Observation Device and Method for Oxidation Aperture of Chip

Abstract

The present invention discloses an observation device and method for the oxidation aperture of a chip. The device includes a microscope; a stage, which is arranged below the microscope, and a light-transmitting glass substrate is provided on the stage, and the chip to be observed is placed on the light-transmitting glass substrate; a filter carrier plate, which is arranged below the stage, and the filter carrier plate is used for placing a filter; a lampshade, which is arranged below the filter; a light box, which is connected to the lampshade through an optical path, and a lamp is placed in the light box. This device effectively avoids the problems existing in the prior art, such as the metal on the surface of the chip product is prone to reflect light from the light source, resulting in the light source being unable to effectively irradiate on the product, and the problem that the contour of the oxidation aperture cannot be accurately observed and shadow is easily generated. Therefore, the oxidation aperture of the chip can be accurately and effectively observed. In addition, this device also has the advantages of simple structure and low device price.

Description

Technical Field

[0001] The present invention relates to the technical field of observation devices. Specifically, the present invention relates to an observation device and method for the oxidation aperture of a chip. Background Art

[0002] The existing method for monitoring the oxidation aperture of a chip through a microscope is mainly as follows: observing the oxidation aperture from the front through a metallurgical microscope, and both the light source and the filter are on the upper side of the product. The disadvantages of this method are that the metal on the surface of the chip product is likely to reflect the light source, resulting in the light source being unable to effectively shine on the chip product. Therefore, this solution cannot accurately observe the contour of the oxidation aperture and is prone to generating shadows. Summary of the Invention

[0003] The present invention aims to solve at least one of the technical problems in the related art to some extent. For this purpose, the object of the present invention is to provide an observation device and method for the oxidation aperture of a chip. By arranging the filter and the light source (provided jointly by the lamp cover, the optical path, and the lamp box) below the chip to be observed, and arranging the filter between the light source and the stage, and at the same time setting the substrate for placing the chip to be observed as a light-transmitting glass substrate, the problems in the prior art that the metal on the surface of the chip product is likely to reflect the light source, resulting in the light source being unable to effectively shine on the product, and the problem that the contour of the oxidation aperture cannot be accurately observed and is prone to generating shadows are avoided. Thus, the oxidation aperture of the chip can be accurately and effectively observed. In addition, this device also has the advantages of simple structure and low device price.

[0004] In one aspect of the present invention, the present invention provides an observation device for the oxidation aperture of a chip. According to an embodiment of the present invention, the observation device for the oxidation aperture of the chip includes:

[0005] A microscope;

[0006] A stage, which is arranged below the microscope. A light-transmitting glass substrate is provided on the stage, and the chip to be observed is placed on the light-transmitting glass substrate;

[0007] A filter carrier plate, which is arranged below the stage and is used for placing a filter;

[0008] A lamp cover, which is arranged below the filter;

[0009] A lamp box, which is connected to the lamp cover through an optical path, and a lamp is placed in the lamp box.

[0010] Observation device for the oxidation aperture of a chip according to the above embodiments of the present invention. By arranging a filter and a light source (provided jointly by a lamp shade, an optical path, and a lamp box) below the chip to be observed, and arranging the filter between the light source and the stage, and at the same time setting the substrate for placing the chip to be observed as a transparent glass substrate, it avoids the problems in the prior art that the metal on the surface of the chip product is prone to reflect light from the light source, resulting in the light source being unable to effectively irradiate on the product and the problem that the contour of the oxidation aperture cannot be accurately observed and shadow is easily generated. Thus, the oxidation aperture can be accurately and effectively observed. In addition, this device also has the advantages of simple structure and low device price.

[0011] In addition, the observation device for the oxidation aperture of a chip according to the above embodiments of the present invention may also have the following additional technical features:

[0012] In some embodiments of the present invention, the stage is provided directly below the microscope.

[0013] In some embodiments of the present invention, the filter is provided directly below the stage.

