions 1533 are arranged at regular intervals in the first direction (e.g., direction X) will be mainly described in detail.

[0081] According to some exemplary embodiments, the first protrusion 1533 may protrude in one direction from the first central portion 1531. According to some exemplary embodiments, the first protrusion 1533 may protrude in one direction and in a direction opposite to the one direction from the first central portion 1531. For example, the first protrusion 1533 may protrude in the second direction (e.g., direction Y) and in a direction opposite to the second direction (e.g., direction -Y) from the first central portion 1531.

[0082] The second support 1550 may be disposed on the mask frame 1510. In this regard, the second support 1550 may include the same material as the first support 1530. According to some exemplary embodiments, the second support 1550 may be embedded in the mask frame 1510. According to some exemplary embodiments, the second support 1550 may be disposed on the mask frame 1510 when the second support 1550 is extended. Hereinafter, a case where the second support 1550 is embedded in the mask frame 1510 will be mainly described in detail.

[0083] A plurality of second supports 1550 may be arranged on the mask frame 1510 so that the plurality of second supports 1550 are spaced apart from each other. For example, the plurality of second supports 1550 may be spaced apart from each other in a first direction (e.g., direction X). Specifically, the second supports 1550 may be arranged between adjacent mask sheets 1570. Therefore, the second supports 1550 may block the intervals between the mask sheets 1570. The second supports 1550 may prevent or reduce the warping phenomenon of the mask sheets 1570 due to their own weight, and may support the mask frame 1510.

[0084] The second support 1550 may include a second central portion 1551 and a second protrusion 1553. In this case, the second central portion 1551 and the second protrusion 1553 may be integrally provided.

[0085] The second central portion 1551 may cross the opening 1511 in the second direction (eg, direction Y). In this regard, the second central portions 1551 included in the plurality of second supports 1550 may be spaced apart from each other in the first direction (eg, direction X).

[0086] The second protrusion 1553 may protrude from the second central portion 1551 in a direction intersecting the second direction (eg, direction X or direction −X). In this regard, a plurality of second protrusions 1553 may be arranged in the second direction (eg, direction Y). Specifically, the second protrusion 1553 may correspond to the first protrusion 1533 .

[0087] According to some exemplary embodiments, the second protrusion 1553 may protrude in one direction from the second central portion 1551. According to some exemplary embodiments, the second protrusion 1553 may protrude in one direction and in a direction opposite to the one direction from the second central portion 1551. For example, the second protrusion 1553 may protrude from the second central portion 1551 in a first direction (e.g., direction X) or in a direction opposite to the first direction (e.g., direction -X).

[0088] The mask sheet 1570 may be arranged on the mask frame 1510. Specifically, the mask sheet 1570 may extend in the second direction (e.g., direction Y). In this regard, the mask sheet 1570 may be supported by a plurality of first supports 1530 and a plurality of second supports 1550. Since the mask sheet 1570 is supported by the plurality of first supports 1530 and the plurality of second supports 1550, sagging of the mask sheet 1570 due to its own weight may be prevented or reduced.

[0089] The mask sheet 1570 may include stainless steel, Invar, nickel (Ni), cobalt (Co), a nickel alloy, a nickel-cobalt alloy, or the like.

[0090] According to some exemplary embodiments, the width of the mask sheet 1570 may be smaller than the width of the opening 1511. Figure 2, the width of the mask sheet 1570 in the first direction (e.g., direction X) may be smaller than the width of the opening 1511 in the first direction (e.g., direction X). Therefore, a plurality of mask sheets 1570 may be arranged on the mask frame 1510. This may prevent or reduce the sagging of the mask sheet 1570 due to its own weight. In this regard, a plurality of mask sheets 1570 may be arranged continuously. According to some exemplary embodiments, the width of the mask sheet 1570 may be greater than the width of the opening 1511. In this case, for example, the width of the mask sheet 1570 in the first direction (e.g., direction X) may be greater than the width of the opening 1511 in the first direction (e.g., direction X). Therefore, the mask sheet 1570 may be mounted as a whole on the mask frame 1510. Hereinafter, for ease of description, the case where the width of the mask sheet 1570 is less than the width of the opening 1511 will be mainly described in detail.

[0091] The mask sheet 1570 may include a plurality of pattern holes 1571. The plurality of pattern holes 1571 may be arranged in the mask sheet 1570 in a first direction (e.g., direction X) or a second direction (e.g., direction Y). For example, the plurality of pattern holes 1571 may be arranged at regular intervals. In addition, the plurality of pattern holes 1571 may be completely arranged in the mask sheet 1570. In this case, when the magnetic force passes through the magnetic unit 1600 (see Figure 1 ) is applied to the mask sheet 1570, a uniform magnetic force may be fully applied to the mask sheet 1570. Therefore, the mask sheet 1570 may prevent or reduce deformation of only a specific portion of the mask sheet 1570 due to the magnetic force.

[0092] The mask assembly 1500 may further include a first outer support 1540 and a second outer support 1560 .

[0093] The first outer support 1540 may be arranged on the mask frame 1510. Specifically, the first outer support 1540 may be closer to the mask frame 1510 in the second direction (e.g., direction Y) than the first support 1530. Therefore, the first outer support 1540 may be arranged on the perimeter of the plurality of first supports 1530. In other words, the first outer support 1540 may correspond to the corner of the opening 1511 in the mask frame 1510. In addition, the first outer support 1540 may be parallel to the first support 1530.

[0094] The first outer support 1540 may include a first outer central portion 1541 and a first outer protrusion 1543. In this case, the first outer central portion 1541 and the first outer protrusion 1543 may be integrally provided. The first outer central portion 1541 and the first outer protrusion 1543 are respectively the same or similar to the first central portion 1531 and the first protrusion 1533, and thus a detailed description thereof is omitted.

