A ceramic disc handling device for a polishing machine

Abstract

The present invention discloses a ceramic disk handling device for a polishing machine, which is fast and efficient, and includes a driving assembly, a first handling hand assembly, a second handling hand assembly, and two sets of placing disk assemblies adapted to be used with the first handling hand assembly and the second handling hand assembly. The driving assembly includes a driving motor and a first transmission gear, and the first transmission gear is key-connected to the output shaft end of the driving motor. Two sets of placing disk assemblies are symmetrically arranged, and a support plate is arranged between the two sets of placing disk assemblies. The driving motor is fixedly installed at the lower end of the support plate through a fixing frame. By using one driving motor to drive the first handling hand assembly and the second handling hand assembly simultaneously, and making the running angles of the first handling hand assembly and the second handling hand assembly exactly the same, and adopting a swinging type of handling, the handling stroke is reduced. This not only improves the handling efficiency, but also enhances the balance during handling by using the first handling hand assembly and the second handling hand assembly for handling.

Description

Technical Field

[0001] The present invention relates to the technical field of semiconductor material polishing and processing, and specifically relates to a ceramic plate handling device. Background Art

[0002] Polishing is a very important process in semiconductor material processing. In order to make polished products, such as silicon wafers, sapphire wafers, germanium single crystal wafers, glass wafers, etc., meet the requirements of good flatness, ceramic plates are often used as polishing carriers. Due to their hard texture and high density, the weight of ceramic plates is relatively large, reaching 10 - 20 kg per piece. Therefore, during the polishing process, the loading and unloading of ceramic plates is a great test for the physical strength of operators. In actual production, accidents such as sprains caused by improper handling or injuries caused by the dropping of ceramic plates often occur. At the same time, because during the polishing process, the products are loaded on the downward-facing side of the ceramic plate, when handling, the operator cannot perceive the position of the products, and often causes scratches, contamination, etc. on the products due to finger contact during handling, resulting in a loss of yield. To solve the above problems, mechanical hands are used to handle ceramic plates in polishing production. Commonly, vacuum suction cup devices are used, and one ceramic plate is handled at a time, and the time consumption is 3 - 5 times that of manual handling. Therefore, the resulting production capacity loss often exceeds 30%. For the high-investment semiconductor industry, this waste is astonishing. Therefore, we propose a ceramic plate handling device for a polishing machine to solve the problems existing in the prior art. Summary of the Invention

[0003] The purpose of the present invention is to provide a ceramic plate handling device for a polishing machine to solve the problems of high production capacity loss and astonishing waste in the prior art mentioned in the above background art.

[0004] To achieve the above purpose, the present invention adopts the following technical solutions:

[0005] A ceramic plate handling device for a polishing machine includes a driving component, a first handling hand component, a second handling hand component, and two groups of placing plate components adapted to be used with the first handling hand component and the second handling hand component. The driving component includes a driving motor and a first transmission gear. The first transmission gear is key-connected to the output shaft end of the driving motor. The two groups of placing plate components are symmetrically arranged, and a support plate is arranged between the two groups of placing plate components. The driving motor is fixedly installed at the lower end of the support plate through a fixing frame;

[0006] The first handling hand component includes a first rotating rod, a second transmission gear, a third transmission gear, and a first lifting and adsorption component. The first rotating rod is rotatably installed on the support plate, and the lower end of the first rotating rod passes through the support plate and is located at the lower end of the support plate. The second transmission gear and the third transmission gear are fixedly sleeved on the first rotating rod, and the second transmission gear meshes with the first transmission gear;

[0007] The second handling component includes a second rotating rod, an electromagnetic clutch, a fourth transmission gear, and a second lifting and adsorbing component. The fourth transmission gear is in transmission connection with the second rotating rod through the electromagnetic clutch, and the fourth transmission gear meshes with the third transmission gear. One end of the second rotating rod penetrates through the support plate and is connected to the second lifting and adsorbing component.

[0008] Preferably, both the first lifting and adsorbing component and the second lifting and adsorbing component include swing arms, lifting structures, and suction cups. The two groups of swing arms are respectively fixedly installed at the upper ends of the first rotating rod and the second rotating rod. The lifting structure is fixedly installed on the swing arm, and the suction cup is fixedly installed at one end of the lifting structure.