[0014] In some embodiments of the present invention, the lamp shade is provided directly below the filter.

[0015] In some embodiments of the present invention, the vertical distance between the filter and the transparent glass substrate is 1 - 2 cm.

[0016] In some embodiments of the present invention, the vertical distance between the filter and the lamp shade is 1 - 5 cm.

[0017] In some embodiments of the present invention, the power of the lamp in the lamp box is not less than 100 W.

[0018] In some embodiments of the present invention, the microscope includes an eyepiece, an infrared camera, and an objective lens. The eyepiece is provided on the side of the microscope, the objective lens is provided at the lower part of the microscope, and the infrared camera is connected to a computer for displaying images.

[0019] In some embodiments of the present invention, the microscope further includes an objective lens turret provided above the objective lens for switching different objective lens magnifications.

[0020] On the other hand, the present invention proposes a method for observing the oxidation aperture of a chip using the above observation device for the oxidation aperture, including:

[0021] (1) Assemble each component. Place the stage under the microscope, place the transparent glass substrate on the stage, place the filter carrier disk under the stage, place the filter on the filter carrier disk, place the lamp shade under the filter, connect the lamp shade to the lamp box through the optical path, and place a lamp in the lamp box;

[0022] (2) Place the chip product to be observed on the transparent glass substrate and observe the oxidation aperture of the chip.

[0023] In the method for observing the oxidation aperture of a chip according to the embodiment of the present invention, by placing a filter and a light source (provided jointly by the lamp shade, the optical path, and the lamp box) under the chip to be observed, and placing the filter between the light source and the stage, and at the same time setting the substrate for placing the chip to be observed as a transparent glass substrate, it avoids the problems existing in the prior art that the metal on the surface of the chip product is likely to reflect the light source, resulting in the light source being unable to effectively irradiate on the product, and the problem that the contour of the oxidation aperture cannot be accurately observed and shadow is likely to be generated. Thus, the oxidation aperture can be accurately and effectively observed.

[0024] Additional aspects and advantages of the present invention will be given in part in the following description, will become apparent in part from the following description, or will be understood through the practice of the present invention. Description of the Drawings

[0025] The above and / or additional aspects and advantages of the present invention will become apparent and be readily understood from the description of the embodiments in conjunction with the following drawings, where:

[0026] Figure 1 is a schematic structural diagram of an observation device for the oxidation aperture of a chip according to an embodiment of the present invention. Detailed Embodiments

[0027] The embodiments of the present invention will be described in detail below. The examples of the embodiments are shown in the drawings, where the same or similar reference numerals represent the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the drawings are exemplary and are intended to explain the present invention and should not be construed as limiting the present invention.

[0028] In the description of the present invention, it should be understood that the orientation or positional relationship indicated by the terms "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "axial", "radial", "circumferential", etc. is based on the orientation or positional relationship shown in the drawings. It is only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation. Therefore, it should not be construed as a limitation to the present invention.

[0029] In addition, the terms "first" and "second" are only used for descriptive purposes and cannot be understood as indicating or implying relative importance or implicitly specifying the quantity of the indicated technical features. Thus, the features defined with "first" and "second" may explicitly or implicitly include at least one of such features. In the description of the present invention, the meaning of "a plurality" is at least two, such as two, three, etc., unless otherwise specifically and clearly defined.

[0030] In the present invention, unless otherwise clearly specified and defined, terms such as "mounted", "connected", "coupled", "fixed", etc. shall be understood in a broad sense. For example, it may be a fixed connection, a detachable connection, or integrated; it may be a mechanical connection or an electrical connection; it may be directly connected or indirectly connected through an intermediate medium, and it may be the internal communication of two elements or the interaction relationship between two elements, unless otherwise clearly defined. For those of ordinary skill in the art, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0031] In the present invention, unless otherwise clearly specified and defined, the first feature being "on" or "under" the second feature may be that the first and second features are in direct contact, or the first and second features are in indirect contact through an intermediate medium. Moreover, the first feature being "above", "over" and "on top of" the second feature may be that the first feature is directly above or obliquely above the second feature, or merely indicates that the first feature has a higher horizontal height than the second feature. The first feature being "under", "beneath" and "underneath" the second feature may be that the first feature is directly below or obliquely below the second feature, or merely indicates that the first feature has a lower horizontal height than the second feature.