[0095] The first external protrusion 1543 may protrude from the first external central portion 1541 in a direction intersecting the first direction (e.g., direction Y or direction -Y). According to some exemplary embodiments, the first external protrusion 1543 may protrude in one direction. For example, the first external protrusion 1543 may protrude in the second direction (e.g., direction Y) or in a direction opposite to the second direction (e.g., direction -Y). Specifically, the first external protrusion 1543 may protrude from the first external central portion 1541 in a direction facing the opening 1511.

[0096] The second outer support 1560 may be disposed on the mask frame 1510. Specifically, the second outer support 1560 may be closer to the mask frame 1510 in a first direction (e.g., direction X) than the second support 1550. Therefore, the second outer support 1560 may be disposed on the perimeter of the plurality of second supports 1550. In other words, the second outer support 1560 may correspond to a corner of the opening 1511 in the mask frame 1510. In addition, the second outer support 1560 may be parallel to the second support 1550.

[0097] The second outer support 1560 may include a second outer central portion 1561 and a second outer protrusion 1563. In this case, the second outer central portion 1561 and the second outer protrusion 1563 may be integrally provided. The second outer central portion 1561 and the second outer protrusion 1563 are respectively the same or similar to the second central portion 1551 and the second protrusion 1553, and thus a detailed description thereof is omitted.

[0098] The second outer protrusion 1563 may protrude from the second outer central portion 1561 in a direction intersecting the second direction (e.g., direction X or direction -X). According to some exemplary embodiments, the second outer protrusion 1563 may protrude in one direction. For example, the second outer protrusion 1563 may protrude in a first direction (e.g., direction X) or in a direction opposite to the first direction (e.g., direction -X). Specifically, the second outer protrusion 1563 may protrude from the second outer central portion 1561 in a direction facing the opening 1511.

[0099] According to some exemplary embodiments, the deposition area S may be defined by a plurality of first supports 1530 adjacent to each other and a plurality of second supports 1550 adjacent to each other. In this regard, the plurality of first supports 1530 adjacent to each other and the plurality of second supports 1550 adjacent to each other may shield a portion of the plurality of pattern holes 1571 in the mask sheet 1570.

[0100] Similarly, the deposition area S may be defined by the first supports 1530 and the first outer supports 1540 adjacent to each other and the plurality of second supports 1550 adjacent to each other. As another example, the deposition area S may be defined by the plurality of first supports 1530 adjacent to each other and the second supports 1550 and the second outer supports 1560 adjacent to each other. As another example, the deposition area S may be defined by the first supports 1530 and the first outer supports 1540 adjacent to each other and the second supports 1550 and the second outer supports 1560 adjacent to each other.

[0101] The deposition area S may include various shapes according to the shapes of the first support 1530 (or the first outer support 1540) and the second support 1550 (or the second outer support 1560). For example, the deposition area S may include shapes such as triangles, polygons, ellipses, circles, etc. As another example, the deposition area S may include a curvature.

[0102] Figure 3 yes Figure 2 15 is a plan view of the first support 1530, the first outer support 1540, the second support 1550 and the mask sheet 1570 shown in FIG. Figure 4A is a plan view of the first support member 1530. Figure 4B is a plan view of the first outer support 1540. Figure 5A is a plan view of the second support member 1550. Figure 5B is a plan view of the second outer support 1560.

[0103] Reference Figure 3 , the mask assembly may include a mask frame, a first support 1530, a first outer support 1540, a second support 1550, a second outer support, and a mask sheet 1570. In this case, the first support 1530 and the first outer support 1540 adjacent to each other and the plurality of second supports 1550 adjacent to each other may define a deposition area S.

[0104] The mask sheet 1570 may include a plurality of pattern holes 1571. The plurality of pattern holes 1571 may be arranged in the mask sheet 1570 in a first direction (e.g., direction X) or a second direction (e.g., direction Y). In this regard, the plurality of pattern holes 1571 may include a first pattern hole 1571a within the deposition area S and a second pattern hole 1571b at an edge of the deposition area S.

[0105] Reference Figure 3 and Figure 4A , the first support 1530 may include a first central portion 1531 and a first protrusion 1533 .

[0106] The first central portion 1531 may extend in a first direction (eg, direction X). In this case, the first central portion 1531 may include an alignment opening 1530M for aligning the positions of the first support 1530 and the second support 1550. The alignment opening 1530M may include a first opening M1, a second opening M2, and a third opening M3.

[0107] The first opening M1 may correspond between the plurality of first protrusions 1533. Therefore, it may be checked whether the first support 1530 is accurately aligned.

[0108] The second opening M2 and the third opening M3 may be arranged such that the second central portion 1551 is located therebetween and may correspond to the first protrusion 1533. Therefore, whether the second support 1550 is accurately aligned to correspond to the first support 1530 may be checked.

[0109] According to some exemplary embodiments, the first protrusion 1533 may include a first portion 1533a and a second portion 1533b. The first portion 1533a may protrude from the first central portion 1531 in a second direction (e.g., direction Y), and the second portion 1533b may protrude from the first central portion 1531 in a direction opposite to the second direction (e.g., direction -Y). In this case, the first portion 1533a and the second portion 1533b may correspond to each other.

[0110] According to some exemplary embodiments, a first distance d1 from the first central portion 1531 to the end of the first portion 1533a may be different from a second distance d2 from the first central portion 1531 to the end of the second portion 1533b. In this regard, the first distance d1 may be defined as a maximum distance from a boundary between the first central portion 1531 and the first portion 1533a to the end of the first portion 1533a. Similarly, the second distance d2 may be defined as a maximum distance from a boundary between the first central portion 1531 and the second portion 1533b to the end of the second portion 1533b.