[0009] Preferably, the lifting structure includes an electric push rod and a connecting column. The electric push rod is fixedly installed at the upper end of the swing arm, and one end of the piston rod of the electric push rod penetrates through the swing arm and is fixedly connected to the connecting column. A plugging sleeve is integrally formed at the upper end of the suction cup. One end of the connecting column is plugged into the interior of the plugging sleeve, and the connecting column is fixedly connected to the plugging sleeve through a fixing pin.

[0010] Preferably, the placement plate component includes a plate body, a rotating plate, a rotary table bearing, and a forward and reverse stepping motor. The plate body is a plate body with a U-shaped cross-section, and the rotary table bearing is embedded and fixed at the inner bottom of the plate body. The rotating plate is installed at the upper end of the rotary table bearing. The forward and reverse stepping motor is fixed to the upper end of the plate body through a fixing frame, and the output shaft end of the forward and reverse stepping motor penetrates through the bottom of the plate body and is fixedly connected to the lower surface of the rotating plate.

[0011] Preferably, the suction cup is a hollow suction cup, and an air extraction pipe communicates with the hollow part of the suction cup. One end of the air extraction pipe penetrates through the swing arm and is located on the upper end surface of the swing arm.

[0012] Preferably, the fourth transmission gear and the third transmission gear are arranged in the same way, and the diameter ratio of the second transmission gear to the first transmission gear is 2:3.

[0013] Preferably, a circular groove with a semicircular cross-section is formed at the bottom of the suction cup, and a sealing ring is fixedly adhered inside the circular groove. The sealing ring is an elastic rubber sealing ring.

[0014] Preferably, two groups of first rotating bearings are embedded and fixed on the support plate, and the first rotating rod and the second rotating rod are respectively plugged into the inner rings of the two groups of first rotating bearings.

[0015] Preferably, a second rotating bearing is embedded and fixed on the lower surface of the plate body, and the output shaft of the forward and reverse stepping motor is fixedly plugged into the inner ring of the second rotating bearing.

[0016] Technical effects and advantages of the present invention: Compared with the prior art, the ceramic disc transport device for a polishing machine proposed by the present invention has the following advantages:

[0017] 1. The present invention uses a driving motor to drive the first handling hand assembly and the second handling hand assembly at the same time, and makes the operating angles of the first handling hand assembly and the second handling hand assembly completely consistent, and adopts swing-type handling, so that the handling stroke is shortened, which not only improves the handling efficiency, but also uses the first handling hand assembly and the second handling hand assembly for handling at the same time, and can enhance the balance during handling;

[0018] 2. The present invention connects the fourth transmission gear to the second rotating rod through an electronic clutch. In actual use, double-arm transportation or single-arm transportation can be selected according to actual use requirements, which has high flexibility. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] Figure 1 This is a schematic structural diagram of a ceramic disc transport device for a polishing machine according to the present invention;

[0020] Figure 2 It is a schematic diagram of the structure of the driving assembly of the present invention;

[0021] Figure 3 It is a structural schematic diagram of the first handling hand assembly of the present invention;

[0022] Figure 4 It is a structural schematic diagram of the adsorption disk of the present invention;

[0023] Figure 5 It is a schematic diagram of the structure of placing the disc assembly of the present invention;

[0024] Figure 6 This is an in-situ schematic diagram of the first handling hand assembly and the second handling hand assembly of the present invention;

[0025] Figure 7 This is a schematic diagram of the tray-taking positions of the first handling hand assembly and the second handling hand assembly of the present invention;

[0026] Figure 8 This is a schematic diagram of the positions where the first handling hand assembly and the second handling hand assembly of the present invention have completed handling.

[0027] In the figure: 1. Driving component; 2. First handling component; 3. Second handling component; 4. Placing plate component; 5. Driving motor; 6. First transmission gear; 7. Support plate; 8. First rotating rod; 9. Second transmission gear; 10. Third transmission gear; 11. First lifting and adsorbing component; 12. Second rotating rod; 13. Electronic clutch; 14. Fourth transmission gear; 15. Second lifting and adsorbing component; 16. Swing arm; 17. Lifting structure; 18. Adsorbing disc; 19. Electric push rod; 20. Connecting column; 21. Insertion sleeve; 22. Fixed pin; 23. Disc body; 24. Rotating plate; 25. Turntable bearing; 26. Forward and reverse stepping motor; 27. Exhaust pipe; 28. Sealing ring; 29. First rotating bearing; 30. Second rotating bearing. Detailed implementation mode

[0028] Next, the technical solutions in the embodiments of the present invention will be clearly and completely described in conjunction with the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all the embodiments. The specific embodiments described herein are only used to explain the present invention, and are not used to limit the present invention. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present invention.