[0032] In one aspect of the present invention, the present invention provides an observation device for the oxidation aperture of a chip. Refer to the attached Figure 1, the device includes: a microscope; a stage 6, which is arranged below the microscope. A transparent glass substrate 5 is provided on the stage 6, and a chip to be observed is placed on the transparent glass substrate 5; a filter carrier 7, which is arranged below the stage 6 and is used to place a filter. The filter is used to filter out light of unnecessary wavelengths; a lamp cover 8, which is arranged below the filter; a lamp box 10, which is connected to the lamp cover 8 through an optical path 9, and a lamp is placed in the lamp box 10. Thus, by arranging the filter and the light source (provided jointly by the lamp cover 8, the optical path 9 and the lamp box 10) below the chip to be observed, and arranging the filter between the light source and the stage 6, and at the same time setting the substrate for placing the chip to be observed as the transparent glass substrate 5, it avoids the problems existing in the prior art that the metal on the surface of the chip product is prone to reflect the light source, resulting in the light source being unable to effectively irradiate on the product and the problem that the contour of the oxidation aperture cannot be accurately observed and it is easy to generate shadows. Therefore, the oxidation aperture of the chip can be accurately and effectively observed. In addition, the device also has the advantages of simple structure and low device price.

[0033] According to an embodiment of the present invention, referring to the attached Figure 1 , a microscope, which is used to observe the oxidation aperture of the chip. Further, the microscope includes an eyepiece 1, an infrared camera 2 and an objective lens 4. The eyepiece 1 is arranged on the side of the microscope, the objective lens 4 is arranged at the lower part of the microscope, and the infrared camera 2 is connected to a computer and is used to display images. Still further, the microscope further includes an objective lens turret 3, which is arranged above the objective lens and is used to switch different objective lens magnifications. The usage method of the microscope is the same as that of the microscope in the prior art and will not be elaborated here.

[0034] According to a specific embodiment of the present invention, the stage 6 is arranged directly below the microscope. Thus, it is convenient to observe the oxidation aperture of the chip.

[0035] According to still another specific embodiment of the present invention, the filter is arranged directly below the stage 6. Thus, the light source after passing through the filter is convenient to irradiate on the chip product.

[0036] According to yet another specific embodiment of the present invention, the lamp cover 8 is arranged directly below the filter. Thus, the light source in the lamp cover 8 is convenient to pass through the filter.

[0037] According to yet another specific embodiment of the present invention, the vertical distance between the filter and the transparent glass substrate 5 is 1 - 2 cm. Thus, it can ensure that the filtered light is scattered to the outside as little as possible.

[0038] According to yet another specific embodiment of the present invention, the vertical distance between the filter and the lamp shade 8 is 1 - 5 cm, which can ensure that the light emitted by the lamp shade 8 is scattered to the outside as little as possible.

[0039] According to yet another specific embodiment of the present invention, the power of the lamp in the light box 10 is not less than 100 W, which can ensure sufficient light source.

[0040] It should be noted that the above-mentioned observation device for the oxidation aperture of the chip is applicable to observing the oxidation apertures of various types of chips, and is particularly applicable to observing the oxidation aperture of the VCSEL chip.

[0041] On the other hand of the present invention, the present invention proposes a method for observing the oxidation aperture of a chip by using the above-mentioned observation device for the oxidation aperture, including:

[0042] (1) Assemble each component. Place the stage 6 under the microscope, place the light-transmitting glass substrate 5 on the stage 6, place the filter carrier 7 under the stage 6, place the filter on the filter carrier 7, place the lamp shade 8 under the filter, connect the lamp shade 8 to the light box 10 through the optical path 9, and place a lamp in the light box 10.