[0111] According to some exemplary embodiments, the first portion 1533a or the second portion 1533b may include a curved portion. For example, the first portion 1533a may include a first curved portion 1533aR, and the second portion 1533b may include a second curved portion 1533bR. According to some exemplary embodiments, the first portion 1533a or the second portion 1533b may include only a straight portion. For example, the first portion 1533a or the second portion 1533b may be a polygon. However, for ease of description, the following will mainly describe in detail the case where the first portion 1533a includes a first curved portion 1533aR and the second portion 1533b includes a second curved portion 1533bR.

[0112] According to some exemplary embodiments, the curvature of the first curved portion 1533aR and the curvature of the second curved portion 1533bR may be different from each other. In addition, the radius of curvature of the first curved portion 1533aR may be different from the radius of curvature of the second curved portion 1533bR. According to some exemplary embodiments, the curvature of the first curved portion 1533aR and the curvature of the second curved portion 1533bR may be the same as each other. In addition, the radius of curvature of the first curved portion 1533aR may be the same as the radius of curvature of the second curved portion 1533bR. However, for ease of description, the case where the curvature of the first curved portion 1533aR is different from the curvature of the second curved portion 1533bR will be mainly described in detail.

[0113] Reference Figure 3 and Figure 4B , the first outer support 1540 may include a first outer central portion 1541 and a first outer protrusion 1543. The first outer central portion 1541 may include an outer opening 1540M for aligning the positions of the first outer support 1540 and the second support 1550. The outer opening 1540M may include a first outer opening m1, a second outer opening m2, and a third outer opening m3.

[0114] Figure 4B The first outer central portion 1541, the first outer opening m1, the second outer opening m2 and the third outer opening m3 are connected to Figure 4A The first central portion 1531 , the first opening M1 , the second opening M2 , and the third opening M3 are the same or similar, and thus a detailed description thereof is omitted.

[0115] The first outer protrusion 1543 may protrude from the first outer central portion 1541 in one direction. Figure 4B The case where the first external protrusion 1543 protrudes in a direction opposite to the second direction (e.g., direction -Y) is shown. According to some exemplary embodiments, the first external protrusion 1543 may include a first external curved portion 1540R. In this case, the first external curved portion 1540R may include the same curvature as the first curved portion 1533aR or the second curved portion 1533bR. According to some exemplary embodiments, the first external protrusion 1543 may include only a straight portion. In this case, the first external protrusion 1543 may be a polygon. Hereinafter, for ease of description, the case where the first external protrusion 1543 includes the first external curved portion 1540R will be mainly described in detail.

[0116] Reference Figure 3 and Figure 5A, the second support 1550 may include a second central portion 1551 and a second protrusion 1553. In this case, the second central portion 1551 may extend in a second direction (eg, direction Y), and the second protrusion 1553 may protrude from the second central portion 1551 in a direction intersecting the second direction (eg, direction X).

[0117] According to some exemplary embodiments, the second protrusions 1553 may be symmetrically arranged with respect to the second central portion 1551. For example, the second protrusions 1553 may protrude in a first direction (e.g., direction X) and a direction opposite to the first direction (e.g., direction -X) with respect to the second central portion 1551. Therefore, the deposition area S defined by the first support 1530 and the second support 1550 may have a specific shape.

[0118] According to some exemplary embodiments, the second protrusion 1553 may include a third portion 1555 and a fourth portion 1557 spaced apart from the third portion 1555 in the second direction. In this case, the third portion 1555 and the fourth portion 1557 may be alternately arranged on the second central portion 1551. Specifically, the third portion 1555 and the fourth portion 1557 may be alternately arranged in the second direction. Therefore, the deposition area S defined by the plurality of first supports 1530 adjacent to each other and the plurality of second supports 1550 adjacent to each other may have a specific shape.

[0119] According to some exemplary embodiments, the third distance d3 from the second central portion 1551 to the end of the third portion 1555 may be the same as the fourth distance d4 from the second central portion 1551 to the end of the fourth portion 1557. In this regard, the third distance d3 may be defined as the maximum distance from the boundary between the second central portion 1551 and the third portion 1555 to the end of the third portion 1555. Similarly, the fourth distance d4 may be defined as the maximum distance from the boundary between the second central portion 1551 and the fourth portion 1557 to the end of the fourth portion 1557. Specifically, the first distance d1 (refer to Figure 4A ) and the second distance d2 (reference Figure 4A ) are different from each other, when the third distance d3 and the fourth distance d4 are the same as each other, the drooping of the second protrusion 1553 due to its own weight or the deformation of the second protrusion 1553 due to tension can be reduced. According to some exemplary embodiments, the third distance d3 may be different from the fourth distance d4. However, for ease of description, the case where the third distance d3 and the fourth distance d4 are the same as each other will be mainly described in detail.

[0120] According to some exemplary embodiments, the third portion 1555 or the fourth portion 1557 may include a curved portion. For example, the third portion 1555 may include a third curved portion 1555R, and the fourth portion 1557 may include a fourth curved portion 1557R. According to some exemplary embodiments, the third portion 1555 or the fourth portion 1557 may include only a straight portion. For example, the third portion 1555 or the fourth portion 1557 may be a polygon. However, for ease of description, the case where the third portion 1555 includes the third curved portion 1555R and the fourth portion 1557 includes the fourth curved portion 1557R will be mainly described in detail.