[0029] The present invention provides a Figures 1-5 polishing machine ceramic disc handling device as shown, including a driving component 1, a first handling component 2, a second handling component 3, and two groups of placing plate components 4 adapted to be used with the first handling component 2 and the second handling component 3. The placing plate component 4 includes a disc body 23, a rotating plate 24, a turntable bearing 25, and a forward and reverse stepping motor 26. The disc body 23 is set as a disc body with a U-shaped cross-section, and the turntable bearing 25 is embedded and fixed at the inner bottom of the disc body 23. The rotating plate 24 is installed at the upper end of the turntable bearing 25. The forward and reverse stepping motor 26 is fixed to the upper end of the disc body 23 through a fixing frame, and the output shaft end of the forward and reverse stepping motor 26 penetrates the bottom of the disc body 23 and is fixedly connected to the lower surface of the rotating plate 24;

[0030] Among them, a second rotating bearing 30 is embedded and fixed on the lower surface of the disc body 23, and the output shaft of the forward and reverse stepping motor 26 is fixedly inserted into the inner ring of the second rotating bearing 30;

[0031] The driving assembly 1 includes a driving motor 5 and a first transmission gear 6, the first transmission gear 6 is keyed to the output shaft end of the driving motor 5, two groups of placement plate assemblies 4 are symmetrically arranged, and a support plate 7 is arranged between the two groups of placement plate assemblies 4, and the driving motor 5 is fixedly installed on the lower end of the support plate 7 through a fixing frame. The model used for the driving motor 5 is 57BYG250H, and its parameters are: step angle is 1.8°±5%, torque is 2.8nm, current is 3A, voltage is DC24V, and the corresponding driver model is DM542, input voltage is DC20-50V, current is 4.2A, and pulse response frequency is 200KHz;

[0032] The first handling hand assembly 2 includes a first rotating rod 8, a second transmission gear 9, a third transmission gear 10 and a first lifting adsorption assembly 11. The first rotating rod 8 is rotatably mounted on the support plate 7, and the lower end of the first rotating rod 8 passes through the support plate 7 and is located at the lower end of the support plate 7. The second transmission gear 9 and the third transmission gear 10 are fixedly sleeved on the first rotating rod 8, and the second transmission gear 9 is meshed with the first transmission gear 6.

[0033] Among them, two sets of first rotating bearings 29 are embedded and fixed on the support plate 7, and the first rotating rod 8 and the second rotating rod 12 are respectively inserted into the inner rings of the two sets of first rotating bearings 29;

[0034] The second handling hand assembly 3 includes a second rotating rod 12, an electronic clutch 13, a fourth transmission gear 14, and a second lifting and adsorption assembly 15. The fourth transmission gear 14 is connected to the second rotating rod 12 through the electronic clutch 13, and the fourth transmission gear 14 is meshed with the third transmission gear 10. One end of the second rotating rod 12 passes through the support plate 7 and is connected to the second lifting and adsorption assembly 15. By connecting the fourth transmission gear 14 to the second rotating rod 12 through the electronic clutch 13, double-arm handling or single-arm handling can be selected according to actual use requirements in actual use, which has strong flexibility.

[0035] By using a driving motor 5 to drive the first handling hand assembly 2 and the second handling hand assembly 3 at the same time, and making the operation angles of the first handling hand assembly 2 and the second handling hand assembly 3 completely consistent, and adopting swing-type handling, the handling stroke is shortened, which not only improves the handling efficiency, but also uses the first handling hand assembly 2 and the second handling hand assembly 3 for handling at the same time, and can also enhance the balance during handling;

[0036] Both the first lifting and adsorbing component 11 and the second lifting and adsorbing component 15 include a swing arm 16, a lifting structure 17, and an adsorption disc 18. The two swing arms 16 are respectively fixedly installed at the upper ends of the first rotating rod 8 and the second rotating rod 12. The lifting structure 17 is fixedly installed on the swing arm 16, and the adsorption disc 18 is fixedly installed at one end of the lifting structure 17. Further, both the first lifting and adsorbing component 11 and the second lifting and adsorbing component 15 include a swing arm 16, a lifting structure 17, and an adsorption disc 18. By setting the two swing arms 16 to be the same, the movement speeds and movement strokes of the two arms are ensured to be consistent during handling, so as to achieve precise handling.