[0043] (2) Place the chip product to be observed on the light-transmitting glass substrate 5. The light source is emitted from the light box 10 and supplied to the lamp shade 8 through the optical path 9. The light box 10 is equipped with a halogen lamp. After the emitted light is processed by the optical path 9, it is converged and emitted by the lamp shade 8. Then, it passes through the filter carrier 7 and irradiates the back of the product. At this time, the infrared camera 2 displays an image on the computer. The objective lens 4 can switch the magnification to observe the magnification of the required image.

[0044] The method for observing the oxidation aperture of the chip according to the embodiment of the present invention places the filter and the light source (provided jointly by the lamp shade, the optical path, and the light box) under the chip to be observed, places the filter between the light source and the stage, and sets the substrate for placing the chip to be observed as a light-transmitting glass substrate, thus avoiding the problems in the prior art that the metal on the surface of the chip product is likely to reflect the light source, resulting in the light source being unable to effectively irradiate the product and the problem that the contour of the oxidation aperture cannot be accurately observed and shadows are easily generated. Therefore, the oxidation aperture can be accurately and effectively observed.

[0045] In the description of this specification, the description with reference to the terms "one embodiment", "some embodiments", "example", "specific example", or "some examples", etc. means that the specific features, structures, materials, or characteristics described in connection with the embodiment or example are included in at least one embodiment or example of the present invention. In this specification, the schematic representations of the above terms do not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials, or characteristics described may be combined in any one or more embodiments or examples in a suitable manner. In addition, without contradiction, those skilled in the art can combine and combine the different embodiments or examples described in this specification and the features of different embodiments or examples.

[0046] Although the embodiments of the present invention have been shown and described above, it can be understood that the above embodiments are exemplary and should not be construed as limiting the present invention. Those of ordinary skill in the art can make changes, modifications, substitutions, and variations to the above embodiments within the scope of the present invention.

Claims

1. An observation device for the oxidation aperture of a chip, characterized in that, Comprising: A microscope; A stage, which is arranged below the microscope. A light-transmitting glass substrate is provided on the stage, and a chip to be observed is placed on the light-transmitting glass substrate; A filter carrier, which is arranged below the stage and is used for placing a filter; A lamp shade, which is arranged below the filter; A lamp box, which is connected to the lamp shade through an optical path, and a lamp is placed in the lamp box; The stage is arranged directly below the microscope; the filter is arranged directly below the stage; the lamp shade is arranged directly below the filter; The vertical distance between the filter and the light-transmitting glass substrate is 1 - 2 cm; The vertical distance between the filter and the lamp shade is 1 - 5 cm; The power of the lamp in the lamp box is not less than 100 W.

2. The observation device for the oxidation aperture of the chip according to claim 1, characterized in that, The microscope includes an eyepiece, an infrared camera, and an objective lens. The eyepiece is arranged on the side of the microscope, the objective lens is arranged at the lower part of the microscope, and the infrared camera is connected to a computer for displaying images.

3. The observation device for the oxidation aperture of the chip according to claim 2, characterized in that, The microscope further includes an objective lens turret, which is arranged above the objective lens and is used for switching different objective lens magnifications.

4. A method for observing the oxidation aperture of a chip by using the observation device for the oxidation aperture described in any one of claims 1-3, characterized in that, Comprising: (1) Assemble each component. Place the stage below the microscope, place the light-transmitting glass substrate on the stage, place the filter carrier below the stage, place the filter on the filter carrier, place the lamp shade below the filter, connect the lamp shade to the lamp box through an optical path, and place a lamp in the lamp box; (2) Place the chip product to be observed on the light-transmitting glass substrate and observe the oxidation aperture of the chip.

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