[0121] According to some exemplary embodiments, the curvature of the third curved portion 1555R and the curvature of the fourth curved portion 1557R may be different from each other. In addition, the radius of curvature of the third curved portion 1555R may be different from the radius of curvature of the fourth curved portion 1557R. In this case, the curvature of the third curved portion 1555R may be the same as the curvature of the first curved portion 1533aR. In addition, the curvature of the fourth curved portion 1557R may be the same as the curvature of the second curved portion 1533bR. Similarly, the curvature of the fourth curved portion 1557R may be the same as the curvature of the first outer curved portion 1540R. Therefore, due to the first support 1530 and the second support 1550, the curved portion of the deposition area S may be continuous. For example, the curvature of the first curved portion 1533aR and the curvature of the third curved portion 1555R are the same as each other, and therefore, the curved portion of the deposition area S may be continuous.

[0122] As described above, when the curvature of the third curved portion 1555R and the curvature of the first curved portion 1533aR are the same as each other, the first separation distance dis1 between the third portion 1555 and the fourth portion 1557 may be the same as the maximum width of the first support 1530 in the second direction (e.g., direction Y). In this regard, the first separation distance dis1 between the third portion 1555 and the fourth portion 1557 may correspond to between adjacent deposition regions S, and the first separation distance dis1 refers to the minimum distance spaced between the third portion 1555 and the fourth portion 1557. In addition, the second separation distance dis2 between the end 1555T of the third portion 1555 and the end 1557T of the fourth portion 1557 may be the same as the first separation distance dis1. According to some exemplary embodiments, the first separation distance dis1 and the second separation distance dis2 may be different from each other.

[0123] Reference Figure 5B, the second outer support 1560 may include a second outer central portion 1561 and a second outer protrusion 1563. The second outer protrusion 1563 may include a third outer portion 1565 and a fourth outer portion 1567 spaced apart from the third outer portion 1565 in the second direction (eg, direction Y). Figure 5B The second outer central portion 1561, the third outer portion 1565 and the fourth outer portion 1567 are respectively Figure 5A The second central portion 1551, the third portion 1555 and the fourth portion 1557 are the same or similar, and thus a detailed description thereof is omitted.

[0124] According to some exemplary embodiments, the third outer portion 1565 and the fourth outer portion 1567 may be arranged on one side of the second outer central portion 1561. For example, the third outer portion 1565 and the fourth outer portion 1567 may protrude in a first direction (e.g., direction X). As another example, the third outer portion 1565 and the fourth outer portion 1567 may protrude in a direction opposite to the first direction (e.g., direction -X).

[0125] A portion of the plurality of pattern holes 1571 in the mask sheet 1570 may be shielded by the first support 1530 and the second support 1550 described above. Therefore, the deposition area S may have various shapes. For example, the deposition area S may include a curved portion. As another example, the deposition area S may have a shape such as a triangle, a polygon, an ellipse, a circle, etc.

[0126] According to some exemplary embodiments, the first support 1530 may include the first protrusion 1533, and the second support 1550 may include the second protrusion 1553. Therefore, sagging of the first support 1530 and the second support 1550 due to self-weight may be reduced, and deposition efficiency and deposition accuracy may be increased.

[0127] like Fig. 6A As shown in , when the first support 1530A includes the first protrusion 1533A and the second support 1550A does not include the second protrusion, the first protrusion 1533A may further protrude to maintain the shape of the deposition area S. In this case, as shown in the simulation results, the maximum deformation amount of the mask sheet 1570 may be 17.9 μm. In this regard, the deformation amount refers to the maximum value of the distance that the upper surface of the mask sheet 1570 is deformed from the upper surface of the initial mask sheet 1570 when the mask sheet 1570 is fixed to the first support 1530A and the second support 1550A. However, according to some exemplary embodiments, as in Fig. 6AAccording to the simulation results under the same conditions as the comparative example, the maximum deformation amount of the mask sheet 1570 can be 8.7 μm. That is, according to some exemplary embodiments, the deformation amount of the mask sheet 1570 can be reduced by about 51%. Therefore, according to some exemplary embodiments, Fig. 6A Compared with the comparative example, deformation or sagging of the mask sheet 1570 can be reduced, and thus deposition efficiency and deposition accuracy can be increased.

[0128] like Figure 6B As shown in , when the first support 1530B does not include the first protrusion, and the second support 1550B includes the second protrusion 1553B, the second protrusion 1553B may further protrude to maintain the shape of the deposition area S. In this case, sagging of the second support 1550B due to its own weight or deformation of the second protrusion 1553B due to tension applied to the second support 1550B may increase, and thus, deposition efficiency and deposition accuracy may be reduced.

[0129] For example, in Figure 6B In the comparative example of FIG. 1 , as a result of the simulation, the sagging amount of the second support 1550B may be 260 μm. In this regard, the sagging amount refers to the maximum value of the distance that the upper surface of the second protrusion 1553B is bent from the upper surface of the initial second protrusion 1553B when a tension of about 4.2 kgf is applied to the second support 1550B. However, according to some exemplary embodiments, as the second support 1550 (reference Figure 3 ) has the same Figure 6B The results of the simulation performed when the thickness of the second support member 1550B in the comparative example is the same as that of the second support member 1550 (reference Figure 3 ) may be 88 μm. That is, according to some exemplary embodiments, the sagging amount of the second support 1550 may be reduced by about 66%.

[0130] For example, if a tension of about 10 kgf is applied to the second outer support, the sagging amount of the second outer support may be 1370 μm as shown in the simulation results. Figure 5B ) has the same Figure 6B The results of the simulation performed when the thickness of the second external support member in the comparative example is the same as that of the second external support member and the tension within the error range is applied, the second external support member 1560 (reference Figure 5B ) may be 217 μm. That is, according to some exemplary embodiments, the sagging amount of the second outer support 1560 may be reduced by about 84%.