[0037] The lifting structure 17 includes an electric push rod 19 and a connecting column 20. The electric push rod 19 is fixedly installed at the upper end of the swing arm 16, and one end of the piston rod of the electric push rod 19 passes through the swing arm 16 and is fixedly connected to the connecting column 20. An insertion sleeve 21 is integrally formed at the upper end of the adsorption disc 18. One end of the connecting column 20 is inserted into the interior of the insertion sleeve 21, and the connecting column 20 is fixedly connected to the insertion sleeve 21 through a fixing pin 22. The adsorption disc 18 is set as a hollow adsorption disc, and the hollow part of the adsorption disc 18 is communicated with an air extraction pipe 27. One end of the air extraction pipe 27 passes through the swing arm 16 and is located on the upper end surface of the swing arm 16. A ring groove with a semi-circular cross-section is opened at the bottom of the adsorption disc 18, and a sealing ring 28 is fixedly bonded inside the ring groove. The sealing ring 28 is set as an elastic rubber sealing ring. The model of the electric push rod 19 is ANT-52, and its corresponding parameters are: load 0 - 6000N, speed 3 - 55mm, self-locking force twice the load, stroke 0 - 400mm, shortest installation distance 305 + S, voltage 24V.

[0038] Among them, the fourth transmission gear 14 is set the same as the third transmission gear 10, and the diameter ratio of the second transmission gear 9 to the first transmission gear 6 is 2:3.

[0039] As an optional solution of the present invention: The above-mentioned drive motor 5, forward and reverse stepping motor 26, electronic clutch 13, and electric push rod 19 are all controlled for the rotation direction and rotation stroke through a servo controller or an encoder, so as to realize automatic handling of this ceramic disc handling device.

[0040] When this ceramic disc handling device is specifically implemented:

[0041] As Figure 6 shown, before the handling starts, the first handling hand component 2 is at the H1 position, and the second handling hand component 3 is at the H2 position; As Figure 7As shown, at the beginning of the handling, the driving motor 5 drives the first handling hand assembly 2 to rotate counterclockwise first. The first handling hand assembly 2 rotates clockwise from H1 to position A1, and the second handling hand assembly 3 rotates counterclockwise synchronously from H2 to position A2. Then the lifting structure 17 drives the first handling hand assembly 2 and the second handling hand assembly 3 to descend until the suction cup 18 contacts the ceramic plate, and the vacuum is turned on so that the suction cup 18 tightly sucks the ceramic plate. Subsequently, the lifting structure 17 drives the first handling hand assembly 2 and the second handling hand assembly 3 to ascend, so that the ceramic plate is separated from the polishing machine disk surface by 5 - 15 cm to a suitable height for handling.

[0042] As Figure 8 As shown, after the suction cup 18 ascends to the in - place position, the driving motor 5 rotates clockwise. The first handling hand assembly 2 rotates counterclockwise from position H1, and the second handling hand assembly 3 rotates clockwise from position H2, and they reach positions B4 and B3 synchronously. Subsequently, the lifting structure 17 drives the first handling hand assembly 2 and the second handling hand assembly 3 to descend, so that the ceramic plate descends to the polishing machine disk surface, and the vacuum is released, so that the ceramic plate is separated from the suction cup 18, completing the handling of 2 ceramic plates. Subsequently, the suction cup 18 ascends, and the driving motor 5 drives the first handling hand assembly 2 and the second handling hand assembly 3 to rotate counterclockwise. The first handling hand assembly 2 rotates clockwise from position H1 to position A1, and the second handling hand assembly 3 rotates counterclockwise synchronously from position H2 to position A2 until the handling of the next group of ceramic plates is completed.

[0043] Finally, it should be noted that the above are only the preferred embodiments of the present invention and are not used to limit the present invention. Although the present invention has been described in detail with reference to the foregoing embodiments, for those skilled in the art, they can still modify the technical solutions recorded in the foregoing embodiments, or perform equivalent replacements for some of the technical features. Any modifications, equivalent replacements, improvements, etc. made within the spirit and principle of the present invention shall be included within the protection scope of the present invention.