[0131] Therefore, according to some exemplary embodiments, Figure 6B Compared with the comparative example, the deformation and sagging of the second support 1550 and the second outer support 1560 can be reduced, and thus the deposition efficiency and the deposition accuracy can be increased. In other words, the shadow phenomenon caused by the protrusion can be prevented or reduced.

[0132] Fig. 7A is a plan view of a second support 1550 - 1 according to some exemplary embodiments. Figure 7B is a plan view of a second outer support 1560 - 1 , according to some exemplary embodiments.

[0133] Reference Fig. 7A , the second support member 1550-1 may include a second central portion 1551-1 and a second protrusion 1553-1. The second protrusion 1553-1 may include a third portion 1555-1 and a fourth portion 1557-1. Fig. 7A The second central portion 1551-1, the third portion 1555-1 and the fourth portion 1557-1 are Figure 5A The second central portion 1551, the third portion 1555 and the fourth portion 1557 are the same or similar, and thus a repeated description thereof is omitted.

[0134] According to some exemplary embodiments, the first separation distance dis1-1 between the third portion 1555-1 and the fourth portion 1557-1 may be smaller than the first support member 1530 (see Figure 3 ) in a second direction (e.g., direction Y). In this regard, the first separation distance dis1-1 refers to the minimum distance spaced between the third portion 1555-1 and the fourth portion 1557-1. In this case, the second separation distance dis2-1 between the end 1555T-1 of the third portion 1555-1 and the end 1557T-1 of the fourth portion 1557-1 may be greater than the first separation distance dis1-1.

[0135] According to some exemplary embodiments, a portion of the second protrusion 1553-1 in contact with the second central portion 1551-1 may be expanded, and thus, deposition efficiency and deposition accuracy may be increased.

[0136] Reference Figure 7B , the second outer support 1560-1 may include a second outer central portion 1561-1 and a second outer protrusion 1563-1. The second outer protrusion 1563-1 may include a third outer portion 1565-1 and a fourth outer portion 1567-1. Figure 7B The second outer central portion 1561-1, the third outer portion 1565-1 and the fourth outer portion 1567-1 are Figure 5B The second outer central portion 1561, the third outer portion 1565 and the fourth outer portion 1567 are the same or similar, and thus a repeated description thereof is omitted.

[0137] According to some exemplary embodiments, the third separation distance dis3-1 between the third outer portion 1565-1 and the fourth outer portion 1567-1 may be smaller than the first support 1530 (see Figure 3 ) in the second direction (e.g., direction Y). In this regard, the third separation distance dis3-1 refers to the minimum distance spaced between the third outer portion 1565-1 and the fourth outer portion 1567-1. In this case, the fourth separation distance dis4-1 between the end 1565T-1 of the third outer portion 1565-1 and the end 1567T-1 of the fourth outer portion 1567-1 may be greater than the third separation distance dis3-1.

[0138] Fig. 8A is a plan view of a second support 1550 - 2 according to some exemplary embodiments. Figure 8B is a plan view of a second outer support 1560 - 2 , according to some exemplary embodiments.

[0139] Reference Fig. 8A , the second support member 1550-2 may include a second central portion 1551-2 and a second protrusion 1553-2. The second protrusion 1553-2 may include a third portion 1555-2 and a fourth portion 1557-2. Fig. 8A The second central portion 1551-2, the third portion 1555-2 and the fourth portion 1557-2 are Fig. 7A The second central portion 1551-1, the third portion 1555-1 and the fourth portion 1557-1 are identical or similar, and thus a repeated description thereof is omitted.

[0140] According to some exemplary embodiments, an end portion of the third portion 1555-2 and an end portion of the fourth portion 1557-2 may be connected to each other by a connection portion 1559-2. Therefore, the third portion 1555-2 and the fourth portion 1557-2 may support each other.

[0141] Reference Figure 8B , the second outer support 1560-2 may include a second outer central portion 1561-2 and a second outer protrusion 1563-2. The second outer protrusion 1563-2 may include a third outer portion 1565-2 and a fourth outer portion 1567-2. Figure 8B The second outer central portion 1561-2, the third outer portion 1565-2 and the fourth outer portion 1567-2 are Figure 7BThe second outer central portion 1561-1, the third outer portion 1565-1 and the fourth outer portion 1567-1 are the same or similar, and thus a repeated description thereof is omitted.

[0142] According to some exemplary embodiments, an end portion of the third outer portion 1565 - 2 and an end portion of the fourth outer portion 1567 - 2 may be connected to each other by a connection portion 1569 - 2 .

[0143] Reference again Figure 1 The apparatus 1000 described above may be used to manufacture a display device, which will be described in more detail below. Specifically, when the pressure regulator 1800 adjusts the pressure inside the chamber 1100 to a level that is the same as or similar to the atmospheric pressure, the gate valve may be operated to open the chamber 1100.

[0144] After that, the display substrate D may be inserted into the interior of the chamber 1100 from the outside of the chamber 1100. In this regard, the display substrate D may be inserted into the chamber 1100 in various ways. According to some exemplary embodiments, the display substrate D may be inserted into the interior of the chamber 1100 from the outside of the chamber 1100 by a robot arm or the like disposed outside the chamber 1100. According to some exemplary embodiments, when the substrate support 1200 has a shuttle form, the substrate support 1200 may be taken out from the interior of the chamber 1100 to the outside of the chamber 1100, and then, the display substrate D may be placed on the substrate support 1200 via a separate robot arm or the like disposed outside the chamber 1100, and the substrate support 1200 may be inserted into the interior of the chamber 1100 from the outside of the chamber 1100.

[0145] According to some exemplary embodiments, the mask assembly 1500 may be located within the chamber 1100. According to some exemplary embodiments, the mask assembly 1500 may be inserted into the interior of the chamber 1100 from the outside of the chamber 1100, similarly or similarly to the display substrate D. In this case, the mask assembly 1500 may be arranged in the chamber 1100 to face the source unit 1400 for supplying a deposition material.

[0146] When the display substrate D is inserted into the interior of the chamber 1100, the display substrate D may be seated on the substrate support 1200. In this case, the display substrate D may be arranged at a side opposite to the source unit 1400 with respect to the mask assembly 1500. At this point, the vision unit 1700 may capture the positions of the display substrate D and the mask assembly 1500. Specifically, the vision unit 1700 may capture the first alignment mark of the display substrate D and the second alignment mark of the mask assembly 1500.

[0147] The positions of the display substrate D and the mask assembly 1500 may be identified based on the first alignment mark and the second alignment mark captured as described above. Specifically, the second alignment mark may be the alignment opening 1530M of the first support 1530. In this regard, the apparatus 1000 may include a separate controller and may identify the positions of the display substrate D and the mask assembly 1500.

[0148] When the positions of the display substrate D and the mask assembly 1500 have been identified, the mask support 1300 may fine-tune the position of the mask assembly 1500 .

[0149] Thereafter, the magnetic unit 1600 may be used to guide the mask assembly 1500 toward the display substrate D.

[0150] Thereafter, the source unit 1400 may be operated and supply the deposition material to the mask assembly 1500, and the deposition material passing through the plurality of pattern holes 1571 of the mask assembly 1500 may be deposited on the display substrate D. At this point, the pump 1820 may maintain the pressure inside the chamber 1100 at a level that is the same as or similar to that of the vacuum state, thereby pumping out the gas inside the chamber 1100 and exhausting the gas.

[0151] In the above case, the deposition material may pass through the first pattern holes 1571a in the deposition area S and may be deposited on the display substrate D. In addition, the deposition material may pass through a portion of the second pattern holes 1571b at the edge of the deposition area S and may be deposited on the display substrate D. In this case, the deposition area S may have various shapes.

[0152] Therefore, the apparatus 1000 for manufacturing a display device and the method of manufacturing a display device allow manufacturing of a display device including a display area having various shapes.

[0153] Hereinafter, a display device manufactured by the apparatus 1000 for manufacturing a display device and a method of manufacturing the display device will be described in detail.

[0154] Fig. 9 is through Figure 1 1 is a plan view of a display device 1 manufactured by the apparatus 1000 shown in FIG.

[0155] Reference Fig. 9 , the display device 1 may have a display area DA and a non-display area NDA surrounding the display area DA defined in the substrate 100. The emission portion may be arranged in the display area DA, and the power line and the like may be arranged in the non-display area NDA. In addition, the pad portion may be arranged in the non-display area NDA.

[0156] The display device 1 manufactured by the apparatus for manufacturing a display device according to some exemplary embodiments may have a display area DA of various shapes. For example, the display area DA may include a curved portion. As another example, the display area DA may have a polygonal shape including only straight portions. Hereinafter, the case where the display area DA includes a curved portion will be mainly described in detail.

[0157] The display area DA may include an upper curved portion aR and a lower curved portion bR. In this case, the curvatures of the upper curved portion aR and the lower curved portion bR may be different from each other. As another example, the curvatures of the upper curved portion aR and the lower curved portion bR may be the same as each other.

[0158] Fig.10 It is along Fig. 9 A cross-sectional view of the display device 1 taken along line AA′. Fig.11 yes Fig.10 1 is a plan view of the arrangement of the intermediate layer 122 and the dummy intermediate layer O shown in FIG.

[0159] Reference Fig.10 and Fig.11 The display device 1 may include a display substrate D, an intermediate layer 122 and a dummy intermediate layer O disposed on the display substrate D, and an opposing electrode 123 disposed on the intermediate layer 122 and the dummy intermediate layer O. In addition, the display device 1 may include a thin film encapsulation layer E located on the opposing electrode 123 .

[0160] The display substrate D may include a substrate 100 , a thin film transistor TFT, a planarization layer 107 , and a pixel electrode 121 .

[0161] The substrate 100 may include glass or a polymer resin such as polyethersulfone, polyarylate, polyetherimide, polyethylene naphthalate, polyethylene terephthalate, polyphenylene sulfide, polyimide, polycarbonate, cellulose acetate propionate, or the like.

[0162] The thin film transistor TFT may be over the substrate 100 , the planarization layer 107 may cover the thin film transistor TFT, and the organic light emitting diode 120 may be on the planarization layer 107 .

[0163] The buffer layer 101 may include an inorganic insulating material such as silicon nitride, silicon oxynitride, and silicon oxide, and may have a single-layer or multi-layer structure including the above-mentioned inorganic insulating material.

[0164] After the active layer 102 is formed on the buffer layer 101 in a certain pattern, the active layer 102 is covered by the gate insulating layer 103. The active layer 102 includes a source region 102a and a drain region 102b, and further includes a channel region 102c between the source region 102a and the drain region 102b.

[0165] The active layer 102 may include various materials. For example, the active layer 102 may include an inorganic semiconductor material, such as amorphous silicon or crystalline silicon. As another example, the active layer 102 may include an oxide semiconductor. As another example, the active layer 102 may include an organic semiconductor material. However, hereinafter, for ease of description, the case where the active layer 102 includes amorphous silicon will be mainly described in detail.