Claims

1. A ceramic disc handling device for a polishing machine, comprising a driving assembly (1), a first handling hand assembly (2), a second handling hand assembly (3), and two sets of placing disc assemblies (4) adapted to be used with the first handling hand assembly (2) and the second handling hand assembly (3), characterized in that: The driving component (1) includes a driving motor (5) and a first transmission gear (6). The first transmission gear (6) is key-connected to the output shaft end of the driving motor (5). There are two sets of the placing plate components (4) symmetrically arranged, and a support plate (7) is arranged between the two sets of the placing plate components (4). The driving motor (5) is fixedly installed at the lower end of the support plate (7) through a fixing frame; The first handling component (2) includes a first rotating rod (8), a second transmission gear (9), a third transmission gear (10) and a first lifting and adsorbing component (11). The first rotating rod (8) is rotatably installed on the support plate (7), and the lower end of the first rotating rod (8) penetrates through the support plate (7) and is located at the lower end of the support plate (7). The second transmission gear (9) and the third transmission gear (10) are fixedly sleeved on the first rotating rod (8), and the second transmission gear (9) meshes with the first transmission gear (6); The second handling component (3) includes a second rotating rod (12), an electronic clutch (13), a fourth transmission gear (14) and a second lifting and adsorbing component (15). The fourth transmission gear (14) is in transmission connection with the second rotating rod (12) through the electronic clutch (13), and the fourth transmission gear (14) meshes with the third transmission gear (10). One end of the second rotating rod (12) penetrates through the support plate (7) and is connected to the second lifting and adsorbing component (15); Both the first lifting and adsorbing component (11) and the second lifting and adsorbing component (15) include swing arms (16), lifting structures (17) and suction cups (18). The two sets of swing arms (16) are respectively fixedly installed at the upper ends of the first rotating rod (8) and the second rotating rod (12). The lifting structure (17) is fixedly installed on the swing arm (16), and the suction cup (18) is fixedly installed at one end of the lifting structure (17). The two sets of swing arms (16) are arranged in the same way, and have the same movement speed and movement stroke; The suction cup (18) is provided as a hollow suction cup, and the hollow part of the suction cup (18) is communicated with an air extraction pipe (27). One end of the air extraction pipe (27) penetrates through the swing arm (16) and is located on the upper end surface of the swing arm (16); The placing plate component (4) includes a plate body (23), a rotating plate (24), a turntable bearing (25) and a forward and reverse stepping motor (26). The lifting structure (17) includes an electric push rod (19) and a connecting column (20). The driving motor (5), the forward and reverse stepping motor (26), the electronic clutch (13) and the electric push rod (19) are all controlled for the rotation direction and rotation stroke through a servo controller or an encoder, so as to realize the automatic handling of this ceramic plate handling device.

2. The ceramic disk handling device of a polishing machine according to claim 1, wherein: The electric push rod (19) is fixedly installed at the upper end of the swing arm (16), and one end of the piston rod of the electric push rod (19) penetrates through the swing arm (16) and is fixedly connected to the connecting column (20). An insertion sleeve (21) is integrally formed at the upper end of the suction cup (18). One end of the connecting column (20) is inserted into the interior of the insertion sleeve (21), and the connecting column (20) is fixedly connected to the insertion sleeve (21) through a fixing pin (22).

3. The ceramic disk handling device of a polishing machine according to claim 2, wherein: The disk body (23) is provided as a disk body with a U-shaped cross-section, and the rotary table bearing (25) is fixedly embedded at the inner bottom of the disk body (23). The rotating plate (24) is installed at the upper end of the rotary table bearing (25). The forward and reverse stepping motor (26) is fixed to the upper end of the disk body (23) through a fixing frame, and the output shaft end of the forward and reverse stepping motor (26) penetrates through the bottom of the disk body (23) and is fixedly connected to the lower surface of the rotating plate (24).

4. The ceramic disk handling device of a polishing machine according to claim 3, wherein: The fourth transmission gear (14) is arranged in the same way as the third transmission gear (10), and the diameter ratio of the second transmission gear (9) to the first transmission gear (6) is 2:

3.

5. The ceramic disk handling device of a polishing machine according to claim 4, wherein: A circular groove with a semicircular cross-section is formed at the bottom of the suction cup (18), and a sealing ring (28) is fixedly adhered inside the circular groove. The sealing ring (28) is provided as an elastic rubber sealing ring.

6. The ceramic disk handling device of a polishing machine according to claim 5, wherein: Two groups of first rotating bearings (29) are fixedly embedded on the support plate (7), and the first rotating rod (8) and the second rotating rod (12) are respectively inserted into the inner rings of the two groups of first rotating bearings (29).

7. A ceramic disk handling device for a polishing machine according to claim 6, characterized in that: A second rotating bearing (30) is fixedly embedded on the lower surface of the disk body (23), and the output shaft of the forward and reverse stepping motor (26) is fixedly inserted into the inner ring of the second rotating bearing (30).

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