[0166] The active layer 102 may be formed by forming an amorphous silicon film on the buffer layer 101, crystallizing the amorphous silicon film to form a polysilicon film, and patterning the polysilicon film. The source region 102a and the drain region 102b of the active layer 102 are doped with impurities depending on the type of the thin film transistor TFT, such as a driving thin film transistor or a switching thin film transistor.

[0167] A gate electrode 104 corresponding to the active layer 102 and an interlayer insulating layer 105 covering the gate electrode 104 are formed on the gate insulating layer 103 .

[0168] After forming the contact hole H1 in the interlayer insulating layer 105 and the gate insulating layer 103 , a source electrode 106 a and a drain electrode 106 b are formed on the interlayer insulating layer 105 to contact the source region 102 a and the drain region 102 b , respectively.

[0169] A planarization layer 107 is formed on the thin film transistor TFT, and a pixel electrode 121 of the organic light emitting diode 120 is formed on the planarization layer 107. The pixel electrode 121 contacts the drain electrode 106b of the thin film transistor TFT through a through hole H2 formed in the planarization layer 107. The planarization layer 107 may include a single layer or two or more layers having an inorganic material and / or an organic material. The planarization layer 107 may have a flat upper surface regardless of the curvature of the lower layer, or may be curved according to the curvature of the layer located therebelow. In addition, the planarization layer 107 may include a transparent insulator, and thus may have a resonance effect.

[0170] After the pixel electrode 121 is formed on the planarization layer 107 , a pixel defining layer 111 including an organic material and / or an inorganic material is formed to cover the pixel electrode 121 and the planarization layer 107 , and the pixel defining layer 111 is opened to expose the pixel electrode 121 .

[0171] In addition, the intermediate layer 122 and the opposing electrode 123 are formed at least on the pixel electrode 121. According to some exemplary embodiments, the opposing electrode 123 may be formed on the entire surface of the display substrate D. In this case, the opposing electrode 123 may be formed on the intermediate layer 122, the pixel defining layer 111, and the dummy intermediate layer O. Hereinafter, for the convenience of description, the case where the opposing electrode 123 is formed on the intermediate layer 122, the pixel defining layer 111, and the dummy intermediate layer O will be mainly described in detail.

[0172] The pixel electrode 121 functions as an anode electrode, and the opposite electrode 123 functions as a cathode electrode. However, the polarities of the pixel electrode 121 and the opposite electrode 123 may be opposite.

[0173] The pixel electrode 121 and the opposite electrode 123 are insulated from each other by the intermediate layer 122 , and light is emitted from the organic emission layer by applying voltages of different polarities to the intermediate layer 122 .

[0174] The intermediate layer 122 may include an organic emission layer. As another alternative example, the intermediate layer 122 may include an organic emission layer and may further include at least one of a hole injection layer, a hole transport layer, an electron transport layer, and an electron injection layer. The embodiments of the present disclosure are not limited thereto, and the intermediate layer 122 may include an organic emission layer and may further include various functional layers.

[0175] In this regard, the intermediate layer 122 may be formed by the above-mentioned apparatus for manufacturing the display device.

[0176] In addition, during the formation of the intermediate layer 122, a dummy intermediate layer O may be formed on the pixel defining layer 111. Specifically, when the first pattern hole 1571a (refer to Figure 3 ) is deposited on the display substrate D to form the intermediate layer 122, through the second pattern hole 1571b (reference Figure 3 ) can be deposited on the display substrate D to form a dummy intermediate layer O.

[0177] In this case, the dummy intermediate layer O and the intermediate layer 122 may include the same material as each other. Specifically, each of the dummy intermediate layer O and the intermediate layer 122 may include at least one of an organic emission layer, a hole injection layer, a hole transport layer, an electron transport layer, an electron injection layer, and a functional layer.

[0178] The intermediate layer 122 may include a plurality of intermediate layers 122, and the plurality of intermediate layers 122 may form the display area DA. Specifically, the plurality of intermediate layers 122 may form the display area DA having various shapes. In this regard, the plurality of intermediate layers 122 may be spaced apart from each other within the display area DA.

[0179] The dummy intermediate layer O may include a plurality of dummy intermediate layers O, and the plurality of dummy intermediate layers O may be arranged at the edge (or boundary) of the display area DA. Specifically, the plurality of dummy intermediate layers O may be arranged outside the plurality of intermediate layers 122. In this regard, the plurality of dummy intermediate layers O may be arranged in the non-display area NDA. Therefore, the dummy intermediate layer O may not emit light.

[0180] An area of ​​at least one of the dummy intermediate layers O may be different from an area of ​​one of the intermediate layers 122. Specifically, an area of ​​at least one of the dummy intermediate layers O may be smaller than an area of ​​one of the intermediate layers 122.

[0181] One unit pixel includes a plurality of sub-pixels, and the plurality of sub-pixels may emit light of various colors. For example, the plurality of sub-pixels may include sub-pixels that emit red light, green light, and blue light, respectively, and may include sub-pixels that emit red light, green light, blue light, and white light, respectively.

[0182] The sub-pixel may include one intermediate layer 122. In this regard, when one sub-pixel is formed, the intermediate layer 122 and the dummy intermediate layer O may be formed by the above-mentioned apparatus for manufacturing a display device.

[0183] The thin film encapsulation layer E may include a plurality of inorganic layers or may include an inorganic layer and an organic layer.

[0184] The organic layer of the thin film encapsulation layer E includes a polymer and may include a single layer or a stacked layer, wherein the single layer or the stacked layer includes one of polyethylene terephthalate, polyimide, polycarbonate, epoxy resin, polyethylene and polyacrylate. The organic layer may include polyacrylate, and specifically, may include a polymerized monomer composition, which includes a monomer based on diacrylate and a monomer based on triacrylate. The monomer composition may also include a monomer based on monoacrylate. In addition, the monomer composition may also include a well-known photoinitiator, such as trimethylbenzoyl diphenylphosphine oxide (TPO), but the embodiment is not limited thereto.

[0185] The inorganic layer of the thin film encapsulation layer E may include a single layer or a stacked layer, and the single layer or the stacked layer may include a metal oxide or a metal nitride. Specifically, the inorganic layer may include SiN x 、Al 2 O 3 、SiO 2 and TiO 2 One of them.

[0186] The uppermost layer of the thin film encapsulation layer E exposed to the outside may include an inorganic layer to prevent or reduce the penetration of moisture into the organic light emitting diode 120 .

[0187] The thin film encapsulation layer E may include at least one sandwich structure in which at least one organic layer is located between at least two inorganic layers. As another example, the thin film encapsulation layer E may include at least one sandwich structure in which at least one inorganic layer is located between at least two organic layers. As another example, the thin film encapsulation layer E may include a sandwich structure in which at least one organic layer is located between at least two inorganic layers and a sandwich structure in which at least one inorganic layer is located between at least two organic layers.

[0188] The thin film encapsulation layer E may include a first inorganic layer, a first organic layer, and a second inorganic layer sequentially disposed on the organic light emitting diode 120 .

[0189] As another example, the thin film encapsulation layer E may include a first inorganic layer, a first organic layer, a second inorganic layer, a second organic layer, and a third inorganic layer sequentially disposed on the organic light emitting diode 120 .

[0190] As another example, the thin film encapsulation layer E may include a first inorganic layer, a first organic layer, a second inorganic layer, a second organic layer, a third inorganic layer, a third organic layer, and a fourth inorganic layer sequentially arranged on the organic light emitting diode 120 .

[0191] In addition, a halogenated metal layer including lithium fluoride (LiF) may be included between the organic light emitting diode 120 and the first inorganic layer. The halogenated metal layer may prevent or reduce damage to the organic light emitting diode 120 when the first inorganic layer is sputtered onto the organic light emitting diode 120.

[0192] An area of ​​the first organic layer may be smaller than an area of ​​the second inorganic layer, and an area of ​​the second organic layer may be smaller than an area of ​​the third inorganic layer.

[0193] Therefore, the display device 1 can realize display areas having various shapes.

[0194] As described above, according to one or more embodiments, a display device including various types of display areas may be manufactured.

[0195] Furthermore, according to one or more embodiments, the mask assembly may include first and second supports each including a protrusion, thereby increasing deposition efficiency and deposition accuracy.

[0196] It should be understood that the embodiments described herein should be considered to be merely descriptive and not for limiting purposes. The description of features or aspects within each embodiment should generally be considered to be applicable to other similar features or aspects in other embodiments. Although one or more embodiments have been described with reference to the accompanying drawings, it will be understood by those of ordinary skill in the art that various changes in form and detail may be made therein without departing from the spirit and scope as defined by the appended claims.

Claims

1. An apparatus for manufacturing a display device, the apparatus comprising a mask assembly, the mask assembly comprising: a mask frame including an opening; a plurality of first support members spaced apart from each other on the mask frame and each including a first central portion intersecting the opening in a first direction and a first protrusion protruding from the first central portion in a direction intersecting the first direction; a plurality of second supports spaced apart from each other on the mask frame and each including a second central portion intersecting the opening in a second direction intersecting the first direction and a second protrusion protruding from the second central portion in a direction intersecting the second direction; as well as a mask sheet including a plurality of pattern holes and arranged above the mask frame to be supported by the plurality of first supporting members and the plurality of second supporting members, The plurality of first supports adjacent to each other and the plurality of second supports adjacent to each other shield a portion of the plurality of pattern holes to define a deposition area.

2. The device according to claim 1, wherein: The first protrusion comprises: a first portion protruding from the first central portion in the second direction, and The second portion protrudes from the first central portion in a direction opposite to the second direction.

3. The device according to claim 2, wherein: A first distance from the first central portion to an end of the first portion is different from a second distance from the first central portion to an end of the second portion.

4. The device according to claim 2, wherein: The first portion and the second portion each include a curved portion.

5. The device according to claim 4, wherein: A curvature of the first portion and a curvature of the second portion are different from each other.

6. The device according to claim 1, wherein: The first central portion also includes an alignment opening configured to align the positions of the first support and the second support.

7. The device according to claim 1, wherein: The second protrusion comprises: a third portion protruding from said second central portion, and a fourth portion protruding from the second central portion and spaced apart from the third portion in the second direction.

8. The device according to claim 7, wherein: A third distance from the second central portion to an end of the third portion is equal to a fourth distance from the second central portion to an end of the fourth portion.

9. The device according to claim 7, wherein: The third portion and the fourth portion each include a bent portion.

10. The device according to claim 7, wherein: A first separation distance between the third portion and the fourth portion is equal to a maximum width of the first support in the second direction.

11. The device according to claim 7, wherein: A first separation distance between the third portion and the fourth portion is smaller than a maximum width of the first support in the second direction.

12. The device according to claim 7, wherein: An end portion of the third portion and an end portion of the fourth portion are connected to each other through a connecting portion.

13. The device according to claim 1, wherein: The mask sheet includes a plurality of mask sheets arranged on the mask frame.

14. The apparatus according to claim 1, further comprising: a source unit facing the mask assembly and configured to supply a deposition material; as well as The magnetic unit is disposed at a side opposite to the source unit with respect to the mask assembly and is configured to guide the mask assembly toward a display substrate.

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